CN113074644B - High-speed low-cost spectrum confocal displacement measurement method and device - Google Patents
High-speed low-cost spectrum confocal displacement measurement method and device Download PDFInfo
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- CN113074644B CN113074644B CN202110355600.XA CN202110355600A CN113074644B CN 113074644 B CN113074644 B CN 113074644B CN 202110355600 A CN202110355600 A CN 202110355600A CN 113074644 B CN113074644 B CN 113074644B
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The invention discloses a high-speed low-cost spectral confocal displacement measurement method and a device, wherein the device comprises a controller, an illumination module, a Y-shaped optical fiber, a detection module, a dispersion lens, a component to be measured and a calibration module; the lighting module electrically controls a plurality of groups of LEDs and provides light sources covering all visible light wave bands; the light source is coupled into the Y-shaped optical fiber, emergent light enters the dispersion lens and is focused on the surface of the element to be measured, the light spot positions are different when the wavelengths are different, and reflected light on the surface of the element to be measured returns to the Y-shaped optical fiber; the detection module measures the light intensity of reflected light on the surface of the element to be measured; the calibration module is used for calibrating the relation between the position of the dispersion lens and the analog voltage signal of the detection module; and the controller calculates the wavelength of the focused light spot and the corresponding surface position information of the element to be detected according to the light intensity data of different LEDs during illumination. The invention overcomes the defects of low speed and high cost of a spectrometer used in the traditional spectrum confocal technology by using a method of multi-wavelength light source illumination and a high-speed point detector.
Description
Technical Field
The invention belongs to the technical field of test and measurement, and particularly relates to a high-speed low-cost spectrum confocal displacement measurement method and device.
Background
High-speed and high-precision displacement measurement is a core technology of precision movement and positioning. Various precise displacement measurement techniques have been developed, such as electrical methods including capacitance and inductance, and optical methods including interferometry, confocal scanning, triangulation, and white light interferometry. The electric method generally has a large measuring range but low precision, and compared with the optical method, the optical method has higher precision and lower requirement on the surface and is widely applied to high-precision measurement, wherein the interferometric method uses coherent light for illumination, measures phase change caused by displacement, has extremely high precision and resolution, is easily influenced by external vibration and has higher requirement on the environment. The confocal scanning method can obtain extremely high axial resolution by measuring light intensity through axial scanning, but has low efficiency. White light interferometry uses low-coherence light illumination, has higher axial resolution, but also needs scanning and has lower efficiency. The influence of displacement on the position of the optical point is measured by a trigonometry method, the structure is simple, and the volume is large.
In recent years, a spectral confocal technology has attracted much attention, and by introducing axial chromatic aberration, the technology includes displacement information in a reflection spectrum, and further adopts a spectrometer to perform measurement analysis, so that high-precision and high-resolution displacement information can be obtained. However, due to the use of a spectrometer, the technique has a high cost and a relatively low measurement speed, and therefore, it is urgently needed to reduce the cost and improve the measurement efficiency.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a high-speed low-cost spectral confocal displacement measurement method and device aiming at the defects of the prior art, which can perform non-contact measurement and precise positioning of the three-dimensional surface shape of an object, avoid the use of a spectrometer, are suitable for accurate and efficient measurement of displacement, and have wide application prospects in precise positioning and three-dimensional surface shape measurement.
In order to achieve the technical purpose, the technical scheme adopted by the invention is as follows:
a high-speed low-cost spectral confocal displacement measurement device is characterized by comprising: the device comprises a controller, an illumination module, a Y-shaped optical fiber, a detection module, a dispersion lens, an element to be detected and a calibration module;
the lighting module electrically controls a plurality of groups of LEDs and provides light sources covering all visible light wave bands;
the light source is coupled into the Y-shaped optical fiber, emergent light enters the dispersion lens and is focused on the surface of an element to be measured, the light spot positions are different when the wavelengths are different, and reflected light on the surface of the element to be measured returns to the Y-shaped optical fiber;
the detection module measures the light intensity of reflected light on the surface of the element to be detected, and the reflected light is strongest when the focusing light spot is positioned on the surface of the element to be detected;
the calibration module is used for calibrating the relation between the position of the dispersion lens and the analog voltage signal of the detection module;
and the controller calculates the wavelength of the focusing light spot and the corresponding surface position information of the element to be detected according to the light intensity data of different LEDs during illumination.
In order to optimize the technical scheme, the specific measures adopted further comprise:
the controller comprises a microprocessor, a light source driving module, an analog-to-digital conversion module, a stepping motor driver and a grating ruler reading module;
the light source driving module drives the LED of the lighting module to illuminate by using a plurality of paths of independent high-speed solid-state relays;
the analog-to-digital conversion module converts the analog voltage signal of the detection module into a digital signal;
the stepping motor driver is used for driving a closed-loop stepping motor, and the closed-loop stepping motor drives an electric translation table of the calibration module;
the grating ruler reading module reads a grating ruler TTL signal of the calibration module and converts the grating ruler TTL signal into displacement information;
the microprocessor provides control signals and arithmetic functions.
The lighting module comprises a plurality of high-speed LEDs with different wavelengths and ground glass, visible light wavelengths are covered, each LED can independently control the switch, and all LEDs are focused to the same position of the ground glass.
The two beam splitting ends of the Y-shaped optical fiber are respectively positioned behind the ground glass and in the detection module, and the beam combining end is incident into the dispersion lens.
The dispersive lens keeps axial chromatic aberration, eliminates monochromatic chromatic aberration, has a focal length related to wavelength, and continuously changes the position of a focused light spot when LEDs with different wavelengths are used to form a focal line.
The detection module comprises a photoelectric detector and a current amplifier;
the photoelectric detector is a photodiode, a photoelectric triode or a photoelectric cell with high response rate;
the current amplifier is used for converting the photocurrent of the photoelectric detector into an analog voltage signal.
The surface roughness of the element to be tested is not limited;
when the surface is polished, the inclination angle of the surface meets the condition that the focusing light can be collected by the dispersion lens after being reflected.
The calibration module comprises an electric translation table and a grating ruler;
the electric translation stage drives the dispersion lens to move;
the grating ruler is used for recording the moving distance of the electric translation table.
A high-speed low-cost spectrum confocal displacement measurement method comprises the following steps:
the method comprises the following steps that firstly, a dispersion lens is arranged on an electric translation table, reflected light intensity is observed, and the surface of an element to be detected is ensured to be arranged in the focal line range of the dispersion lens;
moving the dispersion lens by the electric translation stage at a micro distance of 0.2 mu m each time, reading the data of the grating ruler in real time to obtain accurate displacement information, and turning on each LED by the illumination module in turn each time the displacement information is read;
coupling an LED light source into the Y-shaped optical fiber, and enabling emergent light to enter a dispersion lens and be focused on the surface of the element to be detected;
fourthly, the detection module measures the light intensity analog voltage of reflected light on the surface of the element to be detected in real time, and the controller records the position of a grating ruler of the calibration module and the light intensity voltage value detected by the detection module corresponding to each LED;
step five, repeating the step two to the step four, and establishing a database by the microprocessor, and storing the position of the electric translation table and the detection light intensity voltage values of different LEDs at the position during illumination;
and step five, the microprocessor searches the corresponding position closest to the detection light intensity distribution in the database for interpolation, and the interpolation is used as the displacement of the surface of the element to be detected. The calculation process is as follows: assuming that the light intensity distribution of different LED illuminations is I = [ I = [ ]1,I2,…,IN]In the formula Ii(i =1,2, \8230;, N) is the reflected light intensity when the ith LED is illuminated, the vector in the database is It, and the measurement vector is Im. The distance d between two vectors is defined as
Suppose that the vector in the database closest to the measurement vector Im is IAA distance dAThe corresponding translation stage position is PAIn database with PAThe position closest to the position is PB＝PA+ Δ P and PC＝PAΔ P, the distance d from the measurement vectorBAnd dCThen the position P corresponding to the measurement vectormIs composed of
The invention has the following beneficial effects:
the invention overcomes the defects of low speed and high cost of the traditional spectrum confocal technology by using a multi-wavelength light source for illumination and a high-speed point detector, and is expected to be widely applied in the fields of high-speed displacement and three-dimensional surface shape measurement.
Drawings
Fig. 1 is a schematic structural diagram of a high-speed spectral confocal displacement measurement apparatus according to an embodiment of the present application.
Fig. 2 is a schematic composition diagram of a lighting module according to an embodiment of the present application.
FIG. 3 is a schematic diagram of a calibration module according to an embodiment of the present application.
In the figure: the device comprises a controller 1, a lighting module 2, a 3-Y type optical fiber, a 4-detection module, a 5-dispersion lens, a 6-element to be detected, a 7-calibration module, a 21-LED, 22-ground glass, a 41-photoelectric detector, a 44-current amplifier, a 71-electric translation table and a 72-grating ruler.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings.
Referring to fig. 1, the present application provides a high-speed low-cost spectral confocal displacement measurement method and apparatus, where the apparatus includes a controller 1, an illumination module 2, a Y-type optical fiber 3, a detection module 4, a dispersion lens 5, a device surface to be measured 6, and a calibration module 7.
The lighting module 2 is schematically composed as shown in fig. 2, and includes a multi-wavelength LED21 and a ground glass 22.
The structural schematic diagram of the calibration module is shown in fig. 3, and the calibration module comprises an electric translation table 71 and a high-precision grating ruler 72.
In the embodiment, the controller 1 is composed of a microprocessor, a light source driving module, an analog-to-digital conversion module, a stepping motor driver and a grating ruler reading module.
In the embodiment, the microprocessor uses an STM32 singlechip, has the functions of multi-path input and output pins and serial communication, and undertakes the control and operation functions of the device.
In the embodiment, the light source driving module uses a multi-channel independent high-speed solid-state relay, an input signal is 3.3V level and can be directly connected with an output pin of a microprocessor, an output channel is connected in series with an LED lighting circuit, and the control frequency is higher than 100kHz.
In an embodiment, the analog-to-digital conversion module converts an analog voltage signal into a digital signal, the bit number is 16 bits, the sampling frequency is higher than 100kHz, and the voltage range is-5V to 5V.
In one embodiment, the stepper motor driver is used to drive a closed-loop stepper motor, the direction and pulse input signals are directly connected to the microprocessor output pins using common anode connection, and the encoder input signal and the motor current signal are connected to the stepper motor.
In the embodiment, the grating ruler reading module is used for reading a grating ruler 90-degree phase shift TTL signal and converting the grating ruler 90-degree phase shift TTL signal into displacement information, an FPGA is used as a reading element, and the highest frequency of a pin input signal is 1MHz.
In an embodiment, the lighting module 2 can electrically control a plurality of groups of LED light source switches to cover all visible light wave bands, each LED can independently control the switch, and each LED is focused to the same position of the ground glass.
In the embodiment, one splitting end of the Y-shaped optical fiber 3 is placed in the ground glass, and then the LED light is coupled into the optical fiber, the other splitting end is connected to the detection module, and the combining end is connected to the dispersion lens 4, so that the optical fiber length is more than 1 meter for convenient use.
In an embodiment, the detection module 4 includes a photodetector 41 and a current amplifier 42.
The photodetector 41 may be a high speed photodiode, triode, or photocell, with a response rate of greater than 100kHz and a spectral response range covering the visible range.
The current amplifier 42 is used for converting the photocurrent formed by the photodetector into an analog voltage signal, ranging from-5V to 5V.
In the embodiment, the dispersive lens 5 retains axial chromatic aberration, eliminates monochromatic aberration, has a focal length related to the wavelength, and continuously changes the position of a focused light spot when LEDs with different wavelengths form a focal line. The focal length and the numerical aperture of the dispersion lens can be customized according to the surface displacement measuring range of the element to be measured.
In the embodiment, the surface roughness of the element to be measured 6 is not limited, but when the surface is polished, the inclination angle is limited to a certain extent, it is required to ensure that the focusing light can be collected by the dispersion lens after being reflected, and the larger the inclination angle is, the larger the numerical aperture of the dispersion lens is required to be.
In an embodiment, the calibration module 7 includes an electric translation stage 71 and a high-precision grating scale 72.
The range of the electric translation table 71 exceeds 50mm, the electric translation table is driven by a two-phase stepping motor, and when the electric translation table cannot be locked by self, a brake device needs to be additionally arranged on the stepping motor.
The high-precision grating scale 72 is used for accurately recording the moving distance of the electric translation stage, the resolution ratio is 0.1 mu m, and the relationship between the calibration position and the analog voltage signal of the detection module.
The grating scale 72 generates a 90 ° phase shift signal which is connected to a controller for counting by the FPGA.
A high-speed low-cost spectrum confocal displacement measurement method comprises the following steps:
the method comprises the following steps that firstly, a dispersion lens is arranged on an electric translation table, reflected light intensity is observed, and the surface of an element to be detected is ensured to be arranged in the focal line range of the dispersion lens;
moving the dispersion lens by the electric translation stage at a micro distance of 0.2 mu m each time, reading the data of the grating ruler in real time to obtain accurate displacement information, and turning on each LED by the illumination module in turn each time the displacement information is read;
coupling an LED light source into the Y-shaped optical fiber, and enabling emergent light to enter a dispersion lens and be focused on the surface of the element to be detected;
fourthly, the detection module measures the light intensity analog voltage of reflected light on the surface of the element to be detected in real time, and the controller records the position of a grating ruler of the calibration module and the light intensity voltage value detected by the detection module corresponding to each LED;
step five, repeating the step two to the step four, and establishing a database by the microprocessor, and storing the position of the electric translation table and the detection light intensity voltage values of different LEDs at the position during illumination;
and step five, the microprocessor searches the corresponding position closest to the detected light intensity distribution in the database for interpolation, and the interpolation is used as the displacement of the surface of the element to be detected. The calculation process is as follows: suppose that the light intensity distribution of different LED illuminations is I = [ I ]1,I2,…,IN]In the formula Ii(i =1,2, \8230;, N) is the reflected light intensity when the ith LED is illuminated, the vector in the database is It, and the measurement vector is Im. The distance d between two vectors is defined as
Suppose that the vector in the database closest to the measurement vector Im is IAA distance dAThe corresponding translation stage position is PAIn database with PAThe position closest to the position is PB＝PA+ Δ P and PC＝PAΔ P, the distance from the measurement vector being dBAnd dCThen the position P corresponding to the measurement vectormIs composed of
The above are only preferred embodiments of the present invention, and the scope of the present invention is not limited to the above examples, and all technical solutions that fall under the spirit of the present invention belong to the scope of the present invention. It should be noted that modifications and adaptations to those skilled in the art without departing from the principles of the present invention may be apparent to those skilled in the relevant art and are intended to be within the scope of the present invention.
Claims (9)
1. A high-speed, low-cost spectral confocal displacement measurement device, comprising: the device comprises a controller, an illumination module, a Y-shaped optical fiber, a detection module, a dispersion lens, an element to be detected and a calibration module;
the lighting module electrically controls a plurality of groups of LEDs and provides light sources covering all visible light wave bands;
the light source is coupled into the Y-shaped optical fiber, emergent light enters the dispersion lens and is focused on the surface of an element to be detected, the positions of focusing light spots are different when the wavelengths are different, and reflected light on the surface of the element to be detected returns to the Y-shaped optical fiber;
the detection module measures the light intensity of reflected light on the surface of the element to be detected;
the calibration module is used for calibrating the relationship between the position of the dispersion lens and the analog voltage signal of the detection module and establishing a database of the relationship between the light intensity vector and the position of the dispersion lens when different LEDs are illuminated;
the controller measures the reflected light intensity vectors when different LEDs illuminate the element to be measured, searches the light intensity vector closest to the LED in a database established by the calibration module, interpolates the corresponding position of the dispersive lens, and calculates to obtain the surface position information of the element to be measured.
2. The high-speed low-cost spectral confocal displacement measurement device according to claim 1, wherein the controller comprises a microprocessor, a light source driving module, an analog-to-digital conversion module, a stepping motor driver and a grating ruler reading module;
the light source driving module drives the LED of the lighting module to illuminate by using a plurality of paths of independent high-speed solid-state relays;
the analog-to-digital conversion module converts the analog voltage signal of the detection module into a digital signal;
the stepping motor driver is used for driving a closed-loop stepping motor, and the closed-loop stepping motor drives an electric translation table of the calibration module;
the grating ruler reading module reads a grating ruler TTL signal of the calibration module and converts the grating ruler TTL signal into displacement information;
the microprocessor provides various control signals and arithmetic functions.
3. The high-speed low-cost spectral confocal displacement measurement device according to claim 1, wherein the illumination module comprises a plurality of high-speed LEDs with different wavelengths and ground glass, the LEDs cover visible light wavelengths, each LED can independently control a switch, and each LED is focused to the same position of the ground glass.
4. The high-speed low-cost spectral confocal displacement measurement device according to claim 3, wherein the two beam splitting ends of the Y-shaped optical fiber are respectively located behind the ground glass and in the detection module, and the beam combining end is incident into the dispersion lens.
5. A high-speed low-cost spectral confocal displacement measurement device according to claim 1, wherein the dispersive lens retains axial chromatic aberration, eliminates monochromatic chromatic aberration, has a wavelength-dependent focal length, and the focused spot position continuously changes when LEDs of different wavelengths form a focal line.
6. The confocal displacement measurement device of claim 1, wherein the detection module comprises a photodetector, a current amplifier;
the photoelectric detector is a photodiode, a photoelectric triode or a photocell with high response rate;
the current amplifier is used for converting the photocurrent of the photoelectric detector into an analog voltage signal.
7. The confocal displacement measurement device of claim 1, wherein the surface roughness of the device under test is not limited by the surface roughness;
when the surface is polished, the inclination angle of the surface meets the condition that the focusing light can be collected by the dispersion lens after being reflected.
8. The confocal displacement measurement device of claim 1, wherein the calibration module comprises an electric translation stage and a grating ruler;
the electric translation stage drives the dispersion lens to move;
the grating ruler is used for recording the moving distance of the electric translation table.
9. A high-speed low-cost spectral confocal displacement measurement method of a high-speed low-cost spectral confocal displacement measurement device according to any one of claims 1-8, comprising:
the method comprises the following steps that firstly, a dispersion lens is arranged on an electric translation table, reflected light intensity is observed, and the surface of an element to be detected is ensured to be arranged in the focal line range of the dispersion lens;
step two, moving the dispersion lens by the electric translation table at a micro distance, moving by 0.2 mu m each time, reading the data of the grating ruler in real time to obtain accurate displacement information, and turning on each LED by the illumination module in turn each time when moving once;
coupling an LED light source into the Y-shaped optical fiber, and enabling emergent light to enter a dispersion lens to be focused on the surface of the element to be detected;
measuring the reflected light intensity analog voltage on the surface of the element to be measured in real time by the detection module, and recording the position of a grating ruler of the calibration module and the light intensity voltage value detected by the detection module corresponding to each LED by the controller;
step five, repeating the step two to the step four, and the microprocessor establishes a database and stores the position of the electric translation table and the detection light intensity voltage values of different LEDs at the position during illumination;
and step five, the microprocessor searches the corresponding position closest to the detected light intensity distribution in the database for interpolation, and the interpolation is used as the displacement of the surface of the element to be detected.
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| CN108489388A (en) * | 2018-04-03 | 2018-09-04 | 电子科技大学 | A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology |
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