CN102226716A - Light path structure of echelle grating spectrometer - Google Patents
Light path structure of echelle grating spectrometer Download PDFInfo
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- CN102226716A CN102226716A CN 201110075671 CN201110075671A CN102226716A CN 102226716 A CN102226716 A CN 102226716A CN 201110075671 CN201110075671 CN 201110075671 CN 201110075671 A CN201110075671 A CN 201110075671A CN 102226716 A CN102226716 A CN 102226716A
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Abstract
The invention discloses a light path structure of an echelle grating spectrometer, which belongs to the technical field of light spectrum. The invention aims to provide a light path structure applied to high-resolution wide-spectral-range and full-spectrum direct-reading spectrum analysis. According to the technical solution of the invention, the light path structure comprises a condensing mirror, an incident pinhole, a parabolic collimating lens, an echelle grating, a cross dispersion prism set, a parabolic focusing mirror and a detector; light to be measured is collected by the condensing mirror and enters the light path of a spectrometer through the incident pinhole; an incident light beam is collimated into parallel light beams by the parabolic collimating lens, then after the parallel light beams are processed by the echelle grating and the cross dispersion prism set to generate two-dimensional cross dispersion, then the two-dimensional cross dispersion is imaged to a target surface of the detector by the parabolic focusing mirror, thereby obtaining a two-dimensional dispersing spectral image. The light path structure of an echelle grating spectrometer disclosed by the invention is simple and reliable in structure, has no movable parts, and does not need to carry out multiple scanning.
Description
Technical field
The invention belongs to the spectral technique field, relate to a kind of light channel structure of echelle spectrometer.
Background technology
Spectral instrument is the important analysis testing tool that is widely used in fields such as scientific research, commercial production.Adapt to high resolving power more, more the wide spectrum scope, compose the application requirements of direct-reading entirely, be the developing direction of spectrometric instrument.The main beam splitter of echelle grating conduct that echelle spectrometer adopts high chromatic dispersion, high resolving power, all-wave to glitter, resolution characteristic is higher than conventional spectrometer more than 20 times, and have volume little, compose the advantage of transient state direct-reading entirely, belong to high-end spectrometric instrument.At present only have minority developed country to carry out the exploitation of this quasi-instrument, companies such as PI, LEEMAN, Andor have released first generation commercialization instrument.The continuous light source atomic absorption echelle spectrometer contrAA that Jena, Germany company in 2004 releases is with historically new significance to the development of Atomic Absorption Spectrometer device.But it adopts traditional sweep record mode, and the beam split light path system is made up of echelle grating, detector and scanning mechanism, and therefore, this spectrometric instrument volume is relatively large, can not realize composing full direct-reading.
Summary of the invention
The light channel structure that the purpose of this invention is to provide a kind of echelle spectrometer, it adopts echelle grating as main beam splitter, utilize prism to produce crossed dispersion, realize high resolving power, wide spectrum scope, compose the spectral analysis of direct-reading entirely perpendicular to the principal dispersion direction.
To achieve these goals, technical scheme of the present invention is as follows:
A kind of light channel structure of echelle spectrometer, comprise condenser, incident pin hole, parabolic collimating mirror, echelle grating, crossed dispersion prism group, parabolic focus lamp and detector, condenser places light path foremost, and the optical convergence of collecting is to incident pin hole place; On the incident ray direction of condenser and the formation of incident pin hole, place the parabolic collimating mirror, the center of the center of parabolic collimating mirror and condenser and incident pin hole is contour; On catoptrical direction, place echelle grating, the centre-height of echelle grating is catoptrical optical axis height; Crossed dispersion prism group is positioned on the reflected light direction by the echelle grating outgoing; Light through the reflection of crossed dispersion prism group is reflected by the parabolic focus lamp, focuses on the detector at last.
Principle of work of the present invention is: treat that photometry collected by condenser, focus on incident pin hole place, after the transmission of incident pin hole, incident ray is radiated on the parabolic collimating mirror and forms parallel beam, parallel beam by the reflection of parabolic collimating mirror projects on the echelle grating, forms dispersed light beam through the echelle grating diffraction, and this dispersion direction is the principal dispersion direction of light path, because echelle grating is used the inferior and bigger angle of diffraction in the higher order of diffraction, the different diffraction level of dispersed light is inferior to be overlapped each other; By the reflection of crossed dispersion prism group, light beam produces chromatic dispersion on vertical principal dispersion direction afterwards, makes the different orders of diffraction inferior to crossed dispersion prism group shooting angle difference, forms two-dimentional crossed dispersion light beam; This light beam is imaged onto on the target surface of detector through the reflection of parabolic focus lamp, thereby obtains treating the two-dimension chromatic dispersion spectrogram of photometry.The principal dispersion direction is the dispersion direction of echelle grating in the spectrogram, vertical with the inferior direction of separating of the order of diffraction, the spectrum of single wavelength can focus on the spectrogram a bit, therefore, the spectral profile in the two-dimension spectrum image that receives by planar array detector can be analyzed and obtain the spectral information for the treatment of that photometry comprises.Adopt two kinds of different material prism combinations as the crossed dispersion element, can solve single prism in the too small problem that causes resolution to descend of the above wave band dispersion measure of 600nm, make instrument even relatively in overall optical spectral limit internal dispersion, the spectral coverage scope of work is wideer.
Good effect of the present invention is: realized high resolving power, wide spectrum scope, composed the spectral analysis of transient state direct-reading entirely.Because principal dispersion element echelle grating is operated in high diffracting grade, big angle of diffraction, its dispersive power is higher more than seven times than general diffraction grating; Adopt prism as the crossed dispersion element, can solve the problem that overlaps each other between optical grating diffraction level time; The two-dimension chromatic dispersion spectrum picture receives by planar array detector, need not scanning in the wide spectrum scope, can realize multispectral transient state direct-reading.The present invention is simple and reliable for structure, no moving-member, and processing ease can be advantageously applied in the echelle spectrometer system.
Description of drawings
Fig. 1 is the light channel structure synoptic diagram of echelle spectrometer of the present invention.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further details.
As shown in Figure 1, the light channel structure of echelle spectrometer of the present invention comprises condenser 1, incident pin hole 2, parabolic collimating mirror 3, echelle grating 4, crossed dispersion prism group 5, parabolic focus lamp 6 and detector 7; Condenser 1 places light path foremost, and the optical convergence of collecting is to incident pin hole 2 places; On the incident ray direction of condenser 1 and 2 formation of incident pin hole, place parabolic collimating mirror 3, center and condenser 1 and incident pin hole 2 centers are contour; On the reflected light direction of condenser 1 and 2 formation of incident pin hole, place echelle grating 4, centre-height is catoptrical optical axis height; Crossed dispersion prism group 5 is positioned on the reflected light direction by echelle grating 4 outgoing; After being reflected by parabolic focus lamp 6, the light of crossed dispersion prism group 5 reflections focuses on the detector 7.
The present invention implements by structure shown in Figure 1, and wherein, the material of incident pin hole 2 adopts 45# steel disc, pinhole diameter 15 μ m; Parabolic collimating mirror 3 and parabolic focus lamp 6 are from the axle parabolic mirror, and off-axis angle is 18 °, and the substrate material adopts K9 optical glass, aluminize in the surface, and focal length is 321.8mm; The 54.49g/mm delineation echelle grating that echelle grating 4 adopts grating engineering center of Changchun Institute of Optics, Fine Mechanics and Physics, CAS to produce, 46 ° of incidents; Crossed dispersion prism group 5 materials adopt the biprism glued construction, form 28.3 ° of incidents by the fused quartz prism of 13.45 ° of the calcium fluoride prism of 37 ° of drift angles and drift angles; Detector 7 adopts e2v back lighting type CCD 47-10 chip, resolution 1024 * 1024 pixels, and spectral response is the highest in the 400-800nm scope; The one-piece construction of instrument adopts aluminum alloy materials, under the less situation of working environment fluctuation, can guarantee imaging requirements and alleviate instruments weight.
In conjunction with the characteristics of echelle grating, the invention provides a kind of novel light channel structure that is used for echelle spectrometer.The present invention adopts prism to cooperate with echelle grating to carry out crossed dispersion, and planar array detector receives two-dimentional spectrogram, need not traditional high-resolution spectroscopy instrument scanning survey commonly used, and compact conformation can be realized real full spectrum transient state direct-reading.
Claims (2)
1. the light channel structure of an echelle spectrometer, it is characterized in that, this light channel structure comprises condenser (1), incident pin hole (2), parabolic collimating mirror (3), echelle grating (4), crossed dispersion prism group (5), parabolic focus lamp (6) and detector (7), condenser (1) places light path foremost, and the optical convergence of collecting is located to incident pin hole (2); On the incident ray direction of condenser (1) and incident pin hole (2) formation, place parabolic collimating mirror (3), the center of the center of parabolic collimating mirror (3) and condenser (1) and incident pin hole (2) is contour; On catoptrical direction, place echelle grating (4), the centre-height of echelle grating (4) is catoptrical optical axis height; Crossed dispersion prism group (5) is positioned on the reflected light direction by echelle grating (4) outgoing; Light through crossed dispersion prism group (5) reflection is reflected by parabolic focus lamp (6), focuses at last on the detector (7).
2. the light channel structure of a kind of echelle spectrometer as claimed in claim 1 is characterized in that, described crossed dispersion prism group (5) adopts the biprism structure, is that the fused quartz prism gummed that 37 ° calcium fluoride prism and drift angle are 13.45 ° is formed by drift angle.
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538969A (en) * | 2012-01-17 | 2012-07-04 | 北京华夏科创仪器技术有限公司 | High resolution spectrometer and optical calibrating method thereof |
| CN102539360A (en) * | 2011-12-31 | 2012-07-04 | 聚光科技(杭州)股份有限公司 | Light splitting device and method for improving spectrum probing range |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
| CN102809428A (en) * | 2012-07-25 | 2012-12-05 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting small echelle grating spectrometer |
| CN102879091A (en) * | 2012-08-28 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method |
| CN103900689A (en) * | 2014-03-28 | 2014-07-02 | 中国科学院上海技术物理研究所 | Acousto-optic modulation type wide-spectrum multi-channel polarization monochromatic light source |
| CN104406692A (en) * | 2014-10-17 | 2015-03-11 | 北京锐光仪器有限公司 | Application of echelle grating in scanning type spectral instrument |
| CN105486406A (en) * | 2016-01-01 | 2016-04-13 | 杭州谱育科技发展有限公司 | Spectrometer and spectral analysis method |
| CN107101723A (en) * | 2017-06-13 | 2017-08-29 | 钢研纳克检测技术有限公司 | High-resolution echelle spectrometer two dimension deviation spectrum analysis and bearing calibration |
| CN109269771A (en) * | 2018-09-03 | 2019-01-25 | 钢研纳克检测技术股份有限公司 | The light channel structure and test method of offset angle is adjustable echelle grating efficiency tester |
| CN110596026A (en) * | 2019-10-12 | 2019-12-20 | 中国科学院合肥物质科学研究院 | Broadband cavity enhancement device |
| CN111183342A (en) * | 2017-11-30 | 2020-05-19 | 安捷伦科技有限公司 | Polychromator system and method |
| CN112763451A (en) * | 2020-12-24 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Terahertz Raman spectrometer |
| CN113624339A (en) * | 2021-07-16 | 2021-11-09 | 吉林大学 | Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating |
| CN114034386A (en) * | 2021-11-07 | 2022-02-11 | 天津大学 | Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting |
| CN114812396A (en) * | 2022-03-11 | 2022-07-29 | 智慧星空(上海)工程技术有限公司 | Spectrum confocal measuring system |
| CN117232658A (en) * | 2023-11-03 | 2023-12-15 | 苏州简测科技有限公司 | Echelle grating spectrometer |
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Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102539360A (en) * | 2011-12-31 | 2012-07-04 | 聚光科技(杭州)股份有限公司 | Light splitting device and method for improving spectrum probing range |
| CN102539360B (en) * | 2011-12-31 | 2014-06-25 | 聚光科技(杭州)股份有限公司 | Light splitting device and method for improving spectrum probing range |
| CN102538969B (en) * | 2012-01-17 | 2014-04-23 | 北京华夏科创仪器技术有限公司 | High resolution spectrometer and optical calibrating method thereof |
| CN102538969A (en) * | 2012-01-17 | 2012-07-04 | 北京华夏科创仪器技术有限公司 | High resolution spectrometer and optical calibrating method thereof |
| CN102809428A (en) * | 2012-07-25 | 2012-12-05 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting small echelle grating spectrometer |
| CN102809428B (en) * | 2012-07-25 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting small echelle grating spectrometer |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
| CN102879091A (en) * | 2012-08-28 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method |
| CN102879091B (en) * | 2012-08-28 | 2014-08-20 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method |
| CN103900689A (en) * | 2014-03-28 | 2014-07-02 | 中国科学院上海技术物理研究所 | Acousto-optic modulation type wide-spectrum multi-channel polarization monochromatic light source |
| CN103900689B (en) * | 2014-03-28 | 2016-03-30 | 中国科学院上海技术物理研究所 | Acoustooptic modulation molded breadth spectral coverage hyperchannel polarized monochromatic light source |
| CN104406692B (en) * | 2014-10-17 | 2017-02-01 | 北京锐光仪器有限公司 | Scanning type spectral instrument with echelle grating |
| CN104406692A (en) * | 2014-10-17 | 2015-03-11 | 北京锐光仪器有限公司 | Application of echelle grating in scanning type spectral instrument |
| CN105486406A (en) * | 2016-01-01 | 2016-04-13 | 杭州谱育科技发展有限公司 | Spectrometer and spectral analysis method |
| CN107101723A (en) * | 2017-06-13 | 2017-08-29 | 钢研纳克检测技术有限公司 | High-resolution echelle spectrometer two dimension deviation spectrum analysis and bearing calibration |
| US11579459B2 (en) | 2017-11-30 | 2023-02-14 | Agilent Technologies, Inc. | Polychromator systems and methods |
| CN111183342A (en) * | 2017-11-30 | 2020-05-19 | 安捷伦科技有限公司 | Polychromator system and method |
| CN109269771A (en) * | 2018-09-03 | 2019-01-25 | 钢研纳克检测技术股份有限公司 | The light channel structure and test method of offset angle is adjustable echelle grating efficiency tester |
| CN110596026A (en) * | 2019-10-12 | 2019-12-20 | 中国科学院合肥物质科学研究院 | Broadband cavity enhancement device |
| CN112763451A (en) * | 2020-12-24 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Terahertz Raman spectrometer |
| CN113624339A (en) * | 2021-07-16 | 2021-11-09 | 吉林大学 | Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating |
| CN113624339B (en) * | 2021-07-16 | 2023-02-03 | 吉林大学 | Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating |
| CN114034386A (en) * | 2021-11-07 | 2022-02-11 | 天津大学 | Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting |
| CN114812396A (en) * | 2022-03-11 | 2022-07-29 | 智慧星空(上海)工程技术有限公司 | Spectrum confocal measuring system |
| CN114812396B (en) * | 2022-03-11 | 2024-03-12 | 智慧星空(上海)工程技术有限公司 | Spectrum confocal measurement system |
| CN117232658A (en) * | 2023-11-03 | 2023-12-15 | 苏州简测科技有限公司 | Echelle grating spectrometer |
| CN117232658B (en) * | 2023-11-03 | 2024-01-30 | 苏州简测科技有限公司 | Echelle grating spectrometer |
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Application publication date: 20111026 |