CN214374364U - Defect detection device based on optical imaging - Google Patents
Defect detection device based on optical imaging Download PDFInfo
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- CN214374364U CN214374364U CN202120218886.2U CN202120218886U CN214374364U CN 214374364 U CN214374364 U CN 214374364U CN 202120218886 U CN202120218886 U CN 202120218886U CN 214374364 U CN214374364 U CN 214374364U
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Abstract
The utility model discloses a defect detecting device based on optical imaging. The device includes: the device comprises a multispectral light source, a filtering adjusting unit, a polarization adjusting unit, an incident angle adjusting unit, a reflection angle adjusting unit and a camera, wherein the filtering adjusting unit and the polarization adjusting unit are arranged on an incident light path from emitted light of the multispectral light source to a product to be detected, and the camera is arranged on a reflected light path from the emitted light of the multispectral light source to the product to be detected; the camera is used for respectively acquiring images of the product to be detected when the filtering adjusting unit, the polarization adjusting unit, the incident angle adjusting unit and the reflection angle adjusting unit are in different states. The device of the utility model is simple in structure, with low costs, the flexibility is good, can the quick analysis confirm the optimal imaging scheme, realizes the industrial quality control scene needs of high reliability.
Description
Technical Field
The utility model belongs to the technical field of the optical detection, more specifically relates to a defect detecting device based on optical imaging.
Background
The basic principle of defect detection based on optical imaging is: the normal and defective regions of the object will exhibit different characteristics upon interaction with light, and by detecting and analyzing the changes in the light effects of these normal and defective (abnormal) regions, the defects and their types can be distinguished.
To improve the accuracy of optical imaging, there are two main techniques in the prior art. The first technology is as follows: the utility model provides a full frequency holographic vision system of single-chip, functions such as integrated detection phase place, light intensity, spectrum, polarization, direction in the chip, the integrated level is high, and the performance is good, but sensor spatial resolution can descend, and the preparation technology is complicated, and the SNR is not high. The second technology is as follows: the same position is imaged by using a plurality of light sources with different angles and an area array detector (camera), but the equipment mechanism is complex, high in price and poor in flexibility.
SUMMERY OF THE UTILITY MODEL
At least one defect or improvement demand to prior art, the utility model provides a defect detecting device based on optical imaging, device simple structure, it is with low costs, the flexibility is good, can quick analysis confirm the optimal imaging scheme, realizes the industrial quality inspection scene needs of high reliability.
In order to achieve the above object, the utility model provides a defect detecting device based on optical imaging, include: the device comprises a multispectral light source, a filtering adjusting unit, a polarization adjusting unit, an incident angle adjusting unit, a reflection angle adjusting unit and a camera, wherein the filtering adjusting unit and the polarization adjusting unit are arranged on an incident light path from emitted light of the multispectral light source to a product to be detected, and the camera is arranged on a reflected light path from the emitted light of the multispectral light source to the product to be detected;
the camera is used for respectively acquiring images of the product to be detected when the filtering adjusting unit, the polarization adjusting unit, the incident angle adjusting unit and the reflection angle adjusting unit are in different states.
Preferably, the filtering adjustment unit is configured to sequentially select light of M wavebands from incident light, the polarization adjustment unit is configured to sequentially enable the incident light to exhibit N polarization characteristics, the incident angle adjustment unit is configured to sequentially enable the incident angle to exhibit L angles, the reflection angle adjustment unit is configured to sequentially enable the reflection angle to exhibit O angles, and M, N, L, O are integers not less than 2;
preferably, the device further comprises P pre-designed to-be-tested picture samples, P is an integer not less than 2, and the camera is used for respectively acquiring images of the P to-be-tested picture samples when the filtering adjusting unit, the polarization adjusting unit, the incident angle adjusting unit and the reflection angle adjusting unit are in different states.
Preferably, the system further comprises a data processor, and the data processor stores a defect detection algorithm.
Preferably, the optical system further comprises a controller, wherein the controller is configured to output a control instruction according to an output result of the defect detection unit or an image acquired by the camera, and the control instruction is configured to fix the filtering adjustment unit, the polarization adjustment unit, the incident angle adjustment unit, and the reflection angle adjustment unit in a certain state.
Preferably, the filtering adjusting unit is an LCTF liquid crystal tunable filter or an acousto-optic tunable filter.
Preferably, the filter adjusting unit includes a beam expanding collimating lens or a fiber optic faceplate.
Preferably, the polarization adjusting unit is a rotating wheel, and a diffusion sheet, a polarizing sheet and a hollow window are arranged on the rotating wheel.
Preferably, the incident angle adjusting unit is an incident angle adjusting cantilever, and the multispectral light source, the filtering adjusting unit and the polarization adjusting unit are mounted on the incident angle adjusting cantilever;
the reflection angle adjusting unit is a reflection angle adjusting cantilever, and the camera is mounted on the reflection angle adjusting cantilever.
Preferably, the camera is a camera capable of rotatably switching detection light intensity and polarization information.
Generally, the utility model discloses beneficial effect has: the method can be used for rapidly analyzing and determining the optimal detection illumination and imaging scheme, and the industrial quality inspection scene requirement with high reliability and precision is met. Compared with the technical scheme of the existing full-frequency holographic vision system, the device has the advantages of simple structure and low cost; compared with the prior technical scheme of using light sources with various different angles and an area array detector, the method has the advantages of low cost and good flexibility.
Drawings
Fig. 1 is a schematic diagram of a defect detecting apparatus based on optical imaging according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention. Furthermore, the technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
As shown in fig. 1, the utility model provides a defect detecting device based on optical imaging, include: the device comprises a multispectral light source (1), a filtering adjusting unit (2), a polarization adjusting unit (3), an incident angle adjusting unit (4), a reflection angle adjusting unit (5) and a camera (6), wherein the filtering adjusting unit and the polarization adjusting unit are arranged on an incident light path from emitted light of the multispectral light source to a product to be detected, and the camera is arranged on a reflected light path from the emitted light of the multispectral light source to the product to be detected; the camera is used for respectively acquiring images of the product to be detected when the filtering adjusting unit, the polarization adjusting unit, the incident angle adjusting unit and the reflection angle adjusting unit are in different states.
A multispectral light source is a light source that includes multiple wavelength bands. The multiple light source is preferably a full spectrum light source, the full spectrum light source emitting light including near infrared to ultraviolet light. The angle of incidence is the angle between the incident ray and the normal of the incident surface (the surface of the product to be inspected). The reflection angle is the angle between the reflected light and the normal of the reflecting surface (the surface of the product to be detected).
The light filtering and adjusting unit is used for sequentially selecting light with M wave bands from incident light, the polarization adjusting unit is used for enabling the incident light to sequentially present N polarization characteristics, the incident angle adjusting unit is used for enabling the incident angle to sequentially present L angles, the reflection angle adjusting unit is used for enabling the reflection angle to sequentially present O angles, and M, N, L, O are integers not less than 2;
the light can be subjected to wave band selection, polarization characteristic adjustment, incident angle adjustment and reflection angle adjustment through the filtering adjustment unit, the polarization adjustment unit, the incident angle adjustment unit and the reflection angle adjustment unit respectively. The camera collects images of a product to be detected under different imaging conditions, and because the interaction between light and a substance is different under the conditions of light with different wave bands, polarization characteristics, an incidence angle and a reflection angle, a plurality of images comprising different information can be obtained. Then, according to the image acquired by the camera, several groups of samples with the most obvious defect characteristics can be screened from the image, and the state of each adjusting unit when the several groups of samples with the most obvious defect characteristics are acquired is the most optimal detection scheme. Screening can be performed by adopting a manual screening mode or a data processor built-in defect detection algorithm.
Preferably, the defect detection device further includes P kinds of pre-designed to-be-tested picture samples, where P is an integer not less than 2, and the camera is configured to collect images of the P kinds of to-be-tested picture samples when the filtering adjustment unit, the polarization adjustment unit, the incident angle adjustment unit, and the reflection angle adjustment unit are in different states, respectively.
Preferably, the filtering adjusting unit is an LCTF liquid crystal tunable filter or an acousto-optic tunable filter.
Preferably, the filter adjusting unit includes a beam expanding collimating lens or a fiber optic faceplate.
Preferably, the polarization adjusting unit is a rotating wheel, and a diffusion sheet, a polarizing sheet and a hollow window are arranged on the rotating wheel. The selection by changing the position of the rotating wheel is to use the adjusted or removed polarization characteristics (N polarization characteristics). In particular, the polarization adjustment unit may be implemented in other manners as long as the function of adjusting or canceling the polarization characteristics (N kinds of polarization characteristics) can be performed.
The positions of the filtering adjusting unit and the polarization adjusting unit do not need to be changed in the manner shown in fig. 1, that is, the positions of the filtering adjusting unit and the polarization adjusting unit are exchanged, so that the light passes through the polarization adjusting unit and then passes through the filtering adjusting unit.
Preferably, the incident angle adjusting unit is an incident angle adjusting cantilever, and the multispectral light source, the filtering adjusting unit and the polarization adjusting unit are arranged on the incident angle adjusting cantilever; the reflection angle adjusting unit is a reflection angle adjusting cantilever, and the camera is installed on the reflection angle adjusting cantilever. It should be noted that the incident angle adjusting unit and the reflection angle adjusting unit may be implemented in other manners, such as a movable stage, as long as the functions of adjusting the incident angle and the reflection angle can be achieved. And the angle of the incident angle and the reflection angle should always meet the camera imaging requirements.
Preferably, the camera is a camera capable of rotatably switching detection light intensity and polarization information.
Preferably, the defect detection device further comprises a data processor, the data processor stores a defect detection algorithm, and the defect detection algorithm is used for determining whether the product to be detected is abnormal or not according to the image acquired by the camera.
Preferably, the defect detection apparatus further includes a controller for automatically controlling each of the adjustment units, wherein the controller is configured to output a control command according to an output result of the defect detection unit or an image collected by the camera, and the control command is configured to fix the filtering adjustment unit, the polarization adjustment unit, the incident angle adjustment unit, and the reflection angle adjustment unit in a certain state. The method comprises the steps of screening several groups of samples with most obvious defect characteristics from an image through manual work or a defect detection algorithm, and fixing the state of each adjusting unit through a controller to the state of the collected several groups of samples with the most obvious defect characteristics.
The method of using the defect detection apparatus is described below.
a. When the optimal illumination and imaging scheme for defect analysis is carried out, light (M color light) in different spectral bands is output by controlling the filtering and adjusting unit, the polarization adjusting unit (the position of the conversion rotating wheel) is selected to adjust or remove the polarization characteristics (N polarization characteristics), and meanwhile, the incident angle adjusting unit (the position of the incident angle adjusting rotating arm is converted) can be adjusted to enable the incident angle to present L angles, so that the light with different combinations can be irradiated onto the picture sample to be detected at different angles; and meanwhile, on the premise of focusing on the sample of the detected picture, the reflection angle adjusting unit (rotating the reflection angle adjusting rotary arm) is adjusted to enable the reflection angle to present O kinds of angles, and M × N × L × O images are obtained through the camera. The preceding operations are performed on the P image samples, respectively, to obtain P × M × N × L × O images in total.
b. And obtaining groups of samples with the most obvious defect characteristics through an anomaly detection algorithm after obtaining M, N, L, O, P image data species analysis, namely obtaining the optimal illumination and detection system scheme.
It will be understood by those skilled in the art that the foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A defect detection apparatus based on optical imaging, comprising: the device comprises a multispectral light source, a filtering adjusting unit, a polarization adjusting unit, an incident angle adjusting unit, a reflection angle adjusting unit and a camera, wherein the filtering adjusting unit and the polarization adjusting unit are arranged on an incident light path from emitted light of the multispectral light source to a product to be detected, and the camera is arranged on a reflected light path from the emitted light of the multispectral light source to the product to be detected;
the camera is used for respectively acquiring images of the product to be detected when the filtering adjusting unit, the polarization adjusting unit, the incident angle adjusting unit and the reflection angle adjusting unit are in different states.
2. The optical imaging-based defect detection apparatus of claim 1, wherein the filtering adjustment unit is configured to sequentially select M wavelength bands of light from the incident light, the polarization adjustment unit is configured to sequentially make the incident light exhibit N polarization characteristics, the incident angle adjustment unit is configured to sequentially make the incident angle exhibit L angles, the reflection angle adjustment unit is configured to sequentially make the reflection angle exhibit O angles, and M, N, L, O are integers not less than 2.
3. The optical imaging-based defect detection device of claim 1, further comprising P pre-designed to-be-tested picture samples, P being an integer not less than 2, wherein the camera is configured to collect images of the P to-be-tested picture samples when the filtering adjustment unit, the polarization adjustment unit, the incident angle adjustment unit, and the reflection angle adjustment unit are in different states.
4. The optical imaging based defect detection device of claim 1, further comprising a data processor, wherein said data processor stores a defect detection algorithm.
5. The optical imaging-based defect detection apparatus of claim 1 or 4, further comprising a controller for outputting a control command for fixing the filtering adjustment unit, the polarization adjustment unit, the incident angle adjustment unit and the reflection angle adjustment unit in a certain state according to an output result of the defect detection unit or an image captured by the camera.
6. The optical imaging-based defect detection device of claim 1, wherein the filter adjusting unit is an LCTF liquid crystal tunable filter or an acousto-optic tunable filter.
7. The optical imaging-based defect detection device of claim 1, wherein the filter adjustment unit comprises a beam expanding collimating lens or a fiber optic faceplate.
8. The optical imaging-based defect detection device of claim 1, wherein the polarization adjustment unit is a rotating wheel, and a diffusion sheet, a polarizing sheet and a hollow window are arranged on the rotating wheel.
9. The optical imaging-based defect detecting apparatus of claim 1, wherein the incident angle adjusting unit is an incident angle adjusting cantilever, and the multispectral light source, the filtering adjusting unit and the polarization adjusting unit are mounted on the incident angle adjusting cantilever;
the reflection angle adjusting unit is a reflection angle adjusting cantilever, and the camera is mounted on the reflection angle adjusting cantilever.
10. The optical imaging based defect detection device as claimed in claim 1, wherein said camera is a camera capable of rotatably switching detection light intensity and polarization information.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114280080A (en) * | 2021-12-10 | 2022-04-05 | 华虹半导体(无锡)有限公司 | Method for detecting transparent flaky defects |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114280080A (en) * | 2021-12-10 | 2022-04-05 | 华虹半导体(无锡)有限公司 | Method for detecting transparent flaky defects |
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