CN114252023B - Computer-aided adjusting device and method for aspheric surface calculation holographic detection - Google Patents
Computer-aided adjusting device and method for aspheric surface calculation holographic detection Download PDFInfo
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- CN114252023B CN114252023B CN202111622488.8A CN202111622488A CN114252023B CN 114252023 B CN114252023 B CN 114252023B CN 202111622488 A CN202111622488 A CN 202111622488A CN 114252023 B CN114252023 B CN 114252023B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a computer-aided adjusting device and a computer-aided adjusting method for aspheric surface calculation holographic detection, wherein a phase-shift interferometer is arranged on a marble beam; the calculation hologram is fixed with the phase shift interferometer through a holographic adjusting frame, and the calculation hologram is adjusted through the holographic adjusting frame; a measuring platform consisting of a detection tool, an axial displacement table and an inclined adjusting table is arranged on a lifting device connected with a marble base, and the spatial attitude of the aspheric element to be measured in the measuring process is monitored in real time through two vertically-arranged autocollimator angle measuring systems; the computer system is connected with the phase-shifting interferometer and used for collecting the surface shape information of the aspheric surface to be detected; the adjustment quantity required by the aspheric surface to be detected is obtained by analyzing the collected surface shape information, and the position adjusting table is controlled to quantitatively adjust the aspheric surface according to the detection data of the autocollimator, so that the accurate adjustment of the detection light path is realized. The invention provides an effective adjusting means for aspheric surface calculation holographic detection, and has great application value.
Description
Technical Field
The invention belongs to the field of optical detection, and particularly relates to a computer-aided adjusting device and method for aspheric surface calculation holographic detection.
Background
The aspheric optical element is an optical element with a certain deviation between the surface shape and the spherical surface, has design freedom far exceeding that of the traditional spherical optical element, can effectively correct various aberrations, improves the imaging quality, and reduces the number of optical elements in an optical system. Especially, with the continuous development and improvement of modern optical technology, aspheric optical elements are widely applied in many key optical systems. At present, the main factor which mainly limits the development of the aspheric optical element is the surface shape detection technology matched with the precision.
The computer-generated holographic detection method is one of effective means for detecting the surface shape of the aspheric optical element. The computer holographic detection method is mainly characterized in that incident light is converted into wavefront matched with the surface shape of a theoretical detected surface through a computer holographic graph, and the method is a zero compensation detection method. In practical engineering applications, the computer generated hologram is generally placed behind the phase-shifting interferometer lens, and the ± 1 st order diffracted light is used as the theoretical detection wavefront. Therefore, the aspheric surface position to be measured in the measurement optical path of the computer-generated holography method can be effectively measured only when the aspheric surface position to be measured needs to be at the theoretical position. When the aspheric surface to be measured has an adjustment error, errors such as coma aberration and spherical aberration exist in the measurement result, and the measurement precision is further influenced; in addition, since the computer-generated hologram detection method is a zero detection means, the influence of the adjustment error of the aspheric surface to be detected in the optical path is more sensitive. At present, the light path adjustment in the computational holographic detection method mainly depends on the experience of detection personnel, and the position of a corresponding optical element and the direction of the next adjustment are judged by comparing the change of interference fringes in the adjustment process, so that the adjustment precision and the adjustment efficiency are difficult to guarantee, and the measurement precision and the measurement efficiency of the computational holographic detection method are influenced.
Disclosure of Invention
The invention provides a computer-aided adjusting device and a computer-aided adjusting method for aspheric surface calculation holographic detection, which aim to solve the problem of adjusting optical elements in a calculation holographic detection light path.
The technical scheme adopted by the invention is as follows: a computer-aided adjusting device for aspheric calculation holographic detection comprises a marble base, a phase-shift interferometer, a calculation hologram, a holographic adjusting frame, an axial displacement table, an inclined adjusting table, a lifting device, an aspheric lens to be detected, a detection tool, a first standard reflector, a second standard reflector, a tool assembly, a first autocollimator, a computer system and a second autocollimator; wherein:
the phase-shift interferometer is connected with the marble base gantry and is used for acquiring surface shape data of the surface to be measured;
the calculation hologram is connected with the lifting device through the holographic adjusting frame and used for generating a test wavefront; the holographic adjusting frame can adjust the distance between the holographic adjusting frame and the lens of the phase-shift interferometer through a lifting guide rail of the lifting device, and can be used for adjusting the inclination of the calculated hologram to generate required order diffraction light so as to realize that the normal incidence of the diffraction light is on the aspheric mirror to be detected;
the aspheric mirror to be detected is clamped on the inclination adjusting table through the detection tool and is opposite to the calculation hologram connected with the phase-shift interferometer; the inclination adjusting platform is used for adjusting the inclination of the aspheric mirror to be detected so as to realize the adjustment of the inclination component of the detection light path;
the detection tool consists of a first standard reflector, a second standard reflector and the tool assembly, and the first standard reflector, the second standard reflector and the tool assembly can simultaneously move towards the center direction of the inclination adjusting table and are used for clamping the aspheric mirror to be detected and enabling the center of the aspheric mirror to be detected to coincide with the center of the inclination adjusting table;
the inclination adjusting platform is used as a measuring base and is arranged on the axial displacement platform and used for driving the aspheric mirror to be measured to move in the length and width directions in a translation way;
the axial displacement table is fixed on the lifting device and is vertical to the optical axis of the phase-shifting interferometer; the axial displacement table is used for driving the axial displacement table to carry out axial displacement and adjusting the axial relative position of the aspheric mirror to be detected and the calculation hologram;
the first autocollimator is opposite to the second standard reflector and is used for collecting the angle change of the second standard reflector in the adjustment process of the aspheric mirror to be detected and representing the angle condition of the aspheric mirror to be detected from the center of the second standard reflector to the center of the aspheric mirror to be detected.
The second autocollimator is opposite to the first standard reflector, and is used for collecting the angle change of the first standard reflector in the adjustment process of the aspheric mirror to be detected, and representing the angle condition of the aspheric mirror to be detected from the center of the first standard reflector to the center of the aspheric mirror to be detected.
The computer system is connected with the phase-shifting interferometer, the axial displacement platform, the inclined adjusting platform, the lifting device, the first autocollimator and the second autocollimator, and is used for collecting, storing and processing the surface shape data collected by the phase-shifting interferometer and the relative angle change of the aspheric mirror to be detected in the adjusting process collected by the first autocollimator and the second autocollimator, and adjusting the position of the aspheric mirror to be detected by controlling the axial displacement platform, the inclined adjusting platform and the lifting device, so that the computer-assisted adjustment of the detection light path is realized.
Further, the device is used for realizing rapid adjustment of the calculation holographic detection light path for aspheric surface detection.
Further, firstly, fixing the central position of the aspheric mirror to be detected at the center of the inclination adjusting table by using the detection tool, and enabling the center of the inclination adjusting table to move to the optical axis of the phase-shifting interferometer through the zero resetting of the axial displacement table; adjusting the distance and the inclination of the computed hologram from the lens of the phase-shifting interferometer by using a holographic adjusting frame to enable diffracted light of the computed hologram to be emitted along the optical axis of the phase-shifting interferometer; calculating hologram design parameters according to the parameters of the aspheric mirror to be measured, and lifting the aspheric mirror to be measured to be close to a theoretical value by using the lifting device to realize coarse focusing; and acquiring and analyzing the aspheric surface shape data of the aspheric surface to be detected at the moment through the computer system, and combining the reading of the autocollimator to realize the inclination and translation of the specific numerical value of the aspheric surface to be detected by utilizing the inclination adjusting table and the axial displacement table, thereby realizing the quick adjustment of the detection light path.
Furthermore, the detection tool is composed of a three-jaw clamping structure, wherein the two jaws are respectively provided with the first standard reflector and the second standard reflector which are vertically arranged, and form an isosceles triangle together with the tool assembly; the first standard reflector, the second standard reflector and the tool assembly have the characteristic of simultaneous movement, and the movement directions of the first standard reflector, the second standard reflector and the tool assembly move towards the center of the inclination adjusting table; through detect the frock can realize the aspherical mirror centre gripping that awaits measuring is in slope adjustment platform center guarantees that both centers coincide at certain extent.
Furthermore, the angle measurement system formed by the first autocollimator, the second autocollimator, the first standard reflector and the second standard reflector can monitor the relative angle change of the aspheric lens to be measured when the inclination adjusting platform and the axial displacement platform drive the aspheric lens to be measured to move in real time, and the relative angle change is used as a reference basis for the computer system to adjust the relative position of the aspheric lens to be measured according to the calculation result.
Further, the positions of the center of the axial displacement stage, the tilt adjusting stage and the lifting device in the zero position state relative to the center of the computer generated hologram are determined and are all on the optical axis of the phase-shifting interferometer.
Further, according to the parameters such as the radius of the aspheric mirror to be measured and the design parameters of the calculated hologram, the aspheric mirror to be measured can be moved to a relatively accurate position through the axial displacement table, the inclination adjusting table and the lifting device which are determined by relative positions, so that coarse adjustment is realized.
Further, two mutually perpendicular directions are selected from the surface shape data collected by the phase-shift interferometer, two groups of symmetrical strip-shaped surface shape data passing through the surface shape data center are extracted, the deviation of the spatial position of the aspheric mirror to be detected is calculated by combining an adjusting aberration model based on a 2-D chebyshev polynomial, and then the aspheric mirror to be detected is controlled to move to a zero stripe state through the computer system according to the calculation result.
Further, the calculation hologram can be selected according to the requirements of the aspherical mirror to be detected.
A computer-aided adjusting method for aspheric surface calculation holographic detection comprises the following measuring steps:
step a: installing a calculation hologram on a holographic adjusting frame, determining a specific distance from a phase-shift interferometer lens according to a calculation hologram design parameter, moving the calculation hologram to a corresponding distance through a lifting device, and adjusting an inclination state to enable emergent diffraction light of an emergent order to be emitted along the optical axis direction of the phase-shift interferometer;
step b: clamping the aspheric surface to be detected to the center of the inclination adjusting table by using a detection tool, and coinciding the center of the aspheric surface to be detected with the center of the inclination adjusting table;
step c: adjusting the inclination adjusting table, the axial displacement table and the lifting device to zero positions, calculating that the centers of the emergent wavefronts of the holograms and the aspheric surface to be measured are on the same axis, taking the center of the aspheric surface to be measured as an original point, taking the directions of the standard plane mirrors 701 and 702 as an X axis and a Y axis, establishing a space coordinate system, and taking the coordinate of the position of the aspheric surface to be measured as the coordinate of the aspheric surface to be measured at the moment
Determining the distance d between the aspheric surface and the computed hologram in the Z-axis direction according to the curvature radius of the aspheric surface to be measured and the computed hologram design parameters z Moving the aspheric surface to be measured to D by using a lifting device z -d z At this time, the aspheric position coordinates are
D z When the lifting device is positioned at the zero point position, the distance between the aspheric mirror to be measured and the calculation hologram is calculated;
step d: acquiring aspheric surface mirror shape data to be detected by using a phase-shift interferometer;
step e: the X axis and the Y axis are respectively taken as rectangular central lines in the collected surface shape data, and the length and the width are respectively L x ，L y Extracting a rectangular surface shape data set S 1 ,S 2 And transmitting the rectangular surface shape data set to a computer system for processing to obtain the required adjustment quantity of the aspherical mirror to be measured, wherein the analysis process is as follows:
first, the extracted rectangular surface shape data S 1 Having the same coordinate system as the aspherical mirror to be measured, S 1 The middle coordinate range can be expressed as
The aspheric equation can be expressed as follows:
wherein c represents a central curvature; k represents a conic coefficient; r represents the position of each point of the mirror surface, whichMiddle r 2 ＝x 2 +y 2 (ii) a For S 1 Area:
in the adjusting process, the aspheric mirror to be measured conforms to the rigid body rotation theorem, translation along the directions of x, y and z exists so as to incline around the axes of x, y and z, and when the aspheric mirror to be measured has an adjusting error, a point P (x, y and z) on the theoretical wave front generated by the hologram and a corresponding point P '(x' on the aspheric mirror with the adjusting error are calculated 1 ,y 1 ,z 1 ) There is the following relationship between:
wherein (dx, dy, dz) are translations in the x, y, z directions, θ x 、θ y 、θ z The inclination around the directions of x, y and z is respectively to further simplify the calculation, and cos theta is approximately equal to 1; sin theta is approximately equal to theta, and theta exists because the surface to be measured of the aspheric mirror to be measured is a rotationally symmetrical aspheric surface z =0, in summary, the displacement vector δ d of P to P' can represent:
therefore, the aberration caused by the adjustment error can be expressed approximately by taking the component of the position vector δ d on its normal line:
wherein S is 1 Normal direction in the area
The expression is as follows:
for Δ W (x) 1 ,y 1 ) Taylor expansion is carried out at the point (0, 0) and combined with a 2D Chebyshev polynomial to finally obtain S 1 Within the zone there is a form of aberration caused by the adjustment error:
ΔW(x 1 ,y 1 )＝a 1 (θ x ,θ y ,dx,dy,dz)+a 2 (θ x ,θ y ,dx,dy,dz)x 1 +...+a 10 (θ x ,θ y ,dx,dy,dz)(8y 1 4 -8y 1 2 +1)
the first 10 Chebyshev polynomials are selected to express the main aberration, the number of terms can be increased to obtain a higher-precision result, the general adjustment error is far larger than the measurement result of the aspherical mirror to be measured, and therefore the acquired surface shape data S 1 Approximately satisfies:
S 1 ≈ΔW(x 1 ,y 1 )
according to the least squares theory, the following least squares matrix can be obtained:
obtaining polynomial coefficient a of Chebyshev by solving least square matrix i Then according to Δ W (x) 1 ,y 1 ) The mathematical relationship between the adjustment error equation and the corresponding 2-D Chebyshev polynomial coefficient is combined with a nonlinear least square algorithm such as a Levenberg-Marquardt algorithm to solve the a i (θ x ,θ y The system of dx, dy, dz) equations yields the corresponding adjustment parameter (θ) x ,θ y ,dx,dy,dz)；
Finally, the surface shape data S 2 The same coordinate system as that of the aspherical mirror to be measured, and the coordinate range can be expressed as
Face shape data S 2 The same data processing is carried out to obtain the corresponding adjusting parameter (theta' x ,θ' y Dx ', dy ', dz ') for further improving the calculation accuracyAnd averaging the two results to obtain the final adjustment parameter of the aspherical mirror to be measured:
step f: judging whether the obtained adjustment parameters of the aspherical mirror to be detected meet the angle and displacement threshold values:
in the formula, Δ θ and Δ d are angle and displacement threshold values respectively, the minimum angle and displacement adjustment amount of the mechanical device can be generally selected as a judgment threshold value, and when the minimum angle and displacement adjustment amount are greater than the threshold value, the inclination adjustment table, the axial displacement table and the lifting device are controlled by the computer system to adjust the position of the aspheric mirror to be measured respectively by combining the real-time measurement result of the autocollimator:
wherein k represents the kth adjustment, X k+1 ,Y k+1 ,Z k+1 ,
Expressing the position parameters of the aspheric mirror to be detected after the k +1 th adjustment;
and e, respectively calculating the obtained adjustment parameters in the step e, and repeating the step c after adjustment until the calculation result is smaller than a threshold value, and finally realizing computer-aided adjustment of the detection light path of the aspherical mirror to be detected.
Compared with the prior art, the invention has the following advantages:
(1) The computer-aided adjustment method for aspheric surface calculation holographic detection provided by the invention reduces the processing amount of subsequent data only by selecting a part of rectangular area in the aspheric surface to be detected as a judgment area; and the wave aberration theory and the 2-D Chebyshev polynomial are organically combined, so that the adjustment error of the aspheric surface to be detected can be quickly and accurately solved.
(2) The computer-aided adjusting device for aspheric surface calculation holographic detection provided by the invention forms a closed loop in the light path adjusting process, dynamically adjusts the position of the aspheric surface to be detected in real time, realizes automatic adjustment, avoids human errors brought by previous detection personnel, greatly reduces the adjusting difficulty of a large-caliber high-order aspheric mirror in a measuring light path, and improves the adjusting efficiency.
(3) The computer-aided adjusting device for aspheric surface calculation holographic detection provided by the invention introduces an autocollimator angle measuring system to measure the aspheric surface mirror to be detected in real time, and the autocollimator angle measuring system is used as a feedback mechanism in the automatic adjusting process, so that the adjusting precision is further improved.
(4) The clamping devices such as the detection tool and the holographic adjusting frame in the computer-aided adjusting device for aspheric surface computed holographic detection provided by the invention can be adjusted according to requirements, can be used for computed holographic detection adjustment of aspheric mirrors with various calibers and curvature radii, and has good universality.
(5) The computer-aided adjusting device for aspheric surface calculation holographic detection provided by the invention is simple to operate, has high adjusting speed, improves the detection efficiency and provides an effective device for aspheric surface calculation holographic detection adjustment.
Drawings
Fig. 1 is a schematic diagram of a computer-aided adjustment device for aspheric surface computer-assisted holographic detection according to the present invention, in which 1 is a marble base, 2 is a phase-shift interferometer, 3 is a computer-assisted hologram, 301 is a holographic adjustment frame, 4 is an axial displacement table, 401 is an inclination adjustment table, 5 is a lifting device, 6 is an aspheric surface mirror to be detected, 7 is a detection tool, 701 is a first standard reflecting mirror, 702 is a second standard reflecting mirror, 703 is a tool assembly, 8 is a first autocollimator, 9 is a computer system, and 10 is a second autocollimator;
FIG. 2 is a schematic diagram of the aspheric surface element clamped by the inspection tool of the present invention, wherein 6 is the aspheric surface mirror to be inspected, 701 is the standard reflector, 702 is the standard reflector, and 703 is the tool assembly;
FIG. 3 is a schematic diagram of coarse adjustment of the computer-aided adjustment apparatus of the present invention, wherein 3 is a computer-generated hologram, 301 is a hologram adjustment frame, 4 is an axial displacement table, 401 is an inclination adjustment table, 6 is an aspherical mirror to be measured, and 7 is a detection tool;
fig. 4 is a schematic diagram of data distribution required for analyzing the misalignment of the aspheric optical element to be measured in the present invention, where 6 is the aspheric mirror to be measured, 701 is the standard mirror, 702 is the standard mirror, and 703 is the tooling assembly;
FIG. 5 is a flowchart illustrating the calculation of the misalignment of the aspheric optical element to be measured according to the present invention.
Detailed Description
To further illustrate the features of the present invention, the following detailed description is given in conjunction with the accompanying drawings.
Fig. 1 shows a computer-aided adjusting device for aspheric surface computed hologram detection according to the present invention, comprising: the device comprises a marble base 1, a phase-shifting interferometer 2, a calculation hologram 3, a holographic adjusting frame 301, an axial displacement table 4, an inclination adjusting table 401, a lifting device 5, an aspheric mirror to be detected 6, a detection tool 7, a first standard reflecting mirror 701, a second standard reflecting mirror 702, a tool assembly 703, a first autocollimator 8, a computer system 9 and a second autocollimator 10; the phase-shifting interferometer 2 is vertically arranged on the marble base 1, so that errors caused by environmental factors such as vibration and the like are avoided; the computed hologram 3 is connected with a lifting device 5 through a holographic adjusting frame 4, and the distance between the computed hologram and the phase-shift interferometer 2 is adjusted through a lifting guide rail; the detection tool 7 enables the center of the aspherical mirror 6 to be detected to coincide with the center of the inclination adjusting table in a three-point clamping mode through the first standard reflector 701, the second standard reflector 702 and the tool assembly 703; the axial displacement table 4, the inclination adjusting table 401 and the lifting device 5 are used for adjusting the spatial position and the posture of the aspherical mirror 6 to be measured; analyzing the surface shape data collected by the phase-shift interferometer 2, and combining the readings of the first autocollimator 8 and the second autocollimator 10, and utilizing the axial displacement table 4, the inclination adjusting table 401 and the lifting device 5 to realize the inclination and translation of the specific value of the aspheric surface to be detected, thereby realizing the rapid adjustment of the detection light path.
The phase-shifting interferometer 2 is connected with the marble base 1 gantry and is used for collecting surface shape data of a surface to be measured;
the computer generated hologram 3 is connected with the lifting device 5 through the holographic adjusting frame 301 and used for generating a test wavefront; the holographic adjusting frame 301 can adjust the distance from the lens of the phase-shift interferometer 2 through the lifting guide rail of the lifting device 5, and can be used for adjusting the inclination of the calculation hologram 3 to generate the required order diffraction light, so that the normal incidence of the diffraction light on the aspheric mirror 6 to be measured is realized;
the aspheric mirror 6 to be detected is clamped on the inclination adjusting table 401 through the detection tool 7 and is opposite to the computer generated hologram 3 connected with the phase-shifting interferometer 2; the inclination adjusting platform 401 is used for adjusting the inclination of the aspheric mirror 6 to be detected, so as to realize the adjustment of the inclination component of the detection light path;
the detection tool 7 consists of a first standard reflector 701, a second standard reflector 702 and the tool assembly 703, and the first standard reflector 701, the second standard reflector 702 and the tool assembly 703 can move towards the center of the tilt adjusting table 401 at the same time, so as to clamp the aspheric mirror 6 to be detected and enable the center of the aspheric mirror to be detected to coincide with the center of the tilt adjusting table 401;
the inclination adjusting table 401 is installed on the axial displacement table 4 as a measuring base and is used for driving the aspheric mirror 6 to be measured to move in a translation manner in the length and width directions;
the axial displacement table 4 is fixed on the lifting device 5 and is vertical to the optical axis of the phase-shift interferometer 2; the axial displacement table is used for driving the axial displacement table 4 to carry out axial displacement and adjusting the axial relative position of the aspheric mirror 6 to be measured and the calculation hologram 3;
the first autocollimator 8 faces the second standard reflecting mirror 702, and is configured to collect an angle change of the second standard reflecting mirror 702 during an adjustment process of the aspheric mirror 6 to be detected, and is used to represent an angle condition of the aspheric mirror 6 to be detected along a direction from a center of the second standard reflecting mirror 702 to a center of the aspheric mirror 6 to be detected.
The second autocollimator 10 faces the first standard reflecting mirror 701, and is configured to collect an angle change of the first standard reflecting mirror 701 in an adjustment process of the aspheric mirror 6 to be measured, so as to represent an angle condition of the aspheric mirror 6 to be measured along a direction from the center of the first standard reflecting mirror 701 to the center of the aspheric mirror 6 to be measured.
The computer system 9 is connected to the phase-shifting interferometer 2, the axial displacement stage 4, the tilt adjustment stage 401, the lifting device 5, the first autocollimator 8 and the second autocollimator 10, and is configured to collect, store and process the surface shape data collected by the phase-shifting interferometer 2 and the relative angle change in the adjustment process of the aspheric mirror 6 to be detected collected by the first autocollimator 8 and the second autocollimator 10, and adjust the position of the aspheric mirror 6 to be detected by controlling the axial displacement stage 4, the tilt adjustment stage 401 and the lifting device 5, thereby implementing computer-assisted adjustment of the detection light path.
The device is used for realizing the quick adjustment and is used for the calculation holographic detection light path of aspheric surface detection.
The device firstly fixes the central position of the aspherical mirror 6 to be detected at the center of the inclined adjusting platform 401 by using the detection tool 7, and enables the center of the inclined adjusting platform 401 to move to the optical axis of the phase-shifting interferometer 2 by the axial displacement platform 4 returning to zero; adjusting the distance and the inclination of the computed hologram 3 from the lens of the phase-shifting interferometer 2 by using a holographic adjusting frame 301, so that the diffracted light is emitted along the optical axis of the phase-shifting interferometer 2; calculating the design parameters of the hologram 3 according to the parameters of the aspherical mirror 6 to be measured, and lifting the aspherical mirror 6 to be measured to be close to a theoretical value by using the lifting device 5 to realize coarse focusing; the computer system 9 is used for collecting and analyzing the surface shape data of the aspherical mirror 6 to be detected at the moment, and the inclination adjusting table 401 and the axial displacement table 4 are used for realizing the inclination and translation of a specific value of the aspherical mirror 6 to be detected by combining the reading of the autocollimator, so that the detection light path can be quickly adjusted.
The detection tool 7 is composed of a three-jaw clamping structure, wherein the two jaws are respectively provided with the first standard reflector 701 and the second standard reflector 702 which are vertically arranged with each other, and form an isosceles triangle with the tool assembly 703; the first standard reflector 701, the second standard reflector 702 and the tooling assembly 703 have the characteristic of simultaneous movement, and the movement directions all move towards the center of the tilt adjusting table 401; the aspheric mirror 6 to be detected can be clamped at the center of the inclination adjusting table 401 through the detection tool 703, and the centers of the two are ensured to be overlapped in a certain range.
The angle measurement system consisting of the first autocollimator 8, the second autocollimator 10, the first standard reflector 701 and the second standard reflector 702 can monitor the relative angle change of the aspheric mirror 6 to be measured when the tilt adjusting table 401 and the axial displacement table 4 drive the aspheric mirror to be measured to move in real time, and the relative angle change serves as a reference basis for the computer system 9 to adjust the relative position of the aspheric mirror 6 to be measured according to the calculation result.
The positions of the centers of the axial displacement table 4, the inclination adjusting table 401 and the lifting device 5 in the zero state relative to the center of the computer generated hologram 3 are determined and are all on the optical axis of the phase-shifting interferometer 2; the movement of the device is monitored in real time by corresponding sensors.
According to the parameters such as the radius of the aspherical mirror 6 to be measured and the like and the design parameters of the calculated hologram 3, the aspherical mirror 6 to be measured can be moved to a relatively accurate position through the axial displacement table 4, the inclination adjusting table 401 and the lifting device 5 which are determined by relative positions, so that coarse adjustment is realized.
Two mutually perpendicular directions are selected on the surface shape data acquired by the phase-shift interferometer 2, two groups of strip-shaped surface shape data which pass through the center of the surface shape data and are symmetrical are extracted, the deviation of the spatial position of the aspherical mirror 6 to be measured is calculated by combining with an adjustment aberration model based on a polynomial of 2-D chebyshev, and then the aspherical mirror to be measured is controlled to move to a zero stripe state through the computer system 9 according to the calculation result.
The calculation hologram 3 can be selected according to the requirements of the aspherical mirror 6 to be measured.
A computer-aided adjusting method for aspheric surface calculation holographic detection comprises the following adjusting steps:
step a: the calculation hologram 3 is installed on the hologram adjusting frame 301, the specific distance from the phase-shift interferometer 2 is determined according to the design parameters of the calculation hologram 3, the calculation hologram 3 is moved to the corresponding distance by the lifting device 5, and the inclination state is adjusted, so that the emergent order diffracted light is emitted along the optical axis direction of the phase-shift interferometer 2.
Step b: clamping the aspherical mirror 6 to be detected to the center of the inclination adjusting table 401 by using the detection tool 7, wherein the center of the aspherical mirror 6 to be detected is superposed with the center of the inclination adjusting table 401 at the moment;
the aspheric mirror 6 to be measured is clamped to the center of the tilt adjusting stage 401 using the detection tool 7, as shown in fig. 2. The detection tool 7 is composed of two standard plane mirrors, namely a standard reflecting mirror 701, a standard reflecting mirror 702 and a tool assembly 703, and can move towards the center direction of the inclination adjusting table 401 at the same time, such as the arrow direction in fig. 2; finally, the aspherical mirror 6 to be measured is centered on the center of the tilt adjusting stage 401.
Step c: the tilt adjustment stage 401, the axial displacement stage 4, and the elevating device 5 are adjusted to the zero point position. At this time, the center of the emergent wavefront of the computer generated hologram 3 and the center of the aspherical mirror 6 to be measured are on the same axis, as shown in fig. 3; taking the center of the aspherical mirror 6 to be measured as the origin, establishing a space coordinate system in the direction shown in fig. 3, wherein the position coordinate of the aspherical mirror 6 to be measured is
Determining the Z-axis direction distance d of the aspheric surface from the calculation hologram 3 according to the curvature radius of the aspheric mirror 6 to be detected and the design parameters of the calculation hologram 3 z The aspheric mirror 6 to be measured is moved to D by using the lifting device 5 z -d z At this time, the aspheric position coordinates are
D z The distance between the aspherical mirror 6 to be measured and the computed hologram is determined when the lifting device 5 is at the zero point position.
Step d: the phase-shifting interferometer 2 collects the surface shape data of the aspherical mirror 6 to be measured;
step e: form the rectangular surfaceThe data is transmitted to a computer system 9 to be processed to obtain the required adjustment quantity of the aspherical mirror 6 to be measured. The data processing process is shown in fig. 5: first, as shown in fig. 4, a rectangular surface shape data set S is set in the collected surface shape data 1 ,S 2 (ii) a Are respectively paired with S 1 ,S 2 Solving the maladjustment aberration model based on the 2-D Chebyshev polynomial by using a least square method for the surface shape data to obtain corresponding Chebyshev polynomial coefficients, and introducing an iterative algorithm to further improve the solving precision of the Chebyshev polynomial coefficients by solving a residual error through the maladjustment aberration; solving Chebyshev polynomial coefficient by nonlinear least square algorithm to obtain S 1 ,S 2 The amount of detuning of the two regions; finally, the detuning amount under the weighted average is obtained.
The X axis and the Y axis are respectively used as rectangular central lines in the collected surface shape data, and the length and the width are respectively L x ，L y Extracting a rectangular surface shape data set S 1 ,S 2 And transmitting the rectangular surface shape data set to a computer system for processing to obtain the required adjustment quantity of the aspherical mirror to be measured, wherein the analysis process is as follows:
first, the extracted rectangular surface shape data S 1 Has the same coordinate system as the aspherical mirror to be measured, S 1 The middle coordinate range can be expressed as
The aspheric equation can be expressed as follows:
wherein c represents a central curvature; k represents a conic coefficient; r represents the position of each point of the mirror surface, where r 2 ＝x 2 +y 2 (ii) a For S 1 Area:
in the adjusting process, the aspheric mirror to be measured accords with the rigid body rotation theorem, and the aspheric mirror to be measured has translation along the directions of x, y and z so as to incline around the axes of x, y and z. Therefore, when the aspheric mirror to be measured has an adjustment error, the meterCalculating the point P (x, y, z) on the theoretical wavefront generated by the hologram and the corresponding point P' (x) on the aspherical mirror with the adjustment error 1 ,y 1 ,z 1 ) The following relationship exists between:
where (dx, dy, dz) are translations in the x, y, z directions, θ x 、θ y 、θ z The inclination around the directions of x, y and z is respectively, and cos theta is approximately equal to 1 in order to further simplify the calculation; sin theta is approximately equal to theta, and because the surface to be measured of the aspherical mirror to be measured is a rotationally symmetrical aspherical surface, theta exists z =0, in summary, the displacement vector δ d of P to P' can represent:
therefore, the aberration caused by the adjustment error can be expressed approximately by taking the component of the position vector δ d on its normal line:
wherein S is 1 Normal direction in the area
The expression form is as follows:
for Δ W (x) 1 ,y 1 ) Taylor expansion is carried out at the point (0, 0) and combined with a 2D Chebyshev polynomial to finally obtain S 1 Within the zone there is a form of aberration caused by the adjustment error:
ΔW(x 1 ,y 1 )＝a 1 (θ x ,θ y ,dx,dy,dz)+a 2 (θ x ,θ y ,dx,dy,dz)x 1 +...+a 10 (θ x ,θ y ,dx,dy,dz)(8y 1 4 -8y 1 2 +1)
the first 10 Chebyshev polynomials are selected to express the main aberration, the number of terms can be increased to obtain a higher-precision result, the general adjustment error is far larger than the measurement result of the aspherical mirror to be measured, and therefore the acquired surface shape data S 1 Approximately satisfies:
S 1 ≈ΔW(x 1 ,y 1 )
according to the least squares theory, the following least squares matrix can be obtained:
obtaining the polynomial coefficient a of Chebyshev by solving the least square matrix i Then according to Δ W (x) 1 ,y 1 ) The mathematical relationship between the adjustment error equation and the corresponding 2-D Chebyshev polynomial coefficient is combined with a nonlinear least square algorithm such as a Levenberg-Marquardt algorithm to solve the problem a i (θ x ,θ y The system of dx, dy, dz) equations yields the corresponding adjustment parameter (θ) x ,θ y ,dx,dy,dz)；
Finally, the surface shape data S 2 The same coordinate system as that of the aspherical mirror to be measured, and the coordinate range can be expressed as
Face shape data S 2 The same data processing is carried out to obtain the corresponding adjusting parameter (theta' x ,θ' y Dx ', dy ', dz '), in order to further improve the calculation accuracy, the two results are averaged to obtain the final adjustment parameters of the aspherical mirror to be measured:
step f: and (3) according to the calculation result, adjusting the aspheric mirror 6 to be detected by using the axial displacement table 4, the inclination adjusting table 401 and the lifting device 5 and combining the real-time measurement results of the first autocollimator 8 and the second autocollimator 10, and continuously circulating the steps d-f to finally realize the computer-assisted adjustment of the detection light path of the aspheric mirror 6 to be detected.
Judging whether the obtained adjustment parameters of the aspherical mirror to be detected meet the angle and displacement threshold values:
in the formula, Δ θ and Δ d are angle and displacement threshold values respectively, and the minimum angle and displacement adjustment amount of the mechanical device can be generally selected as a judgment threshold value, and when the minimum angle and displacement adjustment amount are greater than the threshold value, the tilt adjustment table, the axial displacement table and the lifting device are controlled by the computer system to adjust the position of the aspheric mirror to be measured respectively by combining the real-time measurement result of the autocollimator:
wherein k represents the kth adjustment, X k+1 ,Y k+1 ,Z k+1 ,
Expressing the position parameter of the aspheric surface to be measured after the k +1 adjustment;
and e, respectively obtaining the adjustment parameters obtained by the calculation in the step e. And c, repeating the step c after adjustment until the calculation result is smaller than the threshold value, and finally realizing the computer-assisted adjustment of the detection light path of the aspherical mirror to be detected.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any modifications or substitutions that can be understood by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (10)
1. A computer-assisted adjustment device for aspheric computed holographic detection, characterized by: the device comprises a marble base (1), a phase-shift interferometer (2), a calculation hologram (3), a holographic adjusting frame (301), an axial displacement table (4), an inclination adjusting table (401), a lifting device (5), an aspheric mirror to be detected (6), a detection tool (7), a first standard reflector (701), a second standard reflector (702), a tool assembly (703), a first autocollimator (8), a computer system (9) and a second autocollimator (10); wherein:
the phase-shifting interferometer (2) is connected with the gantry of the marble base (1) and is used for acquiring surface shape data of a surface to be measured;
the computer generated hologram (3) is connected with the lifting device (5) through the holographic adjusting frame (301) and is used for generating a test wavefront; the holographic adjusting frame (301) can adjust the distance between the holographic adjusting frame and the lens of the phase-shifting interferometer (2) through a lifting guide rail of the lifting device (5), and can be used for adjusting the inclination of the calculation hologram (3) to generate required order diffraction light so as to realize that the normal incidence of the diffraction light is on the aspheric mirror (6) to be measured;
the aspheric mirror (6) to be detected is clamped on the inclination adjusting table (401) through the detection tool (7) and is opposite to the calculation hologram (3) connected with the phase-shift interferometer (2); the inclination adjusting platform (401) is used for adjusting the inclination of the aspheric mirror (6) to be detected to realize the adjustment of the inclination component of the detection light path;
the detection tool (7) consists of a first standard reflector (701), a second standard reflector (702) and a tool assembly (703), and the first standard reflector (701), the second standard reflector (702) and the tool assembly (703) can move towards the center direction of the inclination adjusting table (401) simultaneously and are used for clamping the aspheric mirror (6) to be detected and enabling the center of the aspheric mirror to be detected to coincide with the center of the inclination adjusting table (401);
the inclination adjusting platform (401) is used as a measuring base and installed on the axial displacement platform (4) and is used for driving the aspheric mirror (6) to be measured to move in the length and width directions in a translation mode;
the axial displacement table (4) is fixed on the lifting device (5) and is vertical to the optical axis of the phase-shifting interferometer (2); the axial displacement table (4) is driven to carry out axial displacement, and the axial relative position of the aspheric mirror (6) to be detected and the calculation hologram (3) is adjusted;
the first autocollimator (8) is over against the second standard reflector (702), and is used for collecting the angle change of the second standard reflector (702) in the adjustment process of the aspheric mirror (6) to be detected, and representing the angle condition of the aspheric mirror (6) to be detected from the center of the second standard reflector (702) to the center of the aspheric mirror (6) to be detected;
the second autocollimator (10) faces the first standard reflector (701), and is used for collecting the angle change of the first standard reflector (701) in the adjustment process of the aspheric mirror (6) to be detected, and representing the angle condition of the aspheric mirror (6) to be detected from the center of the first standard reflector (701) to the center of the aspheric mirror (6) to be detected;
the computer system (9) is connected with the phase-shifting interferometer (2), the axial displacement table (4), the inclination adjusting table (401), the lifting device (5), the first autocollimator (8) and the second autocollimator (10) and is used for collecting, storing and processing the surface shape data collected by the phase-shifting interferometer (2) and the relative angle change of the aspheric mirror (6) to be detected in the adjusting process collected by the first autocollimator (8) and the second autocollimator (10), and the computer system (9) adjusts the position of the aspheric mirror (6) to be detected by controlling the axial displacement table (4), the inclination adjusting table (401) and the lifting device (5) to realize the computer-assisted adjustment of the detection light path.
2. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: the device is used for realizing the quick adjustment and is used for the calculation holographic detection light path of aspheric surface detection.
3. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 2, characterized in that: firstly, fixing the central position of the aspherical mirror (6) to be detected at the center of the inclined adjusting table (401) by using the detection tool (7), and enabling the center of the inclined adjusting table (401) to move to the optical axis of the phase-shifting interferometer (2) through the zero return of the axial displacement table (4); adjusting the lens distance and the lens inclination of the computed hologram (3) from the phase-shifting interferometer (2) by using a holographic adjusting frame (301) to enable diffracted light to be emitted along the optical axis of the phase-shifting interferometer (2); calculating the design parameters of the hologram (3) according to the parameters of the aspheric mirror (6) to be measured, and lifting the aspheric mirror (6) to be measured to be close to a theoretical value by using the lifting device (5) to realize coarse focusing; and the computer system (9) is used for collecting and analyzing the surface shape data of the aspherical mirror (6) to be detected at the moment, and the inclination and translation of the specific numerical value of the aspherical mirror (6) to be detected are realized by combining the reading of the autocollimator and utilizing the inclination adjusting table (401) and the axial displacement table (4), so that the rapid adjustment of the detection light path is realized.
4. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: the detection tool (7) is composed of a three-jaw clamping structure, wherein the two jaws are respectively provided with the first standard reflector (701) and the second standard reflector (702) which are vertically arranged, and form an isosceles triangle together with the tool assembly (703); the first standard reflector (701), the second standard reflector (702) and the tool assembly (703) have the characteristic of simultaneous movement, and the movement directions of the first standard reflector and the second standard reflector move towards the center of the inclination adjusting table (401); the aspheric mirror (6) to be detected can be clamped at the center of the inclination adjusting platform (401) through the detection tool (703), and the centers of the aspheric mirror to be detected and the inclination adjusting platform are ensured to be superposed in a certain range.
5. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: an angle measuring system consisting of the first autocollimator (8), the second autocollimator (10), the first standard reflector (701) and the second standard reflector (702) can monitor the inclination adjusting table (401) and the axial displacement table (4) drive the change of the relative angle of the aspheric mirror (6) to be measured during movement to serve as a reference basis for adjusting the relative position of the aspheric mirror (6) to be measured according to a calculation result by the computer system (9).
6. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: the positions of the centers of the axial displacement table (4), the inclination adjusting table (401) and the lifting device (5) in a zero state relative to the center of the computer generated hologram (3) are determined and are all on the optical axis of the phase-shifting interferometer (2).
7. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: according to the radius parameter of the aspheric mirror (6) to be measured and the design parameter of the computed hologram (3), the aspheric mirror (6) to be measured can be moved to a relatively accurate position through the axial displacement table (4), the inclination adjusting table (401) and the lifting device (5) which are determined by relative positions, so that coarse adjustment is realized.
8. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: two mutually perpendicular directions are selected on the surface shape data acquired by the phase-shift interferometer (2), two groups of symmetrical strip-shaped surface shape data passing through the center of the surface shape data are extracted, the deviation of the spatial position of the aspheric mirror (6) to be detected is calculated by combining an adjusting aberration model based on a 2-D chebyshev polynomial, and then the aspheric mirror to be detected is controlled to move to a zero stripe state through the computer system (9) according to the calculation result.
9. Computer-assisted adjustment device for aspheric computed holographic detection according to claim 1, characterized in that: the calculation hologram (3) can be selected according to the requirements of the aspherical mirror (6) to be tested.
10. A computer-aided adjustment method for aspheric surface computed holographic detection, characterized by: the measuring steps are as follows:
step a: installing the computed hologram on a holographic adjusting frame, determining a specific distance from a phase-shift interferometer lens according to the design parameters of the computed hologram, moving the computed hologram to a corresponding distance through a lifting device, and adjusting an inclination state to enable emergent order diffracted light to be emitted along the optical axis direction of the phase-shift interferometer;
step b: clamping the aspheric surface to be detected to the center of the inclination adjusting table by using a detection tool, and coinciding the center of the aspheric surface to be detected with the center of the inclination adjusting table;
step c: adjusting the inclination adjusting table, the axial displacement table and the lifting device to zero positions, calculating that the center of the to-be-measured aspheric surface in the emergent wavefront of the hologram is on the same axis, taking the center of the to-be-measured aspheric surface as an original point, taking the directions of the standard plane mirrors 701 and 702 as an X axis and a Y axis, establishing a space coordinate system, and taking the coordinate of the to-be-measured aspheric surface position as the coordinate
Determining the distance d between the aspheric surface and the computed hologram in the Z-axis direction according to the curvature radius of the aspheric surface to be measured and the design parameters of the computed hologram z Moving the aspheric surface to be measured to D by using the lifting device z -d z At this time, the aspheric position coordinates are
D z When the lifting device is positioned at the zero point position, the distance between the aspheric mirror to be detected and the calculation hologram is measured;
step d: acquiring aspheric surface shape data to be detected by using a phase-shift interferometer;
step e: the X axis and the Y axis are respectively used as rectangular central lines in the collected surface shape data, and the length and the width are respectively L x ，L y Extracting a rectangular surface shape data set S 1 ,S 2 And transmitting the rectangular surface shape data set to a computer system for processing to obtain the required adjustment quantity of the aspheric mirror to be detected, wherein the analysis process is as follows:
first, the extracted rectangular surface shape data S 1 Having the same coordinate system as the aspherical mirror to be measured, S 1 The middle coordinate range can be expressed as
The aspheric equation can be expressed as follows:
wherein c represents a central curvature; k represents a conic coefficient; r represents the position of each point of the mirror surface, wherein r 2 ＝x 2 +y 2 (ii) a For S 1 Area:
in the adjusting process, the aspheric mirror to be measured conforms to the rigid body rotation theorem, translation along the directions of x, y and z exists so as to incline around the axes of x, y and z, and when the aspheric mirror to be measured has an adjusting error, a point P (x, y and z) on the theoretical wave front generated by the hologram and a corresponding point P '(x' on the aspheric mirror with the adjusting error are calculated 1 ,y 1 ,z 1 ) There is the following relationship between:
wherein (dx, dy, dz) are translations in the x, y, z directions, θ x 、θ y 、θ z The inclination around the directions of x, y and z is respectively, and cos theta is approximately equal to 1 in order to further simplify the calculation; sin theta is approximately equal to theta, and because the surface to be measured of the aspherical mirror to be measured is a rotationally symmetrical aspherical surface, theta exists z =0, in summary, the displacement vector δ d of P to P' can represent:
therefore, the aberration caused by the adjustment error can be expressed approximately by taking the component of the position vector δ d on its normal line:
wherein S is 1 Normal direction in the area
The expression form is as follows:
for Δ W (x) 1 ,y 1 ) Taylor expansion is carried out at the point (0, 0) and combined with a 2D Chebyshev polynomial to finally obtain S 1 Within the zone there is a form of aberration caused by the adjustment error:
ΔW(x 1 ,y 1 )＝a 1 (θ x ,θ y ,dx,dy,dz)+a 2 (θ x ,θ y ,dx,dy,dz)x 1 +...+a 10 (θ x ,θ y ,dx,dy,dz)(8y 1 4 -8y 1 2 +1)
the first 10 Chebyshev polynomials are selected to express the main aberration, the number of terms can be increased to obtain a higher-precision result, the general adjustment error is far larger than the measurement result of the aspherical mirror to be measured, and therefore the acquired surface shape data S 1 Approximately satisfies:
S 1 ≈ΔW(x 1 ,y 1 )
according to the least squares theory, the following least squares matrix can be obtained:
obtaining polynomial coefficient a of Chebyshev by solving least square matrix i Then according to Δ W (x) 1 ,y 1 ) The mathematical relationship between the adjustment error equation and the corresponding 2-D Chebyshev polynomial coefficient in (1) is combined with a nonlinear least square algorithm such as LeSolution a of venberg-Marquardt algorithm i (θ x ,θ y The system of dx, dy, dz) equations yields the corresponding adjustment parameter (θ) x ,θ y ,dx,dy,dz)；
Finally, the surface shape data S 2 Also has the same coordinate system as the aspherical mirror to be measured, and the coordinate range can be expressed as
Face shape data S 2 The same data processing is carried out to obtain the corresponding adjusting parameter (theta' x ,θ' y Dx ', dy ', dz '), in order to further improve the calculation accuracy, the two results are averaged to obtain the final adjustment parameters of the aspherical mirror to be measured:
step f: judging whether the obtained adjustment parameters of the aspheric mirror to be detected meet the angle and displacement threshold values:
in the formula, Δ θ and Δ d are angle and displacement threshold values respectively, the minimum angle and displacement adjustment amount of the mechanical device can be selected as judgment threshold values, and when the minimum angle and displacement adjustment amount are greater than the threshold values, the tilt adjustment table, the axial displacement table and the lifting device are controlled by the computer system to adjust the position of the aspheric mirror to be measured respectively by combining the real-time measurement result of the autocollimator:
wherein k represents the kth adjustment, X k+1 ,Y k+1 ,Z k+1 ,
Denotes the kth+1 time of adjusted aspheric surface position parameters to be measured;
and e, respectively calculating the obtained adjustment parameters in the step e, and repeating the step c after adjustment until the calculation result is smaller than a threshold value, and finally realizing the computer-assisted adjustment of the detection light path of the aspherical mirror to be detected.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103994731A (en) * | 2014-05-26 | 2014-08-20 | 上海大学 | Cylindrical surface interference splicing measuring device and adjusting method thereof |
| WO2016128234A1 (en) * | 2015-02-13 | 2016-08-18 | Carl Zeiss Smt Gmbh | Test device and method for testing a mirror |
| CN106404354A (en) * | 2016-10-11 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Device and method for measurement of aspheric compensator transmission wavefront equation |
| CN113091637A (en) * | 2021-03-22 | 2021-07-09 | 中国科学院光电技术研究所 | Ultra-high precision plane mirror full-aperture medium-frequency surface shape measuring device and method |
-
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- 2021-12-28 CN CN202111622488.8A patent/CN114252023B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103994731A (en) * | 2014-05-26 | 2014-08-20 | 上海大学 | Cylindrical surface interference splicing measuring device and adjusting method thereof |
| WO2016128234A1 (en) * | 2015-02-13 | 2016-08-18 | Carl Zeiss Smt Gmbh | Test device and method for testing a mirror |
| CN106404354A (en) * | 2016-10-11 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Device and method for measurement of aspheric compensator transmission wavefront equation |
| CN113091637A (en) * | 2021-03-22 | 2021-07-09 | 中国科学院光电技术研究所 | Ultra-high precision plane mirror full-aperture medium-frequency surface shape measuring device and method |
Non-Patent Citations (2)
| Title |
|---|
| Stitching interferometry using Computer-Generated Hologram (CGH) based on sub-aperture adjustment aberration of 2-D Chebyshev polynomial;SHUAI ZHANG;《Optics and Lasers in Engineering》;20210326;全文 * |
| 基于 CGH 拼接干涉检测柱面镜装置;张帅;《工程科技Ⅱ辑》;20210815;全文 * |
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