CN109883357A - Laterally subtract each other differential confocal parabola vertex curvature radius measurement method - Google Patents
Laterally subtract each other differential confocal parabola vertex curvature radius measurement method Download PDFInfo
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Abstract
The invention belongs to technical field of optical precision measurement, it is related to a kind of transverse direction and subtracts each other differential confocal parabola vertex curvature radius measurement method.The hot spot that two-way detector defocused before coke in differential confocal detector detects is respectively adopted different size dummy pinhole and laterally subtract each other the transverse direction after being sharpened and subtract each other confocal response curve by this method, it obtains laterally subtracting each other differential confocal response curve after two-way laterally subtracts each other to confocal response curve is differential subtracting each other, surface vertices and the focal position that tested paraboloidal mirror is accurately determined according to the zero crossing for laterally subtracting each other differential confocal response curve, obtain the exact value of tested paraboloidal mirror vertex curvature diameter.The slope for laterally subtracting each other the Intensity response curve near zero-crossing point of laser differential confocal in the present invention is greater than traditional differential confocal Intensity response curve, thus fixed-focus high sensitivity, measurement accuracy are improved；And environment resistant interference performance is strong.This method measurement accuracy is high, and environment resistant interference performance is strong.
Description
Technical field
The invention belongs to technical field of optical precision measurement, being related to a kind of transverse direction, to subtract each other differential confocal parabola vertex bent
Rate radius measurement method can be used for the high-precision detection of parabola vertex radius of curvature and focal length.
Background technique
Focus accuracy is the principal element for influencing paraboloidal curvature radius and focometry, and traditional measurement method is by diffraction
The limitation of the limit can not continue the fixed-focus ability for improving light beam.The present invention subtracts each other laser differential confocal fixed-focus method using lateral
Focus accuracy is improved, to realize the high-acruracy survey of paraboloidal curvature radius and focal length.
Paraboloid can be reflected into collimated light beam for the point light source for being located at its focus is aberrationless, thus it applies pole to be a kind of
For extensive non-spherical lens.Have in reflective astronomical telescope, earth observation imaging, long distance illumination lamp optical system
It is widely applied.Paraboloidal radius of curvature determine light beam warp as its basic parameter after focal position, curvature half
Diameter value is also whether paraboloid processing meets one of key index of design parameter, so to paraboloidal mirror vertex curvature radius
High-acruracy survey has great importance.
It is at present mainly contact and contactless two class for the vertex curvature radius measurement of paraboloidal mirror.Contact
Measurement method is by being fitted parabolic surface profile in parabolic surface coordinate acquisition information, so that tested paraboloid is sought in fitting
Vertex curvature radius.Contact method advantage is that structure is relatively easy, smaller by environmental disturbances, is measuring small radius of curvature
When measurement reproducibility it is good.But this method is easy to scratch measured surface, and measurement accuracy is rapid with the increase of tested curvature
Decline；Since it is desired that acquiring compared with multi-point sampling in measured surface so measuring speed is slow.
Non-contact measurement method mainly has interferometry, Ray-tracing Method etc..Ray-tracing Method by solve incident ray and
The equation of reflection light acquires parabolic surface normal equation to calculate tested parabola vertex radius of curvature value, but it is surveyed
Accuracy of measurement only has 0.5%.Interferometric method is by obtaining aspherical interference pattern, to aspherical each annulus centre of radius
It is resolved, aspherical vertex curvature radius value is acquired according to each center of curvature spacing.Paraboloidal curvature based on principle of interference
Radius measurement method measurement accuracy increases, but optical interference circuit is complicated, and interference fringe is easy by air-flow, vibration etc.
The influence of environmental factor limits its development and application.
And the slope of curve that the transverse direction in the present invention subtracts each other the Intensity response curve near zero-crossing point of laser differential confocal is big
In the confocal Intensity response curve of conventional differential, thus fixed-focus high sensitivity, measurement accuracy are improved；This external application paraboloid can incite somebody to action
Plane mirror is added in the optical path and forms autocollimatic straight light path for the characteristics of beam collimation for converging at its focus is collimated light beam,
Again by subtracting each other the zero crossing of laser differential confocal Intensity response curve laterally come to being tested paraboloidal surface vertices and focus position
Accurate fixed-focus is set, to realize the high-acruracy survey of parabola vertex radius of curvature and focal length.
Summary of the invention
The purpose of the present invention is to solve the not high problems of parabola vertex radius of curvature measurement precision, provide a kind of cross
To differential confocal parabola vertex curvature radius measurement method is subtracted each other, this method is in differential confocal measurement system, by large and small
Dummy pinhole subtracts each other detection laterally to sharpen the confocal characteristic curve of defocus detection light path system, by double light path detection it is burnt before and
The defocused confocal characteristic differential differential confocal bipolarity fixed-focus handled to realize measured surface of subtracting each other of sharpening measures, and passes through
The linear fit of differential confocal fixed-focus curve promotes focal position acquisition accuracy, and then realizes parabola vertex radius of curvature
High-acruracy survey.
The purpose of the present invention is what is be achieved through the following technical solutions.
Laterally subtract each other differential confocal parabola vertex curvature radius measurement method, comprising the following steps:
A) point light source is opened, the light issued shape after beam splitter, collimation lens, measurement object lens and plane half-reflecting half mirror
It is radiated on tested paraboloidal mirror at measuring beam；
B) adjusting tested paraboloidal mirror and plane half-reflecting half mirror makes itself and collimation lens and measurement object lens common optical axis, measurement
The collimated light beam that collimation lens is emitted is pooled measuring beam and is radiated on tested paraboloidal mirror by object lens, by being tested paraboloidal mirror
Reflected light is reflected collimation lens by beam splitter by measurement object lens, and the light beam of reflection is focused to measurement hot spot, and by
Laterally subtract each other the detection of differential confocal detection system；
C) tested paraboloidal mirror is moved along optical axis direction, makes the focus of measuring beam and tested paraboloidal mirror vertex position weight
It closes；Tested paraboloidal mirror is nearby scanned in the position, will laterally be subtracted each other Jiao Qian great dummy pinhole in differential confocal detection system and is visited
The Jiao Qian great dummy pinhole for surveying domain detection detects confocal characteristic curve IB1(z,-uM) and Jiao Qian little dummy pinhole detection domain detection
Confocal characteristic curve I is detected with Jiao Qian little dummy pinholeS1(z,-uM) carry out subtracting each other processing, obtain cross before the coke of halfwidth compression
Confocal characteristic curve I is sharpened to subtracting each other1(z,-uM)=IS1(z,-uM)-γIB1(z,-uM), it will laterally subtract each other differential confocal detection
The defocused big dummy pinhole of defocused big dummy pinhole detection domain detection detects confocal characteristic curve I in systemB2(z,+uM) and it is defocused
The defocused small dummy pinhole of small dummy pinhole detection domain detection detects confocal characteristic curve IS2(z,+uM) carry out subtracting each other processing, it obtains
The defocused transverse direction compressed to halfwidth, which is subtracted each other, sharpens confocal characteristic curve I2(z,+uM)=IS2(z,+uM)-γIB2(z,+uM),
Middle z is axial coordinate, and γ is regulatory factor, uMDeviate the normalizing of microcobjective focal plane distance M before coke for ccd detector before coke
Change distance and defocused ccd detector deviates the normalized cumulant of defocused microcobjective focal plane distance M；By defocused lateral phase
Subtract and sharpens confocal characteristic curve I2(z,+uM) and it is burnt before laterally subtract each other and sharpen confocal characteristic curve I1(z,-uM) carry out differential phase
Subtract, axial highly sensitive discrete transverse direction can be obtained and subtract each other differential confocal characteristic curve ID(z):
ID(z)=I2(z,+uM)-I1(z,-uM) (1)
Subtract each other differential confocal characteristic curve I by discrete transverse directionD(z) fitting a straight line zero point determines measurement converging beam
Accurate fixed-focus accurately determines the focal position of measuring beam in the first fixed-focus surface vertices position of tested paraboloidal mirror
Z1；
D) continue to move tested paraboloidal mirror along the direction of optical axis direction measurement object lens, make the focus and tested throwing of measuring beam
The focal position of object plane mirror is overlapped, and measuring beam is formed collimated light beam after tested parabolic reflector at this time, and directional light is by plane
Lateral differential confocal detection system of subtracting each other is reflected into through tested paraboloidal mirror after half-reflecting half mirror reflection to be detected.In the position
Tested paraboloidal mirror is nearby scanned, discrete transverse direction is measured by laterally subtracting each other differential confocal detection system to subtract each other differential confocal characteristic bent
Line, main control computer is by the fitting a straight line zero point of differential confocal linear fit straight line come the accurate focus position for determining measurement object lens
Set Z2, record the position Z for being tested paraboloidal mirror at this time2；
E) the radius of curvature r=2 (Z of tested paraboloidal mirror is calculated1-Z2), focal length f=Z1-Z2。
The present invention laterally subtracts each other differential confocal parabola vertex curvature radius measurement method, by laterally subtracting each other differential confocal
Detection system laterally subtracts each other the confocal characteristic curve of sharpening before obtaining coke and defocused transverse direction subtracts each other the confocal characteristic process of sharpening
It is as follows:
A) in tested paraboloidal mirror scanning process, through the burnt preceding measurement Airy of ccd detector detection before coke, before coke
Centered on the center of gravity for measuring Airy, the Jiao Qian great for selecting particular size on the every frame detection image of ccd detector before coke is virtual
Pin hole detects domain, the intensity that Jiao Qian great dummy pinhole detects in domain in each pixel is integrated, big virtual needle before must the discharging of the coke
Hole detects confocal characteristic curve；
B) another smaller area is selected centered on measurement Airy center of gravity before the coke that ccd detector before coke detects simultaneously
The Jiao Qian little dummy pinhole in domain detects domain, and the intensity in integral Jiao Qian little dummy pinhole detection domain obtains small virtual needle before another coke
Hole detects confocal characteristic curve, before the confocal characteristic halfwidth of Jiao Qian little dummy pinhole detection and peak strength are below coke
Big dummy pinhole detects confocal characteristic curve；
C) Jiao Qian great dummy pinhole is detected into confocal characteristic curve multiplied by coefficient gamma, so that the detection of Jiao Qian great dummy pinhole is altogether
Burnt characteristic curve light intensity is confocal characteristic 1/2 times of Jiao Qian little dummy pinhole detection；
D) Jiao Qian little dummy pinhole is detected into the Jiao Qian great dummy pinhole detection after confocal characteristic curve subtracts multiplying factor γ
Confocal characteristic curve laterally subtracts each other the confocal characteristic curve of sharpening before obtaining coke.
E) step a)~d is repeated), the defocused measurement Airy that defocused ccd detector detects is handled, same
Confocal characteristic curve is detected to defocused big dummy pinhole and defocused small dummy pinhole detects confocal characteristic curve；Defocused big virtual needle
Hole detects confocal characteristic curve and defocused small dummy pinhole is detected after confocal characteristic curve laterally subtracts each other Edge contrast and is similarly obtained
Defocused transverse direction, which is subtracted each other, sharpens confocal characteristic curve.
Beneficial effect
1) propose to detect laterally to subtract each other using large and small dummy pinhole to sharpen confocal characteristic curve, using before coke, defocused defocus
Confocal characteristic curve and defocused confocal characteristic curve carry out differential processing before detection is burnt to sharpening, and then significantly improve differential total
The fixed-focus sensitivity of burnt fixed-focus curve and signal-to-noise ratio make focal length and radius of curvature measurement system have higher focometry essence
Degree.
2) compared to differential confocal measuring device, measurement accuracy is improved in the case where not increasing hardware cost.
3) the differential spy of defocused two paths of signals before the measurement method laterally subtracts each other by the virtual hot spot detecting area of size and is burnt
It surveys, effectively eliminates common-mode noise, thus there is strong environment resistant interference performance.
4) interfere curvature measurement method compared to classical high-precision, this method is due to using non-interfering Airy center
Intensity " point detection " mode, it is thick to system aberration, ambient vibration, interference in air flow and sample surfaces to overcome existing interference fixed-focus method
Rugosity is extremely sensitive insufficient, and anti-system aberration, environmental disturbances and the ability of surface scattering greatly improved, significantly improve throwing
The measurement accuracy of object plane vertex curvature radius.
Detailed description of the invention
Fig. 1 is the schematic diagram that the present invention laterally subtracts each other differential confocal parabola vertex curvature radius measurement method；
Fig. 2 is that the confocal characteristic curve of size dummy pinhole of the present invention laterally subtracts each other sharpening schematic diagram；
Fig. 3 is that the present invention laterally subtracts each other differential confocal fixed-focus curve synoptic diagram；
Fig. 4 is differential confocal fixed-focus curve linear fitting triggering fixed-focus schematic diagram of the invention；
Fig. 5 is that the present invention laterally subtracts each other differential confocal parabola vertex radius of curvature measurement embodiment schematic diagram.
Wherein: 1- point light source, 2- beam splitter, 3- collimation lens, 4- measured lens, 5- are tested paraboloidal mirror, 6- transverse direction phase
Subtract differential confocal detection system, 7- beam splitter, 8- it is burnt before microcobjective, 9- it is burnt before ccd detector, the defocused microcobjective of 10-,
Measurement Airy, 13- Jiao Qian great dummy pinhole detect domain, 14- Jiao Qian little dummy pinhole before the defocused ccd detector of 11-, 12- are burnt
Detect domain, the defocused measurement Airy of 15-, the defocused big dummy pinhole detection domain 16-, the defocused small dummy pinhole detection domain, 18- 17-
Jiao Qian great dummy pinhole detects confocal characteristic curve, 19- Jiao Qian little dummy pinhole detects confocal characteristic curve, lateral before 20- coke
Subtract each other the defocused big dummy pinhole of the confocal characteristic curve of sharpening, 21- and detects the defocused small dummy pinhole detection of confocal characteristic curve, 22-
The defocused transverse direction of confocal characteristic curve, 23- subtracts each other the confocal characteristic curve of sharpening, 24- laterally subtracts each other differential confocal characteristic curve, 25-
Differential confocal linear fit straight line, 26- fitting a straight line zero point, 27- image capturing system, 28- main control computer, 29- Multi-path electricity
The axially measured kinematic system of machine drive system, 30-, 31- five tie up adjustment system, 32- laser, 33- microcobjective, 34- pin hole,
35- plane half-reflecting half mirror.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The present invention realizes parabola vertex using laterally differential confocal parabola vertex curvature radius measurement method is subtracted each other
Core concept: the high-acruracy survey of radius of curvature in differential confocal measurement system, is laterally subtracted each other by large and small dummy pinhole
Detection detects realization parabola vertex curvature half to sharpen confocal characteristic curve, by sharpening confocal characteristic differential subtract each other
The high-precision fixed-focus of surface vertices and focal position in diameter measurement, and then reach and improve parabola vertex radius of curvature measurement precision
Purpose.
Embodiment 1:
As shown in Fig. 5, the measuring process for laterally subtracting each other differential confocal parabola vertex curvature radius measurement method is:
1) Survey Software for starting main control computer 28, opens laser 32, and the light that laser 32 issues passes through micro- object
Point light source 1 is formed after mirror 33 and pin hole 34.The light that point light source 1 issues is through beam splitter 2, collimation lens 3, measurement object lens 4 and plane
It is radiated at after half-reflecting half mirror 35 on tested paraboloidal mirror 5.
2) tested paraboloidal mirror 5 is adjusted, it is made to be total to light with collimation lens 3, measurement object lens 4 and plane half-reflecting half mirror 35
Axis, the collimated light beam that collimation lens 3 is emitted is pooled measuring beam and is radiated on tested paraboloidal mirror 5 by measurement object lens 4, by quilt
It surveys the reflected light of paraboloidal mirror 5 and is reflected collimation lens 3 by beam splitter 2 by measuring object lens 4, the light beam of reflection is focused to
Hot spot is measured, and is laterally subtracted each other differential confocal detection system 6 and detected；
3) Survey Software in main control computer 28 is obtained by image capturing system 27 and is acquired by ccd detector 9 before coke
Measurement Airy 12 and the collected defocused measurement Airy 15 of defocused ccd detector 11 before the coke arrived；
4) as shown in Fig. 2, moving tested paraboloidal mirror 5 along optical axis direction, make the focus of measuring beam and tested paraboloid
5 vertex position of mirror is overlapped；Tested paraboloidal mirror 5 is scanned near vertex position, will laterally be subtracted each other in differential confocal detection system 6
Jiao Qian great dummy pinhole detects the Jiao Qian great dummy pinhole that domain 13 detects and detects confocal characteristic curve 18IB1(z ,-uM) and Jiao Qian little
The Jiao Qian little dummy pinhole that dummy pinhole detection domain 14 is detected detects confocal characteristic curve 19IS1(z,-uM) carry out subtracting each other place
Reason laterally subtracts each other the confocal characteristic curve 20I of sharpening before obtaining the coke of halfwidth compression1(z,-uM)=IS1(z,-uM)-γIB1
(z,-uM)；The defocused big virtual needle that defocused big dummy pinhole detection domain 16 detects in differential confocal detection system 6 will laterally be subtracted each other
Hole detects confocal characteristic curve 21IB2(z,+uM) and the defocused small dummy pinhole that detects of defocused small dummy pinhole detection domain 17
Detect confocal characteristic curve 22IS2(z,+uM) carry out subtracting each other processing, obtain halfwidth compression defocused transverse direction subtract each other sharpen it is confocal
Characteristic curve 23I2(z,+uM)=IS2(z,+uM)-γIB2(z,+uM), take γ=0.5, uM=2.98；
Greatly/confocal characteristic process of small dummy pinhole detection domain detection is: measurement ends before ccd detector detection is burnt
In spot 12 and it is defocused measurement Airy 15 every frame image on choose a concentric circles domain, to each pixel light intensity in great circle domain
It is integrated to obtain a confocal intensity response curve IB(z,uM), one is obtained to each pixel light majorant for integral in roundlet domain
Confocal intensity response curve IS(z,uM), then by IB(z,uM) and IS(z,uM) carry out subtracting each other processing, it obtains laterally subtracting each other confocal
Response curve I (z, uM)=IS(z,uM)-γIB(z,uM), change regulatory factor γ and realizes confocal characteristic optimization.
5) great circle domain diameter chooses 11 pixels in the present embodiment, and roundlet domain diameter chooses 5 pixels, takes γ=0.5, such as
Shown in Fig. 3, the Survey Software of main control computer 28 will laterally subtract each other the confocal characteristic curve 20 of sharpening before subtracting each other the coke that processing obtains
Subtract each other with defocused transverse direction sharpen confocal characteristic curve 23 according to formula (1) carry out it is differential subtract each other processing obtain discrete transverse direction subtract each other it is differential
Confocal characteristic curve 24；
6) as shown in figure 4, discrete transverse direction, which is subtracted each other differential confocal characteristic curve 24, is fitted processing, by discrete cross
Linear fit is carried out to the discrete measurement data subtracted each other near 24 actual zero point of differential confocal characteristic curve, obtains differential confocal line
Property fitting a straight line 25, Survey Software measured by the fitting a straight line 0. 26 of differential confocal linear fit straight line 25 come accurate fixed-focus
The focal position of object lens 4, record test the surface vertices position Z of tested paraboloidal mirror 51=0.0158mm；
7) continue to move tested paraboloidal mirror 5 along measurement 4 optical axis direction of object lens, when the inswept tested throwing of the focus of measuring beam
When the focal position of object plane mirror 5, measuring beam collimation after tested paraboloidal mirror 5 reflects is collimated light beam directive plane half anti-half
On lens 35, light beam reflected again through tested paraboloidal mirror 5 after the reflection of plane half-reflecting half mirror 35 after along original optical path, partly through plane
Anti- pellicle mirror 35, measurement object lens 4 and collimation lens 3 are incident on beam splitter 2, differential into laterally subtracting each other after being reflected by beam splitter 2
Confocal detection system 6 is detected.Tested paraboloidal mirror 5 is nearby scanned in the position, by laterally subtracting each other differential confocal detection system 6
It measures discrete transverse direction and subtracts each other differential confocal characteristic curve 24, main control computer 28 passes through the quasi- of differential confocal linear fit straight line 25
Straight line 0. 26 is closed accurately to determine the focal position of tested paraboloidal mirror 5, record is tested the focal position of paraboloidal mirror 5 at this time
Z2=-27.2589mm；
8) the distance between tested 5 two positions of paraboloidal mirror Z is calculated1-Z2=-27.2747mm, then 27.2747mm is quilt
Survey the focal length value of paraboloid 5,27.2747mm × 2=54.5494mm, the vertex curvature radius value of as tested paraboloidal mirror 5.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (2)
1. laterally subtracting each other differential confocal parabola vertex curvature radius measurement method, it is characterised in that: the following steps are included:
A) point light source (1) is opened, the light issued is through beam splitter (2), collimation lens (3), measurement object lens (4) and plane half anti-half
Lens (35) form measuring beam afterwards and are radiated on tested paraboloidal mirror (5)；
B) adjusting tested paraboloidal mirror (5) and plane half-reflecting half mirror (35) keeps it total with collimation lens (3) and measurement object lens (4)
The collimated light beam that collimation lens (3) is emitted is pooled measuring beam and is radiated at tested paraboloidal mirror by optical axis, measurement object lens (4)
(5) by measurement object lens (4) that collimation lens (3) is anti-by beam splitter (2) by tested paraboloidal mirror (5) reflected light on
It penetrates, the light beam of reflection is focused to measurement hot spot, and is laterally subtracted each other differential confocal detection system (6) detection；
C) tested paraboloidal mirror (5) are moved along optical axis direction, makes the focus and tested paraboloidal mirror (5) vertex position of measuring beam
It is overlapped；It is scanned near vertex position tested paraboloidal mirror (5), will laterally subtract each other Jiao Qian great in differential confocal detection system (6)
The Jiao Qian great dummy pinhole that dummy pinhole detects domain (13) detection detects confocal characteristic curve (18) IB1(z,-uM) and Jiao Qian little
The Jiao Qian little dummy pinhole that dummy pinhole detection domain (14) detects detects confocal characteristic curve (19) IS1(z,-uM) subtracted each other
Processing laterally subtracts each other confocal characteristic curve (20) I of sharpening before obtaining the coke of halfwidth compression1(z,-uM)=IS1(z,-uM)-γ
IB1(z,-uM)；Defocused big dummy pinhole in differential confocal detection system (6) will laterally be subtracted each other and detect the defocused big of domain (16) detection
Dummy pinhole detects confocal characteristic curve (21) IB2(z,+uM) and defocused small dummy pinhole detection domain (17) detect it is defocused
Small dummy pinhole detects confocal characteristic curve (22) IS2(z,+uM) carry out subtracting each other processing, obtain the defocused transverse direction of halfwidth compression
Subtract each other and sharpens confocal characteristic curve (23) I2(z,+uM)=IS2(z,+uM)-γIB2(z,+uM)；Wherein z is axial coordinate, and γ is
Regulatory factor, uMDeviate the normalized cumulant of microcobjective (8) focal plane distance M before coke for ccd detector before coke (9), and
Defocused ccd detector (11) deviates the normalized cumulant of defocused microcobjective (10) focal plane distance M；Defocused transverse direction is subtracted each other sharp
Change confocal characteristic curve (23) I2(z,+uM) and it is burnt before laterally subtract each other and sharpen confocal characteristic curve (20) I1(z,-uM) carry out it is differential
Subtract each other and subtracts each other differential confocal characteristic curve (24) I to get to axial highly sensitive discrete transverse directionD(z):
ID(z)=I2(z,+uM)-I1(z,-uM) (1)
Subtract each other differential confocal characteristic curve (24) I by discrete transverse directionD(z) fitting a straight line zero point (26) measures convergence to determine
The accurate fixed-focus of light beam accurately determines the coke of measuring beam in the first fixed-focus surface vertices position of tested paraboloidal mirror (5)
Point position Z1；
D) continuation is mobile tested paraboloidal mirror (5) along the direction of optical axis direction measurement object lens (4), makes the focus of measuring beam and is tested
The focal position of paraboloidal mirror (5) is overlapped, and measuring beam is formed collimated light beam after the reflection of tested paraboloid (5) at this time, in parallel
Light, which is reflected into after being reflected by plane half-reflecting half mirror (35) through tested paraboloidal mirror (5), laterally subtracts each other differential confocal detection system
(6) it is detected.It scans near focal position tested paraboloidal mirror (5), is measured by laterally subtracting each other differential confocal detection system (6)
Discrete transverse direction is subtracted each other differential confocal characteristic curve (24), and main control computer (28) passes through differential confocal linear fit straight line (25)
Fitting a straight line zero point (26) measures the focal position Z of object lens (4) accurately to determine2, record the position for being tested paraboloidal mirror (5) at this time
Set Z2；
E) the radius of curvature r=2 (Z of tested paraboloidal mirror (5) is calculated1-Z2), vertex focal length is f=Z1-Z2。
2. transverse direction according to claim 1 subtracts each other differential confocal parabola vertex curvature radius measurement method, feature exists
In: it obtains laterally subtracting each other before coke by laterally subtracting each other differential confocal detection system (6) and sharpens confocal characteristic curve (20) and defocused
Laterally subtract each other sharpen confocal characteristic curve (23) process it is as follows:
A) in tested paraboloidal mirror (5) scanning process, by measuring Airy (12) before ccd detector before coke (9) detection coke,
Centered on the center of gravity for measuring Airy (12) before coke, a certain size is selected on the every frame detection image of ccd detector (9) before coke
Jiao Qian great dummy pinhole detect domain (13), the intensity that Jiao Qian great dummy pinhole detects in domain (13) in each pixel is accumulated
Point, big dummy pinhole detects confocal characteristic curve (18) before must the discharging of the coke；
B) simultaneously centered on measurement Airy (12) center of gravity before the coke of ccd detector before coke (9) detection, before selecting another coke
Small dummy pinhole detects domain (14), and the size of Jiao Qian little dummy pinhole detection domain (14) is less than the Jiao Qian great dummy pinhole
It detects domain (13), it is confocal that the intensity of integral Jiao Qian little dummy pinhole detection domain (14) obtains another Jiao Qian little dummy pinhole detection
Characteristic curve (19), Jiao Qian little dummy pinhole detects the halfwidth of confocal characteristic curve (19) and peak strength is below Jiao Qian great
Dummy pinhole detects confocal characteristic curve (18)；
C) Jiao Qian great dummy pinhole is detected into confocal characteristic curve (18) multiplied by regulatory factor γ, so that Jiao Qian great dummy pinhole is visited
Surveying confocal characteristic curve (18) light intensity is 1/2 times that Jiao Qian little dummy pinhole detects confocal characteristic curve (19)；
D) Jiao Qian little dummy pinhole is detected into confocal characteristic curve (19) and subtracts the Jiao Qian great dummy pinhole detection multiplied after adjusting γ
Confocal characteristic curve (18) laterally subtracts each other the confocal characteristic curve (20) of sharpening before obtaining coke.
E) step a)~d is repeated), the defocused measurement Airy (15) that defocused ccd detector (11) detects is handled, together
Sample obtains defocused big dummy pinhole and detects confocal characteristic curve (21) and the confocal characteristic curve (22) of defocused small dummy pinhole detection；
Defocused big dummy pinhole detects confocal characteristic curve (21) and defocused small dummy pinhole detects the lateral phase of confocal characteristic curve (22)
Subtract to be similarly obtained defocused transverse direction after Edge contrast and subtract each other and sharpens confocal characteristic curve (23).
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