CN115290186A - Narrow-band high-resolution miniature infrared spectrometer - Google Patents
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
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Abstract
The invention relates to a narrow-band high-resolution miniature infrared spectrometer which is used for collecting spectral data of a detected infrared signal and comprises a slit (2), a reflective collimating mirror (3), a plane reflective blazed grating (4), a plane reflecting mirror (5), a reflective focusing mirror (6), a convex cylindrical lens (7), a linear array detector and a driving circuit (8), wherein the detected infrared signal is collimated and directionally bent by the collimating mirror (3) after passing through the slit (2); the plane reflection blazed grating (4) outputs reflection beams with different wavelengths at different diffraction angles; after the reflected light beams are reflected by the plane reflecting mirror (5), the reflected light beams with different wavelengths are respectively focused by the focusing mirror (6) and the convex cylindrical lens (7) and output to the linear array detector and a driving circuit (8); the linear array detector driving circuit (8) is used for collecting spectral data and sending the spectral data to a computer through the driving circuit.
Description
Technical Field
The invention relates to an infrared spectrometer technology, in particular to a narrow-band high-resolution miniature infrared spectrometer.
Background
Thickness measurement of submillimeter-scale materials is an important issue in the chip industry today. Most advanced chips or sensors are fabricated by depositing thin films on a sub-millimeter material as a substrate. Thickness uniformity and thickness itself in such devices are directly related to device performance, and thus real-time control of sub-millimeter material thickness is particularly important.
In submillimeter-level material thickness measurement, utilize the infrared light that the wave band is 1500 ~ 1600nm, build corresponding optical system, can realize from submillimeter-level to the quick measurement of the thickness on a large scale of micron level, and the device is simple, easily integrates. However, the measurement method is still deficient in the aspect of spectral data analysis at present, and an infrared spectrometer which has ultrahigh resolution in a required waveband, can perform real-time online analysis on spectral data, is small and portable, and can be integrated with a thickness measurement system is required.
The existing infrared spectrometer performs spectrum detection on a detection sample, and the following two methods are generally adopted: firstly, a spectrum data analysis module is arranged in the infrared spectrometer and can give a detection result in real time after collecting a spectrum signal, but the infrared spectrometer is large in size and inconvenient to carry by an operator, and a detection sample generally needs to be sent to a laboratory for spectrum detection; secondly, the infrared spectrometer only collects the spectrum signals, generates and stores the corresponding spectrum information graph, and an operator brings the infrared spectrometer stored with the spectrum information graph back to a laboratory for data analysis.
Disclosure of Invention
In view of this, the invention provides a narrow-band high-resolution micro infrared spectrometer which has a simple structure and a compact volume and is more suitable for real-time online measurement. The technical scheme is as follows:
a narrow-band high-resolution miniature infrared spectrometer is used for collecting spectral data of a detected infrared signal and comprises a slit (2), a reflective collimating mirror (3), a planar reflective blazed grating (4), a planar reflecting mirror (5), a reflective focusing mirror (6), a convex cylindrical lens (7), a linear array detector and a driving circuit (8), wherein the detected infrared signal is collimated and directionally bent by the collimating mirror (3) after passing through the slit (2); the plane reflection blazed grating (4) outputs reflected beams with different wavelengths at different diffraction angles; after the reflected light beams are reflected by the plane reflector (5), the reflected light beams with different wavelengths are respectively focused by the focusing mirror (6) and the convex cylindrical lens (7) and output to the linear array detector and the driving circuit (8); the linear array detector driving circuit (8) is used for collecting spectral data and sending the spectral data to a computer through the driving circuit.
Further, the slit (2) is a precision slit with a width not greater than 5 um.
Furthermore, the planar reflection blazed grating (4) is a planar reflection blazed grating with the grating line logarithm of 600/mm and the blazed wavelength of 1600 nm.
Furthermore, the reflective collimating mirror (3) is a concave reflecting mirror with the front surface curvature radius of-304.8 mm; the reflecting type focusing mirror (6) is selected to have the thickness of 6mm and the curvature radius of the front surface of-152.4 mm; the convex cylindrical lens (7) is a convex cylindrical lens with the front surface curvature radius of 0 and the rear surface curvature radius of 9.8 mm.
Furthermore, the normal of the front surface of the collimating mirror (3) has an inclination angle of-7.5 degrees relative to the incident light, and the distance from the normal to the plane reflection blazed grating (4) is 140mm; the inclination angle of the front surface normal of the plane reflection blazed grating (4) relative to the incident light is 0 degree; the normal of the front surface of the plane reflector (5) has an inclination angle of-23.4 degrees relative to the incident light; the inclination angle of the front normal of the focusing mirror (6) relative to the incident light is 20.1 degrees; the normal of the front surface of the convex cylindrical lens (7) is inclined at an angle of 0 DEG with respect to the incident light.
Further, the distance from the rear surface of the slit (3) to the front surface of the collimating mirror (3) is 151.1mm; (ii) a The distance from the front surface of the plane reflector (5) is 60mm; the distance from the front surface of the focusing mirror (6) is 70mm; the distance to the front surface of the convex cylindrical lens (7) is 66.4mm; the distance from the back surface to the linear array detector and the drive circuit (7) is 12.2mm.
Furthermore, the normal of the linear array detector and the driving circuit (8) has an inclination angle of-0.3 degrees relative to the incident light.
The narrow-band high-resolution miniature infrared spectrometer has the following advantages:
(1) The reflecting collimating mirror, the plane reflecting blazed grating, the plane reflecting mirror and the reflecting focusing mirror are adopted to carry out light path turning, the light path is folded while the light path is increased, and the compactness of the structure is ensured.
(2) The convex cylindrical lens is adopted to converge the light emitted by the reflective focusing mirror in the direction vertical to the paper surface, the trend of the light in the paper surface is not influenced, and the light spots of the light with the same wavelength on the linear array detector can be minimized by adjusting the specification and the position of the convex cylindrical lens, so that the resolution of the infrared spectrometer is improved.
Drawings
FIG. 1 is a schematic structural diagram of an infrared spectrometer in an embodiment of the invention;
FIG. 2 is a flow chart of design parameters of an infrared spectrometer according to an embodiment of the present invention.
Reference numerals:
1. the device comprises an infrared light signal source, 2, a slit, 3, a collimating mirror, 4, a plane reflection blazed grating, 5, a plane reflecting mirror, 6, a focusing mirror, 7, a convex cylindrical lens, 8, a linear array detector and a driving circuit.
Detailed Description
The invention provides a narrow-band high-resolution micro infrared spectrometer, which can realize the pixel resolution of 0.22nm in a required measurement band by accurately calculating the positions of all components in the spectrometer, has the micro specification of 160 multiplied by 100 multiplied by 40mm, is simpler in material requirements and operation process, and is more suitable for real-time online measurement.
The following detailed description of embodiments of the invention is provided in connection with the accompanying drawings. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Fig. 1 is a schematic structural diagram of a narrow-band high-resolution micro infrared spectrometer according to the present invention.
Wherein: the detected infrared light signal is an infrared light beam with the wavelength range of 1500-1600 nm; the slit 2 is selected from but not limited to a precision slit with the width of 5 um; the collimating mirror 3 is a concave reflecting mirror with the thickness of 6mm, the curvature radius of the front surface of-304.8 mm and the diameter of 25.4mm, and is selected from but not limited to a metal concave reflecting mirror; the planar reflection blazed grating 4 is selected from but not limited to a planar reflection blazed grating with the specification of 30 multiplied by 9.5mm, the linear logarithm of the grating is 600/mm, and the blazed wavelength is 1600 nm; the planar reflector 5 is a planar reflector with the thickness of 5mm and the diameter of 25mm, and is a metal planar reflector without limitation; the focusing mirror 6 is a concave reflector with the thickness of 6mm, the front surface curvature radius of-152.4 mm and the diameter of 25.4mm, and is selected from but not limited to a metal concave reflector; the convex cylindrical lens 7 is a convex cylindrical lens with the specification of 18 multiplied by 16 multiplied by 6.1mm, the front surface curvature radius of 0 and the rear surface curvature radius of 9.8 mm; the linear array detector and the drive circuit 8 are selected from, but not limited to, a linear array near-infrared image sensor with pixel size of 25 μm × 500 μm and resolution of 512 pixels and a drive circuit thereof.
The distance from the outlet of the infrared light signal source 1 to the front surface of the slit 2 is 8mm; the distance from the rear surface of the slit 2 to the front surface of the collimating mirror 3 is 151.1mm; the normal of the front surface of the collimating mirror 3 has an inclination angle of-7.5 degrees relative to the incident light, and the distance from the normal to the plane reflection blazed grating 4 is 140mm; the normal line of the front surface of the plane reflection blazed grating 4 has an inclination angle of 0 degree relative to the incident light, and the distance from the normal line to the front surface of the plane reflector 5 is 60mm; the normal of the front surface of the plane reflector 5 has an inclination angle of-23.4 degrees relative to the incident light, and the distance from the normal to the front surface of the focusing mirror 6 is 70mm; the inclination angle of the front normal of the focusing mirror 6 relative to the incident light is 20.1 degrees, and the distance from the front normal to the convex cylindrical lens 7 is 66.4mm; the normal of the front surface of the convex cylindrical lens 7 has an inclination angle of 0 DEG relative to the incident light, and the distance from the rear surface to the linear array detector and the driving circuit 8 is 12.2mm; the normal of the linear array detector and the drive circuit 8 has an inclination angle of-0.3 deg. with respect to the incident light.
Fig. 2 is a flow chart of the design of the structural parameters of the narrow-band high-resolution micro infrared spectrometer of the present invention.
In this embodiment, the cross asymmetric Czerny-Turner spectrometer optical system is used to describe the related infrared spectrometer model. In the optical path structure of the infrared spectrometer, parameters of each element are mutually constrained through geometric optics and an aberration theory, and each element needs to simultaneously satisfy a grating equation and a coma aberration elimination equation:
d(sin i-sinθ)＝mλ (1)
wherein i is the incident angle of light entering the grating, and theta is the reflection angle; d is a grating constant, d =1/n, and n is a grating line logarithm; m is the spectral order, and m =1; r is 1 ，R 2 The curvature radius of the collimating lens 3 and the curvature radius of the focusing lens 6 are respectively;
the included angles of the incident light and the emergent light of the collimating lens 3 and the focusing lens 6 are included.
Specific embodiments are described below:
the infrared light signal source 1 outputs an infrared light beam, and the collimation and the direction turning of the measuring light beam required by the system are realized by the collimating mirror 3 after passing through the slit 2; the plane reflection blazed grating 4 outputs reflection beams with different wavelengths at different diffraction angles; after the light beam is reflected by the plane mirror 5, the reflected light beams with different wavelengths are respectively focused by the focusing mirror 6 and the convex cylindrical lens 7 and output to the linear array detector and the driving circuit 8; the linear array detector and the drive circuit 8 collect spectrum data and send the spectrum data to the computer through the drive circuit.
In the infrared spectrometer in the embodiment, the plane mirror 5 is adopted to perform light path turning, the light path between the plane reflection blazed grating 4 and the focusing mirror 6 is increased, the resolution of the infrared spectrometer is improved, and meanwhile, the light path is folded, so that the compactness of the structure is ensured.
In the infrared spectrometer in this embodiment, the convex cylindrical lens 7 is used to converge the light emitted from the focusing lens 6 in the direction perpendicular to the paper surface, and the direction of the light in the paper surface is not affected. By adjusting the specification and the position of the convex cylindrical lens 7, light spots of light with the same wavelength appearing on the linear array detector can be minimized, so that the resolution of the infrared spectrometer is improved.
In conclusion, the infrared spectrum measurement of the submillimeter-level thickness measurement system can be realized. According to the invention, the resolution of the infrared spectrometer in a required measurement waveband can be optimized to the maximum extent by accurately calculating the positions of all components in the infrared spectrometer, and the pixel resolution of 0.22nm is achieved; the components with miniature specifications are adopted, the positions among the components are compact, the space of the whole structure is effectively compressed, the specification of the infrared spectrometer is limited to 160 multiplied by 100 multiplied by 40mm, and the miniaturization of the infrared spectrometer is realized; the components are selected from simple reflectors, lenses, gratings and the like, and the material requirement is simple; the light output by the submillimeter-level thickness measuring system is used as a light source and is directly connected into the infrared spectrometer, so that real-time spectral information can be obtained, the operation process is simplified, and the method is more suitable for real-time online measurement.
It is also noted that, unless otherwise indicated, the numerical parameters set forth in this specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present disclosure. In particular, all numbers expressing quantities of ingredients, reaction conditions, and so forth used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the invention and aiding in the understanding of one or more of the various inventive aspects. However, the method of the invention should not be construed to reflect the intent: that the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing inventive embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
The objects, technical solutions and advantages of the present invention have been described in further detail, and it should be understood that the above-mentioned are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like within the spirit and principle of the present invention and in combination with the prior art in the field should be included in the protection scope of the present invention.
Claims (7)
1. A narrow-band high-resolution micro infrared spectrometer is used for collecting spectral data of a detected infrared signal and is characterized by comprising a slit (2), a reflective collimating mirror (3), a plane reflective blazed grating (4), a plane reflecting mirror (5), a reflective focusing mirror (6), a convex cylindrical lens (7), a linear array detector and a driving circuit (8), wherein the detected infrared signal is collimated and directionally bent by the collimating mirror (3) after passing through the slit (2); the plane reflection blazed grating (4) outputs reflected beams with different wavelengths at different diffraction angles; after the reflected light beams are reflected by the plane reflecting mirror (5), the reflected light beams with different wavelengths are respectively focused by the focusing mirror (6) and the convex cylindrical lens (7) and output to the linear array detector and a driving circuit (8); the linear array detector driving circuit (8) is used for collecting spectral data and sending the spectral data to a computer through the driving circuit.
2. The narrow-band high-resolution micro infrared spectrometer according to claim 1, wherein the slit (2) is a precision slit having a width of not more than 5 um.
3. The narrow-band high-resolution micro infrared spectrometer according to claim 1, characterized in that the planar reflective blazed grating (4) is a planar reflective blazed grating with a blaze wavelength of 1600nm and a grating line logarithm of 600/mm.
4. The narrow-band high-resolution micro infrared spectrometer according to claim 1, wherein the reflective collimating mirror (3) is a concave mirror with a front surface curvature radius of-304.8 mm; the reflective focusing mirror (6) is selected to be 6mm thick, and the curvature radius of the front surface is-152.4 mm; the convex cylindrical lens (7) is a convex cylindrical lens with the front surface curvature radius of 0 and the rear surface curvature radius of 9.8 mm.
5. The narrow-band high-resolution micro infrared spectrometer according to claim 5, characterized in that the front surface normal of the collimating mirror (3) is inclined at an angle of-7.5 ° with respect to the incident light, and the distance to the planar reflective blazed grating (4) is 140mm; the inclination angle of the front surface normal of the plane reflection blazed grating (4) relative to the incident light is 0 degree; the normal of the front surface of the plane reflector (5) has an inclination angle of-23.4 degrees relative to the incident light; the inclination angle of the front normal of the focusing mirror (6) relative to the incident light is 20.1 degrees; the normal of the front surface of the convex cylindrical lens (7) is inclined at an angle of 0 DEG with respect to the incident light.
6. The narrow-band high-resolution micro infrared spectrometer according to claim 6, wherein the distance from the rear surface of the slit (3) to the front surface of the collimator lens (3) is 151.1mm; (ii) a The distance from the front surface of the plane reflector (5) is 60mm; the distance from the front surface of the focusing mirror (6) is 70mm; the distance to the front surface of the convex cylindrical lens (7) is 66.4mm; the distance from the back surface to the linear array detector and the drive circuit (7) is 12.2mm.
7. The narrow-band high-resolution micro infrared spectrometer according to claim 1, wherein the normal of the line detector and the driving circuit (8) is inclined at an angle of-0.3 ° with respect to the incident light.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN118209517A (en) * | 2024-03-26 | 2024-06-18 | 中国科学院合肥物质科学研究院 | Compact visible near infrared band spectrum detection device |
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