CN103335987A - Fourier spectrograph based on micro electro mechanical system - Google Patents
Fourier spectrograph based on micro electro mechanical system Download PDFInfo
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- CN103335987A CN103335987A CN2013102636657A CN201310263665A CN103335987A CN 103335987 A CN103335987 A CN 103335987A CN 2013102636657 A CN2013102636657 A CN 2013102636657A CN 201310263665 A CN201310263665 A CN 201310263665A CN 103335987 A CN103335987 A CN 103335987A
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Abstract
The invention discloses a Fourier spectrograph based on a micro electro mechanical system. The Fourier spectrograph based on the micro electro mechanical system comprises a first laser light source, a first alignment lens, a convergence lens and a sample basin, wherein laser light emitted by the first laser light source is aligned through the first alignment lens, radiates a sample in the sample basin after being converged through the convergence lens, and generates sample exciting light through reflection of the sample. The Fourier spectrograph based on the micro electro mechanical system further comprises a first reflector; after the sample exciting light is collected through the first reflector, the laser light and the sample exciting light are reflected through the first reflector and then radiate on the sample in the sample basin again, so as to generate the sample exciting light. The Fourier spectrograph based on the micro electro mechanical system is beneficial to collection of the sample exciting light, so that the frequency of radiating the sample is increased, and the intensity of the sample exciting light is improved.
Description
Technical field
The invention belongs to the spectrometer technical field, relate to a kind of Fourier spectrometer based on MEMS (micro electro mechanical system).
Background technology
Spectral instrument is the strong instrument of amalyzing substances constituent and structure, can carry out qualitative and quantitative analysis to sample, be widely used in fields such as medication chemistry, Di Kuang, oil, coal, environmental protection, customs, jewel evaluation, criminal investigation evaluation, and the on-line real time monitoring of these fields and industry and portable etc. requires to promote the development of spectral instrument microminiaturization, and wide application space is arranged.But the conventional Fourier transform spectrometer is bulky, expensive, is unfavorable for popularizing of product.
In recent years, the progress of microminiaturized spectrometer is very fast, the existing micro spectrometer overwhelming majority still adopts classical spectrometer principle, and is because the size of entrance slit aperture and diaphragm limited luminous flux and caused efficient seriously to descend, totally unfavorable to the analysis of some feeble signals.The common microminiaturized spectrometer based on modulation principle mainly is made up of colimated light system, beam splitting system and detection receiving system; Beam splitting system comprises two catoptrons on beam splitter and two arms of beam splitter, and one of them catoptron is index glass, and another catoptron is fixed mirror; Described detection receiving system comprises convergent lens group and planar array detector composition.This spectrometer adopts the time modulation system to realize the modulation of light signal, forms a plurality of localization interference fringes successively in detection system reception place; Index glass as catoptron needs the high-precision drive system of a cover, and the repeatability of this system and reliability are difficult to guarantee, the measurement real-time is relatively poor, mechanism's more complicated of this kind spectrometer, and volume is bigger.
Summary of the invention
The objective of the invention is to propose a kind of sample excitation light that is conducive to collect, increase the number of times of laser irradiation sample, improve the Fourier spectrometer based on MEMS (micro electro mechanical system) of sample excitation light intensity.
For reaching this purpose, the present invention by the following technical solutions:
A kind of Fourier spectrometer based on MEMS (micro electro mechanical system), comprise first LASER Light Source, first collimation lens, convergent lens, sample cell, the laser that described first LASER Light Source is sent collimates through first collimation lens, after assembling, convergent lens shines on the sample in the sample cell, produce sample excitation light through the sample reflection, also comprise first catoptron, sample excitation light is after first catoptron is collected, laser and sample excitation light shine after first mirror reflects on the sample in the sample cell again, produce sample excitation light.
Wherein, also comprise interference system, the 3rd LASER Light Source, and be arranged at first spectroscope between first collimation lens and the convergent lens, described interference system comprises a cube spectroscope, fixed mirror, index glass, be provided with the 4th spectroscope between the 3rd LASER Light Source and first spectroscope, the laser that the 3rd LASER Light Source is sent is divided into two bundles through the 4th spectroscope, wherein a branch ofly enter interference system through first spectroscope, the sample excitation light that the sample reflection produces is behind the convergent lens collimation, enter interference system through the reflection of first spectroscope, laser and sample excitation light are divided into two bundles respectively through cube spectroscope, a branch of sample excitation light and beam of laser incide fixed mirror, another bundle sample excitation light and another Shu Jiguang incide index glass, and two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope respectively after fixed mirror and index glass reflection.
Wherein, also comprise interference system, and be arranged at first spectroscope between first collimation lens and the convergent lens, described interference system comprises a cube spectroscope, fixed mirror, index glass, after laser and sample excitation light collimate through convergent lens, enter interference system through the reflection of first spectroscope, laser and sample excitation light are divided into two bundles respectively through cube spectroscope, a branch of sample excitation light and beam of laser incide fixed mirror, another bundle sample excitation light and another Shu Jiguang incide index glass, and two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope respectively after fixed mirror and index glass reflection.
Wherein, also comprise interference system, and be positioned at sample cell one side and with vertically disposed the 3rd catoptron of first catoptron, described interference system comprises a cube spectroscope, fixed mirror, index glass, laser shines on the sample after the 3rd catoptron and the common reflection of first catoptron, produce sample excitation light through the sample reflection, sample excitation light and laser enter interference system, through cube spectroscope sample excitation light and laser beam are divided into two bundles respectively, a branch of light of sample excitation light and a branch of light of laser incide fixed mirror, another Shu Guang of sample excitation light and another Shu Guang of laser incide index glass, and two bundle sample excitation light and two bundle laser beams incide the interference signal that obtains sample excitation light and laser on cube spectroscope respectively after fixed mirror and index glass reflection.
Wherein, described index glass is the MEMS micro mirror; Described fixed mirror is level crossing or MEMS micro mirror; Described fixed mirror and index glass are used interchangeably; Its minute surface carried out the phase place modulation by producing displacement when described fixed mirror adopted the MEMS micro mirror.
Wherein, also comprise feedback system, described feedback system comprises second reflective mirror, second spectroscope and 4 quadrant detector, the laser that described the 3rd LASER Light Source is sent is divided into two bundles through the 4th spectroscope, beam of laser enters interference system through first spectroscope, another Shu Jiguang is through second reflective mirror, shine index glass after the reflection of second spectroscope, after the index glass reflection, shine 4 quadrant detector, judge the deflection of index glass by the variation of analyzing the facula position on the 4 quadrant detector, and utilize the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise feedback system, described feedback system comprises second LASER Light Source, second spectroscope and 4 quadrant detector, the light beam that second LASER Light Source is sent shines index glass after the reflection of second spectroscope, after the index glass reflection, shine 4 quadrant detector, judge the deflection of index glass by the variation of analyzing the facula position on the 4 quadrant detector, and utilize the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise feedback system, described feedback system comprises second spectroscope and 4 quadrant detector, be provided with the 3rd spectroscope between described first collimation lens and first spectroscope, the laser that first LASER Light Source is sent is divided into two-beam through the 3rd spectroscope, wherein a branch ofly shine sample cell through first spectroscope, another Shu Jiguang shines index glass after the reflection of second spectroscope, after the index glass reflection, shine 4 quadrant detector, judge the deflection of index glass by the variation of analyzing the facula position on the 4 quadrant detector, and utilize the MEMS control system to adjust the motion of index glass, and it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise feedback system, described feedback system comprises 4 quadrant detector, laser is behind index glass reflected back cube spectroscope, wherein a part of light beam enters 4 quadrant detector, judges the deflection of index glass by the variation of analyzing the facula position on the 4 quadrant detector, and utilizes the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise the detection receiving system, described detection receiving system comprises dichroic mirror, the first trap optical filter, first detector, second detector, signal processing module, the interfering beam of sample laser interference light path and laser interference light path separates through dichroic mirror, wherein, sample excitation interference of light light beam is received by first detector behind the first trap optical filter, the interfering beam of laser is received by second detector, the signal that first detector and second detector receive is handled through signal processing module, obtains the spectrogram of sample.
Wherein, also be provided with the second trap optical filter between described first spectroscope and the interference system.
Wherein, also be provided with second collimation lens between described sample cell and the interference system.
Beneficial effect of the present invention is: the Fourier spectrometer that the present invention is based on MEMS (micro electro mechanical system) by the laser that sends in first LASER Light Source after the sample reflection of sample cell, increase by first catoptron and be used for collecting the sample excitation light that sample produces, and will further reflex to through the laser of first catoptron on the sample in the sample cell, reflect generation sample excitation light again through sample, can effectively utilize laser, be conducive to collect sample excitation light, increase the number of times of laser irradiation sample, improve the sample excitation light intensity, the signal of the sample excitation light that detector receives is strengthened, thereby make the spectral information that obtains more accurate.Should be the MEMS micro mirror based on the index glass in the Fourier spectrometer of MEMS (micro electro mechanical system) and fixed mirror, and make spectrometer can accurately control the motion of MEMS micro mirror, improve repeatability and the reliability of motion; Simultaneously, utilize MEMS micro mirror volume little, in light weight, do not need extra driving governor spare, easy to carry, can realize the microminiaturization of spectrometer.Based on the Fourier spectrometer of MEMS (micro electro mechanical system) by feedback system is set, index glass and fixed mirror can be realized in the course of the work from normal moveout correction, in addition, this feedback system is fed back in the front of index glass, utilize 4 quadrant detector to receive the light beam of index glass minute surface reflected back, correct the deflection of MEMS index glass minute surface by hot spot, can reduce the difficulty of MEMS encapsulation, feed back more directly, can improve feedback accuracy.
Description of drawings
Fig. 1 is the synoptic diagram of the Fourier spectrometer mechanism of first embodiment among the present invention;
Fig. 2 is the synoptic diagram of the Fourier spectrometer mechanism of second embodiment among the present invention;
Fig. 3 is the synoptic diagram of the Fourier spectrometer mechanism of the 3rd embodiment among the present invention;
Fig. 4 is the synoptic diagram of the Fourier spectrometer mechanism of the 4th embodiment among the present invention;
Fig. 5 is the synoptic diagram of the Fourier spectrometer mechanism of the 5th embodiment among the present invention;
Fig. 6 is preferred vertical big displacement electrothermal MEMS structural representation among the present invention.
Among the figure: 1, first LASER Light Source; 2, first collimation lens; 3, first spectroscope; 4, convergent lens; 5, sample cell; 6, first catoptron; 7, cube spectroscope; 8, MEMS fixed mirror; 9, MEMS index glass; 10, dichroic mirror; 11, the first trap optical filter; 12, first detector; 13, second detector; 14, signal processing module; 15, second LASER Light Source; 16, second spectroscope; 17,4 quadrant detector; 18, the 3rd spectroscope; 19, the 3rd LASER Light Source; 20, the 4th spectroscope; 21, the second trap optical filter; 22, second catoptron; 23, the 3rd catoptron; 24, second collimation lens; 25, minute surface; 26, the 3rd bimorph; 27, second tie-beam; 28, second bimorph; 29, first tie-beam; 30, first bimorph; 31, pedestal.
Embodiment
Further specify technical scheme of the present invention below in conjunction with accompanying drawing and by embodiment.
Shown in Fig. 1 to 5, a kind of Fourier spectrometer based on MEMS (micro electro mechanical system), comprise first LASER Light Source 1, first collimation lens 2, convergent lens 4, sample cell 5, the laser that first LASER Light Source 1 is sent is through first collimation lens, 2 collimations, after assembling, convergent lens 4 shines on the sample in the sample cell 5, produce sample excitation light through the sample reflection, should also comprise first catoptron 6 based on the Fourier spectrometer of MEMS (micro electro mechanical system), sample excitation light is after first catoptron 6 is collected, laser and sample excitation light shine after the reflection of first catoptron 6 on the sample in the sample cell 5 again, produce sample excitation light.The Fourier spectrometer that the present invention is based on MEMS (micro electro mechanical system) by the laser that sends in first LASER Light Source 1 after the sample reflection of sample cell 5, increase by first catoptron 6 and be used for collecting the sample excitation light that sample produces, and will further reflex to through the laser of first catoptron 6 on the sample in the sample cell 5, reflect generation sample excitation light again through sample, can effectively utilize laser, be conducive to collect sample excitation light, increase the number of times of laser irradiation sample, improve the sample excitation light intensity, the signal of the sample excitation light that detector receives is strengthened, thereby make the spectral information that obtains more accurate.
As shown in Figure 1, as first kind of preferred implementation of the present invention, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), the 3rd LASER Light Source 19, and be arranged at first spectroscope 3 between first collimation lens 2 and the convergent lens 4, interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, be provided with the 4th spectroscope 20 between the 3rd LASER Light Source 19 and first spectroscope 3, the laser that the 3rd LASER Light Source 19 is sent is divided into two bundles through the 4th spectroscope 20, wherein a branch ofly enter interference system through first spectroscope 3, the sample excitation light that the sample reflection produces is behind convergent lens 4 collimations, enter interference system through 3 reflections of first spectroscope, laser and sample excitation light are divided into two bundles respectively through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 9, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflections.In the present invention, also be provided with the second trap optical filter 21 between first spectroscope 3 and the interference system.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical big displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and its minute surface can produce displacement when fixed mirror 8 adopted the MEMS micro mirror simultaneously, can be used for the phase place modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), feedback system comprises second reflective mirror 22, second spectroscope 16 and 4 quadrant detector 17, the laser that the 3rd LASER Light Source 19 is sent is divided into two bundles through the 4th spectroscope 20, beam of laser enters interference system through first spectroscope 3, another Shu Jiguang is through second reflective mirror 22, shine index glass 9 after 16 reflections of second spectroscope, after index glass 9 reflections, shine 4 quadrant detector 17, judge the deflection of index glass 9 by the variation of analyzing the facula position on the 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, first LASER Light Source 1 is as the light source of sample excitation light, be used for shining sample and produce sample excitation light, and the 3rd LASER Light Source 19 by the 4th spectroscope 20 tell two the bundle after, beam of laser enters interference system as reference light, and another Shu Jiguang enters feedback system as the feedback light source, can reduce the quantity of light source, the complexity of minimizing system reduces the volume of spectrometer.
As shown in Figure 2, as second kind of preferred implementation of the present invention, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be arranged at first spectroscope 3 between first collimation lens 2 and the convergent lens 4, interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, after laser and sample excitation light collimate through convergent lens 4, enter interference system through 3 reflections of first spectroscope, laser and sample excitation light are divided into two bundles respectively through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 9, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflections.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical big displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and its minute surface can produce displacement when fixed mirror 8 adopted the MEMS micro mirror simultaneously, can be used for the phase place modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), feedback system comprises second LASER Light Source 15, second spectroscope 16 and 4 quadrant detector 17, the light beam that second LASER Light Source 15 is sent shines index glass 9 after 16 reflections of second spectroscope, after index glass 9 reflections, shine 4 quadrant detector 17, judge the deflection of index glass 9 by the variation of analyzing the facula position on the 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, a part of laser that first LASER Light Source 1 is sent is used for shining sample and produces sample excitation light, and another part laser can reduce the quantity of light source as reference light, reduces the complexity of system, reduces the volume of spectrometer.
As shown in Figure 3, as the third preferred implementation of the present invention, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be arranged at first spectroscope 3 between first collimation lens 2 and the convergent lens 4, interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, after laser and sample excitation light collimate through convergent lens 4, enter interference system through 3 reflections of first spectroscope, laser and sample excitation light are divided into two bundles respectively through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 7, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflections.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical big displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and its minute surface can produce displacement when fixed mirror 8 adopted the MEMS micro mirror simultaneously, can be used for the phase place modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), feedback system comprises second spectroscope 16 and 4 quadrant detector 17, be provided with the 3rd spectroscope 18 between first collimation lens 2 and first spectroscope 3, the laser that first LASER Light Source 1 is sent is divided into two-beam through the 3rd spectroscope 18, wherein a branch ofly shine sample cell 5 through first spectroscope 3, another Shu Jiguang shines index glass 9 after 16 reflections of second spectroscope, after index glass 9 reflections, shine 4 quadrant detector 17, judge the deflection of index glass 9 by the variation of analyzing the facula position on the 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, the laser that first LASER Light Source 1 is sent is namely as exciting light, reference light uses as the feedback light source again, by 3 light sources are combined into one, can reduce the light source usage quantity, the complexity of reduction system and production cost, simultaneously, the various piece of system more is easily integrated into together, make system architecture compacter, be conducive to the integrated of system.
As shown in Figure 4, as the 4th kind of preferred implementation of the present invention, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be arranged at first spectroscope 3 between first collimation lens 2 and the convergent lens 4, described interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, after laser and sample excitation light collimate through convergent lens 4, enter interference system through 3 reflections of first spectroscope, laser and sample excitation light are divided into two bundles respectively through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 7, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflections.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical big displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and its minute surface can produce displacement when fixed mirror 8 adopted the MEMS micro mirror simultaneously, can be used for the phase place modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), described feedback system comprises 4 quadrant detector 17, laser is behind index glass 9 reflected backs cube spectroscope 7, wherein a part of light beam enters 4 quadrant detector 17, judge the deflection of index glass 9 by the variation of analyzing the facula position on the 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, and it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, the light part that first LASER Light Source 1 is sent is as with reference to light, and is a part of as exciting light, after entering interference system, through the laser of index glass reflected back feedback light source as feedback system is arranged, can effectively reduce the usage quantity of light source, reduce production costs.
As shown in Figure 5, as the 5th kind of preferred implementation of the present invention, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be positioned at sample cell 5 one sides and with first catoptron, 6 vertically disposed the 3rd catoptrons 23, described interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, laser shines on the sample after the 3rd catoptron 23 and the 6 common reflections of first catoptron, produce sample excitation light through the sample reflection, sample excitation light and laser enter interference system, through cube spectroscope 7 sample excitation light and laser beam are divided into two bundles respectively, a branch of light of sample excitation light and a branch of light of laser incide fixed mirror 8, another Shu Guang of sample excitation light and another Shu Guang of laser incide index glass 7, two bundle sample excitation light and two bundle laser beams incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflect.Wherein, also be provided with second collimation lens 24 between described sample cell 5 and the interference system, index glass 9 is the MEMS micro mirror, fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical big displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and its minute surface can produce displacement when fixed mirror 8 adopted the MEMS micro mirror simultaneously, can be used for the phase place modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), described feedback system comprises second LASER Light Source 15, second spectroscope 16 and 4 quadrant detector 17, the light beam that second LASER Light Source 15 is sent shines index glass 9 after 16 reflections of second spectroscope, after index glass 9 reflections, shine 4 quadrant detector 17, judge the deflection of index glass 9 by the variation of analyzing the facula position on the 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, adopt the acting in conjunction of first catoptron 6 and the 3rd catoptron 23 to reflect sample excitation light and laser at sample cell 5 places, further strengthen the laser that shines on the sample, strengthen laser to effect number of times and the launching efficiency of sample, thereby strengthen the sample excitation light intensity.And in the present embodiment, the laser that first LASER Light Source 1 is sent again as exciting light, reduces the light source usage quantity namely as with reference to light, reduces production costs.
In the present invention, should also comprise the detection receiving system based on the Fourier spectrometer of MEMS (micro electro mechanical system), described detection receiving system comprises dichroic mirror 10, the first trap optical filter 11, first detector 12, second detector 13, signal processing module 14, the interfering beam of sample laser interference light path and laser interference light path through dichroic mirror 10 separately, wherein, sample excitation interference of light light beam is received by first detector 12 behind the first trap optical filter 11, the interfering beam of laser is received by second detector 13, the signal that first detector 12 and second detector 13 receive is handled through signal processing module 14, obtains the spectrogram of sample.
The present invention utilizes the MEMS micro mirror as the index glass 9 in the Fourier transform spectrometer, light path and fixed mirror 8, and interference system is made on the semiconductor base, can accurately control the motion of MEMS micro mirror, therefore repeatability and the reliability height of its motion simultaneously can guarantee index glass 9 moves in the interference system accuracy and repeatability.Utilize MEMS micro mirror volume little simultaneously, do not need the characteristics of extra driving governor spare, make the in light weight of spectrometer, easy to carry, realize modularization, integrated, microminiaturized easily; Simultaneously, utilize the integrated processing technology of semiconductor, product is integrated on the module, improved the fiduciary level of system.Preferably, in an embodiment of the present invention, make ultimate principle and the manufacture craft of MEMS micro mirror, can wait " the An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs " that was published in 2009 on the JEMEMS with reference to professor Xie Huikai of Univ Florida USA, its base material is silicon-on-insulator, this MEMS is the vertical big displacement MEMS of electrothermal, its structure as shown in Figure 6, carrying out fine motion under the minute surface 25 of MEMS micro mirror supported in first tie-beam 29 and being connected of second tie-beam 27 regulates, simultaneously, first tie-beam 29 is provided with first bimorph 30, second tie-beam 27 is provided with second bimorph 28, and be provided with the 3rd bimorph 26, the first tie-beams 29 in the junction of minute surface 25 and second tie-beam 27 and be connected on the pedestal 31.In addition, the light path of this spectrometer adopts space optical path, and the element of application is less, repeats to realize being easier to.
Further, in an embodiment of the present invention, increase feedback control system, the MEMS micro mirror can be realized from normal moveout correction in the course of the work.Simultaneously, this feedback system is fed back before being arranged on index glass 9 motions, utilize 4 quadrant detector to receive the light beam that the index glass minute surface reflects, change to correct the deflection of MEMS index glass minute surface by hot spot, design can reduce the difficulty of MEMS encapsulation and lead-in wire connection like this, and the light that directly utilizes the MEMS minute surface to reflect feeds back, and its feedback system is more direct, can improve the precision of MEMS control further.
In the present invention, first catoptron 6 and the 3rd catoptron 23 are concave mirror.Realize the light path of reflective optical system being conducive to the collection of sample excitation light by the catoptron of concave surface, increased the number of times of laser irradiation sample, improved the sample excitation light intensity, make the signal of the sample excitation light that detector receives stronger.
Fourier spectrometer simplicity of design based on MEMS (micro electro mechanical system) of the present invention, stability is high, and precision is accurate, and volume is little, has realized the microminiaturization of spectrometer.
Know-why of the present invention has below been described in conjunction with specific embodiments.These are described just in order to explain principle of the present invention, and can not be interpreted as limiting the scope of the invention by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present invention, and these modes all will fall within protection scope of the present invention.
Claims (12)
1. Fourier spectrometer based on MEMS (micro electro mechanical system), comprise first LASER Light Source (1), first collimation lens (2), convergent lens (4), sample cell (5), the laser that described first LASER Light Source (1) is sent collimates through first collimation lens (2), after assembling, convergent lens (4) shines on the sample in the sample cell (5), produce sample excitation light through the sample reflection, it is characterized in that: also comprise first catoptron (6), sample excitation light is after first catoptron (6) is collected, laser and sample excitation light shine after first catoptron (6) reflection on the sample in the sample cell (5) again, produce sample excitation light.
2. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: also comprise interference system, the 3rd LASER Light Source (19), and be arranged at first spectroscope (3) between first collimation lens (2) and the convergent lens (4), described interference system comprises a cube spectroscope (7), fixed mirror (8), index glass (9), be provided with the 4th spectroscope (20) between the 3rd LASER Light Source (19) and first spectroscope (3), the laser that the 3rd LASER Light Source (19) is sent is divided into two bundles through the 4th spectroscope (20), wherein a branch ofly enter interference system through first spectroscope (3), the sample excitation light that the sample reflection produces is behind convergent lens (4) collimation, enter interference system through first spectroscope (3) reflection, laser and sample excitation light are divided into two bundles respectively through cube spectroscope (7), a branch of sample excitation light and beam of laser incide fixed mirror (8), another bundle sample excitation light and another Shu Jiguang incide index glass (7), and two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope (7) respectively after fixed mirror (8) and index glass (9) reflection.
3. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: also comprise interference system, and be arranged at first spectroscope (3) between first collimation lens (2) and the convergent lens (4), described interference system comprises a cube spectroscope (7), fixed mirror (8), index glass (9), after laser and sample excitation light collimate through convergent lens (4), enter interference system through first spectroscope (3) reflection, laser and sample excitation light are divided into two bundles respectively through cube spectroscope (7), a branch of sample excitation light and beam of laser incide fixed mirror (8), another bundle sample excitation light and another Shu Jiguang incide index glass (7), and two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope (7) respectively after fixed mirror (8) and index glass (9) reflection.
4. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: also comprise interference system, and be positioned at sample cell (5) one sides and with vertically disposed the 3rd catoptron of first catoptron (6) (23), described interference system comprises a cube spectroscope (7), fixed mirror (8), index glass (9), laser shines on the sample after the common reflection of the 3rd catoptron (23) and first catoptron (6), produce sample excitation light through the sample reflection, sample excitation light and laser enter interference system, through cube spectroscope (7) sample excitation light and laser beam are divided into two bundles respectively, a branch of light of sample excitation light and a branch of light of laser incide fixed mirror (8), another Shu Guang of sample excitation light and another Shu Guang of laser incide index glass (7), and two bundle sample excitation light and two bundle laser beams incide the interference signal that obtains sample excitation light and laser on cube spectroscope (7) respectively after fixed mirror (8) and index glass (9) reflect.
5. according to each described a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) of claim 2 to 4, it is characterized in that: described index glass (9) is the MEMS micro mirror; Described fixed mirror (8) is level crossing or MEMS micro mirror; Described fixed mirror (8) and index glass (9) are used interchangeably; Its minute surface carried out the phase place modulation by producing displacement when described fixed mirror (8) adopted the MEMS micro mirror.
6. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 2, it is characterized in that: also comprise feedback system, described feedback system comprises second reflective mirror (22), second spectroscope (16) and 4 quadrant detector (17), the laser that described the 3rd LASER Light Source (19) is sent is divided into two bundles through the 4th spectroscope (20), beam of laser enters interference system through first spectroscope (3), another Shu Jiguang is through second reflective mirror (22), shine index glass (9) after second spectroscope (16) reflection, after index glass (9) reflection, shine 4 quadrant detector (17), judge the deflection of index glass (9) by the variation of analyzing the facula position on the 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
7. according to claim 3 or 4 described a kind of Fourier spectrometers based on MEMS (micro electro mechanical system), it is characterized in that: also comprise feedback system, described feedback system comprises second LASER Light Source (15), second spectroscope (16) and 4 quadrant detector (17), the light beam that second LASER Light Source (15) is sent shines index glass (9) after second spectroscope (16) reflection, after index glass (9) reflection, shine 4 quadrant detector (17), judge the deflection of index glass (9) by the variation of analyzing the facula position on the 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
8. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 3, it is characterized in that: also comprise feedback system, described feedback system comprises second spectroscope (16) and 4 quadrant detector (17), be provided with the 3rd spectroscope (18) between described first collimation lens (2) and first spectroscope (3), the laser that first LASER Light Source (1) is sent is divided into two-beam through the 3rd spectroscope (18), wherein a branch ofly shine sample cell (5) through first spectroscope (3), another Shu Jiguang shines index glass (9) after second spectroscope (16) reflection, after index glass (9) reflection, shine 4 quadrant detector (17), judge the deflection of index glass (9) by the variation of analyzing the facula position on the 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
9. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 3, it is characterized in that: also comprise feedback system, described feedback system comprises 4 quadrant detector (17), laser is behind index glass (9) reflected back cube spectroscope (7), wherein a part of light beam enters 4 quadrant detector (17), judge the deflection of index glass (9) by the variation of analyzing the facula position on the 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
10. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 5, it is characterized in that: also comprise the detection receiving system, described detection receiving system comprises dichroic mirror (10), the first trap optical filter (11), first detector (12), second detector (13), signal processing module (14), the interfering beam of sample laser interference light path and laser interference light path through dichroic mirror (10) separately, wherein, sample excitation interference of light light beam is received by first detector (12) behind the first trap optical filter (11), the interfering beam of laser is received by second detector (13), first detector (12) is handled through signal processing module (14) with the signal that second detector (13) receives, and obtains the spectrogram of sample.
11. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 2 is characterized in that: also be provided with the second trap optical filter (21) between described first spectroscope (3) and the interference system.
12. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 4 is characterized in that: also be provided with second collimation lens (24) between described sample cell (5) and the interference system.
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