CN103308460A - Micro spectrometer based on micro-electro-mechanical interference platform - Google Patents
Micro spectrometer based on micro-electro-mechanical interference platform Download PDFInfo
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Abstract
The invention discloses a micro spectrometer based on a micro-electro-mechanical interference platform. The micro spectrometer comprises a light-path system and a circuit system, wherein the light-path system comprises a light source, two collimating lenses, a sample pool, a dichroscope, a beam splitter mirror, a total reflection mirror, a micro-electro-mechanical interference platform, a dichroscope, a light filter and two detector; the circuit system comprises a data processing module which comprises photoelectric detection, core algorithm and spectral data processing; light emitted from a light source ensures that excited samples in the sample pool emit sample light, and after the light source penetrating through the sample pool is split, one beam of the light is used as reference light, and the other beam of the light is used as feedback light. The three types of light are fed into the circuit system after a series of actions, the circuit system sends spectral information of the collected sample light into a spectral database system, and compares the spectral information with the known data in the spectral database so as to judge the chemical composition of unknown substances. The micro spectrometer disclosed by the invention has the advantages that the chemical composition of the unknown substances can be conveniently judged, the cost is low and the accuracy is high.
Description
Technical field
The present invention relates to optics and the electronic circuit design field of MEMS (micro electro mechanical system), more specifically, relate to a kind of micro spectrometer based on micro electronmechanical interference platform.
Background technology
MEMS (micro electro mechanical system) (Micro-electro-mechanical systems is called for short MEMS) is to utilize the produced three-dimensional devices of micro-processing technology, comprises that at least a movable structure satisfies certain mechanical effect.Therefore the MEMS device is applied to a lot of different fields owing to having used for reference the technique of integrated circuit.This century, increasing sensor and actuator all tended to adopt the MEMS technology, and wherein the MEMS (micro electro mechanical system) micro mirror is exactly one of them excellent illustration.The power that the MEMS (micro electro mechanical system) drives structure produces is very little, but be enough to drive minute surface it is deflected.The electrothermal micro mirror is the MEMS (micro electro mechanical system) that a dependence thermal deformation makes mirror deflection in numerous MEMS micro mirrors.The electrothermal micromirror systems mainly comprises minute surface, sway brace and three parts of actuating arm, and wherein actuating arm relies on exactly electrocaloric effect to produce deformation and drives mirror deflection.
Micro electronmechanical interference platform is take the MEMS micro mirror as the basis, and a kind of micro-optical interference device that adopts micro fabrication to design and produce cooperates the use of block prism, can be used as the very high miniature interference platform of a kind of precision.Micro electronmechanical interference platform has MEMS micro mirror and the block prism pickup groove of two one dimensions, only needs during use that block prism is put into the rear encapsulation of pickup groove and gets final product.
Existing to can be used for the spectrometer general cost that chemical substance analyzes high, and volume is large, is inconvenient to carry, and therefore, uses inconvenience.
Although in spectrometer art some comparatively ripe control programs have been arranged, not yet there was design proposal in the field take micro electronmechanical interference platform as core, especially low-cost, precision is high, microminiaturized design proposal.
Based on foregoing description, need badly and want a kind of spectrometer take micro electronmechanical interference platform as core, large to solve the volume that existing spectrometer exists, the problem that cost is high, be inconvenient to carry, and can also be applied to food safety detection, open-air mine locating, the fields such as safety anti-explosive, environmental monitoring.
Summary of the invention
For addressing the above problem, the object of the present invention is to provide a kind of micro spectrometer based on micro electronmechanical interference platform, this spectrometer can be judged the chemical composition of unknown materials accurately, and small volume, and cost is lower, be convenient for carrying.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of micro spectrometer based on micro electronmechanical interference platform comprises light path system and Circuits System;
Described light path system comprises light source, two collimation lenses, sample cell, dichroic mirror, spectroscope, completely reflecting mirror, micro electronmechanical interference platform, dichroic mirror, optical filter and two detector;
The reference light that light source sends enters sample cell through behind the collimation of collimation lens, sample cell is stimulated sends sample light, sample light is through together entering dichroic mirror with reference light after the collection of collimation lens, be divided into two-way light, one tunnel process completely reflecting mirror incides on the spectroscope, spectroscope reflects it on micro electronmechanical interference platform the first index glass, and the light that is reflected back incides on the 4 quadrant detector through spectroscope; Become interference light behind one tunnel process interference effect of micro electronmechanical interference platform, dichroic mirror is divided into sample light and the independent interference light of reference light two bundles with interference light; Two detectors are respectively applied to gather interferes sample light and interferes reference light;
Described Circuits System comprises data processing module, is used for the processing of detection, core algorithm and the spectroscopic data of light;
As preferably, described micro electronmechanical interference platform comprises the pickup groove of the first micro mirror, the second micro mirror and block prism, and described the first micro mirror and the second micro mirror both can be used as fixed mirror, also can be used as index glass and is used for mutually modulation of position.
As preferably, described the first micro mirror is the vertical large displacement MEMS micro mirror of electrothermal with the second micro mirror.
As preferably, described Circuits System also comprises 4 quadrant detector, is used for correcting the index glass deflection of micro electronmechanical interference platform.
As preferably, described Circuits System also comprises the interference light photoelectric conversion module, is used for interference reference light and the opto-electronic conversion of interfering sample light and pre-service in early stage that photodetector collects.
As preferably, described Circuits System also comprises analog-to-digital conversion module and D/A converter module, and analog-to-digital conversion module is used for the signal with the correction micro mirror deflection of the electric signal of interference light conversion and 4 quadrant detector output, collects in the data processing module and processes;
D/A converter module, simulated for the digital signal that will control micro electronmechanical interference platform.
The signal shaping module is processed for the signal filtering after the digital-to-analog conversion and amplification.
As preferably, described Circuits System also comprises SDU, is used for showing the spectrogram of unknown sample.
As preferably, described Circuits System also comprises security protection module, for the protection of the impact of powered on moment high voltage to micro electronmechanical interference platform.
As preferably, described Circuits System also comprises power module, is used to whole system to carry out the network type power supply.
As preferably, described micro spectrometer based on micro electronmechanical interference platform also comprises mechanical pedestal, and mechanical pedestal comprises front end device stuck-module, back end device stuck-module and machine shell; Front end device stuck-module is used for collimation lens, sample cell and the light source of fixed light path; The back end device stuck-module is used for little interference platform and electrooptical device is fixed, and is used for simultaneously the shading treatment of feedback module and intervention module; Shell is for the protection of inner structure, and is shockproof and prevent that outside veiling glare from entering internal system and producing and disturb.
Beneficial effect of the present invention is, because light path system of the present invention light out comprises the known reference light of light wave and unknown sample light, add Circuits System and introduce spectra database and spectroscopic data processing module, can be easily given data in the data that record and the spectra database be carried out data transmission and contrast, can share the common spectrum database resource, so the analysis through Circuits System can according to the reference light wavelength, calculate the chemical composition of unknown materials accurately.Again because light path adopts space optical path, and element is less, so easily repeat to realize.The present invention is owing to utilizing micro electronmechanical interference platform little, lightweight, easy to carry as core devices whole system volume.Because system adopts two index glass structural designs, actual debugging is convenient, and precision is high, and the index glass displacement is large, and systemic resolution is high.Since add closed-loop control system, can automatic calibration in the micro mirror work so can make.Because the light that reference light, exciting light and feedback are used shares same light source, so can reduce the complexity of system, reduce the requirement to optical device.Because simultaneously axially-movable of two micro mirrors on the micro electronmechanical interference platform, can correct the movement velocity that index glass actuating arm non-linear factor causes with this inhomogeneous, increase simultaneously the displacement that micro mirror moves, improve spectral resolution.
Description of drawings
Fig. 1 is the system chart of light path system provided by the invention;
Fig. 2 is the system chart of Circuits System provided by the invention;
Fig. 3 is mechanical pedestal schematic diagram provided by the invention.
Among the figure:
1, light source; 2, collimation lens; 3, sample cell; 4, collimation lens; 5, dichroic mirror; 6, block prism; 7, completely reflecting mirror; 8, spectroscope; 9,4 quadrant detector; 10, the first micro mirror; 11, the second micro mirror; 12, SDU; 13, signal processing module; 14, detector; 15, detector; 16, optical filter; 17, dichroic mirror; 18, interference light photoelectric conversion module; 19,4 quadrant detector photoelectric conversion module; 20, analog-to-digital conversion module; 21, data processing module; 22, power module; 23, security protection module; 24, D/A converter module; 25, signal shaping module; 26, micro electronmechanical interference platform interface; 27, spectra database; 28, spectroscopic data processing module; 29, SDU; 30, front end device stuck-module; 31, back end device stuck-module; 32, shell; 33, micro electronmechanical interference platform.
Embodiment
Further specify technical scheme of the present invention below by embodiment.
This kind comprises light path system, Circuits System and mechanical pedestal based on the micro spectrometer of micro electronmechanical interference platform.
Fig. 1 is the system chart of light path system provided by the invention.As shown in Figure 1, light path system comprises light source 1, collimation lens 2, sample cell 3, collimation lens 4, dichroic mirror 5, spectroscope 8, completely reflecting mirror 7, micro electronmechanical interference platform 33, dichroic mirror 17, optical filter 16 and detector 14 and detector 15.
Concrete, as shown in Figure 1, collimation lens 2 is used for the light of collimated light source 1 between light source 1 and sample cell 3.Collimation lens 4 is positioned at after the sample cell 3, is used for collecting the sample light that sample cell 3 inspires.Dichroic mirror 5 is arranged on after the collimation lens 4, is used for light is divided into two-way.Micro electronmechanical interference platform 33 adopts the MEMS processing technology to be made, and two identical electrothermal micro mirrors 10 that axially move and micro mirror 11 are arranged on the platform.One of them micro mirror is as the reference mirror, and another micro mirror is as index glass.On the micro electronmechanical interference platform block prism 6 is installed also.
Fig. 3 is mechanical pedestal schematic diagram provided by the invention.As shown in Figure 3, mechanical pedestal comprises front end device stuck-module 30, back end device stuck-module 31 and machine shell 32.Front end device stuck-module 30 is used for collimation lens, sample cell 3 and light source 1 device of fixed light path.Back end device stuck-module 31 is used for little interference platform and electrooptical device is fixed, and is used for simultaneously the shading treatment of feedback module and intervention module.Shell 32 is for the protection of inner structure, and is shockproof and prevent that outside veiling glare from entering internal system and producing and disturb.
Mechanical pedestal is mainly used to the required discrete component of fixed system accurately, because there is certain accuracy requirement in system to light path, therefore mechanical pedestal adopts the method that the fixed position clamps, optical element is placed in through precision machined anchor clamps inner, by draw-in groove and jump ring and fixedly the fit system of colloid realize that machinery assembles.Subelement can be made trickle adjustment according to the actual requirements, reserves the part draw-in groove in the simultaneously total design, convenient other spendable optical elements that add.In the stuck-module of little interference platform, introduce diaphragm system, prevent that light leak from causing system to produce error.
Whole micro electronmechanical interference platform 33 is fixed on the mechanical pedestal, uses winding displacement that the electrical interface of micro electronmechanical interference platform 33 is drawn.According to light path shown in Figure 1 optical element is fixed on the corresponding mechanical clamp, mechanical clamp is fixed on the base of mechanical cover 32.
Fig. 2 is the system chart of Circuits System provided by the invention.As shown in Figure 2, Circuits System comprises data processing module 21, spectroscopic data processing module 28,4 quadrant detector 9, interference light photoelectric conversion module 18, analog-to-digital conversion module 20 and D/A converter module 24, signal shaping module 25, SDU 29, security protection module 23, power module 22 and micro electronmechanical interference platform interface 26.
4 quadrant detector 9 is corrected the index glass deflection of micro electronmechanical interference platform for detection of the angle of micromirror movements deflection with this.
Interference light photoelectric conversion module 18 is used for interference reference light and the opto-electronic conversion of interfering sample light and the pre-service in early stage that detector collects.
Analog-to-digital conversion module 20 is used for the signal with the electric signal of interference light conversion and 4 quadrant detector 9 detection micro mirror drift angles, collects in the data processing module 21 and processes.D/A converter module 24 is simulated for the digital signal that will control micro electronmechanical interference platform.
SDU 29 is used for showing the spectrogram of unknown sample and the parameter comparison data that spectra database 27 provides.
Micro electronmechanical interference platform interface 26 is used for the signal that transmission drives micro mirror on little interference platform.
The whole system workflow is as follows:
After sample cell 3 is put into testing sample, open light source and Circuits System switch, the reference light that light source 1 sends enters sample cell 3 through behind the collimation of collimation lens 2, send sample light after 3 sample is excited, the light source that sees through sample cell is a branch of as feedback light with reference to light through a branch of conduct after the light splitting.Feedback light enters feedback light path, and being used in real time, the control micro mirror keeps same angle constant.Sample light is divided into two-beam through together entering dichroic mirror 5 with reference light behind the collecting action of collimation lens 4.Light beam incides on the spectroscope 8 through completely reflecting mirror 7, and the light of spectroscope 8 reflections incides on the micro mirror 10, and the light transmission spectroscope 8 of micro mirror 10 reflections incides on the 4 quadrant detector 9; Light beam becomes interference light through behind the interference effect of micro electronmechanical interference platform in addition.Dichroic mirror 17 is divided into interference light and interferes sample light and interfere the independent light of reference light two bundles.Two independent light electric explorers, be that the light that detector 14 and detector 15 are respectively applied to gather interference sample light and interfere reference light also will gather is sent into Circuits System, after the light of Circuits System by 21 pairs of collections of data processing module carries out data operation and corrects, the spectral information of the sample light that gathers is sent in the spectra database system, compare with signal known in the spectra database, judge the chemical composition of unknown materials with this.Spectroscopic data processing module 28 is processed spectral information by spectroscopic data mode sends in the SDU 29.The present invention can judge the chemical composition of unknown materials easily, and low-cost, and precision is high.
Adopt the design of time-modulation based on the Miniature Fourier spectrometer of micro electronmechanical interference platform, by micro electronmechanical interference platform the sample light frequency is modulated and got off to carry out data acquisition and processing (DAP), with the chemical composition of this analytic sample.When being V to amplitude of index glass loading, when frequency was the triangular wave linear voltage of f, micro mirror began to axially move.The one way distance of whole axially-movable is the axial maximum displacement L of micro mirror, according to the characteristic curve of L and V can learn micro mirror in whole L displacement with interior linear zone and inelastic region.In the real work because the variation of index glass displacement, the optical path difference of interference system is changed, take the monochromatic light ray spectrometry as example, and interference light light intensity I (δ)=0.5I (v) [1+cos (2 π δ/λ)] (wherein I (v) is monochromatic light intensity).
When optical path difference δ=n λ (λ is the sample light wavelength), I (δ)=I (v) is that the light intensity of interference light equates with monochromatic light intensity.Can find out the DC component that had both included 0.5I (v) among the I (δ) by the interference light light intensity expression, also include 0.5I (v) cos (cosine component of 2 π δ/λ).Actual spectrum only has the cosine modulation item to be only topmost part in measuring.Monochromatic spectrum only needs cosine wave (CW) is carried out Fourier transform and other processing can be measured this monochromatic wavelength.
Under the whole system working condition, because there is the inelastic region in micromirror movements, whole index glass axially-movable process is at the uniform velocity non-, and there is heterogeneity in the interference waveform that therefore produces.Therefore system introduces reference light and enters interference system, reference light is the light source of known wavelength, after together entering interference system with sample light, by the light splitting of rear end dichroic mirror 17 and the filtering of optical filter 16, sample light and reference light are divided into independent two-beam fully.After the opto-electronic conversion of interference light photoelectric conversion module 18, obtain reference light and sample light two-way interference signal.Since known with reference to light wavelength, therefore process the eigenwert η that can calibrate system itself by data.Therefore the relation of sample light and reference light can be expressed as λ
Sam=η * λ
Ref, λ
SamBe reference light wavelength, λ
RefBe the sample light wavelength.η in system be not one quantitatively, the factor η such as interference that system is subject to external environment become a known variables, therefore each η value of measuring all be definite value, so reference light all will accurately measure the sample light wavelength to what this value be demarcated the ability moment when needing each the measurement.
In addition, this system also introduces closed loop control module and is used for the control micro mirror in the process of axial displacement, because the micro mirror minute surface that external interference causes produces skew, makes the micro mirror minute surface remain at a fixing angle in whole motion process constant.System feedback utilizes 4 quadrant detector 9 as the pick-up unit of correcting, when the hot spot of micro mirror reflection is incident on the 4 quadrant detector 9,4 quadrant detector photoelectric conversion module 19 is converted to electric signal with light signal, circuit system gets glossing up coordinate at this moment and is (X0, Y0) by the calculating of four road voltages, hot spot is subjected to displacement at 4 quadrant detector after skew occurs the micro mirror minute surface, this moment, the coordinate of hot spot was (X1, Y1), can judge thus the variable quantity of facula deviation.System adjusts the driving voltage of micro mirror according to the variable quantity of coordinate offset, make micro mirror return to initial position, realizes the real-time control of micro mirror minute surface with this.
The spectrometer of this kind take micro electronmechanical interference platform as core, the chemical composition volume that not only can judge accurately unknown materials is little, and cost lower, be convenient for carrying, and can also be applied to food safety detection, open-air mine locating, the fields such as safety anti-explosive, environmental monitoring.
Know-why of the present invention has below been described in conjunction with specific embodiments.These are described just in order to explain principle of the present invention, and can not be interpreted as by any way limiting the scope of the invention.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present invention, and these modes all will fall within protection scope of the present invention.
Claims (10)
1. the micro spectrometer based on micro electronmechanical interference platform is characterized in that: comprise light path system and Circuits System;
Described light path system comprises light source (1), two collimation lenses (2,4), sample cell (3), dichroic mirror (5), spectroscope (8), completely reflecting mirror (7), micro electronmechanical interference platform (33), dichroic mirror (17), optical filter (16) and two detector (14,15);
Enter sample cell (3) behind the collimation of the reference light that light source (1) sends through collimation lens (2), sample cell (3) is stimulated sends sample light, together enter dichroic mirror (5) with reference light after the collection of sample light process collimation lens (4), be divided into two-way light, one tunnel process completely reflecting mirror (7) incides on the spectroscope (8), spectroscope (8) reflects it on micro electronmechanical interference platform (33) first index glass (10), and the light that is reflected back incides on the 4 quadrant detector (9) through spectroscope (8); Become interference light behind the interference effect of the one tunnel micro electronmechanical interference platform of process (33), dichroic mirror (17) is divided into sample light and the independent interference light of reference light two bundles with interference light; Two detectors (14,15) are respectively applied to gather interferes sample light and interferes reference light;
Described Circuits System comprises data processing module (21), is used for the processing of detection, core algorithm and the spectroscopic data of light.
2. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described micro electronmechanical interference platform (33) comprises the pickup groove of the first micro mirror (10), the second micro mirror (11) and block prism (6), described the first micro mirror (10) and the second micro mirror (11) both can be used as fixed mirror, also can be used as index glass and were used for mutually modulation of position.
3. the micro spectrometer based on micro electronmechanical interference platform according to claim 1 is characterized in that: described the first micro mirror (10) is the vertical greatly displacement MEMS micro mirror of electrothermal with the second micro mirror (11).
4. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises 4 quadrant detector (9), is used for correcting the index glass deflection of micro electronmechanical interference platform.
5. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises interference light photoelectric conversion module (18), is used for interference reference light and the opto-electronic conversion of interfering sample light and pre-service in early stage that photodetector collects.
6. the micro spectrometer based on micro electronmechanical interference platform according to claim 5 is characterized in that:
Described Circuits System also comprises analog-to-digital conversion module (20) and D/A converter module (24), analog-to-digital conversion module (20) is used for the signal with the correction micro mirror deflection of the electric signal of interference light conversion and 4 quadrant detector (9) output, collects in the data processing module (21) and processes;
D/A converter module (24), simulated for the digital signal that will control micro electronmechanical interference platform.
Signal shaping module (25) is processed for the signal filtering after the digital-to-analog conversion and amplification.
7. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises SDU (29), is used for showing the spectrogram of unknown sample.
8. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises security protection module (23), for the protection of the impact of powered on moment high voltage to micro electronmechanical interference platform.
9. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises power module (22), is used to whole system to carry out the network type power supply.
10. the micro spectrometer based on micro electronmechanical interference platform according to claim 1 is characterized in that: comprise that also mechanical pedestal, mechanical pedestal comprise front end device stuck-module (30), back end device stuck-module (31) and machine shell (32); Front end device stuck-module (30) is used for collimation lens, sample cell (3) and the light source (1) of fixed light path; Back end device stuck-module (31) is used for little interference platform and electrooptical device is fixed, and is used for simultaneously the shading treatment of feedback module and intervention module; Shell (32) is for the protection of inner structure, and is shockproof and prevent that outside veiling glare from entering internal system and producing and disturb.
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| CN113791038A (en) * | 2020-05-25 | 2021-12-14 | 中国石油化工股份有限公司 | Hazardous chemical substance leakage qualitative detection method and system |
| CN115980999A (en) * | 2023-03-14 | 2023-04-18 | 之江实验室 | Automatic light beam calibration device and method based on optical system |
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| CN103308460B (en) | 2016-08-10 |
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