CN105115907A - Measuring device for optical filter spectrum transmittance - Google Patents
Measuring device for optical filter spectrum transmittance Download PDFInfo
- Publication number
- CN105115907A CN105115907A CN201510504144.5A CN201510504144A CN105115907A CN 105115907 A CN105115907 A CN 105115907A CN 201510504144 A CN201510504144 A CN 201510504144A CN 105115907 A CN105115907 A CN 105115907A
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- optical filter
- light source
- integrating sphere
- ccd detector
- beam splitter
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Abstract
The invention discloses a measuring device for optical filter spectrum transmittance. The measuring device comprises an integrating sphere light source and a coupling optical fiber, a slit diaphragm, a collimation lens, an optical filter to be measured and a light splitting element are sequentially arranged on the front optical path of the integrating sphere light source, and a focusing lens and a linear array CCD detector are sequentially arranged on the reflection optical path of the light splitting element. The signal output end of the linear array CCD detector is connected with a computer. The measuring device is simple and compact integrally, mainly works at a visible light band, can be expanded to work from an ultraviolet band to a near-infrared band, and can serve as a spectrograph system to perform spectrum measurement at the non-measurement stage. The linear array CCD detector is used as an imaging element, the size of pixels is small, and a high-resolution optical filter spectrum transmittance curvature is convenient to obtain.
Description
Technical field
The invention belongs to field of optical measurements, be specifically related to a kind of filter spectral Transmissivity measurement device, for realizing the disposable measurement of optical filter transmittance curve in visible light wave range.
Background technology
Optical filter all has a wide range of applications in fields such as military affairs, national defence, communication, environmental monitoring and scientific experiments.How accurate spectral transmittance is one of important performance characteristic of optical filter, and the spectral transmittance of undamaged mensuration optical filter, and direct relation the accurate reproduction of measuring-signal.Optical filter, to the Transmission light ability difference (spectral transmittance) of different wave length, is normally defined: T (λ)=I
t(λ)/I
0(λ), wherein I
0(λ) light intensity of the wavelength X detected when being and not adding optical filter, I
t(λ) light intensity of corresponding wavelength for obtaining after adding upper filter.
Usually monochromator is utilized to measure the transmitance of optical filter in classic method, the single photomultiplier of usual employing is as sensitive detection parts, this causes exporting a monochromatic light at every turn, measure consuming time longer when in whole spectral range, (especially during optical filter broader bandwidth) carries out optical filter transmitance, simultaneously the pixel dimension of photomultiplier is usually comparatively large, causes the filter spectral transmitance resolution that obtains not high.In order to improve filter spectral Transmissivity measurement speed and measuring accuracy, measuring to realize high resolving power simultaneously, the invention provides a kind of beam splitter that utilizes in conjunction with the device of Linear CCD Detector.At present, this technology yet there are no relevant report.
Summary of the invention
The object of the present invention is to provide a kind of filter spectral Transmissivity measurement device, only need to carry out single acquisition and can complete measurement to optical filter optical transmission spectra curve.
Technical scheme of the present invention is as follows:
A kind of filter spectral Transmissivity measurement device, it is characterized in that: include integrating sphere light source, coupled fiber, the front light path of integrating sphere light source is provided with successively slit diaphragm, collimation camera lens, optical filter to be measured, beam splitter, the reflected light path of beam splitter is provided with amasthenic lens, Linear CCD Detector successively, and the signal output part of Linear CCD Detector connects computing machine; The uniform beam that integrating sphere light source sends, is conducted by coupled fiber, through slit diaphragm and collimation camera lens after, be irradiated on beam splitter, carry out light splitting, focus on Linear CCD Detector by amasthenic lens, Linear CCD Detector by data upload to computing machine; Described all element coaxials and collimation.
Described a kind of filter spectral Transmissivity measurement device, is characterized in that: described optical filter to be measured is positioned over after collimation camera lens, also can be placed in before amasthenic lens.
Described a kind of filter spectral Transmissivity measurement device, is characterized in that: described integrating sphere light source is provided with photometer.
Described a kind of filter spectral Transmissivity measurement device, is characterized in that: the numerical aperture of described coupled fiber matches with the F number of collimation camera lens.
Described a kind of filter spectral Transmissivity measurement device, is characterized in that: described beam splitter adopts plane spectro-grating usually; Beam splitter is fixed on precision rotation platform, and measurement range mainly concentrates on the visible light wave range of 400-700nm, can extend to 350-900nm wave band.
Integrating sphere light source adopt export continuously stable state, the uniform area light source of accurate lambert's property, export light and be full of coupled fiber visual field and its end face.
Collimation/amasthenic lens adopts commercial camera lens, can realize best optical property.
Beam splitter adopts plane spectro-grating, is fixed on precision rotation platform, is regulated the corner of universal stage, and then obtain required measurement wave band by controller.
Slit diaphragm and Linear CCD Detector chip lay respectively at collimate camera lens and amasthenic lens focal plane on, ensure best imaging effect, reduce optical aberration on measure impact.
Computing machine is mainly used in data sampling and processing and storage, controls grating rotating, realizes length scanning.
Compared with prior art, the present invention has following outstanding advantage:
1, this filter spectral transmission measurement device, one-shot measurement can obtain filter spectral transmittance curve, avoids multiple reflection long scan; The resolution of filter spectral transmittance curve depends on the size of the single pixel of detector, can reach 0.03nm even higher.
2, transmissive system relative aperture is large, and the F number of business camera lens can be easy to reach less than 2.0, effectively can improve signal to noise ratio (S/N ratio).Select business camera lens, can reach best image quality, minimumization reduces costs the impact that optical filter is measured simultaneously simultaneously.
3, systematic survey scope is at the visible light wave range of 400-700nm, can extend to 350-900nm wave band, greatly meets the testing requirement to Different lightwave section optical filter in scientific research.Whole system structure is simple, compact, and aberration is little, efficiency is high.
4, this device is suitable for the spectral transmittance measurement of other optical mirror slip, beam splitting chips etc. simultaneously, can use in the non-test stage as conventional spectrometer simultaneously.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Wherein 1 is integrating sphere light source, and 2 is coupled fiber, and 3 is slit diaphragm, and 4 is collimation camera lens, and 5 is optical filter to be measured, and 6 is beam splitter, and 7 is amasthenic lens, and 8 is Linear CCD Detector, and 9 is computing machine.
Embodiment
As shown in drawings, a kind of filter spectral Transmissivity measurement device, entrance slit diaphragm 3 is transferred to by coupled fiber 2 by the light of broadband uniform integration ball light source 1 outgoing, directional light is formed after collimation camera lens 4, directional light carries out light splitting through beam splitter 6, and the light beam after light splitting images on line array CCD 8 through amasthenic lens 7.After optical filter 5 to be measured is placed in collimation camera lens 4, and surface is vertical with incident beam, to eliminate the measuring error that beam incident angle causes; Integrating sphere light source 1 is for providing uniform area light source, and built-in bromine tungsten filament lamp, this lamp source stability is good, and temperature is high, and the life-span is long and easy for installation, and its luminous light intensity can adjust according to actual needs.Integrating sphere light source 1 is built-in photometer exports the stability of irradiance for monitoring.The numerical aperture of coupled fiber 2 matches with collimation camera lens 4 visual field, effectively avoids parasitic light, is connected between coupled fiber 2 with slit diaphragm 3 by special optical fiber interface, and the aligning realized between the two connects.In order to reduce the impact of whole system resolution, slit diaphragm 3 width-adjustable as far as possible, and be adjusted to limit spectral resolution width.Collimation camera lens 4 and amasthenic lens 6 use business camera lens, and cost is lower, can reach minimum aberration simultaneously.Beam splitter 5 adopts plane spectro-grating, covers visible light wave range; The control (as length scanning, detector collection etc.) of instrument is all controlled by computing machine 9.For avoiding the interference of parasitic light, a whole set of calibration system is placed in complete black laboratory.In experimentation, in order to keep all element coaxials and collimation, all devices are fixed on special optical table.
In filter spectral Transmissivity measurement process to be measured, according to measuring the wave band needing rotating shutter to arrive required detection, by control software design rotating shutter brace table, turn to the required wave band measured, due to the existence of grating rotary table backhaul difference, cause turning to accurate wavelength location, therefore first by coupled fiber and high precision spectrometer caliberating device (Li Yingying, Fu Jia, Shi Yuejiang etc., Chinese utility model patent ' high precision spectrometer caliberating device ', application number: 201120502962.9, Authorization Notice No.: CN202494518U, authorized announcement date: 2012.10.17) be connected, use many known spectral lines of emission and corresponding spectral line position on the detector that detector collects, utilize second order polynomial λ=λ
0+ a
1pix+a
2pix
2(wherein λ
0for the wavelength that pixel ordinal number 0 place is corresponding, a
1for linear dispersion (nm/pixel), a
2unit be (nm/pixel)
2, pix is pixel ordinal number) and complete accurate Wavelength calibration, namely determine the one-to-one relationship of wavelength and detector pixel ordinal number, set up detector pixel number and wavelength corresponding relation database, the apparatus function of system can be obtained simultaneously.
According to integrating sphere source operation step, open integrating sphere power supply, setting running parameter.Until integrating sphere thermal-stable (after about 15 minutes), close light source outlet and carry out dark current deduction; Opening light source outlet uses coupled fiber that integrating sphere outlet is optically coupled to slit diaphragm place.
In order to deduct the impact of CCD noise, before formal measurement, first closing the mechanical shutter before CCD chip, gathering a secondary background spectra.Under making CCD work in background deduction pattern in measuring process below, remain valid sampling time, mode of operation all constant simultaneously.Keep enough signal to noise ratio (S/N ratio)s simultaneously, improved the logical light quantity of whole system by the method improving sampling time or the increase integrating sphere intensity of light source.
Concrete measuring process is: 1. empty survey, when placing blind optical filter, the curve of spectrum utilizing line array CCD measurement to obtain is I
0(λ); 2. survey, keep other all conditions all constant, insert optical filter to be measured, the curve of spectrum now obtained is: I
t(λ); 3. in order to deduct the impact of photon shot noise etc., signal smoothing process being carried out to the curve measured under two kinds of conditions above, utilizes formula T (λ)=I
t(λ)/I
0(λ) the spectral transmission rate curve of optical filter to be measured is namely obtained.Because measuring system itself exists instrumental broadening to a certain degree, when measuring ultra-narrow optical filter, by the impact of the method deduction instrumental broadening effect of deconvolution.Utilize software program to carry out full automatic data processing, and generate test report and file.
If the spectral bandwidth of optical filter to be measured is wider, exceed the measurable wavelength band of single of the present invention, then complete measurement by repeating above-mentioned measuring process.
Claims (5)
1. a filter spectral Transmissivity measurement device, it is characterized in that: include integrating sphere light source, coupled fiber, the front light path of integrating sphere light source is provided with successively slit diaphragm, collimation camera lens, optical filter to be measured, beam splitter, the reflected light path of beam splitter is provided with amasthenic lens, Linear CCD Detector successively, and the signal output part of Linear CCD Detector connects computing machine; The uniform beam that integrating sphere light source sends, is conducted by coupled fiber, through slit diaphragm and collimation camera lens after, be irradiated on beam splitter, carry out light splitting, focus on Linear CCD Detector by amasthenic lens, Linear CCD Detector by data upload to computing machine; Described all element coaxials and collimation.
2. a kind of filter spectral Transmissivity measurement device according to claim 1, is characterized in that: described optical filter to be measured is positioned over after collimation camera lens, also can be placed in before amasthenic lens.
3. a kind of filter spectral Transmissivity measurement device according to claim 1, is characterized in that: described integrating sphere light source is provided with photometer.
4. a kind of filter spectral Transmissivity measurement device according to claim 1, is characterized in that: the numerical aperture of described coupled fiber matches with the F number of collimation camera lens.
5. a kind of filter spectral Transmissivity measurement device according to claim 1, is characterized in that: described beam splitter adopts plane spectro-grating usually; Beam splitter is fixed on precision rotation platform, and measurement range mainly concentrates on the visible light wave range of 400-700nm, can extend to 350-900nm wave band.
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| CN201510504144.5A CN105115907A (en) | 2015-08-17 | 2015-08-17 | Measuring device for optical filter spectrum transmittance |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105372042A (en) * | 2015-12-16 | 2016-03-02 | 北方夜视技术股份有限公司 | Optical filter high precision transmittance testing device |
| CN105445570A (en) * | 2015-12-16 | 2016-03-30 | 中国科学院西安光学精密机械研究所 | Wide-angle lens camera signal to noise ratio testing system and measuring method |
| CN105588708A (en) * | 2015-12-16 | 2016-05-18 | 南京理工大学 | Test system and test method for testing high-precision transmittance of optical filter |
| CN105738081A (en) * | 2016-04-16 | 2016-07-06 | 阜阳师范学院 | Apparatus for collimating optical path and detecting relative spectral transmittance and detection method thereof |
| CN106092974A (en) * | 2016-05-31 | 2016-11-09 | 南京理工大学 | Extraordinary edge filter transmittance graph high precision testing device and method |
| CN108254378A (en) * | 2018-03-07 | 2018-07-06 | 宁波吉欧光电科技有限公司 | A kind of welding lens ageing testing method |
| CN109714102A (en) * | 2019-01-18 | 2019-05-03 | 武汉正源高理光学有限公司 | A kind of optical communication optical filters spectrogram test macro |
| CN109991179A (en) * | 2019-01-25 | 2019-07-09 | 中国科学院上海光学精密机械研究所 | Use environment simulator and measurement method for optical thin film spectral measurement |
| CN110108449A (en) * | 2019-06-26 | 2019-08-09 | 深圳市楠轩光电科技有限公司 | A kind of optics module test macro and method |
| CN110132541A (en) * | 2018-02-02 | 2019-08-16 | 深圳光峰科技股份有限公司 | Light supply apparatus and optical mirror slip test macro |
| CN112254932A (en) * | 2020-10-14 | 2021-01-22 | 沈阳仪表科学研究院有限公司 | Rotation testing device for variable density optical filter |
| CN112808626A (en) * | 2020-12-21 | 2021-05-18 | 江苏汇鼎光学眼镜有限公司 | Method for online automatic optical performance detection and lens screening |
| CN112845163A (en) * | 2020-12-21 | 2021-05-28 | 江苏汇鼎光学眼镜有限公司 | Device for measuring yellowing degree of spectacle lens |
| CN113295387A (en) * | 2021-05-25 | 2021-08-24 | 中国科学院合肥物质科学研究院 | System and method for testing optical parameters of multiband strip-shaped optical filter |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004108781A (en) * | 2002-09-13 | 2004-04-08 | Mamiya Op Co Ltd | Small spectroscope |
| CN1519558A (en) * | 2003-01-20 | 2004-08-11 | 宁波市二轻工业研究设计院 | Device for measuring transmission factor of optical glass |
| CN1560585A (en) * | 2004-03-12 | 2005-01-05 | 宁波市二轻工业研究设计院 | Quickly measuring method and device for lens transmittivity |
| CN1752739A (en) * | 2005-10-21 | 2006-03-29 | 中国科学院上海光学精密机械研究所 | The spectrophotometer of quick measure spectrum |
| CN102519915A (en) * | 2011-12-28 | 2012-06-27 | 北京奥博泰科技有限公司 | Spectral measuring device and method for spectral haze of photovoltaic glass |
| CN102749306A (en) * | 2012-06-11 | 2012-10-24 | 中国科学院安徽光学精密机械研究所 | Bidirectional reflection distribution function (BRDF) absolute measure device |
| CN103217403A (en) * | 2012-01-18 | 2013-07-24 | 三星康宁精密素材株式会社 | Apparatus for measuring transmittance |
| KR20140130294A (en) * | 2013-04-30 | 2014-11-10 | 주식회사 코윈디에스티 | Photomask transmittance rate measurement system |
-
2015
- 2015-08-17 CN CN201510504144.5A patent/CN105115907A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004108781A (en) * | 2002-09-13 | 2004-04-08 | Mamiya Op Co Ltd | Small spectroscope |
| CN1519558A (en) * | 2003-01-20 | 2004-08-11 | 宁波市二轻工业研究设计院 | Device for measuring transmission factor of optical glass |
| CN1560585A (en) * | 2004-03-12 | 2005-01-05 | 宁波市二轻工业研究设计院 | Quickly measuring method and device for lens transmittivity |
| CN1752739A (en) * | 2005-10-21 | 2006-03-29 | 中国科学院上海光学精密机械研究所 | The spectrophotometer of quick measure spectrum |
| CN102519915A (en) * | 2011-12-28 | 2012-06-27 | 北京奥博泰科技有限公司 | Spectral measuring device and method for spectral haze of photovoltaic glass |
| CN103217403A (en) * | 2012-01-18 | 2013-07-24 | 三星康宁精密素材株式会社 | Apparatus for measuring transmittance |
| CN102749306A (en) * | 2012-06-11 | 2012-10-24 | 中国科学院安徽光学精密机械研究所 | Bidirectional reflection distribution function (BRDF) absolute measure device |
| KR20140130294A (en) * | 2013-04-30 | 2014-11-10 | 주식회사 코윈디에스티 | Photomask transmittance rate measurement system |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105445570A (en) * | 2015-12-16 | 2016-03-30 | 中国科学院西安光学精密机械研究所 | Wide-angle lens camera signal to noise ratio testing system and measuring method |
| CN105588708A (en) * | 2015-12-16 | 2016-05-18 | 南京理工大学 | Test system and test method for testing high-precision transmittance of optical filter |
| CN105445570B (en) * | 2015-12-16 | 2018-05-29 | 中国科学院西安光学精密机械研究所 | A kind of wide-angle shot machine signal-to-noise test system and measuring method |
| CN105372042A (en) * | 2015-12-16 | 2016-03-02 | 北方夜视技术股份有限公司 | Optical filter high precision transmittance testing device |
| CN105738081A (en) * | 2016-04-16 | 2016-07-06 | 阜阳师范学院 | Apparatus for collimating optical path and detecting relative spectral transmittance and detection method thereof |
| CN106092974A (en) * | 2016-05-31 | 2016-11-09 | 南京理工大学 | Extraordinary edge filter transmittance graph high precision testing device and method |
| CN110132541A (en) * | 2018-02-02 | 2019-08-16 | 深圳光峰科技股份有限公司 | Light supply apparatus and optical mirror slip test macro |
| CN108254378A (en) * | 2018-03-07 | 2018-07-06 | 宁波吉欧光电科技有限公司 | A kind of welding lens ageing testing method |
| CN109714102A (en) * | 2019-01-18 | 2019-05-03 | 武汉正源高理光学有限公司 | A kind of optical communication optical filters spectrogram test macro |
| CN109991179A (en) * | 2019-01-25 | 2019-07-09 | 中国科学院上海光学精密机械研究所 | Use environment simulator and measurement method for optical thin film spectral measurement |
| CN109991179B (en) * | 2019-01-25 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | Use environment simulation device and measurement method for optical thin film spectral measurement |
| CN110108449A (en) * | 2019-06-26 | 2019-08-09 | 深圳市楠轩光电科技有限公司 | A kind of optics module test macro and method |
| CN110108449B (en) * | 2019-06-26 | 2022-05-10 | 深圳市楠轩光电科技有限公司 | Optical module testing system and method |
| CN112254932A (en) * | 2020-10-14 | 2021-01-22 | 沈阳仪表科学研究院有限公司 | Rotation testing device for variable density optical filter |
| CN112808626A (en) * | 2020-12-21 | 2021-05-18 | 江苏汇鼎光学眼镜有限公司 | Method for online automatic optical performance detection and lens screening |
| CN112845163A (en) * | 2020-12-21 | 2021-05-28 | 江苏汇鼎光学眼镜有限公司 | Device for measuring yellowing degree of spectacle lens |
| CN113295387A (en) * | 2021-05-25 | 2021-08-24 | 中国科学院合肥物质科学研究院 | System and method for testing optical parameters of multiband strip-shaped optical filter |
| CN113295387B (en) * | 2021-05-25 | 2023-11-17 | 中国科学院合肥物质科学研究院 | Optical parameter testing system and method for multiband strip-shaped optical filter |
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