CN113702002B - Off-axis three-lens camera debugging test method and system based on CGH compensator - Google Patents
Off-axis three-lens camera debugging test method and system based on CGH compensator Download PDFInfo
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- CN113702002B CN113702002B CN202110993945.8A CN202110993945A CN113702002B CN 113702002 B CN113702002 B CN 113702002B CN 202110993945 A CN202110993945 A CN 202110993945A CN 113702002 B CN113702002 B CN 113702002B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
- G02B17/0642—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
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Abstract
An off-axis three-lens camera debugging test method and system based on a CGH compensator relate to the technical field of optical detection, solve the problem of complex debugging in the prior art, and the method comprises the following steps: providing a CGH compensator, installing a first reflecting mirror, comprising a compensator substrate, wherein one side of the substrate is provided with a first reflecting mirror diffraction region, an interferometer diffraction region, a third reflecting mirror diffraction region and a laser tracker target ball, and preliminarily calibrating the position of the CGH compensator through an interferometer, the interferometer diffraction region and the first reflecting mirror diffraction region by utilizing a laser tracker, the laser tracker target ball and the like, aligning the interferometer and adjusting the first reflecting mirror; adjusting the third reflector through the diffraction area of the third reflector and the interferometer; and the spatial position of the secondary reflector is adjusted according to the wave aberration of the off-axis three-reflector optical system measured by the interferometer through the standard plane reflector and the interferometer. The invention can meet the requirement of rapid adjustment and detection of the off-axis three-dimensional camera with large breadth, high resolution and large caliber on the ground.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to an off-axis three-lens assembly and adjustment testing method and system based on a CGH compensator.
Background
With the continuous deep and development of spatial science research, the spatial optical load is developed to high resolution, large breadth, multi-sensor combination and the like, the caliber of the optical load is continuously increased, and the field of view is also increasingly larger. An optical system in the form of three-reflector astigmatism (TMA) has a larger field of view and high imaging quality, wherein off-axis TMA (off-axis three-mirror for short) also has the advantages of high intermediate frequency modulation transfer function, compact structure, good stray light characteristics and the like, and is increasingly widely applied to space cameras. However, as the caliber of the off-axis three-reflector is larger and larger, the reflectors are relatively independent, the span is large, the space of each reflector is adjustable, the degree of freedom is more, and the like, so that the phenomena that the relatively accurate position of each reflector is difficult to determine, the space gesture of the reflector is difficult to accurately adjust, the space gesture of the reflector is discontinuous, and the like occur when the off-axis three-reflector imaging optical system is assembled and adjusted. The difficulty of the adjustment detection is also increased, and the development of the off-axis three-lens is restrained.
CGH is a Computer generated hologram (Computer-Generated Holograms, CGH), which is unique in that it can record both the intensity and phase of information, providing a very useful feature for expanding classical interferometry: numerical transmission and reconstruction of the wavefront. The method for detecting the aspheric surface by combining the calculation hologram and the zero optical system not only overcomes the difficulty in detecting the complex aspheric surface element with large wave difference, but also greatly reduces the manufacturing difficulty and the price of the device. The CGH compensator is introduced into the field of aspheric surface interference detection due to the unique wavefront transformation capability, simple structure, simple adjustment and other outstanding advantages. The CGH compensator is used for receiving interference light sent by the interferometer, and after diffraction, the interference light is converged by the optical lens and then vertically incident on the free-form surface reflecting mirror to be detected, so that zero compensation detection of the free-form surface reflecting mirror to be detected is realized.
The traditional CGH compensator is often used for detecting a single optical element, and a CGH compensator is rarely used for detecting multiple reflectors simultaneously, so that an adjustment test system for an off-axis three-lens optical system based on the traditional CGH compensator is complex, an adjustment method is complex, and adjustment efficiency is low.
Disclosure of Invention
In view of the above problems, the present invention provides an off-axis three-lens assembly testing method and system based on a CGH compensator.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the off-axis three-lens assembly and adjustment testing method based on the CGH compensator comprises the following steps:
providing a CGH compensator and a first reflector, and mounting the first reflector on a main backboard of an off-axis three-lens camera, wherein the first reflector is used as a mounting reference of an off-axis three-lens camera optical system; the CGH compensator comprises a compensator substrate, wherein a first reflector diffraction area, an interferometer diffraction area, a third reflector diffraction area and a second laser tracker target ball are arranged on one side of the compensator substrate, and the second laser tracker target ball is detachably connected with the compensator substrate; mounting a first laser tracker target ball on a first reflector; the relative positions of the CGH compensator and the first reflecting mirror are primarily calibrated by adjusting the positions of the CGH compensator by utilizing the laser tracker, the second laser tracker target ball and the first laser tracker target ball;
step two, providing an interferometer, adjusting the positions of the CGH compensator and the interferometer until the alignment of the interferometer is completed through the diffraction area of the interferometer and the interferometer, and the calibration of the position of the CGH compensator is completed through the diffraction area of the first reflecting mirror and the interferometer, and the CGH compensator is assembled and adjusted; when a measuring beam emitted by the interferometer returns to the interferometer through a diffraction region of the interferometer, the wave aberration of the optical path meets the use requirement and zero stripes are formed on the interferometer, the alignment of the interferometer is realized; when a measuring beam emitted by the interferometer passes through the diffraction area of the first reflecting mirror and returns to the interferometer, the wave aberration of the light path meets the use requirement and zero stripes are formed on the interferometer, and the calibration of the position of the CGH compensator is completed;
step three, mounting a third reflector on a main backboard of the off-axis three-reflector, and adjusting the spatial position of the third reflector until a measuring beam emitted by the interferometer is diffracted by a diffraction area of the third reflector and then reflected by the third reflector, and then returns to the interferometer to interfere, wherein the wave aberration of the light path meets the use requirement and forms zero stripes on the interferometer, and the third reflector is adjusted;
and fourthly, removing the CGH compensator, installing a second reflector, providing a standard plane reflector, adjusting the position of the interferometer to enable the focus of the interferometer to be located on the image surface of the off-axis three-lens optical system, enabling the measured beam to be emitted by the interferometer and then to be incident on the standard plane reflector after passing through the off-axis three-lens optical system, enabling the measured beam to return to the interferometer after being reflected by the standard plane reflector, enabling the interferometer to measure wave aberration of the off-axis three-lens optical system in the current state, and adjusting the spatial position of the second reflector according to the wave aberration of the off-axis three-lens optical system in the corresponding field of view in the current state, wherein the wave aberration of the off-axis three-lens optical system is measured by the interferometer until the wave aberration of the off-axis three-lens optical system meets the use requirement, and finishing the adjustment and testing of the off-axis three-lens optical system. The assembling and testing system adopting the assembling and testing method of the off-axis three-lens camera based on the CGH compensator comprises the CGH compensator, an interferometer, an auxiliary tool, a five-dimensional adjusting table, a CGH compensator mounting frame, a laser tracker, an air floatation platform, a first laser tracker target ball and a standard plane reflector; the auxiliary tool is arranged on the air floatation platform and used for installing the main backboard of the off-axis three-dimensional camera, the CGH compensator mounting frame can be arranged on the air floatation platform, the five-dimensional adjusting table is arranged on the CGH compensator mounting frame, the CGH compensator is arranged on the five-dimensional adjusting table, the first laser tracker target ball is detachably arranged on the first reflector of the optical system of the off-axis three-dimensional camera, the laser tracker can be arranged on the air floatation platform, and the relative positions of the CGH compensator and the first reflector can be calibrated through the laser tracker, the first laser tracker target ball and the second laser tracker target ball by taking the first reflector as a reference; the standard plane reflector and the interferometer are both arranged on the air floatation platform, the interferometer can emit measuring light beams, the interferometer can measure wave aberration of the off-axis three-lens optical system according to interference fringes obtained by the fact that the measuring light beams are reflected to the interferometer through the off-axis three-lens optical system, and the retroreflection of the measuring light beams after passing through the CGH compensator and/or the off-axis three-lens optical system can interfere with independent optical references on the interferometer; the standard plane reflector is arranged corresponding to the first reflector, and the measuring beam emitted by the interferometer can be incident on the standard plane reflector after passing through the third reflector, the second reflector and the first reflector in sequence, and the reflecting surface of the standard plane reflector is perpendicular to the measuring beam incident on the standard plane reflector.
The beneficial effects of the invention are as follows:
1. the CGH compensator designed by the invention has the advantages of simple structure, simple and easy realization of processing, and based on the CGH compensator, the space off-axis three-dimensional camera is realized by utilizing the interferometer and the laser tracker to carry out the co-reference adjustment test, the relative position adjustment of the first reflecting mirror and the third reflecting mirror of the system is completed under the guidance of the CGH compensator, and the second reflecting mirror is adjusted to complete the adjustment test of the optical system. The assembly and adjustment test system is convenient and quick to assemble and adjust, high in efficiency, high in assembly and adjustment precision, high in universality, convenient to popularize and simple in assembly and adjustment method, and the cost is greatly reduced. The system and the method for testing the adjustment of the off-axis three-dimensional camera can meet the requirement of rapid adjustment and detection of the off-axis three-dimensional camera with large width, high resolution and large caliber on the ground.
2. According to the adjustment test method and system, the CGH compensator is utilized to carry out co-reference adjustment on the first reflecting mirror and the third reflecting mirror of the off-axis three-dimensional camera, the degree of freedom of adjustment of the reflecting mirrors is reduced, the position of the secondary mirror is only required to be adjusted later, the degree of freedom is reduced to 5, the adjustment cost and adjustment time are saved, and the adjustment efficiency is improved.
3. The invention realizes the accurate adjustment of the optical elements one by an interference detection method, the accurate position relation among the optical elements depends on the accurate wavefront generating capability of generating a plurality of relative positions by the CGH compensator, and the positioning precision of each component is higher.
4. The method for carrying out optical adjustment test by using the CGH compensator is not limited to an off-axis three-lens optical system, and the application of the method can be popularized to other types of optical systems, including a reflection optical system and a refraction optical system, and is hopeful to solve the problem of a free-form surface optical system with higher adjustment difficulty.
Drawings
Fig. 1 is a schematic diagram of the structure of the CGH compensator of the present invention.
FIG. 2 is a flow chart of the tuning test method of the present invention.
Fig. 3 is a diagram of an optical path constructed in step one of the tuning test method of the present invention.
Fig. 4 is a diagram showing a structure of a first mirror in the first step of the present invention.
Fig. 5 is a schematic diagram of the present invention for tuning a first mirror and a third mirror using a CGH compensator and an interferometer.
Fig. 6 is a schematic diagram of an optical path and a structure for performing adjustment and test on an off-axis three-lens optical system in step four of the adjustment testing method of the present invention.
FIG. 7 is a schematic diagram of an off-axis three-lens optical system after the adjustment test according to the present invention.
In the figure: 1. the laser tracking system comprises a first reflector, 2, a third reflector, 3, an off-axis three-reflector main back plate, 4, an auxiliary tool, 5, an interferometer, 6, an interferometer standard lens, 7, a CGH compensator, 701, a first reflector diffraction area, 702, an interferometer diffraction area, 703, a third reflector diffraction area, 704, a compensator substrate, 8, a five-dimensional adjusting table, 9, an interferometer mounting frame, 10, a CGH compensator mounting frame, 11, a marble air bearing platform, 12, a second reflector, 13, an off-axis camera focal plane position, 14, a second laser tracker target ball, 15, a laser tracker, 16, a standard plane reflector, 17 and a first laser tracker target ball.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.
And the CGH compensator 7 is used for the off-axis three-lens optical system adjustment test. The CGH compensator 7 comprises a compensator substrate 704 and a second laser tracker target ball 14 mounted on the compensator substrate 704, the compensator substrate 704 being provided on the same side with a first mirror diffraction region 701, an interferometer diffraction region 702 and a third mirror diffraction region 703. The first mirror diffraction region 701, the interferometer diffraction region 702, the third mirror diffraction region 703 and the second laser tracker target balls 14 are located on the same side of the compensator substrate 704, the second laser tracker target balls 14 and the compensator substrate 704 are detachably connected, and the number of the second laser tracker target balls 14 is usually not less than 3. The first mirror diffraction region 701 is used to implement adjustment of the first mirror 1 in cooperation with the interferometer 5, and the first mirror diffraction region 701 is capable of diffracting interference light (interference light, i.e., a measuring beam) emitted from the interferometer 5 and irradiated thereto, to obtain diffracted light for incidence on the first mirror 1 of the off-axis three-mirror camera. The third mirror diffraction region 703 is used to implement the adjustment of the third mirror 2 in cooperation with the interferometer 5, and the third mirror diffraction region 703 is capable of diffracting the interference light emitted from the interferometer 5 and irradiated thereto, resulting in diffracted light for incidence on the third mirror 2 of the off-axis three-mirror camera. The interferometer diffraction zone 702 is used to align with the interferometer 5, reflect interference light emitted from the interferometer 5 and impinging thereon, and reflect a beam of light for incidence on the interferometer 5 and interference with an independent optical reference on the interferometer 5. The second laser tracker target ball 14 is used for matching with the laser tracker 15 to realize the calibration of the space position of the CGH compensator 7. As shown in fig. 1, the first mirror diffraction region 701, the interferometer diffraction region 702, and the third mirror diffraction region 703 are arranged in this order from top to bottom, but this order is not limited.
The diffraction region of the CGH compensator 7 is fixed, and then the positional relationship between the light wave exiting from the first mirror diffraction region 701 and the light wave exiting from the third mirror diffraction region 703 is determined. The CGH compensator 7 is provided with a first mirror diffraction region 701 and a third mirror diffraction region 703 at the same time, and the wavefront passing through the first mirror diffraction region 701 and the third mirror diffraction region 703 is the same as the beam direction of the off-axis three-mirror optical system. And taking the CHG compensator as a reference to determine the spatial position of the three mirrors of the off-axis three-lens optical system, thereby realizing zero compensation detection on the free-form surface mirror to be detected. The CGH compensator 7 plate based on the invention can realize the off-axis three-lens assembly and adjustment test. According to the design of optical design software, the required diffraction area is marked on the compensator substrate 704, and the CGH compensator 7 is obtained, the CGH compensator 7 can accurately generate a plurality of wave fronts with almost any shape, the relative position relationship between any two wave fronts generated by the CGH compensator 7 is determined, and the accuracy and the design flexibility endow the CGH compensator 7 with a strong capability of guiding the adjustment of optical elements.
The method for testing the adjustment of the off-axis three-lens-unit optical system based on the CGH compensator 7, as shown in FIG. 2, comprises the following steps:
step one, an optical path is built, as shown in fig. 3, a first reflecting mirror 1 is installed, the first reflecting mirror 1 is taken as a reference, the CGH compensator 7 is adjusted to enable a first reflecting mirror diffraction area 701 to correspond to the first reflecting mirror 1, and the preliminary position of the CGH compensator 7 is calibrated by utilizing a second laser tracker ball target 14 and a first tracker ball target 17. The method comprises the following steps: the first reflector 1 is mounted on the off-axis three-lens main back plate 3, and the off-axis three-lens main back plate 3 is mounted on the auxiliary tool 4. The CGH compensator 7 of the present invention is mounted on a five-dimensional adjustment table 8, the five-dimensional adjustment table 8 being used to adjust the spatial attitude of the CGH compensator 7. The five-dimensional adjustment table 8 is mounted on a CGH compensator mounting frame 10. The auxiliary tool 4, the CGH compensator mounting frame 10 and the laser tracker 15 are arranged on the marble air floatation platform 11; the camera ground adjustment process has higher requirements on the stability of the environment, and the marble air flotation platform 11 can effectively weaken the influence of micro-vibration on a detection light path. Mounting the first laser tracker target ball 17 on the first mirror 1 as in fig. 4 ensures that the second laser tracker target ball 14 of the CGH compensator 7 is mounted on the CGH compensator 7. Coarse positioning is performed on the CGH compensator 7 by adjusting the five-dimensional adjustment table 8, that is, the five-dimensional adjustment table 8 is adjusted so that the first mirror diffraction region 701 of the CGH compensator 7 corresponds to the first mirror 1, the position of the CGH compensator 7 and the position of the first mirror 1 are initially calibrated by using the laser tracker 15, that is, the relative positions of the CGH compensator 7 and the first mirror 1 are calibrated, and thus, the initial position of the CGH compensator 7 is calibrated. After calibration, the first laser tracker target ball 17 on the first mirror 1 and the second laser tracker target ball 14 on the CGH compensator 7 are removed. In the subsequent process, the positions of the first reflecting mirror 1, the main back plate 3 of the off-axis three-lens camera and the auxiliary tool 4 are kept unchanged.
And step two, accurately positioning the position of the CGH compensator 7 and simultaneously accurately positioning the position of the interferometer 5. In the second step, the first reflecting mirror 1 and the interferometer 5 are used for accurately calibrating the position of the CGH compensator 7 (the CGH compensator 7 is adjusted by adjusting the five-dimensional adjusting table 8 to realize the calibration of the position of the CGH compensator 7), an optical path is built as shown in fig. 5, the interferometer mounting frame 9 is placed on the marble air floating platform 11, the interferometer 5 is mounted on the interferometer mounting frame 9, the interferometer 5 corresponds to the interferometer diffraction region 702, and the interferometer mounting frame 9, the CGH compensator mounting frame 10 and the auxiliary tool 4 are sequentially arranged. The interferometer 5 is provided with an interferometer standard lens 6, and the light emitted by the interferometer 5 and the light beam incident on the interferometer pass through the interferometer standard lens 6. The positions of the CGH compensator 7 and the interferometer 5 are adjusted until the following two conditions can be simultaneously met, the first condition is that the interference light emitted by the interferometer 5 can return to the interferometer 5 to interfere after being reflected by the interferometer diffraction region 702, the wave aberration of the light path (the light path of the measuring light beam emitted by the interferometer 5, which strikes the interferometer diffraction region 702 and returns to the interferometer 5) meets the requirement, and zero stripes are formed on the interferometer 5; in the second condition, the interference light emitted by the interferometer 5 can be diffracted by the first mirror diffraction region 701 and then transmitted to the first mirror 1, and the interference light returns to the interferometer 5 in the original path after being reflected by the first mirror 1, and the wave aberration of the light path (the light path of the measurement light beam emitted by the interferometer 5 reaching the first mirror 1 through the first mirror diffraction region 701, being reflected by the first mirror 1 and then returning to the interferometer 5 through the first mirror diffraction region 701) meets the requirement, and the zero fringes are formed on the interferometer 5. The positions of the CGH compensator 7 and interferometer 5 are kept unchanged during the subsequent step three. The interference fringes are formed in the interferometer 5 in a zero fringe state, and the arrangement of coefficients between dark fringes observed on the interferometer 5 is distributed and not dense, and the number of the fringes is close to zero.
And thirdly, mounting the third reflector 2 on the main backboard 3 of the off-axis three-mirror camera, adjusting the space position of the third reflector 2 until the interference light emitted by the interferometer 5 is diffracted by the third reflector diffraction area 703 and then transmitted to the third reflector 2, the original path is returned to the interferometer 5 for interference after being reflected by the third reflector 2, the wave aberration of the light path (the light path of the measuring beam emitted by the interferometer 5, which is reflected by the third reflector 2 and then returned to the interferometer 5 through the third reflector diffraction area 703) meets the requirement, and the zero stripe is formed on the interferometer 5. Thus, the co-reference mounting of the first mirror 1 and the third mirror 2 is completed.
Step four, an auto-collimation detection light path is built by using a standard plane reflector 16 and an interferometer 5, the position of a second reflector 12 is accurately adjusted, the auto-collimation detection light path is built as shown in figure 6, a CGH compensator mounting frame 10, a CGH compensator 7 and a five-dimensional adjustment table 8 are removed, the second reflector 12 is mounted on a frame, the frame is mounted on an off-axis three-mirror main backboard 3, the standard plane reflector 16 is mounted on a marble air-bearing platform 11, the position of the interferometer 5 is adjusted so that the focus of the interferometer 5 is positioned on the image surface of an off-axis three-mirror optical system, the wave aberration of the off-axis three-mirror optical system is detected by adopting an auto-collimation interference method, the interference light path consists of the off-axis three-mirror optical system, the standard plane reflector 16 and the interferometer 5, spherical waves emitted by the interferometer 5 are irradiated on the off-axis three-mirror optical system, the wave front carries wave aberration information of the off-axis three-lens optical system to return to the interferometer 5, the wave aberration information of the off-axis three-lens optical system can be measured by the interferometer 5, the wave aberration of the off-axis three-lens optical system of the corresponding field of view in the current state can be measured by the interferometer 5, the spatial position of the second reflector 12 can be adjusted according to the wave aberration of the off-axis three-lens optical system of the corresponding field of view in the current state measured by the interferometer 5 until the wave aberration of the off-axis three-lens optical system meets the use requirement, the three-reflection schematic diagram of the resulting off-axis three-reflection optical system is shown in fig. 7.
An adjustment test system of an off-axis three-lens-unit optical system based on a CGH compensator 7, the adjustment test system comprising: interferometer 5, auxiliary fixtures 4, five-dimensional adjustment platform 8, CGH compensator mounting bracket 10, above-mentioned CGH compensator 7, laser tracker 15, air supporting platform, first laser tracker target ball 17 and standard plane mirror 16. The air-floating platform adopts a marble air-floating platform 11. The auxiliary fixture 4 is arranged on the air floating platform, and the auxiliary fixture 4 is used for installing the main backboard 3 of the off-axis three-lens camera. The CGH compensator mounting bracket 10 can be mounted on an air floating platform, the five-dimensional adjustment table 8 is mounted on the CGH compensator mounting bracket 10, the CGH compensator 7 is mounted on the five-dimensional adjustment table 8, the CGH compensator mounting bracket 10 is used for bearing the five-dimensional adjustment table 8 and the CGH compensator 7, and the five-dimensional adjustment table 8 is used for adjusting the position of the CGH compensator 7. The first laser tracker target ball 17 is used for being detachably installed on the first reflector 1 of the off-axis three-lens optical system, the laser tracker 15 can be installed on the air floatation platform, and the relative positions of the CGH compensator 7 and the first reflector 1 can be calibrated through the laser tracker 15, the first laser tracker target ball 17 and the second laser tracker target ball 14. The standard plane reflector 16 is installed on the air floatation platform, the standard plane reflector 16 is arranged corresponding to the first reflector 1, the interferometer 5 is installed on the air floatation platform, the interferometer 5 can emit measuring beams, retroreflection of the measuring beams after passing through the CGH compensator 7 and/or the off-axis three-lens optical system can interfere with independent optical references on the interferometer 5, and the interferometer 5 can measure wave aberration of an optical path retroreflected to the interferometer through retroreflection of the measuring beams. The retroreflection of the measuring beam after passing through the interferometer diffraction region 702 can interfere with an independent optical reference on the interferometer 5, namely, the interferometer 5 can measure the wave aberration of the optical path according to the interference fringes, and the wave aberration of the optical path can be measured according to the interference fringes obtained by the retroreflection of the measuring beam after passing through the interferometer diffraction region 702 to the interferometer 5; the retroreflection of the measuring beam after passing through the first reflecting mirror diffraction region 701 and the first reflecting mirror 1 can interfere with an independent optical reference on the interferometer 5, namely, the interferometer 5 can measure the wave aberration of the optical path according to interference fringes, and the interferometer 5 can measure the wave aberration of the optical path according to the interference fringes obtained by retroreflecting the measuring beam after passing through the first reflecting mirror diffraction region 701 and the first reflecting mirror 1 to the interferometer 5; the retroreflection of the measuring beam after passing through the third reflecting mirror diffraction region 703 and the third reflecting mirror 2 can interfere with an independent optical reference on the interferometer 5, that is, the interferometer 5 can measure the wave aberration of the optical path according to the interference fringes, and the interferometer 5 can measure the wave aberration of the optical path according to the interference fringes obtained by the retroreflection of the measuring beam after passing through the third reflecting mirror diffraction region 703 and the third reflecting mirror 2 and then onto the interferometer 5; the retroreflection of the measuring beam after passing through the first reflecting mirror 1, the second reflecting mirror 12 and the third reflecting mirror 2 can interfere with the independent optical reference on the interferometer 5, namely, the interferometer 5 can measure the wave aberration of the off-axis three-lens optical system according to the interference fringes, namely, the interferometer can measure the wave aberration of the off-axis three-lens optical system according to the interference fringes obtained by the measuring beam after passing through the off-axis three-lens optical system and retroreflecting to the interferometer.
When the CGH compensator 7 and the first reflecting mirror 1 are both positioned on the air floatation platform and the second reflecting mirror 12 and the third reflecting mirror 2 are not positioned on the air floatation platform, the following two conditions can be simultaneously satisfied by adjusting the positions of the CGH compensator 7 and the interferometer 5, the interference light emitted by the interferometer 5 can return to the interferometer 5 to interfere after being reflected by the interferometer diffraction region 702, zero stripes are formed on the interferometer 5, and the wave aberration of the light path satisfies the requirement; the interference light emitted by the interferometer 5 can be transmitted to the first reflector 1 after being diffracted by the first reflector diffraction area 701, the interference light is returned to the interferometer 5 in the original path after being reflected by the first reflector 1, zero fringes are formed on the interferometer 5, and the wave aberration of the light path meets the requirement.
When the CGH compensator 7, the first mirror 1 and the third mirror 2 are all located on the air floating platform and the second mirror 12 is not located on the air floating platform, by adjusting the spatial position of the third mirror 2, the interference light emitted by the interferometer 5 can be transmitted to the third mirror 2 after being diffracted by the third mirror diffraction region 703, and the interference light returns to the interferometer 5 after being reflected by the third mirror 2, so that zero fringes are formed on the interferometer 5, and the wave aberration of the light path meets the requirements.
When the standard plane mirror 16, the first mirror 1, the second mirror 12 and the third mirror 2 are all located on the air-floating platform (at this time, the CGH compensator 7 is not required to be located on the air-floating platform), the spherical wave emitted by the interferometer 5 irradiates onto the off-axis three-mirror optical system, is converted into plane wave after passing through the off-axis three-mirror optical system, and is emitted out of the plane wave, and the plane wave is returned to the interferometer 5 after being reflected by the standard plane mirror 16, that is, the measuring beam emitted by the interferometer 5 is reflected by the third mirror 2, reflected by the second mirror 12, reflected by the first mirror 1, reflected by the standard plane mirror 16, reflected by the first mirror 1, reflected by the second mirror 12 and reflected by the third mirror 2, and then returned to the interferometer 5, and is interfered between independent optical references on the interferometer 5, at this time, the interferometer 5 can measure the wave aberration of the off-axis three-mirror optical system of the corresponding field in the current state, and the spatial position of the second mirror 12 can be adjusted according to the wave aberration of the off-axis three-mirror optical system of the corresponding field in the current state measured by the interferometer 5 until the wave aberration of the off-axis three-mirror system of the off-axis three-mirror system meets the requirements of the off-axis three-axis optical system.
The CGH compensator 7 designed by the invention has the advantages of simple structure and easy realization of processing, the space off-axis three-mirror camera is realized to carry out the co-reference adjustment test by using the interferometer 5 and the laser tracker 15 based on the CGH compensator 7 designed by the invention, the relative position adjustment of the first reflecting mirror 1 and the third reflecting mirror 2 of the system is completed under the guidance of the CGH compensator 7, and the second reflecting mirror 12 is adjusted to complete the adjustment test of the optical system. The assembly and adjustment test system is convenient and quick to assemble and adjust, high in efficiency, high in assembly and adjustment precision, high in universality, convenient to popularize and simple in assembly and adjustment method, and the cost is greatly reduced. The assembly and adjustment testing system can meet the requirement of carrying out rapid assembly and adjustment detection on the off-axis three-lens with large width, high resolution and large caliber on the ground. The adjustment test system utilizes the CGH compensator 7 to carry out co-reference adjustment on the first reflector 1 and the third reflector 2 of the off-axis three-reflector, reduces the degree of freedom of adjustment of the reflectors, only needs to carry out position adjustment on secondary reflectors in the follow-up process, reduces the degree of freedom to 5, saves adjustment cost and adjustment time, and improves adjustment efficiency; according to the invention, the accurate adjustment of the optical elements is realized one by an interference detection method, the accurate position relation among the optical elements depends on the accurate wavefront generating capacity of generating a plurality of relative positions by the CGH compensator 7, and the positioning precision of each component is higher; the method for performing optical adjustment test by using the CGH compensator 7 is not limited to an off-axis three-lens optical system, and the application of the method can be popularized to other types of optical systems, including a reflection optical system and a refraction optical system, and is hopeful to solve the problem of a free-form surface optical system with higher adjustment difficulty.
Claims (7)
1. The off-axis three-lens assembly and adjustment testing method based on the CGH compensator is characterized by comprising the following steps of:
providing a CGH compensator and a first reflector, and mounting the first reflector on a main backboard of an off-axis three-lens camera, wherein the first reflector is used as a mounting reference of an off-axis three-lens camera optical system; the CGH compensator comprises a compensator substrate, wherein a first reflector diffraction area, an interferometer diffraction area, a third reflector diffraction area and a second laser tracker target ball are arranged on one side of the compensator substrate, and the second laser tracker target ball is detachably connected with the compensator substrate; mounting a first laser tracker target ball on a first reflector; the method comprises the steps of enabling a diffraction area of a first reflecting mirror to correspond to the first reflecting mirror through adjusting a CGH compensator, and primarily calibrating the position of the CGH compensator and the relative position of the first reflecting mirror through adjusting the position of the CGH compensator by utilizing a laser tracker, a target ball of a second laser tracker and a target ball of the first laser tracker;
step two, providing an interferometer, adjusting the positions of the CGH compensator and the interferometer until the alignment of the interferometer is completed through the diffraction area of the interferometer and the interferometer, and the calibration of the position of the CGH compensator is completed through the diffraction area of the first reflecting mirror and the interferometer, and the CGH compensator is assembled and adjusted; when a measuring beam emitted by the interferometer returns to the interferometer through a diffraction region of the interferometer, the wave aberration of the optical path meets the use requirement and zero stripes are formed on the interferometer, the alignment of the interferometer is realized; when a measuring beam emitted by the interferometer passes through the diffraction area of the first reflecting mirror and returns to the interferometer, the wave aberration of the light path meets the use requirement and zero stripes are formed on the interferometer, and the calibration of the position of the CGH compensator is completed;
step three, mounting a third reflector on a main backboard of the off-axis three-reflector, and adjusting the spatial position of the third reflector until a measuring beam emitted by the interferometer is diffracted by a diffraction area of the third reflector and then reflected by the third reflector, and then returns to the interferometer to interfere, wherein the wave aberration of the light path meets the use requirement and forms zero stripes on the interferometer, and the third reflector is adjusted;
and fourthly, removing the CGH compensator, installing a second reflector, providing a standard plane reflector, adjusting the position of the interferometer to enable the focus of the interferometer to be located on the image surface of the off-axis three-lens optical system, enabling the measured beam to be emitted by the interferometer and then to be incident on the standard plane reflector after passing through the off-axis three-lens optical system, enabling the measured beam to return to the interferometer after being reflected by the standard plane reflector, enabling the interferometer to measure wave aberration of the off-axis three-lens optical system in the current state, and adjusting the spatial position of the second reflector according to the wave aberration of the off-axis three-lens optical system in the corresponding field of view in the current state, wherein the wave aberration of the off-axis three-lens optical system is measured by the interferometer until the wave aberration of the off-axis three-lens optical system meets the use requirement, and finishing the adjustment and testing of the off-axis three-lens optical system.
2. The method for testing the adjustment of the off-axis three-lens camera based on the CGH compensator according to claim 1, wherein the first step is as follows: installing a CGH compensator on a five-dimensional adjusting table for adjusting the spatial attitude of the CGH compensator, installing the five-dimensional adjusting table on a CGH compensator installing frame, installing a first reflecting mirror on a main back plate of an off-axis three-lens main back plate, installing the main back plate of the off-axis three-lens main back plate on an auxiliary tool, placing the auxiliary tool, the CGH compensator installing frame and a laser tracker on an air floatation platform, and installing a first laser tracker target ball on the first reflecting mirror; the first reflector is used as a reference, a diffraction area of the first reflector corresponds to the first reflector by adjusting a five-dimensional adjusting table, and the positions of the CGH compensator and the relative positions of the first reflector are calibrated by utilizing a laser tracker, a second laser tracker target ball and a first laser tracker target ball;
the interferometer in the second step is placed on an air floatation platform through an interferometer mounting frame;
and step four, removing the CGH compensator mounting frame and the five-dimensional adjusting table, wherein the standard plane mirror is mounted on the air floatation platform.
3. The tuning test method of an off-axis three-mirror camera based on a CGH compensator according to claim 1, wherein the first mirror diffraction region is capable of diffracting a measuring beam emitted from an interferometer and irradiated thereto to obtain diffracted light for incidence on the first mirror of the off-axis three-mirror camera; the third reflector diffraction region is capable of diffracting the measuring beam emitted from the interferometer and irradiated thereto to obtain diffracted light for incidence on the third reflector of the off-axis three-reflector; an interferometer diffraction zone for aligning said one CGH compensator with the interferometer, the interferometer diffraction zone being capable of reflecting back to the interferometer a light beam emitted from the interferometer and impinging thereon; the second laser tracker target ball can be matched with a laser tracker to achieve the calibration of the space position of the CGH compensator.
4. The tuning test method of an off-axis three-mirror camera based on a CGH compensator according to claim 1, wherein the first mirror diffraction region, the interferometer diffraction region, and the third mirror diffraction region are sequentially arranged from top to bottom.
5. An adjustment testing system adopting the adjustment testing method of the off-axis three-lens camera based on the CGH compensator according to any one of claims 1 to 4 is characterized by comprising the CGH compensator, an interferometer, an auxiliary tool, a five-dimensional adjusting table, a CGH compensator mounting frame, a laser tracker, an air floatation platform, a first laser tracker target ball and a standard plane reflector; the auxiliary tool is arranged on the air floatation platform and used for installing the main backboard of the off-axis three-dimensional camera, the CGH compensator mounting frame can be arranged on the air floatation platform, the five-dimensional adjusting table is arranged on the CGH compensator mounting frame, the CGH compensator is arranged on the five-dimensional adjusting table, the first laser tracker target ball is detachably arranged on the first reflector of the optical system of the off-axis three-dimensional camera, the laser tracker can be arranged on the air floatation platform, and the relative positions of the CGH compensator and the first reflector can be calibrated through the laser tracker, the first laser tracker target ball and the second laser tracker target ball by taking the first reflector as a reference; the standard plane reflector and the interferometer are both arranged on the air floatation platform, the interferometer can emit measuring beams, and the interferometer can measure wave aberration of the off-axis three-lens optical system according to interference fringes obtained by the fact that the measuring beams are reflected to the interferometer through the off-axis three-lens optical system; the standard plane reflector is arranged corresponding to the first reflector, and the measuring beam emitted by the interferometer can be incident on the standard plane reflector after passing through the third reflector, the second reflector and the first reflector in sequence, and the reflecting surface of the standard plane reflector is perpendicular to the measuring beam incident on the standard plane reflector;
the interferometer can measure the wave aberration of the optical path according to the interference fringes obtained by the measuring light beam passing through the first reflector diffraction area and the first reflector and then being reflected to the interferometer, can measure the wave aberration of the optical path according to the interference fringes obtained by the measuring light beam passing through the third reflector diffraction area and the third reflector and then being reflected to the interferometer, and can measure the wave aberration of the optical path according to the interference fringes obtained by the measuring light beam passing through the interferometer diffraction area and then being reflected to the interferometer;
the retroreflection of the measuring beam emitted by the interferometer after passing through the diffraction area of the interferometer can interfere with an independent optical reference on the interferometer; the retroreflection of the measuring beam emitted by the interferometer after passing through the diffraction area of the first reflecting mirror and the first reflecting mirror can interfere with an independent optical reference on the interferometer; the retroreflection of the measuring beam emitted by the interferometer after passing through the diffraction area of the third reflector and the third reflector can interfere with an independent optical reference on the interferometer; the retroreflection of the measuring beam emitted by the interferometer after passing through the third reflector, the second reflector, the first reflector and the standard plane reflector can interfere with an independent optical reference on the interferometer;
when the CGH compensator and the first reflecting mirror are both positioned on the air floatation platform and the second reflecting mirror and the third reflecting mirror are not positioned on the air floatation platform, the following two conditions can be simultaneously met by adjusting the positions of the CGH compensator and the interferometer, interference light emitted by the interferometer can return to the interferometer to interfere after being reflected by a diffraction region of the interferometer, wave aberration of the light path meets the requirement, and zero stripes are formed on the interferometer; and interference light emitted by the interferometer can be transmitted to the first reflector after being diffracted by the diffraction area of the first reflector, and the interference light is returned to the interferometer to be interfered after being reflected by the first reflector, wave aberration of the light path meets the requirement, and zero stripes are formed on the interferometer.
6. The tuning test system of claim 5, wherein when the CGH compensator, the first mirror and the third mirror are all positioned on the air bearing platform and the second mirror is not positioned on the air bearing platform, by adjusting the spatial position of the third mirror, the interference light emitted by the interferometer can be transmitted to the third mirror after being diffracted by the diffraction area of the third mirror, and the interference light is returned to the interferometer after being reflected by the third mirror, the wave aberration of the light path meets the requirement and forms zero fringes on the interferometer.
7. The system of claim 5, wherein when the standard plane mirror, the first mirror, the second mirror, and the third mirror are all positioned on the air bearing platform, the measuring beam emitted from the interferometer can be reflected by the third mirror, the second mirror, the first mirror, the standard plane mirror, the first mirror, the second mirror, and the third mirror in sequence, and then returned to the interferometer to interfere with the independent optical reference on the interferometer, and the wave aberration of the off-axis three-mirror optical system satisfies the requirements.
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Denomination of invention: The installation and testing method and system of off-axis three mirror camera based on CGH compensator Granted publication date: 20240112 Pledgee: Changchun Development Rural Commercial Bank Co.,Ltd. Pledgor: Changguang Satellite Technology Co.,Ltd. Registration number: Y2024220000026 |