CN103575233B - Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error - Google Patents
Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error Download PDFInfo
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Abstract
The invention relates to a method for detecting a large-caliber large-relative-aperture parabolic reflector surface shape error. An existing method is high in cost and low in accuracy and efficiency. The method includes the steps of selecting a transmission standard lens, adjusting the position of a laser wave surface interferometer, adjusting a focus of a tested parabolic reflector to be coincided with a focus of the laser wave surface interferometer, adjusting the optical axis of the tested parabolic reflector to enable the optical axis of the tested parabolic reflector and the optical axis of the laser wave surface interferometer to be coaxial, adjusting a standard plane reflector, rotating the laser wave surface interferometer to enable the laser wave surface interferometer to be aligned with a first annular sub-aperture A, and repeating the sixth step and the seventh step according to a sub-aperture division scheme. The method for detecting the large-caliber large-relative-aperture parabolic reflector surface shape error is low in cost and high in accuracy and efficiency.
Description
Technical field
The invention belongs to technical field of optical test, relate generally to one kind and be directed to rotational symmetric heavy caliber object lens of large relative aperture
The detection method of parabolic mirror face shape error.
Technical background
Optical system with paraboloidal mirror as primary mirror obtains in high-tech sectors such as astronomicalc optics, space optics and military affairs
Increasingly it is widely applied, in order to increase light gathering and the peak light intensity of optical system, the prominent features of optical system are big
Bore and object lens of large relative aperture.The manufacture of heavy caliber object lens of large relative aperture paraboloidal mirror needs corresponding detection technique, however, to big mouth
Footpath object lens of large relative aperture paraboloidal mirror carries out high precision test and has still suffered from a lot of challenges.
In the paraboloidal polishing stage, common quantitative detecting method has autocollimation method and compensating glass zero check method.Autocollimatic
Straight method utilizes the aberrationless point (geometrical focuss and infinite point) that parabola has a pair of conjugation, when point source is accurately located at geometry
When in focus, conjugation can be realized with one piece of high precision plane reflecting mirror suitable with tested paraboloidal mirror bore, but for
High precision plane reflecting mirror needed for heavy caliber paraboloidal mirror manufacture difficult, expensive, for super large caliber paraboloidal mirror from
Collimation is even more difficult to, and object lens of large relative aperture paraboloidal mirror is needed to the transmission criteria selecting to be larger than relative aperture
Mirror, with the increase of relative aperture, transmission criteria mirror can not meet the detection of the parabolic mirror of object lens of large relative aperture；Compensate
Mirror zero check method is made by compensating glass just plane wave front or spheric wave front is converted to and tested parabolic mirror theory shape
The parabola wavefront that shape overlaps, its great advantage is that the bore of the tested parabolic mirror of relative aperture of compensating glass is much smaller, but
It is, in order to obtain reliable parabola wavefront, the manufacture to compensating glass and debug precision and propose quite harsh requirement, with
When, the relative aperture that the relative aperture of compensating glass have to be larger than tested parabolic mirror just enables unified face shape error
Detection, with the increase of relative aperture, compensating glass equally can not meet the detection of the paraboloidal mirror of object lens of large relative aperture.
Li Shengyi etc. is " high in heavy caliber object lens of large relative aperture aspherical mirror in Chinese Patent Application No. " 200710034359.0 "
In frequency error detecting apparatus and method ", platform is adjusted by the 5-axis movement of design and area data stitching algorithm realizes aspheric
The medium-high frequency error-detecting of face mirror, its measurement result is with respect to the deviation of best fit ball, for the parabola of big bias
Surface testing is then limited by interference fringe consistency.
In Chinese Patent Application No. " 200510086657.5 ", " in aperture aspherical optical elements, height walks error to Chen Wei etc.
In detection method ", ask for corresponding frequencies scope energy loss by calculating two-dimensional power spectrum density, be a kind of medium-high frequency error
Data processing and evaluation methodology, without regard to the face shape error information detection method of itself.
Qed company of the U.S. is in " an automated subaperture stitching interferometer
Workstation for spherical and aspherical surfaces ", p. e. murphy, and g. w.
Propose in forbes, proc. of spie, vol. 5188,296-307,2003 and United States Patent (USP) " us 6956657b2 "
A kind of sub-aperture stitching method of aspherical mirror shape error-detecting, tested aspherical mirror is divided into several coverings unified
Sub-aperture, adjust tested aspherical mirrors or interferometer by six axle motion platforms, sub-aperture carried out with zero-bit and interferes detection, so
Afterwards unified testing result is obtained using stitching algorithm, it passes through hardware precision, using algorithm compensation the inclination between aperture,
It is ensured that the stablizing of measuring system, equally, the parabola surface testing for big bias is then subject to interference fringe to defocus error
The restriction of consistency.
Detection means used in said method, all including laser wavefront interferometer 3, tested parabolic mirror
1st, standard flat reflecting mirror 4 and main control computer 2, laser wavefront interferometer 3, tested parabolic mirror 1, standard flat reflection
Mirror 4 is all by respective guiding mechanism action.
Content of the invention
The purpose of the present invention is the technical problem existing for prior art, propose a kind of low cost, in high precision, high efficiency
Large-caliber large-relative-apertparabolic parabolic reflector surface shape error detection method.
To achieve these goals, the invention provides the inspection of large-caliber large-relative-apertparabolic parabolic reflector surface shape error
Survey method, comprises the steps:
The first step: selective transmission standard lens, and clamping is to laser wavefront interferometer；
Second step: the position of adjustment laser wavefront interferometer, make focus and its guiding mechanism of laser wavefront interferometer
Center of rotation o overlaps；
3rd step: the focus adjusting tested parabolic mirror is overlapped with the focus of laser wavefront interferometer；
4th step: the optical axis adjusting tested parabolic mirror is coaxial with the optical axis of laser wavefront interferometer；
5th step: adjustment standard flat reflecting mirror, so that the light being incident to tested parabolic mirror is reflected through plane mirror
Tailing edge backtracking, that is, form self-collimation measurement principle；
6th step: according to the relative aperture of transmission criteria camera lens installed in laser interferometer, angle measuring interferometer, make laser
Wavefront interferometer is directed at the first ring aperture a, with the face shape error in tested this region of parabola of laser corrugated interferometer measurement, number
According to deposit, and the anglec of rotation of recording laser wavefront interferometer；
The splitting scheme of described sub-aperture: according to the relative aperture of laser wavefront interferometer standard lens, it is possible to obtain swash
Angle of visual field θ of light wavefront interferometer, the region defining the measured piece that laser wavefront interferometer is aligned is first on the first ring
Sub-aperture a, is not less than the principle of single sub-aperture area 1/4, can obtain first respectively according to sub-aperture overlapping area two-by-two
All sub-aperture on ring and all sub-aperture on other rings；
7th step: according to sub-aperture splitting scheme, make interferometer be directed at sub-aperture b, c, d successively, and utilize laser corrugated
The corresponding sub-aperture area surface shape of the tested parabolic mirror of interferometer measurement, data storage, and recording laser interferometer and quilt
Survey the corresponding rotational angle of parabolic mirror；
8th step: repeat the 6th step and the 7th step, until all sub-aperture area measures finish, by laser wavefront interferometer
The anglec of rotation, the anglec of rotation of standard flat reflecting mirror and laser wavefront interferometer face shape error data send into master control calculate
Machine, the face shape error figure of several sub-aperture that detection is obtained is spliced into unified face shape error figure.
The data processing algorithm program of described main control computer includes data extraction algorithm and the area data of overlapping region
Stitching algorithm, wherein: the data extraction algorithm of described overlapping region is according to the rotation of laser wavefront interferometer rotary motion assembly
The anglec of rotation of gyration and c-axis turntable determines the substantially overlapping region of two adjacent sub-aperture, by laser wavefront interferometer institute
Surveying face shape error is the tested paraboloidal deviation of relative ideal, is equivalent to the face shape of laser corrugated interferometer measurement plane component by mistake
Difference.
Compared with prior art, it is an advantage of the current invention that:
1st, the large-caliber large-relative-apertparabolic parabolic reflector surface shape error detection means of the present invention and method are passed through to interfere
Instrument rotating mechanism and measured piece rotating mechanism carry out the autocollimation method inspection of multiple sub-aperture, are obtained by detection data processing routine
To unified face shape error, not only increase lateral resolution, auto-collimation method of inspection is not subject to the shadow of vertical survey scope simultaneously
Ring, therefore can measure the parabolic mirror of big bias；
2nd, the sub-aperture data stitching algorithm of the present invention is equivalent to the sub-aperture stitching algorithm of measurement plane optical element, and
And the inclination that causes in rotation process of guiding mechanism, the alignment error such as out of focus carry out the spelling of sub-aperture data again after can eliminating
Connect, reduce the requirement to guiding mechanism；
3rd, the sub-aperture of the present invention is divided into several rings and relatively rotates angle it is only necessary to record between sub-aperture, and weight
The accurate extraction in folded region adopts secondary localization method, the advantage of the overlapping region extraction algorithm of software, reduces wanting of hardware
Ask, reduce the required precision to standard flat mirror adjustment mechanism, and do not need to carry out pinpoint center sub-aperture
Footpath measures；
4th, the present invention only needs to carry out the adjustment machine of laser wavefront interferometer and standard flat reflecting mirror in measurement process
The motor control of structure, greatly reduces impact in measurement process for the guiding mechanism.
Brief description
Fig. 1 is the detection means schematic diagram of large-caliber large-relative-apertparabolic parabolic reflector surface shape error；
Fig. 2 is the top view of the detection means schematic diagram of large-caliber large-relative-apertparabolic parabolic reflector surface shape error；
Fig. 3 is mechanism action schematic diagram when dividing sub-aperture；
Fig. 4 is that unified sub-aperture to be measured divides schematic diagram.
Wherein: the tested parabolic mirror of 1-, 2- main control computer, 3- laser wavefront interferometer, 4- standard flat reflects
Mirror.
Specific embodiment
Referring to Fig. 1 and Fig. 2, the detection means used in the inventive method, including laser wavefront interferometer 3, tested throwing
Parabolic mirror 1, standard flat reflecting mirror 4 and main control computer 2, laser wavefront interferometer 3, tested parabolic mirror 1, mark
Directrix plane reflecting mirror 4 is all by respective guiding mechanism action.
Specific device is known structural grouping；
Described laser wavefront interferometer controls motion by its guiding mechanism, and the center of rotation of its guiding mechanism is o, by adjusting
The action of whole mechanism makes the focus of laser wavefront interferometer 3 rotate center o coincidence；Simultaneously by the action of guiding mechanism Lai
(i.e. center of rotation o) rotates to an angle around its focus to realize laser wavefront interferometer 3.
The guiding mechanism of described tested parabolic mirror 1 includes x-axis motion adjustment platform, y-axis motion adjusts platform,
Tilt adjustments platform in xoy plane, the c-axis turntable around the revolution of tested parabolic mirror optical axis and tested parabolic reflector
The focusing movements assembly of mirror.Tilt adjustments platform in x-axis motion adjustment platform, y-axis motion adjustment platform and x/y plane is used
To adjust tested parabolic mirror 1, to make the optical axis of tested parabolic mirror 1 coaxial with the optical axis of laser wavefront interferometer 3；
C-axis turntable is used for rotating tested parabolic mirror 1, is measured with the face shape error realizing each sub-aperture on same ring；Adjust
Burnt moving parts are used for adjusting the center of rotation with the guiding mechanism of laser wavefront interferometer for the focus of tested parabolic mirror 1
O overlaps.
The guiding mechanism of described standard flat reflecting mirror 4 is used to adjust plane mirror, makes to be incident to tested parabola
The light of reflecting mirror 1 forms auto-collimation.
A kind of detection method of large-caliber large-relative-apertparabolic parabolic reflector surface shape error, comprises the steps:
The first step: selective transmission standard lens, and clamping, to laser wavefront interferometer 3, makes laser wavefront interferometer light
Bundle is full of measured piece bore as big as possible, to reduce the number of rings of measurement sub-aperture；
Second step: the position of adjustment laser wavefront interferometer, make the focus of laser wavefront interferometer adjust structure with it
Center of rotation o overlaps；
3rd step: the focus adjusting tested parabolic mirror is overlapped with the focus of laser wavefront interferometer；
4th step: the optical axis adjusting tested parabolic mirror is coaxial with the optical axis of laser wavefront interferometer；
5th step: adjustment standard flat reflecting mirror, so that the light being incident to tested parabolic mirror is reflected through plane mirror
Tailing edge backtracking, that is, form self-collimation measurement principle；
6th step: according to the relative aperture of transmission criteria camera lens installed in laser interferometer, angle measuring interferometer, make laser
Wavefront interferometer is directed at the first ring aperture a, with the face shape error in tested this region of parabola of laser corrugated interferometer measurement, number
According to deposit, and the anglec of rotation of recording laser wavefront interferometer；
The splitting scheme of sub-aperture: according to the relative aperture of laser wavefront interferometer standard lens, it is possible to obtain laser wave
Angle of visual field θ of face interferometer, referring to Fig. 3, the region defining the measured piece that laser wavefront interferometer is aligned is the on the first ring
One sub-aperture a, is not less than the principle of single sub-aperture area 1/4, can obtain respectively according to sub-aperture overlapping area two-by-two
All sub-aperture on first ring and all sub-aperture on other rings；
7th step: according to sub-aperture splitting scheme, referring to Fig. 4, make interferometer be directed at sub-aperture b, c, d successively, and utilize
The corresponding sub-aperture area surface shape of the tested parabolic mirror of laser corrugated interferometer measurement, data storage, and recording laser are done
Interferometer and the corresponding rotational angle of tested parabolic mirror；
8th step: repeat the 6th step and the 7th step, until all sub-aperture area measures finish, by laser wavefront interferometer
The anglec of rotation, the anglec of rotation of standard flat reflecting mirror and laser wavefront interferometer face shape error data send into master control calculate
Machine.
Then processed by data processing algorithm program, described data processing algorithm program includes the data of overlapping region
Extraction algorithm and the stitching algorithm of area data, the wherein data extraction algorithm of overlapping region rotate according to laser wavefront interferometer
The anglec of rotation of the anglec of rotation of moving parts and c-axis turntable determines the substantially overlapping region of two adjacent sub-aperture, by laser
The surveyed face shape error of wavefront interferometer is the tested paraboloidal deviation of relative ideal, is equivalent to laser corrugated interferometer measurement plane
The face shape error of element, carries out it after therefore, it can eliminate the alignment error of two adjacent sub-aperture substantially overlapping region exhausted again
Related operation to face shape error, to obtain the accurate overlapping region of two adjacent sub-aperture；Described sub-aperture data stitching algorithm
By the iteration optimization of two adjacent sub-aperture overlapping region data so as to discordance is minimum.
The face shape error figure of several sub-aperture finally obtaining detection is spliced into unified face shape error figure.
Claims (2)
1. a kind of detection method of large-caliber large-relative-apertparabolic parabolic reflector surface shape error it is characterised in that: include as follows
Step:
The first step: selective transmission standard lens, and clamping is to laser wavefront interferometer；
Second step: the position of adjustment laser wavefront interferometer, make the focus of laser wavefront interferometer and the rotation of its guiding mechanism
Center o overlaps；
3rd step: the focus adjusting tested parabolic mirror is overlapped with the focus of laser wavefront interferometer；
4th step: the optical axis adjusting tested parabolic mirror is coaxial with the optical axis of laser wavefront interferometer；
5th step: adjustment standard flat reflecting mirror, make the light being incident to tested parabolic mirror reflect tailing edge through plane mirror
Backtracking, that is, form self-collimation measurement principle；
6th step: according to the relative aperture of transmission criteria camera lens installed in laser interferometer, angle measuring interferometer, make laser corrugated
Interferometer is directed at the first ring aperture a, and with the face shape error in tested this region of parabola of laser corrugated interferometer measurement, data is deposited
Disk, and the anglec of rotation of recording laser wavefront interferometer；
The splitting scheme of described sub-aperture: according to the relative aperture of laser wavefront interferometer standard lens, it is possible to obtain laser wave
Angle of visual field θ of face interferometer, the region defining the measured piece that laser wavefront interferometer is aligned is first sub-aperture on the first ring
Footpath a, is not less than the principle of single sub-aperture area 1/4, can obtain respectively on the first ring according to sub-aperture overlapping area two-by-two
All sub-aperture and other rings on all sub-aperture；
7th step: according to sub-aperture splitting scheme, make interferometer be directed at sub-aperture b, c, d successively, and interfered using laser corrugated
Instrument measures the corresponding sub-aperture area surface shape of tested parabolic mirror, data storage, and recording laser interferometer and tested throwing
The corresponding rotational angle of parabolic mirror；
8th step: repeat the 6th step and the 7th step, until all sub-aperture area measures finish, by the rotation of laser wavefront interferometer
The face shape error data of gyration, the anglec of rotation of standard flat reflecting mirror and laser wavefront interferometer sends into main control computer,
The face shape error figure of several sub-aperture that detection is obtained is spliced into unified face shape error figure.
2. the detection method of large-caliber large-relative-apertparabolic parabolic reflector surface shape error according to claim 1, it is special
Levy and be: the data processing algorithm program of described main control computer includes the data extraction algorithm of overlapping region and area data
Stitching algorithm, wherein: the data extraction algorithm of described overlapping region is according to the rotation of laser wavefront interferometer rotary motion assembly
The anglec of rotation of angle and c-axis turntable determines the substantially overlapping region of two adjacent sub-aperture, is surveyed by laser wavefront interferometer
Face shape error is the tested paraboloidal deviation of relative ideal, is equivalent to the face shape of laser corrugated interferometer measurement plane component by mistake
Difference.
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