CN103335987B - Fourier spectrometer based on MEMS - Google Patents
Fourier spectrometer based on MEMS Download PDFInfo
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- CN103335987B CN103335987B CN201310263665.7A CN201310263665A CN103335987B CN 103335987 B CN103335987 B CN 103335987B CN 201310263665 A CN201310263665 A CN 201310263665A CN 103335987 B CN103335987 B CN 103335987B
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Abstract
The invention discloses a kind of Fourier spectrometer based on MEMS, including the first LASER Light Source, the first collimating lens, collecting lens, sample cell, the laser that described first LASER Light Source sends collimates through the first collimating lens, concentrated lens are irradiated on the sample in sample cell after assembling, sample excitation light is produced through sample reflection, also include the first reflecting mirror, sample excitation light is after the first reflecting mirror is collected, laser and sample excitation light are irradiated on the sample in sample cell after the first reflecting mirror reflection again, produce sample excitation light.Should be conducive to collecting sample excitation light by Fourier spectrometer based on MEMS, increase laser and irradiate the number of times of sample, improve the intensity of sample excitation light.
Description
Technical field
The invention belongs to spectrogrph technical field, relate to a kind of Fourier spectrum based on MEMS
Instrument.
Background technology
Spectral instrument is to analyze material constituent and the powerful tool of structure, can carry out sample
Qualitative and quantitative analysis, be widely used in medication chemistry, Di Kuang, oil, coal, environmental protection, customs,
The fields such as Gemstone Identification, criminal investigation qualification, and these fields and the on-line real time monitoring of industry and portable etc.
Require to promote the development of spectral instrument miniaturization, and have wide application space.But conventional Fourier
Transform spectrometer is bulky, expensive, is unfavorable for the universal of product.
In recent years, the progress of miniaturization spectrogrph was very fast, and existing micro spectrometer is the biggest
Majority still uses classical spectrogrph principle, size limit luminous flux due to entrance slit aperture and diaphragm
And causing efficiency degradation, the analysis to some small-signals is totally unfavorable.Common is former based on modulation
The miniaturization spectrogrph of reason is mainly received system by colimated light system, beam splitting system and detection and forms；Light splitting system
System includes two reflecting mirrors on beam splitter and two arms of beam splitter, and one of them reflecting mirror is index glass, separately
One reflecting mirror is fixed mirror；Described detection receives system and includes collecting lens group and planar array detector group
Become.This spectrogrph uses time-modulation mode to realize the modulation of optical signal, in detection system receiving area
Sequentially form multiple ranged interference striped；Index glass as reflecting mirror needs a set of high-precision drivetrain
System, repeatability and the reliability of this system be difficult to ensure that, it is poor to measure real-time, the machine of this kind of spectrogrph
Structure is more complicated, and volume is bigger.
Summary of the invention
It is an object of the invention to propose one be conducive to collecting sample excitation light, increase laser and irradiate sample
Number of times, improve the Fourier spectrometer based on MEMS of intensity of sample excitation light.
For reaching this purpose, the present invention by the following technical solutions:
A kind of Fourier spectrometer based on MEMS, including the first LASER Light Source, the first collimation thoroughly
Mirror, collecting lens, sample cell, the laser that described first LASER Light Source sends collimates through the first collimating lens,
Concentrated lens are irradiated on the sample in sample cell after assembling, and produce sample excitation light through sample reflection,
Also include the first reflecting mirror, sample excitation light through first reflecting mirror collect after, laser and sample excitation light warp
Again it is irradiated on the sample in sample cell after first reflecting mirror reflection, produces sample excitation light.
Wherein, also include interference system, the 3rd LASER Light Source and be arranged at the first collimating lens participant
The first spectroscope between poly-lens, described interference system includes cube beamsplitter, fixed mirror, index glass,
Being provided with the 4th spectroscope between 3rd LASER Light Source and the first spectroscope, what the 3rd LASER Light Source sent swashs
Light is divided into two bundles through the 4th spectroscope, and the most a branch of through the first spectroscope entrance interference system, sample reflects
After the concentrated collimated of sample excitation light produced, enter interference system through the first dichroic mirror, swash
Light and sample excitation light are respectively divided into two bundles through cube beamsplitter, and a branch of sample excitation light and beam of laser enter
Being mapped to fixed mirror, another bundle sample excitation light and another bundle laser light incident are to index glass, and two restraint sample excitation light
Incide after fixed mirror reflects with index glass respectively with two bundle laser and on cube beamsplitter, obtain sample excitation
Light and the interference signal of laser.
Wherein, interference system and be arranged between the first collimating lens and collecting lens is also included
One spectroscope, described interference system includes cube beamsplitter, fixed mirror, index glass, laser and sample excitation
Light, after collecting lens collimates, enters interference system, laser and sample excitation through the first dichroic mirror
Light is respectively divided into two bundles through cube beamsplitter, and a branch of sample excitation light and beam of laser incide fixed mirror,
Another bundle sample excitation light and another bundle laser light incident are to index glass, and two bundle sample excitation light and two bundle laser divide
Do not incide after fixed mirror reflects with index glass and on cube beamsplitter, obtain the dry of sample excitation light and laser
Relate to signal.
Wherein, also include interference system and be positioned at sample cell side and be vertically arranged with the first reflecting mirror
The 3rd reflecting mirror, described interference system includes cube beamsplitter, fixed mirror, index glass, and laser is through the 3rd
Reflecting mirror and the first reflecting mirror are irradiated on sample after jointly reflecting, and produce sample excitation through sample reflection
Light, sample excitation light and laser enter interference system, through cube beamsplitter by sample excitation light and laser light
Bundle is respectively divided into two bundles, the light beam of sample excitation light and the light beam of laser and incides fixed mirror, sample
The another light beam of exciting light and the another light beam of laser incide index glass, and two bundle sample excitation light and two bundles swash
Light light beam incide after fixed mirror and index glass reflect respectively obtain on cube beamsplitter sample excitation light and
The interference signal of laser.
Wherein, described index glass is MEMS micromirror；Described fixed mirror is plane mirror or MEMS micromirror；
Described fixed mirror and index glass are used interchangeably；When described fixed mirror uses MEMS micromirror, its minute surface passes through
Produce displacement, carry out phase-modulation.
Wherein, also include feedback system, described feedback system include the second illuminator, the second spectroscope with
And 4 quadrant detector, the laser that described 3rd LASER Light Source sends is divided into two bundles through the 4th spectroscope, and one
Shu Jiguang enters interference system through the first spectroscope, and another beam of laser is through the second illuminator, the second spectroscope
It is irradiated to index glass after reflection, after index glass reflects, is irradiated to 4 quadrant detector, visit by analyzing four-quadrant
The change surveying the facula position on device judges the deflection of index glass, and utilizes MEMS Control System to adjust
The motion of index glass so that it is move all along optical axis direction, it is achieved the feedback control of index glass.
Wherein, also include that feedback system, described feedback system include the second LASER Light Source, the second spectroscope
And 4 quadrant detector, the light beam that the second LASER Light Source sends is irradiated to move after the second dichroic mirror
Mirror, is irradiated to 4 quadrant detector after index glass reflects, by analyzing the hot spot position on 4 quadrant detector
The change put is to judge the deflection of index glass, and utilizes MEMS Control System to adjust the motion of index glass, makes
It moves all along optical axis direction, it is achieved the feedback control of index glass.
Wherein, also include that feedback system, described feedback system include the second spectroscope and Quadrant detector
Device, is provided with the 3rd spectroscope, the first LASER Light Source between described first collimating lens and the first spectroscope
The laser sent is divided into two-beam through the 3rd spectroscope, the most a branch of is irradiated to sample through the first spectroscope
Pond, another beam of laser is irradiated to index glass after the second dichroic mirror, is irradiated to four-quadrant after index glass reflects
Limit detector, judges the deflection of index glass by analyzing the change of the facula position on 4 quadrant detector,
And utilize MEMS Control System to adjust the motion of index glass so that it is and move all along optical axis direction, real
The feedback control of existing index glass.
Wherein, also including that feedback system, described feedback system include 4 quadrant detector, laser is through index glass
After being reflected back cube beamsplitter, a portion light beam enters 4 quadrant detector, by analyzing four-quadrant
The change of the facula position on detector judges the deflection of index glass, and utilizes MEMS Control System to adjust
The motion of whole index glass so that it is move all along optical axis direction, it is achieved the feedback control of index glass.
Wherein, also include detect reception system, described detection receive system include dichroic mirror, first fall into
Ripple optical filter, the first detector, the second detector, signal processing module, sample laser interference light path and
The interfering beam of laser interference light path separates through dichroic mirror, wherein, and sample excitation interference of light light beam warp
Being received by the first detector after first notch filtering light sheet, the interfering beam of laser is received by the second detector,
The signal that first detector and the second detector receive processes through signal processing module, obtains the spectrum of sample
Figure.
Wherein, the second notch filtering light sheet it is additionally provided with between described first spectroscope and interference system.
Wherein, the second collimating lens it is additionally provided with between described sample cell and interference system.
The invention have the benefit that present invention Fourier spectrometer based on MEMS is by the
The laser that one LASER Light Source sends, after the sample of sample cell reflects, increases by the first reflecting mirror for collecting sample
The sample excitation light that product produce, and the laser through the first reflecting mirror is reflexed in sample cell further
On sample, again reflect generation sample excitation light through sample, can effectively utilize laser, be conducive to collecting sample
Product exciting light, increases laser and irradiates the number of times of sample, improve the intensity of sample excitation light, make detector connect
The signal of the sample excitation light received strengthens, so that the spectral information arrived is more accurate.Should be based on micro-
Index glass in the Fourier spectrometer of Mechatronic Systems and fixed mirror are MEMS micromirror so that spectrogrph energy
Enough motions accurately controlling MEMS micromirror, improve repeatability and the reliability of motion；Meanwhile, utilize
MEMS micromirror volume is little, lightweight, it is not necessary to extra driving controls device, easy to carry, permissible
Realize the miniaturization of spectrogrph.Fourier spectrometer based on MEMS by arranging feedback system,
Index glass and fixed mirror is made to be capable of from dynamic(al) correction in the course of the work, it addition, this feedback system is at index glass
Feedback made above, utilize 4 quadrant detector to receive the light beam that returns of index glass direct reflection, pass through hot spot
Correcting the deflection of MEMS index glass minute surface, can reduce the difficulty of MEMS package, feedback is more direct,
Feedback accuracy can be improved.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the Fourier spectrometer mechanism of the first embodiment in the present invention；
Fig. 2 is the schematic diagram of the Fourier spectrometer mechanism of the second embodiment in the present invention；
Fig. 3 is the schematic diagram of the Fourier spectrometer mechanism of the 3rd embodiment in the present invention；
Fig. 4 is the schematic diagram of the Fourier spectrometer mechanism of the 4th embodiment in the present invention；
Fig. 5 is the schematic diagram of the Fourier spectrometer mechanism of the 5th embodiment in the present invention；
Fig. 6 is the most vertical big displacement electric heating MEMS structure schematic diagram in the present invention.
In figure: 1, the first LASER Light Source；2, the first collimating lens；3, the first spectroscope；4, meeting
Poly-lens；5, sample cell；6, the first reflecting mirror；7, cube beamsplitter；8, MEMS fixes
Mirror；9, MEMS index glass；10, dichroic mirror；11, the first notch filtering light sheet；12, the first detection
Device；13, the second detector；14, signal processing module；15, the second LASER Light Source；16, second
Spectroscope；17,4 quadrant detector；18, the 3rd spectroscope；19, the 3rd LASER Light Source；20、
4th spectroscope；21, the second notch filtering light sheet；22, the second reflecting mirror；23, the 3rd reflecting mirror；24、
Second collimating lens；25, minute surface；26, the 3rd bimorph；27, the second tie-beam；28,
Two bimorphs；29, the first tie-beam；30, the first bimorph；31, pedestal.
Detailed description of the invention
Further illustrate technical scheme below in conjunction with the accompanying drawings and by detailed description of the invention.
As Fig. 1 is to shown in 5, and a kind of Fourier spectrometer based on MEMS, including the first laser
Light source the 1, first collimating lens 2, collecting lens 4, sample cell 5, what the first LASER Light Source 1 sent swashs
Light collimates through the first collimating lens 2, and concentrated lens 4 are irradiated on the sample in sample cell 5 after assembling,
Produce sample excitation light through sample reflection, also should include first by Fourier spectrometer based on MEMS
Reflecting mirror 6, sample excitation light is after the first reflecting mirror 6 is collected, and laser and sample excitation light are anti-through first
Again it is irradiated on the sample in sample cell 5 after penetrating mirror 6 reflection, produces sample excitation light.Base of the present invention
In the Fourier spectrometer of MEMS by the laser that sends at the first LASER Light Source 1 through sample cell 5
Sample reflection after, increase by the first reflecting mirror 6 for collecting the sample excitation light that sample produces, and will be through
The laser crossing the first reflecting mirror 6 reflexes on the sample in sample cell 5 further, through sample secondary reflection again
Produce sample excitation light, can effectively utilize laser, be conducive to collecting sample excitation light, increase laser and irradiate
The number of times of sample, improves the intensity of sample excitation light, makes the signal of the sample excitation light that detector receives
Strengthen, so that the spectral information arrived is more accurate.
As it is shown in figure 1, as the first preferred implementation of the present invention, should be based on MEMS
Fourier spectrometer also includes interference system, the 3rd LASER Light Source 19 and is arranged at the first collimating lens
The first spectroscope 3 between 2 and collecting lens 4, interference system include cube beamsplitter 7, fixed mirror 8,
Index glass 9, is provided with the 4th spectroscope 20 between the 3rd LASER Light Source 19 and the first spectroscope 3, and the 3rd
The laser that LASER Light Source 19 sends is divided into two bundles through the 4th spectroscope 20, the most a branch of through the first spectroscope
3 enter interference system, after sample excitation light concentrated lens 4 collimation that sample reflection produces, through first
Spectroscope 3 is reflected into interference system, and laser and sample excitation light are respectively divided into two through cube beamsplitter 7
Bundle, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another
Bundle laser light incident is to index glass 9, and two bundle sample excitation light and two restraint laser respectively through fixed mirror 8 and index glass 9
The interference signal obtaining sample excitation light and laser on cube beamsplitter 7 is incided after reflection.In the present invention
In, it is additionally provided with the second notch filtering light sheet 21 between the first spectroscope 3 and interference system.Wherein, index glass
9 is MEMS micromirror, and fixed mirror 8 is plane mirror or MEMS micromirror, and fixed mirror 8 and index glass 9 can
To be electric heating the biggest displacement micro mirror, fixed mirror 8 and index glass 9 are used interchangeably, fixed mirror 8 simultaneously
When using MEMS micromirror, its minute surface can produce displacement, can be used for phase-modulation.
Should also include that feedback system, feedback system included second by Fourier spectrometer based on MEMS
Illuminator the 22, second spectroscope 16 and 4 quadrant detector 17, the 3rd LASER Light Source 19 sends
Laser is divided into two bundles through the 4th spectroscope 20, and beam of laser enters interference system through the first spectroscope 3,
Another beam of laser is irradiated to index glass 9, through index glass 9 after second illuminator the 22, second spectroscope 16 reflection
4 quadrant detector 17 it is irradiated to, by the facula position on analysis 4 quadrant detector 17 after reflection
Change judges the deflection of index glass 9, and utilizes MEMS Control System to adjust the motion of index glass 9, makes
It moves all along optical axis direction, it is achieved the feedback control of index glass 9.
In the present embodiment, the first LASER Light Source 1, as the light source of sample excitation light, is used for irradiating sample
Produce sample excitation light, and after the 3rd LASER Light Source 19 is separated two bundles by the 4th spectroscope 20, a branch of sharp
Light enters interference system as reference light, and another beam of laser enters feedback system as feedback light source, permissible
Reduce the quantity of light source, reduce the complexity of system, reduce the volume of spectrogrph.
As in figure 2 it is shown, as the second preferred implementation of the present invention, should be based on MEMS
Fourier spectrometer also include interference system and be arranged at the first collimating lens 2 and collecting lens 4 it
Between the first spectroscope 3, interference system includes cube beamsplitter 7, fixed mirror 8, index glass 9, laser with
Sample excitation light, after collecting lens 4 collimates, is reflected into interference system through the first spectroscope 3, swashs
Light and sample excitation light are respectively divided into two bundles, a branch of sample excitation light and beam of laser through cube beamsplitter 7
Inciding fixed mirror 8, another bundle sample excitation light and another bundle laser light incident are to index glass 9, two bundle samples
Exciting light and two bundle laser incide after fixed mirror 8 reflects with index glass 9 on cube beamsplitter 7 respectively and obtain
To sample excitation light and the interference signal of laser.Wherein, index glass 9 is MEMS micromirror, fixed mirror 8
Can be the vertical big displacement micro mirror of electric heating for plane mirror or MEMS micromirror, fixed mirror 8 and index glass 9,
Fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 uses MEMS micromirror simultaneously, its minute surface can
Produce displacement, can be used for phase-modulation.
Should also include that feedback system, feedback system included second by Fourier spectrometer based on MEMS
LASER Light Source the 15, second spectroscope 16 and 4 quadrant detector 17, the second LASER Light Source 15 sends
Light beam through second spectroscope 16 reflection after be irradiated to index glass 9, through index glass 9 reflect after be irradiated to four-quadrant
Detector 17, judges index glass 9 by analyzing the change of the facula position on 4 quadrant detector 17
Deflection, and utilize MEMS Control System to adjust the motion of index glass 9 so that it is all along optical axis direction
Motion, it is achieved the feedback control of index glass 9.
In the present embodiment, a part of laser that the first LASER Light Source 1 sends produces for being irradiated to sample
Sample excitation light, another part laser is used as reference light, can reduce the quantity of light source, reduces system
Complexity, reduces the volume of spectrogrph.
As it is shown on figure 3, as the third preferred implementation of the present invention, should be based on MEMS
Fourier spectrometer also include interference system and be arranged at the first collimating lens 2 and collecting lens 4 it
Between the first spectroscope 3, interference system includes cube beamsplitter 7, fixed mirror 8, index glass 9, laser with
Sample excitation light, after collecting lens 4 collimates, is reflected into interference system through the first spectroscope 3, swashs
Light and sample excitation light are respectively divided into two bundles, a branch of sample excitation light and beam of laser through cube beamsplitter 7
Inciding fixed mirror 8, another bundle sample excitation light and another bundle laser light incident are to index glass 7, two bundle samples
Exciting light and two bundle laser incide after fixed mirror 8 reflects with index glass 9 on cube beamsplitter 7 respectively and obtain
To sample excitation light and the interference signal of laser.Wherein, index glass 9 is MEMS micromirror, fixed mirror 8
Can be the vertical big displacement micro mirror of electric heating for plane mirror or MEMS micromirror, fixed mirror 8 and index glass 9,
Fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 uses MEMS micromirror simultaneously, its minute surface can
Produce displacement, can be used for phase-modulation.
Should also include that feedback system, feedback system included second by Fourier spectrometer based on MEMS
Spectroscope 16 and 4 quadrant detector 17, arranged between the first collimating lens 2 and the first spectroscope 3
The 3rd spectroscope 18, the laser that the first LASER Light Source 1 sends is had to be divided into two-beam through the 3rd spectroscope 18,
The most a branch of being irradiated to sample cell 5 through the first spectroscope 3, another beam of laser reflects through the second spectroscope 16
After be irradiated to index glass 9, through index glass 9 reflect after be irradiated to 4 quadrant detector 17, by analyze four-quadrant
The change of the facula position on detector 17 judges the deflection of index glass 9, and utilizes MEMS to control system
The motion of the whole index glass of tracking 9 so that it is move all along optical axis direction, it is achieved the feedback control of index glass 9.
In the present embodiment, the laser that the first LASER Light Source 1 sends i.e. as exciting light, reference light, again
Use as feedback light source, by 3 light sources are combined into one, it is possible to reduce light source usage quantity, fall
The complexity of low system and production cost, meanwhile, the various piece of system is easier to be incorporated into one
Rising, make system structure compacter, beneficially system is integrated.
As shown in Figure 4, as the 4th kind of preferred implementation of the present invention, should be based on MEMS
Fourier spectrometer also include interference system and be arranged at the first collimating lens 2 and collecting lens 4 it
Between the first spectroscope 3, described interference system includes cube beamsplitter 7, fixed mirror 8, index glass 9, swash
Light and sample excitation light, after collecting lens 4 collimates, are reflected into interference system through the first spectroscope 3,
Laser and sample excitation light are respectively divided into two bundles through cube beamsplitter 7, a branch of sample excitation light and a branch of swash
Light incides fixed mirror 8, and another bundle sample excitation light and another bundle laser light incident are to index glass 7, two bundle samples
Product exciting light and two bundle laser incide on cube beamsplitter 7 respectively after fixed mirror 8 reflects with index glass 9
Obtain the interference signal of sample excitation light and laser.Wherein, index glass 9 is MEMS micromirror, fixed mirror 8
Can be the vertical big displacement micro mirror of electric heating for plane mirror or MEMS micromirror, fixed mirror 8 and index glass 9,
Fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 uses MEMS micromirror simultaneously, its minute surface can
Produce displacement, can be used for phase-modulation.
Should also include feedback system by Fourier spectrometer based on MEMS, described feedback system includes
4 quadrant detector 17, laser is after index glass 9 is reflected back cube beamsplitter 7, and a portion light beam enters
Enter 4 quadrant detector 17, judge by analyzing the change of the facula position on 4 quadrant detector 17
The deflection of index glass 9, and utilize MEMS Control System to adjust the motion of index glass 9 so that it is all along
Optical axis direction moves, it is achieved the feedback control of index glass 9.
In the present embodiment, the light part that the first LASER Light Source 1 sends is made as reference light, a part
For exciting light, after entering interference system, the laser being reflected back through index glass has the feedback light as feedback system
Source, can effectively reduce the usage quantity of light source, reduces production cost.
As it is shown in figure 5, as the 5th kind of preferred implementation of the present invention, should be based on MEMS
Fourier spectrometer also includes interference system and is positioned at sample cell 5 side and hangs down with the first reflecting mirror 6
Straight the 3rd reflecting mirror 23 arranged, described interference system includes cube beamsplitter 7, fixed mirror 8, index glass
9, laser is irradiated on sample, through sample after the 3rd reflecting mirror 23 and the first reflecting mirror 6 reflect jointly
Reflection produces sample excitation light, sample excitation light and laser and enters interference system, will through cube beamsplitter 7
Sample excitation light and laser beam are respectively divided into two bundles, the light beam of sample excitation light and the light beam of laser
Inciding fixed mirror 8, the another light beam of sample excitation light and the another light beam of laser incide index glass 7,
Two bundle sample excitation light and two bundle laser beams incide cube respectively after fixed mirror 8 reflects with index glass 9
The interference signal of sample excitation light and laser is obtained on spectroscope 7.Wherein, described sample cell 5 and interference
Being additionally provided with the second collimating lens 24 between system, index glass 9 is MEMS micromirror, and fixed mirror 8 is flat
Face mirror or MEMS micromirror, fixed mirror 8 and index glass 9 can be the vertical big displacement micro mirrors of electric heating, Gu
Horizontal glass 8 and index glass 9 are used interchangeably, and when fixed mirror 8 uses MEMS micromirror simultaneously, its minute surface can produce
Raw displacement, can be used for phase-modulation.
Should also include feedback system by Fourier spectrometer based on MEMS, described feedback system includes
Second LASER Light Source the 15, second spectroscope 16 and 4 quadrant detector 17, the second LASER Light Source 15
The light beam sent is irradiated to index glass 9 after the second spectroscope 16 reflection, is irradiated to four after index glass 9 reflects
Quadrant detector 17, judges index glass by analyzing the change of the facula position on 4 quadrant detector 17
The deflection of 9, and utilize MEMS Control System to adjust the motion of index glass 9 so that it is all along optical axis side
To motion, it is achieved the feedback control of index glass 9.
In the present embodiment, at sample cell 5, use being total to of the first reflecting mirror 6 and the 3rd reflecting mirror 23
Same-action comes reflected sample exciting light and laser, further enhances the laser being irradiated on sample, strengthens and swashs
Light is to the effect number of times of sample and launching efficiency, thus strengthens the intensity of sample excitation light.And,
In the present embodiment, the laser that the first LASER Light Source 1 sends, i.e. as reference light, again as exciting light, subtracts
Few light source usage quantity, reduces production cost.
In the present invention, should also include detecting reception system by Fourier spectrometer based on MEMS,
Described detection reception system include dichroic mirror the 10, first notch filtering light sheet the 11, first detector 12,
Doing of second detector 13, signal processing module 14, sample laser interference light path and laser interference light path
Relating to light beam through dichroic mirror 10 separately, wherein, sample excitation interference of light light beam is through the first notch filtering light
Being received by the first detector 12 after sheet 11, the interfering beam of laser is received by the second detector 13, the
The signal that one detector 12 receives with the second detector 13 processes through signal processing module 14, obtains sample
The spectrogram of product.
The present invention utilizes MEMS micromirror as the index glass 9 in Fourier transform spectrometer, light path and to fix
Mirror 8, and interference system is made in semiconductor base, it is possible to accurately control the fortune of MEMS micromirror
Dynamic, the repeatability of its motion simultaneously and reliability are high, therefore, it is possible to ensure that in interference system, index glass 9 moves
Accuracy and repeatability.Utilize MEMS micromirror volume little, it is not necessary to additionally to drive control simultaneously
The feature of device so that spectrogrph lightweight, easy to carry, easily realize modularity, integrated,
Miniaturization；Meanwhile, utilize the integrated processing technique of quasiconductor, make product be integrated in a module, improve
The reliability of system.Preferably, in an embodiment of the present invention, the basic of MEMS micromirror is made
Principle and processing technology, refer to Univ Florida USA professor Xie Huikai etc. and be published in 2009
" An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded on JEMEMS
Dual S-Shaped Bimorphs ", its base material is silicon-on-insulator, and this MEMS is that electric heating hangs down
Straight big displacement MEMS, as shown in Figure 6, the minute surface 25 of MEMS micromirror is at the first tie-beam for its structure
29 and second tie-beam 27 connection support under carry out micro-positioning regulators, the first tie-beam 29 sets meanwhile
It is equipped with the first bimorph 30, the second tie-beam 27 is provided with the second bimorph 28, and
The junction of minute surface 25 and the second tie-beam 27 is provided with the 3rd bimorph 26, the first tie-beam
29 are connected on pedestal 31.It addition, the light path of this spectrogrph uses space optical path, the element of application is relatively
Few, repeat realization and be easier to.
Further, in an embodiment of the present invention, increase feedback control system, make MEMS micromirror
It is capable of in the course of the work from dynamic(al) correction.Meanwhile, before this feedback system is arranged on index glass 9 motion
Feed back, utilize 4 quadrant detector to receive the light beam that index glass direct reflection is returned, become by hot spot
Change the deflection correcting MEMS index glass minute surface, so design and can reduce MEMS package and lead-in wire
The difficulty connected, and directly utilize the light that MEMS mirror face reflects and feed back, its feedback side
Formula is more direct, can improve the precision that MEMS controls further.
In the present invention, the first reflecting mirror 6 and the 3rd reflecting mirror 23 are concave mirror.By concave surface
Reflecting mirror realizes the light path of reflective optical system, the beneficially collection of sample excitation light, adds sharp
Light irradiates the number of times of sample, improves the intensity of sample excitation light, and the sample making detector receive swashs
Luminous signal is higher.
Fourier spectrometer based on the MEMS design of the present invention is simple, and stability is high, and precision is accurate
Really, volume is little, it is achieved that the miniaturization of spectrogrph.
The know-why of the present invention is described above in association with specific embodiment.These describe and are intended merely to explain
The principle of the present invention, and limiting the scope of the invention can not be construed to by any way.Based on this
The explanation at place, those skilled in the art need not pay performing creative labour can associate the present invention's
Other detailed description of the invention, within these modes fall within protection scope of the present invention.
Claims (12)
1. a Fourier spectrometer based on MEMS, including the first LASER Light Source (1),
Collimating lens (2), collecting lens (4), sample cell (5), described first LASER Light Source (1) is sent out
The laser gone out collimates through the first collimating lens (2), and concentrated lens (4) are irradiated to sample cell after assembling
(5), on the sample in, sample excitation light is produced through sample reflection, it is characterised in that: also include first
Reflecting mirror (6), sample excitation light through the first reflecting mirror (6) collect after, laser and sample excitation light warp
Again it is irradiated on the sample in sample cell (5) after first reflecting mirror (6) reflection, produces sample excitation
Light, described first LASER Light Source (1), the first collimating lens (2), collecting lens (4), sample cell (5)
And described first reflecting mirror (6) is point-blank, and light path conllinear.
A kind of Fourier spectrometer based on MEMS the most according to claim 1, it is special
Levy and be: also include interference system, the 3rd LASER Light Source (19) and be arranged at the first collimating lens
(2) the first spectroscope (3) and between collecting lens (4), described interference system includes a cube light splitting
Mirror (7), fixed mirror (8), index glass (9), the 3rd LASER Light Source (19) and the first spectroscope (3)
Between be provided with the 4th spectroscope (20), the laser that the 3rd LASER Light Source (19) sends is through the 4th light splitting
Mirror (20) is divided into two bundles, and the most a branch of through the first spectroscope (3) entrance interference system, sample reflects
After the concentrated lens of sample excitation light (4) collimation produced, it is reflected into doing through the first spectroscope (3)
Relating to system, laser and sample excitation light are respectively divided into two bundles through cube beamsplitter (7), and a branch of sample swashs
Luminous and beam of laser incides fixed mirror (8), and another bundle sample excitation light and another bundle laser light incident arrive
Index glass (9), two bundle sample excitation light and two bundle laser reflect with index glass (9) through fixed mirror (8) respectively
After incide the interference signal obtaining sample excitation light and laser on cube beamsplitter (7).
A kind of Fourier spectrometer based on MEMS the most according to claim 1, it is special
Levy and be: also include interference system and be arranged at the first collimating lens (2) and collecting lens (4)
Between the first spectroscope (3), described interference system include cube beamsplitter (7), fixed mirror (8),
Index glass (9), laser and sample excitation light are after collecting lens (4) collimates, through the first spectroscope (3)
Being reflected into interference system, laser and sample excitation light are respectively divided into two bundles through cube beamsplitter (7),
A branch of sample excitation light and beam of laser incide fixed mirror (8), another bundle sample excitation light and another bundle
Laser light incident to index glass (9), two bundle sample excitation light and two bundle laser respectively through fixed mirror (8) with dynamic
Incide, after mirror (9) reflection, the interference signal obtaining sample excitation light and laser on cube beamsplitter (7).
A kind of Fourier spectrometer based on MEMS the most according to claim 1, it is special
Levy and be: also include interference system and be positioned at sample cell (5) side and with the first reflecting mirror (6)
Vertically disposed 3rd reflecting mirror (23), described interference system includes cube beamsplitter (7), fixed mirror
(8), index glass (9), laser is after the 3rd reflecting mirror (23) and the first reflecting mirror (6) jointly reflection
It is irradiated on sample, produces sample excitation light, sample excitation light and laser through sample reflection and enter interference system
System, is respectively divided into two bundles, sample excitation through cube beamsplitter (7) by sample excitation light and laser beam
The light beam of light and the light beam of laser incide fixed mirror (8), and the another light beam of sample excitation light is with sharp
The another light beam of light incides index glass (9), two bundle sample excitation light and two bundle laser beams respectively through fixing
Mirror (8) incides after reflecting with index glass (9) and obtains sample excitation light on cube beamsplitter (7) and swash
Interference of light signal.
5. according to a kind of based on MEMS the Fourier's light described in any one of claim 2 to 4
Spectrometer, it is characterised in that: described index glass (9) is MEMS micromirror；Described fixed mirror (8) is flat
Face mirror or MEMS micromirror；Described fixed mirror (8) and index glass (9) are used interchangeably；Described fixing
When mirror (8) uses MEMS micromirror, its minute surface is by producing displacement, carries out phase-modulation.
A kind of Fourier spectrometer based on MEMS the most according to claim 2, it is special
Levy and be: also include that feedback system, described feedback system include the second illuminator (22), the second light splitting
Mirror (16) and 4 quadrant detector (17), the laser warp that described 3rd LASER Light Source (19) sends
4th spectroscope (20) is divided into two bundles, and beam of laser enters interference system through the first spectroscope (3),
Another beam of laser is irradiated to index glass (9) after the second illuminator (22), the second spectroscope (16) reflection,
It is irradiated to 4 quadrant detector (17), by analyzing 4 quadrant detector (17) after index glass (9) reflects
On the change of facula position judge the deflection of index glass (9), and utilize MEMS Control System to adjust
The motion of index glass (9) so that it is move all along optical axis direction, it is achieved the feedback control of index glass (9).
7. according to a kind of based on MEMS the Fourier spectrometer described in claim 3 or 4,
It is characterized in that: also include feedback system, described feedback system include the second LASER Light Source (15),
Two spectroscopes (16) and 4 quadrant detector (17), the light beam that the second LASER Light Source (15) sends
After the second spectroscope (16) reflects, it is irradiated to index glass (9), after index glass (9) reflects, is irradiated to four
Quadrant detector (17), sentences by analyzing the change of the facula position on 4 quadrant detector (17)
The deflection of disconnected index glass (9), and utilize MEMS Control System to adjust the motion of index glass (9) so that it is
Move all along optical axis direction, it is achieved the feedback control of index glass (9).
A kind of Fourier spectrometer based on MEMS the most according to claim 3, it is special
Levy and be: also include that feedback system, described feedback system include the second spectroscope (16) and four-quadrant
Detector (17), is provided with the 3rd between described first collimating lens (2) and the first spectroscope (3)
Spectroscope (18), the laser that the first LASER Light Source (1) sends is divided into two bundles through the 3rd spectroscope (18)
Light, the most a branch of is irradiated to sample cell (5) through the first spectroscope (3), and another beam of laser is through second point
It is irradiated to index glass (9) after light microscopic (16) reflection, after index glass (9) reflects, is irradiated to Quadrant detector
Device (17), judges index glass (9) by analyzing the change of the facula position on 4 quadrant detector (17)
Deflection, and utilize MEMS Control System adjust index glass (9) motion so that it is all along optical axis
Move in direction, it is achieved the feedback control of index glass (9).
A kind of Fourier spectrometer based on MEMS the most according to claim 3, it is special
Levy and be: also include that feedback system, described feedback system include 4 quadrant detector (17), laser warp
After index glass (9) is reflected back cube beamsplitter (7), a portion light beam enters 4 quadrant detector (17),
The deflection of index glass (9) is judged by analyzing the change of the facula position on 4 quadrant detector (17),
And utilize MEMS Control System to adjust the motion of index glass (9) so that it is move all along optical axis direction,
Realize the feedback control of index glass (9).
A kind of Fourier spectrometer based on MEMS the most according to claim 5, it is special
Levy and be: also include detecting reception system, described detection receive system include dichroic mirror (10), the
One notch filtering light sheet (11), the first detector (12), the second detector (13), signal processing module
(14), the interfering beam of sample laser interference light path and laser interference light path is through dichroic mirror (10) point
Open, wherein, sample excitation interference of light light beam after the first notch filtering light sheet (11) by the first detector
(12) receiving, the interfering beam of laser is received by the second detector (13), the first detector (12)
The signal received with the second detector (13) processes through signal processing module (14), obtains the light of sample
Spectrogram.
11. a kind of Fourier spectrometers based on MEMS according to claim 2, it is special
Levy and be: between described first spectroscope (3) and interference system, be additionally provided with the second notch filtering light sheet (21).
12. a kind of Fourier spectrometers based on MEMS according to claim 4, it is special
Levy and be: between described sample cell (5) and interference system, be additionally provided with the second collimating lens (24).
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| CN104535185B (en) * | 2014-12-25 | 2016-08-24 | 中国科学院长春光学精密机械与物理研究所 | A kind of mobile light wedge type Fourier spectrometer |
| CN107331643B (en) * | 2016-04-29 | 2021-02-12 | 上海微电子装备（集团）股份有限公司 | Alignment device and method thereof |
| CN110879216B (en) * | 2019-11-06 | 2022-10-25 | 广东电网有限责任公司广州供电局 | Multi-frame shadow diagnosis method |
| CN112684431A (en) * | 2020-12-31 | 2021-04-20 | 深圳煜炜光学科技有限公司 | Solid-state scanning laser radar device and using method |
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