CN207336366U - A kind of ICP-AES dispersion detection devices based on digital micro-mirror - Google Patents
A kind of ICP-AES dispersion detection devices based on digital micro-mirror Download PDFInfo
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- CN207336366U CN207336366U CN201721395775.9U CN201721395775U CN207336366U CN 207336366 U CN207336366 U CN 207336366U CN 201721395775 U CN201721395775 U CN 201721395775U CN 207336366 U CN207336366 U CN 207336366U
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Abstract
It the utility model is related to a kind of ICP AES dispersion detection devices based on digital micro-mirror, in the device, after incident light is by entrance slit, collimated mirror collimation is again incident on prism, and first horizontal dispersion is completed by prism；Echelle grating is divided the light after first horizontal dispersion, and completing secondary horizontal dispersion by prism afterwards forms two-dimension spectrum；Light after the secondary horizontal dispersion of prism focuses on digital micro-mirror surface through the first condenser；The light of digital micro-mirror reflection focuses on photomultiplier through second condenser lens again.The utility model has the characteristics that：Apparatus structure is compact, and cost is relatively low；Digital micro-mirror is as spatial light modulator, it is possible to achieve the quick selection to spectral signal, while the highly sensitive detection characteristic of photomultiplier is remained, the testing requirements that disclosure satisfy that the multielement of inductively coupled plasma atomic emission quickly while analyze.
Description
Technical field
The utility model belongs to element analysis technology field, and in particular to a kind of ICP-AES (inductance based on digital micro-mirror
Coupled plasma-atomic emission spectrometry) dispersion detection device.
Background technology
Atomic emission spectrometry be one kind according to test substance at high temperature, what the atom or ion being decomposed to form were launched
The method that the wavelength and its intensity of characteristic spectrum carry out element qualitative and quantitative analysis.Using induction coupled plasma torch as excitation
The atomic emission spectrometry of light source is known as inductively coupled plasma atomic emission spectrum.Inductance based on the method design production
Coupled plasma optical emission spectrometer has accuracy height, detection limit is low, measure is quick, the range of linearity is wide, it is more to measure at the same time
The advantages that kind element, be widely used in the measure of tens of kinds of elements in the sample such as environmental sample and rock, mineral, metal.
Inductive coupling plasma emission spectrograph is broadly divided into single-channel scanning according to beam splitting system and the difference of detector
Type, multiple tracks direct-reading type and full spectrum direct-reading type.
The dispersion detection device critical piece of single-channel scanning type is plane grating and photomultiplier, the diffraction of plane grating
Effect makes complex light form monochromatic light through light splitting, and imaging on one wire, is changed the angle of plane grating by computer, made
The angle of incident light changes, so that emergent light angle changes, detector can obtain the spectrum from short wavelength to long wavelength
Information.This system has higher resolution ratio, dispersive power and resolution ratio in whole wavelength band basic one in full band range
Cause.But operating process is cumbersome, it is necessary to higher mechanical precision.
The dispersion detection device critical piece of multiple tracks direct-reading type is concave grating and multiple photomultipliers or polylith linear array
CCD detector.Light source enters concave grating through slit, and the monochromatic light after optical grating diffraction is different by wavelength, is respectively radiated to sieve
On the exit slit that different wave length is corresponded on Lan Yuan, device measurement intensity after testing.This apparatus structure is simple, and performance is stablized, point
Analysis precision is good, but needs very high mechanical precision, can only quantitative analysis.Additionally due to the limited amount of slit, limit point
The species of element is analysed, cannot be met the needs of users under the conditions of very much.
The dispersion detection device of full spectrum direct-reading type is using echelle grating and solid-state detector as core.Echelle grating will not
With the spectral line dispersion of spectrum level, obtained two-dimension spectrum is focused on through curved mirror, is detected through speculum to solid-state detector.This system
Stability is good, can be quick, accurately the whole spectral lines of collection, has become the main product of current ICP instruments.Since solid is examined
The expensive of device is surveyed, causes to compose direct-reading type ICP instrument costs entirely higher.
The content of the invention
The technical problem to be solved by the present invention is to provide a kind of ICP-AES dispersions based on digital micro-mirror to detect dress
Put, which can once realize the acquisition of full spectrum information, and stability is good, and cost is low, and accuracy of detection is high.
In order to solve the above-mentioned technical problem, the ICP-AES dispersion detection device bags based on digital micro-mirror of the utility model
Include：Entrance slit, collimating mirror, prism, echelle grating, the first condenser, digital micro-mirror, second condenser lens, photomultiplier transit
Pipe；After incident light is by entrance slit, collimated mirror collimation is again incident on prism, and first horizontal dispersion is completed by prism；
Echelle grating is divided the light after first horizontal dispersion, and completing secondary horizontal dispersion by prism afterwards forms two-dimentional light
Spectrum；Light after the secondary horizontal dispersion of prism focuses on digital micro-mirror surface through the first condenser；The light of digital micro-mirror reflection
Again photomultiplier is focused on through second condenser lens.
The collimating mirror can use convex lens or concave mirror.
First condenser and second condenser lens can use convex lens or concave mirror.
Operation principle：After incident light is by entrance slit, prism is incided after collimated mirror collimation, prism is completed just
After secondary transverse direction dispersion, longitudinal light splitting is carried out as principal dispersion element by echelle grating, secondary transverse direction is completed by prism afterwards
Dispersion forms two-dimension spectrum；Light after secondary horizontal dispersion focuses on digital micro-mirror surface through condenser.According to detection demand,
It can select corresponding micro mirror scan pattern.Digital micro-mirror reflection spectral signal again through condenser focus on photomultiplier into
Row detection, obtains spectrum picture, so as to carry out qualitative and quantitative analysis to sample.
The utility model has the following advantages：Using digital micro-mirror and photomultiplier as core, nearly hundred on digital micro-mirror
Ten thousand micro-reflectors are corresponding with the spectrum of full spectrum wavelength scope, pass through the light of the upset selection different wave length of each small eyeglass
Spectrum information, the faint radiation signal of photomultiplier receiving convert thereof into sufficiently large photoelectric current and measure, and obtain full spectrum
Image.The utility model can once realize the acquisition of full spectrum information, improve the stability of system without rotating shutter；Can
Flexibly to select the spectral line of element to be measured to carry out qualitative and quantitative analysis；Substitution is combined admittedly with photomultiplier using digital micro-mirror
Detector, not only reduces the cost of instrument, also improves accuracy of detection.
The utility model has the characteristics that：Apparatus structure is compact, and cost is relatively low；Digital micro-mirror is as space light modulation
Device, it is possible to achieve the quick selection to spectral signal, while remain the highly sensitive detection characteristic of photomultiplier, Neng Gouman
The testing requirements that the multielement of sufficient inductively coupled plasma atomic emission is quickly analyzed at the same time.
Brief description of the drawings
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Fig. 1 is the structure diagram of the full spectrum inductive coupling plasma emission spectrograph based on digital micro-mirror.
Fig. 2 is the structure diagram of the ICP-AES dispersion detection devices based on digital micro-mirror of the utility model.
Fig. 3 is the two-dimension chromatic dispersion spectrogram obtained after secondary horizontal dispersion on digital micro-mirror.
Embodiment
A kind of as shown in Figure 1, novel inductor coupled plasma optical emission based on digital micro-mirror that the utility model is related to
Spectrometer, including：Radio-frequency generator 1, torch pipe 2, sampling system 3, outer light path 4, dispersion detection device 5；Argon in the torch pipe 2
Gas generates plasmatorch under the action of radio-frequency generator 1, and sample to be tested enters plasmatorch through sampling system 3, swashs at it
Generation complex light is given, complex light is broken down into the transmitting light of element-specific after outer light path 4 reaches dispersion detection device 5
Spectrum, is detected light intensity signal by detector, obtains spectrogram.
As shown in Fig. 2, the ICP-AES dispersion detection devices based on digital micro-mirror of the utility model include：Entrance slit
7th, collimating mirror, prism 9, echelle grating 10, the first condenser, digital micro-mirror 12, second condenser lens, photomultiplier 14；
The collimating mirror uses concave mirror 8, and the first condenser and second condenser lens are respectively that concave mirror 11 and concave surface are anti-
Penetrate mirror 13.After the light that light source 6 is launched is by entrance slit 7, prism 9 is again incident on through the collimation of concave mirror 8, by prism
9 complete first horizontal dispersion；Echelle grating 10 carries out longitudinal light splitting to the light after first horizontal dispersion, afterwards by prism 9
Complete secondary horizontal dispersion and form two-dimension spectrum；Light after 9 two horizontal dispersions of prism is focused on through concave mirror 11
12 surface of digital micro-mirror, as shown in Figure 3；The light that digital micro-mirror 12 reflects focuses on photomultiplier through concave mirror 13 again
14, detected by photomultiplier 14.The scan pattern of digital micro-mirror can be selected according to detection demand, is such as scanned using full spectrum
Pattern or single-element scan pattern etc..
Collimating mirror and first, second condenser are not limited to concave mirror and convex lens, can also use compound lens.
Claims (3)
- A kind of 1. ICP-AES dispersion detection devices based on digital micro-mirror, it is characterised in that including entrance slit (7), collimating mirror, Prism (9), echelle grating (10), the first condenser, digital micro-mirror (12), second condenser lens, photomultiplier (14)；Enter After light is penetrated by entrance slit (7), collimated mirror collimation is again incident on prism (9), and first lateral chromatism is completed by prism (9) Dissipate；Echelle grating (10) is divided the light after first horizontal dispersion, completes secondary horizontal dispersion by prism (9) afterwards Form two-dimension spectrum；Light after the secondary horizontal dispersion of prism (9) focuses on digital micro-mirror (12) surface through the first condenser； The light of digital micro-mirror (12) reflection focuses on photomultiplier (14) through second condenser lens again.
- 2. the ICP-AES dispersion detection devices according to claim 1 based on digital micro-mirror, it is characterised in that the standard Straight mirror can use convex lens or concave mirror.
- 3. the ICP-AES dispersion detection devices according to claim 1 based on digital micro-mirror, it is characterised in that described One condenser and second condenser lens use convex lens or concave mirror.
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| CN201721395775.9U CN207336366U (en) | 2017-10-26 | 2017-10-26 | A kind of ICP-AES dispersion detection devices based on digital micro-mirror |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108713135A (en) * | 2018-05-21 | 2018-10-26 | 深圳达闼科技控股有限公司 | A kind of spectroscopic analysis system |
| CN108896537A (en) * | 2018-06-26 | 2018-11-27 | 钢研纳克检测技术股份有限公司 | A kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer |
| CN113267486A (en) * | 2021-07-05 | 2021-08-17 | 钢研纳克检测技术股份有限公司 | Wide-spectrum high-resolution inductively coupled plasma emission spectrometer |
-
2017
- 2017-10-26 CN CN201721395775.9U patent/CN207336366U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108713135A (en) * | 2018-05-21 | 2018-10-26 | 深圳达闼科技控股有限公司 | A kind of spectroscopic analysis system |
| CN108896537A (en) * | 2018-06-26 | 2018-11-27 | 钢研纳克检测技术股份有限公司 | A kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer |
| CN113267486A (en) * | 2021-07-05 | 2021-08-17 | 钢研纳克检测技术股份有限公司 | Wide-spectrum high-resolution inductively coupled plasma emission spectrometer |
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