CN108981579B - Spectrum confocal measurement system and method for large-range measurement - Google Patents
Spectrum confocal measurement system and method for large-range measurement Download PDFInfo
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- CN108981579B CN108981579B CN201810828003.2A CN201810828003A CN108981579B CN 108981579 B CN108981579 B CN 108981579B CN 201810828003 A CN201810828003 A CN 201810828003A CN 108981579 B CN108981579 B CN 108981579B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Abstract
The invention discloses a spectrum confocal measuring system and method for large-range measurement, belonging to the technical field of optical displacement measurement and comprising a light source component, a spectrum confocal measuring component, a signal receiving component and a processor; the light source component comprises a broad spectrum light source and a tunable filter; the spectrum confocal measuring component comprises a spectroscope and a dispersion objective lens group, light beams in a specific wavelength range sequentially penetrate through the spectroscope and the dispersion objective lens group to reach the surface of the object to be measured, and the light beams reflected back from the surface of the object to be measured are reflected to the signal receiving component through the spectroscope; the signal receiving assembly comprises a CCD camera, the processor obtains wavelength information by calculating an image spectrum obtained by the CCD camera, adjusts the tunable filter to output narrow-band light according to the wavelength information, and obtains position information of corresponding wavelength by utilizing a linear relation between the wavelength and the axial distance. By adopting the mode of combining the broad spectrum light source and the adjustable filter, the measuring precision is ensured, and the measuring position range of the measured object is enlarged.
Description
Technical Field
The invention relates to the technical field of optical displacement measurement, in particular to a spectral confocal measurement system and method for large-range measurement.
Background
In recent years, with the rapid development of precision manufacturing, the demand for measurement techniques has also increased greatly. The traditional contact type measuring mode cannot be suitable for different environments because the object to be measured is damaged, and cannot meet the measuring requirement. The non-contact spectral confocal technology is a new high-precision measurement technology appearing in recent years. The spectrum confocal measurement technology has high precision, high measurement speed and high real-time performance, can be suitable for different environments, quickly becomes a hot spot of current research, and is widely applied to the fields of film thickness measurement, precision positioning, precision instrument manufacturing and the like.
The spectral confocal measurement system based on the spectral confocal technology uses a light source to irradiate the surface of a measured object, and uses a CCD industrial camera or a spectrometer and the like to detect the reflected spectral information and determine the peak wavelength focused on the surface of the object, thereby obtaining the axial distance information of the surface of the measured object. The principle is that a dispersive objective lens group is utilized to enable light of a light source to be dispersed after being focused by the dispersive objective lens group, continuous monochromatic light focuses with different distances to the dispersive objective lens group are formed on an optical axis, therefore, a linear relation between wavelength and axial distance is established, and corresponding position information is obtained by utilizing spectral information reflected by the surface of an object to be measured.
The spectrum confocal technology has higher precision than contact measurement and wide application range, but the existing light sources mostly adopt LED light sources, and the wavelength range of emergent light is smaller, so that the position range of measurement is smaller. In order to increase the measurement position range, methods such as changing a dispersion objective structure and changing a light source are mainly used at the present stage, however, redesigning the dispersion objective structure consumes time and labor, and cannot solve the measurement problem in time, and although changing an LED light source into a light source such as a halogen lamp with a larger emergent light wavelength range can also meet certain requirements, the intensity distribution of each wavelength of the emergent light is not uniform, so that the measurement accuracy is significantly reduced.
For example, chinese patent publication No. CN106907998A discloses a linearized confocal measurement apparatus and method for spectrum, the apparatus includes: the light source is used for generating emergent light and transmitting the emergent light to the sampling part; the sampling part is used for receiving the emergent light and then generating first dispersion, so that the light which generates the first dispersion is irradiated to a measured object, reflected light returned by the measured object passes through the light-splitting part and then is transmitted to the light-splitting part, and the dispersion and the wavelength of the sampling part are in a nonlinear relation; the light splitting part is used for receiving the reflected light returned by the sampling part, generating secondary dispersion on the reflected light with different wavelengths and transmitting the reflected light to the sensing part, the dispersion and the wavelength of the light splitting part are in a nonlinear relation, and the difference of the nonlinear relation of the sampling part and the difference of the nonlinear relation of the light splitting part are partially or completely offset; and the sensing part is used for converting the reflected light into an electric signal so as to obtain a measurement result. The invention adopts two sets of optical path measuring systems to carry out measurement twice, thereby increasing the complexity and the cost of measurement.
Disclosure of Invention
The invention aims to provide a spectrum confocal measuring system for large-range measurement, which can increase the measuring position range of a measured object while ensuring the measuring precision and does not increase the measuring cost.
Another object of the present invention is to provide a spectral confocal measurement method for wide-range measurement, which can be realized by the above spectral confocal measurement system.
In order to achieve the above purpose, the spectral confocal measurement system provided by the invention comprises a light source assembly, a spectral confocal measurement assembly, a signal receiving assembly and a processor electrically connected with the light source assembly and the signal receiving assembly; the light source assembly comprises a broad-spectrum light source and a tunable filter electrically connected with the processor, and the tunable filter is used for filtering light beams emitted by the broad-spectrum light source to obtain light beams in a specific wavelength range; the spectrum confocal measuring component comprises a spectroscope and a dispersion objective lens group, light beams in a specific wavelength range sequentially penetrate through the spectroscope and the dispersion objective lens group to reach the surface of the object to be measured, and the light beams reflected back from the surface of the object to be measured are reflected to the signal receiving component through the spectroscope; the signal receiving assembly comprises a CCD camera electrically connected with the processor, the CCD camera captures images at the reflected light focus of the spectroscope, obtains image information and transmits the image information to the processor, the processor obtains wavelength information by calculating an image spectrum, adjusts the tunable optical filter to output narrow-band light according to the wavelength information, and obtains position information of corresponding wavelength by utilizing the linear relation between the wavelength and the axial distance.
In the technical scheme, the mode of combining the broad spectrum light source and the adjustable filter is adopted, so that the measurement precision is ensured, and the measurement position range of the measured object is enlarged. In the light source assembly, the light source uses a broad-spectrum light source, so that the measuring range of a spectral confocal measuring system can be increased under the condition of not changing the design of a dispersive objective lens group, a tunable filter can be added behind the light source for adjusting the intensity of the light source, so that when the required wavelength falls at the position with smaller intensity of the light source, the wavelength corresponding to the position of the surface of an object to be measured can be obtained more intuitively and accurately by adjusting the intensity, meanwhile, the tunable filter can tune the wavelength of output light in a large range, and a narrow-band light source is output, so that the influence of stray light is reduced during accurate measurement. The purpose of outputting narrow-band light with different central wavelengths can be achieved by adjusting the voltage at the two ends of the optical filter. The CCD camera can obtain and store spectral information during measurement so as to collect feedback information obtained by emitting narrow-band light with different central wavelengths after being filtered by the tunable filter, and the feedback information is further processed by the processor.
The specific scheme is that the light source component further comprises a collimating lens, and the collimating lens collimates and emits the light beam obtained by the tunable filter to the spectrum confocal measuring component.
Another specific proposal is that the broad spectrum light source is a halogen lamp light source. Therefore, the measurement range of the whole spectrum confocal measurement system is enlarged in the dispersion range of the dispersion objective lens group under the condition of not changing the dispersion objective lens group.
Another specific solution is that the broad spectrum light source is a laser-driven broad spectrum light source. The purpose of enlarging the measuring range can be achieved.
In another specific embodiment, the signal receiving module further includes a focusing lens for focusing the light beam reflected by the beam splitter, and the CCD camera is disposed at a focal point of the focusing lens.
In order to achieve another object, the present invention provides a spectral confocal measurement method for wide-range measurement, comprising the steps of:
1) opening a wide-spectrum light source, enabling light beams to sequentially penetrate through a spectroscope and a dispersion lens group to reach the surface of an object to be measured, enabling the light beams reflected by the surface of the object to be measured to be reflected to a CCD camera through the spectroscope to be measured for the first time, transmitting image information to a processor through the CCD camera, and processing the image information to obtain a wavelength lambda when light intensity is a peak value;
2) opening the tunable filter, taking 1/2 of a spectral line FWHM as delta lambda, and obtaining a peak wavelength range of (lambda-delta lambda, lambda + delta lambda) according to the wavelength lambda obtained in the step 1);
3) controlling the voltage at two ends of the tunable filter to enable the central wavelength of the narrow-band light source light beam emitted by the light beam of the broad-spectrum light source after passing through the tunable filter to increase progressively within the range of the peak wavelength;
4) measuring by adopting the method in the step 1) to obtain a group of peak wavelengths lambda 'changing along with the central wavelength of emergent light'0，λ′1，λ′2…, obtaining the final peak wavelength lambda' by mean value processing;
5) judging whether data which are not processed exist in the peak wavelength data obtained by the first measurement, if so, repeating the step 2) and the step 3), and if the data are completely processed, closing the tunable filter to enable the light source system to emit a wide-spectrum light source;
6) according to the linear relation between the wavelength and the axial distance of the surface of the object to be measured, the spectral information reflected by the surface of the object to be measured is utilized to obtain corresponding position information, and therefore the height or the thickness of the object to be measured is obtained.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, a group of wavelengths are obtained by sampling for multiple times in the maximum wavelength range, so that the tunable filter outputs narrow-band light beams with corresponding central wavelengths. The processor receives the pictures shot by the CCD camera, the final maximum wavelength is obtained after processing, and the position information of the corresponding wavelength is obtained according to the linear relation between the wavelength and the axial distance, so that the height or the thickness of the object to be measured is obtained. The mode of combining the broad spectrum light source and the adjustable filter is adopted, the measurement precision is ensured, and meanwhile, the position range of the measured object is enlarged. The device is simple, and the method is convenient to operate.
Drawings
Fig. 1 is a flowchart of controlling a tunable filter to output narrowband light according to embodiment 1 or 2 of the present invention;
FIG. 2 is a schematic diagram of a spectral confocal measurement system for measuring the height of an object to be measured in embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of a spectroscopic confocal measurement system for measuring the thickness of an object to be measured in embodiment 2 of the present invention;
fig. 4 is a schematic diagram of a peak wavelength obtained by the first measurement when the thickness of the object to be measured is measured in embodiment 2 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the following embodiments and accompanying drawings.
Example 1
Referring to fig. 1 and 2, the spectral confocal measurement system of the present embodiment includes a light source assembly, a spectral confocal measurement assembly, a signal receiving assembly, and a processor.
The light source assembly includes a broad spectrum light source 201, a tunable filter 202, and a collimating lens 203. The broad spectrum light source 201 may be a halogen lamp or a laser driven broad spectrum light source. The tunable filter 202 is used to broaden the spectral beam into a narrow band of light beams of a particular center wavelength. The collimating lens 203 is used to collimate the light beam emitted by the tunable filter 202.
The spectral confocal measurement assembly includes a beam splitter 204 and a dispersive objective lens assembly 205. The beam splitter 204 allows the light beam emitted from the light source module to propagate as it is, and reflects the light beam reflected from the surface of the object 206 to the signal receiving module. The dispersive objective lens group 205 is configured to focus the outgoing broad-spectrum light beam or narrow-band light beam with a specific center wavelength, so that the wide-spectrum light beam or the narrow-band light beam has spectral dispersion, and continuous monochromatic light focuses are formed on the optical axis, and the distances from each monochromatic light focus to the object to be measured are different. The surface of the object 206 to be measured reflects the light beam dispersed by the dispersive objective lens group 205, and makes the monochromatic light with specific wavelength focused on the surface of the object 206 to be measured return to the beam splitter 204 according to the original optical path. In this case, the intensity of the monochromatic light of the wavelength is hardly lost, and the intensity of the monochromatic light other than the wavelength in the reflected light is greatly lost.
The signal receiving assembly includes a focusing lens 207 and a CCD camera 208, and the light beam reflected by the surface of the object 206 is reflected to the focusing lens 207 by the beam splitter 204, and then the focusing lens 207 converges the light beam and transmits the converged light beam to the CCD camera 208.
The processor is a computer 209, which is electrically connected to the tunable optical filter 202 and the CCD camera 208, receives an image signal obtained by shooting by the CCD camera 208, adjusts the tunable optical filter 202 to obtain a narrow-band light beam with a specific center wavelength, so as to expand the position range of the object to be measured, and finally obtains position information of a corresponding wavelength according to a linear relationship between the wavelength and the axial distance, thereby obtaining the height of the object to be measured 206.
The steps of measuring the surface height of the object to be measured by using the measuring system are as follows:
s101, a wide-spectrum light source is turned on, light beams sequentially penetrate through a spectroscope and a dispersion lens group to reach the surface of an object to be measured, the light beams reflected back from the surface of the object to be measured are reflected to a CCD camera through the spectroscope to be measured for the first time, the CCD camera transmits image information to a processor, and the wavelength lambda when the light intensity is the peak value is obtained through processing;
s102, turning on the tunable filter, taking 1/2 of a spectral line FWHM as delta lambda, and obtaining a peak wavelength range of (lambda-delta lambda, lambda + delta lambda) according to the wavelength lambda obtained in the step 1), namely (lambda)min，λmax)；
S103, controlling the voltage at two ends of the tunable filter, so that the central wavelength of the narrow-band light source light beam emitted by the light beam of the wide-spectrum light source after passing through the tunable filter is increased within the range of the peak wavelength;
s104, a group of peak wavelengths lambda 'changing along with the center wavelength of emergent light is obtained through measurement by the method of the step S101'0，λ′1，λ′2…, obtaining the final peak wavelength lambda' by mean value processing;
s105, judging whether data in the peak wavelength data obtained by the first measurement is unprocessed or not, if so, repeating the step S102 and the step S103, and if the data is completely processed, closing the tunable filter to enable the light source system to emit a wide-spectrum light source;
s106, according to the linear relation between the wavelength and the axial distance of the surface of the object to be measured, the spectral information reflected by the surface of the object to be measured is utilized to obtain corresponding position information, and therefore the height of the object to be measured is obtained.
Example 2
Referring to fig. 3, the structure of the spectral confocal measurement system of the present embodiment is the same as that of embodiment 1, except that the object to be measured 206 of the present embodiment is made of a material with good light transmittance, and the light beams dispersed by the dispersive objective lens assembly 205 can reach the lower surface of the object to be measured 206 through the object to be measured 206.
During the first measurement, the light beam of the broad-spectrum light source is dispersed by the dispersive objective lens group 205 and then emitted, and the monochromatic light with specific wavelength focused on the object to be measured 206 is reflected back according to the original path by the upper surface and the lower surface of the object to be measured, so that the energy loss of the monochromatic light with the two wavelengths is very small. The light beams reflected by the upper and lower surfaces of the object 206 to be measured are reflected to the focusing lens 207 through the beam splitter 204, then the focusing lens 207 converges the light beams and transmits the converged light beams to the CCD camera 208, and the computer 209 receives an image signal obtained by the CCD camera 208 and obtains the final thickness of the object to be measured through processing.
Referring to fig. 4, a schematic diagram of the peak wavelength obtained from the first measurement when measuring the thickness of the object is shown. After the first measurement, the computer processes to obtain two peak wavelengths lambda1、 λ 2401 and 402, respectively. The computer calculates the FWHM of the spectral lines from the obtained image signals to be 2 Delta lambda respectively1、2Δλ2403 and 404, respectively. And then, measuring the specific heights of the upper surface and the lower surface of the object in sequence according to the obtained wavelength range, and obtaining the thickness of the object to be measured according to the height difference.
Example 3
This example provides a spectroscopic confocal measurement method for wide-range measurement, which is included in example 1 and will not be described herein.
The above embodiments are merely illustrative of the present invention and are not to be construed as limiting the invention. Although the present invention has been described in detail with reference to the embodiments, it should be understood by those skilled in the art that various combinations, modifications or equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention, and the technical solution of the present invention is covered by the claims of the present invention.
Claims (4)
1. The spectrum confocal measuring system for large-range measurement comprises a light source assembly, a spectrum confocal measuring assembly and a signal receiving assembly, and is characterized by further comprising a processor electrically connected with the light source assembly and the signal receiving assembly;
the light source assembly comprises a broad-spectrum light source and a tunable filter electrically connected with the processor, and the tunable filter is used for filtering light beams emitted by the broad-spectrum light source to obtain light beams in a specific wavelength range; the light source component also comprises a collimating lens, and the collimating lens collimates and emits the light beam obtained by the tunable filter to the spectrum confocal measuring component;
the spectral confocal measurement component comprises a spectroscope and a dispersive objective lens group, light beams in a specific wavelength range sequentially penetrate through the spectroscope and the dispersive objective lens group to reach the surface of the object to be measured, and the light beams reflected by the surface of the object to be measured are reflected to the signal receiving component through the spectroscope;
the signal receiving assembly comprises a CCD camera electrically connected with the processor, the CCD camera captures images at the reflected light focus of the spectroscope, obtains image information and transmits the image information to the processor, the processor obtains wavelength information by calculating an image spectrum, adjusts the tunable filter to output narrow-band light according to the wavelength information, and obtains position information of corresponding wavelength by utilizing the linear relation between the wavelength and the axial distance; the signal receiving assembly also comprises a focusing lens for focusing the light beam reflected by the beam splitter, and the CCD camera is arranged at the focus of the focusing lens;
the light beam sequentially penetrates through the spectroscope and the dispersion lens group to reach the surface of an object to be measured, the light beam reflected by the surface of the object to be measured is reflected to the CCD camera through the spectroscope to be measured for the first time, the CCD camera transmits image information to the processor, and the wavelength lambda when the light intensity is the peak value is obtained through processing; opening the tunable filter, and taking 1/2 of the spectral line FWHM as delta lambda to obtain a peak wavelength range of (lambda-delta lambda, lambda + delta lambda); controlling the voltage at two ends of the tunable filter to enable the central wavelength of the narrow-band light source light beam emitted by the light beam of the broad-spectrum light source after passing through the tunable filter to increase progressively within the range of the peak wavelength; measuring to obtain a group of peak wavelengths lambda 'varying with the center wavelength of emergent light'0，λ′1，λ′2…, obtaining the final peak wavelength lambda' by mean value processing; according to the linear relation between the wavelength and the axial distance of the surface of the object to be measured, the spectral information reflected by the surface of the object to be measured is utilized to obtain corresponding position information, so thatAnd obtaining the height or the thickness of the object to be measured.
2. The spectroscopic confocal measurement system of claim 1, wherein:
the wide-spectrum light source is a halogen lamp light source.
3. The spectroscopic confocal measurement system of claim 1, wherein:
the wide-spectrum light source is a laser-driven wide-spectrum light source.
4. A spectral confocal measurement method for wide-range measurement, which is realized based on the spectral confocal measurement device of any one of claims 1 to 3, and is characterized by comprising the following steps:
1) opening a wide-spectrum light source, enabling light beams to sequentially penetrate through a spectroscope and a dispersion lens group to reach the surface of an object to be measured, enabling the light beams reflected by the surface of the object to be measured to be reflected to a CCD camera through the spectroscope to be measured for the first time, transmitting image information to a processor through the CCD camera, and processing the image information to obtain a wavelength lambda when light intensity is a peak value;
2) opening the tunable filter, taking 1/2 of a spectral line FWHM as delta lambda, and obtaining a peak wavelength range of (lambda-delta lambda, lambda + delta lambda) according to the wavelength lambda obtained in the step 1);
3) controlling the voltage at two ends of the tunable filter to enable the central wavelength of the narrow-band light source light beam emitted by the light beam of the broad-spectrum light source after passing through the tunable filter to increase progressively within the range of the peak wavelength;
4) measuring by adopting the method in the step 1) to obtain a group of peak wavelengths lambda 'changing along with the central wavelength of emergent light'0，λ′1，λ′2…, obtaining the final peak wavelength lambda' by mean value processing;
5) judging whether data which are not processed exist in the peak wavelength data obtained by the first measurement, if so, repeating the step 2) and the step 3), and if the data are completely processed, closing the tunable filter to enable the light source system to emit a wide-spectrum light source;
6) according to the linear relation between the wavelength and the axial distance of the surface of the object to be measured, the spectral information reflected by the surface of the object to be measured is utilized to obtain corresponding position information, and therefore the height or the thickness of the object to be measured is obtained.
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| CN109458939A (en) * | 2018-12-18 | 2019-03-12 | 南京理工大学 | With the lens center thickness measurement method combined of quickly feeling relieved |
| CN109781015B (en) * | 2019-01-03 | 2020-04-28 | 西安交通大学 | Method for quickly measuring surface steps of object by spectral confocal line scanning |
| CN110044286B (en) * | 2019-04-15 | 2021-03-05 | 清华大学深圳研究生院 | Spectrum confocal axial distance detection method, device and equipment |
| CN110230986B (en) * | 2019-07-05 | 2024-04-05 | 季华实验室 | Device and method for measuring d15 parameter of piezoelectric ceramic based on spectral confocal |
| CN110260799A (en) * | 2019-07-29 | 2019-09-20 | 海伯森技术（深圳）有限公司 | A kind of Spectral Confocal displacement sensor |
| US20230087237A1 (en) * | 2020-06-11 | 2023-03-23 | Aleader Vision Technology Co., Ltd. | Spectral confocal measurement device and measurement method thereof |
| CN111879239B (en) * | 2020-06-11 | 2022-09-02 | 东莞市神州视觉科技有限公司 | Spectrum confocal measuring device and measuring method |
| CN111982027A (en) * | 2020-09-01 | 2020-11-24 | 中国科学院长春光学精密机械与物理研究所 | Free-form surface non-contact type measuring system based on dispersion confocal |
| CN112147622B (en) * | 2020-09-02 | 2024-02-06 | Oppo广东移动通信有限公司 | Distance measuring device, distance measuring method, camera and electronic equipment |
| CN112344865B (en) * | 2020-11-06 | 2022-12-09 | 中国船舶重工集团公司第七0七研究所 | Hemisphere harmonic oscillator wall thickness and wall thickness uniformity in-situ measurement system and method |
| CN112462349A (en) * | 2020-11-20 | 2021-03-09 | 武汉烽火凯卓科技有限公司 | Wavelength calculation method, system, server and storage medium for spectrum confocal displacement sensor |
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| CN112798614A (en) * | 2020-12-25 | 2021-05-14 | 长江存储科技有限责任公司 | Semiconductor machine and detection method |
| CN112763066B (en) * | 2021-01-20 | 2022-04-01 | 北京航空航天大学 | Spectral information acquisition device based on axial chromatic aberration |
| CN113074644B (en) * | 2021-04-01 | 2022-11-01 | 南京信息工程大学 | High-speed low-cost spectrum confocal displacement measurement method and device |
| CN113176208B (en) * | 2021-04-30 | 2022-05-20 | 谱诉光电科技（苏州）有限公司 | Light source module for material light transmittance detection device and light transmittance detection device |
| CN114001931A (en) * | 2021-11-02 | 2022-02-01 | Oppo广东移动通信有限公司 | Testing device and testing method for imaging assembly |
| CN115876447B (en) * | 2023-02-17 | 2023-06-06 | 聚时科技(深圳)有限公司 | Single wavelength optical device detection device |
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| CN104034268B (en) * | 2014-07-01 | 2016-08-24 | 西安工业大学 | Two-slit interference striped decoding Spectral Confocal displacement transducer and displacement measurement method thereof |
| US10935366B2 (en) * | 2014-12-12 | 2021-03-02 | Werth Messtechnik Gmbh | Method and device for measuring features on workpieces |
| CN107179052B (en) * | 2017-04-14 | 2020-02-14 | 中国科学院光电研究院 | Online calibration device and method for spectrum confocal measurement system |
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