CN107144537A - A kind of visible optical Fourier transform absorption spectrum measuring method and system - Google Patents
A kind of visible optical Fourier transform absorption spectrum measuring method and system Download PDFInfo
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- CN107144537A CN107144537A CN201710373538.0A CN201710373538A CN107144537A CN 107144537 A CN107144537 A CN 107144537A CN 201710373538 A CN201710373538 A CN 201710373538A CN 107144537 A CN107144537 A CN 107144537A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N2021/3185—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry typically monochromatic or band-limited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N2021/3196—Correlating located peaks in spectrum with reference data, e.g. fingerprint data
Abstract
The invention provides a kind of visible optical Fourier transform absorption spectrum measuring method and system, wherein system includes two groups of Michelson's interferometers, photoelectricity testing part and signal acquiring and processing system, the Michelson's interferometer accesses signal acquiring and processing system after being connected with the photoelectricity testing part, two groups of Michelson's interferometers are the first Michelson's interferometer and the second Michelson's interferometer, first Michelson's interferometer is the Michelson's interferometer of transfer arm beam-folding 4 times, second Michelson's interferometer of the invention replaces glass cubic speculum to eliminate error caused by vitreum using hollow cube of speculum, measured simultaneously using dual-beam output simultaneously, to realize the calculating of spectral absorption curve.The layout of first Michelson's interferometer (referring to optical interferometer) and the second Michelson's interferometer (tested optical interferometer) is used on mobile axisymmetric design structure, so as to improve the synchronism of two interferometer optical path differences change, the accuracy of tested optical interference optical path difference sampling interval positioning is improved.
Description
Technical field
It is particularly a kind of based on the visible of beam-folding technology the present invention relates to a kind of absorption spectrum measuring method and system
Resolution ratio and precision that the measurement of optical Fourier transform absorption spectrum can reach, realize high light spectrum resolution under the premise of low cost
The absorption spectrum measuring method and system of rate and precision.
Background technology
Due to the intrinsic high flux of FTIS (FTIR), multichannel advantage and bloom spectrum calibration essence
The advantages of degree, wide spectral range, it is set gradually to replace beam splitting type spectrometer to be widely used in atom in infrared and near infrared band
With the every subjects field such as molecular physics, analytical chemistry, spectroscopy.In ultraviolet and visible light wave range, it is difficult to obtain high-resolution
Rate, high-precision interference pattern optical path difference positioning sampling interval, this is that Fourier trasform spectroscopy measuring method is difficult to obtain high light
The one of the main reasons of spectrometry resolution ratio and precision, another reason is short wavelength's measurement to the requirement of scanning process index glass stationarity
It is higher.Used although many optical path difference positioned at intervals methods are attempted, be only limitted to low resolution measurement.To obtain high-precision light
The tested optical interference sampled result of path difference positioning interval (including speed and balance appearance, it is necessary to high-precision index glass scan control
State), it is difficult to commercialization popularization because costly.
The correlative theses that domestic periodical has a great deal of FTIS are delivered, by one's early years be generally on
The article of instrument application develops into correlative study paper in recent years.When Article analysis inteference imaging spectrometer index glass is level crossing by
The problem of tilting band is come, make a concrete analysis of and caused interference strength change and sampling error are tilted by index glass, obtained to plane
The restrictive condition at index glass inclination angle and the restrictive condition of the traversing amount of corner reflection index glass；Moved by setting up in Fourier transform spectrometer,
The coordinate corresponding relation of mirror, horizontal glass and interference surface, on the basis of heeling error analysis, to the maximum tilt angle of index glass and subtracts
The method of few error is discussed and proposes the thinking of two kinds of dynamic calibrations；It is anti-in FTIS cubes
Mirror characteristic is penetrated to be analyzed；The error analysis of FTIS Complex spectrum and Calibration Method are carried out
Study and utilize standard blackbody calibration.
Domestic periodical has no ultraviolet and visible ray Fourier transform spectrometer, research report.
The Model of Interferogram Sampling of the accurate poor positioning interval of aplanatism is that Fourier transform spectrometer, obtains spectral measurement high-resolution
The necessary condition of rate and precision.The sampling pulse of Fourier infrared spectrograph is to be scanned to produce by Michelson's interferometer index glass
HeNe laser interferencefringeses are obtained by Zero-cross comparator.It is well known that HeNe optical maser wavelengths are highly stable and accurate, thus in Fu
The spectral calibration of leaf infrared spectrometer is very accurate and is far superior to beam splitting type spectrometer steadily in the long term.But for short wavelength's model
Enclose for (visible ray and near ultraviolet band), HeNe laser interferencefringeses produce point at sampling optical path difference interval by Zero-cross comparator
Resolution is insufficient for Nyquist sampling thheorems, it is impossible to obtain the measure spectrum of the wave-length coverage.
To realize that the Fourier trasform spectroscopy of visible ray and near ultraviolet band is measured, many optical path difference positioned at intervals method quilts
Attempt.Spectrum folding can realize the requirement of the resolution ratio in reduction optical path difference sampling interval, but measurement using spectral aliasing
During need switch colour filter, thus be not suitable for wide spectral range measurement.Need to gather a large amount of Deng the time cycle method of sampling
Data after handled, and measurement accuracy is stronger to the stability dependency of sweep speed.Many other type position sensings
Device, such as linear variable difference transformer LVDT, interferential scanning grating ISG all have been used up the FTS (Fourier in astronomy application
Transform spectrometer).But these position sensors are required for strict operating environment such as constant temperature, constant pressure etc..Up to the present, swash
Interference of light method turns into best position sensing technology because of the stability of its optical maser wavelength, accuracy.By HeNe laser interferences
Fringe image thining and the method that obtains high light path difference resolution ratio has a many, the heterodyne refinement method of wherein laser interferencefringes be by
Researcher be widely recognized as and be applied to visible ray and ultraviolet spectra FTS system in.But this method must be double by high stability
Frequency laser (Zeeman-split) and can to the complex electronics system of real time signal processing, the complexity brought and it is high into
This problem is to hinder the one of the main reasons of visible ray and black light FTS development.Can be real using a cube speculum (pyramid)
Existing light path folding and then the multiplication for realizing light path, ripe to be applied in laser interferometry, i.e., special human relations inverse system.Using vertical
Square speculum realizes that light beam is repeatedly folded, and high-resolution HeNe laser interferencefringeses is obtained, so as to obtain high-precision optical path difference
The method of position pulse realizes that inexpensive, high-precision near ultraviolet and visible optical Fourier transform radiation spectrum measuring method are able to
Attempt.This method using the folding of light beam 4 times HeNe laser interferometer with it is coaxial back-to-back by light-metering michelson interferometer optical path
Install, change both optical path differences synchronous, so as to obtain the optical path difference position pulse of High Resolution.Method advantage exists
Measured in the radiation spectrum that high light spectral resolution and precision are realized under the premise of low cost, preliminary experimental results, in visible ray
Range of spectra resolution ratio is 0.28cm-1。
The content of the invention
There is above-mentioned deficiency for prior art, surveyed the invention provides a kind of visible optical Fourier transform absorption spectrum
Method and system are measured, by the way that two interferometers layout is used into optical translation axisymmetric design structure, accurate aplanatism are realized
The Model of Interferogram Sampling of poor positioning interval, final Fourier transformation absorption spectrometer obtains spectral measurement high-resolution and precision.
The technical scheme is that, a kind of visible optical Fourier transform absorption spectrum measuring method comprises the following steps：
HeNe laser and tested light are imported to the collimation lens of two groups of Michelson's interferometers with optical fiber；
The output optical signal of two groups of Michelson's interferometers is exported to photoelectricity testing part；
Based on signal acquiring and processing system sampling interferogram diagram data；
By the data transfer of collection to computer and calculate absorption spectrum.
The another side of the present invention, a kind of visible optical Fourier transform absorption spectrum measuring system, including two groups of Michelsons
Interferometer, photoelectricity testing part and signal acquiring and processing system, the Michelson's interferometer and the photoelectricity testing part
Signal acquiring and processing system is accessed after connection, two groups of Michelson's interferometers are the (reference of the first Michelson's interferometer
Optical interferometer) and the second Michelson's interferometer (tested optical interferometer), first Michelson's interferometer and described second
Michelson's interferometer has an index glass mobile platform, and first Michelson's interferometer is stepping for transfer arm beam-folding 4 times
Ke Erxun interferometers, second Michelson's interferometer is conventional Michelson's interferometer.
Above-mentioned measuring system, wherein, the prism group is made up of two prisms, and the prism is to translate folded light beam
Group, is allowed to symmetrical on the transfer arm optical axis of the second Michelson's interferometer, signal acquiring and processing system is used to sampling interferogram
Diagram data simultaneously transmits data to computer calculating spectrum.
Above-mentioned measuring system, wherein, HeNe laser and tested light are imported into two groups of Michelson's interferometers with optical fiber
Collimation lens, the output optical signal of two groups of Michelson's interferometers is exported to the photoelectricity testing part.
Above-mentioned measuring system, wherein, first Michelson's interferometer is provided with beam-folding structure.
Above-mentioned measuring system, wherein, second Michelson's interferometer is provided with the hollow retroreflector of heavy caliber and light path,
The reception of interference pattern, first Michelson's interferometer and the second Michelson's interferometer are exported to asymmetrical arrangement dual-beam
Optical path difference be 4 times of relations.
Above-mentioned measuring system, wherein, first Michelson's interferometer is to refer to optical interferometer, second mikey
Your inferior interferometer is tested optical interferometer.
Above-mentioned measuring system, first Michelson's interferometer symmetrically divides with second Michelson's interferometer
Cloth.
A kind of visible optical Fourier transform absorption spectrum measuring method and system that the present invention is provided, with advantages below：
1st, the layout of two interferometers uses optical translation axisymmetric design structure, further improves the same of two interferometer optical path differences change
Step property, so as to improve the accuracy of Model of Interferogram Sampling positioned at intervals；2nd, the second Michelson's interferometer is using hollow cube of reflection
Mirror replaces glass cubic speculum to eliminate error caused by vitreum, while measured using dual-beam output, to realize light simultaneously
Compose the calculating of absorption curve；3rd, from long light path servo controlled type optics mobile station, index glass sweep length is increased.
Brief description of the drawings
By reading the detailed description made with reference to the following drawings to non-limiting example, the present invention and its feature, outside
Shape and advantage will become more apparent upon.Identical mark indicates identical part in whole accompanying drawings.Not deliberately proportionally
Draw accompanying drawing, it is preferred that emphasis is the purport of the present invention is shown.
A kind of design frame chart for visible optical Fourier transform absorption spectrum measuring system that Fig. 1 provides for the present invention.
In figure：1st, He-Ne laser (reference light)；2 (a), reflective mirror 1；2 (b), reflective mirror 2；3rd, with reference to optical interferometer point
Shu Jing；4 (a), lens 1；4 (b), lens 2；4 (c), lens 3；5 (a), photoelectricity testing part 1；5 (b), photoelectricity testing part 2；5
(c), photoelectricity testing part 3；6th, prism group；7th, pyramid group；8th, sample is measured；9th, by light-metering；10th, symmetry axis；11st, displacement
x；12nd, stuck-module；13rd, mobile module；14 (a), hollow cube of speculum 1；14 (b), hollow cube of speculum 2；15(a)、
Lens 1；15 (b), lens 2；16th, reflective mirror 3；17 (a), single-mode fiber；17 (b), multimode fibre；18th, Signal acquiring and processing
System；19th, computer；20th, it is tested optical interferometer beam splitter.
Embodiment
In the following description, a large amount of concrete details are given to provide more thorough understanding of the invention.So
And, it is obvious to the skilled person that the implementation of the present invention is not by well known to those skilled in the art
Details.So, in other examples, in order to avoid obscuring with the present invention, for more well known in the art
Technical characteristic is not described.
In order to thoroughly understand the present invention, detailed step and detailed structure will be proposed in following description, so as to
Explain technical scheme.Presently preferred embodiments of the present invention is described in detail as follows, but in addition to these detailed descriptions, this
Invention can also have other embodiment.
Shown in reference picture 1, the invention provides a kind of visible optical Fourier transform absorption spectrum measuring system, including two groups
Michelson's interferometer, photoelectricity testing part and signal acquiring and processing system, Michelson's interferometer respectively with Photoelectric Detection
Device is connected with signal acquiring and processing system, and two groups of Michelson's interferometers are the first Michelson's interferometer and second
Michelson's interferometer, it is flat that first Michelson's interferometer shares index glass movement with second Michelson's interferometer
Platform, first Michelson's interferometer is the Michelson's interferometer of transfer arm beam-folding 4 times, second Michelson
Interferometer is conventional Michelson's interferometer, and specially system is coaxially mounted opposite by two Michelson's interferometers, possessed altogether
Michelson's interferometer with index glass mobile platform is constituted, and left side is the Michelson's interferometer of transfer arm beam-folding 4 times, is used
Produced in optical path difference position pulse, referred to as with reference to optical interferometer；And right side is conventional Michelson's interferometer, for being examined by light-metering
Survey, be referred to as tested optical interferometer.Stuck-module is made up of a hollow cube of speculum, prism group and a flat mirror, prism group
It is used to translate folded light beam group, is allowed to symmetrical on the transfer arm optical axis of tested optical interferometer, mobile module is with optical translation
Platform is translated by DC motor Driver.HeNe laser and tested light are imported to the collimation lens of two interferometers, two interferometers with optical fiber
Output optical signal export to photoelectricity testing part.Run by signal acquiring and processing system come control system, sampling interferogram
Diagram data, transmits data to computer and calculates spectrum.
In a preferred but unrestricted embodiment of the invention, as shown in figure 1, left side reference optical interferometer is rolled over using light beam
Stack structure, right side is tested optical interferometer and intends realizing that asymmetrical arrangement dual-beam is defeated using hollow cube of speculum of heavy caliber and light path
Go out interference pattern reception.Due to reference optical interferometer transfer arm beam-folding 4 times, so when index glass translates stage translation, with reference to dry
The change of interferometer optical path difference is 4 times of the tested optical interferometer in right side.When mobile module is from zero optical path difference position (ZPD) displacement x,
Then reference interferometer optical path difference change is 8x.The optical path difference change of two interferometers remains as 4 times of relations, and with optical path difference change
High synchronism.
The measured light that radiation spectrum curve is B (σ) is wideband light source, wave number σ value covering visible light scope.Due to
Conservation of energy reason, is respectively 50% ignoring beam splitter to absorb and assume beam splitting coating transmission and be reflected in incident light spectrum wave band
In the case of, photoelectricity testing part 2 and the measurement result of photoelectricity testing part 3 and be constantly equal to input light intensity I0.Photoelectricity testing part 2
The interference pattern intensity detected is：
Then the interference pattern intensity of photoelectricity testing part 3 is：
Absorption spectra is added in optical path for a (σ) measurement sample, the alternating component of two photoelectricity testing part measurement results
For：
The alternating component of two photoelectricity testing part measurement result sums is：
First to ItACAnd I (x)tAC(x)+IrAC(x) the poor interval sampling of aplanatism is carried out respectively, is then carried out FFT calculating and is obtained
B (σ) and B (σ) a (σ) is obtained, so as to release spectral absorption curve a (σ).The optical path difference positioning that reference light (632.8nm) interference is produced
Pulse spacing is 79.1nm optical path differences.By Nyquist sampling thheorems, theoretical most short detectable wavelength is 158.2nm
(63209.5cm-1), actual measured value is limited by the spectral bandwidth of photoelectric device used, mainly in visible light wave range.In actual measurement,
Need to be first to placing two interference output valve correction before sample.We selected typical absorbing material carries out experiment detection point to this experimental system
Analysis.
In a preferred but unrestricted embodiment of the invention, the system core is to study based on beam-folding technology
High-resolution HeNe laser interferencefringeses produce the feasibility of Model of Interferogram Sampling optical path difference partitioning method, thus do not consider spectrometer
Ensure the dynamic control measure of index glass stationarity in scanning process, but use hollow cube of speculum to replace level crossing to ensure light
Beam collimation, so as to ensure the simple scheme of the preferable modulation degree of interference pattern, reduces the complexity of system.With reference to interferometer folding
The collimation of folded light beam and tested optical interferometer transfer arm light beam ensures so that the synchronism of the optical path difference change of two interferometers is obtained
To (4 times of relations) is ensured, make its translational speed to translation stage insensitive, it is ensured that between the optical path difference sampling of tested optical interference
Every precision.
In a preferred but unrestricted embodiment of the invention, two interferometers use the symmetrical structure with optical axis to be laid out,
The optical path difference of reference interferometer and tested optical interferometer is synchronous caused by the swing that will significantly reduce in translation stage moving process
Error；Replace glass cubic speculum to eliminate vitreum refraction during translation stage is swung with hollow cube of speculum and cause two dry
The synchronous error of interferometer optical path difference change, so that tested optical interference sampling positioning interval precision will be greatly improved, and selects length
Operating distance translation stage, increase index glass scanning can realize the purpose of the resolution ratio and precision that improve spectral measurement.
In a preferred but unrestricted embodiment of the invention, because Model of Interferogram Sampling mode is sampled for dynamic scan, and
Sampling optical path difference positioned at intervals pulse is the high-resolution HeNe laser interference bars exported with reference to optical interferometer in scanning process
Line signal is produced through Zero-cross comparator circuit, therefore, servo-positioning resolution ratio of the measuring system to translation stage servo-drive system in itself
Do not required with precision, require nothing more than translation stage and relatively travel at the uniform speed.But it is as steady as possible to translation stage translation, namely translation
In, table top beat, pitching are small, and operation linearity and the depth of parallelism will height.Current high-accuracy electronic control translation stage beat, the angle of pitch are small
In 30 seconds, operation linearity and the depth of parallelism were 10-15 μm, can meet in this programme and translation stage linearity and the depth of parallelism are wanted
Ask.
It is as follows that the method for the present invention implements process：Visible optical Fourier transform based on beam-folding technology absorbs light
Resolution ratio and precision that spectrometry can reach, realize high light spectral resolution and the absorption spectrum of precision under the premise of low cost
The technology of measurement.Optical translation axisymmetric structure, backlash in utilization are used with reference to optical interferometer and tested optical interferometer layout
Emitter formation beam-folding, imports HeNe laser and tested light with optical fiber the collimation lens of two interferometers, two interferometers it is defeated
Optical signals are exported to photoelectricity testing part.The long light path servo controlled type optics mobile station increase scanning distance of selection, with one
Signal acquiring and processing system carrys out control system operation, and sampling interferogram diagram data transmits data to computer and calculates spectrum.
Presently preferred embodiments of the present invention is described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, wherein the equipment and structure be not described in detail to the greatest extent are construed as giving reality with the common mode in this area
Apply；Any those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the disclosure above
Methods and techniques content make many possible variations and modification to technical solution of the present invention, or be revised as equivalent variations etc.
Embodiment is imitated, this has no effect on the substantive content of the present invention.Therefore, every content without departing from technical solution of the present invention, foundation
The technical spirit of the present invention still falls within the present invention to any simple modifications, equivalents, and modifications made for any of the above embodiments
In the range of technical scheme protection.
Claims (8)
1. a kind of visible optical Fourier transform absorption spectrum measuring method, it is characterised in that comprise the following steps：
HeNe laser and tested light are imported to the collimation lens of two groups of Michelson's interferometers with optical fiber；
The output optical signal of two groups of Michelson's interferometers is exported to photoelectricity testing part；
Based on signal acquiring and processing system sampling interferogram diagram data；
By the data transfer of collection to computer and calculate absorption spectrum.
2. a kind of visible optical Fourier transform absorption spectrum measuring system, it is characterised in that including two groups of Michelson's interferometers,
Photoelectricity testing part and signal acquiring and processing system, the Michelson's interferometer are connected with the photoelectricity testing part and are followed by
Enter signal acquiring and processing system, two groups of Michelson's interferometers are the first Michelson's interferometer and the second Michelson
Interferometer, has index glass mobile platform, institute between first Michelson's interferometer and second Michelson's interferometer
State Michelson's interferometer of first Michelson's interferometer for transfer arm beam-folding 4 times, second Michelson interference
Instrument is conventional Michelson's interferometer.
3. a kind of visible optical Fourier transform absorption spectrum measuring system as claimed in claim 2, it is characterised in that prism group
It is made up of two prisms, the prism is allowed to the transfer arm on the second Michelson's interferometer to translate folded light beam group
Optical axis is symmetrical, and signal acquiring and processing system is to sampling interferogram diagram data and transmits data to computer calculating spectrum.
4. a kind of visible optical Fourier transform absorption spectrum measuring system as claimed in claim 2, it is characterised in that use optical fiber
HeNe laser and tested light are imported to the collimation lens of two groups of Michelson's interferometers, the output light of two groups of Michelson's interferometers
Signal is exported to the photoelectricity testing part.
5. a kind of visible optical Fourier transform absorption spectrum measuring system as claimed in claim 2, it is characterised in that described the
One Michelson's interferometer is provided with beam-folding structure.
6. a kind of visible optical Fourier transform absorption spectrum measuring system as described in claim 2-5 is any, it is characterised in that
Second Michelson's interferometer is provided with the hollow retroreflector of heavy caliber and light path, and interference pattern is exported to asymmetrical arrangement dual-beam
Reception, the optical path difference of first Michelson's interferometer and the second Michelson's interferometer is 4 times of relations.
7. a kind of visible optical Fourier transform absorption spectrum measuring system as claimed in claim 6, it is characterised in that described the
One Michelson's interferometer is refers to optical interferometer, and second Michelson's interferometer is tested optical interferometer.
8. a kind of visible optical Fourier transform absorption spectrum measuring system as claimed in claim 6, it is characterised in that described the
One Michelson's interferometer and second Michelson's interferometer are symmetrical.
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| CN111398215A (en) * | 2020-04-23 | 2020-07-10 | 山东大学 | Portable intermediate infrared high-sensitivity multi-component gas measurement and analysis system and working method thereof |
| CN113281296A (en) * | 2021-06-04 | 2021-08-20 | 中国电子科技集团公司第四十一研究所 | Terahertz detector absolute spectral response calibration device and calibration method |
| CN113447124A (en) * | 2021-06-29 | 2021-09-28 | 中国科学院空天信息创新研究院 | Low-sampling high-resolution interference spectrum system |
| CN114553319A (en) * | 2022-02-08 | 2022-05-27 | 山东大学 | Method for filtering partial coherent noise in light beam by using double-beam interferometer |
| CN114993941A (en) * | 2022-04-11 | 2022-09-02 | 北京航空航天大学 | Calibration-free anti-vibration absorption spectrum measurement method and system |
| CN117490847A (en) * | 2024-01-02 | 2024-02-02 | 中国海洋大学 | High-flux high-resolution static Fourier transform spectrum measurement method |
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