CN105486246A - Spherical surface interference splicing measuring device and adjusting method thereof - Google Patents
Spherical surface interference splicing measuring device and adjusting method thereof Download PDFInfo
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- CN105486246A CN105486246A CN201510739697.9A CN201510739697A CN105486246A CN 105486246 A CN105486246 A CN 105486246A CN 201510739697 A CN201510739697 A CN 201510739697A CN 105486246 A CN105486246 A CN 105486246A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention relates to a spherical surface interference splicing measuring device and an adjusting method thereof. The device comprises an interferometer, a support, a six-dimensional adjusting mount, a CGH, a one-dimensional guide rail platform, a measured piece, a one-dimensional adjusting mechanism, a two-dimensional adjusting mechanism, a four-dimensional adjusting mechanism, and an electronic control lifting platform. The adjusting method is used to adjust the spherical surface interference splicing measuring device. The device can conveniently, rapidly, and accurately adjust a spherical surface measured piece, so the measured piece satisfies measuring requirements, and problems that installation and adjustment of the measured spherical surface component in measurement are difficult, so as to realize full-aperture detection of the measured piece.
Description
Technical field
The present invention relates to a kind of spherical surface error pick-up unit and method, particularly a kind of spherical interference splicing measuring device and method of adjustment thereof.
Background technology
Along with the development of scientific and technological level and industrial level, more and more higher to the requirement of large-diameter optical part in the commercial production in modern times.Use conventional methods, use interferometer to measure large spherical surface optical element, need larger interferometer and reference mirror, the process-cycle is long, and processing cost is high, adopts stitching interferometer method to address this problem.For stitching interferometer measurement mechanism and the method for spherical surface error, although it can high-acruracy survey, the mounting and adjusting of its measured piece is comparatively difficult, and requires very high to the Adjustment precision of measured piece, has obstructed the Developing Extension of the method.
Summary of the invention
The object of the invention is to the defect existed for prior art, a kind of spherical interference splicing measuring device and method of adjustment thereof are provided, quick, effective, the accurate adjustment to measured piece can be realized.
In order to achieve the above object, design of the present invention is:
Splicing thought is utilized to measure spherical parts, because the sub-aperture measured is less, carry out splicing to detect, measured piece not only will realize moving up and down, also to adjust the centre of sphere making measured piece and calculation holographic sheet (Computer-GeneratedHologram, the focus of the spherical wave CGH) produced overlaps, and realization its centre of sphere in measured piece rotary course overlaps all the time with spherical wave focus.
Adjusting mechanism divides two parts, a part makes the centre of sphere of measured piece overlap with the rotation centerline of adjustment platform, keep this part constant, the spherical wave focus that adjustment another part makes the centre of sphere of measured piece and CGH produce overlaps, can guarantee that the spherical wave focus that the centre of sphere of measured piece measured piece in rotary course and CGH produce overlaps, stably measured; One dimension lifting table realizes moving up and down of measured piece; In measuring process, measured surface reflection light point is controlled at cross wire center, guarantee that each sub-aperture has interference fringe.This adjusting mechanism and method of adjustment thereof finally realize the fullaperture test of spherical parts.
According to above-mentioned inventive concept, the present invention adopts following technical proposals:
A kind of spherical interference splicing measuring device, comprises interferometer, bearing, six-dimensional adjusting support, CGH, one dimension guide rail platform, measured piece, one dimension adjusting mechanism, two-dimensional adjusting mechanism, four-dimensional adjusting mechanism, electrical-controlled lifting platform, described bearing is installed interferometer and one dimension guide rail platform, six-dimensional adjusting support installed by described one dimension guide rail platform, described CGH is arranged on six-dimensional adjusting support, enables interferometer emergent light axis by the center of CGH, and can adjust the distance between CGH and measured piece, by described one dimension adjusting mechanism, two-dimensional adjusting mechanism, four-dimensional adjusting mechanism and electrical-controlled lifting platform composition measured piece governor motion, measured piece governor motion lower end is electrical-controlled lifting platform, four-dimensional adjusting mechanism is fixed above described electrical-controlled lifting platform, the centre of sphere being used for adjusting measured piece overlaps with the spherical wave focus that CGH produces, two-dimensional adjusting mechanism is fixed above described four-dimensional adjusting mechanism, the centre of sphere being used for adjusting measured piece overlaps with the rotation centerline of measured piece governor motion, described one dimension governor motion is fixed in two-dimensional adjusting mechanism, measured piece is fixed above one dimension governor motion.
Described one dimension guide rail platform is: installing plate both sides fixed rack, and two slide blocks move freely along the parallel direction of slide rail respectively, fixed connecting plate above two slide blocks; Six-dimensional adjusting support is fixed above web joint.
Described one dimension adjusting mechanism is: measured piece is fixing on the rotary shaft, and turning axle is fixed on the first precise rotation platform, and the first precise rotation platform is fixed on web joint, meets the adjustment of measured piece around turning axle rotation degree of freedom.
Described two-dimensional adjusting mechanism is: fixed connecting plate above upper two-dimensional direct moving platform, meets the adjustment moving left and right two degree of freedom after measured piece surface level is gone forward.
Described four-dimensional adjusting mechanism is: fix one dimension vertical direction direct acting platform above lower two-dimensional direct moving platform, and the second precise rotation platform is fixed on this one dimension vertical straight moving platform, meet measured piece horizontal direction all around to move, horizontally rotate, move up and down the adjustment of four degree of freedom.
A method of adjustment for spherical interference splicing measuring device, for adjusting above-mentioned spherical interference splicing measuring device, operation steps is as follows:
1) mounting and adjusting CGH:CGH is arranged on six-dimensional adjusting support, is arranged on by six-dimensional adjusting support on one dimension guide rail platform;
2) two-dimensional adjusting mechanism is adjusted: the clock gauge of use level carries out aligning to measured piece: aligning withstands on measured piece by clock gauge pointer, the sphere center position of measured piece sphere is regulated, until clock gauge registration is almost constant in measured piece rotation process by adjusting upper two-dimensional direct moving platform;
3) adjust one dimension guide rail platform and electrical-controlled lifting platform: the position of mobile one dimension guide rail platform and electrical-controlled lifting platform, the back focus of the spherical wave that the centre of sphere of CGH and measured piece distance is produced for CGH, and adjust measured piece at applicable height; The orientation of adjustment CGH, makes interferometer optical axis perpendicular through the center of CGH;
4) adjusting four-dimensional adjusting mechanism: first under light source mode, find flare, by regulating lower two-dimensional direct moving platform and one dimension vertical straight moving platform, flare being adjusted to cross wire center gradually; Switch to fringe again and carry out fine tuning, regulate different degree of freedom according to interference fringe difference: in the face of interferometer, nicking then regulates and moves left and right, and horizontal stripe then regulates and moves up and down, and the middle close striped in both sides of dredging then regulates out of focus; Interference fringe is fewer, and it is better that the measured piece centre of sphere overlaps with spherical wave focus;
5) keep the state of step 3), an aligning is carried out to measured piece again, and switches to light source mode, according to the size of measured piece, adjust the first precise rotation platform to certain angle, repeat step 4);
6) constantly adjust the first precise rotation platform, and switch to light source mode, make luminous point not deflect away from right-angled intersection center, guarantee that measured piece rotates one week under fringe, there is interference fringe picture each position, realizes complete cycle and detects.
7) for larger measured piece, step 5) and 6 is repeated), until all area measures of measured piece are complete.
Compared with prior art, the beneficial effect of spherical interference splicing measuring device of the present invention and method of adjustment thereof is:
This device easily and fast, accurately can adjust sphere measured piece with satisfied measurement requirement, effectively solves the problem of tested spherical parts install and adjust difficulty in the measurements, realizes its fullaperture test.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of spherical interference splicing measuring device.
Fig. 2 is the structural representation of measured piece governor motion in spherical interference splicing measuring device.
Fig. 3 is the structural representation of one dimension adjusting mechanism.
Fig. 4 is the structural representation of two-dimensional adjusting mechanism.
Fig. 5 is the structural representation of four-dimensional adjusting mechanism.
Fig. 6 is the structural representation of CGH six-dimensional adjusting support.
Fig. 7 is the structural representation of one dimension guide rail platform.
Embodiment
Embodiment of the present invention accompanying drawings is as follows:
embodiment one:
As shown in Figure 1, a kind of spherical interference splicing measuring device, comprises interferometer 1, bearing 2, six-dimensional adjusting support 3, CGH4, one dimension guide rail platform 5, measured piece 6, one dimension adjusting mechanism 7, two-dimensional adjusting mechanism 8, four-dimensional adjusting mechanism 9, electrical-controlled lifting platform 10, described bearing 2 is installed interferometer 1 and one dimension guide rail platform 5, six-dimensional adjusting support 3 installed by described one dimension guide rail platform 5, described CGH4 is arranged on six-dimensional adjusting support 3, enables interferometer 1 emergent light axis by the center of CGH4, and can adjust the distance between CGH4 and measured piece 6, by described one dimension adjusting mechanism 7, two-dimensional adjusting mechanism 8, four-dimensional adjusting mechanism 9 and electrical-controlled lifting platform 10 form measured piece governor motion, measured piece governor motion lower end is electrical-controlled lifting platform 10, described electrical-controlled lifting platform 10 is fixing four-dimensional adjusting mechanism 9 above, the centre of sphere being used for adjusting measured piece 6 overlaps with the spherical wave focus that CGH4 produces, described four-dimensional adjusting mechanism 9 is fixing two-dimensional adjusting mechanism 8 above, the centre of sphere being used for adjusting measured piece 6 overlaps with the rotation centerline of measured piece governor motion, described one dimension governor motion 7 is fixed in two-dimensional adjusting mechanism 8, one dimension governor motion 7 is fixing measured piece 6 above.
In described device, interferometer 1 is: Zygo company model is the interferometer of GPIXP/D, 640X480CCD image acquisition, adopt laser three-D phase-shifting interferometry, laser generator is helium-neon laser wavelength 632.8nm, can produce a branch of standard flat ripple, plane surveying precision reaches λ/20.
Described CGH4 and supporting six-dimensional adjusting support 3 thereof are: Zygo Products.The plane wave that interferometer 1 produces is converted to through CGH4 the surface that spherical wave incides measured piece 6, the reflection wave second time of the tested sphere of carrier 6 surperficial face shape information is back through CGH4, enter in interferometer 1, interfere with standard flat ripple, in CCD, show interference fringe picture; Five knobs 18,19,20,21,22 of described six-dimensional adjusting support 3 are by the attitude of different combination control CGH4 six-freedom degrees.
Described one dimension guide rail platform 5 is: fixed rack 24,24 ', two slide blocks 25,25 ' in installing plate 23 both sides are respectively along slide rail 24, and the parallel direction of 24 ' moves freely, two slide blocks 25,25 ' fixed connecting plate 26 above; Web joint 26 is fixing six-dimensional adjusting support 3 above.
Described one dimension adjusting mechanism 7 is: measured piece 6 is fixed on turning axle 12, turning axle 12 is fixed on the first precise rotation platform 11, first precise rotation platform 11 is fixed on web joint 13, on 13 ', meets the adjustment of measured piece 6 around turning axle 12 rotation degree of freedom.
Described two-dimensional adjusting mechanism 8 is: upper two-dimensional direct moving platform 14,14 ' fixed connecting plate 13,13 ' above, meets the adjustment moving left and right two degree of freedom after measured piece 6 surface level is gone forward.
Described four-dimensional adjusting mechanism 9 is: lower two-dimensional direct moving platform 17,17 ' fixes one dimension vertical direction direct acting platform 16 above, and the second precise rotation platform 15 is fixed on this one dimension vertical straight moving platform 16, meet measured piece 6 horizontal direction all around to move, horizontally rotate, move up and down the adjustment of four degree of freedom.
Described electrical-controlled lifting platform 10 is: product purchasing model is PSAV100-ZF, is furnished with one dimension 42/57 driving controller of stepping motor, and production code member is SC300-1B, can realize movement and the location of measured piece 6 vertical direction.
embodiment two:
A method of adjustment for spherical interference splicing measuring device, for adjusting above-mentioned spherical interference splicing measuring device, operation steps is as follows:
1) mounting and adjusting CGH4:CGH4 is arranged on six-dimensional adjusting support 3, is arranged on by six-dimensional adjusting support 3 on one dimension guide rail platform 5;
2) two-dimensional adjusting mechanism 8 is adjusted: the clock gauge of use level carries out aligning to measured piece 6: aligning withstands on measured piece 6 by clock gauge pointer, by adjusting upper two-dimensional direct moving platform 14,14 ' the sphere center position regulating measured piece 6 sphere, until clock gauge registration is almost constant in measured piece 6 rotation process;
3) adjust one dimension guide rail platform 5 and electrical-controlled lifting platform 10: the position of mobile one dimension guide rail platform 5 and electrical-controlled lifting platform 10, the back focus of the spherical wave that the centre of sphere of CGH4 and measured piece 6 distance is produced for CGH4, and adjust measured piece 6 at applicable height; The orientation of adjustment CGH4, makes interferometer 1 optical axis perpendicular through the center of CGH4;
4) adjusting four-dimensional adjusting mechanism 9: first under light source mode, find flare, by regulating lower two-dimensional direct moving platform 17,17 ' and one dimension vertical straight moving platform 16, flare being adjusted to cross wire center gradually; Switch to fringe again and carry out fine tuning, regulate different degree of freedom according to interference fringe difference: in the face of interferometer 1, nicking then regulates and moves left and right, and horizontal stripe then regulates and moves up and down, and the middle close striped in both sides of dredging then regulates out of focus; Interference fringe is fewer, and it is better that measured piece 6 centre of sphere overlaps with spherical wave focus;
5) keep the state of step 3), an aligning is carried out to measured piece 6 again, and switches to light source mode, according to the size of measured piece 6, adjust the first precise rotation platform 11 to certain angle, repeat step 4);
6) constantly adjust the first precise rotation platform 11, and switch to light source mode, make luminous point not deflect away from right-angled intersection center, guarantee that measured piece 6 rotates one week under fringe, there is interference fringe picture each position, realizes complete cycle and detects.
7) for larger measured piece 6, step 5) and 6 is repeated), until all area measures of measured piece 6 are complete.
Claims (5)
1. a spherical interference splicing measuring device, is characterized in that: comprise interferometer (1), bearing (2), six-dimensional adjusting support (3), CGH(4), one dimension guide rail platform (5), measured piece (6), one dimension adjusting mechanism (7), two-dimensional adjusting mechanism (8), four-dimensional adjusting mechanism (9), electrical-controlled lifting platform (10), described bearing (2) is installed interferometer (1) and one dimension guide rail platform (5), described one dimension guide rail platform (5) installs six-dimensional adjusting support (3), described CGH(4) be arranged on six-dimensional adjusting support (3), enable interferometer (1) emergent light axis pass through CGH(4) center, and can CGH(4 be adjusted) and measured piece (6) between distance, by described one dimension adjusting mechanism (7), two-dimensional adjusting mechanism (8), four-dimensional adjusting mechanism (9) and electrical-controlled lifting platform (10) composition measured piece governor motion, measured piece governor motion lower end is electrical-controlled lifting platform (10), described electrical-controlled lifting platform (10) is fixing four-dimensional adjusting mechanism (9) above, being used for adjusting the centre of sphere and the CGH(4 of measured piece (6)) the spherical wave focus that produces overlaps, described four-dimensional adjusting mechanism (9) is fixing two-dimensional adjusting mechanism (8) above, the centre of sphere being used for adjusting measured piece (6) overlaps with the rotation centerline of measured piece governor motion, described one dimension governor motion (7) is fixed in two-dimensional adjusting mechanism (8), one dimension governor motion (7) is fixing measured piece (6) above.
2. spherical interference splicing measuring device according to claim 1, it is characterized in that: described one dimension adjusting mechanism (7) is: measured piece (6) is fixed on turning axle (12), turning axle (12) is fixed on the first precise rotation platform (11), first precise rotation platform (11) is fixed on web joint (13,13 '), on, the adjustment of measured piece (6) around turning axle (12) rotation degree of freedom is met.
3. spherical interference splicing measuring device according to claim 1, it is characterized in that: described two-dimensional adjusting mechanism (8) is: upper two-dimensional direct moving platform (14,14 ') fixed connecting plate (13 above, 13 ') adjustment moving left and right two degree of freedom after measured piece (6) surface level is gone forward, is met.
4. spherical interference splicing measuring device according to claim 1, it is characterized in that: described four-dimensional adjusting mechanism (9) is: lower two-dimensional direct moving platform (17,17 ') one dimension vertical direction direct acting platform (16) is fixed above, and the second precise rotation platform (15) is fixed on this one dimension vertical straight moving platform (16), meet measured piece (6) horizontal direction all around to move, horizontally rotate, move up and down the adjustment of four degree of freedom.
5. a method of adjustment for spherical interference splicing measuring device, for adjusting spherical interference splicing measuring device according to claim 1, it is characterized in that, operation steps is as follows:
1) mounting and adjusting CGH(4): CGH(4) be arranged on six-dimensional adjusting support (3), six-dimensional adjusting support (3) be arranged on one dimension guide rail platform (5);
2) two-dimensional adjusting mechanism (8) is adjusted: use the clock gauge of level to carry out aligning to measured piece (6): aligning is withstood on by clock gauge pointer on measured piece (6), by adjusting upper two-dimensional direct moving platform (14,14 ') sphere center position of measured piece (6) sphere is regulated, until clock gauge registration is almost constant in measured piece (6) rotation process;
3) one dimension guide rail platform (5) and electrical-controlled lifting platform (10) is adjusted: the position of mobile one dimension guide rail platform (5) and electrical-controlled lifting platform (10), make CGH(4) be CGH(4 with the centre of sphere of measured piece (6) distance) back focus of spherical wave that produces, and adjust the height that measured piece (6) is being applicable to; Adjustment CGH(4) orientation, make interferometer (1) optical axis perpendicular through CGH(4) center;
4) adjusting four-dimensional adjusting mechanism (9): first under light source mode, find flare, by regulating lower two-dimensional direct moving platform (17,17 ') and one dimension vertical straight moving platform (16), flare being adjusted to cross wire center gradually; Switch to fringe again and carry out fine tuning, regulate different degree of freedom according to interference fringe difference: in the face of interferometer (1), nicking then regulates and moves left and right, and horizontal stripe then regulates and moves up and down, and the middle close striped in both sides of dredging then regulates out of focus; Interference fringe is fewer, and it is better that measured piece (6) centre of sphere overlaps with spherical wave focus;
5) keep the state of step 3), an aligning is carried out to measured piece (6) again, and switches to light source mode, according to the size of measured piece (6), adjust the first precise rotation platform (11) to certain angle, repeat step 4);
6) constantly adjust the first precise rotation platform (11), and switch to light source mode, make luminous point not deflect away from right-angled intersection center, guarantee that measured piece (6) rotates one week under fringe, there is interference fringe picture each position, realizes complete cycle and detects;
7) for larger measured piece (6), step 5) and 6 is repeated), until all area measures of measured piece (6) are complete.
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| CN108151645A (en) * | 2018-01-25 | 2018-06-12 | 武汉工程大学 | A kind of detachable globular measuring instrument for white light interferometer |
| CN111536896A (en) * | 2020-04-09 | 2020-08-14 | 中国科学院长春光学精密机械与物理研究所 | Automatic detection device and method for laser interference surface shape detection |
| CN113515003A (en) * | 2021-03-25 | 2021-10-19 | 深圳市海塞姆科技有限公司 | Integrated light source radiating support |
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