CN109724780A - A kind of small light spot test macro and its test method - Google Patents
A kind of small light spot test macro and its test method Download PDFInfo
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Abstract
Small light spot test macro and method provided by the invention, it include: tunable single color light source, first lens, diaphragm, displacement platform, second lens, detector, mounting platform and computer control unit, optical filter to be measured is installed on displacement platform, the continuous monochromation illumination light beam of tunable single color light source outgoing enters diaphragm after the first lens shaping aggregation, incident illuminating bundle is formed test hot spot by diaphragm, test hot spot is radiated on optical filter and forms test beams, test beams are received by a detector after second lens, received test beams are converted to test signal by detector, computer control unit, which obtains test signal and carries out data processing to the test signal, obtains spectrum test result, small light spot test macro and method provided by the invention, which can be realized, carries out accurately each position of gradual filter Sampling test, and can under the coordination of computer control system, efficiently complete gradual filter automatic test calibration process.
Description
Technical field
The present invention relates to optical thin film the field of test technology, in particular to a kind of small light spot test macro and its test side
Method.
Background technique
Gradual filter is a kind of novel thin film optical filter realized by multilayer tapered film structure, is had in different location
The spectral characteristic of standby consecutive variations, therefore can be used as a kind of novel dispersion element.Gradual filter according to gradual manner not
It can be used for linear variable filter and round gradual filter can be divided into since its is small in size, light-weight, integrated level is high
The design of highly integrated, portable spectrum application system.Thin Film Filter is based on the principle of interference between dielectric multi-layer optical thin film, according to not
Different spectrum individual features may be implemented in same design.The spectral characteristic of optical filter depends on the thickness of plural layers, due to
The every layer film of gradual filter is consecutive variations, therefore has the spectral characteristic of consecutive variations in the different location of film.
The method of the optical characteristics of traditional test optical filter has spectrophotometer method, spectrometer method etc..These conventional methods
Biggish test hot spot is required to when carrying out optical filtering built-in testing to guarantee the signal-to-noise ratio and measuring accuracy of test.Gradual change is filtered
For mating plate, spectral characteristic with spatial position consecutive variations, therefore using tested compared with large spot when, test result
For the homogenization result within the scope of sampling hot spot, the spectral characteristic of every bit on gradual filter not can accurately reflect.In addition, to gradually
The calibration test for becoming optical filter needs to carry out a large amount of sampling tests, and the sampling that traditional test method cannot achieve automation is surveyed
Examination, the workload of tester is huge, and testing efficiency is low.
Summary of the invention
Have in view of that, it is necessary in view of the defects existing in the prior art, provide one kind can be realized it is each to gradual filter
A position carries out the small light spot test macro of accurate sampling test.
To achieve the above object, the present invention adopts the following technical solutions:
On the one hand, the present invention provides a kind of small light spot test macros, comprising: tunable single color light source, the first lens, light
Door screen, displacement platform, the second lens, detector, mounting platform and computer control unit are equipped on institute's translation stage to be measured
Optical filter, the tunable single color light source, the first lens, diaphragm, displacement platform, the second lens and detector are mounted on institute
It states on mounting platform, the computer control unit and the detector are electrically connected；Wherein:
The continuous monochromation illumination light beam of the tunable single color light source outgoing is assembled laggard through the first lens shaping
Enter the diaphragm, incident illuminating bundle is formed test hot spot by the diaphragm, and the test hot spot is radiated at the optical filter
Test beams are gone up and are formed, the test beams are received after second lens by the detector, and the detector will connect
The test beams of receipts are converted to test signal, and the computer control unit obtains the test signal and to the test signal
It carries out data processing and obtains spectrum test result.
In some preferred embodiments, the tunable single color light source includes light source and monochromator or described tunable
Monochromatic source is tunable laser.
In some preferred embodiments, first lens are simple lens or lens group.
In some preferred embodiments, institute's translation stage can do two dimensional motion under motor driven.
In some preferred embodiments, the detector is photomultiplier tube or Si detector or InGaAs detector.
In some preferred embodiments, the computer control unit is also electrically connected at the tunable single coloured light
Source, the computer control unit can control the unlatching and closure of the tunable single color light source.
In some preferred embodiments, the computer control unit is also electrically connected at institute's translation stage, described
Computer control unit can control the movement of institute's translation stage.
On the other hand, the present invention also provides the test method of small light spot test macro, include the following steps:
The tunable single color light source, the first lens, diaphragm, displacement platform, the second lens and detector are successively fixed
Be installed on the mounting platform, and make first lens, diaphragm, displacement platform, the second lens and detector keep with it is described
The beam orthogonal of tunable single color light source outgoing；
The tunable single color light source is closed, the detector described in dark state acquires dark background Sd, and the dark background is
The response gray value of the detector under dark state；The tunable single color light source is opened, the optical filter be not installed
Bright background Sb is acquired under state, the bright background is not install under optical filter state to be tested, and each wavelength monochromatic light irradiates institute
State the response gray value of detector acquisition；
The optical filter is installed, and makes the position of test hot spot first sampled point of alignment；
It controls the tunable single color light source and carries out wavelength traverse scanning, acquisition obtains the survey at first sampling point position
Trial signal St；
The computer control unit according toObtain the transmitance value of each wavelength at this sampled point；
Repeat the above steps the spectral transmittance characteristic obtained at each sampled point.
In some preferred embodiments, by adjusting the position of first lens, the second lens and making the filter
Mating plate insertion front and back light beam can be received by the detector completely.
The present invention by adopting the above technical scheme the advantages of be:
Small light spot test macro and method provided by the invention, comprising: tunable single color light source, the first lens, diaphragm, position
Platform, the second lens, detector, mounting platform and computer control unit are moved, filter to be measured is installed on institute's translation stage
The continuous monochromation illumination light beam of mating plate, the tunable single color light source outgoing enters institute after the first lens shaping aggregation
Diaphragm is stated, incident illuminating bundle is formed test hot spot by the diaphragm, and the test hot spot is radiated on the optical filter simultaneously
Test beams are formed, the test beams are received after second lens by the detector, and the detector will be received
Test beams are converted to test signal, and the computer control unit obtains the test signal and carries out to the test signal
Data processing obtains spectrum test as a result, small light spot test macro provided by the invention and method can be realized to gradual filter
Each position carries out accurate sampling test, and can efficiently complete gradual filter under the coordination of computer control system
Automatic test calibration process.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram of small light spot test macro provided in an embodiment of the present invention.
Fig. 2 is the step flow chart of the test method of small light spot test macro provided in an embodiment of the present invention.
Fig. 3 is the mobile scheme of displacement platform provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other
Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, being the structural schematic diagram of small light spot test macro 100 provided in an embodiment of the present invention, comprising: adjustable
Humorous monochromatic source 1, the first lens 2, diaphragm 3, displacement platform 5, the second lens 6, detector 7, mounting platform 8 and computer control
Unit 9, is equipped with optical filter 4 to be measured on institute's translation stage 5, the tunable single color light source 1, the first lens 2, diaphragm 3,
Displacement platform 5, the second lens 6 and detector 7 are mounted on the mounting platform 8, the computer control unit 9 with it is described
Detector 7 is electrically connected.The specific structure of above-mentioned all parts described further below and effect.
The tunable single color light source 1 includes light source and monochromator or the tunable single color light source is tunable laser
Device.It is appreciated that tunable single color light source 1 provides test lighting source for entire test macro, tunable single color light source 1 can be with
Continuous accurate offer monochromation illumination, the monochromatic spectral resolution that tunable single color light source 1 provides determine test system
The spectral resolution of unified test examination.
First lens 2 are simple lens or lens group.It is appreciated that first lens 2 are used for entire optical system for testing
Adjusting, illuminating bundle can be carried out to shaping, convergence after first lens 2, to improve the optical density of illuminating bundle, into
And the signal-to-noise ratio of test is improved, to effectively inhibit the random error of test.
The shape and size for the test hot spot that the diaphragm 3 can generate the light beam of process control.It is appreciated that
Diaphragm 3 can be selected according to specific testing requirement, and for gradual filter to be measured, sampling hot spot is smaller, test
Precision is higher.Diaphragm 3 and gradual filter to be measured should be as far as possible close to placements, to obtain best sampling hot spot effect.
Optical filter 4 to be measured can be fixed on displacement platform 5 by specific frock clamp, 4 Ying Yuguang of optical filter to be measured
Door screen 3 is as far as possible close to placement.Displacement platform 5 can do two dimensional motion under motor driven, so that optical filter 4 to be measured be driven to be adopted
The test of sampling point traverse scanning.
Second lens 6 are identical as the effect of the first lens 2, can be used for adjusting test beams, so that going out from optical filter to be measured
The test beams penetrated are received completely by detector 7.
Different detectors can may be selected for receiving test signal, detector 7 in detector 7 according to the difference of test wavelength
Type, such as photomultiplier tube, Si detector, InGaAs detector etc..It is appreciated that according to different test wavelength ranges into
Row selects different detectors, and the sensitivity of detector response determines the precision of test.
Mounting platform 8 is for installing tunable single color light source 1, the first lens 2, diaphragm 3, displacement platform 5, the second lens 6
And installation, fixation and the optical path adjustment of detector 7.
Computer control unit 9 and the detector 7 are electrically connected, and the test signal that pick-up probe 7 obtains, and right
The data of test signal are handled, and corresponding spectrum test result is obtained.
The computer control unit 9 is also electrically connected at the tunable single color light source 1, the computer control unit
9 can control the unlatching and closure of the tunable single color light source 1.
The computer control unit 9 is also electrically connected at institute's translation stage 5, and the computer control unit 1 is controllable
The movement of institute's translation stage 5 processed.
The working principle for the small light spot test macro 100 that the above embodiment of the present invention provides is as follows:
The continuous monochromation illumination light beam that the tunable single color light source 1 is emitted is after 2 shaping of the first lens aggregation
Into the diaphragm 3, incident illuminating bundle is formed test hot spot by the diaphragm 3, and the test hot spot is radiated at the filter
On mating plate 4 and test beams are formed, the test beams are received after second lens 6 by the detector 7, the detection
Received test beams are converted to test signal by device 7, and the computer control unit 9 obtains the test signal and to described
It tests signal and carries out data processing acquisition spectrum test result.
Referring to Fig. 2, the step process of the test method for small light spot test macro 100 provided in an embodiment of the present invention
Figure, comprising:
Step S110: by the tunable single color light source 1, the first lens 2, diaphragm 3, displacement platform 5, the second lens 6 and
Detector 7 is successively fixedly installed in the mounting platform 8, and makes first lens 2, diaphragm 3, displacement platform 5, the second lens
6 and detector 7 keep with the tunable single color light source 1 outgoing beam orthogonal；
It is appreciated that the optimal illumination condition at sampling hot spot is obtained by adjusting the first lens 2, the second lens 6,
The light intensity of test is improved as far as possible, and the insertion of optical filter 4 front and back light beam can be received by a detector completely.
Step S120: closing the tunable single color light source 1, and the detector 7 described in dark state acquires dark background Sd, institute
State the response gray value that dark background is the detector under dark state；The tunable single color light source 1 is opened, institute be not installed
It states and acquires bright background Sb in the state of optical filter 4, the bright background is not install under optical filter state to be tested, each wavelength list
Coloured light irradiates the response gray value that the detector obtains；
It is appreciated that needing to control tunable single color light source 1 by computer control unit 9 when acquiring background
Monochromatic illumination light source carry out length scanning, to obtain the signal of each wavelength location.
Step S130: installing the optical filter 4, and makes the position of test hot spot first sampled point of alignment；It can
To understand, the diaphragm shape and size of test condition are met according to the selection of the demand of optical filter 4, according to the size selection of optical filter
Suitable frock clamp is fixed on mounting platform 8 by gradual filter 4 and diaphragm 3 close to placement, holding and optical system for testing
Normal is vertical.
Step S140: it controls the tunable single color light source and carries out wavelength traverse scanning, acquisition obtains first sampled point
Test signal St at position；
Step S150: the computer control unit according toObtain the transmitance of each wavelength at this sampled point
Value；
Step S160: repeat the above steps the spectral transmittance characteristic obtained at each sampled point.
Referring to Fig. 3, a kind of mobile scheme of sampling plan establishment displacement platform according to Fig.3, in computer control
The lower traverse scanning test for carrying out each sampled point of unit control processed, repeats step S110~step S160, to obtain
Spectral transmittance characteristic at each sampled point.
Small light spot test macro and method provided by the invention, which can be realized, carries out accurately each position of gradual filter
Sampling test, and can under the coordination of computer control system, efficiently complete gradual filter automatic test it is calibrated
Journey.
Small light spot test macro and method provided by the invention, the spectral characteristic that can be not only used for gradual filter are surveyed
Examination similarly uses other substrates for needing to carry out to sample test using small light spot.
Further, it should be noted that test macro involved in the present invention can not only carry out the test of transmission coefficient,
It is changed by the variation of optical system for testing, the test of reflection coefficient can also be carried out；Vertical incidence spectral characteristic can not only be carried out
Test can also be carried out with the spectral characteristic test under angle condition of incidence.
Certainly small light spot test macro of the invention can also have a variety of transformation and remodeling, it is not limited to above-mentioned embodiment party
The specific structure of formula.In short, protection scope of the present invention should include that those are aobvious and easy to those skilled in the art
The transformation or substitution seen and remodeling.
Claims (9)
1. a kind of small light spot test macro characterized by comprising tunable single color light source, the first lens, diaphragm, displacement are flat
Platform, the second lens, detector, mounting platform and computer control unit are equipped with optical filter to be measured on institute's translation stage,
It is flat that the tunable single color light source, the first lens, diaphragm, displacement platform, the second lens and detector are mounted on the installation
On platform, the computer control unit and the detector are electrically connected；Wherein:
The continuous monochromation illumination light beam of the tunable single color light source outgoing enters institute after the first lens shaping aggregation
Diaphragm is stated, incident illuminating bundle is formed test hot spot by the diaphragm, and the test hot spot is radiated on the optical filter simultaneously
Test beams are formed, the test beams are received after second lens by the detector, and the detector will be received
Test beams are converted to test signal, and the computer control unit obtains the test signal and carries out to the test signal
Data processing obtains spectrum test result.
2. small light spot test macro as described in claim 1, which is characterized in that the tunable single color light source include light source and
Monochromator or the tunable single color light source are tunable laser.
3. small light spot test macro as claimed in claim 2, which is characterized in that first lens are simple lens or lens
Group.
4. small light spot test macro as described in claim 1, which is characterized in that institute's translation stage can be done under motor driven
Two dimensional motion.
5. small light spot test macro as described in claim 1, which is characterized in that the detector is that photomultiplier tube or Si are visited
Survey device or InGaAs detector.
6. small light spot test macro as described in claim 1, which is characterized in that the computer control unit is also electrically connected
In the tunable single color light source, the computer control unit can control the unlatching and closure of the tunable single color light source.
7. small light spot test macro as described in claim 1, which is characterized in that the computer control unit is also electrically connected
In institute's translation stage, the computer control unit can control the movement of institute's translation stage.
8. a kind of test method of small light spot test macro as described in claim 1, which is characterized in that include the following steps:
The tunable single color light source, the first lens, diaphragm, displacement platform, the second lens and detector are successively fixedly mounted
In the mounting platform, and make first lens, diaphragm, displacement platform, the second lens and detector keep with it is described adjustable
The beam orthogonal of humorous monochromatic source outgoing；
The tunable single color light source is closed, the detector described in dark state acquires dark background Sd, and the dark background is dark
The response gray value of the detector under state；The tunable single color light source is opened, in the state for not installing the optical filter
The lower bright background Sb of acquisition, the bright background are not install under optical filter state to be tested, and each wavelength monochromatic light irradiates the spy
Survey the response gray value that device obtains；
The optical filter is installed, and makes the position of test hot spot first sampled point of alignment；
It controls the tunable single color light source and carries out wavelength traverse scanning, acquisition obtains the test letter at first sampling point position
Number St；
The computer control unit according toObtain the transmitance value of each wavelength at this sampled point；
Repeat the above steps the spectral transmittance characteristic obtained at each sampled point.
9. the test method of small light spot test macro as claimed in claim 8, which is characterized in that by adjusting described first thoroughly
Mirror, the second lens position and optical filter insertion front and back light beam can be received by the detector completely.
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| CN110987382A (en) * | 2019-12-28 | 2020-04-10 | 上海唯视锐光电技术有限公司 | Measuring equipment and measuring method for laser display color speckles |
| CN112254932A (en) * | 2020-10-14 | 2021-01-22 | 沈阳仪表科学研究院有限公司 | Rotation testing device for variable density optical filter |
| CN112880975A (en) * | 2021-01-14 | 2021-06-01 | 歌尔股份有限公司 | Modulation transfer function testing device |
| CN113272636A (en) * | 2020-07-09 | 2021-08-17 | 深圳市海谱纳米光学科技有限公司 | System and method for testing spectral response speed of adjustable optical filter |
| CN113295387A (en) * | 2021-05-25 | 2021-08-24 | 中国科学院合肥物质科学研究院 | System and method for testing optical parameters of multiband strip-shaped optical filter |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110987382A (en) * | 2019-12-28 | 2020-04-10 | 上海唯视锐光电技术有限公司 | Measuring equipment and measuring method for laser display color speckles |
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| CN113272636A (en) * | 2020-07-09 | 2021-08-17 | 深圳市海谱纳米光学科技有限公司 | System and method for testing spectral response speed of adjustable optical filter |
| CN112254932A (en) * | 2020-10-14 | 2021-01-22 | 沈阳仪表科学研究院有限公司 | Rotation testing device for variable density optical filter |
| CN112880975A (en) * | 2021-01-14 | 2021-06-01 | 歌尔股份有限公司 | Modulation transfer function testing device |
| CN112880975B (en) * | 2021-01-14 | 2023-01-24 | 歌尔股份有限公司 | Modulation transfer function testing device |
| CN113295387A (en) * | 2021-05-25 | 2021-08-24 | 中国科学院合肥物质科学研究院 | System and method for testing optical parameters of multiband strip-shaped optical filter |
| CN113295387B (en) * | 2021-05-25 | 2023-11-17 | 中国科学院合肥物质科学研究院 | Optical parameter testing system and method for multiband strip-shaped optical filter |
| CN113866105A (en) * | 2021-10-21 | 2021-12-31 | 沈阳仪表科学研究院有限公司 | Automatic test system and test method for wavelength gradient filter |
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Application publication date: 20190507 |