CN203299123U - Fourier spectrometer based on micro electro mechanical system - Google Patents
Fourier spectrometer based on micro electro mechanical system Download PDFInfo
- Publication number
- CN203299123U CN203299123U CN2013203767694U CN201320376769U CN203299123U CN 203299123 U CN203299123 U CN 203299123U CN 2013203767694 U CN2013203767694 U CN 2013203767694U CN 201320376769 U CN201320376769 U CN 201320376769U CN 203299123 U CN203299123 U CN 203299123U
- Authority
- CN
- China
- Prior art keywords
- laser
- spectroscope
- sample
- index glass
- excitation light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Abstract
The utility model discloses a Fourier spectrometer based on a micro electro mechanical system. The Fourier spectrometer comprises a first laser source, a first collimating lens, a converging lens and a sample cell. Laser emitted by the first laser source is collimated through the first collimating lens and irradiates a sample in the sample cell after converged through the converging lens, and sample exciting light is generated by sample reflection. The Fourier spectrometer further comprises a first reflecting mirror. The sample exciting light is collected through the first reflecting mirror, the laser and the sample exciting light are reflected through the first reflecting mirror and then irradiate the sample in the sample cell again, and the sample exciting light is generated. The Fourier spectrometer based on the micro electro mechanical system is favorable for collecting the sample exciting light, times in sample irradiation by the laser is increased, and intensity of the sample exciting light is improved.
Description
Technical field
The utility model belongs to the spectrometer technical field, relates to a kind of Fourier spectrometer based on MEMS (micro electro mechanical system).
Background technology
Spectral instrument is the powerful tool of amalyzing substances constituent and structure, can carry out qualitative and quantitative analysis to sample, be widely used in the fields such as medication chemistry, Di Kuang, oil, coal, environmental protection, customs, jewel evaluation, criminal investigation evaluation, and the on-line real time monitoring of these fields and industry and portable etc. requires to promote the development of spectral instrument microminiaturization, and wide application space is arranged.But the conventional Fourier transform spectrometer is bulky, expensive, is unfavorable for the universal of product.
In recent years, the progress of microminiaturized spectrometer is very fast, the existing micro spectrometer overwhelming majority still adopts classical spectrometer principle, and is because the size of entrance slit aperture and diaphragm has limited luminous flux and caused the efficiency degradation, totally unfavorable to the analysis of some feeble signals.The common microminiaturized spectrometer based on modulation principle mainly is comprised of colimated light system, beam splitting system and detection receiving system; Beam splitting system comprises two catoptrons on beam splitter and two arms of beam splitter, and one of them catoptron is index glass, and another catoptron is fixed mirror; Described detection receiving system comprises that convergent lens group and planar array detector form.This spectrometer adopts the time-modulation mode to realize the modulation of light signal, in detection system reception place, forms successively a plurality of localization interference fringes; Index glass as catoptron needs a high-precision drive system of cover, and the repeatability of this system and reliability are difficult to guarantee, the measurement real-time is poor, mechanism's more complicated of this kind spectrometer, and volume is larger.
The utility model content
The purpose of this utility model is to propose a kind of sample excitation light that is conducive to collect, and increases the number of times of Ear Mucosa Treated by He Ne Laser Irradiation sample, improves the Fourier spectrometer based on MEMS (micro electro mechanical system) of sample excitation light intensity.
For reaching this purpose, the utility model by the following technical solutions:
A kind of Fourier spectrometer based on MEMS (micro electro mechanical system), comprise the first LASER Light Source, the first collimation lens, convergent lens, sample cell, the laser that described the first LASER Light Source is sent collimates through the first collimation lens, after assembling, convergent lens shines on the sample in sample cell, produce sample excitation light through the sample reflection, also comprise the first catoptron, sample excitation light is after the first catoptron is collected, laser and sample excitation light shine on sample in sample cell again after the first mirror reflects, produce sample excitation light.
wherein, also comprise interference system, the 3rd LASER Light Source, and be arranged at the first spectroscope between the first collimation lens and convergent lens, described interference system comprises a cube spectroscope, fixed mirror, index glass, be provided with the 4th spectroscope between the 3rd LASER Light Source and the first spectroscope, the laser that the 3rd LASER Light Source is sent is divided into two bundles through the 4th spectroscope, wherein a branch ofly through the first spectroscope, enter interference system, the sample excitation light that the sample reflection produces is after the convergent lens collimation, enter interference system through the first spectroscope reflection, laser and sample excitation light are divided into respectively two bundles through cube spectroscope, a branch of sample excitation light and beam of laser incide fixed mirror, another bundle sample excitation light and another Shu Jiguang incide index glass, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope respectively after fixed mirror and index glass reflection.
wherein, also comprise interference system, and be arranged at the first spectroscope between the first collimation lens and convergent lens, described interference system comprises a cube spectroscope, fixed mirror, index glass, laser and sample excitation light are after the convergent lens collimation, enter interference system through the first spectroscope reflection, laser and sample excitation light are divided into respectively two bundles through cube spectroscope, a branch of sample excitation light and beam of laser incide fixed mirror, another bundle sample excitation light and another Shu Jiguang incide index glass, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope respectively after fixed mirror and index glass reflection.
wherein, also comprise interference system, and be positioned at sample cell one side and with vertically disposed the 3rd catoptron of the first catoptron, described interference system comprises a cube spectroscope, fixed mirror, index glass, laser shines on sample after the 3rd catoptron and the common reflection of the first catoptron, produce sample excitation light through the sample reflection, sample excitation light and laser enter interference system, through cube spectroscope, sample excitation light and laser beam are divided into respectively two bundles, the light beam of sample excitation light and the light beam of laser incide fixed mirror, the another light beam of sample excitation light and the another light beam of laser incide index glass, two bundle sample excitation light and two bundle laser beams incide the interference signal that obtains sample excitation light and laser on cube spectroscope respectively after fixed mirror and index glass reflection.
Wherein, described index glass is the MEMS micro mirror; Described fixed mirror is level crossing or MEMS micro mirror; Described fixed mirror and index glass are used interchangeably; When described fixed mirror adopts the MEMS micro mirror, its minute surface, by producing displacement, carries out phase-modulation.
wherein, also comprise feedback system, described feedback system comprises the second reflective mirror, the second spectroscope and 4 quadrant detector, the laser that described the 3rd LASER Light Source is sent is divided into two bundles through the 4th spectroscope, beam of laser enters interference system through the first spectroscope, another Shu Jiguang is through the second reflective mirror, shine index glass after the second spectroscope reflection, shine 4 quadrant detector after the index glass reflection, judge the deflection of index glass by the variation of analyzing the facula position on 4 quadrant detector, and utilize the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise feedback system, described feedback system comprises the second LASER Light Source, the second spectroscope and 4 quadrant detector, the light beam that the second LASER Light Source is sent shines index glass after the second spectroscope reflection, shine 4 quadrant detector after the index glass reflection, by the variation of analyzing the facula position on 4 quadrant detector, judge the deflection of index glass, and utilize the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
wherein, also comprise feedback system, described feedback system comprises the second spectroscope and 4 quadrant detector, be provided with the 3rd spectroscope between described the first collimation lens and the first spectroscope, the laser that the first LASER Light Source is sent is divided into two-beam through the 3rd spectroscope, wherein a branch ofly through the first spectroscope, shine sample cell, another Shu Jiguang shines index glass after the second spectroscope reflection, shine 4 quadrant detector after the index glass reflection, judge the deflection of index glass by the variation of analyzing the facula position on 4 quadrant detector, and utilize the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise feedback system, described feedback system comprises 4 quadrant detector, laser is after index glass is reflected back cube spectroscope, wherein a part of light beam enters 4 quadrant detector, by the variation of analyzing the facula position on 4 quadrant detector, judges the deflection of index glass, and utilizes the MEMS control system to adjust the motion of index glass, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass.
Wherein, also comprise the detection receiving system, described detection receiving system comprises dichroic mirror, the first notch filtering light sheet, the first detector, the second detector, signal processing module, the interfering beam of sample laser interference light path and laser interference light path separates through dichroic mirror, wherein, sample excitation interference of light light beam is received by the first detector after the first notch filtering light sheet, the interfering beam of laser is received by the second detector, the signal that the first detector and the second detector receive is processed through signal processing module, obtains the spectrogram of sample.
Wherein, also be provided with the second notch filtering light sheet between described the first spectroscope and interference system.
Wherein, also be provided with the second collimation lens between described sample cell and interference system.
the beneficial effects of the utility model are: the utility model based on the Fourier spectrometer of MEMS (micro electro mechanical system) by the laser that sends in the first LASER Light Source after the sample reflection of sample cell, increase by the first catoptron and be used for collecting the sample excitation light that sample produces, and will further reflex to through the laser of the first catoptron on sample in sample cell, again reflect and produce sample excitation light through sample, can effectively utilize laser, be conducive to collect sample excitation light, increase the number of times of Ear Mucosa Treated by He Ne Laser Irradiation sample, improve the sample excitation light intensity, the signal of the sample excitation light that detector receives is strengthened, thereby make the spectral information that obtains more accurate.Should be the MEMS micro mirror based on the index glass in the Fourier spectrometer of MEMS (micro electro mechanical system) and fixed mirror, and make spectrometer can accurately control the motion of MEMS micro mirror, improve repeatability and the reliability of motion; Simultaneously, utilize MEMS micro mirror volume little, lightweight, do not need extra driving governor spare, easy to carry, can realize the microminiaturization of spectrometer.Based on the Fourier spectrometer of MEMS (micro electro mechanical system) by feedback system is set, make index glass and fixed mirror can realize automatic calibration in the course of the work, in addition, this feedback system is fed back in the front of index glass, utilize 4 quadrant detector to receive the light beam that the index glass mirror-reflection returns, correct the deflection of MEMS index glass minute surface by hot spot, can reduce the difficulty of MEMS encapsulation, feed back more directly, can improve feedback accuracy.
Description of drawings
Fig. 1 is the schematic diagram of the Fourier spectrometer mechanism of the first embodiment in the utility model;
Fig. 2 is the schematic diagram of the Fourier spectrometer mechanism of the second embodiment in the utility model;
Fig. 3 is the schematic diagram of the Fourier spectrometer mechanism of the 3rd embodiment in the utility model;
Fig. 4 is the schematic diagram of the Fourier spectrometer mechanism of the 4th embodiment in the utility model;
Fig. 5 is the schematic diagram of the Fourier spectrometer mechanism of the 5th embodiment in the utility model;
Fig. 6 is preferred vertical large displacement electrothermal MEMS structural representation in the utility model.
In figure: 1, the first LASER Light Source; 2, the first collimation lens; 3, the first spectroscope; 4, convergent lens; 5, sample cell; 6, the first catoptron; 7, cube spectroscope; 8, MEMS fixed mirror; 9, MEMS index glass; 10, dichroic mirror; 11, the first notch filtering light sheet; 12, the first detector; 13, the second detector; 14, signal processing module; 15, the second LASER Light Source; 16, the second spectroscope; 17,4 quadrant detector; 18, the 3rd spectroscope; 19, the 3rd LASER Light Source; 20, the 4th spectroscope; 21, the second notch filtering light sheet; 22, the second catoptron; 23, the 3rd catoptron; 24, the second collimation lens; 25, minute surface; 26, the 3rd bimorph; 27, the second tie-beam; 28, the second bimorph; 29, the first tie-beam; 30, the first bimorph; 31, pedestal.
Embodiment
Further illustrate the technical solution of the utility model below in conjunction with accompanying drawing and by embodiment.
as shown in Fig. 1 to 5, a kind of Fourier spectrometer based on MEMS (micro electro mechanical system), comprise the first LASER Light Source 1, the first collimation lens 2, convergent lens 4, sample cell 5, the laser that the first LASER Light Source 1 is sent is through the first collimation lens 2 collimations, after assembling, convergent lens 4 shines on the sample in sample cell 5, produce sample excitation light through the sample reflection, should also comprise the first catoptron 6 based on the Fourier spectrometer of MEMS (micro electro mechanical system), sample excitation light is after the first catoptron 6 is collected, laser and sample excitation light shine on sample in sample cell 5 again after the first catoptron 6 reflection, produce sample excitation light.the utility model based on the Fourier spectrometer of MEMS (micro electro mechanical system) by the laser that sends in the first LASER Light Source 1 after the sample reflection of sample cell 5, increase by the first catoptron 6 and be used for collecting the sample excitation light that sample produces, and will further reflex to through the laser of the first catoptron 6 on sample in sample cell 5, again reflect and produce sample excitation light through sample, can effectively utilize laser, be conducive to collect sample excitation light, increase the number of times of Ear Mucosa Treated by He Ne Laser Irradiation sample, improve the sample excitation light intensity, the signal of the sample excitation light that detector receives is strengthened, thereby make the spectral information that obtains more accurate.
as shown in Figure 1, as the first preferred implementation of the present utility model, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), the 3rd LASER Light Source 19, and be arranged at the first spectroscope 3 between the first collimation lens 2 and convergent lens 4, interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, be provided with the 4th spectroscope 20 between the 3rd LASER Light Source 19 and the first spectroscope 3, the laser that the 3rd LASER Light Source 19 is sent is divided into two bundles through the 4th spectroscope 20, wherein a branch ofly through the first spectroscope 3, enter interference system, the sample excitation light that the sample reflection produces is after convergent lens 4 collimations, enter interference system through the first spectroscope 3 reflections, laser and sample excitation light are divided into respectively two bundles through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 9, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflect.In the utility model, also be provided with the second notch filtering light sheet 21 between the first spectroscope 3 and interference system.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical large displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 adopts the MEMS micro mirror simultaneously, its minute surface can produce displacement, can be used for phase-modulation.
should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), feedback system comprises the second reflective mirror 22, the second spectroscope 16 and 4 quadrant detector 17, the laser that the 3rd LASER Light Source 19 is sent is divided into two bundles through the 4th spectroscope 20, beam of laser enters interference system through the first spectroscope 3, another Shu Jiguang is through the second reflective mirror 22, shine index glass 9 after the second spectroscope 16 reflections, shine 4 quadrant detector 17 after index glass 9 reflections, judge the deflection of index glass 9 by the variation of analyzing the facula position on 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, the first LASER Light Source 1 is as the light source of sample excitation light, be used for shining sample and produce sample excitation light, and the 3rd LASER Light Source 19 by the 4th spectroscope 20 separate two the bundle after, beam of laser enters interference system as reference light, and another Shu Jiguang enters feedback system as the feedback light source, can reduce the quantity of light source, the complexity of minimizing system, reduce the volume of spectrometer.
as shown in Figure 2, as the second preferred implementation of the present utility model, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be arranged at the first spectroscope 3 between the first collimation lens 2 and convergent lens 4, interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, laser and sample excitation light are after convergent lens 4 collimations, enter interference system through the first spectroscope 3 reflections, laser and sample excitation light are divided into respectively two bundles through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 9, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflect.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical large displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 adopts the MEMS micro mirror simultaneously, its minute surface can produce displacement, can be used for phase-modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), feedback system comprises the second LASER Light Source 15, the second spectroscope 16 and 4 quadrant detector 17, the light beam that the second LASER Light Source 15 is sent shines index glass 9 after the second spectroscope 16 reflections, shine 4 quadrant detector 17 after index glass 9 reflections, judge the deflection of index glass 9 by the variation of analyzing the facula position on 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, a part of laser that the first LASER Light Source 1 is sent is used for shining sample and produces sample excitation light, and another part laser, as reference light, can reduce the quantity of light source, reduces the complexity of system, reduces the volume of spectrometer.
as shown in Figure 3, as the third preferred implementation of the present utility model, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be arranged at the first spectroscope 3 between the first collimation lens 2 and convergent lens 4, interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, laser and sample excitation light are after convergent lens 4 collimations, enter interference system through the first spectroscope 3 reflections, laser and sample excitation light are divided into respectively two bundles through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 7, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflect.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical large displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 adopts the MEMS micro mirror simultaneously, its minute surface can produce displacement, can be used for phase-modulation.
should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), feedback system comprises the second spectroscope 16 and 4 quadrant detector 17, be provided with the 3rd spectroscope 18 between the first collimation lens 2 and the first spectroscope 3, the laser that the first LASER Light Source 1 is sent is divided into two-beam through the 3rd spectroscope 18, wherein a branch ofly through the first spectroscope 3, shine sample cell 5, another Shu Jiguang shines index glass 9 after the second spectroscope 16 reflections, shine 4 quadrant detector 17 after index glass 9 reflections, judge the deflection of index glass 9 by the variation of analyzing the facula position on 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, the laser that the first LASER Light Source 1 is sent is namely as exciting light, reference light, use as the feedback light source again, by 3 light sources are combined into one, can reduce the light source usage quantity, the complexity of reduction system and production cost, simultaneously, the various piece of system more is easily integrated into together, make system architecture compacter, be conducive to the integrated of system.
as shown in Figure 4, as the 4th kind of preferred implementation of the present utility model, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be arranged at the first spectroscope 3 between the first collimation lens 2 and convergent lens 4, described interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, laser and sample excitation light are after convergent lens 4 collimations, enter interference system through the first spectroscope 3 reflections, laser and sample excitation light are divided into respectively two bundles through cube spectroscope 7, a branch of sample excitation light and beam of laser incide fixed mirror 8, another bundle sample excitation light and another Shu Jiguang incide index glass 7, two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflect.Wherein, index glass 9 is the MEMS micro mirror, and fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical large displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 adopts the MEMS micro mirror simultaneously, its minute surface can produce displacement, can be used for phase-modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), described feedback system comprises 4 quadrant detector 17, laser is after index glass 9 is reflected back cube spectroscope 7, wherein a part of light beam enters 4 quadrant detector 17, judge the deflection of index glass 9 by the variation of analyzing the facula position on 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, and it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, the light part that the first LASER Light Source 1 is sent is as with reference to light, and is a part of as exciting light, after entering interference system, the laser that is reflected back through index glass has the feedback light source as feedback system, can effectively reduce the usage quantity of light source, reduces production costs.
as shown in Figure 5, as the 5th kind of preferred implementation of the present utility model, should also comprise interference system based on the Fourier spectrometer of MEMS (micro electro mechanical system), and be positioned at sample cell 5 one sides and with vertically disposed the 3rd catoptron 23 of the first catoptron 6, described interference system comprises cube spectroscope 7, fixed mirror 8, index glass 9, laser shines on sample after the 3rd catoptron 23 and the first common reflection of catoptron 6, produce sample excitation light through the sample reflection, sample excitation light and laser enter interference system, through cube spectroscope 7, sample excitation light and laser beam are divided into respectively two bundles, the light beam of sample excitation light and the light beam of laser incide fixed mirror 8, the another light beam of sample excitation light and the another light beam of laser incide index glass 7, two bundle sample excitation light and two bundle laser beams incide the interference signal that obtains sample excitation light and laser on cube spectroscope 7 respectively after fixed mirror 8 and index glass 9 reflect.Wherein, also be provided with the second collimation lens 24 between described sample cell 5 and interference system, index glass 9 is the MEMS micro mirror, fixed mirror 8 is level crossing or MEMS micro mirror, fixed mirror 8 can be the vertical large displacement micro mirror of electrothermal with index glass 9, fixed mirror 8 and index glass 9 are used interchangeably, and when fixed mirror 8 adopts the MEMS micro mirror simultaneously, its minute surface can produce displacement, can be used for phase-modulation.
Should also comprise feedback system based on the Fourier spectrometer of MEMS (micro electro mechanical system), described feedback system comprises the second LASER Light Source 15, the second spectroscope 16 and 4 quadrant detector 17, the light beam that the second LASER Light Source 15 is sent shines index glass 9 after the second spectroscope 16 reflections, shine 4 quadrant detector 17 after index glass 9 reflections, judge the deflection of index glass 9 by the variation of analyzing the facula position on 4 quadrant detector 17, and utilize the MEMS control system to adjust the motion of index glass 9, it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass 9.
In the present embodiment, adopt the acting in conjunction of the first catoptron 6 and the 3rd catoptron 23 to reflect sample excitation light and laser at sample cell 5 places, further strengthen the laser that shines on sample, strengthen effect number of times and the launching efficiency of laser to sample, thereby strengthen the sample excitation light intensity.And in the present embodiment, the laser that the first LASER Light Source 1 is sent, namely as with reference to light,, again as exciting light, reduces the light source usage quantity, reduces production costs.
in the utility model, should also comprise the detection receiving system based on the Fourier spectrometer of MEMS (micro electro mechanical system), described detection receiving system comprises dichroic mirror 10, the first notch filtering light sheet 11, the first detector 12, the second detector 13, signal processing module 14, the interfering beam of sample laser interference light path and laser interference light path through dichroic mirror 10 separately, wherein, sample excitation interference of light light beam is received by the first detector 12 after the first notch filtering light sheet 11, the interfering beam of laser is received by the second detector 13, the signal that the first detector 12 and the second detector 13 receive is processed through signal processing module 14, obtain the spectrogram of sample.
The utility model utilizes the MEMS micro mirror as the index glass 9 in the Fourier transform spectrometer, light path and fixed mirror 8, and interference system is made on semiconductor base, can accurately control the motion of MEMS micro mirror, repeatability and the reliability of its motion simultaneously are high, therefore can guarantee accuracy and the repeatability of index glass 9 motions in interference system.Utilize simultaneously MEMS micro mirror volume little, do not need the characteristics of extra driving governor spare, make the lightweight of spectrometer, easy to carry, easily realize modularization, integrated, microminiaturized; Simultaneously, utilize the integrated processing technology of semiconductor, product is integrated on a module, improved the fiduciary level of system.preferably, in embodiment of the present utility model, make ultimate principle and the manufacture craft of MEMS micro mirror, can wait " the An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs " that was published in 2009 on JEMEMS with reference to professor Xie Huikai of Univ Florida USA, its base material is silicon-on-insulator, this MEMS is the vertical large displacement MEMS of electrothermal, its structure as shown in Figure 6, the minute surface 25 of MEMS micro mirror carries out micro-positioning regulators under supporting in the first tie-beam 29 and being connected of the second tie-beam 27, simultaneously, be provided with the first bimorph 30 on the first tie-beam 29, be provided with the second bimorph 28 on the second tie-beam 27, and in the junction of minute surface 25 and the second tie-beam 27, be provided with the 3rd bimorph 26, the first tie-beam 29 is connected on pedestal 31.In addition, the light path of this spectrometer adopts space optical path, and the element of application is less, repeats to realize being easier to.
Further, in embodiment of the present utility model, increase feedback control system, make the MEMS micro mirror can realize automatic calibration in the course of the work.Simultaneously, this feedback system is fed back before being arranged on index glass 9 motions, utilize 4 quadrant detector to receive the light beam that the index glass mirror-reflection is returned, change to correct the deflection of MEMS index glass minute surface by hot spot, design can reduce the difficulty of MEMS encapsulation and lead-in wire connection like this, and the light that directly utilizes the MEMS mirror-reflection to return feeds back, and its feedback system is more direct, can improve further the precision that MEMS controls.
In the utility model, the first catoptron 6 and the 3rd catoptron 23 are concave mirror.Realize the light path of reflective optical system by the catoptron of concave surface, be conducive to the collection of sample excitation light, increased the number of times of Ear Mucosa Treated by He Ne Laser Irradiation sample, improved the sample excitation light intensity, make the signal of the sample excitation light that detector receives stronger.
Fourier spectrometer based on MEMS (micro electro mechanical system) simplicity of design of the present utility model, stability is high, and precision is accurate, and volume is little, has realized the microminiaturization of spectrometer.
Know-why of the present utility model has below been described in conjunction with specific embodiments.These are described is in order to explain principle of the present utility model, and can not be interpreted as by any way the restriction to the utility model protection domain.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present utility model, within these modes all will fall into protection domain of the present utility model.
Claims (12)
1. Fourier spectrometer based on MEMS (micro electro mechanical system), comprise the first LASER Light Source (1), the first collimation lens (2), convergent lens (4), sample cell (5), the laser that described the first LASER Light Source (1) is sent collimates through the first collimation lens (2), after assembling, convergent lens (4) shines on the sample in sample cell (5), produce sample excitation light through the sample reflection, it is characterized in that: also comprise the first catoptron (6), sample excitation light is after the first catoptron (6) is collected, laser and sample excitation light shine on sample in sample cell (5) again after the first catoptron (6) reflection, produce sample excitation light.
2. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: also comprise interference system, the 3rd LASER Light Source (19), and be arranged at the first spectroscope (3) between the first collimation lens (2) and convergent lens (4), described interference system comprises a cube spectroscope (7), fixed mirror (8), index glass (9), be provided with the 4th spectroscope (20) between the 3rd LASER Light Source (19) and the first spectroscope (3), the laser that the 3rd LASER Light Source (19) is sent is divided into two bundles through the 4th spectroscope (20), wherein a branch ofly through the first spectroscope (3), enter interference system, the sample excitation light that the sample reflection produces is after convergent lens (4) collimation, enter interference system through the first spectroscope (3) reflection, laser and sample excitation light are divided into respectively two bundles through cube spectroscope (7), a branch of sample excitation light and beam of laser incide fixed mirror (8), another bundle sample excitation light and another Shu Jiguang incide index glass (7), two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on a cube spectroscope (7) respectively after fixed mirror (8) and index glass (9) reflect.
3. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: also comprise interference system, and be arranged at the first spectroscope (3) between the first collimation lens (2) and convergent lens (4), described interference system comprises a cube spectroscope (7), fixed mirror (8), index glass (9), laser and sample excitation light are after convergent lens (4) collimation, enter interference system through the first spectroscope (3) reflection, laser and sample excitation light are divided into respectively two bundles through cube spectroscope (7), a branch of sample excitation light and beam of laser incide fixed mirror (8), another bundle sample excitation light and another Shu Jiguang incide index glass (7), two bundle sample excitation light and two bundle laser incide the interference signal that obtains sample excitation light and laser on a cube spectroscope (7) respectively after fixed mirror (8) and index glass (9) reflect.
4. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: also comprise interference system, and be positioned at sample cell (5) one sides and with vertically disposed the 3rd catoptron of the first catoptron (6) (23), described interference system comprises a cube spectroscope (7), fixed mirror (8), index glass (9), laser shines on sample after the common reflection of the 3rd catoptron (23) and the first catoptron (6), produce sample excitation light through the sample reflection, sample excitation light and laser enter interference system, through cube spectroscope (7), sample excitation light and laser beam are divided into respectively two bundles, the light beam of sample excitation light and the light beam of laser incide fixed mirror (8), the another light beam of sample excitation light and the another light beam of laser incide index glass (7), two bundle sample excitation light and two bundle laser beams incide the interference signal that obtains sample excitation light and laser on a cube spectroscope (7) respectively after fixed mirror (8) and index glass (9) reflect.
5. the described a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) of according to claim 2 to 4 any one, it is characterized in that: described index glass (9) is the MEMS micro mirror; Described fixed mirror (8) is level crossing or MEMS micro mirror; Described fixed mirror (8) and index glass (9) are used interchangeably; When described fixed mirror (8) adopts the MEMS micro mirror, its minute surface, by producing displacement, carries out phase-modulation.
6. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 2, it is characterized in that: also comprise feedback system, described feedback system comprises the second reflective mirror (22), the second spectroscope (16) and 4 quadrant detector (17), the laser that described the 3rd LASER Light Source (19) is sent is divided into two bundles through the 4th spectroscope (20), beam of laser enters interference system through the first spectroscope (3), another Shu Jiguang is through the second reflective mirror (22), shine index glass (9) after the second spectroscope (16) reflection, shine 4 quadrant detector (17) after index glass (9) reflection, judge the deflection of index glass (9) by the variation of analyzing the facula position on 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
7. according to claim 3 or 4 described a kind of Fourier spectrometers based on MEMS (micro electro mechanical system), it is characterized in that: also comprise feedback system, described feedback system comprises the second LASER Light Source (15), the second spectroscope (16) and 4 quadrant detector (17), the light beam that the second LASER Light Source (15) is sent shines index glass (9) after the second spectroscope (16) reflection, shine 4 quadrant detector (17) after index glass (9) reflection, judge the deflection of index glass (9) by the variation of analyzing the facula position on 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
8. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 3, it is characterized in that: also comprise feedback system, described feedback system comprises the second spectroscope (16) and 4 quadrant detector (17), be provided with the 3rd spectroscope (18) between described the first collimation lens (2) and the first spectroscope (3), the laser that the first LASER Light Source (1) is sent is divided into two-beam through the 3rd spectroscope (18), wherein a branch ofly through the first spectroscope (3), shine sample cell (5), another Shu Jiguang shines index glass (9) after the second spectroscope (16) reflection, shine 4 quadrant detector (17) after index glass (9) reflection, judge the deflection of index glass (9) by the variation of analyzing the facula position on 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
9. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 3, it is characterized in that: also comprise feedback system, described feedback system comprises 4 quadrant detector (17), laser is after index glass (9) is reflected back a cube spectroscope (7), wherein a part of light beam enters 4 quadrant detector (17), judge the deflection of index glass (9) by the variation of analyzing the facula position on 4 quadrant detector (17), and utilize the MEMS control system to adjust the motion of index glass (9), it is moved along optical axis direction always, realize the FEEDBACK CONTROL of index glass (9).
10. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 5, it is characterized in that: also comprise the detection receiving system, described detection receiving system comprises dichroic mirror (10), the first notch filtering light sheet (11), the first detector (12), the second detector (13), signal processing module (14), the interfering beam of sample laser interference light path and laser interference light path through dichroic mirror (10) separately, wherein, sample excitation interference of light light beam is received by the first detector (12) after the first notch filtering light sheet (11), the interfering beam of laser is received by the second detector (13), the first detector (12) is processed through signal processing module (14) with the signal that the second detector (13) receives, obtain the spectrogram of sample.
11. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 2 is characterized in that: also be provided with the second notch filtering light sheet (21) between described the first spectroscope (3) and interference system.
12. a kind of Fourier spectrometer based on MEMS (micro electro mechanical system) according to claim 4 is characterized in that: also be provided with the second collimation lens (24) between described sample cell (5) and interference system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203767694U CN203299123U (en) | 2013-06-26 | 2013-06-26 | Fourier spectrometer based on micro electro mechanical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203767694U CN203299123U (en) | 2013-06-26 | 2013-06-26 | Fourier spectrometer based on micro electro mechanical system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203299123U true CN203299123U (en) | 2013-11-20 |
Family
ID=49575128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203767694U Withdrawn - After Issue CN203299123U (en) | 2013-06-26 | 2013-06-26 | Fourier spectrometer based on micro electro mechanical system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203299123U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103335987A (en) * | 2013-06-26 | 2013-10-02 | 无锡微奥科技有限公司 | Fourier spectrograph based on micro electro mechanical system |
| CN109115341A (en) * | 2018-07-12 | 2019-01-01 | 郑州轻工业学院 | A kind of Fourier spectrometer spectrum recovering device and restored method |
-
2013
- 2013-06-26 CN CN2013203767694U patent/CN203299123U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103335987A (en) * | 2013-06-26 | 2013-10-02 | 无锡微奥科技有限公司 | Fourier spectrograph based on micro electro mechanical system |
| CN103335987B (en) * | 2013-06-26 | 2016-09-21 | 无锡微奥科技有限公司 | Fourier spectrometer based on MEMS |
| CN109115341A (en) * | 2018-07-12 | 2019-01-01 | 郑州轻工业学院 | A kind of Fourier spectrometer spectrum recovering device and restored method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103344609B (en) | A kind of Miniature Fourier transform spectrometer | |
| JP2009544015A (en) | Compact catadioptric spectrometer | |
| CN102359949A (en) | High resolution micro infrared spectrometer based on MEMS scanning micromirror | |
| CN103048046A (en) | Double-beam spectrometer | |
| CN202938795U (en) | Laser measuring device for measuring micro angles | |
| CN101995327A (en) | Optical path structure for concave grating diffraction efficiency tester | |
| CN103335987B (en) | Fourier spectrometer based on MEMS | |
| CN109470177B (en) | Three-dimensional angle measuring method and device based on double gratings | |
| CN102183359B (en) | Method and device for detecting collimation of light beams | |
| CN104180901A (en) | Transmittance spectrum measurement device and method for ultra-narrow band filter | |
| CN111426610B (en) | Particulate matter particle size measurement system and mass spectrometer | |
| CN203299123U (en) | Fourier spectrometer based on micro electro mechanical system | |
| CN102928397A (en) | Optical system of holographic needlepoint enhanced Raman spectrometer | |
| CN203396702U (en) | Miniature Fourier transformation spectrometer | |
| CN102359818A (en) | Infrared spectrum interferometer and infrared spectrometer employing interferometer | |
| CN102213585B (en) | Single-light-source dual-light-path parallel confocal measurement system | |
| CN104502067A (en) | Relative diffraction efficiency tester for Fourier transformation plane grating | |
| CN104330053A (en) | Micro angle measurement method and device | |
| CN102121819B (en) | Nanometer-resolution total-reflection differential micrometric displacement measurement method and device | |
| CN110441200B (en) | Laser measuring device | |
| CN206757044U (en) | A kind of windfinding radar | |
| CN113341180B (en) | Multi-mode measurement method and measurement system based on near-field non-hole probe | |
| CN212321830U (en) | Laser radar for remote detection | |
| CN202119408U (en) | Single light source and double light paths parallel confocal measurement system | |
| CN202886284U (en) | Holographic tip-enhanced Raman spectrometer optical system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131120 Effective date of abandoning: 20160921 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |