CN102359949A - High resolution micro infrared spectrometer based on MEMS scanning micromirror - Google Patents
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Abstract
The invention discloses a high resolution micro infrared spectrometer based on an MEMS scanning micromirror. The high resolution micro infrared spectrometer comprises a fiber connecting device, an incident slit, a collimation reflector, a scanning micromirror, a blazed grating, a spherical surface focusing reflectors, an emitting slit and a high sensitivity unit infrared detector. A novel optical path structure is employed by the high resolution micro infrared spectrometer: an external optical signal to be measured is coupled into a spectrometer through the fiber and the slit and collimated by the spherical surface collimation reflector; the MEMS scanning micromirror and a diffraction grating are utilized to substitute a scanning raster in a traditional scanning raster spectrometer to realize optical splitting and spectrum scanning functions together; during torsional pendulum of the micromirror surface, a combination of two spherical surface reflectors carries out focusing and imaging on the spectrum, so that light with different wavelengths is focused and imaged and irradiates on the detector through the emitting slit successively to realize continuous detection of spectrum. The spectrometer based on the MEMS scanning micromirror provided by the invention has advantages of small volume, wide spectrum measurement scope, high resolution and low cost, etc.
Description
Technical field
The invention belongs to the spectral measurement methods field, relate to a kind of miniature infrared spectrometer based on MEMS scanning micro-mirror technology.
Background technology
The infrared spectrum instrument is one of of paramount importance optical instrument.It is applied optics technology and spectrum detection technique principle; To the structure of material with form the basic equipment of observing, analyzing and handle; Advantage such as have the analysis precision height, measurement range is big, measuring speed is fast and amount of samples is few; Being widely used in departments such as metallurgy, geology, petrochemical complex, medical and health, environmental protection, also is Aero-Space, universe exploration, resource and the requisite instrument of hydrology exploration, and having very, important use is worth and vast market prospect.Yet, because the laboratory is relatively harsher with the Fourier transformation infrared spectrometer service condition, and comparatively expensive based on the employed linear array detector price of the infrared spectrometer of line array CCD detector technology.So, low-cost, high performance new infrared spectrometer-become hot research in recent years and main flow trend based on the technological spectrometer of MEMS (microelectromechanical systems).
Along with the progress of science and technology, MEMS technology and Micrometer-Nanometer Processing Technology obtain fast development.Based on the various devices of MEMS technology because have that volume is little, low in energy consumption, highly sensitive, good reproducibility, stable processing technology, advantage such as with low cost, be used for high-precision technical field in a large number.Adopt the novel spectral instrument of MEMS technology development to become the main developing direction of current spectrometer.
Abroad, Chemnitz, Germany university microtechnology center and Fraunhofer nanoelectronic Research Institute based on the infrared spectrum (http://www.izm.fraunhofer.de/EN/fue-ergebnisse/wafer_processing/archiv_2006/MOEMSSpektromete r.jsp/http://www.zfm.tu-che-mnitz. de/mems_spectrometer.php) of MEMS scanning micro-mirror.This spectrometer utilizes the grating of MEMS scanning micro-mirror and fixed placement to unite and realizes the beam split function, replaces raster role in traditional raster spectrometer.In the course of the work; MEMS scanning micro-mirror minute surface is done periodic wobble continuously; The parallel beam of micro mirror direct reflection is incided on the grating with different angles, and through optical grating diffraction beam split, spherical reflector focal imaging, the light of different wave length gets in the detector successively.Adopt the spectrometer of this optical texture, in the course of the work, because the swing of scanning micro-mirror minute surface, the irradiation position of parallel beam on grating that reflects through micromirror will produce mobile.Like this; The light of different wave length is through grating beam splitting; And when inciding on the concave mirror with identical angle of diffraction successively; Incoming position on concave mirror also will produce corresponding move, and the focusing of light behind the concave mirror focal imaging that makes different wave length produces moving by a relatively large margin as the plane, has had a strong impact on the spectral resolution of instrument.In order to remedy this defective, current such spectrometer adopts two detectors to carry out spectrographic detection, reducing the required amplitude of fluctuation of micro mirror, and reaches the purpose that improves instrumental resolution.
Domestic, refreshing this He Ye of Nanjing Ying Te etc. proposes a kind of micro spectrometer based on micro-electronic mechanical system technique (Chinese patent publication number 101021437A).The optical texture of this spectrometer has been cancelled collimating mirror, and light gets into spectrometer by the joints of optical fibre, entrance slit after after the scanning micro-mirror reflection, grating beam splitting, the light line focus focusing mirror imaging back of specific wavelength gets in the detector through slit.For spectrometer with this kind optical texture; Optical texture is comparatively succinct; But owing to there is not the collimation minute surface; Light presents divergent state always before focusing, thereby facula area is bigger when making illumination be mapped to the focussing plane catoptron, and the raising of the spectral resolution of this instrument has been caused certain limitation.At present, the said firm has developed this kind spectrometer model machine, and its wavelength coverage is 900 ~ 1900nm, spectral resolution ~ 16nm100 μ m core optical fibers.
Summary of the invention
The objective of the invention is to exist, propose a kind of microminiaturized infrared spectrometer to prior art.
Miniature infrared spectrometer provided by the invention is made up of optical fiber splicing device and/or entrance slit, collimating mirror, scanning micro-mirror, blazed grating, spherical surface focusing catoptron, exit slit and high sensitivity unit infrared eye.Optical fiber splicing device is placed on the front end of entrance slit; Entrance slit is near the focal plane of collimating mirror; In the parallel light path that collimating mirror reflects, scanning micro-mirror is set; And then in the reflected light path of scanning micro-mirror, blazed grating is set, a spherical surface focusing catoptron is set on the optical diffraction of blazed grating, and another spherical surface focusing catoptron is less than 90 ° of angles layouts with respect to last spherical surface focusing catoptron; On the focus point of back one spherical surface focusing catoptron, exit slit is set, arrangement unit infrared eye on the emitting light path of exit slit.
Light beam through the blazed grating beam split after the imaging of two spherical surface focusing focusing mirrors; And place exit slit near as the plane in the focus of assembling; High sensitivity unit infrared eye is placed in the behind of exit slit; Minute surface at scanning micro-mirror rocks in the process; The monochromatic light of different wave length successively with specific angle of diffraction after the imaging of optical grating diffraction, spherical surface focusing focusing mirror, incide on the unit infrared eye through exit slit, thereby the continuous sweep of monochromatic light on detector that realizes different wave length is surveyed.
Collimating mirror is the concave surface collimating mirror.
The present invention has adopted the optics beam splitting system of new construction; Utilize the combination of bispheric lens that spectrum is carried out focal imaging and the individual unit detector carries out spectrographic detection; Replace abroad with utilizing single spherical mirror to carry out the frame mode that focal imaging, two single-element detector carry out spectrographic detection in the quasi-instrument; Not only reduced the cost of the type spectrometer, and still can make the type spectrometer in wide spectral range, have higher spectrally resolved precision.
In addition; Optical texture of the present invention also is different from traditional raster scanning sub-ray spectrometer; Traditional raster scanning sub-ray spectrometer is to be installed in grating on the mechanical part, under the drive of mechanical part, realizes the monochromatic continuous probe of different wave length through rocking grating.Optical texture among the present invention is united the beam split of realization optics by MEMS scanning micro-mirror and blazed grating; The MEMS scanning micro-mirror carries out beam split reflexing to through the parallel beam behind the collimation on the blazed grating, in the swing process of scanning micro-mirror minute surface, realize the monochromatic continuous probe of different wave length.In addition, because the present invention adopted MEMS scanning micro-mirror device in optical system, the spectrometer that utilizes this kind optical texture to develop has that volume is little, compact conformation, advantage such as with low cost.
Scanning micro-mirror described in the present invention is a kind of micro optical element based on MEMS (microelectromechanical systems) technological development, its essence is the micro photo-electro-mechanical device with the parallel reflective mirror that can rock around a stationary shaft (semi-girder).At present, abroad, Germany not thinkling sound closes the micro mirror minute surface that expense research institute microtechnology center utilizes piezoelectric to develop and is of a size of Φ 3mm, about vibration frequency 200Hz, can realize the pivot angle amplitude more than ± 10 °; The micro mirror minute surface size that Japan Nippon Signal company utilizes electromagnetic drive mode to produce can reach 5mm * 6mm, and vibration frequency is about 540Hz, and the mechanical amplitude of fluctuation of minute surface can reach ± more than 15 °; Domestic, University Of Chongqing has developed at the micro-system center MEMS scanning micro-mirror that adopts electromagnetic drive mode, and about its vibration frequency 450Hz, minute surface is of a size of 5mm * 6mm.For above-mentioned micro mirror, reached the requirement of practicability level.Optical system among the present invention; Be to be positioned over micro mirror in the parallel light path behind the collimating mirror; Utilize micro mirror to reflex to parallel beam and carry out beam split on the blazed grating; In the instrument course of work, the monochromatic light that makes different wave length that continues to rock through micro mirror gets in the detector through exit slit successively, realizes that the continuous sweep of spectrum is surveyed.
Among the present invention, outside light signal to be measured, but both coupled into optical fibres reach optical fiber splicing device through optical fiber, get into instrument internal through entrance slit then, can directly be coupled into external optical signal in the spectrometer through entrance slit again.When getting into the communication media of spectral instrument inside to optical fiber as light signal, under the less situation of optical fiber core diameter, can save entrance slit, external optical signal directly is coupled into instrument internal by optical fiber splicing device.
Among the present invention, optical fiber splicing device is the FC fiber port connector of standard both, again the SMA fiber port connector of standard.
Among the present invention, when utilizing the joints of optical fibre, entrance slit will treat that spectrometer inside is introduced in photometry, can avoid the environment parasitic light to get into instrument internal.Additional slit is adjusted incident beam under the bigger situation of optical fiber core diameter, can improve the spectral resolution of instrument.
Advantage of the present invention:
1, adopt a pair of concave surface focusing mirror that spectrum is carried out focal imaging; Reduced the mobile range that spectrum is focused into image planes; Improved the optical resolution of this type of spectral instrument; Make it in the spectral range of broad, have higher spectral resolution, can be widely used in each spectral band, have tangible technical advantage.
2, adopt mode to substitute the mode that traditional stepper motor drives raster scanning, when having realized the miniaturization of instrument volume, make instrument have high precision, high stability, advantage such as portable based on the miniature planar scanning mirror of MEMS technology.
3, integrated, microminiaturized structural design has realized the modularization of infrared spectrum instrument and integrated, has not only reduced cost, also makes this instrument can be used as OEM and carries out secondary development and use.
This structure not only can be used near infrared spectral range, and can be used for the mid and far infrared spectral range, and can be used for other different spectrum search coverage according to concrete needs.
Description of drawings
Fig. 1 is a structure principle chart of the present invention:
1 is that optical fiber splicing device, 2 is entrance slit among the figure, and 3 is collimating mirror, and 4 is the MEMS scanning micro-mirror, and 5 is blazed grating, and 6,7 is the spherical surface focusing catoptron, and 8 is exit slit, and 9 is the unit infrared eye.
Embodiment:
As shown in Figure 1, this spectrometer is by optical fiber splicing device 1, entrance slit 2, and collimating mirror 3, based on the scanning micro-mirror 4 of MEMS technology, blazed grating 5, spherical surface focusing catoptron 6,7, exit slit 8 is formed with unit infrared eye 9.Having based on the technological scanning micro-mirror 4 of MEMS can be around the micro-optical component of fixed center axis periodic wobble minute surface.After optical signals optical fiber splicing device to be measured 1, entrance slit 2 get into the spectrometer inside; By concave surface collimating mirror 3 collimations is parallel beam; Reflex to based on the minute surface of the scanning micro-mirror 4 of the MEMS technology parallel beam after collimation and to carry out beam split on the diffraction grating 5; The light of a certain wavelength with specific angle of diffraction diffraction after before spherical surface focusing catoptron 6,7 focuses on exit slit 8, output to by exit slit 8 on the photosurface of unit infrared eye 9.During instrument work; Because MEMS micro mirror minute surface is done periodically torsionoscillation constantly; Mixed light beam in the spectrographic detection scope is after the diffraction grating beam split, and the monochromatic light of different wave length is successively with identical angle of diffraction, before spherical surface focusing catoptron 6,7 focuses on exit slit; Get into by exit slit on the photosurface of the detector of placing thereafter, realize the full spectral line continuous sweep of light signal to be measured.Then, detector is through Acquisition Circuit, and the spectral signal of the different wave length that continual handle collects is input to and carries out the spectroscopic data processing in the computing machine.
Claims (4)
1. high resolution micro infrared spectrometer based on the MEMS scanning micro-mirror, it is made up of optical fiber splicing device (1) and/or entrance slit (2), collimating mirror (3), scanning micro-mirror (4), blazed grating (5), spherical surface focusing catoptron, exit slit (8) and infrared eye; It is preceding that said optical fiber (1) is arranged on entrance slit (2); Entrance slit (2) is arranged near the focal plane of collimating mirror (3); In the parallel light path of collimating mirror (3) reflection, scanning micro-mirror (4) is set, blazed grating (5) is set in the reflected light path of scanning micro-mirror (4);
It is characterized in that: said spherical surface focusing catoptron adopts two, and said infrared eye adopts a unit infrared eye (9); A spherical surface focusing catoptron (6) is arranged on the optical diffraction of blazed grating (5); Another spherical surface focusing catoptron (7) is less than 90 ° of angles with respect to last spherical surface focusing catoptron (6) to be arranged; Exit slit (8) is set, arrangement unit infrared eye (9) on the emitting light path of exit slit (8) on the focus point of spherical surface focusing catoptron (7); Light beam through blazed grating (5) diffraction beam split after spherical surface focusing catoptron (6), (7) focal imaging and incide on the unit infrared eye (9) through exit slit (8).
2. according to the said miniature infrared spectrometer of claim 1, it is characterized in that: said scanning micro-mirror (4) be adopt the MEMS technology to make and have can be around the micro-optical component of fixed center axis periodic wobble minute surface.
3. according to claim 1 or 2 said miniature infrared spectrometers, it is characterized in that: said single-element detector (9) is highly sensitive non-refrigeration or refrigeration mode photodetector or optical waveguide detector.
4. according to the said miniature infrared spectrometer of claim 3, it is characterized in that: optical fiber splicing device is a FC fiber port connector, or SMA fiber port connector.
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| CN103344335A (en) * | 2013-06-18 | 2013-10-09 | 武汉大学 | Intermediate infrared spectrograph based on MEMS detector |
| CN104122206A (en) * | 2013-04-28 | 2014-10-29 | 西门子公司 | Light modulation device |
| CN104501953A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Staggered folding optical path structure of small-sized grating monochromator with high spectral resolution |
| CN104880433A (en) * | 2015-06-09 | 2015-09-02 | 河南理工大学 | High-resolution MEMS (micro-electromechanical system) micromirror infrared spectrometer based on off-axis parabolic reflector |
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| CN114062304A (en) * | 2021-08-04 | 2022-02-18 | 哈尔滨工业大学 | Miniature diffuse reflection spectrum measurement system based on smart phone |
| CN115290186A (en) * | 2022-07-20 | 2022-11-04 | 天津大学 | Narrow-band high-resolution miniature infrared spectrometer |
| CN115477278A (en) * | 2022-10-09 | 2022-12-16 | 安徽自贸区天地人车大数据科技有限公司 | Preparation method of electrostatic comb driven MEMS (micro-electromechanical system) micromirror, MEMS micromirror and spectrometer |
| CN115753654A (en) * | 2022-11-16 | 2023-03-07 | 重庆大学 | Portable spectrometer based on smart phone |
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