CN105890758A - Miniature Fourier infrared spectrograph adopting MEMS translational micro-mirror and MEMS torsional micro-mirror - Google Patents
Miniature Fourier infrared spectrograph adopting MEMS translational micro-mirror and MEMS torsional micro-mirror Download PDFInfo
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Abstract
The invention relates to a Fourier infrared spectrograph system integrating an MEMS translational micro-mirror and an MEMS torsional micro-mirror. The system includes two subsystems, namely, a main interferometer system and an auxiliary interferometer system; the main interferometer system and the auxiliary interferometer system share one translational micro-mirror; the torsional micro-mirror is of a torsion beam structure, is driven through an electrostatic or magnetic induction mode, and can achieve high-speed rotary swing with a frequency reaching tens of Hertz to several thousands of hertz, and a rotation angle reaching fifty degrees maximally; and the translational micro-mirror is of a spring vibration structure, can achieve translational movement with a translational movement frequency reaching more than 100 MHz and a translational movement range reaching more than 100 microns. These micro-mirrors have the characteristics such as being free of friction, high repetition, high stability and the like. Since the micro-mirrors are small in size, light in weight, and small in inertia and rotational inertia, the micro-mirrors have great shock resistance, so that the micro interferometers can be formed.
Description
Technical field
The present invention is a kind of miniature fourier infrared spectra measuring system using MEMS (MEMS) micro mirror, can apply to spectrum
The fields such as measurement, spectral instrument.
Technical background
Infrared spectrum is strong due to its characteristic, it is provided that the abundant information of the structure of matter, and some samples can be carried out Non-Destructive Testing, and can
Testing micro-example, therefore it is not only the powerful tool that the structure of matter is analyzed, and is also the effective ways of Analysis and Identification.Infrared spectrum skill
Art has in many fields such as Food Science and food safety, environment pollution detection, life sciences, agricultural sciences, petroleum geology exploration, material science
Extensively application.Fourier infrared spectrograph has measuring speed fast compared with traditional beam splitting type infrared spectrometer, and sensitivity advantages of higher is the suitableeest
Close and quickly analyze measurement.
Owing to various mineral are respectively provided with different spectral signatures in visible, near-infrared, mid-infrared, can be to ore deposit hence with spectroscopic analysis methods
Thing and rock are identified and content analysis.1 μm～5 mu m wavebands are extremely important, especially in space remote sensing field for mineral detection.Due to respectively
Planting rock forming mineral to there are differences on chemical composition and physical property, they are in visible ray, near-infrared and middle infrared wavelength scope (0.38～5.0 μm)
Reflectance spectrum distribution is different, in 0.4～1.3 μ m wavelength range the spectral signature of rock forming mineral mainly by their surface color, roughness and
Contained transition metal ions element is determined.The reflectance spectrum of 1.3～2.5 μm near infrared bands, is by OH-、H2O、CO3 2-Etc. anion
The molecular vibration of group causes, such as reflectance spectrum existing characteristics spectral absorbance bands at 2.30～2.35 μm of carbonate mineral.In 2.5～5 μm
Middle-infrared band reflectance spectrum reflects the silicate sturcture of some rack-like and island, if making full use of the mid-infrared spectral behavior of silicate, and can
The detection target that and near infrared spectrum visible with detection cannot complete: anorthite, olivine, quartz and alkali feldspar etc..Especially silicate is research
The important foundation data of planet Origin and evoluation, and carbonate, sulfate are existence and the significant datas of evolution of research water body.For soil surveying,
Two atmospheric window wave band (1～3 μm and 3～5 μm) no less importants.In sum, rock forming mineral is crossed over to the spectrum survey of 1～5 mu m wavebands
Amount, will make up the weak link that current instrument exists at 2.5～5 mu m wavebands due to the aspect reason such as detector, structure.
Mineral prospecting generally requires and completes at the scene, such as: ground observation, look for ore deposit, space and ASTEREX (such as lunar exploration, mars exploration)
Deng, instrumental working conditions is severe, it is desirable to instrument miniaturization, weight amount and meet portable while, possess good vibration resistance, anti-wide-angle is inclined
Tiltedly, environment resistant interference.Not only at mineral remote sensing, detection field, many fields such as current food safety, environmental conservation, military affairs, safety are required for
Sample is carried out Site Detection.Thus be accordingly used in the development of the portable Fourier infrared spectrograph at scene, equally provide the most effectively for these fields
Analysis survey tool, this quasi-instrument has the widest application foundation.
Owing to infrared spectrum instrument has the harsh requirement of comparison to working environment, the most most infrared spectrum analysiss are all entered in laboratory
OK.Infrared spectrometer is based on prism or diffraction grating in early days, simple in construction, stable performance, but the low weakness of detectivity hinders sending out of it
Exhibition, the dependence to highly-sensitive detector and the rigors to optical system become the bottleneck of this type of technology.In infrared spectrum develops, occur in that
Time-modulation type instrument and two kinds of interference spectroscopes of spatial modulation type instrument.Infrared fourier spectrogrph based on michelson interferometer is time-modulation
The typical case of type instrument, owing to not having slit to limit, its capacity usage ratio is big two orders of magnitude than light splitting type instrument, but but to micromirror movements during
Inclination or the index such as traversing propose very high request, make system stability be substantially reduced.It is steady that spatially modulated imaging interferometer has avoided accurate micromirror systems
A qualitative difficult problem, it is made up of several parts such as interferometer component, fourier mirror, cylindrical mirror, detector arrays.Interferometer, fourier mirror and cylindrical mirror structure
Become interferometer system, detector array obtains space interference striped, it is not necessary to any mobile parts can obtain spectral signal, owing to it is measured
Spectrum speed is fast, is therefore widely used in imaging spectral instrument.
Although there is the high-sensitivity characteristic interfering class spectral instrument, but spectral resolution being extremely difficult to the level of time-modulation type instrument.At present,
Occur in that multiple modified model spatial modulation and interference spectrogrph and the interference spectroscope of time-modulation mode.
Along with the development of MEMS technology, spectral measurement system uses MEMS micromirror replace the mechanical mechanism of motion micro mirror, have higher
System stability, detectivity and speed of detection, this quasi-instrument would is that an important development direction of portable fourier infrared instrument.
Summary of the invention
The problem present invention existed for background technology uses MEMS (MEMS) translation micro mirror 4 and MEMS torsion mirror 3 skill
The Miniature Fourier infrared spectra measuring system that art merges.
For solving above-mentioned technical problem, the present invention adopts the following technical scheme that
A kind of Fourier infrared spectrograph system having merged MEMS translation micro mirror and torsion mirror technology, dry including main interferometer and auxiliary
Two subsystems of interferometer system, main and auxiliary two interferometers share a translation micro mirror 4.
Aforementioned main interferometer includes the translation micro mirror 4 that infrared beam splitter the 1, first fixed mirror 2, torsion mirror 3 and auxiliary interferometer share,
And infrared first detector 5 of 1.5-3 μm mercury cadmium telluride, mercury cadmium telluride second detector 6 of 3-5 mu m waveband.
Incident light beam strikes is to after main interferometer, by directive the first fixed mirror 2 and translation micro mirror 4 respectively after infrared beam splitter 1, the most infrared
Light interferes after being reflected by the first fixed mirror 2 and translation micro mirror 4, interference signal directive torsion mirror 3, and torsion mirror 3 will by oscillating motion
In interfering beam directive the first detector 5 or the second detector 6 one.First detector 5 and the second detector 6 are respectively adopted wave band and are
1.5-3 μm, and the cadmium-telluride-mercury infrared detector of 3-5 mu m waveband, complete the independent interference pattern collection of two wave bands.
Auxiliary interferometer includes semiconductor laser light resource 7, laser beam splitter mirror the 8, second fixed mirror 9, translation micro mirror 4 (with auxiliary interferometer altogether
With), phase retarders 10, reflecting mirror the 11, the 3rd detector the 12, the 4th detector 13.
Auxiliary interferometer semiconductor laser is as light source, and laser passes through semi-transparent semi-reflecting lens, wherein the one of directive translation micro mirror 4 after being expanded
Road light beam has half light by phase delay device, postpones phase place 1/2 π, and additionally half light beam is emitted directly toward translation micro mirror 4, and two " half bundle " light are same
The light that second fixed mirror 9 returns produces interferes, and " half bundle " interferes light to be received by the 4th detector 13, and additionally " half bundle " (exists 1/2 π phase place
Postpone) interfere light to be received by the 3rd detector 12, the 4th detector 13 and interference fringe phase 1/2 π of the 3rd detector 12, thus two
Individual interferometric fringe signal, measures the direction of motion of micro mirror, and obtains the travel of micro mirror, has this interference pattern calibration obtaining main interferometer,
The spectroscopic data finally utilizing Fourier transformation method to obtain wide spectrum (only draws main interferometer and auxiliary interferometer simplified pinciple, reality in Fig. 1
In light path, other optical element such as the most multiple phase compensation sheets).
Torsion mirror 3 therein uses torsion beam structure, electrostatic or magnetic induction way to drive, it is possible to achieve high speed rotating swings, and frequency is from several
Ten hertz to several KHz, rotational angle reaches up to 50 degree.And translation micro mirror 4 therein uses spring vibration structure, it is possible to achieve micromirror
Translation, translation frequency reaches more than hundred hertz, and translation scope can reach more than hundred microns.These micro mirrors are respectively provided with without friction, high repetition, high
The features such as stability, owing to micromirror size is little, quality is little, and inertia and rotary inertia are little, so having fabulous shock resistance, it is possible to achieve miniature dry
Interferometer.
Accompanying drawing explanation
Fig. 1 is the master-auxiliary interferometer schematic diagram of instrument；
In figure: 1, infrared beam splitter；2, the first fixed mirror；3, torsion mirror；4, translation micro mirror；5, the first detector；6, second
Detector；7, semiconductor laser light resource；8, laser beam splitter mirror；9, the second fixed mirror；10, phase retarders；11, reflecting mirror；12,
Three detectors；13, the 4th detector.
Detailed description of the invention
Further illustrate technical scheme below in conjunction with the accompanying drawings.
The present invention utilizes the slight mirror of MEMS translation 4 to constitute miniature pair of Michelson interferometer structure as shown in Figure 1, uses MEMS to reverse
Micro mirror realizes detector conversion, and other optical element integrated constitutes microminiature spectrogrph.
As it is shown in figure 1, the left side of figure is main interferometer part, it is responsible for flashlight interferometry.Right side is auxiliary interferometer part, uses and partly leads
Volumetric laser measures as the standard interference of reference.The tow sides of translation micro mirror 4 are all coated with infrared reflection film, and main and auxiliary two interferometers share one
Micro mirror.Owing to have employed MEMS translation micro mirror 4 so that instrument has high scanning speed, considerably beyond the Fourier light of conventional mechanical micro mirror
Spectrometer.
As it is shown in figure 1, in main interferometer, utilize a MEMS torsion mirror 3 that detector is switched over.MEMS torsion mirror 3
Use magnetic induction type of drive, there is miniature small size, at high speed (hunting frequency can reach hundreds of hertz), without friction, high duplication and steady
Advantage qualitative, long-life.
In order to meet the measurement of near-infrared-mid-infrared subband (1.5-5 mu m waveband), use the infrared spy of mercury cadmium telluride of 2 independent wave bands
Survey device, the first detector 5 of 1.5-3 mu m waveband, and the second detector 6 of 3-5 mu m waveband to have combined.Infrared signal light is incident from left side,
By difference directive the first fixed mirror 2 and translation micro mirror 4 after infrared beam splitter 1, last interference signal directive torsion mirror 3, torsion mirror 3 leads to
Cross oscillating motion by interfering beam directive the first detector 5 or the second detector 6.First detector 5 and the second detector 6 are adopted respectively
It is 1.5-3 μm with wave band, and the cadmium-telluride-mercury infrared detector of 3-5 mu m waveband, complete the independent interferogram sampling of two wave bands.
Auxiliary interferometer semiconductor laser is as light source, and laser, is wherein penetrated by semi-transparent semi-reflecting lens by " slightly " light beam after expanding
Having half light by phase delay device to a road light beam of micro mirror, postpone phase place 1/2 π, additionally half light beam is emitted directly toward micro mirror, the two " half bundle "
Light produces with the light that fixed mirror returns interferes, and " half bundle " interferes light to be received by the 4th detector 13, and additionally " half bundle " (exists 1/2 π phase place to prolong
Late) light is interfered to be received by the 3rd detector 12, the 4th detector 13 and interference fringe phase 1/2 π of the 3rd detector 12, thus two
Interferometric fringe signal, according to the judgement that phase place is advanced, can measure the direction of motion of micro mirror, utilize simultaneously enumerator to two interference fringe countings,
The travel of micro mirror can be obtained, i.e. translation micro mirror 4 is carried out " definitely " calibration relative to the displacement of original position；It is same that " definitely " calibrates
Shi Liyong phase demodulation and segmentation technology obtain the sampling trigger signal being suitable for, and sample the first detector 5 in main interferometer or the second detector 6
Control, it is thus achieved that abundant sampling number, obtain interferogram.(Fig. 1 only draws main interferometer and auxiliary interferometer simplified pinciple, actual light path
In, other optical element such as the most multiple phase compensation sheets.)
Owing to there being the absolute calibration of auxiliary interferometer, can use during translation micro mirror 4 is by forward maximum displacement to negative sense maximum displacement
First detector 5 measures interferogram, and after translation micro mirror 4 reaches negative sense maximum displacement, torsion mirror 3 moves, and interfering beam is switched to second
Detector 6, and use the second detector 6 to measure interferogram during translation micro mirror 4 subsequently is by negative sense maximum displacement to forward maximum displacement,
So within an entire motion cycle of translation micro mirror 4, acquire the interferogram of 2 independent wave bands, obtain 2 independences by Fourier transform
The spectrogram of wave band.
Use standard blackbody source that spectral instrument carries out spectral intensity calibration, and calculate corresponding normalized parameter.There is normalized parameter,
In actual measurement work, just can realize the smooth of 2 independent band spectrums connect spectrum.
Owing to the natural frequency scope of galvanometer is about tens of to hundreds of hertz, in order to obtain stable vibrational state, use sinusoidal or square-wave voltage
Driving translation micro mirror 4 with the natural frequency of micro mirror, translation micro mirror 4 will do simple harmonic oscillation with its natural frequency.Micro mirror is in the motor process in a cycle
In, movement velocity is by sinusoidal rule change, and its largest motion speed is higher than mean motion speed.Need micro-to obtain distortionless interference signal
The sampling of thousands of interference light signals is completed in the mirror period of motion.
For making sampling process and Infrared Detectors response time (i.e. explorer response bandwidth, the cadmium-telluride-mercury infrared detector of employing of interference light signal
Response time is about 2 μ s) match, set up the governing equation of micromirror movements, then by the calibration output signal of auxiliary interferometer as the most anti-
Feedback signal, determines, by high-speed dsp, the driving voltage that translation micro mirror 4 is applied by subsequent time, thus realizes the approximation to translation micro mirror 4 at the uniform velocity
Drive and control, and speed is controlled in the range of being suitable for.
Owing to interferometer is small-sized, the base plate deformation that thermal expansion causes is serious on interferometer impact, so using the metal of low thermal coefficient of expansion
The optical flat of one uniformity of temperature profile of design is fixed thereon as interferometer base, all optical elements, and fixed form uses the pricker of heat conduction
Weldering or heat-conducting glue are bonding, simultaneously at optical flat bottom welding thermoelectric cooling module, by constant temperature control circuit, base plate carry out thermostatic control, maximum
Limit ground reduces due to the variations in temperature impact on spectrometer precision.Thermoelectric cooling module is welded on heat-conducting metal base plate, and heat-conducting metal base plate is except being responsible for
Outside vacuum seals, it is also responsible for deriving heat, and the electrode of photoelectric cell is derived vacuum chamber.
Claims (3)
1. merged a Fourier infrared spectrograph system for MEMS translation micro mirror and torsion mirror technology, it by infrared beam splitter (1),
One fixed mirror (2), torsion mirror (3), translation micro mirror (4), the first detector (5), the second detector (6), semiconductor laser light resource (7),
Laser beam splitter mirror (8), the second fixed mirror (9), phase retarders (10), reflecting mirror (11), the 3rd detector (12) the 4th detector (13)
Composition；Described spectrogrph includes main interferometer and two subsystems of auxiliary interferometer system, and main and auxiliary two interferometers share a translation micro mirror (4)；
It is characterized in that: in FTIR spectrum measurement system, use MEMS translation micro mirror and torsion mirror simultaneously.
Main interferometer subsystem in Fourier infrared spectrograph the most according to claim 1, by infrared beam splitter (1), the first fixed mirror (2),
The translation micro mirror (4) that torsion mirror (3) and auxiliary interferometer share, and infrared first detector of 1.5-3 μm mercury cadmium telluride (5), 3-5 μm ripple
Mercury cadmium telluride the second detector (6) composition of section；Incident light beam strikes, to after main interferometer, is distinguished directive first afterwards and is fixed by infrared beam splitter (1)
Mirror (2) and translation micro mirror (4), last infrared light interferes after being reflected by the first fixed mirror (2) and translation micro mirror (4), and interference signal is penetrated
To torsion mirror (3), torsion mirror (3) passes through oscillating motion by interfering beam directive the first detector (5) or the second detector (6)
One；It is 1.5-3 μm that first detector 5 and the second detector 6 are respectively adopted wave band, and the cadmium-telluride-mercury infrared detector of 3-5 mu m waveband, complete
Become the independent interference pattern collection of two wave bands；
It is characterized in that: main interferometer system is provided with double detector, the first detector (5) and the second detector (6), interference light signal
It is to realize detection conversion by MEMS torsion mirror.
3. according to the auxiliary interferometer system in the Fourier infrared spectrograph described in claim 1 and claim 2, by semiconductor laser light resource
(7), laser beam splitter mirror (8), the second fixed mirror (9), translation micro mirror (4), phase retarders (10), reflecting mirror (11), the 3rd detector
(12), the 4th detector (13) composition；Auxiliary interferometer semiconductor laser is as light source, and laser passes through semi-transparent semi-reflecting lens after being expanded,
Wherein a road light beam of directive translation micro mirror (4) has half light by phase delay device, postpones phase place 1/2 π, and additionally half light beam is emitted directly toward flat
Dynamic micro mirror (4), two " half bundle " light produce with the light that the second fixed mirror 9 returns and interfere, and " half bundle " interferes light to be connect by the 4th detector (13)
Receiving, additionally there is the interference light of 1/2 π Phase delay and received by the 3rd detector (12) in " half bundle ", the 4th detector (13) and the 3rd detector
(12) interference fringe phase 1/2 π, thus two interferometric fringe signals, measure the direction of motion of micro mirror, and obtain the motion road of micro mirror
Journey, has this interference pattern calibration obtaining main interferometer, finally utilizes Fourier transformation method to obtain the spectroscopic data of wide spectrum；
It is characterized in that, realize respectively after being separated in half by light beam by auxiliary interferometer interfering and detecting, the position to the translation micro mirror in main interferometer
Put and realize absolute calibration.
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