CN111006851A - Wavefront detection device and method for edge sub-mirror in splicing mirror - Google Patents
Wavefront detection device and method for edge sub-mirror in splicing mirror Download PDFInfo
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- CN111006851A CN111006851A CN201911280851.5A CN201911280851A CN111006851A CN 111006851 A CN111006851 A CN 111006851A CN 201911280851 A CN201911280851 A CN 201911280851A CN 111006851 A CN111006851 A CN 111006851A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
Abstract
The invention discloses a wavefront detection device and a method of an edge sub-mirror in a splicing mirror, wherein an interferometer and a laser tracker are combined, the wavefront of the edge sub-mirror in the splicing mirror is detected by compensating aberration through a computer-generated hologram, and the wavefront detection device comprises a high-precision plane reflecting mirror, a lifting frame, a detected edge sub-mirror, an inclination adjusting device, a computer-generated hologram, a small five-dimensional adjusting table, a standard lens, the interferometer, a vibration isolation platform, a five-dimensional adjusting table, a laser tracker and a target ball. The laser tracker is utilized to establish a space coordinate system of the interferometer, the edge sub-mirror to be detected and the plane mirror, the calculation hologram is put in the alignment interferometer, the interferometer and the calculation hologram are taken as a whole, the pitching and the inclination of the whole are finely adjusted to form an auto-collimation light path, and the auto-collimation light path is adjusted until the aberration item in the wavefront detection result of the interferometer is minimum, namely the wavefront detection result of the edge sub-mirror to be detected.
Description
Technical Field
The invention belongs to the field of wavefront detection, and particularly relates to a wavefront detection device and method for an edge sub-mirror in a splicing mirror.
Background
The traditional optical astronomical telescope generally adopts a reflection type optical imaging system, and the problems of tight face tolerance, heavy weight and high cost are faced along with the increase of the aperture, so that the application of the reflection type optical imaging system in astronomical science is severely limited. Compared with a common reflector, the diffraction optical element represented by the phase type Fresnel lens has looser surface tolerance and lower weight and can be used for future ultra-large-caliber optical telescopes. The Fresnel lens aperture for imaging is difficult to reach the meter level, and the large aperture can only pass through the splicing technology. The spliced mirror is formed by splicing a plurality of sub-mirrors with smaller areas, and the sub-mirrors are completely in common phase, so that the resolving power of a larger aperture is realized.
The splicing mirrors adopt a mode of splicing 9 sub mirrors. As shown in fig. 2, the splicing common-phase adjustment method is divided into 1 middle sub-mirror and 8 edge sub-mirrors, each sub-mirror can be adjusted with high precision and six degrees of freedom, and the common-phase detection system measures the adjustment quantity of each sub-mirror to complete the splicing common-phase adjustment of each sub-mirror of the splicing main mirror.
In the conventional optical wavefront inspection method, an interferometer and a high-precision standard plane mirror are generally adopted to form an auto-collimation light path, and the wave aberration of a detected element is detected, namely, the interference auto-collimation method is adopted. However, the 8 sub-mirrors at the edge are off-axis at the spatial position of the splice mirror and cannot be detected coaxially as the middle sub-mirrors. And the edge sub-mirror has aberration, so that the interferometer and the laser tracker are combined to determine the spatial position relationship among the interferometer, the edge sub-mirror and the plane mirror, and the calculation hologram is adopted to compensate the wavefront of the edge sub-mirror in the aberration detection splicing mirror.
Disclosure of Invention
The invention provides a wave front detection device and method of edge sub-mirrors in a splicing mirror, which are used for solving the problem of wave front detection of 8 edge sub-mirrors in 9 sub-mirrors by ensuring that the wave front of each sub-mirror meets the requirement before the 9 sub-mirrors are spliced in a common phase.
The technical scheme adopted by the invention is as follows: the wave front detection device of edge sub-mirror in splicing mirror comprises interferometer, standard lens, laser tracker, high-precision plane reflector, edge sub-mirror to be detected, computer hologram, vibration isolation table, five-dimensional adjusting table, supporting table, translation table, lifting frame and inclination adjusting device. The laser tracker is utilized to establish a space coordinate system of the interferometer, the edge sub-mirror to be detected and the plane mirror, the calculation hologram is put in the alignment interferometer, the interferometer and the calculation hologram are taken as a whole, the pitching and the inclination of the whole are finely adjusted to form an auto-collimation light path, and the auto-collimation light path is adjusted until the aberration item in the wavefront detection result of the interferometer is minimum, namely the wavefront detection result of the edge sub-mirror to be detected.
The light emitted by the interferometer passes through the standard lens, the computer hologram and the edge sub-mirror to be detected, is reflected on the surface of the high-precision plane reflector, and then returns to the interferometer to interfere with the reference light; the focus of the standard lens of the interferometer coincides with the focus of the computer hologram.
After a space coordinate system taking the effective aperture center of the edge sub-mirror to be measured as a space coordinate origin is established, the space coordinate of a certain position can be obtained by placing a target ball of the laser tracker at the certain position, the edge sub-mirror to be measured and the high-precision plane reflector can be adjusted to be parallel by utilizing the space coordinate of the target ball, and the emergent focus of the interferometer can also be placed at the theoretical position of the space coordinate system.
In addition, a wavefront detection method of an edge sub-mirror in a splicing mirror is provided, which comprises the following steps:
the method comprises the following steps: the edge sub-mirror to be measured is arranged in a mechanical adjusting frame according to the space position in the splicing mirror, and the relative position and the included angle between the effective aperture center of the edge sub-mirror to be measured and the mechanical frame are calibrated by using a laser tracker;
step two: a standard plane mirror with the same aperture as the edge sub-mirror is placed behind the edge sub-mirror to be measured and is approximately parallel to the edge sub-mirror, the position of the high-precision plane mirror is calibrated by using a target ball of a laser tracker, an inclination adjusting device of the edge sub-mirror to be measured is adjusted, and the edge sub-mirror to be measured and the high-precision plane mirror are adjusted to be parallel;
step three: establishing a space coordinate system by using the effective aperture center of the edge sub-mirror to be detected, the normal direction of the high-precision plane reflector and the off-axis direction of the edge sub-mirror to be detected, and setting the effective aperture center of the edge sub-mirror to be detected as a space coordinate origin by using the relative position transmission of the effective aperture center of the edge sub-mirror to be detected and a mechanical frame in the step one;
step four: selecting a transmission standard lens, clamping the transmission standard lens on an interferometer, placing the interferometer, and adjusting an emergent focus of the interferometer to a theoretical position of a space coordinate system by using a target ball position of a laser tracker;
step five: installing a calculation hologram at a theoretical position, and adjusting an alignment holographic alignment interferometer of the calculation hologram;
step six: the interferometer and the calculation hologram are taken as a whole, the pitching and the tilting of the interferometer and the calculation hologram are finely adjusted to enable the optical axis of the interferometer and the calculation hologram to be parallel to the optical axis of the edge sub-mirror to be detected, the light rays incident to the edge sub-mirror to be detected are reflected by the high-precision plane reflector and then return along the original path, so that a self-collimating light path is formed, and interference fringes appear on the interferometer;
step seven: continuously adjusting the inclination and the pitching of the interferometer and the whole computer-generated hologram until the aberration item in the wavefront detection result of the interferometer is minimum, namely the wavefront detection result of the edge sub-mirror to be detected;
the alignment hologram of the computer generated hologram is used for aligning the relative position of the computer generated hologram and the interferometer, and the test hologram is used for compensating the wave front of the edge sub-mirror in the aberration detection splicing mirror.
Compared with the prior art, the invention has the advantages that:
(1) in most wave-front detection, the element to be detected is in an on-axis state, and the method adopted by the invention aims at the problem of wave-front detection that the sub-mirror to be detected is in an off-axis state. And establishing a space coordinate system of the interferometer, the measured edge sub-mirror and the plane mirror by means of the laser tracker.
(2) Because the edge sub-mirror of the splicing mirror is special and has aberration, the wavefront of the edge sub-mirror in the splicing mirror is detected by adopting the computed hologram to compensate the aberration.
(3) With the increasing of the aperture of the telescope, the edge splicing mirror can be arranged in two or more circles from one circle in the prior art only by the splicing technology, and the invention is suitable for the wavefront detection of all the arranged edge sub-mirrors.
Drawings
FIG. 1 is a schematic diagram of wavefront sensing of an edge sub-mirror in a stitching mirror;
FIG. 2 is a tiled mirror 9 block sub-mirror layout;
FIG. 3 is a graph of an edge sub-mirror spatial coordinate;
FIG. 4 is a wavefront sensing diagram of an edge sub-mirror;
FIG. 5 shows the result of the transmitted wavefront measurement of the edge sub-mirror.
In the figure: 101 is a high-precision plane reflector, 102 is a lifting frame, 103 is a measured edge sub-mirror, 104 is an inclination adjusting device, 105 is a computer hologram, 106 is a small five-dimensional adjusting table, 107 is a standard lens, 108 is an interferometer, 109 is an isolation platform, 110 is a five-dimensional adjusting table, 111 is a laser tracker, and 112 is a target ball.
Detailed Description
The invention is further described with reference to the following figures and specific examples.
As shown in FIG. 1, the wave front detection device of the edge sub-mirror in the splicing mirror detects the wave front of the edge sub-mirror in the splicing mirror by using a computer-generated hologram to compensate aberration by combining an interferometer and a laser tracker. The device comprises a high-precision plane reflecting mirror 101, a lifting frame 102, a measured edge sub-mirror 103, an inclination adjusting device 104, a computer hologram 105, a small five-dimensional adjusting table 106, a standard lens 107, an interferometer 108, a vibration isolation platform 109, a five-dimensional adjusting table 110, a laser tracker 111 and a target ball 112.
Wherein, the light emitted from the interferometer 108 passes through the standard lens 107, the computer hologram 105 and the edge sub-mirror 103 to be measured, is reflected on the surface of the high-precision plane mirror 101, and then returns to the interferometer 108 to interfere with the reference light; the focus of the standard lens 107 of the interferometer 108 coincides with the focus of the computer hologram 105;
after a space coordinate system taking the effective aperture center of the edge sub-mirror 103 to be measured as a space coordinate origin is established, the space coordinate of a certain position can be obtained by placing the target ball 112 of the laser tracker 111 at the certain position, the edge sub-mirror 103 to be measured can be adjusted to be parallel to the high-precision plane mirror 101 by utilizing the space coordinate of the target ball 112, and the emergent focus of the interferometer 108 can also be placed at the theoretical position of the space coordinate system.
The embodiment is a 1.5m splicing mirror, the focal length is 9955.75mm, the splicing mirror is formed by splicing 1 middle sub-mirror and 8 edge sub-mirrors, the off-axis amount of the edge sub-mirrors is 495mm, and the effective aperture is 352 mm. The following is a plot of the edge sub-mirror wavefront space.
The edge sub-mirror belongs to imperfect imaging, has aberration, cannot be directly detected by an interferometer, so that the wavefront detection is realized by compensating the aberration through a holographic plate, and an optical path diagram is designed as shown in figure 4.
The wavefront detection method for the edge sub-mirror in the splicing mirror in the embodiment is realized by the following steps:
the method comprises the following steps: the measured edge sub-mirror 103 is arranged in a mechanical adjusting frame according to the space position of the spliced mirror in the figure 3, and the relative position and the included angle between the effective aperture center of the measured edge sub-mirror 103 and the mechanical frame are calibrated by using a laser tracker 111;
step two: a standard plane mirror with the aperture equivalent to that of the edge sub-mirror is placed behind the edge sub-mirror to be measured and is approximately parallel to the edge sub-mirror, the position of the high-precision plane mirror 101 is calibrated by using a target ball 112 of a laser tracker 111, an inclination adjusting device of the edge sub-mirror 103 to be measured is adjusted, and the edge sub-mirror 103 to be measured and the high-precision plane mirror 101 are adjusted to be parallel;
step three: establishing a space coordinate system shown in fig. 3 by using the effective aperture center of the edge sub-mirror 103 to be measured, the normal direction of the high-precision plane reflector 101 and the off-axis direction of the edge sub-mirror to be measured, and setting the effective aperture center of the edge sub-mirror 103 to be measured as the original point of space coordinates by using the relative position transmission of the effective aperture center of the edge sub-mirror 103 to be measured and a mechanical frame in the first step;
step four: selecting a transmission standard lens 107, clamping the transmission standard lens on an interferometer 108, placing the interferometer 108, and adjusting an emergent focus of the interferometer 108 to a theoretical position (597mm, 0mm and 9888mm) of a space coordinate system by using a target ball 112 position of a laser tracker 111;
step five: installing a calculation hologram 105 at a position 149.96mm from the focal point of the interferometer 108, and adjusting the alignment hologram of the calculation hologram 105 to be aligned with the interferometer 108;
step six: taking the interferometer 108 and the calculation hologram 105 as a whole, finely adjusting the pitch and the tilt of the interferometer 108 and the calculation hologram 105 to make the optical axis parallel to the optical axis of the edge sub-mirror 103 to be measured, and returning the light incident to the edge sub-mirror 103 to be measured along the original path after being reflected by the high-precision plane mirror 101, so as to form an auto-collimation light path, wherein interference fringes appear on the interferometer 108;
step seven: continuously adjusting the inclination and the pitching of the interferometer 108 and the calculation hologram 105 until the aberration item in the wavefront detection result of the interferometer 108 is minimum, namely the wavefront detection result of the edge sub-mirror 103 to be detected;
the alignment hologram of the computer generated hologram 105 is used for aligning the relative positions of the computer generated hologram 105 and the interferometer 108, and the test hologram is used for compensating the wave front of the edge sub-mirror in the aberration detection splicing mirror.
And (4) constructing an actual detection light path according to the detection light path diagram, and detecting the wave front of the edge sub-mirror by adopting a 4D interferometer.
Detecting the temperature: 24.8 ℃, humidity detection: and 47 percent.
As shown in fig. 5, the edge sub-mirror transmitted wavefront PV is 0.17143 λ and RMS is 0.0306 λ, which meets the imaging requirement.
Claims (5)
1. The utility model provides a wave front detection device of edge sub-mirror in concatenation mirror, uses interferometer and laser tracker in the combination, adopts the wave front that calculates holographic piece compensation aberration detection edge sub-mirror in concatenation mirror, its characterized in that: the device comprises a high-precision plane reflector (101), a lifting frame (102), a measured edge sub-mirror (103), an inclination adjusting device (104), a computer generated hologram (105), a small five-dimensional adjusting platform (106), a standard lens (107), an interferometer (108), an isolation platform (109), a five-dimensional adjusting platform (110), a laser tracker (111) and a target ball (112); the laser tracker is utilized to establish a space coordinate system of the interferometer, the edge sub-mirror to be detected and the plane mirror, the calculation hologram is put in the alignment interferometer, the interferometer and the calculation hologram are taken as a whole, the pitching and the inclination of the whole are finely adjusted to form an auto-collimation light path, and the auto-collimation light path is adjusted until the aberration item in the wavefront detection result of the interferometer is minimum, namely the wavefront detection result of the edge sub-mirror to be detected.
2. The apparatus for detecting the wavefront of an edge sub-mirror of a splicing mirror according to claim 1, wherein: wherein, the light emitted from the interferometer (108) passes through the standard lens (107), the computer hologram (105) and the edge sub-mirror (103) to be measured, is reflected on the surface of the high-precision plane reflector (101), and then returns to the interferometer (108) to interfere with the reference light; the focal point of a standard lens (107) of the interferometer (108) coincides with the focal point of the computer hologram (105).
3. The apparatus for detecting the wavefront of an edge sub-mirror of a splicing mirror according to claim 1, wherein: after a space coordinate system taking the effective aperture center of the edge sub-mirror (103) to be measured as a space coordinate origin is established, the space coordinate of a certain position can be obtained by placing a target ball (112) of a laser tracker (111) at the certain position, the edge sub-mirror (103) to be measured and a high-precision plane reflector (101) can be adjusted to be parallel by utilizing the space coordinate of the target ball (112), and the emergent focus of an interferometer (108) can also be placed at the theoretical position of the space coordinate system.
4. A wavefront measuring method of an edge sub-mirror in a splicing mirror using the wavefront measuring apparatus of an edge sub-mirror in a splicing mirror according to claim 1, characterized in that: the method comprises the following steps:
the first step is as follows: the method comprises the following steps of (1) placing a measured edge sub-mirror (103) into a mechanical adjusting frame according to the spatial position in a splicing mirror, and calibrating the relative position and the included angle between the effective aperture center of the measured edge sub-mirror (103) and the mechanical frame by using a laser tracker;
the second step is that: a standard plane mirror with the aperture equivalent to that of the edge sub-mirror is placed behind the edge sub-mirror (103) to be measured and is approximately parallel to the edge sub-mirror, the position of the high-precision plane reflecting mirror (101) is calibrated by using a target ball (112) of a laser tracker (111), an inclination adjusting device (104) of the edge sub-mirror (103) to be measured is adjusted, and the edge sub-mirror (103) to be measured and the high-precision plane reflecting mirror (101) are adjusted to be parallel;
the third step: establishing a space coordinate system by using the effective aperture center of the edge sub-mirror (103) to be detected, the normal direction of the high-precision plane reflector (101) and the off-axis direction of the edge sub-mirror to be detected, and setting the effective aperture center of the edge sub-mirror (103) to be detected as a space coordinate origin by using the relative position transmission of the effective aperture center of the edge sub-mirror (103) to be detected and a mechanical frame in the step one;
the fourth step: selecting a transmission standard lens (107), clamping the transmission standard lens to an interferometer (108), placing the interferometer (108), and adjusting an emergent focus of the interferometer (108) to a theoretical position of a space coordinate system by using the position of a target ball (112) of a laser tracker (111);
the fifth step: installing a calculation hologram (105) at the theoretical position, and adjusting an alignment holographic alignment interferometer (108) of the calculation hologram (105);
and a sixth step: the interferometer (108) and the calculation hologram (105) are taken as a whole, the pitching and the tilting of the whole of the interferometer (108) and the calculation hologram (105) are finely adjusted to enable the optical axis of the whole to be parallel to the optical axis of the edge sub-mirror (103) to be detected, the light rays incident to the edge sub-mirror (103) to be detected are reflected by the high-precision plane reflecting mirror (101) and then return along the original path, namely, a self-collimating light path is formed, and interference fringes appear on the interferometer (108);
the seventh step: and continuously adjusting the inclination and the pitching of the interferometer (108) and the calculation hologram (105) until the aberration item in the wave-front detection result of the interferometer (108) is minimum, namely the wave-front detection result of the edge sub-mirror (103) to be detected.
5. The method for detecting the wavefront of an edge sub-mirror in a splicing mirror according to claim 4, wherein: the alignment hologram of the computer-generated hologram (105) is used for aligning the relative positions of the computer-generated hologram (105) and the interferometer (108), and the test hologram is used for compensating the wave front of the edge sub-mirror in the aberration detection splicing mirror.
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| WO2023284149A1 (en) * | 2021-07-16 | 2023-01-19 | 中国科学院长春光学精密机械与物理研究所 | Performance test system for high-precision six-degree-of-freedom optical assembly |
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