CN114034386A - Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting - Google Patents
Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting Download PDFInfo
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- CN114034386A CN114034386A CN202111309801.2A CN202111309801A CN114034386A CN 114034386 A CN114034386 A CN 114034386A CN 202111309801 A CN202111309801 A CN 202111309801A CN 114034386 A CN114034386 A CN 114034386A
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- 238000001228 spectrum Methods 0.000 title claims abstract description 25
- 230000005284 excitation Effects 0.000 title claims abstract description 22
- 238000010891 electric arc Methods 0.000 title abstract description 12
- 239000006185 dispersion Substances 0.000 claims abstract description 41
- 239000013307 optical fiber Substances 0.000 claims abstract description 13
- 238000000295 emission spectrum Methods 0.000 claims abstract description 6
- 230000004075 alteration Effects 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 13
- 238000005516 engineering process Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000001636 atomic emission spectroscopy Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
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- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/443—Emission spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention relates to a full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting, which comprises an electric arc generator, an excitation electrode, a collimating lens, a spectrum collector, an optical fiber, an incident pinhole, a collimating spherical mirror, an echelle grating, a dispersion prism, a focusing spherical mirror, a cylindrical lens and a detector, wherein a sample which is excited by the electric arc to form plasma is positioned at the focus of the collimating lens, an emission spectrum is converted into parallel light beams after passing through the collimating lens, the parallel light beams are coupled into the optical fiber by the spectrum collector, the other end of the optical fiber is connected with the incident pinhole, the emission light of the incident pinhole is used as a point light source, the emission light is reflected by the collimating spherical mirror to be converted into parallel light beams again, and the parallel light beams are diffracted and split by the echelle grating; performing diffraction and light splitting on the echelle grating, and performing secondary dispersion by using a dispersion prism; the light beam after the secondary dispersion is converged by the focusing spherical mirror, then the aberration is corrected by the cylindrical lens, and finally the light beam is imaged on the surface of the detector.
Description
Technical Field
The invention belongs to the field of atomic emission spectrum analysis and test instruments, and particularly relates to a full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting.
Background
The atomic emission spectroscopy technology is an important technology for researching the composition and content of substances by utilizing an emission spectrum obtained by electron transition radiation of an outer layer of an atom or ion, and shows a diversified trend along with the introduction of an electronic technology, a laser technology and a computer technology, wherein the electric arc atomic emission spectroscopy technology adopting an electric arc as an excitation source is used as a relatively traditional analysis technology with more stable and reliable performance, and becomes a mainstream technology widely adopted by element analysis and detection in the fields of aerospace, military, chemical engineering and the like due to the characteristics of strong environmental adaptability, low requirement on samples, reliable performance, simple operation and the like.
However, in order to realize simultaneous detection of multiple elements, most of direct-reading atomic emission spectrometers based on arc excitation in the market currently adopt a traditional optical structure based on concave grating dispersion, and have the following disadvantages: on one hand, in order to realize broadband and high resolution, the focal length of the system is often larger, and almost no structure or device exists inside the Rowland circle, so that the huge space waste is caused, the space utilization rate is low, the instrument is large and heavy, and the field test requirement is difficult to meet; on the other hand, the spectrum is received by adopting a plurality of linear array CCD sensors, the consistency of the channels of the CCD devices is difficult to ensure due to the manufacturing process and the characteristics of the CCD devices, and the splicing layout of the plurality of linear array CCD sensors is very difficult.
Disclosure of Invention
The invention aims to provide a miniaturized, broadband and high-resolution full-spectrum direct-reading atomic emission spectrometer, which adopts the following technical scheme:
a full-spectrum direct-reading atomic emission spectrometer combining arc excitation and echelle grating light splitting comprises an arc generator, excitation electrodes, a collimating lens, a spectrum collector, an optical fiber, an incidence pinhole, a collimating spherical mirror, an echelle grating, a dispersion prism, a focusing spherical mirror, a cylindrical lens and a detector, wherein the arc generator is used for generating high-temperature electric arcs between the two excitation electrodes, a sample which is excited by the electric arcs to form plasma is positioned at the focus of the collimating lens, an emission spectrum is converted into parallel light beams after passing through the collimating lens and is coupled into the optical fiber by the spectrum collector, the other end of the optical fiber is connected with the incidence pinhole in a switching way, the emission light of the incidence pinhole serves as a point light source, the emission light is reflected by the collimating spherical lens and then becomes the parallel light beams again, and the parallel light beams are diffracted and split by the echelle grating; performing diffraction and light splitting on the echelle grating, and performing secondary dispersion by using a dispersion prism, wherein the secondary dispersion direction is vertical to the dispersion direction of the echelle grating to form a cross dispersion structure; the light beam after the secondary dispersion is converged by the focusing spherical mirror, then the aberration is corrected by the cylindrical lens, and finally the light beam is imaged on the surface of the detector.
Wherein, the working surface of the dispersion prism is a transmission surface and a reflection surface, the included angle between the two surfaces, namely the vertex angle of the prism is ApIncident light at an angle i with respect to the transmission planepIncident, the first refraction occurs on the transmission surface, the mirror reflection occurs on the reflection surface, the second refraction occurs on the transmission surface, and the emergent light is emitted at a refraction angle beta; the reflecting surface of the dispersion prism is vertical to the dispersion direction of the echelle grating.
According to different tested samples, an alternating current arc or a direct current arc is selected as the arc generator 1, the incidence pinhole 6 can be replaced by an incidence slit, and the detector 12 can be a CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) image sensor.
Drawings
FIG. 1 shows a full-spectrum direct-reading atomic emission spectrometer combining arc excitation and echelle grating spectroscopy in accordance with the present invention. 1 is an alternating current or direct current arc generator, 2 is an excitation electrode, 3 is a collimating lens, 4 is a spectrum collector, 5 is an optical fiber, 6 is an incidence pinhole, 7 is a collimating spherical mirror, 8 is an echelle grating, 9 is a dispersion prism, 10 is a focusing spherical mirror, 11 is a cylindrical lens, and 12 is a detector.
FIG. 2 is a schematic diagram of the twice-dispersive optical path of the full-spectrum direct-reading atomic emission spectrometer of the present invention. The distance parameters in the optical path include: center distance d between incident pinhole and collimating spherical mirror1(ii) a Second, the distance d between the center of the collimating spherical mirror and the center of the echelle grating2(ii) a Third, the distance d between the center of the echelle grating and the center of the dispersion prism3(ii) a Distance d between center of dispersion prism and center of focusing spherical mirror4(ii) a Distance d between center of focusing spherical mirror and center of plane mirror5(ii) a Distance d between plane mirror center and sensor image surface center6. The angle parameters in the optical path include: collimating spherical mirror deflection angle omega1(ii) a The step grating deflection angle gamma; angle of incidence i of dispersion prismp(ii) a Fourthly, the exit angle beta of the dispersion prism; angle of deflection omega of focusing spherical mirror2(ii) a Angle of deflection omega for plane mirror3。
Fig. 3 is a schematic diagram of echelle grating spectroscopy.
Fig. 4 is a dispersion prism model. Reference numeral 13 denotes a transmission surface, and 14 denotes a reflection surface.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. The specific embodiments described herein are merely illustrative of the present invention and do not limit the scope of the invention.
In order to overcome the defects of the prior art, the invention provides a full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting.
The invention relates to a full-spectrum direct-reading atomic emission spectrometer combining arc excitation and echelle grating light splitting, which mainly comprises an alternating current or direct current arc generator 1, an excitation electrode 2, a collimating lens 3, a spectrum collector 4, an optical fiber 5, an incidence pinhole 6, a collimating spherical mirror 7, an echelle grating 8, a dispersion prism 9, a focusing spherical mirror 10, a cylindrical lens 11 and a detector 12.
Firstly, under the drive of an alternating current or direct current arc generator 1, a high-temperature arc is generated between two excitation electrodes 2, an arc excites a sample to form plasma, the plasma is positioned at the focus of a collimating lens 3, an emission spectrum of the plasma is converted into parallel light beams after passing through the collimating lens 3, the parallel light beams are coupled into an optical fiber 5 by a spectrum collector 4, the other end of the optical fiber 5 is connected with an incidence pinhole 6, the incidence pinhole 6 is used as a point light source of a spectrometer, the emission light of the incidence pinhole 6 is converted into the parallel light beams after being reflected by a collimating spherical mirror 7, and the light beams are diffracted and split by a echelle grating 8. Because the echelle grating 8 diffracts and has order overlapping, the dispersion prism 9 which is another auxiliary dispersion element is adopted to carry out secondary dispersion, and the direction of the secondary dispersion is vertical to the dispersion direction of the echelle grating 8, so that a cross dispersion structure is formed, and the process is shown in fig. 2. Then the light beam is converged by the focusing spherical mirror 10, then the aberration is corrected by the cylindrical lens 11, and finally the image is formed on the surface of the detector 12.
Unlike conventional gratings, because the echelle grating 8 operates at oblique incidence, the dispersion does not only occur within the main cross-section (the incident light and the main cross-section form a certain angle), as shown in fig. 4, the diffraction equation of the grating is satisfied
mλ＝d(sini+sinθ)cosγ (1)
In the formula, m is the spectrum order, λ is the wavelength, d is the echelle grating constant, i and θ are the incident angle and the diffraction angle respectively, and γ is the angle between the incident light and the main section (deflection angle). Deducing to obtain a calculation formula of diffraction angle of the echelle grating
In the dispersion prism 9, the concrete structure is as shown in fig. 3. The working surface is a transmission surface and a reflection surface, and the included angle between the two surfaces, namely the vertex angle of the prism is ApIncident light at an angle i with respect to the transmission planepIncident light is refracted for the first time on the transmission surface, reflected by the mirror surface on the reflection surface, refracted for the second time through the transmission surface and emitted at a refraction angle beta. From the law of refraction and the geometric relationship, one can deduce the relationship between the exit angle beta and the wavelength lambda as
Wherein n (λ) is a lens refractive index.
It should be noted that the present invention can select ac arc or dc arc as the arc generator 1 according to different tested samples, the entrance pinhole 6 can be replaced by an entrance slit, and the detector 12 can be CCD or CMOS image sensor.
Compared with the traditional direct-reading spectrometer, the full-spectrum direct-reading atomic emission spectrometer combining the electric arc excitation and the echelle grating light splitting disclosed by the invention integrates the advantages of the electric arc excitation and the echelle grating light splitting, and has the advantages that: due to the adoption of an electric arc excitation mode, the light source has strong environmental adaptability, low requirement on a sample, reliable performance and simple operation; utilize cross dispersion to form the two-dimensional spectrogram, utilize single area array detector can gather the diffraction spectrum of complete wave band scope, need not to use a plurality of passageways or sensor concatenation can realize broadband spectral measurement, do not rely on the increase of system's focus to obtain higher spectral resolution power to effectively reduce the holistic space of instrument and occupy, compare with traditional beam splitting structure, this structure can be with compact and small space volume, realize broadband, the spectral measurement of high resolution.
Claims (2)
1. A full-spectrum direct-reading atomic emission spectrometer combining arc excitation and echelle grating light splitting comprises an arc generator, excitation electrodes, a collimating lens, a spectrum collector, an optical fiber, an incidence pinhole, a collimating spherical mirror, an echelle grating, a dispersion prism, a focusing spherical mirror, a cylindrical lens and a detector, wherein the arc generator is used for generating high-temperature electric arcs between the two excitation electrodes, a sample which is excited by the electric arcs to form plasma is positioned at the focus of the collimating lens, an emission spectrum is converted into parallel light beams after passing through the collimating lens and is coupled into the optical fiber by the spectrum collector, the other end of the optical fiber is connected with the incidence pinhole in a switching way, the emission light of the incidence pinhole serves as a point light source, the emission light is reflected by the collimating spherical lens and then becomes the parallel light beams again, and the parallel light beams are diffracted and split by the echelle grating; performing diffraction and light splitting on the echelle grating, and performing secondary dispersion by using a dispersion prism, wherein the secondary dispersion direction is vertical to the dispersion direction of the echelle grating to form a cross dispersion structure; the light beam after the secondary dispersion is converged by the focusing spherical mirror, then the aberration is corrected by the cylindrical lens, and finally the light beam is imaged on the surface of the detector.
2. The full-spectrum direct-reading atomic emission spectrometer of claim 1, wherein the working surfaces of the dispersion prism are a transmission surface and a reflection surface, and the included angle between the two surfaces, the vertex angle of the prism, is ApIncident light at an angle i with respect to the transmission planepIncident, the first refraction occurs on the transmission surface, the mirror reflection occurs on the reflection surface, the second refraction occurs on the transmission surface, and the emergent light is emitted at a refraction angle beta; the reflecting surface of the dispersion prism is vertical to the dispersion direction of the echelle grating.
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Citations (5)
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|---|---|---|---|---|
| CN102226716A (en) * | 2011-03-28 | 2011-10-26 | 中国科学院长春光学精密机械与物理研究所 | Light path structure of echelle grating spectrometer |
| CN102608104A (en) * | 2011-09-06 | 2012-07-25 | 北京瑞利分析仪器有限公司 | Direct-reading spectrometer based on combination of alternating current/direct current arc and concave grating beam splitting system |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
| CN102879091A (en) * | 2012-08-28 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method |
| CN108896537A (en) * | 2018-06-26 | 2018-11-27 | 钢研纳克检测技术股份有限公司 | A kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer |
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2021
- 2021-11-07 CN CN202111309801.2A patent/CN114034386A/en active Pending
Patent Citations (5)
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| CN102226716A (en) * | 2011-03-28 | 2011-10-26 | 中国科学院长春光学精密机械与物理研究所 | Light path structure of echelle grating spectrometer |
| CN102608104A (en) * | 2011-09-06 | 2012-07-25 | 北京瑞利分析仪器有限公司 | Direct-reading spectrometer based on combination of alternating current/direct current arc and concave grating beam splitting system |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
| CN102879091A (en) * | 2012-08-28 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method |
| CN108896537A (en) * | 2018-06-26 | 2018-11-27 | 钢研纳克检测技术股份有限公司 | A kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer |
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