CN107121095A - A kind of method and device of accurate measurement super-large curvature radius - Google Patents
A kind of method and device of accurate measurement super-large curvature radius Download PDFInfo
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- CN107121095A CN107121095A CN201710427891.2A CN201710427891A CN107121095A CN 107121095 A CN107121095 A CN 107121095A CN 201710427891 A CN201710427891 A CN 201710427891A CN 107121095 A CN107121095 A CN 107121095A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
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Abstract
The invention discloses a kind of device and method of accurate measurement super-large curvature radius, the device includes：Detected element, light source；Spectroscope, inclination is placed between detected element and light source, and the illumination for light source to be sent is mapped to detected element surface, on the reflected light back that detected element is reflected to the first grating and the second grating；First grating and the second grating；For the Taibo picture and the second grating formation Moire fringe that under the irradiation of reflected parallel light, the first grating is produced at the second grating；Imaging system；For gathering Moire fringe image, and transmit it to computer；Computer；The angle of Moire fringe is determined for handling Moire fringe image, and then calculates the radius of curvature for obtaining detected element.The apparatus structure is simple, and can realize the accurate measurement to optical element super-large curvature radius.
Description
Technical field
The invention belongs to optical element radius of curvature measurement field, more particularly to a kind of accurate measurement super-large curvature radius
Method and device.
Background technology
Optical elements of large caliber system is large-scale high power laser system, such as domestic IC F laser drivers, American National point
The thousands of all kinds of optics that must be used in fiery device (NIF) and French megajoule laser engineering (Mega-Joule Project)
Element.Only more than 400 × 500 all kinds of bore optical elements just have 8000, wherein for space filtering and the focal length focused on
Just there are 1000 or so away from lens combination, therefore effective parameter inspection must be carried out for these large-aperture long-focus optical systems
Survey.Also it is big in U.S. LIGO (laser interferometer Gravitational Wave Observatory) system
Amount uses bigbore optical element.
Optical elements of large caliber is dry due to bore big (more than 250mm), radius of curvature big (being more than 10 meters), air agitation etc.
The factor of disturbing has a strong impact on the precision of test.The spherometer of existing curvature radius measurement method such as contact, from imaging curvature half
Cable diameter gauge and use principle of interference radius of curvature measurement instrument can be realized high-precision to small radius of curvature (being less than 10 meters)
Measurement.But be difficult to obtain high-precision using traditional radius measurement means for super-large curvature radius (being more than 5000m)
How measurement, realize that the high-precision measurement to this kind of a large amount of use elements has great importance to these major projects.
Accordingly, it would be desirable to develop a kind of detecting instrument for being capable of accurate super-large curvature radius, there is provided to laser fusion, gravitation
The accurate measurement instrument device of optical element in the country such as wave measurement large project, as lens from processing each operation to final
The detection foundation and standard of qualified examination, to meet the requirement to these optical element quality.
The content of the invention
The problem of in order to solve to be difficult to measurement optical element super-large curvature radius in the prior art, the present invention is proposed
A kind of method and device of accurate measurement super-large curvature radius.The apparatus structure is simple, and can realize bent to optical element super large
The accurate measurement of rate radius.
First aspect present invention proposes a kind of device of accurate measurement super-large curvature radius, including；
Detected element, light source；
Spectroscope, inclination is placed between detected element and light source, and the illumination for light source to be sent is mapped to detected element table
On face, the reflected light back that detected element is reflected to the first grating and the second grating；
First grating and the second grating；For under the irradiation of reflected parallel light, the first grating to be produced at the second grating
Taibo picture and the second grating formation Moire fringe；
Imaging system；For gathering Moire fringe image, and transmit it to computer；
Computer；The angle of Moire fringe is determined for handling Moire fringe image, and then calculating obtains detected element
Radius of curvature.
Preferably, the device that first aspect present invention is provided also includes：Between spectroscope and light source and for inciting somebody to action
The transmitting light that light source is sent becomes the collimation lens of directional light.When light source is nearer from detected element, collimation lens is arranged at
Between light source and spectroscope, diverging light can be become directional light.
Preferably, the device that first aspect present invention is provided also includes：For adjusting the pin hole in light emission direction, using
The first high precision displacement platform in fixed laser and pin hole, the second high accuracy for fixing the second grating and imaging system
Displacement platform and the high precision displacement drive for driving the first high precision displacement platform and the movement of the second high precision displacement platform
Dynamic device.
The laser and pin hole being fixed on the first high precision displacement platform, under the driving of high precision displacement driver,
Different positions can be accurately moved to, by repeatedly measuring the combination power value under different light source positions, and then are solved
The radius of curvature of detected element is calculated, the influence of the collimation of illuminating bundle so can be effectively eliminated.
To prevent influence of the air draught to measurement, preferably, whole device is sealed with cover.
Second aspect of the present invention provides a kind of accurate measurement super-large curvature radius of application first aspect offer system
Method, is specifically included：
(1) accurate measurement super-large curvature radius system is demarcated due to tested focal length value for from first block of grating to
The distance of focus, by accurately moving measured lens along optical axis, can obtain the accurate standard mirror of multigroup focal length, realize multisystem
Accurate Calibration；
(2) the first high precision displacement platform is driven to be moved to corresponding position using high precision displacement driver, it is to avoid to shine
The influence of the collimation of Mingguang City's beam；
(3) the second high precision displacement platform is driven to be moved to corresponding position using high precision displacement driver, record the
The distance between one grating and the second grating z, the first grating and the second grating grid line angle theta；
(4) Moire fringe image is gathered using imaging system, and Moire fringe image is transmitted to computer；
(5) computer is handled receiving moiré topography picture, determines the angle [alpha] of Moire fringe, and calculating is obtained
The radius of curvature Δ r of detected element；
Wherein, s is the distance between the first grating and detected element optical axis, and r is the radius of detected element, and its value is：
For the cycle P of the first grating1With the cycle P of the second grating2Ratio；
The calculation formula of the angle [alpha] of Moire fringe is：
P′1For the cycle of Taibo picture, according to the enlargement ratio relation of Taibo pictureObtain；
Δ z is z uncertainty, and Δ s is s uncertainty, and Δ θ is θ uncertainty, and Δ α is α uncertainty,
Δ β is β uncertainty.
Preferably, uncertainty Δ z is obtained with uncertainty Δ s by high-precision optical grating ruler measurement, its value is respectively reached
0.1mm and 0.01mm.
Preferably, uncertainty Δ α acquisition methods are：Due to the angle that α is the Moire fringe that computer is calculated,
Using the black and white strip pattern with the angle accurately determined of a precise Printing, adopted by the image of multiple measuring system
Collecting system obtains the image of pattern and calculated with the method for Moire fringe angle calculation, obtains α uncertainty Δ α, its
Value reaches 0.003 °.
Uncertainty Δ θ acquisition methods are：When tested reflecting surface is plane, while the grid line angle of two blocks of gratings is
At 0 degree, the cycle of Morie fringe is infinitely great (image collected is uniform gray-scale map) in theory, with this as the starting point, is led to
The turntable for crossing precision controls the angle of grid line between two blocks of gratings, and the uncertainty of grid line angle is determined by precision rotation platform,
It is possible thereby to obtain θ uncertainty Δ θ, its value reaches 0.003 °.
Preferably, uncertainty Δ β acquisition methods are：Due to ratios of the β for the cycle of two gratings, pass through scanning
The accurate measurement of Electronic Speculum, can accurately obtain β uncertainty Δ β, and its value is 0.00001.
The device of accurate measurement super-large curvature radius of the invention, is combined with most basic optical gauge, simple in construction,
Cost is low, and simple to operate during measurement, can realize the accurate measurement to optical element super-large curvature radius.
Brief description of the drawings
Fig. 1 is first structural representation of the device for the accurate measurement super-large curvature radius applied in embodiment 1；
Fig. 2 is second structural representation of the device for the accurate measurement super-large curvature radius applied in embodiment 1；
Fig. 3 is that device in embodiment 2 shown in application drawing 1 enters and repeatedly measures the tested radius of resolving by the mobile light source of precision
Schematic diagram；
Fig. 4 is that device in embodiment 2 shown in application drawing 2 enters and repeatedly measures the tested radius of resolving by the mobile light source of precision
Schematic diagram.
Embodiment
In order to more specifically describe the present invention, below in conjunction with the accompanying drawings and embodiment is to technical scheme
It is described in detail.
Embodiment 1
As shown in figure 1, the device of the accurate measurement super-large curvature radius of the present embodiment application includes：Radius is 5000m
Detected element, infrared laser, the microcobjective for playing collimating effect, imaging len, pin hole, the cycle ratio of a light splitting are
1.004018 grating 1 and grating 2, CCD, frosted glass plate, computer and the high precision displacement driver for supporting grating 2, it is red
Outer laser is fixed on high precision displacement platform one with pin hole, and grating 2, frosted glass plate and CCD are fixed on high precision displacement
On platform two.
After terminating to accurate measurement super-large curvature radius system calibrating；
First, the first high precision displacement platform is driven to be moved to corresponding position using high precision displacement driver, it is to avoid
The influence of the collimation of illuminating bundle；
Then, drive the second high precision displacement platform to be moved to corresponding position using high precision displacement driver, record
The grid line angle theta that the distance between first grating and the second grating z are 10m, the first grating and the second grating is 0.3 °；
Next, gathering Moire fringe image using imaging system, and Moire fringe image is transmitted to computer；
Finally, computer is handled receiving moiré topography picture, and the angle [alpha] for determining Moire fringe is
37.4813 °, and calculate and obtain the radius of curvature of detected element and be：
Δ r=2*0.1mm (Δ z)+2*0.01mm (Δ s)+24.89m (Δ z)+3.11m (Δ β)+20.67m (Δ θ)+
0.135m (Δ α)=48.80522m
Relative measurement error is：
It can be seen that Δ z, Δ θ, Δ β influence very big to measurement accuracy from above-mentioned analysis.If can reduce Δ z (makes
10 meters of measurement distance uncertainty is less than 0.1mm, strictly controlled environment factor such as temperature humidity, using Reneshaw grating scales
Precision can further be improved).According to the radius of specific measuring cell, further optimization initial parameter is set, such as grating grid
Angle, the parameter such as screen periods ratio, can also further improve measurement accuracy.
The present embodiment can be carried out with the structure shown in application drawing 2 in the measurement of detected element radius, Fig. 2, do not collimated
Lens, and serve light splitting for spectroscope.
Embodiment 2
Using the system described in Fig. 1, by the position of accurate movement light source, take multiple measurements under the light source position of difference
Combination power value, principle schematic is as shown in Figure 3.
Because the light that laser is sent is constantly present certain focal power after colimated light system, it is impossible to accomplish preferably
Directional light.Assuming that this focal power isThe focal length for the tested surface that tested radius is R is R/2, then combines focal powerFor：
Wherein d is the distance between colimated light system equivalent lens and measured lens.
Test system initial position is debugged, and light source is placed near collimation lens focal length.Measured lens are put
Put in measurement position, gather Moire fringe, measure the angle of Moire fringe and calculate measured value R now1；Accurately to reach
Dynamic light source δ1, Moire fringe image is gathered, measured value R now is calculated2；Continue accurate forward movement light source δ2, identical behaviour
Make, gather Moire fringe image, measured value R3 now is calculated by computer.
According to set imaging formula, Wo Menyou：
U expression things are away from v1、v2、v3The image distance under three kinds of states is represented, by above-mentioned various calculating, measured lens are obtained
Radius R.
The present embodiment can be taken multiple measurements not with position of the structure shown in application drawing 2 by accurate movement light source
With the combination power value under spot light position, principle schematic is as shown in Figure 4.
Technical scheme and beneficial effect are described in detail above-described embodiment, Ying Li
Solution is to the foregoing is only presently most preferred embodiment of the invention, is not intended to limit the invention, all principle models in the present invention
Interior done any modification, supplement and equivalent substitution etc. are enclosed, be should be included in the scope of the protection.
Claims (4)
1. a kind of device of accurate measurement super-large curvature radius, it is characterised in that including；
Detected element, light source；
Spectroscope, inclination is placed between detected element and light source, and the illumination for light source to be sent is mapped to detected element surface, will
The reflected light back of detected element reflection is on the first grating and the second grating；
First grating and the second grating；For under the irradiation of reflected parallel light, the Thailand that the first grating is produced at the second grating
Uncle with the second grating as forming Moire fringe；
Imaging system；For gathering Moire fringe image, and transmit it to computer；
Computer；The angle of Moire fringe is determined for handling Moire fringe image, and then calculates the curvature for obtaining detected element
Radius.
2. the device of accurate measurement super-large curvature radius as claimed in claim 1, it is characterised in that described device is also wrapped
Include：Transmitting light between spectroscope and light source and for light source to be sent becomes the collimation lens of directional light.
3. the device of accurate measurement super-large curvature radius as claimed in claim 1, it is characterised in that described device is also wrapped
Include：For adjusting the pin hole in light emission direction, the first high precision displacement platform for fixed laser and pin hole, for solid
Second high precision displacement platform of fixed second grating and imaging system and for driving the first high precision displacement platform and second
The high precision displacement driver of high precision displacement platform movement.
4. a kind of method of the accurate measurement super-large curvature radius of system described in application claim 1 or 3, is specifically included：
(1) accurate measurement super-large curvature radius system is demarcated, because tested focal length value is from first block of grating to Jiao
The distance of point, by accurately moving measured lens along optical axis, can obtain the accurate standard mirror of multigroup focal length, realize multisystem
Accurate Calibration；
(2) the first high precision displacement platform is driven to be moved to corresponding position using high precision displacement driver, it is to avoid illumination light
The influence of the collimation of beam；
(3) drive the second high precision displacement platform to be moved to corresponding position using high precision displacement driver, record the first light
The distance between grid and the second grating z, the first grating and the second grating grid line angle theta；
(4) Moire fringe image is gathered using imaging system, and Moire fringe image is transmitted to computer；
(5) computer is handled receiving moiré topography picture, determines the angle [alpha] of Moire fringe, and calculating is tested
The radius of curvature Δ r of element；
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Δ z is z uncertainty, and Δ s is s uncertainty, and Δ θ is θ uncertainty, and Δ α is α uncertainty, and Δ β is
β uncertainty.
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| CN108317988A (en) * | 2018-04-19 | 2018-07-24 | 南京腾元软磁有限公司 | Sample thickness in-situ measurement method based on transmission electron microscope surface imaging |
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| CN109945803A (en) * | 2019-04-19 | 2019-06-28 | 北京理工大学 | Laterally subtract each other laser differential confocal cylindrical curvature radius measurement method |
| CN109990732A (en) * | 2019-04-19 | 2019-07-09 | 北京理工大学 | Laterally subtract each other differential confocal curvature radius measurement method |
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