CN109883356A - Bilateral dislocation differential confocal parabola vertex curvature radius measurement method - Google Patents
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Abstract
The invention belongs to technical field of optical precision measurement, are related to a kind of bilateral dislocation differential confocal parabola vertex curvature radius measurement method.This method subtracts each other processing by the confocal characteristic transverse direction of large and small dummy pinhole to sharpen confocal resonse characteristic, the differential differential confocal bipolarity fixed-focus handled to realize measured surface of subtracting each other of bilateral dislocation by sharpening confocal resonse characteristic measures, focal position acquisition accuracy is promoted by the linear fit of differential confocal fixed-focus curve, and then the Focus accuracy on lens surface vertex and focal position in parabola vertex radius of curvature measurement is improved, to realize the high-acruracy survey of parabola vertex radius of curvature.The slope for laterally subtracting each other the Intensity response curve near zero-crossing point of bilateral dislocation differential confocal in the present invention is greater than traditional differential confocal Intensity response curve, significantly improves measuring system Focus accuracy.This method has the advantages such as measurement accuracy is high, environment resistant interference performance is strong and structure is simple.
Description
Technical field
The invention belongs to technical field of optical precision measurement, and it is bent to be related to a kind of bilateral dislocation differential confocal parabola vertex
Rate radius measurement method can be used for the high-precision detection of parabola vertex radius of curvature.
Background technique
Focus accuracy is the principal element for influencing parabola vertex radius of curvature measurement, and traditional measurement method is by diffraction pole
The limitation of limit can not continue the fixed-focus ability for improving light beam.The present invention is fixed using the raising of confocal laser fixed-focus method is laterally subtracted each other
Pyrogene degree, to realize the high-acruracy survey of paraboloidal curvature radius and parabola vertex radius of curvature.
Paraboloid can be reflected into collimated light beam for the point light source for being located at its focus is aberrationless, thus it applies pole to be a kind of
For extensive non-spherical lens.Have in reflective astronomical telescope, earth observation imaging, long distance illumination lamp optical system
It is widely applied.Paraboloidal radius of curvature determine light beam warp as its basic parameter after focal position, curvature half
Diameter value is also whether paraboloid processing meets one of key index of design parameter, so to paraboloidal mirror vertex curvature radius
High-acruracy survey has great importance.
It is at present mainly contact and contactless two class for the vertex curvature radius measurement of paraboloidal mirror.Contact
Measurement method is by being fitted parabolic surface profile in parabolic surface coordinate acquisition information, so that tested paraboloid is sought in fitting
Vertex curvature radius.Contact method advantage is that structure is relatively easy, smaller by environmental disturbances, is measuring small radius of curvature
When measurement reproducibility it is good.But this method is easy to scratch measured surface, and measurement accuracy is rapid with the increase of tested curvature
Decline；Since it is desired that acquiring compared with multi-point sampling in measured surface so measuring speed is slow.
Non-contact measurement method mainly has interferometry, Ray-tracing Method etc..Ray-tracing Method by solve incident ray and
The equation of reflection light acquires parabolic surface normal equation to calculate tested parabola vertex radius of curvature value, but it is surveyed
Accuracy of measurement only has 0.5%.Interferometric method is by obtaining aspherical interference pattern, to aspherical each annulus centre of radius
It is resolved, aspherical vertex curvature radius value is acquired according to each center of curvature spacing.Paraboloidal curvature based on principle of interference
Radius measurement method measurement accuracy increases, but optical interference circuit is complicated, and interference fringe is easy by air-flow, vibration etc.
The influence of environmental factor limits its development and application.
And the slope of curve that the transverse direction in the present invention subtracts each other the Intensity response curve near zero-crossing point of confocal laser is greater than biography
Altogether burnt Intensity response curve, thus fixed-focus high sensitivity, measurement accuracy are improved；This external application paraboloid can will converge at it
Tested paraboloidal mirror is added in the optical path and forms autocollimatic straight light path for the characteristics of beam collimation of focus is collimated light beam, then by cross
To the zero crossing for subtracting each other confocal laser Intensity response curve come to being tested the accurate fixed-focus of paraboloidal surface vertices and focal position,
To realize parabola vertex radius of curvature measurement.
In order to further increase the precision of parabola vertex radius of curvature measurement, present invention further proposes a kind of bilateral
Misplace differential confocal parabola vertex curvature radius measurement method, and this method is in confocal measuring system, first in CCD detection
Large and small dummy pinhole search coverage is arranged by software on Ai Li spot image and the two confocal characteristic curves detected pass through
Subtract each other processing to sharpen confocal characteristic curve, then will sharpen differential subtract each other of the bilateral dislocation of confocal characteristic curve progress and handle
To axial highly sensitive differential confocal characteristic curve, the bilateral dislocation differential confocal characteristic curve zero point and focus are finally recycled
It accurately corresponds to this characteristic and position is sought to each feature locations of tested paraboloidal mirror progress high-precision fixed-focus, to promote parabola vertex
Focus accuracy in radius of curvature measurement, and then improve the precision of parabola vertex radius of curvature measurement.
Summary of the invention
The purpose of the present invention is to solve the not high problems of parabola vertex radius of curvature measurement precision, provide a kind of double
Side dislocation differential confocal parabola vertex curvature radius measurement method；The core concept of this method is: in confocal measurement optical path system
In system, processing is subtracted each other by the confocal characteristic transverse direction of large and small dummy pinhole to sharpen confocal resonse characteristic, by sharp
The differential differential confocal bipolarity fixed-focus handled to realize measured surface of subtracting each other of bilateral dislocation for changing confocal resonse characteristic is surveyed
Amount promotes focal position acquisition accuracy by the linear fit of differential confocal fixed-focus curve, and then it is bent to improve parabola vertex
The Focus accuracy of surface vertices and focal position in rate radius measurement, to realize that the high-precision of parabola vertex radius of curvature is surveyed
Amount.
The purpose of the present invention is what is be achieved through the following technical solutions.
Bilateral dislocation differential confocal parabola vertex curvature radius measurement method, comprising the following steps:
A) point light source is opened, the light issued forms after beam splitter, collimation lens and measurement object lens and focuses measuring beam,
It is irradiated on tested paraboloidal mirror after the transmission of subsidiary plane mirror；
B) adjusting tested paraboloidal mirror makes itself and subsidiary plane mirror, measurement object lens and collimation lens common optical axis, makes standard
The collimated light beam of straight lens outgoing pools measuring beam through measuring object lens, is radiated at tested paraboloid through subsidiary plane mirror
On mirror, the focusing measuring beam of paraboloidal mirror surface reflection is tested again through subsidiary plane mirror, measurement object lens and collimation lens
It is reflected into afterwards by beam splitter to lateral and subtracts each other confocal detection system；
C) tested paraboloidal mirror is moved along optical axis direction, makes to focus the focus of measuring beam and the focus of tested paraboloidal mirror
Position is overlapped；Tested paraboloidal mirror is nearby scanned in the position, will laterally subtract each other big dummy pinhole detection in confocal detection system
The confocal characteristic curve I of big dummy pinhole that domain and small dummy pinhole detection domain separately detectB(z) and the confocal characteristic of small dummy pinhole
Curve IS(z) it carries out subtracting each other handling and obtains the confocal characteristic curve I (z) of sharpening=I of halfwidth compressionS(z)-γIB(z), wherein z
For axial coordinate, γ is regulatory factor；
D) sharpening confocal characteristic curve, transversely coordinate translation S obtains the confocal characteristic curve of translation sharpening, and makes to sharpen
Confocal characteristic curve and translation sharpen confocal characteristic side and cross, and sharpen to the confocal characteristic curve of sharpening and translation confocal
After characteristic curve carries out the processing of same abscissa point interpolation respectively, then is subtracted each other processing point by point and obtain dislocation and subtract each other differential confocal spy
Linearity curve ID(z)=I (z)-I (z ,-S) subtracts each other differential confocal characteristic curve to dislocation using differential confocal linear fit straight line
Linear segment data carry out straight line fitting, it is quasi- by the differential confocal for reversely moving back the position differential confocal linear fit straight line S/2
The displacement fitting a straight line zero point of straight line is closed accurately to determine that converging measuring beam fixed-focus is overlapped with the focus of tested paraboloidal mirror, into
And determine tested paraboloidal mirror position Z1；
E) continue to move towards tested paraboloidal mirror along the optical axis direction of measurement object lens, make the focus of measuring beam and be tested
The surface vertices of paraboloidal mirror are overlapped；Tested paraboloidal mirror is nearby scanned in the position, is led to by laterally subtracting each other confocal detection system
It crosses the measurement Airy that measures of processing and obtains sharpening and carry out bilateral dislocation again after confocal characteristic curve and subtract each other processing obtaining and measure
Differential confocal characteristic curve is subtracted each other in corresponding second dislocation of object focal point, main control computer according to d) the step of by the second mistake
Subtract each other differential confocal characteristic curve progress linear fit, fitting a straight line return and determine that return fitting a straight line zero point is come accurately really in position
Surely the surface vertices position of tested paraboloidal mirror, record are tested the position Z of paraboloidal mirror at this time2；
F) the radius of curvature r=2 (Z of tested paraboloidal mirror is calculated1-Z2), vertex focal length is f=Z1-Z2。
Bilateral dislocation differential confocal parabola vertex curvature radius measurement method of the present invention, by laterally subtracting each other altogether
Burnt detection system obtains sharpening confocal characteristic process as follows:
A) in tested paraboloidal mirror scanning process, measurement Airy is detected by ccd detector, to measure Airy
Centered on center of gravity, the big dummy pinhole that particular size is selected on the every frame detection image of ccd detector detects domain, will needle virtual greatly
Intensity in the detection domain of hole in each pixel is integrated, and obtains the confocal characteristic curve of big dummy pinhole；
B) simultaneously centered on the measurement Airy center of gravity of ccd detector detection, another small dummy pinhole detection is selected
Domain, the size in the small dummy pinhole detection domain are less than the big dummy pinhole and detect domain, integrate small dummy pinhole detection domain
Intensity obtains the confocal characteristic curve of small dummy pinhole, and the confocal characteristic halfwidth of small dummy pinhole and peak strength are below
The confocal characteristic curve of big dummy pinhole；
C) by the confocal characteristic curve of big dummy pinhole multiplied by regulatory factor γ, so that the confocal characteristic curve light of big dummy pinhole
It is confocal characteristic 1/2 times of small dummy pinhole by force；
D) the confocal characteristic curve of small dummy pinhole is subtracted bent multiplied by the confocal characteristic of big dummy pinhole after regulatory factor γ
Line obtains sharpening confocal characteristic curve.
Beneficial effect
1) it proposes to detect laterally to subtract each other using large and small dummy pinhole in confocal measuring system to sharpen confocal characteristic curve,
Subtract each other the differential confocal bipolarity handled to realize measured surface using the bilateral dislocation for sharpening confocal resonse characteristic is differential
Fixed-focus measurement, and then fixed-focus sensitivity and the signal-to-noise ratio of differential confocal fixed-focus curve are significantly improved, make parabola vertex curvature
Radius measurement system has higher measurement accuracy.
2) compared to differential confocal measuring device, the present invention improves measurement essence in the case where not increasing hardware cost
Degree.
3) measurement method laterally subtracts each other processing detection by the virtual hot spot detecting area of size, effectively eliminates common-mode noise,
Improve the environment resistant interference performance of measuring system.
4) interfere parabola vertex curvature radius measurement method compared to classical high-precision, this method is due to using non-dry
Airy center intensity " point detection " mode related to, it is dry to system aberration, ambient vibration, air-flow to overcome existing interference fixed-focus method
It disturbs extremely sensitive insufficient with sample surfaces roughness, anti-system aberration, environmental disturbances and the energy of surface scattering greatly improved
Power is remarkably improved parabola vertex radius of curvature measurement precision.
Detailed description of the invention
Fig. 1 is the bilateral dislocation differential confocal reflective parabola vertex curvature radius measurement method schematic diagram of the present invention；
Fig. 2 is that the confocal characteristic curve of size dummy pinhole of the present invention laterally subtracts each other sharpening schematic diagram；
Fig. 3, which is that the confocal bilateral dislocation of characteristic curve of present invention sharpening is differential, subtracts each other schematic diagram；
Fig. 4 is the bilateral dislocation differential confocal curve linear fitting triggering fixed-focus schematic diagram of the present invention；
Fig. 5 is the bilateral dislocation differential confocal reflective parabola vertex curvature radius instrumentation plan of the embodiment of the present invention.
Wherein: 1- point light source, 2- beam splitter, 3- collimation lens, 4- measurement object lens, 5- focus the tested throwing of measuring beam, 6-
It is virtual greatly that object plane mirror, 7- laterally subtract each other confocal detection system, 8- microcobjective, 9-CCD detector, 10- measurement Airy, 11-
Pin hole detects domain, the small dummy pinhole of 12- detects domain, the confocal characteristic curve of the big dummy pinhole of 13-, the confocal spy of the small dummy pinhole of 14-
It is bent that linearity curve, 15- sharpen confocal characteristic curve, 16- translation sharpens confocal characteristic curve, differential confocal characteristic is subtracted each other in 17- dislocation
Line, 18- differential confocal linear fit straight line, 19- fitting a straight line zero point, 20- return differential confocal fitting a straight line, 21- displacement are quasi-
Close straight line zero point, differential confocal characteristic curve, 23- image capturing system, 24- main control computer, 25- are subtracted each other in the dislocation of 22- second
The axially measured kinematic system of multichannel motor driven systems, 26-, 27- five tie up adjustment system, 28- laser, 29- microcobjective,
30- pin hole, 31- subsidiary plane mirror.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The present invention realizes lens paraboloid using bilateral dislocation differential confocal parabola vertex curvature radius measurement method
The high-acruracy survey of vertex curvature radius, core concept: lateral by large and small dummy pinhole in differential confocal measurement system
Subtract each other detection to sharpen confocal characteristic curve, differential subtract each other of bilateral dislocation by sharpening confocal resonse characteristic handles detection
It realizes the high-precision fixed-focus of paraboloidal mirror surface vertices and focal position in parabola vertex radius of curvature measurement, and then reaches
Improve the purpose of parabola vertex radius of curvature measurement precision.
Embodiment 1:
As shown in Fig. 5, the measuring process of bilateral dislocation differential confocal parabola vertex curvature radius measurement method is:
1) Survey Software for starting main control computer 24, opens laser 28, and the light that laser 28 issues passes through micro- object
Point light source 1 is formed after mirror 29 and pin hole 30；
2) adjusting tested paraboloidal mirror 6 makes itself and subsidiary plane mirror 31, measurement object lens 4 and 3 common optical axis of collimation lens,
The light that point light source 1 issues is emitted collimated light beam after beam splitter 2, collimation lens 3, and collimated light beam pools poly- through measurement object lens 4
Burnt measuring beam 5 is radiated on tested paraboloidal mirror 6 after penetrating subsidiary plane mirror 31, anti-by tested 6 surface of paraboloidal mirror
The focusing measuring beam 5 penetrated is divided after subsidiary plane mirror (31), measurement object lens (4) and collimation lens (3) transmission again
Beam mirror 2, which is reflected into, laterally subtracts each other confocal detection system 7, and the Survey Software in main control computer 24 passes through Image Acquisition system
System 23 is obtained by the collected measurement Airy 10 of ccd detector 9；
3) tested paraboloidal mirror 6 is moved along optical axis direction, makes the focus for focusing measuring beam 5 and tested paraboloidal mirror 6
Focal position is overlapped, and tested paraboloidal mirror 6 is scanned near focal position, will laterally be subtracted each other big virtual in confocal detection system 7
Pin hole detects the confocal characteristic curve 13I of big dummy pinhole that domain 11 detectsB(z) being detected with small dummy pinhole detection domain 12 and small
The confocal characteristic curve 14I of dummy pinholeS(z) it carries out subtracting each other processing, obtains the confocal characteristic curve 15I of sharpening of halfwidth compression
(z)=IS(z)-γIB(z), wherein z is axial coordinate, and γ is regulatory factor；
Greatly/confocal characteristic process of small dummy pinhole detection domain detection is: measuring before ccd detector 9 detects coke
A concentric circles domain is chosen on every frame image of Airy 10, and each pixel light intensity in great circle domain is integrated to obtain one
Confocal intensity response curve IB(z), a confocal intensity response curve I is obtained to each pixel light majorant for integral in roundlet domainS
(z), then by IB(z) and IS(z) it carries out subtracting each other processing to obtain laterally subtracting each other confocal response curve I (z, uM)=IS(z,uM)-γ
IB(z,uM), change regulatory factor γ and realizes confocal characteristic optimization.
4) great circle domain diameter chooses 11 pixels in the present embodiment, and roundlet domain diameter chooses 5 pixels, takes γ=0.5, main
The Survey Software of control computer 24 will subtract each other the confocal characteristic curve 15 of sharpening that processing obtains, and transversely coordinate translation S is translated
Confocal characteristic curve 16 is sharpened, and the side for sharpening confocal characteristic curve 15 and the confocal characteristic curve 16 of translation sharpening is made to cross,
After carrying out same abscissa point interpolation processing respectively to the confocal characteristic curve of sharpening 15 and the confocal characteristic curve 16 of translation sharpening, then into
Row point by point subtract each other processing obtain dislocation subtract each other differential confocal characteristic curve 17ID(z)=I (z)-I (z ,-uS)。
5) the linear segment data that the Survey Software of main control computer 24 subtracts each other differential confocal characteristic curve 17 to dislocation carries out
Straight line fitting obtains differential confocal linear fit straight line 18, recycles reversed return 18S/2, differential confocal linear fit straight line
The displacement fitting a straight line 0. 21 of the differential confocal fitting a straight line 20 of shifting come determine convergence measuring beam 5 focus on tested paraboloid
The surface location of mirror 6, and then the focal position of accurate fixed-focus measurement object lens 4, record are tested the position Z of paraboloidal mirror 6 at this time1=
0.0158mm。
6) main control computer 24 passes through the five dimension adjustment of multichannel motor driven systems 25 and the control of axially measured kinematic system 26
The optical axis direction that system 27 continues edge measurement object lens 4, which moves towards tested paraboloidal mirror 6, to be made the focus of measuring beam 5 and is tested to throw
When the surface vertices of object plane mirror 6 are overlapped, main control computer 24 controls the scanning nearby in the position of tested paraboloidal mirror 6, equally by
Laterally subtract each other confocal detection system 7 to obtain carrying out again after sharpening confocal characteristic curve 15 by the measurement Airy 10 that processing measures
Bilateral dislocation subtract each other processing obtain it is corresponding with tested 6 surface vertices of paraboloidal mirror second dislocation subtract each other differential confocal characteristic curve
22, main control computer 24 by above-mentioned the 5) the step of carried out again linearly by subtracting each other differential confocal characteristic curve 22 to the second dislocation
Fitting, fitting a straight line return and return fitting a straight line zero point determine etc. come accurately determine be tested paraboloidal mirror 6 surface vertices position
It sets, record is tested the position Z of paraboloidal mirror 6 at this time2=-27.2589mm.
7) the distance between tested 6 two positions of paraboloidal mirror Z is calculated1-Z2=-27.2747mm, then 27.2747mm is quilt
The parabola vertex focal length of paraboloidal mirror 6 is surveyed, 27.2747mm × 2=54.5494mm is its vertex curvature radius value.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (2)
1. bilateral dislocation differential confocal parabola vertex curvature radius measurement method, it is characterised in that the following steps are included:
A) point light source (1) is opened, the light issued is formed after beam splitter (2), collimation lens (3) and measurement object lens (4) and focused
Measuring beam (5) is radiated on tested paraboloidal mirror (6) through subsidiary plane mirror (31)；
B) adjusting tested paraboloidal mirror (6) keeps it total with subsidiary plane mirror (31), measurement object lens (4) and collimation lens (3)
Optical axis, make collimation lens (3) be emitted collimated light beam through measure object lens (4) pool focus measuring beam (5) and be radiated at by
It surveys on paraboloidal mirror (6), is tested the focusing measuring beam (5) of paraboloidal mirror (6) surface reflection again through subsidiary plane mirror
(31), measurement object lens (4) and collimation lens (3) after by beam splitter (2) be reflected into transverse direction subtract each other confocal detection system (7)；
C) tested paraboloidal mirror (6) are moved along optical axis direction, makes the focus of measuring beam (5) and the coke of tested paraboloidal mirror (6)
Point position is overlapped；It scans tested paraboloidal mirror (6), will laterally subtract each other big empty in confocal detection system (7) near focal position
The confocal characteristic curve of big dummy pinhole (13) I of quasi- pin hole detection domain (11) detectionB(z) and small dummy pinhole detects domain (12)
The confocal characteristic curve of small dummy pinhole (14) I detectedS(z) it carries out subtracting each other processing, the sharpening for obtaining halfwidth compression is confocal
Characteristic curve (15) I (z)=IS(z)-γIB(z), wherein z is axial coordinate, and γ is regulatory factor；
D) sharpening confocal characteristic curve (15), transversely coordinate translation S obtains the confocal characteristic curve (16) of translation sharpening, and makes
The side for sharpening confocal characteristic curve (15) and the confocal characteristic curve (16) of translation sharpening crosses；To the confocal characteristic curve of sharpening
(15) it is sharpened after confocal characteristic curve (16) carries out same abscissa point interpolation processing respectively with translation, then is subtracted each other processing point by point
It obtains dislocation and subtracts each other differential confocal characteristic curve (17) ID(z)=I (z)-I (z ,-S) utilizes differential confocal linear fit straight line
(18) the linear segment data for subtracting each other differential confocal characteristic curve (17) to dislocation carries out straight line fitting, differential total by reversely moving back
The displacement fitting a straight line zero point (21) of the return differential confocal fitting a straight line (20) of focal line fitting a straight line (18) position S/2 is come smart
It determines that convergence measuring beam (5) fixed-focus is overlapped with the focus of tested paraboloidal mirror (6), and then determines tested paraboloidal mirror (6)
Position Z1；
E) continue to move towards tested paraboloidal mirror (6) along the optical axis direction of measurement object lens (4), make the focus of measuring beam (5)
It is overlapped with the surface vertices of tested paraboloidal mirror (6)；Tested paraboloidal mirror (6) are nearby scanned in the position, by laterally subtracting each other altogether
Burnt detection system (7) obtain sharpening by the measurement Airy (10) that measures of processing carried out after confocal characteristic curve (15) again it is bilateral
Dislocation subtract each other processing obtain with measurement object lens (4) focus it is corresponding second dislocation subtract each other differential confocal characteristic curve (22), repeatedly
Step d), main control computer (24) carry out linear fit, fitting by subtracting each other differential confocal characteristic curve (22) to the second dislocation
Straight line return determines return fitting a straight line zero point, and then the accurate surface vertices position for determining tested paraboloidal mirror (6), record
It is tested the position Z of paraboloidal mirror (6) at this time2；
F) tested paraboloidal mirror (6) radius of curvature r=2 (Z is calculated1-Z2), vertex focal length is f=Z1-Z2。
2. bilateral dislocation differential confocal parabola vertex curvature radius measurement method according to claim 1, feature exist
In: by laterally subtract each other confocal detection system (7) obtain sharpening confocal characteristic curve (15) process it is as follows:
A) in tested paraboloidal mirror (6) scanning process, measurement Airy (10) is detected by ccd detector (9), to measure Chinese mugwort
In spot (10) center of gravity centered on, selected on the every frame detection image of ccd detector (9) a certain size big dummy pinhole detection
The intensity that big dummy pinhole detects in domain (11) in each pixel is integrated, obtains the confocal spy of big dummy pinhole by domain (11)
Linearity curve (13)；
B) simultaneously centered on measurement Airy (10) center of gravity of ccd detector (9) detection, another small dummy pinhole is selected to visit
It surveys domain (12), the size of small dummy pinhole detection domain (12) is less than big dummy pinhole detection domain (11), integrates small void
The intensity of quasi- pin hole detection domain (12) obtains the confocal characteristic curve of small dummy pinhole (14), the small confocal characteristic curve of dummy pinhole
(14) halfwidth and peak strength is below the confocal characteristic curve of big dummy pinhole (13)；
C) by the confocal characteristic curve of big dummy pinhole (13) multiplied by regulatory factor γ, so that the confocal characteristic curve of big dummy pinhole
(13) light intensity is 1/2 times of the confocal characteristic curve of small dummy pinhole (14)；
D) the confocal characteristic curve of small dummy pinhole (14) is subtracted bent multiplied by the confocal characteristic of big dummy pinhole after regulatory factor γ
Line (13) obtains sharpening confocal characteristic curve (15).
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