CN104729701A - High-power continuously tunable even monochromatic lighting light source system - Google Patents
High-power continuously tunable even monochromatic lighting light source system Download PDFInfo
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- CN104729701A CN104729701A CN201510130804.8A CN201510130804A CN104729701A CN 104729701 A CN104729701 A CN 104729701A CN 201510130804 A CN201510130804 A CN 201510130804A CN 104729701 A CN104729701 A CN 104729701A
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Abstract
The invention discloses a high-power continuously tunable even monochromatic lighting light source system. The mode that a high-power xenon lamp performs focusing through an ellipsoidal mirror is adopted for improving energy of a light source and increasing the utilization rate of the energy. A synchronous sampling mode is adopted for reducing influences caused by instability of the light source of the high-power xenon lamp. After focused light is split through a monochrometer and equalized through an integrating sphere, an even quasi-monochromatic light source is obtained and irradiates a target detector. Compared with a traditional continuously tunable even monochromatic lighting light source system, high outgoing energy is obtained. The problem that when a device-level detector performs a high-spectral-resolution relative radiometric calibration test, light source energy is insufficient is solved.
Description
Technical field
The present invention relates to optical measurement and metering field, specifically the even monochromatic illumination light-source system of a kind of high power continuously adjustable.
Background technology
Continuously adjustable even monochromatic illumination light-source system can produce continuous, tunable even quasi-monochromatic source, may be used for the test of device level detector relative radiometric calibration.Adopt monochromator as light-splitting device, realize light source continuously adjustable; Adopt integrating sphere as light balancing device, realize light illumination homogeneity.
Traditional employing ordinary light source is as lighting source, and due to intensity of light source restriction, in test process, spectral resolution is generally more than or equal to 5nm.Along with the development of high precision spectral instrument, 1nm spectral resolution relative radiometric calibration test index is more and more general, and traditional technology can not meet its energy requirement, needs to be optimized.
summary of the inventionthe object of this invention is to provide the even monochromatic illumination light-source system of a kind of high power continuously adjustable, to solve the problem of testing light source energy shortage under prior art high spectral resolution condition.
In order to achieve the above object, the technical solution adopted in the present invention is:
The even monochromatic illumination light-source system of a kind of high power continuously adjustable, it is characterized in that: comprise ellipsoidal mirror, grating monochromator, integrating sphere, with the lucifuge case of light inlet, ellipsoidal mirror focal position is provided with high power xenon lamp, the slotted inlets of described grating monochromator is arranged on ellipsoidal mirror two secondary foci place, and between grating monochromator and high power xenon lamp, be provided with recirculated water cooling heat sink, the outlet of grating monochromator is communicated with the entrance of integrating sphere, and grating monochromator exit is provided with the second order spectrum optical filter that disappears, integrating sphere inwall is provided with reference detector, the outlet of integrating sphere is communicated with the light inlet of lucifuge case, and lucifuge case light inlet place is provided with the parasitic light diaphragm cylinder that disappears, the target detector of receiving optical signals is also provided with in lucifuge case.
The described even monochromatic illumination light-source system of a kind of high power continuously adjustable, is characterized in that: described recirculated water cooling heat sink is made up of the water-cooled optical filter be arranged between grating monochromator and ellipsoidal mirror, the water circulating pump that consists of circulation waterway water pipe and water-cooled optical filter.
The described even monochromatic illumination light-source system of a kind of high power continuously adjustable, is characterized in that: integrating sphere internal reference detector is connected with host computer respectively with lucifuge case internal object detector, by PC control reference detector and target detector synchronized sampling.
The present invention's beneficial effect compared with prior art comprises:
1, the present invention adopts 1000W high power xenon lamp light source as lighting source, and adopts ellipsoidal mirror focused ray to design, the requirement of high emanated energy under can realizing high spectral resolution test condition.
2, the present invention proposes the calibrating method of synchronized sampling, solves the problem of the calibration precision decline surely brought by flashing.
Accompanying drawing explanation
Fig. 1 is present system schematic diagram.
Embodiment
As shown in Figure 1, the even monochromatic illumination light-source system of a kind of high power continuously adjustable, comprise ellipsoidal mirror 1, grating monochromator 4, integrating sphere 7, with the lucifuge case 10 of light inlet, ellipsoidal mirror 1 focal positions are provided with high power xenon lamp 2, the slotted inlets of grating monochromator 4 is arranged on ellipsoidal mirror 1 two secondary foci place, and be provided with recirculated water cooling heat sink 3 between grating monochromator 4 and high power xenon lamp 2, the outlet of grating monochromator 4 is communicated with the entrance of integrating sphere 7, and grating monochromator 4 inner outlet place is provided with the second order spectrum optical filter 5 that disappears, integrating sphere 7 inwall is provided with reference detector 6, the outlet of integrating sphere 7 is communicated with the light inlet of lucifuge case 10, and light inlet place is provided with the parasitic light diaphragm cylinder 8 that disappears in lucifuge case 10, the target detector 9 of receiving optical signals is also provided with in lucifuge case 10.
Recirculated water cooling heat sink 3 is made up of the water-cooled optical filter be arranged between grating monochromator 4 and ellipsoidal mirror 1, the water circulating pump that consists of circulation waterway water pipe and water-cooled optical filter.
Integrating sphere 7 internal reference detector 6 is connected with host computer respectively with lucifuge case 10 internal object detector 9, by PC control reference detector 6 and target detector 9 synchronized sampling.
In the present invention, high power xenon lamp light source outgoing beam focuses on grating monochromator entrance slit place through ellipsoidal mirror, be incident in integrating sphere by the light beam produced after grating monochromator light splitting through the second order spectrum optical filter that disappears, light in integrating sphere after repeatedly diffuse reflection, target detector is incident to by lucifuge case light inlet, integrating sphere inwall is provided with reference detector, in test process, target detector and reference detector adopt the method for synchronized sampling, for the relative energy change that Real-Time Monitoring target detector receives.Recirculated water cooling heat sink is provided with in the middle of high power xenon lamp and grating monochromator, recirculated water cooling heat sink comprises water-cooled optical filter and water circulating pump, water-cooled optical filter is for absorbing the infrared radiation in xenon lamp spectrum, reduce the infrared radiation to grating monochromator, improve serviceable life, around recirculated water around water-cooled optical filter, for lowering the temperature to water-cooled optical filter.
Specific embodiment:
The light beam of 1000W high power xenon lamp 2 outgoing focuses on grating monochromator 4 slotted inlets place through ellipsoidal mirror 1; The design of ellipsoidal mirror light source can be launched 70% spectrum can focus on ellipsoidal mirror two secondary focis on export, improve the capacity usage ratio of light source.
Recirculated water cooling heat sink comprises water-cooled optical filter, water circulating pump, and water-cooled optical filter can absorb the infrared part in xenon lamp spectrum, and prevent grating components in monochromator from reducing usability and life-span because infrared high strength is irradiated, water circulating pump plays cooling effect.
According to diffraction properties, be incident in integrating sphere 7 by the quasi-monochromatic source after grating monochromator 4 light splitting, in the middle of grating monochromator 4 and integrating sphere 7, increase the second order spectrum optical filter 5 that disappears, the second order spectrum produced by diffraction grating can be eliminated.
Light is after the multiple reflections of integrating sphere 7 inwall, and its exit is desirable diffused light source.
Reference detector 6 is placed in integrating sphere inwall, for monitoring the relative energy change of integrating sphere outgoing light source.
Disappear parasitic light diaphragm cylinder 8 and lucifuge case 10 for reducing the impact of parasitic light.
Because high power xenon lamp light source adopts the mode of operation of arc glow, electric arc shake makes the stability of light source poor compared with ordinary light source, causes measuring accuracy to be deteriorated.In test process, target detector 9 and reference detector 6 adopt pc control procedure synchro control, namely adopt synchronous sampling method, reduce by the qualitative test error brought of flashing, improve measuring accuracy.
Claims (3)
1. the even monochromatic illumination light-source system of high power continuously adjustable, it is characterized in that: comprise ellipsoidal mirror, grating monochromator, integrating sphere, with the lucifuge case of light inlet, ellipsoidal mirror focal position is provided with high power xenon lamp, the slotted inlets of described grating monochromator is arranged on ellipsoidal mirror two secondary foci place, and between grating monochromator and high power xenon lamp, be provided with recirculated water cooling heat sink, the outlet of grating monochromator is communicated with the entrance of integrating sphere, and grating monochromator exit is provided with the second order spectrum optical filter that disappears, integrating sphere inwall is provided with reference detector, the outlet of integrating sphere is communicated with the light inlet of lucifuge case, and lucifuge case light inlet place is provided with the parasitic light diaphragm cylinder that disappears, the target detector of receiving optical signals is also provided with in lucifuge case.
2. the even monochromatic illumination light-source system of a kind of high power continuously adjustable according to claim 1, is characterized in that: described recirculated water cooling heat sink is made up of the water-cooled optical filter be arranged between grating monochromator and ellipsoidal mirror, the water circulating pump that consists of circulation waterway water pipe and water-cooled optical filter.
3. the even monochromatic illumination light-source system of a kind of high power continuously adjustable according to claim 1, it is characterized in that: integrating sphere internal reference detector is connected with host computer respectively with lucifuge case internal object detector, by PC control reference detector and target detector synchronized sampling.
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| CN201510130804.8A CN104729701A (en) | 2015-03-24 | 2015-03-24 | High-power continuously tunable even monochromatic lighting light source system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973468A (en) * | 2016-05-05 | 2016-09-28 | 中国科学院合肥物质科学研究院 | Visible near-infrared band high precision solar irradiance meter |
| CN109374550A (en) * | 2018-11-16 | 2019-02-22 | 中国科学院合肥物质科学研究院 | Super-resolution spectrograph spectrum calibration method based on optical transmission spectra |
| CN112683396A (en) * | 2021-03-18 | 2021-04-20 | 武汉精创电子技术有限公司 | Integrating sphere quantitative spectrum output method and system and electronic equipment |
| CN113295387A (en) * | 2021-05-25 | 2021-08-24 | 中国科学院合肥物质科学研究院 | System and method for testing optical parameters of multiband strip-shaped optical filter |
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| CN2676188Y (en) * | 2004-03-02 | 2005-02-02 | 江苏静安科技公司 | Portable near infrared spectrometer |
| CN201053901Y (en) * | 2007-07-09 | 2008-04-30 | 邱迦易 | Quick spectrophotometer for color measuring |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973468A (en) * | 2016-05-05 | 2016-09-28 | 中国科学院合肥物质科学研究院 | Visible near-infrared band high precision solar irradiance meter |
| CN109374550A (en) * | 2018-11-16 | 2019-02-22 | 中国科学院合肥物质科学研究院 | Super-resolution spectrograph spectrum calibration method based on optical transmission spectra |
| CN112683396A (en) * | 2021-03-18 | 2021-04-20 | 武汉精创电子技术有限公司 | Integrating sphere quantitative spectrum output method and system and electronic equipment |
| CN113295387A (en) * | 2021-05-25 | 2021-08-24 | 中国科学院合肥物质科学研究院 | System and method for testing optical parameters of multiband strip-shaped optical filter |
| CN113295387B (en) * | 2021-05-25 | 2023-11-17 | 中国科学院合肥物质科学研究院 | Optical parameter testing system and method for multiband strip-shaped optical filter |
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