CN111536896A - Automatic detection device and method for laser interference surface shape detection - Google Patents
Automatic detection device and method for laser interference surface shape detection Download PDFInfo
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention relates to a laser interference surface shape detection automatic detection device and a method, comprising the following steps: the device comprises a laser interferometer, a binocular camera, a diffraction light spot receiving camera, a CGH, a light spot receiving screen with a central light through hole, a measured mirror and a projection cross-hair detector, wherein the laser interferometer is fixedly connected with the binocular camera, the diffraction light spot receiving camera is fixedly connected with the CGH, and the measured mirror is fixedly connected with the projection cross-hair detector; the CGH is arranged in front of the focus of the standard mirror of the laser interferometer and far away from the direction of the laser interferometer; the spot receiving screen with the central light through hole can be removed and replaced at the focus of the standard mirror of the laser interferometer. Based on a binocular camera, a projection cross-hair centroid detector, a multi-stage diffraction light spot identification and positioning sensor and an interference fringe aberration decoupling laser interference surface shape detection light path multi-stage pose automatic adjustment method, the optical positioning from mm-stage mechanical positioning to sub-mum-stage optical positioning is achieved, and therefore automatic surface shape detection of the nm-stage optical element is completed.
Description
Technical Field
The invention belongs to the field of automatic detection of optical element surface shapes, and particularly relates to an automatic detection device and method for laser interference surface shape detection.
Background
Due to the extremely high precision requirement, the detection process of the optical element surface shape detection usually needs the participation of experienced professionals, and the automation degree is very low. The traditional high-precision optical element surface shape detection technology comprises a profile scanning method, a shack-Hartmann detection method, a phase deflection method, a laser interference detection method and the like, and the automatic detection in the range of the stroke of scanning equipment can be realized only by the profile scanning method that a probe directly measures the rise of each point of a mirror surface along a preset path. However, the point-by-point detection of the method requires long time, the sampling density is limited, the medium-high frequency error of the mirror surface cannot be reflected, and the detection precision is limited by the performance of the scanning mechanism, the environmental stability and other factors.
The laser interference surface shape detection method is a standard method of current high-precision optical detection, a plane/spherical interferometer developed by Zygo company becomes a standard pole in the optical detection industry, and the detection precision of the plane/spherical interferometer can be better than 3 nm. However, due to the small dynamic range of the interferometry, various aspheric surfaces and free-form surfaces need to be provided with corresponding optical compensation elements for detection, such as an Offner compensator, a Dall compensator, a computer generated hologram compensator cgh (computer generated histogram), and the like. However, the addition of the optical compensation element greatly improves the complexity of pose adjustment of each element in the laser interference light path, and challenges are provided for automatic detection, and a professional optical engineer is generally required to participate in the adjustment.
At present, no automatic laser interference surface shape detection automatic detection device and method exist.
Disclosure of Invention
Based on the technical problems, the invention provides an automatic detection device and method for laser interference surface shape detection, which are used for realizing full-automatic laser interference detection.
The invention is realized by adopting the following technical scheme: the method for automatically detecting the laser interference surface shape comprises the following steps: (1) fixedly connecting a laser interferometer with a binocular camera, fixedly connecting a diffraction spot receiving camera with a CGH, and fixedly connecting a projection cross wire detector with a measured mirror; (2) a facula receiving screen with a central light through hole is arranged near the focus of the standard mirror of the laser interferometer, and the screen can exit from the detection light path along the plane vertical to the optical axis of the laser interferometer; (3) adjusting the four-dimensional positioning of the CGH; (4) adjusting the six-dimensional pose of the CGH and the laser interferometer; (5) carrying out four-dimensional coarse positioning adjustment on the measured mirror; (6) carrying out four-dimensional pose fine adjustment on the measured mirror; (7) adjusting the light spot to move to the central light through hole of the receiving screen; (8) completing the six-dimensional pose adjustment of the measured mirror and the laser interferometer; (9) and analyzing according to the interference fringes of the laser interferometer at the moment, and outputting the surface shape of the measured mirror.
Further, the laser interferometer in the step (1) is approximately parallel to the optical axis of the binocular camera, and the pose is calibrated by a standard plane with cross-hair identification; the field of view of the diffraction light spot receiving camera can cover all the pictures of the light spot receiving screen with the central light through hole; and calibrating the relative position of the projection cross wire detector and the measured mirror by using position measuring equipment such as a three-coordinate measuring machine.
Further, the adjusting of the four-dimensional positioning of the CGH in step (3) includes the following steps: placing a CGH compensator in front of the focus of the standard mirror of the laser interferometer, namely in the direction far away from the laser interferometer; withdrawing the light spot receiving screen with the central light through hole; acquiring a scribed cross hair mark on the CGH by using a binocular camera, and calculating the position of the CGH relative to a laser interferometer; and adjusting the position of the CGH in the X/Y direction translation, the X/Y plane rotation and the Z direction distance.
Further, the six-dimensional pose adjustment of the CGH and the laser interferometer in the step (4) includes the following steps: moving the light spot receiving screen with the central light through hole back to the focus of the standard mirror of the laser interferometer, wherein a series of diffraction light spots reflected by the CGH alignment area 12 appear on the screen; the diffraction light spot receiving camera collects light spot images, finds out diffraction light spots of a preset order through calculation and analysis, and adjusts the pitching and twisting of the CGH to enable the light spots to move to a central light through hole of the receiving screen; the reflected wavefront of the CGH alignment area 12 enters the laser interferometer 1, and the pitching and the twisting of the CGH are adjusted slightly to make the interference fringes sparsest.
Further, the four-dimensional coarse positioning adjustment of the measured mirror in the step (5) includes the following steps: placing the measured mirror according to the design value of the vertex curvature radius of the measured mirror; withdrawing the light spot receiving screen with the central light through hole; and acquiring a projection cross-hair mark near the measured mirror by using a binocular camera, and calculating the position of the measured mirror relative to the laser interferometer, wherein the position comprises X/Y direction translation, X/Y plane rotation and Z direction distance.
Further, the fine adjustment of the four-dimensional pose of the measured mirror in the step (6) comprises the following steps: and judging the deviation condition of the measured mirror relative to the ideal position according to the three groups of projection cross wires: if the three groups of fork wires are far away from the mirror body and the fork wires are slightly larger than the design reference pattern, the measured mirror needs to move along the Z-axis laser interferometer; if the three groups of fork wires are close to the mirror body and the fork wires are slightly smaller than the design reference pattern, the measured mirror needs to move along the Z-axis direction away from the laser interferometer direction; the relative positions of the three sets of cross hairs are close to the design value, but have relative rotation or translation relation with the measured mirror, and then the measured mirror X, Y is adjusted to rotate and translate to the preset position.
Further, the step (7) of adjusting the light spot to move to the central through hole of the receiving screen comprises the following steps: moving the light spot receiving screen with the central light through hole back to the focus of the standard mirror of the laser interferometer, wherein a series of diffraction light spots are generated on the screen, and the reflected light of the measured mirror is transmitted by the CGH wavefront compensation area 14; the diffraction light spot receiving camera collects light spot images, finds out diffraction light spots of a preset order through calculation and analysis, and adjusts the pitching and twisting of the measured mirror.
Further, the criterion for completing the six-dimensional pose adjustment of the measured mirror and the laser interferometer in the step (8) is as follows: before the reflected wave of the measured mirror enters the laser interferometer, the pitching and the torsion of the measured mirror are adjusted slightly to make the interference fringes sparsest.
In addition, the invention also provides an automatic detection device for laser interference surface shape detection, which comprises: the device comprises a laser interferometer, a binocular camera, a diffraction light spot receiving camera, a CGH, a light spot receiving screen with a central light through hole, a measured mirror and a projection cross-hair detector 2, wherein the laser interferometer is fixedly connected with the binocular camera, the diffraction light spot receiving camera is fixedly connected with the CGH, and the measured mirror is fixedly connected with the projection cross-hair detector; the CGH is arranged in front of the focus of the standard mirror of the laser interferometer and far away from the direction of the laser interferometer; the spot receiving screen with the central light through hole can be removed and replaced at the focus of the standard mirror of the laser interferometer.
Further, the optical axis of the binocular camera is approximately parallel to the direction of the optical axis of the laser interferometer and is used for completing the rough positioning of the interferometer standard mirror, the CGH reference plane, the measured mirror in X/Y translation, in X/Y rotation and in Z distance; the projection cross wire detector is positioned near the measured mirror and is used for finishing X/Y direction translation, X/Y plane rotation and Z direction distance fine positioning of the measured mirror; the diffraction light spot receiving camera is positioned near the CHG and can collect diffraction light spot images on a receiving screen with a central light through hole, and the diffraction light spot receiving camera is used for completing the adjustment of the pitching and the torsion of the X/Y plane of the measured mirror until the light spots return to the field of view of the interferometer; and finishing the fine adjustment of the pose of the measured mirror according to the fine adjustment of the pose analyzed by the interference fringes until the interference pattern is close to zero fringes.
The technical scheme of the invention has the following beneficial effects:
the invention provides a laser interference surface shape detection light path multi-stage pose automatic adjustment method based on a binocular camera, a projection cross-hair centroid detector, a multi-stage diffraction light spot identification and positioning sensor and interference fringe aberration decoupling, which realizes the optical positioning from mm-level mechanical positioning to sub-mum level, thereby completing the automatic surface shape detection of an optical element at nm level. On one hand, the method is beneficial to reducing the manual participation in the surface shape detection process of the optical element in a laboratory/factory, improving the detection efficiency and improving the product control capability of a production line; on the other hand, the method is expected to be applied to scientific exploration such as optical manufacturing/maintenance in unmanned working environments such as space stations, moon and mars, the requirement on the optical professional background of astronauts is reduced, and the feasibility of the in-orbit application technology is improved.
Drawings
FIG. 1 is a schematic diagram of the distribution of automatic pose adjustment sensors for optical element surface shape detection optical paths;
FIG. 2 is a schematic diagram of a CGH pose adjustment reference identifier;
FIG. 3 is a schematic diagram showing the distribution of the shapes and positions of the multi-order diffraction spots;
FIG. 4(a) is a projection diagram of the measured mirror positioning reference;
FIG. 4(b) is a schematic diagram showing the projection mismatch of the positioning reference of the measured lens
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The automatic detection method of the laser interference surface shape comprises the following steps: (1) fixedly connecting a laser interferometer with a binocular camera, fixedly connecting a diffraction spot receiving camera with a CGH, and fixedly connecting a projection cross wire detector with a measured mirror; (2) a facula receiving screen with a central light through hole is arranged near the focus of the standard mirror of the laser interferometer, and the screen can exit from the detection light path along the plane vertical to the optical axis of the laser interferometer; (3) adjusting the four-dimensional positioning of the CGH; (4) adjusting the six-dimensional pose of the CGH and the laser interferometer; (5) carrying out four-dimensional coarse positioning adjustment on the measured mirror; (6) carrying out four-dimensional pose fine adjustment on the measured mirror; (7) adjusting the light spot to move to the central light through hole of the receiving screen; (8) completing the six-dimensional pose adjustment of the measured mirror and the laser interferometer; (9) and analyzing according to the interference fringes of the laser interferometer at the moment, and outputting the surface shape of the measured mirror.
The specific basic working flow of the invention is as follows:
(1) the laser interferometer 4 is fixedly connected with the binocular camera 1, the optical axes of the laser interferometer and the binocular camera are approximately parallel, and the pose calibration of the laser interferometer and the binocular camera is carried out by using a standard plane with cross-hair identification;
(2) the diffraction light spot receiving camera 3 is fixedly connected with the CGH, and the field of view of the camera can cover all the frames of the light spot receiving screen with the central light through hole;
(3) the projection cross wire detector 2 is fixedly connected with a measured mirror, and relative position calibration of the projection cross wire detector and the measured mirror is carried out by using a three-coordinate apparatus and other position measuring equipment;
(4) a facula receiving screen with a central light through hole is arranged near the focus of the standard mirror of the laser interferometer, and the screen can exit from the detection light path along the plane vertical to the optical axis of the laser interferometer;
(5) placing a CGH compensator in front of a focus of a standard mirror of the laser interferometer (far away from the direction of the laser interferometer), withdrawing a light spot receiving screen with a central light through hole, collecting a marked cross wire mark 11 (such as four cross wires with different sizes and shapes shown in figure 2) on the CGH by using a binocular camera, calculating the position of the CGH relative to the laser interferometer, wherein the position comprises X/Y direction translation, X/Y plane rotation and Z direction distance, and completing four-dimensional positioning adjustment of the CGH;
(6) moving the light spot receiving screen with the central light through hole back to the focus of the standard mirror of the laser interferometer, wherein a series of diffraction light spots reflected by the CGH alignment area 12 appear on the screen; the diffraction light spot receiving camera 3 collects light spot images, finds out diffraction light spots of a preset order (for example, circular light spots with the highest energy concentration on the rightmost side in the graph 3) through calculation and analysis, and adjusts the pitching and twisting of the CGH to enable the light spots to move to the central light through hole of the receiving screen; at the moment, the reflected wave front of the CGH alignment area 12 enters the laser interferometer 1, and the pitching and the torsion of the CGH are adjusted in a micro-scale mode to enable interference fringes to be sparse; thus finishing the six-dimensional pose adjustment of the CGH and the laser interferometer;
(7) placing the measured mirror according to the design value of the vertex curvature radius of the measured mirror, withdrawing a light spot receiving screen with a central light through hole, collecting a projection cross-hair mark positioned near the measured mirror by using a binocular camera, and calculating the position of the measured mirror relative to a laser interferometer, wherein the position comprises X/Y direction translation, X/Y plane rotation and Z direction distance; compared with the CGH, the measured mirror is farther away from the laser interferometer, the calculation accuracy is relatively lower by 1-2 orders of magnitude, and the measured mirror only completes four-dimensional coarse positioning adjustment;
(8) after coarse positioning adjustment, the projection cross wire mark enters the projection cross wire detector 2 fixedly connected with the measured mirror, taking fig. 4 as an example, the three groups of projection cross wires (the shape of the visible mirror changes, the number of the projection cross wires and the position of the visible mirror) can reflect the deviation condition of the measured mirror relative to the ideal position: if the three groups of fork wires are far away from the mirror body and the fork wires are slightly larger than the design reference pattern, the measured mirror needs to move along the Z-axis laser interferometer; if the three groups of fork wires are close to the mirror body (even part of the fork wires enter the mirror surface area to form the missing part of a fork wire pattern), and the fork wires are slightly smaller than the designed reference pattern, the measured mirror needs to move along the Z axial direction away from the direction of the laser interferometer; the relative positions of the three groups of cross wires are close to the design value, but the three groups of cross wires have relative rotation or translation relation with the measured mirror, the measured mirror X, Y is adjusted to rotate and translate to the preset position, and the measured mirror finishes fine adjustment of four-dimensional pose;
(9) moving the light spot receiving screen with the central light through hole back to the focus of the standard mirror of the laser interferometer, wherein a series of diffraction light spots are generated on the screen, and the reflected light of the measured mirror is transmitted by the CGH wavefront compensation area 14; the diffraction light spot receiving camera 3 collects light spot images, finds out diffraction light spots of a preset order through calculation and analysis (similar to the figure 3, the shape and the energy distribution are more complex), and adjusts the pitching and the torsion of the measured mirror to enable the light spots to move to a central light through hole of the receiving screen;
(10) at the moment, the reflected wave of the measured mirror enters the laser interferometer 1, and the pitching and the torsion of the measured mirror are adjusted in a micro-scale mode to enable interference fringes to be sparse; thus, the six-dimensional pose adjustment of the measured mirror and the laser interferometer is completed;
(11) and analyzing according to the interference fringes of the laser interferometer at the moment, and outputting the surface shape of the measured mirror.
In addition, the invention also provides an automatic detection device for laser interference surface shape detection, which comprises: the device comprises a laser interferometer, a binocular camera, a diffraction light spot receiving camera, a CGH, a light spot receiving screen with a central light through hole, a measured mirror and a projection cross-hair detector 2, wherein the laser interferometer is fixedly connected with the binocular camera, the diffraction light spot receiving camera is fixedly connected with the CGH, and the measured mirror is fixedly connected with the projection cross-hair detector; the CGH compensator is arranged in front of the focus of the standard mirror of the laser interferometer and far away from the direction of the laser interferometer; the spot receiving screen with the central light through hole can be removed and replaced at the focus of the standard mirror of the laser interferometer.
The invention realizes the automatic pose adjustment of the interference detection light path through multi-stage pose joint adjustment, wherein the pose adjustment sensor comprises:
1) binocular camera approximately parallel to the direction of the laser interferometer optical axis: completing coarse positioning of the interferometer standard mirror and a CGH reference plane, X/Y translation of the interferometer standard mirror and a measured mirror, X/Y in-plane rotation and Z-direction distance;
2) projection cross-hair detector located near the measured mirror: finishing X/Y direction translation, X/Y plane rotation and Z direction distance fine positioning of the measured mirror;
3) diffraction spot receiving camera located near CGH (collecting diffraction spot image on receiving screen with central clear aperture): completing the adjustment of the CHG and the X/Y plane pitching and torsional pendulum of the tested mirror until the light spot returns to the field of view of the interferometer;
4) fine adjustment according to the pose analyzed by the interference fringes: and finishing fine adjustment of the pose of the measured mirror until the interference pattern is close to a zero stripe.
Although only the preferred embodiments of the present invention have been described in detail, it should be understood that many modifications and variations can be made by those skilled in the art without inventive faculty, and therefore, all technical solutions which can be obtained by a person skilled in the art through logic analysis, reasoning or limited experiments based on the prior art, equivalent structures or equivalent procedures using the contents of the specification and the drawings of the present invention, or which can be directly or indirectly applied to other related technical fields, should fall within the scope of protection defined by the claims of the present application.
Claims (10)
1. A laser interference surface shape detection automatic detection method is characterized in that: the method comprises the following steps: (1) fixedly connecting a laser interferometer with a binocular camera, fixedly connecting a diffraction spot receiving camera with a CGH, and fixedly connecting a projection cross wire detector with a measured mirror; (2) a facula receiving screen with a central light through hole is arranged near the focus of the standard mirror of the laser interferometer, and the screen can exit from the detection light path along the plane vertical to the optical axis of the laser interferometer; (3) adjusting the four-dimensional positioning of the CGH; (4) adjusting the six-dimensional pose of the CGH and the laser interferometer; (5) carrying out four-dimensional coarse positioning adjustment on the measured mirror; (6) carrying out four-dimensional pose fine adjustment on the measured mirror; (7) adjusting the light spot to move to the central light through hole of the receiving screen; (8) completing the six-dimensional pose adjustment of the measured mirror and the laser interferometer; (9) and analyzing according to the interference fringes of the laser interferometer at the moment, and outputting the surface shape of the measured mirror.
2. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: in the step (1), the laser interferometer is approximately parallel to the optical axis of the binocular camera, and the pose is calibrated by a standard plane with a cross wire mark; the field of view of the diffraction light spot receiving camera can cover all the pictures of the light spot receiving screen with the central light through hole; and calibrating the relative position of the projection cross wire detector and the measured mirror by using position measuring equipment such as a three-coordinate measuring machine.
3. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: the step (3) of adjusting the four-dimensional positioning of the CGH comprises the following steps: placing the CGH in front of the focus of the standard mirror of the laser interferometer, namely in the direction far away from the laser interferometer; withdrawing the light spot receiving screen with the central light through hole; acquiring a scribed cross hair mark on the CGH by using a binocular camera, and calculating the position of the CGH relative to a laser interferometer; and adjusting the position of the CGH in the X/Y direction translation, the X/Y plane rotation and the Z direction distance.
4. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: the six-dimensional pose adjustment of the CGH and the laser interferometer in the step (4) comprises the following steps: moving the light spot receiving screen with the central light through hole back to the focus of the standard mirror of the laser interferometer, wherein a series of diffraction light spots reflected by the CGH alignment area 12 appear on the screen; the diffraction light spot receiving camera collects light spot images, finds out diffraction light spots of a preset order through calculation and analysis, and adjusts the pitching and twisting of the CGH to enable the light spots to move to a central light through hole of the receiving screen; the reflected wavefront of the CGH alignment area 12 enters the laser interferometer 1, and the pitching and the twisting of the CGH are adjusted slightly to make the interference fringes sparsest.
5. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: the four-dimensional coarse positioning adjustment of the measured mirror in the step (5) comprises the following steps: placing the measured mirror according to the design value of the vertex curvature radius of the measured mirror; withdrawing the light spot receiving screen with the central light through hole; and acquiring a projection cross-hair mark near the measured mirror by using a binocular camera, and calculating the position of the measured mirror relative to the laser interferometer, wherein the position comprises X/Y direction translation, X/Y plane rotation and Z direction distance.
6. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: the fine adjustment of the four-dimensional pose of the measured mirror in the step (6) comprises the following steps: and judging the deviation condition of the measured mirror relative to the ideal position according to the three groups of projection cross wires: if the three groups of fork wires are far away from the mirror body and the fork wires are slightly larger than the design reference pattern, the measured mirror needs to move along the Z-axis laser interferometer; if the three groups of fork wires are close to the mirror body and the fork wires are slightly smaller than the design reference pattern, the measured mirror needs to move along the Z-axis direction away from the laser interferometer direction; the relative positions of the three sets of cross hairs are close to the design value, but have relative rotation or translation relation with the measured mirror, and then the measured mirror X, Y is adjusted to rotate and translate to the preset position.
7. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: the step (7) of adjusting the light spot to move to the central light through hole of the receiving screen comprises the following steps: moving the light spot receiving screen with the central light through hole back to the focus of the standard mirror of the laser interferometer, wherein a series of diffraction light spots are generated on the screen, and the reflected light of the measured mirror is transmitted by the CGH wavefront compensation area 14; the diffraction light spot receiving camera collects light spot images, finds out diffraction light spots of a preset order through calculation and analysis, and adjusts the pitching and twisting of the measured mirror.
8. The automatic detection method for laser interference surface shape detection according to claim 1, characterized in that: the judgment standard for completing the six-dimensional pose adjustment of the measured mirror and the laser interferometer in the step (8) is as follows: before the reflected wave of the measured mirror enters the laser interferometer, the pitching and the torsion of the measured mirror are adjusted slightly to make the interference fringes sparsest.
9. The utility model provides a laser interference profile of face detects automatic checkout device which characterized in that: the automatic detection device includes: the device comprises a laser interferometer, a binocular camera, a diffraction light spot receiving camera, a CGH, a light spot receiving screen with a central light through hole, a measured mirror and a projection cross-hair detector, wherein the laser interferometer is fixedly connected with the binocular camera, the diffraction light spot receiving camera is fixedly connected with the CGH, and the measured mirror is fixedly connected with the projection cross-hair detector; the CGH is arranged in front of the focus of the standard mirror of the laser interferometer and far away from the direction of the laser interferometer; the spot receiving screen with the central light through hole can be removed and replaced at the focus of the standard mirror of the laser interferometer.
10. The automatic detection device for detecting the laser interference surface shape according to claim 9, wherein: the optical axis of the binocular camera is approximately parallel to the direction of the optical axis of the laser interferometer and is used for completing the rough positioning of the interferometer standard mirror, the CGH reference plane, the measured mirror in X/Y translation, in X/Y rotation and in Z distance; the projection cross wire detector is positioned near the measured mirror and is used for finishing X/Y direction translation, X/Y plane rotation and Z direction distance fine positioning of the measured mirror; the diffraction light spot receiving camera is positioned near the CGH and can collect diffraction light spot images on a receiving screen with a central light through hole, and the diffraction light spot receiving camera is used for completing the adjustment of the pitching and the torsion of the X/Y plane of the measured mirror until the light spots return to the field of view of the interferometer; and finishing the fine adjustment of the pose of the measured mirror according to the fine adjustment of the pose analyzed by the interference fringes until the interference pattern is close to zero fringes.
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| PCT/CN2020/129277 WO2021203707A1 (en) | 2020-04-09 | 2020-11-17 | Automatic surface shape measurement apparatus and method using laser interferometry |
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