CN1719192A - Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method - Google Patents
Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method Download PDFInfo
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Abstract
The present invention relates to high precision 2-D photoelectric autocollimating equipment based on optical path multiplication compensation method. Said equipment successively includes laser light source, calibrated plate, main spectroscope, main CCD image sensor, collimating objective and measurement reflector. Besides, said invention also provides its measurement method and concrete steps.
Description
Technical field
The invention belongs to exact instrument manufacturing and precision measurement field of measuring techniques, particularly a kind of high-precision two-dimensional photoelectric auto-collimation device and measuring method of the angle drift value based on optic path multiplexing compensation method real-Time Compensation light beam.
Background technology
Along with the updating and improve of measuring technique, the development of modernized high-acruracy survey technology and azimuth aiming tracker has proposed more and more higher requirement to low-angle measuring accuracy.Photoelectric auto-collimator is in the low-angle precision measurement, the high precision aiming has irreplaceable effect with the aspect, location, can be used as the ingredient of optical metrological instruments such as angular instrument, optical comparator, can be used for separately also that surveying instrument is used for optical measurement, aero-space instrument is debug and aspects such as military spacecraft attitude measurement.
In the high precision small angle measurement, be better than 0.5 for uncertainty of measurement " photoelectric auto-collimator, the angle drift value of the Lights section light beam is the main source of photoelectric auto-collimator measuring error.When there is beam drift in the light beam that sends when light source, cause that as helium-neon laser resonator cavity internal reflector modification the angle drift value of light beam is: 10
-6～10
-7Rad, that is: 0.02 "～0.2 " (1. ten thousand Deans. laser datum high-acruracy survey technology. the .1999 of National Defense Industry Press June; 2. square Zhong Yan, Yin Chunyong, Liang Jinwen. the research of high-precision laser collimation technique (one). aviation instrumentation technology .1997,17 (1): 3-6), if adopt the Facula Center Location method, then the spot center of receiver reception is drifted about with beam drift; If adopt profile centralized positioning method, then owing to beam drift, the center of energy of the hot spot that receiver receives and the geometric center of profile do not overlap the skew that causes the profile center, directly produce the deviations at profile center.If this angle drift value is not revised or is compensated, will directly feed back to the angle measurement error that low-angle measurement result causes, cause the instrument data poor repeatability, stability is bad.If will further improve uncertainty of measurement, only rely on the collimation precision that improves light beam self, all be to be difficult to realize on still being technological and manufacturing level from prior art.Adopt error separating and compensation technique, particularly dynamic compensation technology, be the angle measurement error of eliminating or this angle drift value of compensation correction causes, realize that high-precision small angle measurement provides a kind of otherwise effective technique approach.
At present, widely used photoelectric auto-collimator in the engineering, the 702 type photoelectric auto-collimators of producing as Beijing gauging instrument factory of State Metrological Bureau, measurement resolution 0.1 "; uncertainty of measurement is: be 2 in 10 ' scope " is 0.5 in any 4 '～6 ' scope in center, visual field " (Wu Jinxie. the geometric sense Technology of Precision Measurement. the .1989 of publishing house of Harbin Institute of Technology September).What this measurement scheme was measured is the one dimension angular metric, if measure another dimension angular metric, must readjust instrument on this direction, causes the loaded down with trivial details and data poor repeatability of measuring process, can introduce the hysterisis error of artificial measuring error and machinery simultaneously; The angle drift value of light beam still exists simultaneously, and uncertainty of measurement is difficult to improve.
For overcoming photoelectric auto-collimator when measuring the angular metric of both direction, secondary is adjusted the shortcoming of the poor repeatability that instrument brought, improve the measurement resolution of photoelectric auto-collimator, can satisfy simultaneously the needs that data in real time shows and stores, many producers and scientific research institutions develop the photoelectric auto-collimator that adopts the high precision ccd image sensor to measure two dimension angular.For example:
1. the photoelectric auto-collimator of the ELCOMAT vario model that German ELCOMAT company produces.Adopt high-precision ccd image sensor, accurately measure the small angle variation amount of measuring catoptron by the displacement that the spot center that receives on the measurement ccd image sensor moves, the technical indicator of the twin shaft autocollimator of product E LCOMAT vario 500T/D65 is: be 24 in X-axis ', Y-axis is 18 ' measurement range in uncertainty of measurement be ± 0.4 " (the German M LLER-WEDEL ELCOMAT vario of company twin shaft autocollimator Chinese operation manual .2004);
2. patent 99242552.2 " the explicit autocollimator of two-dimentional dynamic number ";
3. patent 99254139.5 " photoelectric auto-collimator ";
4. patent 200410032713.2 " autocollimator ".
Laser beam is because advantages such as its good single direction, high brightness and high stabilities, often be used as measuring basis and be widely used in ultraprecise process equipment and the measuring equipment, many scientific research institutions develop the photoelectric auto-collimator that adopts LASER Light Source and high precision ccd image sensor to measure two dimension angular (1. Wu is beautiful. Laser Autocollimator. 08 phase of ray machine electrical information .1994: 11-13; Jiang this and, Chen Wenyi, Hu Wenfei, Hu Qingrong. the small angle measurement system that detects with laser alignment and CCD. laser and infrared .1998,28 (4): 233-234+243; 3. Lin Yu pond, Zhang Ping, Zhao Meirong, Hong Xin. the open-air semiconductor laser autocollimator that uses. the accurate manufacturing technology .2001 of aviation, 37 (3): 35-37; 4. open Yao Yu, Zhang Minghui, Qiao Yanfeng. a kind of high precision CCD laser auto-collimation Research on Measurement System. photoelectron laser .2003,14 (2): 168-170; 5. Ma Fulu, Zhang Zhi's profit, Zhou Zhaofa. based on single line array CCD linearity collimator of M type graduation silk. optical technology .2002,28 (3): 224-225+227).
Owing to adopted LASER Light Source and high precision ccd image sensor, realized the automatic measurement of two dimension angular when improving the collimation, measuring distance of light beam and measurement resolution, data in real time shows and storage.
But in actual applications, especially all there is following weak point in above-mentioned as can be known measurement scheme on light path and physical construction and the measuring process: owing to do not adopt the means of any error compensation or correction, the angle drift value of light beam is not eliminated in measuring process, be blended in the angle measurement error that causes in the measurement result at last, directly cause the measurement stability of photoelectric auto-collimator poor, uncertainty of measurement is difficult to further raising, limited the range of application of photoelectric auto-collimator greatly, this is the weak point of this measurement scheme itself, also is unsolved major issue in the practical application of current photoelectric auto-collimator.
Summary of the invention
The objective of the invention is to overcome the deficiency that exists in the above-mentioned existing photoelectric auto-collimator measurement scheme, a kind of 2 D photoelectric autocollimation and measuring method based on the optic path multiplexing compensation method is provided, obtain and the identical reference beam of measuring beam characteristic by preposition spectroscope, the optic path multiplexing device of being made up of two plane mirrors of opposing parallel placement repeatedly reflects reference beam, prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, monitor the angle measurement error that the angle drift value of the angle drift value of light beam and dynamic compensation light beam causes in real time by preposition ccd image sensor, can significantly improve the measurement stability and the measuring accuracy of 2 D photoelectric autocollimator.
The technical solution that the present invention adopts is: a kind of 2 D photoelectric autocollimation based on the optic path multiplexing compensation method, comprise LASER Light Source, graticule, main spectroscope, main ccd image sensor, collimator objective, the measurement catoptron placed successively, between LASER Light Source and graticule, place a preposition spectroscope, obtain and the identical reference beam of measuring beam characteristic, one optic path multiplexing device repeatedly reflects reference beam, and a preposition ccd image sensor is monitored the angle drift value of light beam; Two plane mirrors that said optic path multiplexing device is placed by opposing parallel are formed.
The optic path multiplexing device also comprises an additional plane catoptron that is positioned on the reference beam path.
The optic path multiplexing device is made up of two right-angle prisms staggered relatively.
The optic path multiplexing device is made up of two right-angle prisms staggered relatively and an additional plane catoptron that is positioned on the reference beam path.。
The optic path multiplexing device is made up of the plane mirror of a plurality of paired parallel placements.
The optic path multiplexing device is made up of plane mirror and an additional plane catoptron that is positioned on the reference beam path of a plurality of paired parallel placements.
The present invention also provides the measuring method based on the 2 D photoelectric autocollimation of optic path multiplexing compensation method, and this measuring method may further comprise the steps:
1. at first adjust and fixing light path multiplying assembly, calibrate the 2 D photoelectric autocollimation then;
2. the laser beam that LASER Light Source is sent is divided into two bundles behind preposition spectroscope: transmitted light beam becomes measuring beam, and folded light beam becomes reference beam;
3. after reference beam goes into to inject the optic path multiplexing device,, become reference signal through repeatedly being received by preposition ccd image sensor after the reflection;
4. after measuring beam obtains the variable quantity of the Bidimensional small angle of measuring catoptron, receive, become measuring-signal by main ccd image sensor;
5. the angle drift value of light beam is monitored and isolated to reference signal, carries out real-time differential processing and get final product the angle measurement error that this angle drift value of dynamic compensation causes, accurately measures the variable quantity of the Bidimensional small angle of measuring catoptron:
Here: θ is the variable quantity of the Bidimensional small angle of measurement catoptron, d
1For measuring-signal in main ccd image sensing
The variable quantity of the spot center position that forms on the device, f are the equivalent focal length of collimator objective, d
0For reference signal exists
The variable quantity of the spot center position that forms on the preposition ccd image sensor, L are that laser beam is from LASER Light Source
Total equivalent light path to preposition ccd image sensor process.
The present invention has following characteristics and good result:
1. adopt novel optic path multiplexing device to improve optical system, obtain and the identical reference beam of measuring beam characteristic by preposition spectroscope, after process optic path multiplexing device repeatedly reflects, prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, be easy to the reception and the monitoring of follow-up ccd image sensor, this is one of innovative point that is different from existing photoelectric auto-collimation measuring technique;
2. in design, the angle drift value of light beam causes that reference signal and measuring-signal change simultaneously, utilize two ccd image sensors to obtain the angle drift value of light beam and the two dimension angular variable quantity of measurement catoptron respectively, can separate the angle measurement error that the angle drift value with the dynamic compensation light beam causes in real time, this be different from existing photoelectric auto-collimation measuring technique innovative point two;
3. adopt the optic path multiplexing optical texture, realized the miniaturization of instrument volume when amplifying the displacement of the lines amount corresponding with the beam angle drift, be easy to be designed to mancarried device, this is to be different from three of the innovative point that has the photoelectric auto-collimation measuring technique now;
4. present design has adopted foolproof structure, in light path, add the optic path multiplexing device, the angle measurement error that angle drift value that can the dynamic compensation light beam causes, improved the measurement stability of 2 D photoelectric autocollimator, the needs that high precision two-dimensional narrow angle is measured have been satisfied, measuring process and data processing are all obviously simplified, and be practical.
Description of drawings
Fig. 1 is the structural representation of apparatus of the present invention;
Fig. 2 is the structural representation of the optic path multiplexing device formed of two plane mirrors being placed by opposing parallel in apparatus of the present invention and additional plane catoptron that is positioned on the reference beam path;
Fig. 3 a is the structural representation of the optic path multiplexing device be made up of two right-angle prisms staggered relatively in apparatus of the present invention;
Fig. 3 b is the structural representation of the optic path multiplexing device be made up of two right-angle prisms staggered relatively and additional plane catoptron that is positioned on the reference beam path in apparatus of the present invention;
Fig. 4 a is the structural representation of the optic path multiplexing device be made up of the plane mirror of a plurality of paired parallel placements in apparatus of the present invention;
Fig. 4 b is the structural representation of the optic path multiplexing device be made up of the plane mirror of a plurality of paired parallel placements and additional plane catoptron that is positioned on the reference beam path in apparatus of the present invention;
Fig. 5 adopts the optic path multiplexing device to amplify the synoptic diagram of the displacement of the lines amount corresponding with the beam angle drift in apparatus of the present invention.
Embodiment
Below in conjunction with accompanying drawing 2 D photoelectric autocollimation and the measuring method based on the optic path multiplexing compensation method of the present invention is described in detail:
As shown in Figure 1, device of the present invention by LASER Light Source 1, preposition spectroscope 2, graticule 3, main spectroscope 4, main ccd image sensor 5, collimator objective 6, measure catoptron 7, preposition ccd image sensor 8 and the optic path multiplexing device 9 be made up of plane mirror 10 and plane mirror 11 etc. constitutes.The path of its light is as follows:
The light beam that LASER Light Source 1 is sent is divided into two bundles behind preposition spectroscope 2: transmitted light beam becomes measuring beam, and folded light beam becomes and the identical reference beam of measuring beam characteristic.After reference beam goes into to inject optic path multiplexing device 9, after the repeatedly reflection through plane mirror 10 and plane mirror 11, prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, received by preposition ccd image sensor 8, become reference signal; Measuring beam illuminates the graticule 3 on the focus that is positioned at collimator objective 6, through main spectroscope 4 transmissions, after collimator objective 6 is assembled, incide the measurement catoptron 7 that is placed on the measured object, the light beam that measurement catoptron 7 reflects is assembled by collimator objective 6 again, through imaging on the main ccd image sensor 5 after main spectroscope 4 reflections, become measuring-signal, the angle drift value of light beam causes that reference signal and measuring-signal change simultaneously, autocollimation principle in conjunction with geometrical optics and optics, the angle drift value of light beam is monitored and isolated to reference signal, carry out the real-time differential processing of two dimension and get final product the angle measurement error that this angle drift value of dynamic compensation causes, accurately measure the variable quantity of the Bidimensional small angle of measuring catoptron 7:
Here: θ is the variable quantity of the Bidimensional small angle of measurement catoptron 7, d
1The variable quantity of the spot center position that forms on main ccd image sensor 5 for measuring-signal, f is the equivalent focal length of collimator objective 6, d
0The variable quantity of the spot center position that forms on preposition ccd image sensor 8 for reference signal, L is the total equivalent light path of laser beam from LASER Light Source 1 to preposition ccd image sensor 8 processes.
The present invention passes through to place preposition spectroscope 2 between the LASER Light Source 1 of 2 D photoelectric autocollimator and graticule 3, utilizes two plane mirrors 10 and the 11 optic path multiplexing devices of forming 9 to improve the optical texture of 2 D photoelectric autocollimators.The light beam that LASER Light Source 1 is sent is after preposition spectroscope 2 beam splitting, get access to and the identical reference beam of measuring beam characteristic, the optic path multiplexing device repeatedly reflects reference beam, prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, received and dynamically monitored by preposition ccd image sensor 8, the angle measurement error that adopts error separating and dynamic compensation technology that this angle drift value is caused is eliminated and is suppressed.
Referring to Fig. 2, plane mirror 10 and 11 and one additional plane catoptron 12 that the optic path multiplexing device 9 in apparatus of the present invention is placed by two opposing parallel are formed.Additional plane catoptron 12 is arranged on the path of reference beam.Like this, light path is repeatedly reflected along horizontal direction, regulate than being easier to.
Referring to Fig. 3 a, the optic path multiplexing device 9 in apparatus of the present invention is made up of two right-angle prisms staggered relatively 13 and 14.
Referring to Fig. 3 b, the optic path multiplexing device 9 in apparatus of the present invention is made up of two right-angle prisms staggered relatively 13 and 14 and additional plane catoptrons 12 that are positioned on the reference beam path.
Referring to Fig. 4 a, the optic path multiplexing device 9 in apparatus of the present invention is made up of the plane mirror 15,16,17,18,19,20,21 and 22 of a plurality of paired parallel placements.
Referring to Fig. 4 b, the optic path multiplexing device 9 in apparatus of the present invention is made up of the additional plane catoptron 12 that 15,16,17,18,19,20,21 and 22 and one of the plane mirrors of a plurality of paired parallel placements are positioned on the reference beam path.
Describe method of the present invention below in detail:
The present invention also provides the measuring method based on the 2 D photoelectric autocollimation of optic path multiplexing compensation method, and this measuring method may further comprise the steps:
1. at first need spacing and the order of reflection of light beam between device between definite device, draw total equivalent light path L, and optic path multiplexing device 9 is adjusted according to the numerical value of total equivalent light path L, the repeatedly reflection that realizes laser beam is to increase light path, amplify and the corresponding displacement of the lines amount of beam angle drift, the adjustment back optic path multiplexing device 9 that finishes should be fixed, and then the 2 D photoelectric autocollimation is calibrated, and the calibration optic path multiplexing device 9 that finishes in the use of back is no longer adjusted;
2. when measuring, the laser beam that LASER Light Source 1 is sent is divided into two bundles behind preposition spectroscope 2: transmitted light beam becomes measuring beam, and folded light beam becomes and the identical reference beam of measuring beam characteristic;
3. after reference beam goes into to inject optic path multiplexing device 9, after repeatedly reflecting, prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, received by preposition ccd image sensor 8, become reference signal, the spot center position that forms on preposition ccd image sensor 8 is d
0
4. measuring beam illuminates the graticule on the focus that is positioned at collimator objective 6, through main spectroscope 4 transmissions, after collimator objective 6 is assembled, incide the measurement catoptron 7 that is placed on the measured object, the light beam that measurement catoptron 7 reflects is assembled by collimator objective 6 again, through imaging on the main ccd image sensor 5 after main spectroscope 4 reflections, become measuring-signal, the spot center position that forms on main ccd image sensor 5 is d
1
5. the angle drift value Δ θ of light beam
0Will cause the drift of measurement result, comprise in the measurement result that calculates by measuring-signal and measured the Bidimensional small angle variable quantity θ of catoptron 7 and the angle drift value Δ θ of light beam
0, but because this measurement scheme has adopted the optic path multiplexing device to amplify and the corresponding displacement of the lines amount Δ θ of beam angle drift
0, adopt preposition ccd image sensor 8 to receive, can effectively monitor and isolate the angle drift value Δ θ of light beam
0, as shown in Figure 5, can try to achieve by geometric relationship:
Here: d
0The variable quantity of the spot center position that forms on preposition ccd image sensor 8 for reference signal, L is the total equivalent light path of laser beam from LASER Light Source 1 to preposition ccd image sensor 8 processes.In conjunction with the autocollimation principle of geometrical optics and optics, carry out real-time differential processing and get final product the angle measurement error that this angle drift value of dynamic compensation causes, accurately measure the variable quantity of the Bidimensional small angle of measuring catoptron 7:
Here: θ is the variable quantity of the Bidimensional small angle of measurement catoptron 7, d
1The variable quantity of the spot center position that forms on main ccd image sensor 5 for measuring-signal, f is the equivalent focal length of collimator objective 6, d
0The variable quantity of the spot center position that forms on preposition ccd image sensor 8 for reference signal, L is the total equivalent light path of laser beam from LASER Light Source 1 to preposition ccd image sensor 8 processes.
As seen, in measurement result, reference signal and measuring-signal are carried out real-time differential processing, the angle measurement error that angle drift value promptly separable and the dynamic compensation light beam causes is to not influence of measurement result.Improved the measurement stability and the uncertainty of measurement of 2 D photoelectric autocollimator, measured thereby this measurement scheme has realized high-precision Bidimensional small angle.
Embodiment 1:
2 D photoelectric autocollimation as shown in Figure 1, at first adjust optic path multiplexing device 9, here, optic path multiplexing device 9 as shown in Figure 1, form by the plane mirror 10 and 11 that two opposing parallel are placed, the adjustment back optic path multiplexing device 9 that finishes should be fixed, and then the 2 D photoelectric autocollimation is calibrated, and the calibration optic path multiplexing device 9 that finishes in the use of back is no longer adjusted.When measuring, the laser beam that LASER Light Source 1 is sent is divided into two bundles behind preposition spectroscope 2: transmitted light beam becomes measuring beam, and folded light beam becomes and the identical reference beam of measuring beam characteristic; After reference beam went into to inject optic path multiplexing device 9,9 pairs of reference beams of optic path multiplexing device repeatedly reflected, and prolonged the light path of reference beam, amplified and the corresponding displacement of the lines amount of beam angle drift, were received by preposition ccd image sensor 8, became reference signal; Measuring beam illuminates the graticule on the focus that is positioned at collimator objective 6, through main spectroscope 4 transmissions, after collimator objective 6 is assembled, incide the measurement catoptron 7 that is placed on the measured object, the light beam that measurement catoptron 7 reflects is assembled by collimator objective 6 again, through imaging on the main ccd image sensor 5 after main spectroscope 4 reflections, become measuring-signal; Comprised in the measurement result that measuring-signal calculates and measured the Bidimensional small angle variable quantity θ of catoptron 7 and the angle drift value Δ θ of light beam
0, the angle drift value Δ θ of light beam is monitored and isolated to reference signal
0, in conjunction with the autocollimation principle of geometrical optics and optics, carry out real-time differential processing and get final product the angle measurement error that this angle drift value of dynamic compensation causes, accurately measure the variable quantity of the Bidimensional small angle of measuring catoptron 7:
Here: θ is the variable quantity of the Bidimensional small angle of measurement catoptron 7, d
1The variable quantity of the spot center position that forms on main ccd image sensor 5 for measuring-signal, f is the equivalent focal length of collimator objective 6, d
0The variable quantity of the spot center position that forms on preposition ccd image sensor 8 for reference signal, L is the total equivalent light path of laser beam from LASER Light Source 1 to preposition ccd image sensor 8 processes.
In the present embodiment, the plane mirror 10 and 11 that optic path multiplexing device 9 is placed by two opposing parallel is formed, two plane mirrors 10 and 11 by length are: a=50mm, widely be: b=10mm, thickness is: plate highly reflecting films after the surperficial fine gtinding of the optical flat of d=5mm and constitute, the optical flat surfaceness is better than 0.08um, highly reflecting films reflectivity factor: R 〉=99%@632.8nm, spacing between two plane mirrors 10 and 11 is: D=40mm, the laser beam exit pupil diameter that LASER Light Source is sent is Φ 5mm, N=8 back of reflection arrives preposition ccd image sensor 8 between two plane mirrors 10 and 11, the total equivalent light path of laser beam from LASER Light Source 1 to 8 processes of preposition ccd image sensor is L=400mm, experimental result shows, this 2 D photoelectric autocollimation reaches 0.01 in measurement resolution " situation under; measurement stability is better than 0.05 "/h, uncertainty of measurement is better than 0.05 ", has realized the high precision two-dimensional narrow angle measurement.
Embodiment 2:
2 D photoelectric autocollimation as shown in Figure 1, here, plane mirror 10 and 11 and additional plane catoptrons 12 that are positioned on the reference beam path that optic path multiplexing device 9 is placed by two opposing parallel are as shown in Figure 2 formed.9 pairs of reference beams of optic path multiplexing device repeatedly reflect, and prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, and the miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.
Embodiment 3:
2 D photoelectric autocollimation as shown in Figure 1, here, optic path multiplexing device 9 is made up of two right- angle prisms 13 and 14 staggered relatively shown in Fig. 3 a.9 pairs of reference beams of optic path multiplexing device repeatedly reflect, and prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, and the miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.
Embodiment 4:
2 D photoelectric autocollimation as shown in Figure 1, here, optic path multiplexing device 9 is made up of two right- angle prisms 13 and 14 and additional plane catoptrons 12 that are positioned on the reference beam path staggered relatively shown in Fig. 3 b.9 pairs of reference beams of optic path multiplexing device repeatedly reflect, and prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, and the miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.
Embodiment 5:
2 D photoelectric autocollimation as shown in Figure 1, here, optic path multiplexing device 9 is made up of the plane mirror 15,16,17,18,19,20,21 and 22 of a plurality of paired parallel placements shown in Fig. 4 a.9 pairs of reference beams of optic path multiplexing device repeatedly reflect, and prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, and the miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.
Embodiment 6:
2 D photoelectric autocollimation as shown in Figure 1, here, optic path multiplexing device 9 is by the plane mirror 15,16,17,18 of a plurality of paired parallel placements shown in Fig. 4 b, 19,20,21 and 22 and additional plane catoptrons 12 that are positioned on the reference beam path are formed.9 pairs of reference beams of optic path multiplexing device repeatedly reflect, and prolong the light path of reference beam, amplify and the corresponding displacement of the lines amount of beam angle drift, and the miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.
Claims (7)
1. 2 D photoelectric autocollimation based on the optic path multiplexing compensation method, comprise LASER Light Source, graticule, main spectroscope, main ccd image sensor, collimator objective, the measurement catoptron placed successively, it is characterized in that placing between LASER Light Source and the graticule a preposition spectroscope, obtain and the identical reference beam of measuring beam characteristic, one optic path multiplexing device repeatedly reflects reference beam, and a preposition ccd image sensor is monitored the angle drift value of light beam; Two plane mirrors that said optic path multiplexing device is placed by opposing parallel are formed.
2. according to claim 1 described device, it is characterized in that said optic path multiplexing device also comprises an additional plane catoptron that is positioned on the reference beam path.
3. according to claim 1 described device, it is characterized in that said optic path multiplexing device is made up of two right-angle prisms staggered relatively.
4. according to claim 3 described devices, it is characterized in that said optic path multiplexing device also comprises an additional plane catoptron that is positioned on the reference beam path.
5. according to claim 1 described device, it is characterized in that said optic path multiplexing device is made up of the plane mirror of a plurality of paired parallel placements.
6. according to claim 5 described devices, it is characterized in that said optic path multiplexing device also comprises an additional plane catoptron that is positioned on the reference beam path.
7. measuring method based on the 2 D photoelectric autocollimation of optic path multiplexing compensation method is characterized in that said measuring method may further comprise the steps:
(1). at first adjust and fixing light path multiplying assembly, calibrate the 2 D photoelectric autocollimation then;
(2). the laser beam that LASER Light Source is sent is divided into transmitted light beam and folded light beam behind preposition spectroscope: transmitted light beam becomes measuring beam, and folded light beam becomes reference beam;
(3). after reference beam goes into to inject the optic path multiplexing device,, become reference signal through repeatedly being received by preposition ccd image sensor after the reflection;
(4). after measuring beam obtains the variable quantity of the Bidimensional small angle of measuring catoptron, receive, become measuring-signal by main ccd image sensor;
(5). the angle drift value of light beam is monitored and isolated to reference signal, carries out real-time differential processing and get final product the angle measurement error that this angle drift value of dynamic compensation causes, accurately measures the variable quantity of the Bidimensional small angle of measuring catoptron:
Here: θ is the variable quantity of the Bidimensional small angle of measurement catoptron, d
1The variable quantity of the spot center position that forms on main ccd image sensor for measuring-signal, f is the equivalent focal length of collimator objective, d
0The variable quantity of the spot center position that forms on preposition ccd image sensor for reference signal upward is the total equivalent light path of laser beam from LASER Light Source to preposition ccd image sensor process.
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| WO2012097730A1 (en) * | 2011-01-19 | 2012-07-26 | Harbin Institute Of Technology | Photoelectric autocollimation method and apparatus based on beam drift compensation |
| CN102829715A (en) * | 2012-08-22 | 2012-12-19 | 哈尔滨工业大学 | Return-type large-bore long-working-distance auto-collimating microscopic monitor |
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| JPS58169004A (en) * | 1982-03-31 | 1983-10-05 | Agency Of Ind Science & Technol | Highly accurate interference length measuring method in atmosphere |
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| JP2004317424A (en) * | 2003-04-18 | 2004-11-11 | Pioneer Electronic Corp | Autocollimator |
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