CN113295387B - Optical parameter testing system and method for multiband strip-shaped optical filter - Google Patents
Optical parameter testing system and method for multiband strip-shaped optical filter Download PDFInfo
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- 238000001228 spectrum Methods 0.000 claims abstract description 29
- 238000005286 illumination Methods 0.000 claims abstract description 20
- 238000012634 optical imaging Methods 0.000 claims abstract description 17
- 238000002834 transmittance Methods 0.000 claims abstract description 17
- 238000012545 processing Methods 0.000 claims abstract description 15
- 238000012937 correction Methods 0.000 claims abstract description 14
- 238000012935 Averaging Methods 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 229910052724 xenon Inorganic materials 0.000 claims description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 5
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Abstract
The invention discloses a multiband strip filter optical parameter testing system and a testing method thereof, wherein the testing system comprises a continuous tunable uniform monochromatic illumination light source assembly, a two-dimensional adjusting frame, an optical imaging system, a detector, an image acquisition processing system and a power supply; the two-dimensional adjusting frame and the camera component are both installed in the camera bellows. The invention can output a uniform narrow-band area light source matched with the spectrum of the test channel by adjusting the continuous tunable uniform monochromatic illumination light source component, and images and outputs all channels of the target to be tested by the optical imaging system and the detector by irradiating the multiband strip-shaped optical filter; preprocessing operations such as background buckling, non-uniformity correction and the like are adopted, so that test errors caused by low-frequency disturbance of a test system are eliminated; finally, calculating to obtain a multiband strip filter transmittance two-dimensional distribution image, and finishing calibration and correction of parameters such as uniformity in channels, spectrum crosstalk among channels, transmittance and the like, thereby remarkably improving test efficiency and test precision.
Description
Technical Field
The invention belongs to the field of optical metering and measurement, and particularly relates to a multiband strip-shaped optical filter optical parameter testing system and a testing method thereof.
Background
The multispectral imaging remote sensing technology has obvious advantages in the fields of earth observation, atmosphere detection, target identification and the like, and the current method for realizing multispectral narrow-band imaging mainly comprises two types, namely a single-channel time-sharing measurement method and a multichannel simultaneous measurement method. The former obtains spectrum images with different wavelengths in a time-sharing way by rotating the filter wheel or the tunable filter, and has the defect that the time-sharing imaging is easy to cause dislocation between front and rear images; the latter realizes the multi-spectrum image of the same target at the same time by adopting a multi-lens or multi-image sensor method, and has the defects of larger instrument volume and complex structure.
The multiband strip filter is cut into narrow strips, is integrated on the same substrate in a spliced mode and is combined with the detector, the system structure can be simplified, a traditional imaging method is replaced, and the multiband strip filter has the advantages of being small in size, light in weight, free of complex space calibration and the like. However, the sandwich structure can reflect incident light back and forth between channels, so that spectrum aliasing between different channels is easily caused, and uneven transmittance of the same channel is caused by inconsistent thickness of the adhesive layer, and misjudgment of results is finally caused. Therefore, a proper test system and a proper test method are needed to calibrate and quantitatively evaluate the processed multiband strip filter.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a band-shaped optical filter optical parameter testing system and a testing method thereof, by which the transmittance of the band-shaped optical filter can be corrected and calculated, and the development of multispectral imaging technology is promoted.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the multiband strip filter optical parameter test system comprises a continuously tunable uniform monochromatic illumination light source assembly, a two-dimensional adjusting frame, a camera assembly, an image acquisition and processing system and a power supply; the two-dimensional adjusting frame is used for adjusting the position of the multiband strip-shaped optical filter to enable the multiband strip-shaped optical filter to be located at the object plane position of the camera component; the camera assembly comprises an optical imaging system and a detector, and is used for clearly imaging the multiband strip filter; the image acquisition processing system is used for carrying out numerical analysis on the image output by the camera component; the power supply is used for supplying power to the whole test system; the two-dimensional adjusting frame and the camera component are both installed in the camera bellows. The two-dimensional adjusting frame related to the scheme can adjust positions in the directions of the X axis and the Y axis, so that the position adjustment of the multiband strip filter in the directions of the X axis and the Y axis is realized, and the two-dimensional adjusting frame is mature equipment in the field.
Further, the continuously tunable uniform monochromatic illumination light source component comprises an ellipsoidal mirror, a grating monochromator and an integrating sphere, and the outlet and inlet directions of the integrating sphere are 90 degrees; the method comprises the steps that a xenon lamp is arranged at the position of a primary focus of an ellipsoidal mirror, a slit inlet of a grating monochromator is arranged at the position of a secondary focus of the ellipsoidal mirror, an outlet of the grating monochromator is communicated with an inlet of an integrating sphere, and an anti-secondary spectrum filter is arranged at the position of the inlet of the grating monochromator; a circulating water cooling device is arranged between the ellipsoidal mirror and the secondary spectral filter; the circulating water cooling device comprises a water cooling filter and a circulating water pump which forms a circulating water path through a water pipe and the water cooling filter. The multiband strip filter comprises a substrate and five narrowband spectrum channel filters fixed on the substrate, wherein the five narrowband spectrum channel filters sequentially form a first channel, a second channel, a third channel, a fourth channel and a fifth channel.
Another object of the present invention is to provide a method for testing optical parameters of a multiband strip filter, which is completed based on the optical parameter testing system, comprising the following steps:
a) Adjusting the continuous tunable uniform monochromatic illumination light source assembly to enable the continuous tunable uniform monochromatic illumination light source assembly to output a channel spectrum, and adjusting the two-dimensional adjusting frame to enable the multiband strip-shaped optical filter to be located at the object plane position of the optical imaging system and clearly image;
b) Setting the exposure time t1 of the detector, continuously shooting n images in a bright field environment, and averaging to obtain an image mu y·filter·light (i, j), wherein i, j represent the rows and columns of the output image, respectively;
c) Setting the exposure time of the detector as t1, continuously shooting n images in a dark field environment, and averaging to obtain an image mu y·dark·t1 (i,j)；
d) Moving the multiband strip filter out of the light path, and continuously and uniformly tuning a monochromatic illumination light source to directly illuminate an optical imaging system and a detector;
e) Setting the exposure time of the detector to t1, continuously shooting n images in a bright field environment, and averaging to obtain an image mu y·light (i,j)；
f) Setting the exposure time of the detector to be t2, enabling the detector output DN to be 5% saturation value in a bright field environment, continuously shooting n images, and averaging to obtain an image mu y·light·t2 (i,j)；
g) Setting the exposure time of the detector to be t2, continuously shooting n images in a dark field environment, and averaging to obtain an image mu y·dark·t2 (i,j)；
h) Setting the exposure time of the detector to be t3, enabling the detector output DN to be 95% saturation value in a bright field environment, continuously shooting n images, and averaging to obtain an image mu y·light·t3 (i,j)；
i) Setting the exposure time of the detector to be t3, continuously shooting n images in a dark field environment, and averaging to obtain an image mu y·dark·t3 (i,j)；
j) C, adjusting the continuous tunable uniform monochromatic illumination light source assembly, respectively outputting channel two-channel five spectrums, and repeating the steps a-i;
k) And (5) after the test is completed, turning off the power supply.
The optical parameter testing method of the multiband strip filter further comprises the following data processing steps:
a) Background subtraction: subtracting the dark field image from the averaged bright field image to obtain an effective signal, and referring to formulas (1) - (4):
U y·filter (i,j)＝μ y·filter·light (i,j)-μ y·dark·t1 (i,j) (1)
U y (i,j)＝μ y·light (i,j)-μ y·dark·t1 (i,j) (2)
U y·Low (i,j)＝μ y·light·t2 (i,j)-μ y·dark·t2 (i,j) (3)
U y·High (i,j)＝μ y·light·t3 (i,j)-μ y·dark·t3 (i,j) (4)
b) Non-uniformity correction: correcting test errors caused by non-uniformity of the optical imaging system and the detector, referring to formulas (5) - (8); wherein the method comprises the steps of，And->Respectively U y·High (i, j) and U y·Low The average value of (i, j), G and O being non-uniformity correction coefficients;
Y correction·filter (i,j)＝G(i,j)×U y·filter (i,j)+O(i,j) (7)
Y correction (i,j)＝G(i,j)×U y (i,j)+O(i,j) (8)
c) Transmittance two-dimensional distribution: dividing the corrected image with or without the multiband filter to obtain transmittance two-dimensional distribution T of different spectrums, and referring to the following formula (9):
the beneficial effects of the invention are as follows:
the multiband strip filter optical parameter testing system provided by the invention can output a uniform narrow-band surface light source matched with the spectrum of a testing channel by adjusting the continuous tunable uniform monochromatic illumination light source component, and images and outputs all channels of a target to be tested by the optical imaging system and the detector by irradiating the multiband strip filter; preprocessing operations such as background buckling, non-uniformity correction and the like are adopted, so that test errors caused by low-frequency disturbance of a test system are eliminated; finally, calculating to obtain a multiband strip filter transmittance two-dimensional distribution image, and finishing calibration and correction of parameters such as uniformity in channels, spectrum crosstalk among channels, transmittance and the like, thereby remarkably improving test efficiency and test precision.
Drawings
FIG. 1 is a schematic diagram of a multiband stripe filter according to the present invention;
FIG. 2 is a schematic diagram of a multi-band stripe filter optical parameter testing system according to the present invention;
FIG. 3 is a flow chart of a method for testing optical parameters of a multiband strip filter according to the present invention;
FIG. 4 is a graph of transmittance distribution obtained by processing;
FIG. 5 is a transmittance profile;
Detailed Description
The invention will be further described with reference to examples and figures. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, the multiband strip filter described in the present invention includes five narrow-band spectrum channels, the first three channels of filters have a size of 18mm×3mm, the second two channels of filters have a size of 18mm×1mm, and the edge-darkening splice is integrated on the same substrate.
Referring to fig. 2, the multiband strip filter optical parameter testing system described in the invention comprises a xenon lamp 1, an ellipsoidal mirror 2, a circulating water cooling device 3, a secondary spectrum filter 4, a grating monochromator 5, a power supply 6, an integrating sphere 7, a multiband strip filter 8, a two-dimensional adjusting frame 9, an optical imaging system 10, a detector 11, a darkroom 12 and an image acquisition processing system 13. The xenon lamp 1 is placed at the primary focus position of the ellipsoidal mirror 2, the slit inlet of the grating monochromator 5 is arranged at the secondary focus position of the ellipsoidal mirror, the circulating water cooling device 3 is arranged between the grating monochromator 5 and the xenon lamp 1, the secondary spectrum eliminating filter 4 is placed in front of the inlet of the grating monochromator 5 and is used for eliminating the secondary spectrum generated by grating dispersion, the outlet of the grating monochromator 5 is communicated with the inlet of the integrating sphere 7, and the outlet of the integrating sphere and the inlet form 90 degrees. The uniform monochromatic illumination light source emitted by the integrating sphere irradiates the multiband strip filter 8, and the light is transmitted and then sequentially passes through the optical imaging system 10, the detector 11 and the image acquisition processing system 13, and finally is converted into image output. The two-dimensional adjusting frame 9 is used for adjusting the position of the multiband strip-shaped optical filter 8, the darkroom 12 is used for providing a darkfield measuring environment for a testing process, stray light influence is avoided, and the power supply 6 is used for supplying power to the whole system. The optical imaging system in the following embodiment adopts an image space telecentric imaging lens; the detector is an area array detector E2V-4720; the image acquisition processing system is a mature system in the field and is used for driving the area array detector and acquiring video signals and storing and displaying acquired image data in real time. The image acquisition processing system used in the embodiment comprises an industrial personal computer, a programmable logic device, a horizontal and vertical time sequence driving unit, an analog front end processing unit, a CCD bias voltage generating unit, an image data transmission unit, an internal communication interface and an internal telemetry signal generating unit; the above listed components are only for further disclosure of the present embodiment, and are not limiting to the present solution, and those skilled in the art may perform parallel replacement of the relevant components according to actual test requirements.
Referring to fig. 3, the optical parameter testing method for the multiband strip filter described in the invention comprises the following steps:
a) Adjusting the continuous tunable uniform monochromatic illumination light source assembly to enable the uniform monochromatic illumination light source assembly to output a spectrum with the center wavelength of 490nm, wherein the spectrum is a channel-spectrum, and adjusting the two-dimensional adjusting frame to enable the multiband strip-shaped optical filter to be located at the object plane position of the optical imaging system and to be imaged clearly;
b) Setting the exposure time of the detector to 8ms, continuously shooting 10 images in a bright field environment, and averaging to obtain an image mu y·filter·light (i, j), wherein i, j represent the rows and columns of the output image, respectively;
c) Setting the exposure time of the detector to 8ms, continuously shooting 10 images in dark field environment, and averaging to obtain an image mu y·dark·t1 (i,j)；
d) Moving the multiband strip filter out of the light path, and continuously and uniformly tuning a monochromatic illumination light source to directly illuminate an optical imaging system and a detector;
e) Setting the exposure time of the detector to 8ms, continuously shooting 10 images in a bright field environment, and averaging to obtain an image mu y·light (i,j)；
f) Setting the exposure time of the detector to be 0.5ms, enabling the detector output DN to be 5% saturation value in a bright field environment, continuously shooting 10 images, and averaging to obtain an image mu y·light·t2 (i,j)；
g) Setting the exposure time of the detector to be 0.5ms, continuously shooting 10 images in dark field environment, and averaging to obtain an image mu y·dark·t2 (i,j)；
h) Setting the exposure time of the detector to be 10ms, enabling the detector output DN to be 95% saturation value in a bright field environment, continuously shooting n images, and averaging to obtain an image mu y·light·t3 (i,j)；
i) Setting the exposure time of the detector to be 10ms, continuously shooting 10 images in dark field environment, and averaging to obtain an image mu y·dark·t3 (i,j)；
j) C, adjusting the continuous tunable uniform monochromatic illumination light source assembly, respectively outputting channel two-channel five spectrums (550 nm, 670nm, 870nm and 910 nm), and repeating the steps a-i;
k) And (5) after the test is completed, turning off the power supply.
The optical parameter testing method of the multiband strip filter further comprises the following data processing steps:
a) Background subtraction: subtracting the dark field image from the averaged bright field image to obtain an effective signal, and referring to formulas (1) - (4):
U y·filter (i,j)＝μ y·filter·light (i,j)-μ y·dark·t1 (i,j) (1)
U y (i,j)＝μ y·light (i,j)-μ y·dark·t1 (i,j) (2)
U y·Low (i,j)＝μ y·light·t2 (i,j)-μ y·dark·t2 (i,j) (3)
U y·High (i,j)＝μ y·light·t3 (i,j)-μ y·dark·t3 (i,j) (4)
b) Non-uniformity correction: correcting test errors caused by non-uniformity of the optical imaging system and the detector, referring to formulas (5) - (8); wherein,and->Respectively U y·High (i, j) and U y·Low The average value of (i, j), G and O being non-uniformity correction coefficients;
Y correction·filter (i,j)＝G(i,j)×U y·filter (i,j)+O(i,j) (7)
Y correction (i,j)＝G(i,j)×U y (i,j)+O(i,j) (8)
c) Transmittance two-dimensional distribution: dividing the corrected image with or without the multiband filter to obtain transmittance two-dimensional distribution T of different spectrums, and referring to the following formula (9):
taking 670nm spectrum channel as an example, fig. 4 is a transmittance distribution image obtained by processing, and taking data in column 200, the transmittance curve distribution is shown in fig. 5, it can be seen that the transmittance curves in rows 578-676 are relatively flat, and the non-uniformity of the interval is about 3.08%.
Claims (3)
1. The multiband strip optical filter optical parameter testing method is characterized by being completed based on a multiband strip optical filter optical parameter testing system, wherein the multiband strip optical filter optical parameter testing system comprises a continuously tunable uniform monochromatic illumination light source assembly, a two-dimensional adjusting frame, a camera assembly, an image acquisition processing system and a power supply; the two-dimensional adjusting frame is used for adjusting the position of the multiband strip-shaped optical filter to enable the multiband strip-shaped optical filter to be located at the object plane position of the camera component; the camera assembly comprises an optical imaging system and a detector, and is used for clearly imaging the multiband strip filter; the image acquisition processing system is used for carrying out numerical analysis on the image output by the camera component; the power supply is used for supplying power to the whole test system; the two-dimensional adjusting frame and the camera component are both arranged in the camera bellows; the multiband strip-shaped optical filter comprises a substrate and five narrowband spectrum channel optical filters fixed on the substrate, wherein the five narrowband spectrum channel optical filters sequentially form a first channel, a second channel, a third channel, a fourth channel and a fifth channel;
a multi-band strip filter optical parameter testing method comprises the following steps:
a) Adjusting the continuous tunable uniform monochromatic illumination light source assembly to enable the continuous tunable uniform monochromatic illumination light source assembly to output a channel spectrum, and adjusting the two-dimensional adjusting frame to enable the multiband strip-shaped optical filter to be located at the object plane position of the optical imaging system and clearly image;
b) Setting the exposure time t1 of the detector, continuously shooting n images in a bright field environment, and averaging to obtain an imageWhere i, j represent the rows and columns of the output image, respectively;
c) Setting the exposure time of the detector as t1, continuously shooting n images in dark field environment, and averaging to obtain an image；
d) Moving the multiband strip filter out of the light path, and continuously and uniformly tuning a monochromatic illumination light source to directly illuminate an optical imaging system and a detector;
e) Setting the exposure time of the detector as t1, continuously shooting n images in a bright field environment, and averaging to obtain an image；
f) Setting the exposure time of the detector to be t2, enabling the detector output DN to be 5% saturation value in a bright field environment, continuously shooting n images, and averaging to obtain an image；
g) Setting the exposure time of the detector to be t2, continuously shooting n images in a dark field environment, and averaging to obtain an image；
h) Setting the exposure time of the detector to be t3, enabling the detector output DN to be 95% saturation value in a bright field environment, continuously shooting n images, and averaging to obtain an image；
i) Setting the exposure time of the detector to be t3, continuously shooting n images in a dark field environment, and averaging to obtain an image；
j) C, adjusting the continuous tunable uniform monochromatic illumination light source assembly, respectively outputting channel two-channel five spectrums, and repeating the steps a-i;
k) The test is completed, and the power supply is turned off;
the method comprises the following data processing steps:
a) Background subtraction: subtracting the dark field image from the averaged bright field image to obtain an effective signal, and referring to formulas (1) - (4):
（1）
（2）
（3）
（4）
b) Non-uniformity correction: correcting test errors caused by non-uniformity of the optical imaging system and the detector, referring to formulas (5) - (8); wherein,and->Respectively->And->G and O are non-uniformity correction coefficients;
（5）
（6）
（7）
（8）
c) Transmittance two-dimensional distribution: dividing the corrected image with or without the multiband filter to obtain transmittance two-dimensional distribution T of different spectrums, and referring to the following formula (9):
（9）。
2. the method for testing optical parameters of a multiband strip filter according to claim 1, wherein: the continuously tunable uniform monochromatic illumination light source component comprises an ellipsoidal mirror, a grating monochromator and an integrating sphere, and the outlet and inlet directions of the integrating sphere are 90 degrees; the method comprises the steps that a xenon lamp is arranged at the position of a primary focus of an ellipsoidal mirror, a slit inlet of a grating monochromator is arranged at the position of a secondary focus of the ellipsoidal mirror, an outlet of the grating monochromator is communicated with an inlet of an integrating sphere, and an anti-secondary spectrum filter is arranged at the position of the inlet of the grating monochromator; a circulating water cooling device is arranged between the ellipsoidal mirror and the secondary spectral filter.
3. The method for testing optical parameters of a multiband strip filter according to claim 2, wherein: the circulating water cooling device comprises a water cooling filter and a circulating water pump which forms a circulating water path through a water pipe and the water cooling filter.
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