CN112432765A - Laser scanning galvanometer performance detection device - Google Patents
Laser scanning galvanometer performance detection device Download PDFInfo
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- CN112432765A CN112432765A CN202011009322.4A CN202011009322A CN112432765A CN 112432765 A CN112432765 A CN 112432765A CN 202011009322 A CN202011009322 A CN 202011009322A CN 112432765 A CN112432765 A CN 112432765A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/04—Optical benches therefor
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- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a laser scanning galvanometer performance detection device, which comprises: the system comprises an optical platform, a galvanometer, a laser, a galvanometer adjusting table, an optical focusing lens, an azimuth rotating table and a data acquisition unit; the galvanometer adjusting table, the azimuth rotating table and the data collector are all fixedly arranged on the optical platform; the galvanometer is fixed on the galvanometer adjusting table; the azimuth rotating table is arranged corresponding to the galvanometer adjusting table; the data collector comprises: the system comprises a detector, a synchronous acquisition circuit box and an industrial personal computer; the detector is arranged on the azimuth rotating platform; an optical focusing lens is arranged in front of the detector, and a laser is arranged at the top end of the detector and is mechanically connected with the detector; the detector is electrically connected with the synchronous acquisition circuit box; the synchronous acquisition circuit box is electrically connected with the industrial personal computer. The invention provides a performance detection device of a laser scanning galvanometer, which not only improves the imaging stability, but also ensures the uniformity of a swing angle and simultaneously accurately measures dynamic scanning parameters; further ensuring the scanning and imaging quality.
Description
Technical Field
The invention relates to the technical field of optical precision measurement, in particular to a device for detecting the performance of a laser scanning galvanometer.
Background
The high-frequency high-precision galvanometer is a key component of a linear scanning imaging system, parameters such as the linear characteristic of galvanometer swing seriously influence the scanning and imaging quality, and the swing repeatability influences the imaging stability.
Along with the development of laser scanning technology, the application of laser scanning galvanometers is more and more extensive, for example, in the fields of laser engraving, laser marking, laser radar and the like, the laser scanning galvanometers play an important role, and the requirements on the performance of the laser scanning galvanometers are higher and higher. At present, the commonly used method for measuring the characteristic parameters of the galvanometer comprises the following steps: circular grating angle measurement, laser interference angle measurement, internal reflection high precision differential small swing angle measurement, auto-collimation angle measurement, etc. The circular grating angle measurement method measures the rotating angle of the vibrating mirror through Moire fringes, has high measurement precision, high speed and strong anti-interference capability, but cannot realize non-contact measurement because a circular grating structure is required to be installed on the vibrating mirror as assistance; the laser interference angle measurement method measures the rotating angle of the vibrating mirror by using the optical path difference generated by the measuring beam and the reference beam caused by the rotating angle of the vibrating mirror, has higher measurement precision, but needs to install auxiliary devices such as fish glasses or corner prisms on the vibrating mirror, and thus can influence the dynamic performance of the vibrating mirror; the principle of the reflection high-precision differential small-swing angle measuring method is that two reflecting mirrors are placed in the transmission and reflection directions of a spectroscope, the size of an incident angle is measured by using the change of the reflectivity (changed along with the incident angle) of the two reflecting mirrors, non-contact measurement and high-speed measurement can be realized by the method, but the linear relation between the reflectivity and the incident angle is only established near a critical angle, the measurement range is limited, other angle measuring equipment is often needed to perform rough measurement in use, and the measurement efficiency is low. The auto-collimation angle measurement method measures the angle of incident light by utilizing the object-image relationship characteristic of an optical system, can measure a two-dimensional angle, is non-contact measurement, but has small angle measurement range and low frequency response, and is difficult to apply in a galvanometer test.
Therefore, how to provide a laser scanning galvanometer performance detection device capable of ensuring the scanning and imaging quality is a problem to be solved urgently by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides a device for detecting performance of a laser scanning galvanometer, which not only improves imaging stability, but also ensures the uniformity of a swing angle, and simultaneously accurately measures dynamic scanning parameters; further ensuring the scanning and imaging quality.
In order to achieve the above purpose, the invention provides the following technical scheme:
a laser scanning galvanometer performance detection device comprises: the system comprises an optical platform, a galvanometer, a laser, a galvanometer adjusting table, an optical focusing lens, an azimuth rotating table and a data acquisition unit; the galvanometer adjusting table, the azimuth rotating table and the data collector are all fixedly arranged on the optical platform; the galvanometer is fixed on the galvanometer adjusting table; the azimuth rotating table is arranged corresponding to the galvanometer adjusting table;
the data collector comprises: the system comprises a detector, a synchronous acquisition circuit box and an industrial personal computer; the detector is arranged on the azimuth rotating platform; the optical focusing lens is arranged in front of the detector, the laser is arranged at the top end of the detector, and the detector, the optical focusing lens and the laser are mechanically connected; the detector is electrically connected with the synchronous acquisition circuit box; the synchronous acquisition circuit box is electrically connected with the industrial personal computer.
Through the technical scheme, the invention has the technical effects that: the device has the advantages of simple structure, convenience in operation, high measurement efficiency, capability of detecting the motion state of the galvanometer in real time, realization of non-contact measurement, and accurate and effective measurement of zero repeatability, scanning frequency, time utilization rate of a linear section, effective swing angle of the linear section, speed uniformity of the linear section and the like of the galvanometer.
Preferably, in the above apparatus for detecting performance of a laser scanning galvanometer, the galvanometer is fixed on the galvanometer adjusting table by a clamping structure.
Through the technical scheme, the invention has the technical effects that: the vibrating mirror fixing device is used for fixing the vibrating mirror to ensure the stability of the vibrating mirror so as to ensure the accuracy of measurement of each parameter.
Preferably, in the above apparatus for detecting performance of a laser scanning galvanometer, the laser further includes: a Powell prism; parallel laser emitted by the laser passes through the Bawell prism to form a linear light source.
Through the technical scheme, the invention has the technical effects that: the laser is optimally divided into a linear light source with uniform optical density, good stability and good linearity through the Bawell prism; the straight light source has high visibility and is convenient for adjusting the angle of reflected light; the optical fiber scanning mirror is convenient for scanning light and imaging on a detector, and the problem that reflected light deviates from the detector due to the deviation of a swing shaft of a vibrating mirror is solved.
Preferably, in the above laser scanning galvanometer performance detecting device, the galvanometer adjusting stage includes: a double-shaft adjusting platform and a shear type lifting platform; one end of the shear type lifting platform is fixed on the optical platform, and the other end of the shear type lifting platform is connected with the double-shaft adjusting platform.
Through the technical scheme, the invention has the technical effects that: the shear type lifting platform realizes the adjustment of the azimuth of the galvanometer, and the double-shaft adjusting platform realizes the adjustment of pitching.
Preferably, in the above apparatus for detecting performance of a laser scanning galvanometer, the optical focusing lens employs an F- θ field lens.
Through the technical scheme, the invention has the technical effects that: to ensure linearity of the input angle and spot position on the detector.
Preferably, in the above apparatus for detecting performance of a laser scanning galvanometer, the detector includes: a photoelectric sensor and a front panel; the photoelectric sensor collects data, and the data are transmitted to the synchronous collection circuit box through the front board.
Through the technical scheme, the invention has the technical effects that: in order to ensure the analysis of various performance indexes of the galvanometer, the method specifically comprises the following steps:
1. calculation of the light Source Tilt Angle
The maximum swing angle of the vibrating mirror is +/-alpha degrees, according to the reflection law, under the condition that the vibrating mirror swings alpha degrees, the incident laser reflects 2 alpha degrees, and under the condition that the swing angle is-alpha degrees, the incident laser reflects-2 alpha degrees, so that the swing angle of the incident laser after being reflected by the vibrating mirror is +/-2 alpha degrees, namely 4 alpha degrees.
2. Calculation of spatial resolution
The receiving angle range of the galvanometer is +/-2 alpha degrees, the available size of a photosensitive surface of the detector is L, and the detector can realize the spatial resolution of 1 mu m, so that the transverse space of the photosensitive surface can be divided into N parts:
N＝L/1μm
the angles corresponding to each 1 μm photosurface are:
3. angular resolution calculation
The detector of the invention has a response time rising edge of t and an angular resolution of
Preferably, in the above apparatus for detecting performance of a laser scanning galvanometer, the synchronous acquisition circuit box includes a data acquisition card and an AD conversion module; the data acquisition card processes the signals amplified and filtered by the front amplifier board; and then, a digital signal is obtained through the AD conversion module and is transmitted to the industrial personal computer.
Through the technical scheme, the invention has the technical effects that: in order to realize real-time data acquisition, the test precision is improved.
Preferably, in the above apparatus for detecting performance of a laser scanning galvanometer, a maximum tilt angle of the galvanometer is ± α °, and an angle of the maximum tilt angle is defined as an included angle between the galvanometer and a vertical direction.
A method for detecting the performance of a laser scanning galvanometer specifically comprises the following steps:
1. electrifying the galvanometer, forming a linear light source by laser through the Powell prism, irradiating the linear light source on the galvanometer, reflecting the linear light source, passing through the focusing lens for focusing, and irradiating the linear light source on a photosensitive surface of the detector;
2. defining a working zero point, namely the middle position of the positive and negative maximum swing angles;
3. determining the scanning frequency according to the time spent on passing the working zero point for 2 times; determining the average frequency of the plurality of zeros according to the elapsed time; the reciprocal of which is the scan period.
4. The percentage (such as 5 percent) of displacement variation of the light spots on the detector in adjacent unit time is used as the judgment basis of the linear section; and determining the time utilization rate of the linear segment according to the percentage of the obtained linear segment elapsed time in the scanning period.
5. Calculating an average value of the obtained effective swing angles of the linear sections to obtain the effective swing angles of the linear sections;
6. according to the working characteristics of the detector, the ratio of the distance between adjacent sampling points to the elapsed time is used for obtaining the instantaneous speed, in a linear region, the difference between the maximum value of the instantaneous speed and the theoretical value of the speed corresponding to the moment is multiplied by 100 percent by the theoretical value of the speed at the moment, and the maximum speed deviation is obtained:
the measured speed is used as a speed uniformity measuring standard, and the uniformity of the movement speed of the galvanometer is obtained by calculating the maximum speed deviation in the linear section.
Compared with the prior art, the technical scheme shows that the device for detecting the performance of the laser scanning galvanometer has the advantages of simple structure, convenience in operation, high measurement efficiency, capability of detecting the motion state of the galvanometer in real time, realization of non-contact measurement, accurate and effective measurement of zero position repeatability, scanning frequency, linear segment time utilization rate, linear segment effective swing angle and linear segment speed uniformity of the galvanometer. The laser emits a linear light source, the linear light source irradiates a vibrating mirror fixed on a vibrating mirror adjusting table, is reflected by the vibrating mirror and then is focused through a focusing lens, and finally irradiates a detector, the detector receives position information of the laser in real time, and the track information is displayed on an industrial personal computer by analyzing and calculating track information left by the linear light source, so that the performance of the vibrating mirror is detected.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a block diagram of the present invention;
fig. 2 is a schematic structural diagram of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a performance detection device of a laser scanning galvanometer, which has the advantages of simple structure, convenient operation and high measurement efficiency, can detect the motion state of the galvanometer in real time, realize non-contact measurement, accurately and effectively realize the measurement of zero position repeatability, the measurement of scanning frequency, the measurement of time utilization rate of a linear segment, the measurement of effective swing angle of the linear segment and the measurement of speed uniformity of the linear segment of the galvanometer.
As shown in fig. 1-2, a device for detecting performance of a laser scanning galvanometer comprises: the system comprises an optical platform 1, a galvanometer 2, a laser 3, a galvanometer adjusting table 4, an optical focusing lens 7, an azimuth rotating table 5 and a data acquisition unit; the galvanometer adjusting table 4, the azimuth rotating table 5 and the data collector are all fixedly arranged on the optical platform 1; the galvanometer 2 is fixed on the galvanometer adjusting table 4; the azimuth rotating platform 5 is arranged corresponding to the galvanometer adjusting platform 4;
the data collector comprises: the system comprises a detector 61, a synchronous acquisition circuit box 62 and an industrial personal computer 63; the detector 61 is mounted on the azimuth rotary table 5; an optical focusing lens 7 is arranged in front of the detector 61, a laser 3 is arranged at the top end of the detector 61, and the detector 61, the optical focusing lens 7 and the laser 3 are mechanically connected; the detector 61 is electrically connected with the synchronous acquisition circuit box 62; the synchronous acquisition circuit box 62 is electrically connected with the industrial personal computer 63.
In order to further optimize the technical scheme, the galvanometer 2 is fixed on the galvanometer adjusting table 4 through a clamping structure.
In order to further optimize the above technical solution, the laser 3 further includes: a Powell prism; parallel laser emitted by the laser 3 passes through the Bawell prism to form a linear light source.
In order to further optimize the above technical solution, the galvanometer adjusting stage 4 includes: a double-shaft adjusting platform and a shear type lifting platform; one end of the shear type lifting platform is fixed on the optical platform 1, and the other end of the shear type lifting platform is connected with the double-shaft adjusting platform.
In order to further optimize the technical scheme, the optical focusing lens 7 adopts an F-theta field lens.
In order to further optimize the above solution, the detector 61 comprises: a photoelectric sensor and a front panel; the photoelectric sensor collects data, and the data are transmitted to the synchronous collection circuit box 62 through the front board.
In order to further optimize the above technical solution, the synchronous acquisition circuit box 62 includes a data acquisition card and an AD conversion module; the data acquisition card processes the signals amplified and filtered by the front panel; and then the digital signal is obtained by the AD conversion module and transmitted to the industrial personal computer.
In order to further optimize the technical scheme, the maximum swing angle of the galvanometer 2 is +/-alpha degrees, and the angle of the maximum swing angle is defined as the included angle between the galvanometer 2 and the vertical direction.
In order to ensure the analysis of various performance indexes of the galvanometer, the method specifically comprises the following steps:
1. calculation of the light Source Tilt Angle
The maximum swing angle of the vibrating mirror is +/-alpha degrees, according to the reflection law, under the condition that the vibrating mirror swings alpha degrees, the incident laser reflects 2 alpha degrees, and under the condition that the swing angle is-alpha degrees, the incident laser reflects-2 alpha degrees, so that the swing angle of the incident laser after being reflected by the vibrating mirror is +/-2 alpha degrees, namely 4 alpha degrees.
2. Calculation of spatial resolution
The receiving angle range of the galvanometer is +/-2 alpha degrees, the available size of a photosensitive surface of the detector is L, and the detector can realize the spatial resolution of 1 mu m, so that the transverse space of the photosensitive surface can be divided into N parts:
N＝L/1μm
the angles corresponding to each 1 μm photosurface are:
3. angular resolution calculation
The detector of the invention has a response time rising edge of t and an angular resolution of
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The utility model provides a laser scanning galvanometer performance detection device which characterized in that includes: the device comprises an optical platform (1), a galvanometer (2), a laser (3), a galvanometer adjusting table (4), an azimuth rotating table (5), a data acquisition unit and an optical focusing lens (7); the galvanometer adjusting table (4), the azimuth rotating table (5) and the data collector are all fixedly arranged on the optical platform (1); the galvanometer (2) is fixed on the galvanometer adjusting table (4); the azimuth rotating table (5) is arranged corresponding to the galvanometer adjusting table (4);
the data collector comprises: the system comprises a detector (61), a synchronous acquisition circuit box (62) and an industrial personal computer (63); the detector (61) is mounted on the azimuth rotary table (5); the optical focusing lens (7) is arranged in front of the detector (61), and the laser (3) is arranged at the top end of the detector (61); the detector (61), the optical focusing lens (7) and the laser (3) are mechanically connected; the detector (61) is electrically connected with the synchronous acquisition circuit box (62); and the synchronous acquisition circuit box (62) is electrically connected with the industrial personal computer (63).
2. The device for detecting the performance of the laser scanning galvanometer according to claim 1, wherein the galvanometer (2) is fixed on the galvanometer adjusting table (4) through a clamping structure.
3. A laser scanning galvanometer performance detection device according to claim 1, characterized in that said laser (3) further comprises: a Powell prism; parallel laser emitted by the laser (3) passes through the Bawell prism to form a linear light source.
4. The apparatus for detecting the performance of a laser scanning galvanometer according to claim 1, characterized in that the galvanometer adjusting stage (4) comprises: a double-shaft adjusting platform and a shear type lifting platform; one end of the shear type lifting platform is fixed on the optical platform (1), and the other end of the shear type lifting platform is connected with the double-shaft adjusting platform.
5. The apparatus of claim 4, wherein the optical focusing lens is an F-theta field lens.
6. A laser scanning galvanometer property detector according to claim 4, characterized in that said detector (61) comprises: a photoelectric sensor and a front panel; the photoelectric sensor collects data and transmits the data to the synchronous collecting circuit box (62) through the front board.
7. The device for detecting the performance of the laser scanning galvanometer according to claim 6, wherein the synchronous acquisition circuit box (62) comprises a data acquisition card and an AD conversion module; the data acquisition card processes the signals amplified and filtered by the front amplifier board; and then, a digital signal is obtained through the AD conversion module and is transmitted to the industrial personal computer.
8. The apparatus for detecting the performance of a laser scanning galvanometer according to any one of claims 1 to 7, characterized in that the maximum tilt angle of the galvanometer (2) is ± α °, and the angle of the maximum tilt angle is defined as the included angle between the galvanometer (2) and the vertical direction.
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| CN202011009322.4A CN112432765A (en) | 2020-09-23 | 2020-09-23 | Laser scanning galvanometer performance detection device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113375905A (en) * | 2021-05-31 | 2021-09-10 | 昆明物理研究所 | Method for measuring infrared optical sighting device scanning swing mirror rotating angle range and control stability |
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2020
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113375905A (en) * | 2021-05-31 | 2021-09-10 | 昆明物理研究所 | Method for measuring infrared optical sighting device scanning swing mirror rotating angle range and control stability |
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