CN113175884B - Calibration device and calibration method of spectrum confocal measurement system - Google Patents
Calibration device and calibration method of spectrum confocal measurement system Download PDFInfo
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- 238000010606 normalization Methods 0.000 claims abstract description 6
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
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Abstract
The invention discloses a calibration device and a calibration method of a spectrum confocal measurement system, wherein the device comprises: the device comprises a light source component, a spectral signal dispersion component, a spectral signal receiving component, a precise linear displacement table, an object to be measured, a Y-shaped optical fiber coupler and a controller; moving the precise linear displacement table, and recording displacement data of the precise linear displacement table in each moving process and original spectral data of the surface of the object to be measured, which is acquired by the linear array CCD camera; correcting an original spectral curve through a normalization coefficient of a light source spectral signal, performing peak searching processing on the corrected spectral curve to obtain peak wavelength data of the corrected spectral curve, and calibrating the spectral confocal measurement system through fitting a calibration curve of peak wavelength and displacement through the peak wavelength displacement data. The invention can solve the problems of poor system precision and inaccurate measurement caused by the linearity of the dispersion component, the spectral resolution in the spectral signal receiving component and the like, thereby realizing the high-precision measurement of the spectral confocal measurement system.
Description
Technical Field
The invention relates to the technical field of non-contact optical precision measurement, in particular to a calibration device and a calibration method of a spectral confocal measurement system.
Background
The spectrum confocal measurement system is a non-contact high-resolution optical precision measurement system and has the characteristics of high measurement precision, high measurement speed, large measurement inclination angle, no influence of an environmental light source, no temperature and energy generated in the measurement process and the like. The spectrum confocal measuring system is widely applied to various high-precision measuring occasions with different requirements, from the measurement and analysis of the surface microstructure, the shape and the texture roughness of an object to the high-precision equipment in the fields of online quality detection, process control and reverse engineering, laboratory research and the like in an industrial environment.
The measurement accuracy of the spectrum confocal measurement system is an important performance index of the system, however, the system accuracy is deteriorated due to the linearity of a dispersion component in a spectrum signal dispersion component, the spectrum resolution in a spectrum signal receiving component and other factors; each component of the spectral confocal measurement system is usually individually calibrated, but errors are inevitably introduced during the system setup, so that each component cannot achieve the designed performance.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, provides a calibration device and a calibration method of a spectrum confocal measurement system, and aims to solve the problems of poor system precision and inaccurate measurement caused by factors such as linearity of a dispersion component, spectral resolution in a spectrum signal receiving component and the like in the prior art, so that high-precision measurement of the spectrum confocal measurement system is realized.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention relates to a calibration device of a spectrum confocal measurement system, which comprises: the device comprises a light source assembly, a spectrum signal dispersion assembly and a spectrum signal receiving assembly; it is characterized in that the calibration device further comprises: the device comprises a precision linear displacement table, an object to be detected, a Y-shaped optical fiber coupler and a controller;
the light beam incident end and the light beam receiving end of the Y-shaped optical fiber coupler are respectively connected with the light source assembly and the spectral signal receiving assembly, and the light beam reflection end of the Y-shaped optical fiber coupler is connected with the spectral signal dispersion assembly;
the object to be measured is placed on the precise linear displacement table, and the surface of the object to be measured faces the spectral signal dispersion assembly and is perpendicular to the optical axis of the dispersive light beam of the spectral signal dispersion assembly;
the controller is electrically connected with the light source assembly and the spectral signal receiving assembly respectively;
the light source assembly includes: the LED light source comprises a white light LED light source, an LED collimating lens and an optical fiber focusing lens;
the LED collimating lens collimates the light beam emitted by the white light LED light source and then emits the light beam into the optical fiber focusing lens, and the light beam enters the light beam incident end of the Y-shaped optical fiber coupler after being focused by the optical fiber focusing lens; the light beam entering the light beam incidence end is transmitted to the light beam reflection end of the Y-shaped optical fiber coupler through the device coupling part of the Y-shaped optical fiber coupler;
the spectral signal dispersion assembly comprises: a negative lens, a positive lens, a collimating lens group and a diffraction lens;
the light beam at the light beam reflection end of the Y-shaped optical fiber coupler is dispersed to the surface of the object to be detected after sequentially passing through the negative lens, the positive lens, the collimating lens group and the diffraction lens, and the dispersed light beam on the surface of the object to be detected is transmitted to the device coupling part of the Y-shaped optical fiber coupler through the light beam reflection end of the Y-shaped optical fiber coupler and then transmitted to the light beam receiving end of the Y-shaped optical fiber coupler after passing through the dispersion component again in the opposite direction;
the spectral signal receiving assembly includes: the device comprises a collimating lens group, a diffraction grating, a focusing lens group and a linear array CCD camera;
and light beams at a light beam receiving end of the Y-shaped optical fiber coupler sequentially pass through the collimating lens group, the diffraction grating and the focusing lens group and then enter the linear array CCD camera, the linear array CCD camera obtains spectral signals and then transmits the spectral signals to the controller, and the controller transmits the obtained spectral signals to the upper computer.
The calibration method of the spectral confocal measurement system is characterized by adopting the calibration device as claimed in claim 1 and comprising the following steps:
s1, moving the precision linear displacement table to make the object not in the dispersion range of the spectrum signal dispersion component, and acquiring a dark background signal lambda by using the linear array CCD camerad；
S2, repeating the step S1, collecting a plurality of groups of dark background signals and carrying out average processing to obtain the mean value of the dark background signals
S3, the controller lights the white light LED light source, and the linear array CCD camera is used for acquiring a bright background signal lambdah；
S4, repeating the step S3, collecting a plurality of groups of bright background signals and carrying out average processing to obtain the mean value of the bright background signals
S5 average value of light background signal
Subtracting the mean of the dark background signal
Obtaining the spectral signal of the light source and recording the spectral signal as
S6, calculating the normalization coefficient x of the light source spectrum signal by using the formula (1) according to the spectrum signal of the light source*：
In the formula (1), max (. cndot.) represents a function of taking the maximum value;
s7, moving the precision linear displacement table to enable the object to be measured to be at the initial position of the dispersion range of the spectrum signal dispersion assembly, moving the precision linear displacement table for m times at equal intervals D, and recording displacement data D ═ D of the precision linear displacement table in each equal interval moving processj| j ═ 0,1,2, …, m-1} and λ ═ λ { λ of original spectrum curve of surface of object to be measured obtained by linear array CCD cameraj0,1,2, …, m-1 }; wherein D isjDisplacement data representing the j-th time; lambda [ alpha ]jRepresenting the original spectrum curve acquired at the j time;
s8, normalizing coefficient x according to light source spectrum signal*Correcting the original spectral curve lambda of the surface of the object to be measured to obtain a corrected spectral curve
Wherein, λ'jShowing the corrected spectral curve of the jth strip;
s9, spectrum curve lambda 'corrected for j'jPeak searching is carried out to obtain the jth corrected spectral curve lambda'jPeak wavelength data of
And corresponding j-th displacement data DjForm the jth group of wavelength shift data
Thereby obtaining m groups of wavelength displacement data
S10, establishing a calibration curve D of the peak wavelength and the displacement as shown in the formula (2):
in the formula (2), c0，c1，c2，…，cnThe polynomial coefficient for fitting the curve is denoted C,
indicating wavelength
The nth order polynomial of (1);
s11, establishing a fitting error function delta shown in the formula (3):
in the formula (3), DjThe displacement data of the j-th time is shown,
represents the jth peak wavelength data;
s12, determining coefficient R when fitting2And when the fitting error function delta is larger than the set threshold delta and is smaller than the set threshold epsilon, the fitting polynomial scaling curve D meets the requirement of the system measurement accuracy.
Compared with the prior art, the invention has the beneficial effects that:
the calibration device and the calibration method of the spectral confocal measurement system can effectively improve the measurement precision of the spectral confocal measurement system; the white light LED light source obtains light beams with concentrated energy through the LED collimating lens and the optical fiber focusing lens, the light beams enter the spectral signal dispersion assembly through the Y-shaped optical fiber coupler to obtain monochromatic light with different wavelengths, the monochromatic light with different wavelengths is dispersed to the surface of an object to be measured and is transmitted to the spectral signal receiving assembly through the Y-shaped optical fiber coupler again through the dispersion assembly in the opposite direction, wavelength data of the spectral signal is found out through a peak searching algorithm, displacement data is obtained through the moving distance of the precise linear displacement table, and therefore a relational expression of wavelength and displacement is established, and further measurement of displacement of the spectral confocal measurement system is achieved.
Drawings
FIG. 1 is a schematic view of a calibration device of the spectral confocal measurement system of the present invention;
FIG. 2 is a schematic diagram of a spectral signal receiving assembly according to the present invention;
FIG. 3 is a schematic view of a light source assembly according to the present invention;
FIG. 4 is a schematic diagram of a spectral signal receiving assembly according to the present invention;
FIG. 5 is a schematic view of a Y-fiber coupler of the present invention;
FIG. 6 is a flow chart of a calibration method of the present invention;
reference numbers in the figures: 10. the LED light source comprises a light source component 101, a white LED light source 102, an LED collimating lens 103 and a fiber focusing lens; 20. the system comprises a spectral signal dispersion component, a spectrum signal dispersion component 201, a negative lens 202, a positive lens 203, a collimating lens group 204 and a diffraction lens; 30. the device comprises a spectrum signal receiving component 301, a collimating lens group 302, a diffraction grating 303, a focusing lens group 304 and a linear array CCD camera; 40. a precision linear displacement stage; 50. an object to be tested; 60. a Y-shaped optical fiber coupler 601, a light beam incidence end 603, a light beam receiving end 602, a light beam reflection end 604 and a device coupling part; 70. a controller; 80. the light beam is dispersed.
Detailed Description
In this embodiment, as shown in fig. 1, a calibration device and a calibration method of a spectral confocal measurement system are provided, where the calibration device is first set up, and the calibration device includes a light source assembly 10, a spectral signal dispersion assembly 20, a spectral signal receiving assembly 30, a precise linear displacement stage 40, an object to be measured 50, a Y-shaped optical fiber coupler 60, and a controller 70;
as shown in fig. 1, a light beam incident end 601 and a light beam receiving end 603 of the Y-type fiber coupler 60 are respectively connected to the light source module 10 and the spectral signal receiving module 30, and a light beam reflecting end 602 of the Y-type fiber coupler 60 is connected to the spectral signal dispersing module 20;
the object to be measured is placed 50 on the precise linear displacement table 40, and the surface 50 of the object to be measured faces the spectral signal dispersion assembly 20 and is vertical to the optical axis of the dispersive light beam of the spectral signal dispersion assembly 20;
the controller 70 is electrically connected to the light source assembly 10 and the spectral signal receiving assembly 30, respectively.
As shown in fig. 2, the light source assembly 10 includes: a white light LED light source 101, an LED collimating lens 102 and a fiber focusing lens 103;
as shown in fig. 5, the Y-shaped optical fiber coupler 60 includes a beam incident end 601, a beam receiving end 603, a beam reflecting end 602, and a device coupling portion 604;
as shown in fig. 1, a light beam of the white light LED light source 101 sequentially passes through the LED collimating lens 102 and the fiber focusing mirror 103, so that the energy of the white light LED light source is more concentrated and enters the light beam incident end 601 of the Y-type fiber coupler 60, and the light beam entering the light beam incident end 601 is transmitted to the light beam reflecting end 602 of the Y-type fiber coupler 60 through the device coupling portion 604 of the Y-type fiber coupler 60;
as shown in fig. 3, the spectral signal dispersion assembly 20 includes: a negative lens 201, a positive lens 202, a collimating lens group 203, a diffractive lens 204;
the light beam reaching the light beam reflection end 602 of the Y-type optical fiber coupler 60 sequentially passes through the negative lens 201, the positive lens 202, the collimating lens group 203 and the diffraction lens 204 and then is dispersed to the surface of the object to be measured, and meanwhile, the dispersed light beam 80 on the surface of the object to be measured 50 passes through the dispersion assembly 20 again in the opposite direction, then is transmitted to the device coupling part 604 of the Y-type optical fiber coupler 60 through the light beam reflection end 602 of the Y-type optical fiber coupler 60, and then is transmitted to the light beam receiving end 603 of the Y-type optical fiber coupler 60;
as shown in fig. 4, the spectral signal receiving module 30 includes: a collimating lens group 301, a diffraction grating 302, a focusing lens group 303 and a line CCD camera 304;
the light beam reaching the light beam receiving end 603 of the Y-type fiber coupler 60 sequentially passes through the collimating lens group 301, the diffraction grating 302 and the focusing lens group 303 and then enters the linear array CCD camera 304, a spectral signal is obtained by the linear array CCD camera 604 and then transmitted to the controller 70, and the controller 70 transmits the obtained spectral signal to the upper computer.
As shown in fig. 6, a calibration method of a spectral confocal measurement system is performed by using the above calibration apparatus and according to the following steps:
s1, moving the precision linear displacement table 40 to make the object 50 not in the dispersion range of the spectrum signal dispersion component 20, and acquiring the spectrum signal by using the linear array CCD camera 604 and marking as the dark background signal lambdad；
S2, repeating the step S1, collecting a plurality of groups of dark background signals and carrying out average processing to obtain the mean value of the dark background signals
S3, the controller 70 lights the white LED light source 101, and the linear CCD camera 604 is used to obtain the spectrum signal, which is recorded as the bright background signal lambdah；
S4, repeating the step S3, collecting a plurality of groups of bright background signals and carrying out average processing to obtain the mean value of the bright background signals
S5 average value of light background signal
Subtracting the mean of the dark background signal
Obtaining the spectral signal of the light source and recording the spectral signal as
S6, calculating the normalization coefficient x of the light source spectrum signal by using the formula (1) according to the spectrum signal of the light source*：
In the formula (1), max (. cndot.) represents a function of taking the maximum value;
s7, moving the precision linear stage 40 to make the object 50 at the initial position of the dispersion range of the spectrum signal dispersion module 20, moving the precision linear stage 40 m times at the equal distance D, and recording the displacement data D ═ D of the precision linear stage 40 during each equal distance movementj| j ═ 0,1,2, …, m-1} and the original spectral curve λ ═ { λ of the surface of the object 50 to be measured acquired by the line CCD camera 604j0,1,2, …, m-1 }; wherein D isjDisplacement data representing the j-th time; lambda [ alpha ]jRepresenting the original spectrum curve acquired at the j time;
s8, normalizing coefficient x according to light source spectrum signal*Correcting the original spectral curve lambda of the surface of the object 50 to be measured to obtain a corrected spectral curve
Wherein, λ'jShowing the corrected spectral curve of the jth strip; the corrected spectral curve is stretched to different degrees from the original spectral curve, when the spectral signal is weak, the normalization coefficient is small, and when the spectral signal is strong, the normalization coefficient is large, so that the subsequent peak searching processing is facilitated;
s9, spectrum curve lambda 'corrected for j'jPeak searching is carried out to obtain the jth corrected spectral curve lambda'jPeak wavelength data of
And corresponding j-th displacement data DjForm the jth group of wavelength shift data
Thereby obtaining m groups of wavelength displacement data
S10, establishing a calibration curve D of the peak wavelength and the displacement as shown in the formula (2):
in the formula (2), c0，c1，c2，…，cnThe polynomial coefficient for fitting the curve is denoted C,
indicating wavelength
The nth order polynomial of (1);
s11, establishing a fitting error function delta shown in the formula (3):
in the formula (3), DjThe displacement data of the j-th time is shown,
represents the jth peak wavelength data
S12, determining coefficient R when fitting2And when the fitting error function delta is larger than the set threshold delta and is smaller than the set threshold epsilon, the fitted polynomial scaling curve D meets the requirement of the system measurement accuracy.
Claims (1)
1. A calibration method of a spectrum confocal measurement system is based on a calibration device of the spectrum confocal measurement system, and the device comprises: the device comprises a light source assembly (10), a spectral signal dispersion assembly (20) and a spectral signal receiving assembly (30); the calibration device further includes: the device comprises a precision linear displacement table (40), an object to be measured (50), a Y-shaped optical fiber coupler (60) and a controller (70);
a light beam incident end (601) and a light beam receiving end (603) of the Y-shaped optical fiber coupler (60) are respectively connected with the light source assembly (10) and the spectral signal receiving assembly (30), and a light beam reflection end (602) of the Y-shaped optical fiber coupler (60) is connected with the spectral signal dispersion assembly (20);
the object to be measured (50) is placed on the precise linear displacement table (40), and the surface (50) of the object to be measured faces the spectral signal dispersion assembly (20) and is perpendicular to the optical axis of the dispersed light beam (80) of the spectral signal dispersion assembly (20);
the controller (70) is electrically connected with the light source assembly (10) and the spectral signal receiving assembly (30) respectively;
the light source assembly (10) comprises: the LED light source comprises a white light LED light source (101), an LED collimating lens (102) and a fiber focusing lens (103);
the LED collimating lens (102) collimates the light beam emitted by the white light LED light source (101), then emits the light beam into the optical fiber focusing lens (103), and enters a light beam incident end (601) of the Y-shaped optical fiber coupler (60) after being focused by the optical fiber focusing lens (103); the light beam entering the light beam incidence end (601) is transmitted to the light beam reflection end (602) of the Y-shaped optical fiber coupler (60) through the device coupling part (604) of the Y-shaped optical fiber coupler (60);
the spectral signal dispersion assembly (20) comprises: a negative lens (201), a positive lens (202), a collimating lens group (203), and a diffraction lens (204);
the light beam at the light beam reflection end (602) of the Y-shaped optical fiber coupler (60) sequentially passes through the negative lens (201), the positive lens (202), the collimating mirror group (203) and the diffraction lens (204) and then is dispersed to the surface of the object to be measured (50), and the dispersed light beam (80) at the surface of the object to be measured (50) passes through the dispersion assembly (20) again in the opposite direction, and then is transmitted to the device coupling part (604) of the Y-shaped optical fiber coupler (60) through the light beam reflection end (602) of the Y-shaped optical fiber coupler (60) and then is transmitted to the light beam receiving end (603) of the Y-shaped optical fiber coupler (60);
the spectral signal receiving assembly (30) comprises: the device comprises a collimating lens group (301), a diffraction grating (302), a focusing lens group (303) and a linear array CCD camera (304);
a light beam at a light beam receiving end (603) of the Y-shaped optical fiber coupler (60) sequentially passes through the collimating lens group (301), the diffraction grating (302) and the focusing lens group (303) and then enters the linear array CCD camera (304), a spectrum signal is obtained by the linear array CCD camera (604) and then transmitted to the controller (70), and the controller (70) transmits the obtained spectrum signal to an upper computer; the method is characterized by comprising the following steps:
s1, moving the precision linear displacement table (40) to enable the object to be measured (50) not to be in the dispersion range of the spectrum signal dispersion assembly (20), and acquiring a dark background signal lambda by using the linear array CCD camera (604)d；
S2, repeating the step S1, collecting a plurality of groups of dark background signals and carrying out average processing to obtain the mean value of the dark background signals
S3, lighting the white light through the controller (70)An LED light source (101) for acquiring a bright background signal λ using the line CCD camera (604)h；
S4, repeating the step S3, collecting a plurality of groups of bright background signals and carrying out average processing to obtain the mean value of the bright background signals
S5 average value of light background signal
Subtracting the mean of the dark background signal
Obtaining the spectral signal of the light source and recording the spectral signal as
S6, calculating the normalization coefficient x of the light source spectrum signal by using the formula (1) according to the spectrum signal of the light source*：
In the formula (1), max (. cndot.) represents a function of taking the maximum value;
s7, moving the precision linear displacement table (40) to enable the object to be measured (50) to be at the initial position of the dispersion range of the spectrum signal dispersion assembly (20), moving the precision linear displacement table (40) m times at equal intervals D, and recording displacement data D ═ D of the precision linear displacement table (40) in each equal interval moving processj| j is 0,1,2, …, m-1} and the line CCD camera (604) obtains the original spectrum curve λ of the surface of the object (50) to be measured { λ ═ λ { (λ })j0,1,2, …, m-1 }; wherein D isjDisplacement data representing the j-th time; lambda [ alpha ]jRepresenting the original spectrum curve acquired at the j time;
s8, normalizing coefficient x according to light source spectrum signal*For the object to be measured(50) Correcting the original spectral curve lambda of the surface to obtain a corrected spectral curve
Wherein, λ'jShowing the corrected spectral curve of the jth strip;
s9, spectrum curve lambda 'corrected for j'jPeak searching is carried out to obtain the jth corrected spectral curve lambda'jPeak wavelength data of
And corresponding j-th displacement data DjForm the jth group of wavelength shift data
Thereby obtaining m groups of wavelength displacement data
S10, establishing a calibration curve D of the peak wavelength and the displacement as shown in the formula (2):
in the formula (2), c0，c1，c2，…，cnThe polynomial coefficient for fitting the curve is denoted C,
indicating wavelength
The nth order polynomial of (1);
s11, establishing a fitting error function delta shown in the formula (3):
in the formula (3), DjThe displacement data of the j-th time is shown,
represents the jth peak wavelength data;
s12, determining coefficient R when fitting2And when the fitting error function delta is larger than the set threshold delta and is smaller than the set threshold epsilon, the fitting polynomial scaling curve D meets the requirement of the system measurement accuracy.
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