CN2395291Y - Two dimensional dynamic digital display auto-collimation instrument - Google Patents

Abstract

The utility model belongs to the technical field of optical detection, which is suitable for a digital display auto-collimation instrument for measuring two-dimensional displacement at the same time. The utility model can change a cross-shaped graticule of the existing one-dimensional auto-collimation instrument into a trigonal graticule. A spectroscope is arranged between a semipermeable membrane cubic prism and a double-reticle graticule, and a CCD receiver is arranged on the reflection image point of the spectroscope and is connected with an electronic measuring device. The control and data processing of the information of the CCD receiver can be carried out by the electronic measuring device. Due to the adoption of the trigonal graticule and the one-dimensional CCD receiver, measuring accuracy can be increased, the structure of the utility model can be simplified, and measuring response speed is quick. The utility model has the advantages of simple structure, low cost, easy implementation, etc.

Description

The explicit autocollimator of two dimension dynamic number

The utility model belongs to the optical detective technology field, is a kind of improved autocollimator, is specially adapted to measure simultaneously the digital display type autocollimator of two dimensional displacement quantity.

More a kind of autocollimator of domestic present use with manual measurement.This autocollimator is by visual observation, and the displacement of measurement is an one-dimensional space amount.If measure the angular metric of other direction, must on this direction, readjust instrument, such measurement, the data poor repeatability that draws, and time-consuming.Old-fashioned autocollimator can be introduced artificial measuring error and mechanical error of backlash in measuring process.

In order to overcome the one dimension autocollimator when measuring the both direction displacement, secondary is adjusted the shortcoming of the reproducibility error that instrument causes, the major company of a few family of the U.S., Britain successively develops the digital display type autocollimator that can measure two-dimentional angular displacement simultaneously.But the used receiver of these autocollimators all is a dimension sensor, and the system architecture complexity involves great expense accordingly.

The purpose of this utility model provides a kind of usefulness one line CCD receiving device and measures two-dimentional angular displacement simultaneously, realizes the autocollimator that numeral shows automatically.

Common autocollimator, light source passes through condenser, illuminate cross graticule, the cross picture of cross graticule is through semi-permeable diaphragm block prism directive objective lens, through becoming a branch of directional light to project the plane mirror that is placed on the measured piece after the objective lens, parallel beam is penetrated back objective lens again after mirror reflects, the parallel beam of this moment forms a branch of polymerization light after entering object lens, reflect through the semi-permeable diaphragm block prism, reflected light focuses on two groove graticules, be cross picture on the cross line style graticule on two groove graticules, carry out visual sight by eyepiece and trimming hand wheel, draw the one dimension displacement amount by the reading drum on the handwheel.

The utility model is a kind of improvement to above-mentioned autocollimator, original cross graticule, be designed to the isosceles triangle graticule, a spectroscope is installed between semi-permeable diaphragm block prism and two groove graticule, there is a CCD receiver at spectroscope reflection image place, and the CCD receiver joins with electronic measuring device.

Fig. 1 is a structural representation of the present utility model.1 is light source among the figure, 2 condensers, 3 triangular form graticules, 4 semi-permeable diaphragm block prisms, 5 objective lens, 6 plane mirrors, 7 spectroscopes, 8 pairs of groove graticules, 9 eyepieces, 10CCD receiver, 11 electronic measuring devices.

Light source 1 illuminates triangular form graticule 3 by condenser 2, and the triangle picture on the triangular form graticule 3 is through semi-permeable diaphragm block prism 4 directive objective lens 5.Objective lens 5 becomes parallel beam to light, and projects the plane mirror 6 that is placed on the measured piece.Parallel beam is penetrated back objective lens 5 again after catoptron 6 reflections.After parallel beam enters objective lens 5, form a branch of polymerization light again, reflex to spectroscope 7 through semi-permeable diaphragm block prism 4.At this moment, light beam is divided into two-way by spectroscope 7, and a Reuter crosses spectroscope 7 and focuses on two groove graticules 8, and promptly the triangle picture of graticule 3 carries out visual sight by eyepiece 9 on two groove graticules 8; Another road light beam focuses on the line array CCD receiver 10 after being reflected by spectroscope 7, and promptly the triangle image focu in the triangular form graticule 3 resembles face in the reception of CCD receiver 10.CCD receiver 10 is converted to electric signal with the positional information of triangular form graticule 3 epigraphs, delivers to electronic measuring device 11, and measurement result is shown by electronic measuring device 11 numerals.

One lighttight isosceles triangle is arranged on the triangular form graticule 3 of the present utility model, and the displacement of isoceles triangle image on CCD receiver 10 by triangular form graticule 3 can calculate two-dimentional angular displacement.The base of the isosceles triangle on the triangular form graticule 3 is horizontal.

The utility model spectroscope 7 is installed between semi-permeable diaphragm block prism 4 and the two groove graticule 8.The plane of spectroscope 7 and incident light angle at 45, the direction of spectroscope 7 just, making incident angle is 45 °.Secondly the plane of spectroscope 7 is perpendicular with the plane that light path constitutes.

Electronic measuring device 11 includes A/D converter, data-carrier store, counter, single-chip microcomputer, display, control circuit, CCD clock etc.Fig. 2 is that the annexation block diagram of each several part in the electronic measuring device 11 reaches the connected mode with CCD receiver 10.CCD receiver 10 links to each other with the dynamic data storage device by the A/D converter of electronic measuring device 11, and the dynamic data storage device links to each other with single-chip microcomputer, and single-chip microcomputer connects control circuit and A/D converter and display again; Counter in the electronic measuring device 11 links to each other with single-chip microcomputer and dynamic data storage device with control circuit respectively; CCD clock in the electronic measuring device 11 links to each other with control circuit with CCD receiver (10) respectively.The electric signal that CCD receiver 10 changes the picture position information on the triangular form graticule 3 is delivered to high-speed a/d converter with simulating signal output.Start under the control of sampled signal at CCD clock and single-chip microcomputer, A/D converter is a digital signal with analog signal conversion, and dynamic memory is in data-carrier store in order, and the data-carrier store of this moment is in the write operation state.When the full frame data of counter meter, single-chip microcomputer cuts out enabling signal, and A/D converter stops conversion, the unison counter zero clearing, and data-carrier store was in and read duty this moment.Single-chip microcomputer is read the data in the data-carrier store in order by control circuit, by corresponding calculated, draws measurement result, delivers to display.

The utility model in order to realize the measurement to two-dimentional angular displacement with a line CCD receiver, has used the dimensionality reduction measuring technology in data handling procedure.

Fig. 3 is dimensionality reduction measuring principle figure.Isosceles triangle is the picture of light tight isosceles triangle on CCD receiver 10 on the graticule 3 among the figure, and the triangle base is parallel to the orientation of the photosensitive unit of CCD, and to establish this direction be X-direction, and vertical direction is a Y direction.If the position before the delta displacement is X ₁, X ₂, the position after the displacement is X ₁', X ₂', then use the dimensionality reduction measuring technology and can get two-dimentional angular displacement. $\mathrm{\&Delta;}{\mathrm{\&alpha;}}_x=\frac{E}{4f}\&CenterDot;[{{(\mathrm{<figure-callout\; id="2"\; label="X"\; filenames="Y9924255200071.png"\; state="\{\{state\}\}">X</figure-callout>}}_2}^{\&prime;}+{{\mathrm{<figure-callout\; id="1"\; label="X"\; filenames="Y9924255200071.png"\; state="\{\{state\}\}">X</figure-callout>}}_1}^{\&prime;})-({\mathrm{<figure-callout\; id="2"\; label="X"\; filenames="Y9924255200071.png"\; state="\{\{state\}\}">X</figure-callout>}}_2+X_1)]$ ${\mathrm{\&Delta;\&alpha;}}_y=\frac{E}{4f^{\&prime;}}\&CenterDot;[({{\mathrm{<figure-callout\; id="2"\; label="X"\; filenames="Y9924255200071.png"\; state="\{\{state\}\}">X</figure-callout>}}_2}^{\&prime;}-{{\mathrm{<figure-callout\; id="1"\; label="X"\; filenames="Y9924255200071.png"\; state="\{\{state\}\}">X</figure-callout>}}_1}^{\&prime;})-(X_2-X_1)]\tan B$

Wherein f ' is an objective focal length, and E is a CCD receiver resolution, and B is the isosceles triangle base angle.

From aforementioned calculation two dimension angular displacement formula as can be seen, the measuring accuracy of displacement Δ α depends on X ₁And X ₂Measuring accuracy, therefore, remaining problem is how accurately to try to achieve X ₁And X ₂Value.

Fig. 4 (a) is CCD receiver signal output waveform figure, and middle dark signal (low level) is the triangular image information of receiver.With the two edges signal differentiation, get Fig. 4 (b) signal waveform, the maximal value place of differential, promptly margin signal gradient maximum is thought best edge point X ₁And X ₂, with the X that tries to achieve ₁And X ₂In the above-mentioned formula of substitution, can draw two-dimentional angular displacement.

The utility model changes the cross graticule of existing autocollimator into lighttight isosceles triangle graticule, and purpose is can calculate two-dimentional angular displacement by triangle as the displacement on the online CCD receiver.Owing to adopt the CCD receiver, improved the precision of measuring.The utility model replaces two-dimentional receiver with one dimension CCD receiver, measures two-dimentional angular displacement.One dimension receive to show device to be compared with two-dimentional receiver, has simple in structurely, and response speed is fast, and cost is low, easily advantage such as realization.

Claims (4)

1, the explicit autocollimator of a kind of two-dimentional dynamic number, include light source (1), condenser (2), graticule (3), semi-permeable diaphragm block prism (4), objective lens (5), catoptron (6), two groove graticules (8), eyepieces (9) etc. is characterized in that a lighttight isosceles triangle is arranged on the described graticule (3); Between semi-permeable diaphragm block prism (4) and two groove graticule (8), spectroscope (7) is installed; There is a CCD receiver (10) at the place in spectroscope (7) reflection picture point, and CCD receiver (10) is connected with electronic measuring device (11).

2, the explicit autocollimator of two-dimentional dynamic number according to claim 1 is characterized in that the base of the isosceles triangle on the triangular form graticule (3) is parallel to the orientation of the photosensitive unit of CCD receiver (10).

3, the explicit autocollimator of two-dimentional dynamic number according to claim 1, the face that it is characterized in that spectroscope (7) are with incident light angle at 45, and the plane of spectroscope (7) is perpendicular with the plane that light path constitutes.

4, the explicit autocollimator of two-dimemsional number according to claim 1, it is characterized in that CCD receiver (10) is by the A/D converter in the electronic measuring device (11), link to each other with the dynamic data storage device, the dynamic data storage device links to each other with single-chip microcomputer, and single-chip microcomputer connects control circuit and A/D converter and display again; Counter in the electronic measuring device (11) links to each other with single-chip microcomputer and dynamic data storage device with control circuit respectively; CCD clock in the electronic measuring device (11) links to each other with control circuit with CCD receiver (10) respectively.

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