CN113175897A - Combined compensation surface shape detection system and method of off-axis high-order ellipsoid-like reflector - Google Patents
Combined compensation surface shape detection system and method of off-axis high-order ellipsoid-like reflector Download PDFInfo
- Publication number
- CN113175897A CN113175897A CN202110498108.8A CN202110498108A CN113175897A CN 113175897 A CN113175897 A CN 113175897A CN 202110498108 A CN202110498108 A CN 202110498108A CN 113175897 A CN113175897 A CN 113175897A
- Authority
- CN
- China
- Prior art keywords
- mirror
- order
- polarization phase
- ellipsoid
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Holo Graphy (AREA)
Abstract
The invention discloses a combined compensation surface shape detection system and method of an off-axis high-order ellipsoid-like reflector. The detection system comprises a computer, a polarization phase-shifting interferometer, a computer hologram, a mirror to be detected and a reflecting ball; the test spherical wave is reflected by the reflection ball at the position of the near focus of the to-be-tested mirror, reflected by the to-be-tested mirror and reflected by the reflection ball at the position of the to-be-tested mirror, reflected by the to-be-tested mirror and reflected by the calculation holographic diffraction again, and converged to the focus position of the polarization phase-shifting interferometer, the test spherical wave enters the polarization phase-shifting interferometer and interferes with the reference wave surface to generate interference fringes, and the computer processes the main holographic fringes to obtain the surface shape information of the to-be-tested high-order ellipsoidal reflector. The method has the characteristics of non-contact and high precision, and can effectively ensure that the surface shape precision of the off-axis high-order ellipsoid to be measured meets the processing requirement.
Description
Technical Field
The invention belongs to the field of advanced optical manufacturing and detection, and particularly relates to a high-precision surface shape detection system and a detection method of an off-axis high-order ellipsoid-like reflector.
Background
With the continuous improvement of optical processing and adjustment precision, optical systems such as large-caliber astronomical telescopes and high-resolution imaging satellites tend to adopt off-axis reflection systems without central obscuration more and more. The optical system has no central blocking, larger view field, excellent imaging and easy suppression of stray light, wherein off-axis high-order ellipsoidal reflectors are often adopted to optimize the imaging quality of the optical system.
The conventional method is to adopt a single block of calculation holographic detection light path to carry out rotation and translation on the off-axis mirror surface to be detected as an on-axis free curved surface to carry out surface shape detection. However, when a certain distance error exists in the detection light path, a certain parameter deviation between the curvature radius of the parent mirror of the off-axis high-order ellipsoid and the off-axis amount of the mirror surface often occurs, and the mutual inspection of the off-axis high-order ellipsoids to be detected is performed by adopting different methods, so that the technical problem to be solved in the field of mirror surface processing is solved.
Disclosure of Invention
In view of the above, the invention provides a surface shape detection scheme capable of accurately controlling the curvature radius and off-axis amount of the off-axis higher-order ellipsoid-like primary mirror to be detected, and provides a corresponding light path alignment scheme to ensure that the installation and adjustment of the detection light path are feasible.
In order to achieve the purpose, the invention adopts a detection mode of combined compensation of an aberration-free point method and a computational holography method to realize high-precision detection of the surface shape of the off-axis high-order near-ellipsoid reflecting mirror. The invention provides a combined compensation surface shape detection system of an off-axis high-order ellipsoid-like reflector, which comprises a computer, a polarization phase-shifting interferometer, a computer hologram, a to-be-detected mirror and a reflecting ball, wherein the computer is used for generating a polarization phase-shifting interferometer; the testing spherical wave is reflected by the to-be-tested mirror and the to-be-tested mirror after being reflected by the reflecting ball at the position of the near focus of the to-be-tested mirror through the to-be-tested mirror and the to-be-tested mirror, is converged to the focus position of the polarization phase-shifting interferometer through reflection of the to-be-tested mirror and calculation of holographic diffraction again, the testing spherical wave enters the polarization phase-shifting interferometer to interfere with the reference wave surface to generate interference fringes, and the computer processes the main holographic fringes to obtain the surface shape information of the to-be-tested off-axis high-order ellipsoidal reflector.
The polarization phase-shifting interferometer is characterized in that a spatial filter for filtering stray diffraction light of a detection light path is further arranged at the focus position of the polarization phase-shifting interferometer.
The lens to be measured is an off-axis ellipsoid containing high-order terms, and the coefficient of quadratic term is more than-1 and less than K and less than 0.
The computer generated hologram comprises a plurality of diffraction areas, including a main hologram area for detecting the surface shape of the mirror to be measured, a hologram alignment area for adjusting the spatial posture of the computer generated hologram, a cross line diffraction area for guiding the adjustment of the spatial position of the mirror to be measured, a diffraction area for guiding the coarse adjustment of the distance of the mirror to be measured, and a reflective sphere alignment area for guiding the adjustment of the position of the reflective sphere.
The position of the focal point of the emergent spherical wave of the polarization phase-shifting interferometer and the position of the spherical center of the high-precision reflecting sphere, namely the positions of the far focus and the near focus of the off-axis high-order ellipsoid-like surface, are controlled by calculating diffraction areas with different holographic functions.
Wherein the high-precision reflective sphere has a root mean square surface shape precision within 0.01 λ (λ 632.8 nm).
The testing spherical wave focus emitted by the polarization phase-shifting interferometer is located at the far focus position of the to-be-tested mirror, the reflecting ball is located at the near focus position of the to-be-tested mirror, and the wave front deformation caused by the rise deviation of the high-order mirror surface is compensated by the calculation holography.
The invention also provides a detection method based on the detection system, which comprises the following steps:
step 1: adjusting the polarization phase-shifting interferometer to enable an effective region of emergent light of the polarization phase-shifting interferometer to cover the whole calculated holographic caliber; adjusting the spatial position of the computed holography to the minimum inclination and defocusing of the interference fringes under the guidance of the interference fringes of the holographic alignment area at the computer end of the polarization phase-shifting interferometer; at the moment, the polarization phase-shifting interferometer and the spatial position of the computed hologram are determined;
step 2: preliminarily adjusting the spatial position of the lens to be measured according to the diffraction cross line of the computed hologram and the focus of the convergent spherical wave;
and step 3: adjusting the spatial position of a reflecting sphere according to the interference fringes of the alignment area of the reflecting sphere at the computer end of the polarization phase-shifting interferometer until the interference fringes are out of focus to the minimum, and determining the position of the reflecting sphere;
and 4, step 4: accurately adjusting the space attitude of the lens to be measured according to the interference fringes of the main holographic region of the polarization phase-shifting interferometer until the fringes of the main holographic region are minimum; at the moment, the spatial relative positions of all elements of the detection optical path are determined; and (4) processing the interference fringes of the main holographic region by a computer to obtain the shape information of the mirror surface to be measured.
In step 4, after the spatial relative positions of all elements of the detection optical path are determined, a spatial filter is inserted into the focal position of the polarization phase-shifting interferometer to filter out stray diffraction order light, and then the computer processes the interference fringes of the main holographic region.
The curvature radius of the parent mirror of the off-axis high-order ellipsoid to be detected is made to accord with the processing target through the control of the far focus and the near focus positions of the off-axis high-order ellipsoid to be detected, and the off-axis quantity parameter of the off-axis high-order ellipsoid to be detected is made to accord with the expected processing target through calculating the holographic diffraction cross-line position.
The invention has the following beneficial effects:
the detection system and the detection method have the characteristics of non-contact and high precision, can effectively ensure that the surface shape precision of the off-axis high-order ellipsoid to be detected meets the processing requirement, and improve the accuracy of the curvature radius and off-axis quantity parameters of the off-axis mirror surface master mirror to be detected. The mirror surface shape detection scheme is an effective guarantee that the off-axis high-order ellipsoid is freely used in the optical system, and has a relatively wide application value.
Drawings
FIG. 1 is a schematic diagram of an off-axis higher order ellipsoid-like detection optical path;
FIG. 2 is a diagram of a spot alignment of a detection optical path and a wave aberration;
FIG. 3 is a distribution plot of stray diffraction order rays at the spatial filter plane;
FIG. 4 is a layout diagram of functional regions of a computer generated hologram;
FIG. 5 is a schematic illustration of a detection light path alignment scheme;
FIG. 6 is a schematic view of a mirror edge cross;
FIG. 7 is a schematic diagram of interference fringes in the alignment region of the hologram in the detection optical path;
FIG. 8 is a schematic diagram of the change of interference fringes of the main holographic region during the installation and adjustment of the detection optical path.
Detailed Description
The invention is described below with reference to a specific off-axis higher order ellipsoid to be measured.
The vector height expression of the off-axis high-order ellipsoid surface to be measured is as follows:
in the formula, r2＝x2+y2C is the curvature of the primary mirror, K is the coefficient of the secondary term of the primary mirror, alphaiIs a high-order term coefficient.
The mirror surface shape detection method to be detected is only suitable for the off-axis high-order ellipsoid-like reflector, the quadratic term coefficient is more than-1 and less than 0, and the quadratic term coefficient comprises a high-order term coefficient.
The central curvature radius R of the mother mirror is-1039.948 mm, the second-order coefficient K of the mirror surface is-0.217, and only includes 4-order coefficient, alpha4＝3.065×10-13The off-axis amount b is 200mm, and the aperture of the mirror to be measured is 125 mm. The invention takes the off-axis mirror as an example to explain the detection device.
As shown in fig. 1, a combined compensation surface shape detection device for an off-axis high-order ellipsoid comprises a polarization phase-shifting interferometer 1 (connected to a Computer, the Computer is not shown in the figure), a spatial filter 2, a Computer Generated Hologram 3 (CGH), an off-axis high-order ellipsoid-like reflector 4 to be measured, and a high-precision reflection ball 5. The polarization phase-shifting interferometer is connected with a computer, a spherical wave focus is emitted by the interferometer and is positioned at the far focus position of the off-axis high-order ellipsoid-like reflector to be detected, the high-precision reflector is positioned at the near focus position of the off-axis high-order ellipsoid-like reflector to be detected, and wavefront deformation caused by the rise deviation of the high-order mirror surface is compensated by calculating holography. The positions of the focal points of the emergent spherical waves of the interferometer and the spherical center of the high-precision reflecting ball, namely the positions of the far focal point and the near focal point of the off-axis high-order ellipsoid-like surface, are accurately controlled by calculating diffraction areas with different holographic functions. The curvature radius of a mother mirror of the off-axis high-order ellipsoid to be measured is ensured to be in accordance with a processing target through the accurate adjustment of the far focus and the near focus positions of the off-axis high-order ellipsoid; the off-axis quantity parameters of the mirror to be measured are ensured to accord with the expected processing target by calculating the position of the holographic diffraction cross line.
In this embodiment, the mirror surface to be measured is an off-axis high-order ellipsoidal reflector, and has a quadratic coefficient of-1 < K < 0 and a high-order coefficient.
In this embodiment, the polarization phase-shifting interferometer is configured to generate a test spherical wavefront on the detection optical path, the emergent test spherical wavefront is reflected by the off-axis high-order ellipsoid to be detected and reflected by the reflective sphere at the position close to the focus of the mirror to be detected, and then reflected by the mirror to be detected and diffracted by the computer to converge to the focus of the interferometer, the test spherical wavefront returns to the inside of the interferometer to interfere with the reference wavefront, so as to generate interference fringes, and the computer processes and calculates the light intensity information of the main holographic interference fringe, so as to obtain the surface shape information of the off-axis high-order ellipsoid to be detected.
In this embodiment, the spatial filter is used for filtering stray diffraction light of the detection optical path.
In the embodiment, the calculation hologram is used for compensating the residual wave aberration of the optical path detected by the off-axis high-order ellipsoid aberration-free point method; in addition, the computer-generated hologram can also be used for calibrating and calculating the position of the hologram substrate, guiding the installation and adjustment of the space position and distance of the mirror to be measured and guiding the position installation and adjustment of the high-precision reflecting ball.
In this embodiment, the high-precision reflective sphere is used for detecting the reflection of the optical path test light wave front, the surface shape is required to be superior to the shape precision of the mirror to be tested, and the root-mean-square surface shape precision is usually required to be within 0.01 λ (λ is 632.8 nm).
The image quality evaluation of the detection light path is shown in FIG. 2, the geometric radius of the point array diagram is 0.007 μm, and the root mean square value of the wavefront error is 0.0001 λ.
In order to judge whether the stray diffraction order light rays are mixed and staggered together or not on the plane of the spatial filter, a detection light path needs to be designed into a double-pass light path. That is, the spherical wave light starts from the interferometer focus, after CGH diffraction and reflection by the measurement object, the light vertically enters the spherical reflector, and according to the law of reflection, the light is reflected on the spherical reflector along the original light path, reflected by the measurement object again, and diffracted by the CGH, and returns to the interferometer focus plane (this plane is also the spatial filter plane).
The interferometer emits spherical wave light rays, diffraction light rays of diffraction orders of 0 order, plus or minus 1 order, plus or minus 2 order, plus or minus 3 order … … and the like are generated after calculation holographic diffraction, the diffraction efficiency of light rays above plus or minus 3 order is small and can be ignored, and light rays reflected by the reflecting ball and the to-be-measured mirror can also generate diffraction light rays of 0 order, plus or minus 1 order, plus or minus 2 order, plus or minus 3 order … … through calculation holographic diffraction again, so that light rays of different diffraction order combinations can appear on a focal plane of the interferometer.
The test light is subjected to calculation holographic diffraction for the first time, the first-order diffraction light is reflected by the to-be-tested mirror and the high-precision reflecting ball, and is reflected and subjected to calculation holographic diffraction again by the to-be-tested mirror, and the corresponding first-order light is the working wavefront of the test light. The diffracted light at the spatial filter plane can be described as (1,1) -order diffracted light, with the other diffracted combined rays being similar.
FIG. 3 shows the distribution of stray diffraction order rays in the plane of the spatial filter, where the (1,1) th order diffracted light is the working diffraction order and the (3, -1), (2,0), (0,2), (1,0), and (0,1) th order diffracted light is the interfering diffraction order. Stray diffraction order rays in the plane of the spatial filter are mainly judged to be interference from diffraction ray orders of (3, -1), (-1,3), (2,0), (0,2), (1,0) and (0,1) of the computer generated hologram. The plane stray light of the spatial filter is shown in fig. 3, except the (1,1) level working diffraction light, the other stray diffraction combined light is far away from the working diffraction order, can be filtered by the spatial filter, and cannot enter the interferometer to cause interference on a detection result.
The computer generated hologram includes a hologram alignment area 3.2 for adjusting the spatial posture of the computer generated hologram substrate, a cross diffraction area 3.3 for guiding the adjustment of the spatial position of the mirror to be measured, a diffraction area 3.4 for guiding the coarse adjustment of the distance of the mirror to be measured, and a reflective sphere alignment area 3.5 for guiding the adjustment of the position of the reflective sphere, in addition to a main hologram area 3.1 for detecting the surface shape of the mirror to be measured, as shown in fig. 4.
The schematic diagram of the calculation holographic alignment light path is shown in fig. 5, and comprises an interferometer focus 1.1, a calculation hologram 3, an off-axis high-order near ellipsoid reflecting mirror 4 to be measured and a high-precision reflecting sphere 5, wherein the light path comprises a holographic sheet alignment light path, a mirror edge diffraction cross line light path to be measured, a mirror distance coarse adjustment light path to be measured and a reflecting sphere alignment light path. The function of calculating each diffraction region of the hologram is explained as follows:
main holographic region: the first-order diffraction light wave front is reflected by the mirror to be tested and the reflecting ball and is reflected by the mirror to be tested again, and the return light first-order diffraction light enters the interferometer to be used as a test wave front and interferes with the reference wave front inside the interferometer to generate interference fringes.
Hologram alignment area: the alignment area reflects the front edge of the outgoing spherical wave of the interferometer along the original optical path, and the reflected light enters the interferometer to interfere with the internal reference wavefront of the interferometer to generate alignment interference fringes.
Diffraction area of reticle at edge of lens to be measured: the computer generated hologram converts the spherical wave emitted from the interferometer into four cross lines at the edge of the lens to be measured, as shown in fig. 6, for guiding the adjustment of the spatial position of the lens to be measured.
Roughly adjusting the diffraction area of the distance of the mirror to be measured: the calculation hologram converts the emergent spherical wave of the interferometer into a convergent spherical wave, focuses the convergent spherical wave to the center of the lens to be measured, and is used for guiding the coarse adjustment of the distance between the lens to be measured and the calculation hologram.
Reflection sphere alignment area: the computer generated hologram converts the spherical wave from the interferometer into a convergent spherical wave for guiding the adjustment of the spatial position of the reflecting sphere.
The detection light path adjusting method comprises the following steps:
1. and selecting a standard lens of the polarization phase-shifting interferometer, and requiring the effective area of emergent light to cover the whole calculated holographic caliber. And (3) adjusting the spatial position of the computed hologram by taking the interference fringes of the holographic alignment area at the end of the interferometer computer as a guide until the interference fringes are inclined and defocused to be minimum (4-5 interference fringes, as shown in figure 7). At this time, the interferometer calculates the holographic spatial position determination.
2. And preliminarily adjusting the spatial position of the lens to be measured according to the calculated holographic diffraction cross line and the focus of the convergent spherical wave.
3. And adjusting the spatial position of the reflecting sphere according to the interference fringes of the alignment area of the reflecting sphere at the computer end of the interferometer until the interference fringes are out of focus to the minimum, and determining the position of the reflecting sphere at the moment.
4. And according to the interference fringes of the master holographic region of the interferometer, the spatial attitude of the lens to be measured is accurately adjusted until the fringes of the master holographic region are minimum, and the fringe change in the installation and adjustment process is shown in figure 8. At the moment, the spatial relative positions of all elements of the detection light path are determined, a spatial filter is inserted into the focal position of the interferometer to filter stray diffraction order light rays, and the computer processes the interference fringes of the main holographic region to obtain the shape information of the mirror surface to be detected.
In summary, the present invention provides a combined compensation surface shape detection system and method for an off-axis higher order ellipsoid-like reflector. The detection system comprises a computer, a polarization phase-shifting interferometer, a spatial filter, a computer generated hologram, an off-axis high-order ellipsoid-like reflector to be detected and a high-precision reflector. The polarization phase-shifting interferometer is connected with a computer, a test spherical wave focus emitted by the interferometer is located at the far focus position of the off-axis high-order ellipsoid, test spherical waves are reflected by the off-axis high-order ellipsoid to be tested and the reflecting ball at the near focus position of the mirror to be tested after being subjected to calculation holographic diffraction, are reflected by the mirror to be tested again and subjected to calculation holographic diffraction, and are converged at the focus position of the interferometer, test light enters the interferometer to interfere with the reference wave surface to generate interference fringes, and the computer processes the main holographic fringes to obtain surface shape information of the off-axis high-order ellipsoid to be tested. The invention can realize the non-contact and high-precision measurement of the off-axis high-order ellipsoid surface shape, and the detection light path can more accurately control the curvature radius and the off-axis amount of the mother mirror of the off-axis mirror surface to be detected, and can be used as the effective supplementary contrast of the existing single-block calculation holographic detection technology.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The combined compensation surface shape detection system of the off-axis high-order ellipsoid-like reflector is characterized by comprising a computer, a polarization phase-shifting interferometer, a calculation hologram, a to-be-detected mirror and a reflecting ball; the testing spherical wave is reflected by the to-be-tested mirror and the to-be-tested mirror after being reflected by the reflecting ball at the position of the near focus of the to-be-tested mirror through the to-be-tested mirror and the to-be-tested mirror, is converged to the focus position of the polarization phase-shifting interferometer through reflection of the to-be-tested mirror and calculation of holographic diffraction again, the testing spherical wave enters the polarization phase-shifting interferometer to interfere with the reference wave surface to generate interference fringes, and the computer processes the main holographic fringes to obtain the surface shape information of the to-be-tested off-axis high-order ellipsoidal reflector.
2. The combined compensated surface profile inspection system of claim 1, further comprising a spatial filter at the focus of the polarization phase shifting interferometer for filtering stray diffracted light from the inspection beam path.
3. The combined compensated surface profile inspection system for off-axis higher order ellipsoid-like reflectors of claim 1, wherein said to-be-inspected mirror is an off-axis ellipsoid-like surface containing higher order terms, and the coefficient of the quadratic term-1 < K < 0.
4. The combined compensated surface shape detection system for an off-axis higher order ellipsoid-like mirror of claim 1, wherein the computed hologram comprises a plurality of diffraction zones, including a master hologram zone for detecting the surface shape of the mirror under test, a hologram alignment zone for adjusting the spatial attitude of the computed hologram, a reticle diffraction zone for guiding the adjustment of the spatial position of the mirror under test, a diffraction zone for guiding the coarse adjustment of the distance of the mirror under test, and a reflector alignment zone for guiding the adjustment of the position of the reflector.
5. The combined compensated surface shape detection system for the off-axis higher-order ellipsoid-like reflector as claimed in claim 4, wherein the position of the focal point of the emergent spherical wave of the polarization phase-shifting interferometer and the position of the spherical center of the reflector ball, i.e. the far focal point and the near focal point of the off-axis higher-order ellipsoid-like reflector, are controlled by calculating the diffraction regions with different holographic functions.
6. The combined compensated surface profile detection system for off-axis higher order ellipsoidal-like reflectors according to claim 1, wherein the root mean square surface profile accuracy of the reflective sphere is within 0.01 λ (λ -632.8 nm).
7. The combined compensated surface profile inspection system of off-axis higher order ellipsoid-like mirrors of claim 1, wherein said polarization phase shifting interferometer emits a test spherical wave focus at the far focus of the mirror under inspection, said mirror sphere at the near focus of the mirror under inspection, and wherein the wavefront distortion introduced by the sagittal height deviation of the higher order mirror surface is compensated by a computer generated hologram.
8. The detection method based on the detection system of any one of claims 1 to 7, characterized by comprising the following steps:
step 1: adjusting the polarization phase-shifting interferometer to enable an effective region of emergent light of the polarization phase-shifting interferometer to cover the whole calculated holographic caliber; adjusting the spatial position of the computed holography to the minimum inclination and defocusing of the interference fringes under the guidance of the interference fringes of the holographic alignment area at the computer end of the polarization phase-shifting interferometer; at the moment, the polarization phase-shifting interferometer and the spatial position of the computed hologram are determined;
step 2: preliminarily adjusting the spatial position of the lens to be measured according to the diffraction cross line of the computed hologram and the focus of the convergent spherical wave;
and step 3: adjusting the spatial position of a reflecting sphere according to the interference fringes of the alignment area of the reflecting sphere at the computer end of the polarization phase-shifting interferometer until the interference fringes are out of focus to the minimum, and determining the position of the reflecting sphere;
and 4, step 4: accurately adjusting the space attitude of the lens to be measured according to the interference fringes of the main holographic region of the polarization phase-shifting interferometer until the fringes of the main holographic region are minimum; at the moment, the spatial relative positions of all elements of the detection optical path are determined; and (4) processing the interference fringes of the main holographic region by a computer to obtain the shape information of the mirror surface to be measured.
9. The detection method according to claim 8, wherein in step 4, after the spatial relative positions of all the elements in the detection optical path are determined, a spatial filter is inserted into the polarization phase-shifting interferometer at the focal point to filter out the stray diffraction order secondary light, and then the computer processes the interference fringes of the main holographic region.
10. The detection method according to claim 8, wherein the curvature radius of the primary mirror of the off-axis higher-order ellipsoid to be detected is made to conform to the processing target by controlling the far focus and the near focus positions of the off-axis higher-order ellipsoid to be detected, and the off-axis amount parameter of the off-axis higher-order ellipsoid to be detected is made to conform to the expected processing target by calculating the holographic diffraction cross-line position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110498108.8A CN113175897B (en) | 2021-05-08 | 2021-05-08 | Combined compensation surface shape detection system and method of off-axis high-order ellipsoid-like reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110498108.8A CN113175897B (en) | 2021-05-08 | 2021-05-08 | Combined compensation surface shape detection system and method of off-axis high-order ellipsoid-like reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113175897A true CN113175897A (en) | 2021-07-27 |
| CN113175897B CN113175897B (en) | 2023-03-14 |
Family
ID=76928370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110498108.8A Active CN113175897B (en) | 2021-05-08 | 2021-05-08 | Combined compensation surface shape detection system and method of off-axis high-order ellipsoid-like reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113175897B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820104A (en) * | 2021-09-18 | 2021-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting interference inspection light path of meniscus lens |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5864402A (en) * | 1997-10-23 | 1999-01-26 | Raytheon Company | Holder for holographic testing of aspherical lenses with spherical and flat reflective surfaces |
| US5917459A (en) * | 1996-09-07 | 1999-06-29 | Korea Institute Of Science And Technology | Holographic head up display |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102889856A (en) * | 2012-09-28 | 2013-01-23 | 中国科学院光电技术研究所 | Device and method for positioning center of small hole based on computer generated hologram (CGH) |
| CN103196387A (en) * | 2013-03-15 | 2013-07-10 | 苏州大学 | Detecting system and method of cylindrical surface type |
| CN103335610A (en) * | 2013-07-18 | 2013-10-02 | 中国科学院光电技术研究所 | System for detecting large-aperture and high-order convex aspheric surface |
| CN109739013A (en) * | 2018-12-25 | 2019-05-10 | 中国科学院国家天文台南京天文光学技术研究所 | Off-axis three reflecting optical system of big coke ratio wide visual field with real entrance pupil |
| CN110108228A (en) * | 2019-04-26 | 2019-08-09 | 中国科学院国家天文台南京天文光学技术研究所 | Calculating holography is different with spherical reflector detection to measure aspherical method off axis |
| CN111006851A (en) * | 2019-12-13 | 2020-04-14 | 中国科学院光电技术研究所 | Wavefront detection device and method for edge sub-mirror in splicing mirror |
-
2021
- 2021-05-08 CN CN202110498108.8A patent/CN113175897B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5917459A (en) * | 1996-09-07 | 1999-06-29 | Korea Institute Of Science And Technology | Holographic head up display |
| US5864402A (en) * | 1997-10-23 | 1999-01-26 | Raytheon Company | Holder for holographic testing of aspherical lenses with spherical and flat reflective surfaces |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102889856A (en) * | 2012-09-28 | 2013-01-23 | 中国科学院光电技术研究所 | Device and method for positioning center of small hole based on computer generated hologram (CGH) |
| CN103196387A (en) * | 2013-03-15 | 2013-07-10 | 苏州大学 | Detecting system and method of cylindrical surface type |
| CN103335610A (en) * | 2013-07-18 | 2013-10-02 | 中国科学院光电技术研究所 | System for detecting large-aperture and high-order convex aspheric surface |
| CN109739013A (en) * | 2018-12-25 | 2019-05-10 | 中国科学院国家天文台南京天文光学技术研究所 | Off-axis three reflecting optical system of big coke ratio wide visual field with real entrance pupil |
| CN110108228A (en) * | 2019-04-26 | 2019-08-09 | 中国科学院国家天文台南京天文光学技术研究所 | Calculating holography is different with spherical reflector detection to measure aspherical method off axis |
| CN111006851A (en) * | 2019-12-13 | 2020-04-14 | 中国科学院光电技术研究所 | Wavefront detection device and method for edge sub-mirror in splicing mirror |
Non-Patent Citations (1)
| Title |
|---|
| 李明等: "计算机再现全息与辅助球面混合补偿检测凸非球面方法研究", 《光学学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820104A (en) * | 2021-09-18 | 2021-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting interference inspection light path of meniscus lens |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113175897B (en) | 2023-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8593642B2 (en) | Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device | |
| US8104905B2 (en) | Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface | |
| KR102044575B1 (en) | Measuring system for measuring an imaging quality of an euv lens | |
| Sommargren et al. | 100-picometer interferometry for EUVL | |
| US20220011095A1 (en) | Measurement method for interferometrically determining a surface shape | |
| US20050275849A1 (en) | Method of calibrating an interferometer and method of manufacturing an optical element | |
| CN111912607A (en) | Large-aperture optical system MTF measuring device and method | |
| CN110567393A (en) | Large-curvature-radius free-form surface mirror surface shape interference measurement device and method | |
| US20190271532A1 (en) | Method for measuring a spherical-astigmatic optical surface | |
| CN110108228A (en) | Calculating holography is different with spherical reflector detection to measure aspherical method off axis | |
| CN112461156A (en) | Surface shape precision detection device and detection method for large-caliber convex aspheric optical element | |
| Burge et al. | Measurement of aspheric mirror segments using Fizeau interferometry with CGH correction | |
| CN111929037A (en) | Optical wedge compensator calibration system and calibration method thereof | |
| CN113175897B (en) | Combined compensation surface shape detection system and method of off-axis high-order ellipsoid-like reflector | |
| CN215416129U (en) | Assembly and debugging test system for CGH compensator and off-axis three-lens reflex camera | |
| US7061626B1 (en) | Method of manufacturing an optical element using a hologram | |
| Lowman et al. | Interferometer-induced wavefront errors when testing in a nonnull configuration | |
| WO2009006914A1 (en) | Method of measuring a deviation of an actual shape from a target shape of an optical surface | |
| Dubin et al. | Fizeau interferometer with spherical reference and CGH correction for measuring large convex aspheres | |
| CN113702002B (en) | Off-axis three-lens camera debugging test method and system based on CGH compensator | |
| Malacara et al. | Testing of aspheric wavefronts and surfaces | |
| US20210361159A1 (en) | Systems and methods for measurement of optical wavefronts | |
| CN114252023B (en) | Computer-aided adjusting device and method for aspheric surface calculation holographic detection | |
| Spiga et al. | Profile reconstruction of grazing-incidence X-ray mirrors from intra-focal X-ray full imaging | |
| Burge et al. | Imaging issues for interferometry with CGH null correctors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |