CN102607701A - Fourier transformation miniature spectrometer based on moving mirror of micro-electro-mechanical system - Google Patents
Fourier transformation miniature spectrometer based on moving mirror of micro-electro-mechanical system Download PDFInfo
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Abstract
The invention relates to a Fourier transformation miniature spectrometer based on a moving mirror of a micro-electro-mechanical system, which comprises a Michelson interferometer, a signal acquisition processor and a photoelectric detector. The Michelson interferometer comprises a light source, a first spectroscope, a second spectroscope, an MEMS (micro-electro-mechanical system) micromirror and a static mirror which are connected to scan samples. The Fourier transformation miniature spectrometer based on the moving mirror of the micro-electro-mechanical system realizes structural microminiaturization, portability of equipment is improved, linear movement of the MEMS micromirror can be guaranteed, and cost of the total equipment is reduced.
Description
Technical field
The present invention relates to a kind of Fourier transform low-light spectrometer based on the MEMS index glass.
Background technology
Spectrometer passes through the extracting of optical information, the development of photographic negative; Or computerized demonstration and the analysis that shows the numerical value instrument automatically; Thereby predict to contain which kind of element in the article, this technology is widely used in the middle of the detections such as air pollution, water pollution, food hygiene, metal industry.
Fourier transform type spectrometer mainly is made up of light source, Michelson interferometer and detecting device at present.And the core of FTIS is a Michelson interferometer; Before being placed on detecting device to sample; Because sample produces absorption to the infrared light of some frequency, the interference light intensity that detecting device is received changes, thereby obtains the interferogram of various different samples.This interferogram is the change curve that light produces along with the displacement of index glass, can obtain the frequency domain figure of light intensity with change of frequency by fourier transform function, and this process can be accomplished by computing machine.But owing to relate to index glass in this design or be called linear mobile platform; It mainly relies on stepper motor or other precision mechanical system; So the portability of instrument is restricted; Can't realize outdoor real-time detection, so the miniaturization of index glass is the key that solves the miniaturization of Fourier transform spectrometer.
A brand-new technology field and industry have been opened up in the development of MEMS (MEMS) technology, and the microsensor, microactrator, micro parts, Micromechanical Optics device, vacuum microelectronic device, power electronic devices etc. that adopt the MEMS fabrication techniques all have the wide application prospect of ten minutes in Aeronautics and Astronautics, automobile, biomedicine, environmental monitoring, military affairs and all spectra that almost people touched.Micro-electromechanical system (MEMS) (Micro-Electro-Mechanical Systems) is a kind of brand-new research and development field that must consider multiple physical field immixture simultaneously; With respect to traditional machinery; Their size is littler, and maximum is no more than one centimetre, even only is several microns.Adopt and the similar generation technique of integrated circuit, can utilize mature technology and technology in the integrated circuit production in a large number, carry out in enormous quantities, produce at low cost, cost performance is increased substantially with respect to tradition " machinery " manufacturing technology.
Summary of the invention
Technical matters to be solved by this invention provides a kind of miniaturization that can be good at, and can guarantee the linearly moving Fourier transform low-light spectrometer based on the MEMS index glass of index glass.
The present invention adopts following technical scheme in order to solve the problems of the technologies described above: the present invention has designed a kind of Fourier transform low-light spectrometer based on the MEMS index glass, comprises Michelson interferometer, signal acquisition process device and photodetector; Michelson interferometer comprises light source, first spectroscope, second spectroscope, index glass and quiet mirror; Wherein the light beam of light source ejaculation is mapped on the sample through first spectroscope; Be mapped on second spectroscope through first spectroscope through the sample beam reflected, second spectroscope is divided into two-way with light beam, and one the tunnel is mapped on the quiet minute surface; One the tunnel is mapped on the index glass face, and the two-beam after quiet mirror, index glass reflection converges the formation michelson interferometer optical path at the second spectroscope place; The michelson interferometer optical path signal is mapped on the photodetector; Photodetector is converted into electric signal with light signal and is delivered in the signal acquisition process device; Through Fourier transform the spectrum that comprises sample message is restored, analyze spectrum and obtain sample message, simultaneously; The output terminal of signal acquisition process device is connected with the control end of index glass, and said index glass is the MEMS micro mirror.
As a kind of optimal technical scheme of the present invention: said MEMS micro mirror is a MEMS electrothermal drive micro mirror.
As a kind of optimal technical scheme of the present invention: also comprise photoelectric position detector and the 3rd spectroscope; Michelson's optical interference circuit that said Michelson steller interferometer penetrates is mapped on the 3rd spectroscope; The 3rd spectroscope is divided into two-way with michelson interferometer optical path; One the tunnel comprise sample message interference light signal be mapped on the photodetector; The light path that another road comprises MEMS micromirror movements information is mapped on the photoelectric position detector, and photoelectric position detector is converted into electric signal with light signal and transfers in the signal acquisition process device, and the signal acquisition process device carries out linearity according to the signal controlling MEMS micro mirror that receives and moves.
As a kind of optimal technical scheme of the present invention: said the 3rd spectroscope is double-colored spectroscope.
As a kind of optimal technical scheme of the present invention: said photoelectric position detector is the four-quadrant photoelectric position detector.
As a kind of optimal technical scheme of the present invention: also comprise the micro-optic pedestal, said Michelson interferometer, signal acquisition process device, photodetector, photoelectric position detector and the 3rd spectroscope are arranged on the micro-optic pedestal.
As a kind of optimal technical scheme of the present invention: the substrate of said micro-optic pedestal is a monocrystalline silicon piece.
As a kind of optimal technical scheme of the present invention: the substrate of said micro-optic pedestal is a soi wafer, and wherein the SOI silicon chip comprises two-layer silicon and layer of silicon dioxide, and silicon dioxide is clipped between the two-layer silicon.
As a kind of optimal technical scheme of the present invention: said micro-optic pedestal adopts following processing technology to obtain:
(1) soi wafer is carried out two-sided standard cleaning;
(2) wherein precipitate layer of metal on the surface at soi wafer;
(3) whirl coating, exposure, development are carried out in the surface of the metal level on the soi wafer;
(4) to the metal level corrosion, obtain lead-in wire, and remove photoresist;
(5) lead-in wire place face on the soi wafer is carried out whirl coating, exposure, development;
(6) adopt dry etching technology etching mounting groove, till etching into silicon dioxide layer, and remove photoresist.
A kind of Fourier transform low-light spectrometer based on the MEMS index glass according to the invention adopts above technical scheme compared with prior art, has following technique effect:
(1) adopts the design of micro-optic pedestal, make that the optical component setting is compact more in the equipment, realized the microminiaturization of structure, improved the pocket of equipment;
(2) utilize MEMS micro mirror and FEEDBACK CONTROL, guaranteed that the linearity of MEMS micro mirror moves;
(3) the MEMS micro mirror utilizes semiconductor technology to produce in batches, and the individual devices cost is low, and then has reduced the cost of entire equipment.
Description of drawings
Fig. 1 is flow chart of data processing figure of the present invention;
Fig. 2 is a three-dimensional plot of the present invention;
Fig. 3 is the synoptic diagram of MEMS electrothermal drive micro mirror among the present invention;
Fig. 4 is the synoptic diagram of step (1) in the micro-optic pedestal processing technology among the present invention;
Fig. 5 is the synoptic diagram of step (2) in the micro-optic pedestal processing technology among the present invention;
Fig. 6 is the synoptic diagram of step (3) in the micro-optic pedestal processing technology among the present invention;
Fig. 7 is the synoptic diagram of step (4) in the micro-optic pedestal processing technology among the present invention;
Fig. 8 is the synoptic diagram of step (5) in the micro-optic pedestal processing technology among the present invention;
Fig. 9 is the synoptic diagram of step (6) in the micro-optic pedestal processing technology among the present invention;
1. light source, 2. first spectroscope, 3. sample, 4. second spectroscope, 5. the 3rd spectroscope; 6.MEMS the electrothermal drive micro mirror, 7. quiet mirror, 8. photodetector, 9. photoelectric position detector, 10. micro-optic pedestal; 11. sway brace, 12. actuating arms, 13. minute surfaces, 14. silicon layers, 15. silicon dioxide layers; 16. metal level, 17. lead-in wires, 18. mounting grooves, 19. photoresists, 20. signal acquisition process devices.
Embodiment
Do further detailed explanation below in conjunction with the Figure of description specific embodiments of the invention.
As depicted in figs. 1 and 2, the present invention has designed a kind of Fourier transform low-light spectrometer based on the MEMS index glass, comprises Michelson interferometer, signal acquisition process device and photodetector; Michelson interferometer comprises light source, first spectroscope, second spectroscope, index glass and quiet mirror; Wherein the light beam of light source ejaculation is mapped on the sample through first spectroscope; Be mapped on second spectroscope through first spectroscope through the sample beam reflected, second spectroscope is divided into two-way with light beam, and one the tunnel is mapped on the quiet minute surface; One the tunnel is mapped on the index glass face, and the two-beam after quiet mirror, index glass reflection converges the formation michelson interferometer optical path at the second spectroscope place; The michelson interferometer optical path signal is mapped on the photodetector; Photodetector is converted into electric signal with light signal and is delivered in the signal acquisition process device; Through Fourier transform the spectrum that comprises sample message is restored, analyze spectrum and obtain sample message, simultaneously; The output terminal of signal acquisition process device is connected with the control end of index glass, and said index glass is the MEMS micro mirror.
The type of drive of MEMS micro mirror has electrothermal drive mode and static driven mode etc., and as a kind of optimal technical scheme of the present invention: said MEMS micro mirror has adopted MEMS electrothermal drive micro mirror, wherein, and foreign patent [WO2004US13171; WO2004099629A2] a kind of MEMS electrothermal drive micro mirror is disclosed, as shown in Figure 3, by a minute surface and four MEMSs that actuating arm constitutes, wherein actuating arm is symmetrically distributed, and each actuating arm is made up of multilayer material.Comprise heating in the actuating arm; Applying electric current raises the actuating arm temperature; Utilize the thermal expansion difference of double layer material to cause out-of-plane motion then, thereby promote the minute surface motion, if four actuating arms apply same electric current; Just can promote minute surface Z to motion, cooperate feedback controling mode to realize that the linearity of index glass moves.
As a kind of optimal technical scheme of the present invention: also comprise photoelectric position detector and the 3rd spectroscope; Michelson's optical interference circuit that said Michelson steller interferometer penetrates is mapped on the 3rd spectroscope; The 3rd spectroscope is divided into two-way with michelson interferometer optical path; One the tunnel comprise sample message interference light signal be mapped on the photodetector; The light path that another road comprises MEMS micromirror movements information is mapped on the photoelectric position detector, and photoelectric position detector is converted into electric signal with light signal and transfers in the signal acquisition process device, and the signal acquisition process device carries out linearity according to the signal controlling MEMS micro mirror that receives and moves.
As a kind of optimal technical scheme of the present invention: said the 3rd spectroscope is double-colored spectroscope, and it can be separated into two-way with light source light and flashlight.
As a kind of optimal technical scheme of the present invention: said photoelectric position detector is the four-quadrant photoelectric position detector; The four-quadrant photoelectric position detector is actually by four photoelectric position detectors and constitutes; Quadrant of each detector, the target light signal is through forming images on four-quadrant photo detector after the optical system.Four-quadrant photo detector angle measurement and location technology are utilized four rational layouts of photodetector, construct spot size with target inclination angle variation relation, thereby reach the measurement for angle.Four-quadrant photo detector places on the optical system focal plane or leaves the focal plane slightly.When target imaging was not on optical axis, the photosignal amplitude of detector output was inequality on four quadrants.Which quadrant is amplitude size through comparing four photosignals not only can know target imaging on, and can extrapolate the incident angle of light beam.
As a kind of optimal technical scheme of the present invention: also comprise the micro-optic pedestal, said Michelson interferometer, signal acquisition process device, photodetector, photoelectric position detector and the 3rd spectroscope are arranged on the micro-optic pedestal.
As a kind of optimal technical scheme of the present invention: the substrate of said micro-optic pedestal is a monocrystalline silicon piece.
As a kind of optimal technical scheme of the present invention: the substrate of said micro-optic pedestal is a soi wafer, and wherein the SOI silicon chip comprises two-layer silicon and layer of silicon dioxide, and silicon dioxide is clipped between the two-layer silicon.
As a kind of optimal technical scheme of the present invention: said micro-optic pedestal adopts following processing technology to obtain:
(1) as shown in Figure 4, soi wafer is carried out two-sided standard cleaning;
(2) as shown in Figure 5, wherein precipitate layer of metal on the surface at soi wafer;
(3) as shown in Figure 6, whirl coating, exposure, development are carried out in the surface of the metal level on the soi wafer;
(4) as shown in Figure 7, to the metal level corrosion, obtain lead-in wire, and remove photoresist;
(5) as shown in Figure 8, lead-in wire place face on the soi wafer is carried out whirl coating, exposure, development;
(6) as shown in Figure 9, adopt dry etching technology etching mounting groove, till etching into silicon dioxide layer, and remove photoresist.
Combine accompanying drawing that embodiment of the present invention has been done detailed description above, but the present invention is not limited to above-mentioned embodiment, in the ken that those of ordinary skills possessed, can also under the prerequisite that does not break away from aim of the present invention, makes various variations.
Claims (9)
1. the Fourier transform low-light spectrometer based on the MEMS index glass comprises Michelson interferometer, signal acquisition process device and photodetector; Michelson interferometer comprises light source, first spectroscope, second spectroscope, index glass and quiet mirror; Wherein the light beam of light source ejaculation is mapped on the sample through first spectroscope; Be mapped on second spectroscope through first spectroscope through the sample beam reflected, second spectroscope is divided into two-way with light beam, and one the tunnel is mapped on the quiet minute surface; One the tunnel is mapped on the index glass face, and the two-beam after quiet mirror, index glass reflection converges the formation michelson interferometer optical path at the second spectroscope place; The michelson interferometer optical path signal is mapped on the photodetector; Photodetector is converted into electric signal with light signal and is delivered in the signal acquisition process device; Through Fourier transform the spectrum that comprises sample message is restored, analyze spectrum and obtain sample message, simultaneously; The output terminal of signal acquisition process device is connected with the control end of index glass, it is characterized in that: said index glass is the MEMS micro mirror.
2. according to the said a kind of Fourier transform low-light spectrometer based on the MEMS index glass of claim 1, it is characterized in that: said MEMS micro mirror is a MEMS electrothermal drive micro mirror.
3. according to the said a kind of Fourier transform low-light spectrometer of claim 1 based on the MEMS index glass; It is characterized in that: also comprise photoelectric position detector and the 3rd spectroscope; Michelson's optical interference circuit that said Michelson steller interferometer penetrates is mapped on the 3rd spectroscope; The 3rd spectroscope is divided into two-way with michelson interferometer optical path; One the tunnel comprise sample message interference light signal be mapped on the photodetector; The light path that another road comprises MEMS micromirror movements information is mapped on the photoelectric position detector, and photoelectric position detector is converted into electric signal with light signal and transfers in the signal acquisition process device, and the signal acquisition process device carries out linearity according to the signal controlling MEMS micro mirror that receives and moves.
4. according to the said a kind of Fourier transform low-light spectrometer based on the MEMS index glass of claim 3, it is characterized in that: said the 3rd spectroscope is double-colored spectroscope.
5. according to the said a kind of Fourier transform low-light spectrometer based on the MEMS index glass of claim 3, it is characterized in that: said photoelectric position detector is the four-quadrant photoelectric position detector.
6. according to the said a kind of Fourier transform low-light spectrometer of claim 3 based on the MEMS index glass; It is characterized in that: also comprise the micro-optic pedestal, said Michelson interferometer, signal acquisition process device, photodetector, photoelectric position detector and the 3rd spectroscope are arranged on the micro-optic pedestal.
7. according to the said a kind of Fourier transform low-light spectrometer based on the MEMS index glass of claim 6, it is characterized in that: the substrate of said micro-optic pedestal is a monocrystalline silicon piece.
8. according to the said a kind of Fourier transform low-light spectrometer of claim 6 based on the MEMS index glass; It is characterized in that: the substrate of said micro-optic pedestal is a soi wafer; Wherein the SOI silicon chip comprises two-layer silicon and layer of silicon dioxide, and silicon dioxide is clipped between the two-layer silicon.
9. said according to Claim 8 a kind of Fourier transform low-light spectrometer based on the MEMS index glass, it is characterized in that: said micro-optic pedestal adopts following processing technology to obtain:
(1) soi wafer is carried out two-sided standard cleaning;
(2) wherein precipitate layer of metal on the surface at soi wafer;
(3) whirl coating, exposure, development are carried out in the surface of the metal level on the soi wafer;
(4) to the metal level corrosion, obtain lead-in wire, and remove photoresist;
(5) lead-in wire place face on the soi wafer is carried out whirl coating, exposure, development;
(6) adopt dry etching technology etching mounting groove, till etching into silicon dioxide layer, and remove photoresist.
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| CN104181746A (en) * | 2014-08-08 | 2014-12-03 | 华中科技大学 | Optical time domain Fourier transformer |
| CN107144537A (en) * | 2016-06-13 | 2017-09-08 | 中国海洋大学 | A kind of visible optical Fourier transform absorption spectrum measuring method and system |
| CN109983313A (en) * | 2016-06-15 | 2019-07-05 | 斯维尔系统 | Integration spectrum unit |
| CN111521267A (en) * | 2020-04-30 | 2020-08-11 | 上海师范大学 | Fourier transform spectrum system and method for calibrating submillimeter wave receiver |
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| CN104181746A (en) * | 2014-08-08 | 2014-12-03 | 华中科技大学 | Optical time domain Fourier transformer |
| CN107144537A (en) * | 2016-06-13 | 2017-09-08 | 中国海洋大学 | A kind of visible optical Fourier transform absorption spectrum measuring method and system |
| CN109983313A (en) * | 2016-06-15 | 2019-07-05 | 斯维尔系统 | Integration spectrum unit |
| CN109983313B (en) * | 2016-06-15 | 2021-12-31 | 斯维尔系统 | Integrated spectral cell |
| CN111521267A (en) * | 2020-04-30 | 2020-08-11 | 上海师范大学 | Fourier transform spectrum system and method for calibrating submillimeter wave receiver |
| CN111521267B (en) * | 2020-04-30 | 2022-12-16 | 上海师范大学 | Fourier transform spectrum system and method for calibration of submillimeter wave receiver |
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