CN100507488C - Method and device for aspherical mirror diffraction image - Google Patents
Method and device for aspherical mirror diffraction image Download PDFInfo
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- CN100507488C CN100507488C CNB2007100343603A CN200710034360A CN100507488C CN 100507488 C CN100507488 C CN 100507488C CN B2007100343603 A CNB2007100343603 A CN B2007100343603A CN 200710034360 A CN200710034360 A CN 200710034360A CN 100507488 C CN100507488 C CN 100507488C
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Abstract
This invention relates to a kind of test method and device of aspherical mirror diffraction image. The invention includes five freedom movement adjust platform, and CCD camera set on platform, laser dot illuminant, semi-permeable semi-counter mirror, aspherical mirror, and main control calculator that maintain surface shape restructing algorithm procedure. The invention uses CCD camera, take tested mirror's fixed point curvature radius as origin, to shot defocussing diffracted light intensity picture at various locations, and record position parameter. Input light intensity picture, location parameter and relevant parameter to caculator. The caculator by specular surface shape restructing algorithm to process wave surface reorganization count to the much frame diffracted light intensity picture, to realize low cost, high precision, high efficiency aspherical mirror's medium-high frequency error detection.
Description
Technical field
The invention belongs to the optical testing technology field, particularly relate to a kind of at the detection method and the device of concave surface non-spherical reflector.
Background technology
Along with the continuous development of optics processing and detection technique, be that the optical system of critical component has obtained application more and more widely in fields such as astronomical, space optics and military affairs with the aspheric mirror, and required aspheric mirror bore and relative aperture are increasing.The manufacturing of heavy caliber aspherical mirror needs the relevant detection technology.Yet, heavy caliber aspherical mirror is carried out high Precision Detection still has a lot of challenges.
In the polishing process segment of heavy caliber aspherical mirror, common quantitative detecting method has aberrationless point method and compensator null check method.Aberrationless point method is only applicable to quadric detection, need not assist mirror except that concave ellipsoidal surface and can realize that independence test and oblate spheroid do not have the aberrationless point, and all the other quadric surface aberrationless point checks all will be assisted mirror with one; Yet make difficulty usually and cost an arm and a leg for the auxiliary mirror of the required high precision of heavy caliber aspherical mirror.
Compensator null check method is the detection method of widely used a kind of heavy caliber aspherical mirror, the essence of this method is by compensator plane or spherical wave front to be converted to the non-spherical wavefront that overlaps with the theoretical shape of tested aspheric mirror, wavefront by the compensator outgoing, can be regarded as the contactless model that is stacked on the tested aspheric mirror, it is much smaller that its great advantage is that the diameter ratio of the auxiliary element (compensator) that is suitable for is verified the mirror diameter.For tested aspheric mirror is made reliable conclusion, compensator must have desired shape quality, and correctly installs with respect to tested aspheric surface; Therefore the structure of compensator should be enough simple, for example simple lens, two lens, two gummed or air-spaced doublet groups, the all available usual way of their each monolithic is checked with necessary accuracy, utilizes the check respectively of each structural element to guarantee the reliability of compensator overall inspection.Yet, increase along with tested aspheric mirror relative aperture, compensator may be with the structure of the complexity that has, and to its manufacturing with debug precision and also will propose harsher requirement, this makes this detection technique have a lot of difficulties when detecting big relative aperture aspheric mirror, and its application is subjected to certain limitation.Propose to replace zero compensator in Zhu Qiudong, Hao Qun, the embodiment of Liu Huilan in Chinese patent application number " 200410068823 " " a kind of interferometric method of realizing aspheric surface with the part offset lens " with the part compensator, it is poor to allow the residue ripple that is not more than 50 wavelength, traditional small echo poor (being not more than 10 wavelength) interferometer measuration system is become big ripple poor (being not more than 50 wavelength) interferometer measuration system, its tested corrugated and theoretical corrugated compare, and adopt digital More's movable phase interfere method to measure.Its advantage has been to simplify the structure of offset lens, has reduced design, the difficulty of processing of offset lens, can expand its measurement range to a certain compensating glass simultaneously.But the residue wave aberration after the part compensation is bigger, needs to use the CCD of high score pigtail rate to gather the actual high density interference fringe that obtains, and the resolution of CCD is directly connected to complicacy, degree of compensation and the compensation range of part offset lens.
Except penalty method, the sub-aperture stitching method also is the another kind of technological approaches of interferometry aspheric mirror.Lju.YM etc. are at " Subaperture testing of aspheres with annularzones ", Ying-Moh Liu, George N.Lawrence, Christ L.Koliopoulos, Applied Optics, 27 (21): p504-4513, a kind of annular sub-aperture measuring technology that auxiliary element just can detect heavy caliber aspherical mirror that need not has been proposed in 1988, this detection technique greatly reduces inspection cost, can eliminate the influence to accuracy of detection of design, manufacturing and the adjustment error of auxiliary element simultaneously; In addition, the machine process of aspheric mirror also will can not be subjected to the influence of auxiliary element machine process.But for the dark type aspheric surface of big relative aperture, required annular sub-aperture number is more, and Measuring Time is longer, is subjected to the influence of environmental factor etc. in testing process easily, " splicing " processing in a plurality of sub-apertures simultaneously can cause the accumulation and the transmission of error, has influence on final accuracy of detection.
U.S. QED company is at " An automated subaperture stitchinginterferometer workstation for spherical and aspherical surfaces ", P.E.Murphy, and G.W.Forbes, Proc.SPIE, Vol.5188, p296-307,2003 and United States Patent (USP) " US 6956657B2 " in the sub-aperture stitching method of a kind of aspherical mirror shape error-detecting is proposed, tested aspheric mirror is divided into some more small-bore sub-apertures, the measurement range in sub-aperture can cover unified, and has overlapping between each sub-aperture slightly; Adjust tested aspheric mirror or interferometer by 6 motion platforms, the antithetical phrase aperture is carried out zero-bit and is interfered detection, adopt stitching algorithm to obtain unified testing result then, algorithm has mainly compensated inclination, the defocus error between interferometer image deformation error, reference wave surface error and the sub-aperture.Algorithm does not need iteration, by hardware accuracy guarantee reliability.This method is mainly used in the following aspheric mirror of 200mm bore and detects, and for heavy caliber object lens of large relative aperture aspheric mirror, increase because the stroke of platform is adjusted in motion, and accuracy requirement is constant; And load increases, and light path has also extended, and light path and structural design are comparatively complicated, and cost drops into higher.
Measuring optical mirror plane based on the light wave diffraction image is a kind of comparatively novel optic test means.Its principle is according to the theory of coherent light waves at the free space diffraction propagation, when a branch of light when optical axis is propagated, the COMPLEX AMPLITUDE on incident light corrugated has determined the COMPLEX AMPLITUDE on emergent light corrugated.And if the PHASE DISTRIBUTION on incident light corrugated changes, can cause the variation of corresponding emergent light corrugated intensity distributions.The diffraction image measuring technique is exactly a kind of method of coming inverse incident corrugated phase place by the intensity of measuring outgoing light wave face.
Same for the spherical wave that converges incident, if there is error in its corrugated face shape, can near focus, form the corresponding strength distribution in front and back.Near before and after these focuses diffraction intensity image has comprised the phase information on incident light corrugated.Utilize these intensity images and handle and to be reconstructed the incident light corrugated exactly by certain software algorithm.Utilize this principle Nasa (NASA) at " PhaseRetrieval Camera Optical Testing of the Advanced Mirror SystemDemonstrator ", Proc.SPIE, Vol.5487, p1744-1756 proposes to utilize the detection system of measuring spherical mirror based on the phase reconstruction method of diffraction intensity image in 2004.The method is simple in structure, and cost is low, and is not subject to vibration and environmental interference.
But the method for measuring optical mirror plane based on the light wave diffraction image is when the check aspheric mirror, what run into equally that aspherical degree causes differs too big, the data volume that causes software algorithm to handle is excessive, if adopt compensating glass to carry out aberration compensation, will face the technical matters identical with interferometry.Thereby obstacle the application of this technology in aspheric mirror is measured.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of aspheric mirror diffraction image detection method and device are provided.Can realize low cost, high precision, the error-detecting of high efficiency aspheric mirror medium-high frequency by method and apparatus of the present invention.
Aspheric mirror diffraction image detection method provided by the invention may further comprise the steps:
The first step: the laser spots light source is arranged at its light source center axis overlapped and be in the fixed point radius-of-curvature place of measured lens with measured lens over glaze line position;
Second step: between laser spots light source and tested minute surface, be provided with and the adjustment semi-transparent semi-reflecting lens, make folded light beam to penetrate from direction perpendicular to measured lens over glaze line;
The 3rd the step: the CCD camera is placed near the focus of outgoing beam, and make outgoing beam near the diffraction image perfect imaging the focus on the target surface of CCD camera;
The 4th step: moving forward and backward the CCD camera, is initial point with measured lens fixed point radius-of-curvature, takes out of focus diffraction intensity picture on the diverse location, and the record position parameter, notes keeping CCD camera target surface perpendicular to the outgoing beam direction when taking;
The 5th step: with diffraction intensity picture, location parameter and the measured lens correlation parameter input computing machine of taking, by minute surface face shape restructing algorithm several diffraction images that photograph are carried out the corrugated reconstruction calculations by computing machine, the face shape error that obtains tested minute surface distributes.
The device that is used for above-mentioned detection method provided by the invention comprises: be used to send the laser spots light source of spherical wave, with the semi-transparent semi-reflecting lens of the reflecting light beam split of measured lens, record by the CCD camera of the reflecting light field intensity of the measured lens of semi-transparent semi-reflecting lens beam split, the adjustment platform that the CCD camera is installed, the main control computer that contains face shape restructing algorithm program that links to each other with CCD camera output terminal; Described laser spots light source is arranged at its light source center axis overlapped and be in the fixed point radius-of-curvature place of measured lens with measured lens over glaze line position; Semi-transparent semi-reflecting lens is arranged between laser spots light source and the tested minute surface, makes folded light beam to penetrate from the direction perpendicular to measured lens over glaze line; The CCD camera places near the focus of outgoing beam, and make outgoing beam near the diffraction image perfect imaging the focus on the target surface of CCD camera.
Adjust the working position that platform is mainly used in fixation of C CD camera and adjusts the CCD camera, preferably adopt the five degree of freedom motion to adjust platform, it is by rotating and form along the translation of X-axis and Y-axis respectively around X-axis and Y-axis respectively along the translation of Z axle and bidimensional.The wherein translation of X-axis and Y-axis and the spatial pose that rotates the Z axle translation platform that can finely tune, the CCD camera is installed on the Z axle translation platform, can move reciprocatingly, and accuracy requirement reaches micron order.
The laser spots light source sends spherical wave at the vertex curvature radius place of measured lens, shines in measured lens through semi-transparent semi-reflecting.Measured lens reflects measuring beam.Formation contains the reflecting light of aspherical wavefront aberration.Reflected light is through semi-transparent semi-reflecting lens, and a part of light branches away and enters the CCD camera.
The CCD camera is aimed at catoptrical direction under the drive of motion adjustment platform, and moves along direction of beam propagation, chooses different positions and takes the diffraction intensity picture.The position of the diffraction picture of taking can not be at a distance of too near, and also not too close focus is generally respectively taken 2～3 pictures and got final product before and after focal zone.
When there was error in minute surface, reflection light field can produce corresponding different diffraction intensity and distribute near convergent point.Utilize this phenomenon, as input signal, can recover face shape error by the corrugated restructing algorithm with several plot of light intensity pictures.At first, unified aspheric surface error is expressed with one group of polynomial parameters, face shape error is diffracted into CCD receives plane formation emulation diffraction image.The diffraction image of emulation diffraction image and actual measurement is contrasted, use optimization searching algorithm can find the polynomial parameters of coincidence measurement data.
Need to carry out Diffraction Calculation in the reconstruction calculations of corrugated.The Diffraction Calculation of spherical wave realizes easily, but when having steeper aspherical degree in the measured lens, the aspherical wavefront aberration on reflected light corrugated is too big, makes the light field spatial variations too fast.Directly, need too many sampled data, exceed the storage and the computing power of general PC the corrugated calculating of sampling.In order to solve the quick computational problem of Diffraction of Light, aspheric mirror is divided into several endless belt, each endless belt is with a best ellipsoid match.A focus of ellipsoid is at the pointolite place, and another focus is the catoptrical focus point of this endless belt.Each endless belt can carry out Diffraction Calculation by spherical wave.The diffractive light field addition that each endless belt is calculated can obtain unified diffractive light field.Get final product finished surface shape restructing algorithm like this on ordinary PC, speed is fast, the efficient height.
Compared with prior art, the invention has the advantages that:
1, the constructed detection system of the present invention need not the aspheric mirror that secondary optics and equipment just can detect various shape parameters;
2, the constructed pick-up unit of the present invention is simple, only needs a CCD camera and simple motion to regulate platform and get final product, and the equipment cost input is low;
3, constructed detection system of the present invention is simple to operate, only needs to take several pictures, imports Computing then and can finish;
4, constructed detection software processes algorithm of the present invention need not high performance computing machine, and common PC can finish calculation process on calculating;
5, constructed detection system of the present invention is not subject to vibration and air turbulence influence, the online on-position measure that can be used for processing.
Further specify technical scheme of the present invention below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is an aspheric mirror diffraction image pick-up unit synoptic diagram of the present invention;
Fig. 2 is that the platform synoptic diagram is adjusted in the five degree of freedom motion of CCD camera;
Fig. 3 is a face shape restructing algorithm schematic flow sheet;
Fig. 4 is an aspheric mirror pointolite reflection ray synoptic diagram;
Fig. 5 is the simulation bar graph that the aspheric mirror central area is detected;
Fig. 6 is aspheric mirror ring belt area division figure;
Fig. 7 is that the striped intention is shown in the match of aspheric mirror endless belt;
Embodiment
As shown in Figure 1, aspheric mirror diffraction image pick-up unit of the present invention comprises that five degree of freedom motion adjusts platform 5 and be installed in CCD camera 4, laser spots light source 1, semi-transparent semi-reflecting lens 2 and tested aspheric mirror 3, data handling machine 6 on the platform.The laser spots light source sends spherical wave at the vertex curvature radius of measured lens and illuminates measured lens, and measured lens is returned beam emissions and converged.When there was error in minute surface, the phase place of reflection light field can be carried the minute surface error, and produced different diffraction intensity distributions near convergent point.The CCD camera receives the light intensity of these diffractive light fields, gives data handling machine to carry out algorithm process then, and the face shape error that obtains minute surface distributes 7.
As shown in Figure 2, five degree of freedom motion is adjusted platform 5 by rotating 52,53 and form along the translation 54,55 of X-axis and Y-axis respectively around X-axis and Y-axis respectively along the translation 51 of Z axle and bidimensional.The wherein translation of X-axis and Y-axis and rotate the spatial pose of the Z axle translation platform 51 that can finely tune makes the Z axle translation platform can the alignment light direction of principal axis.CCD camera 4 is installed on the Z axle translation platform, and the face tactical deployment of troops line direction of CCD is parallel with Z axle direction of motion during installation.CCD can move reciprocatingly on the Z axle, and accuracy requirement reaches micron order.
The CCD camera is aimed at catoptrical direction under the drive of motion adjustment platform, and moves along direction of beam propagation, chooses different positions and takes the diffraction intensity picture.The view data Processing Algorithm uses several diffraction images that photograph to carry out the corrugated reconstruction calculations, calculates the face shape error of measured lens.The position of the diffraction picture of taking can not be at a distance of too near, and also not too close focus is generally respectively taken 2～3 pictures and got final product before and after focal zone.
Fig. 3 is a minute surface face shape restructing algorithm.At first unified aspheric surface error is expressed with one group of polynomial parameters, as used the Zernike polynomial repressentation.Go out two-dimentional error surface graphic data by polynomial computation, these face shape error data by Diffraction Calculation, are diffracted into CCD and receive the diffraction image that the plane forms emulation.The diffraction image of emulation diffraction image and actual measurement is contrasted, produce the light intensity error.With light intensity error minimum is target, uses optimization searching algorithm to find and meets the polynomial parameters of surveying the diffraction image data most.This polynomial parameters is the best-fit on error corrugated.The computation optimization of face shape polynomial parameters can be selected multiple optimization searching method realizations such as genetic algorithm for use.
The corrugated reconstruction calculations need be carried out Diffraction Calculation.The Diffraction Calculation of spherical wave can be with reference to Sziklas and Siegman at " Diffraction Calculations Using Fast Fourier TransformMethods ", Proceedings of the IEEE, MARCH1974, the coordinate transform Diffraction Calculation method that proposes among the p410-412 based on FFT.The method can use less sampling number to calculate the diffractive light field of spherical wave quickly and accurately.
But when having steeper aspherical degree in the measured lens, does not converge a focus on the aberration corrugated that aspherical degree causes, but different zones converges on the different point of optical axis, as shown in Figure 4.On the angle of light field phase place, can be understood as aspherical degree and cause the variation of phase place in the space very fast, as shown in Figure 5.When the vertex curvature radius place was considered as testing the centre of sphere on corrugated, the phase place fringe density of aberration corrugated periphery was too high.Will correctly carry out Diffraction Calculation needs too many sampled data, exceeds the storage and the computing power of general PC.
In order to solve the Diffraction of Light computational problem of aspheric mirror, can be divided into several endless belt to aspheric mirror, as shown in Figure 6, need not between each endless belt 8,9,10 to overlap.Each endless belt is with a best ellipsoid match.An ellipsoid has two focuses, and by the character of ellipsoid as can be known, set-point light source on a focus of ellipsoid sends spherical wave, and the light that reflects also is spherical wave, and converges to another focus.Pointolite can be placed on the fixed point radius-of-curvature place of aspheric mirror thus, just a focus with each ring belt area all places the pointolite place, and second focus of each endless belt is the catoptrical focus point of this endless belt.
Distance between the bifocal of each match ellipsoid of design just can find a best-fit ellipsoid to represent this endless belt like this.It is very little to make that aspheric surface on this endless belt and ellipsoid face shape are closed error, is generally less than 1～2 wavelength and gets final product, as shown in Figure 7.Demonstrated the situation of two different endless belt matches among Fig. 7, the place of striped broadening is a fitted area.Thereby the reflected light of each endless belt can be regarded as the spherical wave of ellipsoid reflection, can carry out Diffraction Calculation by spherical wave.
The diffractive light field that each endless belt is calculated integrates and can obtain unified diffractive light field.After the shape reconstruction algorithm computes goes out face shape error face to face, therefrom deduct error of fitting and can obtain correct aspheric mirror error.
Detection method step of the present invention is as follows:
The first step: tested aspheric mirror is installed, the laser spots light source is arranged at its light source center axis overlapped and be in the fixed point radius-of-curvature place of measured lens with measured lens over glaze line position;
Second step: between laser spots light source and tested minute surface, be provided with and the adjustment semi-transparent semi-reflecting lens, make folded light beam to penetrate from direction perpendicular to measured lens over glaze line;
The 3rd the step: the CCD camera is placed near the focus of outgoing beam, and make outgoing beam near the diffraction image perfect imaging the focus on the target surface of CCD camera;
The 4th step: moving forward and backward the CCD camera, is initial point with measured lens fixed point radius-of-curvature, takes out of focus diffraction intensity picture on the diverse location, and the record position parameter, notes keeping CCD camera target surface perpendicular to the outgoing beam direction when taking;
The 5th step: with diffraction intensity picture, location parameter and the measured lens correlation parameter input computing machine of taking, pressing Fig. 3 algorithm flow by computing machine handles, several diffraction images that photograph are carried out the corrugated reconstruction calculations, and the face shape error that obtains tested minute surface distributes.
Claims (3)
1, a kind of aspheric mirror diffraction image detection method may further comprise the steps:
The first step: the laser spots light source is arranged at its light source center axis overlapped and be in the fixed point radius-of-curvature place of measured lens with measured lens over glaze line position;
Second step: between laser spots light source and tested minute surface, be provided with and the adjustment semi-transparent semi-reflecting lens, make folded light beam to penetrate from direction perpendicular to measured lens over glaze line;
The 3rd the step: the CCD camera is placed near the focus of outgoing beam, and make outgoing beam near the diffraction image perfect imaging the focus on the target surface of CCD camera;
The 4th step: moving forward and backward the CCD camera, is initial point with measured lens fixed point radius-of-curvature, takes out of focus diffraction intensity picture on the diverse location, and the record position parameter, notes keeping CCD camera target surface perpendicular to the outgoing beam direction when taking;
The 5th step: with diffraction intensity picture, location parameter and the measured lens correlation parameter input computing machine of taking, by minute surface face shape restructing algorithm several diffraction images that photograph are carried out the corrugated reconstruction calculations by computing machine, the face shape error that obtains tested minute surface distributes.
2, a kind of device that is used for the described method of claim 1, it is characterized in that comprising the laser spots light source that is used to send spherical wave, with the semi-transparent semi-reflecting lens of the reflecting light beam split of measured lens, record by the CCD camera of the reflecting light field intensity of the measured lens of semi-transparent semi-reflecting lens beam split, the adjustment platform that the CCD camera is installed, the main control computer that contains face shape restructing algorithm program that links to each other with CCD camera output terminal; Described laser spots light source is arranged at its light source center axis overlapped and be in the fixed point radius-of-curvature place of measured lens with measured lens over glaze line position; Semi-transparent semi-reflecting lens is arranged between laser spots light source and the tested minute surface, makes folded light beam to penetrate from the direction perpendicular to measured lens over glaze line; The CCD camera places near the focus of outgoing beam, and make outgoing beam near the diffraction image perfect imaging the focus on the target surface of CCD camera.
3, device according to claim 2 is characterized in that described adjustment platform is that platform is adjusted in five degree of freedom motion, and it is by rotating and form along the translation of X-axis and Y-axis respectively around X-axis and Y-axis respectively along the translation of Z axle and bidimensional.
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| CN101339008B (en) * | 2008-08-27 | 2010-06-02 | 中国科学院光电技术研究所 | Device for checking heavy caliber paraboloidal mirror K value coefficient |
| CN101819017B (en) * | 2010-04-13 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | Detecting device and method of vertex curvature radius of large-diameter non-spherical reflecting mirror |
| CN105701302B (en) * | 2016-01-15 | 2019-01-11 | 中国科学院西安光学精密机械研究所 | Spherical surface shaped parameter processing method based on discretization error technology for eliminating |
| CN106017863A (en) * | 2016-05-11 | 2016-10-12 | 上海应用技术学院 | Phase measurement deflection method for aspheric surface detection |
| CN107702664A (en) * | 2017-10-24 | 2018-02-16 | 北京信息科技大学 | A kind of reflective system for detecting verticality and method based on semiconductor laser alignment |
| CN110068447B (en) * | 2018-01-23 | 2021-07-27 | 舜宇光学（浙江）研究院有限公司 | Integrated diffraction optical element test equipment |
| CN110118645B (en) * | 2019-04-19 | 2021-11-05 | 西北核技术研究所 | Optical performance comprehensive evaluation method of semi-ellipsoid reflecting surface |
| CN110108251A (en) * | 2019-06-10 | 2019-08-09 | 中国科学院上海天文台 | The subreflector pose measurement system and measurement method of large-scale radio telescope |
| CN110567681B (en) * | 2019-09-26 | 2021-02-12 | 中国科学院长春光学精密机械与物理研究所 | Device and method for detecting non-common view field auto-collimation optical system |
| CN112097681A (en) * | 2020-09-16 | 2020-12-18 | 中国工程物理研究院激光聚变研究中心 | Complex optical curved surface shape error detection method based on speckle field phase recovery |
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