CN203350177U - Micro spectrometer based on MEMS (Micro-electro-mechanical system) interference platform - Google Patents
Micro spectrometer based on MEMS (Micro-electro-mechanical system) interference platform Download PDFInfo
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- CN203350177U CN203350177U CN 201320351219 CN201320351219U CN203350177U CN 203350177 U CN203350177 U CN 203350177U CN 201320351219 CN201320351219 CN 201320351219 CN 201320351219 U CN201320351219 U CN 201320351219U CN 203350177 U CN203350177 U CN 203350177U
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Abstract
The utility model discloses a micro spectrometer based on an MEMS (Micro-electro-mechanical system) interference platform. The micro spectrometer comprises a light path system and a circuit system, wherein the light path system comprises a light source, two collimating lenses, a sample cell, a dichroscope, a spectroscope, a holophote, the MEMS interference platform, another dichroscope, a light filter and two detectors; the circuit system comprises a data processing module processing photoelectric detection, core algorithm and spectroscopic data; a sample in the sample cell is excited to give out sample light due to the light emitted from the light source, the light source penetrating through the sample cell is split, and then one beam of the split light source serves as reference light and the other beam of the split light source serves as feedback light. The three kinds of light are conveyed into the circuit system after a series of actions, and the spectral information of the sample light acquired by the circuit system is sent to a spectrum database system and is compared with the known data in a spectrum database, so as to judge the chemical composition of an unknown matter. According to the scheme, the chemical composition of the unknown matter can be conveniently judged, the cost is low and the accuracy is high.
Description
Technical field
The utility model relates to optics and the electronic circuit design field of MEMS (micro electro mechanical system), more specifically, relates to a kind of micro spectrometer based on micro electronmechanical interference platform.
Background technology
MEMS (micro electro mechanical system) (Micro-electro-mechanical systems is called for short MEMS) is to utilize the produced three-dimensional devices of micro-processing technology, at least comprises that a movable structure meets certain mechanical effect.The MEMS device is because therefore the technique of having used for reference integrated circuit be applied to a lot of different fields.This century, increasing sensor and actuator all tended to adopt the MEMS technology, and wherein the MEMS (micro electro mechanical system) micro mirror is exactly one of them excellent illustration.The power that the MEMS (micro electro mechanical system) drives structure produces is very little, but is enough to drive minute surface that it is deflected.In numerous MEMS micro mirrors, the electrothermal micro mirror is the MEMS (micro electro mechanical system) that a dependence thermal deformation makes mirror deflection.The electrothermal micromirror systems mainly comprises minute surface, sway brace and three parts of actuating arm, and wherein actuating arm relies on exactly electrocaloric effect to produce deformation and drives mirror deflection.
Micro electronmechanical interference platform be take the MEMS micro mirror as basis, and a kind of micro-optical interference device that adopts micro fabrication to design and produce, coordinate the use of block prism, can be used as the miniature interference platform that a kind of precision is very high.Micro electronmechanical interference platform has MEMS micro mirror and the block prism pickup groove of two one dimensions, only block prism need be put into to the rear encapsulation of pickup groove during use and get final product.
Existing to can be used for the spectrometer general cost that chemical substance analyzes high, and volume is large, is inconvenient to carry, and therefore, uses inconvenience.
Although in spectrometer art, some comparatively ripe control programs have been arranged, not yet there was design proposal in the field that the micro electronmechanical interference platform of take is core, especially low-cost, precision is high, microminiaturized design proposal.
Based on foregoing description, need badly and want a kind of spectrometer that micro electronmechanical interference platform is core of take, large to solve the volume that existing spectrometer exists, the problem that cost is high, be inconvenient to carry, and can also be applied to food safety detection, field mine locating, the fields such as safety anti-explosive, environmental monitoring.
Summary of the invention
For addressing the above problem, the purpose of this utility model is to provide a kind of micro spectrometer based on micro electronmechanical interference platform, and this spectrometer can be judged the chemical composition of unknown materials accurately, and small volume, and cost is lower, be convenient for carrying.
For solving the problems of the technologies described above, the utility model by the following technical solutions:
A kind of micro spectrometer based on micro electronmechanical interference platform, comprise light path system and Circuits System;
Described light path system comprises light source, two collimation lenses, sample cell, dichroic mirror, spectroscope, completely reflecting mirror, micro electronmechanical interference platform, dichroic mirror, optical filter and two detector;
The reference light that light source sends enters sample cell after the collimation of collimation lens, sample cell is stimulated and sends sample light, sample light together enters dichroic mirror with reference light after the collection of collimation lens, be divided into two-way light, one tunnel is incided on spectroscope through completely reflecting mirror, spectroscope reflects it on micro electronmechanical interference platform the first index glass, and the light be reflected back incides on 4 quadrant detector through spectroscope; One tunnel becomes interference light after the interference effect of micro electronmechanical interference platform, and dichroic mirror is divided into sample light and the independent interference light of reference light two bundle by interference light; Two detectors are respectively used to gather interferes sample light and interferes reference light;
Described Circuits System comprises data processing module, for the processing of detection, core algorithm and the spectroscopic data of light;
As preferably, described micro electronmechanical interference platform comprises the pickup groove of the first micro mirror, the second micro mirror and block prism, and described the first micro mirror and the second micro mirror both can be used as fixed mirror, also can be used as index glass and modulated mutually for position.
As preferably, described the first micro mirror can be vertical large displacement MEMS micro mirror with the second micro mirror.
As preferably, described Circuits System also comprises 4 quadrant detector, for correcting the index glass deflection of micro electronmechanical interference platform.
As preferably, described Circuits System also comprises the interference light photoelectric conversion module, the interference reference light collected for photodetector and interfere opto-electronic conversion and the pre-service in early stage of sample light.
As preferably, described Circuits System also comprises analog-to-digital conversion module and D/A converter module, and analog-to-digital conversion module, for the signal of the correction micro mirror deflection of the electric signal by the interference light conversion and 4 quadrant detector output, collects in data processing module and processed;
D/A converter module, simulated for the digital signal that will control micro electronmechanical interference platform.
The signal shaping module, process for the signal filtering after digital-to-analog conversion and amplification.
As preferably, described Circuits System also comprises SDU, for showing the spectrogram of unknown sample.
As preferably, described Circuits System also comprises security protection module, the impact for the protection of the powered on moment high voltage to micro electronmechanical interference platform.
As preferably, described Circuits System also comprises power module, is used to whole system to carry out the network type power supply.
As preferably, the described micro spectrometer based on micro electronmechanical interference platform also comprises mechanical pedestal, and mechanical pedestal comprises front end device stuck-module, back end device stuck-module and machine shell; Front end device stuck-module is for collimation lens, sample cell and the light source of fixed light path; The back end device stuck-module is fixed for micro-interference platform and electrooptical device, simultaneously for the shading treatment of feedback module and intervention module; Shell is for the protection of inner structure, shockproof and prevent that outside veiling glare from entering internal system and producing and disturb.
The beneficial effects of the utility model are, because the utility model light path system light out comprises reference light that light wave is known and unknown sample light, add Circuits System and introduce spectra database and spectroscopic data processing module, can be easily given data in the data that record and spectra database be carried out to data transmission and contrast, can share the common spectrum database resource, so the analysis through Circuits System, can, according to the reference light wavelength, calculate the chemical composition of unknown materials accurately.Because light path adopts space optical path, element is less again, so easily repeat to realize.This programme is owing to utilizing micro electronmechanical interference platform little, lightweight, easy to carry as core devices whole system volume.Because system adopts two index glass structural designs, actual debugging is convenient, and precision is high, and the index glass displacement is large, and systemic resolution is high.Owing to adding closed-loop control system, so can make can automatic calibration in micro mirror work.The light used due to reference light, exciting light and feedback shares same light source, so can reduce the complexity of system, reduces the requirement to optical device.Due to simultaneously axially-movable of two micro mirrors on micro electronmechanical interference platform, can correct with this movement velocity that index glass actuating arm non-linear factor causes inhomogeneous, increase the displacement that micro mirror moves simultaneously, improve spectral resolution.
The accompanying drawing explanation
The system chart of the light path system that Fig. 1 provides for the utility model;
The system chart of the Circuits System that Fig. 2 provides for the utility model;
The mechanical pedestal schematic diagram that Fig. 3 provides for the utility model.
In figure:
1, light source; 2, collimation lens; 3, sample cell; 4, collimation lens; 5, dichroic mirror; 6, block prism; 7, completely reflecting mirror; 8, spectroscope; 9,4 quadrant detector; 10, the first micro mirror; 11, the second micro mirror; 12, SDU; 13, signal processing module; 14, detector; 15, detector; 16, optical filter; 17, dichroic mirror; 18, interference light photoelectric conversion module; 19,4 quadrant detector photoelectric conversion module; 20, analog-to-digital conversion module; 21, data processing module; 22, power module; 23, security protection module; 24, D/A converter module; 25, signal shaping module; 26, micro electronmechanical interference platform interface; 27, spectra database; 28, spectroscopic data processing module; 29, SDU; 30, front end device stuck-module; 31, back end device stuck-module; 32, shell; 33, micro electronmechanical interference platform.
Embodiment
Further illustrate the technical solution of the utility model below by embodiment.
The micro spectrometer of this kind based on micro electronmechanical interference platform comprises light path system, Circuits System and mechanical pedestal.
The system chart of the light path system that Fig. 1 provides for the utility model.As shown in Figure 1, light path system comprises light source 1, collimation lens 2, sample cell 3, collimation lens 4, dichroic mirror 5, spectroscope 8, completely reflecting mirror 7, micro electronmechanical interference platform 33, dichroic mirror 17, optical filter 16 and detector 14 and detector 15.
Concrete, as shown in Figure 1, collimation lens 2, between light source 1 and sample cell 3, is used for the light of collimated light source 1.After collimation lens 4 is positioned at sample cell 3, be used for collecting the sample light that sample cell 3 inspires.After dichroic mirror 5 is arranged on collimation lens 4, be used for light is divided into to two-way.Micro electronmechanical interference platform 33 adopts the MEMS processing technology to be made, and two identical electrothermal micro mirrors 10 that axially move and micro mirror 11 are arranged on platform.One of them micro mirror is as the reference mirror, and another micro mirror is as index glass.On micro electronmechanical interference platform, block prism 6 also is installed.
The mechanical pedestal schematic diagram that Fig. 3 provides for the utility model.As shown in Figure 3, mechanical pedestal comprises front end device stuck-module 30, back end device stuck-module 31 and machine shell 32.Front end device stuck-module 30 is for collimation lens, sample cell 3 and light source 1 device of fixed light path.Back end device stuck-module 31 is fixed for micro-interference platform and electrooptical device, simultaneously for the shading treatment of feedback module and intervention module.Shell 32 is for the protection of inner structure, shockproof and prevent that outside veiling glare from entering internal system and producing and disturb.
Mechanical pedestal is mainly used to the required discrete component of fixed system accurately, because system has certain accuracy requirement to light path, therefore mechanical pedestal adopts the method that fixed position clamps, optical element is placed in through precision machined fixture inside, by draw-in groove and jump ring and fixedly the fit system of colloid realize the machinery assembling.Subelement can be made trickle adjustment according to the actual requirements, in total design simultaneously, reserves the part draw-in groove, convenient other spendable optical elements that add.Introduce diaphragm system in the stuck-module of micro-interference platform, prevent that light leak from causing system to produce error.
Whole micro electronmechanical interference platform 33 is fixed on mechanical pedestal, uses winding displacement that the electrical interface of micro electronmechanical interference platform 33 is drawn.According to light path shown in Fig. 1, optical element is fixed on corresponding mechanical clamp, mechanical clamp is fixed on the base of mechanical cover 32.
The system chart of the Circuits System that Fig. 2 provides for the utility model.As shown in Figure 2, Circuits System comprises data processing module 21, spectroscopic data processing module 28,4 quadrant detector 9, interference light photoelectric conversion module 18, analog-to-digital conversion module 20 and D/A converter module 24, signal shaping module 25, SDU 29, security protection module 23, power module 22 and micro electronmechanical interference platform interface 26.
4 quadrant detector 9, for detection of the angle of micromirror movements deflection, is corrected the index glass deflection of micro electronmechanical interference platform with this.
Opto-electronic conversion and the pre-service in early stage of the interference reference light that interference light photoelectric conversion module 18 collects for detector and interference sample light.
Analog-to-digital conversion module 20 detects the signal of micro mirror drift angle for the electric signal by the interference light conversion and 4 quadrant detector 9, collect in data processing module 21 and processed.D/A converter module 24 is simulated for the digital signal that will control micro electronmechanical interference platform.
The parameter comparison data that SDU 29 provides for the spectrogram that shows unknown sample and spectra database 27.
Micro electronmechanical interference platform interface 26 is for transmitting the signal that drives micro mirror on micro-interference platform.
The whole system workflow is as follows:
After sample cell 3 is put into testing sample, open light source and Circuits System switch, the reference light that light source 1 sends enters sample cell 3 after the collimation of collimation lens 2, send sample light after making in sample cell 3 sample be excited, the light source a branch of conduct after light splitting that sees through sample cell is a branch of as feedback light with reference to light.Feedback light enters feedback light path, for controlling in real time micro mirror, keeps same angle constant.Sample light together enters dichroic mirror 5 with reference light after the collecting action of collimation lens 4, is divided into two-beam.Light beam incides on spectroscope 8 through completely reflecting mirror 7, and the light of spectroscope 8 reflections incides on micro mirror 10, and the light transmission spectroscope 8 of micro mirror 10 reflections incides on 4 quadrant detector 9; Light beam becomes interference light after the interference effect of micro electronmechanical interference platform in addition.Dichroic mirror 17 is divided into interference light to interfere sample light and interfere the independent light of reference light two bundle.Two independent light electric explorers, be that detector 14 and detector 15 are respectively used to gather interference sample light and interfere reference light and the light of collection is sent into to Circuits System, after the light of Circuits System by 21 pairs of collections of data processing module carries out data operation and corrects, the spectral information of the sample light of collection is sent in the spectra database system, contrasted with signal known in spectra database, with this, judged the chemical composition of unknown materials.Spectroscopic data processing module 28 is processed spectral information mode by spectroscopic data sends in SDU 29.The utility model can be judged the chemical composition of unknown materials easily, and low-cost, and precision is high.
Miniature Fourier spectrometer based on micro electronmechanical interference platform adopts the design of time-modulation, by micro electronmechanical interference platform, the sample light frequency is modulated and is got off to carry out data acquisition and processing (DAP), with the chemical composition of this analytic sample.When to index glass, loading an amplitude, be V, during triangular wave linear voltage that frequency is f, micro mirror starts to axially move.The one way distance of whole axially-movable is the axial maximum displacement L of micro mirror, according to the characteristic curve of L and V can learn micro mirror in whole L displacement with interior linear zone and inelastic region.In real work due to the variation of index glass displacement, the optical path difference of interference system is changed, take the monochromatic light ray spectrometry as example, interference light light intensity I (δ)=0.5I (v) [1+cos (2 π δ/λ)] (wherein I (v) is monochromatic light intensity).
When optical path difference δ=n λ (λ is the sample light wavelength), I (δ)=I (v) is that the light intensity of interference light equates with monochromatic light intensity.Can find out by the interference light light intensity expression DC component that had both included 0.5I (v) in I (δ), also include the cosine component of 0.5I (v) cos (2 π δ/λ).Actual spectrum only has the cosine modulation item to be only topmost part in measuring.Monochromatic spectrum only need carry out Fourier transform and other processing can be measured this monochromatic wavelength to cosine wave (CW).
Under the whole system working condition, because there is inelastic region in micromirror movements, whole index glass axially-movable process is at the uniform velocity non-, and there is heterogeneity in the interference waveform therefore produced.Therefore system is introduced reference light and is entered interference system, the light source that reference light is known wavelength, after together entering interference system with sample light, by the light splitting of rear end dichroic mirror 17 and the filtering of optical filter 16, sample light and reference light are divided into to independent two-beam fully.Obtain reference light and sample light two-way interference signal after the opto-electronic conversion of interference light photoelectric conversion module 18.Because the reference light wavelength is known, therefore by data, process the eigenwert η that can calibrate system itself.Therefore the relation of sample light and reference light can be expressed as λ
sam=η * λ
ref, λ
samfor reference light wavelength, λ
reffor the sample light wavelength.η in system, be not one quantitatively, the factor η such as interference that system is subject to external environment become a known variables, therefore each η value of measuring be all definite value, thus reference light all to demarcate the ability moment to this value while needing each the measurement accurately measure the sample light wavelength.
In addition, this system is also introduced closed loop control module for controlling the process of micro mirror in axial displacement, and the micro mirror minute surface caused due to external interference produces skew, makes the micro mirror minute surface remain at a fixing angle in whole motion process constant.System feedback utilizes 4 quadrant detector 9 as the pick-up unit of correcting, when the hot spot of micro mirror reflection is incident on 4 quadrant detector 9,4 quadrant detector photoelectric conversion module 19 is converted to electric signal by light signal, circuit system, by the calculating of four road voltages, obtains glossing up coordinate now for (X0, Y0), after skew occurs the micro mirror minute surface, hot spot is subjected to displacement on 4 quadrant detector, now the coordinate of hot spot is (X1, Y1), can judge thus the variable quantity of facula deviation.System is adjusted the driving voltage of micro mirror according to the variable quantity of coordinate offset, make micro mirror return to initial position, with this, realizes the real-time control of micro mirror minute surface.
This kind be take the spectrometer that micro electronmechanical interference platform is core, the chemical composition volume that not only can judge accurately unknown materials is little, and cost lower, be convenient for carrying, and can also be applied to food safety detection, the field mine locating, the fields such as safety anti-explosive, environmental monitoring.
Know-why of the present utility model has below been described in conjunction with specific embodiments.These are described is in order to explain principle of the present utility model, and can not be interpreted as by any way the restriction to the utility model protection domain.Explanation based on herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present utility model, within these modes all will fall into protection domain of the present utility model.
Claims (10)
1. the micro spectrometer based on micro electronmechanical interference platform, is characterized in that: comprise light path system and Circuits System;
Described light path system comprises light source (1), two collimation lenses (2,4), sample cell (3), dichroic mirror (5), spectroscope (8), completely reflecting mirror (7), micro electronmechanical interference platform (33), dichroic mirror (17), optical filter (16) and two detector (14,15);
The reference light that light source (1) sends enters sample cell (3) after the collimation of collimation lens (2), sample cell (3) is stimulated and sends sample light, sample light together enters dichroic mirror (5) with reference light after the collection of collimation lens (4), be divided into two-way light, one tunnel is incided on spectroscope (8) through completely reflecting mirror (7), it is upper that spectroscope (8) reflects it to micro electronmechanical interference platform (33) first index glass (10), and the light be reflected back incides on 4 quadrant detector (9) through spectroscope (8); One tunnel becomes interference light after the interference effect of micro electronmechanical interference platform (33), and dichroic mirror (17) is divided into sample light and the independent interference light of reference light two bundle by interference light; Two detectors (14,15) are respectively used to gather interferes sample light and interferes reference light;
Described Circuits System comprises data processing module (21), for the processing of detection, core algorithm and the spectroscopic data of light.
2. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described micro electronmechanical interference platform (33) comprises the pickup groove of the first micro mirror (10), the second micro mirror (11) and block prism (6), described the first micro mirror (10) and the second micro mirror (11) both can be used as fixed mirror, also can be used as index glass and modulated mutually for position.
3. the micro spectrometer based on micro electronmechanical interference platform according to claim 1 is characterized in that: described the first micro mirror (10) is the vertical displacement MEMS micro mirror greatly of electrothermal with the second micro mirror (11).
4. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises 4 quadrant detector (9), for correcting the index glass deflection of micro electronmechanical interference platform.
5. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises interference light photoelectric conversion module (18), opto-electronic conversion and the pre-service in early stage of the interference reference light collected for photodetector and interference sample light.
6. the micro spectrometer based on micro electronmechanical interference platform according to claim 5 is characterized in that:
Described Circuits System also comprises analog-to-digital conversion module (20) and D/A converter module (24), analog-to-digital conversion module (20), for the signal of the correction micro mirror deflection of the electric signal by the interference light conversion and 4 quadrant detector (9) output, collects in data processing module (21) and is processed;
D/A converter module (24), simulated for the digital signal that will control micro electronmechanical interference platform.
Signal shaping module (25), process for the signal filtering after digital-to-analog conversion and amplification.
7. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises SDU (29), for showing the spectrogram of unknown sample.
8. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises security protection module (23), the impact for the protection of the powered on moment high voltage to micro electronmechanical interference platform.
9. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, it is characterized in that: described Circuits System also comprises power module (22), is used to whole system to carry out the network type power supply.
10. the micro spectrometer based on micro electronmechanical interference platform according to claim 1, is characterized in that: also comprise that mechanical pedestal, mechanical pedestal comprise front end device stuck-module (30), back end device stuck-module (31) and machine shell (32); Front end device stuck-module (30) is for collimation lens, sample cell (3) and the light source (1) of fixed light path; Back end device stuck-module (31) is fixed for micro-interference platform and electrooptical device, simultaneously for the shading treatment of feedback module and intervention module; Shell (32) is for the protection of inner structure, shockproof and prevent that outside veiling glare from entering internal system and producing and disturb.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308460A (en) * | 2013-06-18 | 2013-09-18 | 无锡微奥科技有限公司 | Micro spectrometer based on micro-electro-mechanical interference platform |
| CN104506750A (en) * | 2014-12-03 | 2015-04-08 | 中国科学院遥感与数字地球研究所 | Hyperspectral scanner |
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2013
- 2013-06-18 CN CN 201320351219 patent/CN203350177U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308460A (en) * | 2013-06-18 | 2013-09-18 | 无锡微奥科技有限公司 | Micro spectrometer based on micro-electro-mechanical interference platform |
| CN103308460B (en) * | 2013-06-18 | 2016-08-10 | 无锡微奥科技有限公司 | A kind of micro spectrometer based on micro electronmechanical interference platform |
| CN104506750A (en) * | 2014-12-03 | 2015-04-08 | 中国科学院遥感与数字地球研究所 | Hyperspectral scanner |
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