CN109253707B - Hundred-micrometer range transmission type interference testing device - Google Patents
Hundred-micrometer range transmission type interference testing device Download PDFInfo
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- CN109253707B CN109253707B CN201811220980.0A CN201811220980A CN109253707B CN 109253707 B CN109253707 B CN 109253707B CN 201811220980 A CN201811220980 A CN 201811220980A CN 109253707 B CN109253707 B CN 109253707B
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- 238000012360 testing method Methods 0.000 title claims abstract description 98
- 230000005540 biological transmission Effects 0.000 title claims abstract description 17
- 238000003384 imaging method Methods 0.000 claims abstract description 60
- 230000003287 optical effect Effects 0.000 claims abstract description 40
- 230000010287 polarization Effects 0.000 claims description 28
- 239000005337 ground glass Substances 0.000 claims description 16
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
A hundred-micrometer range transmission type interference testing device is composed of a 632.8nm laser light source module, a collimation testing module, an alignment testing module, a small-range interference imaging module and a large-range interference imaging module, can test the accuracy of the surface shape of the reflection and transmission wave fronts of a planar optical element, can test the maximum caliber of the planar optical element to be phi 200mm, and can also be used for testing the physical characteristics of an optical system, the optical parameters of a comprehensive system and the like. The PV value of the test precision of the invention is better than lambda/10, the RMS value is better than lambda/50, and the system repeatability is better than lambda/500; the accuracy of the detection surface shape is in the range of 0-100 mu m. The invention has wide detection precision range, low cost and small space occupation volume, and is suitable for large-area high-precision alignment test of optical elements.
Description
Technical Field
The invention relates to a planar optical element, in particular to a hundred-micrometer range transmission type interference testing device.
Background
The optical test is continuously expanded along with the expansion of the application range of the optical element, and common non-contact surface shape precision detection modes include a knife-edge shadow method, an interferometry method and a Hartmann test method. The interference test imaging analysis technology is a main method for testing the surface shape precision of the optical element in the later grinding molding stage, and the initial Thoman-Green interferometer is developed to a Fizeau interferometer which is used in a mature mode, so that the precision detection of the surface shape of the reflected wave front and the transmitted wave front of the corresponding large-caliber optical element is met to a certain extent.
The current interference test has higher requirements on the external environment, in the large-caliber optical element test, the beam shrinkage ratio is large, and the distance between two ends of an interference cavity formed by a standard wedge mirror and a standard reflector is long, so that weak air disturbance, temperature change and external vibration disturbance can have very serious influence on the surface shape detection precision. In view of the above, the combination of the shack-Hartmann test technology has the characteristic of effectively eliminating the vibration of the test device, can realize the high-precision reflection and transmission wavefront surface shape test of the optical element with the maximum caliber phi of 200mm, and finally designs and constructs the Fizeau hundred-micrometer range transmission type interference test device based on the 0-100 mu m wide-range precision test.
Disclosure of Invention
The invention aims to provide a hundred-micrometer range transmission type interference testing device which is used for testing the surface shape precision of reflected and transmitted wave fronts of a planar optical element, can test that the maximum caliber of the planar optical element is phi 200mm, and can also be used for testing the physical characteristics of an optical system, the optical parameters of a comprehensive system and the like. The PV value of the test precision is better than lambda/10, the RMS value is better than lambda/50, and the system repeatability is better than lambda/500; the invention has the advantages of wide precision range, low cost and small space occupation volume, and is suitable for large-area high-precision alignment test of optical elements.
The technical scheme of the invention is as follows:
the device is characterized by comprising a 632.8nm laser light source module, a collimation test module, an alignment test module, a small-range interference imaging module and a large-range interference imaging module, wherein the device comprises a 632.8nm laser, a focusing objective lens, a polarization beam splitting prism, a first quarter wave plate, a first 45-degree beam splitting reflector, a collimation objective lens, a standard plane wedge lens and a standard reflector in sequence along the laser output direction of the 632.8nm laser, and the standard plane wedge lens, the collimation objective lens and the first 45-degree beam splitting reflector in sequence along the return direction of the standard reflector divide the return light into reflected return light and transmitted return light;
sequentially forming a ground glass sheet, an alignment imaging lens group and a CMOS imaging target surface in the transmitted return light direction;
the reflected return light direction is sequentially the first quarter wave plate and the polarization beam splitter prism, the reflected light direction of the polarization beam splitter prism is sequentially the diaphragm, the second quarter wave plate and the non-polarization beam splitter prism, the non-polarization beam splitter prism divides incident light into reflected light and transmitted light, and the transmitted light direction is sequentially the first convex lens, the second convex lens and the first imaging CCD target surface;
the reflected light direction is sequentially provided with a second 45-degree reflecting mirror, a first concave mirror, a third convex lens, a micro lens array and a second imaging CCD target surface;
the first 45-degree light splitting reflector and the light path have an included angle of 45 degrees, the numerical aperture of the collimating objective lens is equal to the numerical aperture of the focusing objective lens, the numerical aperture of the collimating objective lens and the numerical aperture of the collimating objective lens coincide with the focusing focus of the parallel light output by the laser light source, the first surface of the standard wedge lens in the advancing direction of the light beam is a wedge angle surface, the second surface is a standard reference plane, the standard reference plane is perpendicular to the optical axis of the collimating objective lens, the first surface of the standard reflector in the advancing direction of the light beam is a standard reflection reference plane, the standard reference plane and the standard reflection reference plane form a standard interference test cavity, and an optical element to be tested is arranged in the standard interference test cavity to realize interference test;
the first concave mirror and the third convex lens form a double telecentric lens group;
the first convex lens and the second convex lens form a double telecentric lens group;
the ground glass sheet is positioned on the focal plane of the collimating objective lens, and the alignment imaging lens group and the alignment imaging CMOS image the Mao Bopian in a full field of view.
The aperture of the collimation objective lens, the standard wedge lens and the standard reflector is phi 200mm.
The wedge angle of the standard wedge mirror is 6 minutes.
The pixels used by the second imaging CCD are 1024 pixels multiplied by 1024 pixels;
the pixels used by the first imaging CCD are 1024 pixels multiplied by 1024 pixels;
the invention has the technical effects that:
the hundred-micrometer range transmission type interference testing device provides a common light path collimation output test, a common light path alignment test and a large-range and small-range test imaging system, can test the surface shape precision of the reflected wave front and the transmitted wave front of a plane optical element, has the maximum caliber of phi 200mm, and can also be used for testing the physical characteristics of an optical system, the optical parameters of a comprehensive system and the like. The PV value of the test precision is better than lambda/10, the RMS value is better than lambda/50, and the system repeatability is better than lambda/500; the accuracy of the detection surface shape is in the range of 0-100 mu m. The invention has the characteristics of wide precision range, low cost and small space occupation volume, and is suitable for large-area high-precision alignment test of optical elements.
Drawings
FIG. 1 is a schematic view of an optical path of a hundred-micrometer range transmission type interference testing device according to the present invention
Detailed Description
The present invention will be described in detail below with reference to the attached drawings, but should not be construed as limiting the scope of the invention.
Fig. 1 is a light path diagram of a hundred-micrometer range transmission type interference testing device, which is known from the drawing, the hundred-micrometer range transmission type interference testing device is composed of a 632.8nm laser light source module, a collimation testing module, an alignment testing module, a small-range interference imaging module and a large-range interference imaging module, and comprises a 632.8nm laser 1, a focusing objective lens 2, a polarization beam splitter prism 3, a first quarter wave plate 4, a first 45 DEG beam splitter mirror 5, a collimation objective lens 6, a standard plane wedge mirror 7 and a standard mirror 8 in sequence along the direction of return light of the standard mirror 8, wherein the return light of the first 45 DEG beam splitter mirror 5 is divided into reflected return light and transmitted return light by the standard plane wedge mirror 7, the collimation objective lens 6 and the first 45 DEG beam splitter mirror 5;
the transmitted return light direction is sequentially a ground glass sheet 9, an alignment imaging lens group 10 and a CMOS imaging target surface 11;
the reflected return light direction is the first quarter wave plate 4 and the polarization beam splitter prism 3 in sequence, the reflected light direction of the polarization beam splitter prism 3 is the diaphragm 12, the second quarter wave plate 13 and the non-polarization beam splitter prism 14 in sequence, the non-polarization beam splitter prism 14 divides incident light into reflected light and transmitted light, and the transmitted light direction is the first convex lens 15, the second convex lens 16 and the first imaging CCD target surface 17 in sequence;
the reflected light direction is sequentially provided with a second 45-degree reflecting mirror 18, a first concave mirror 19, a third convex lens 20, a micro lens array 21 and a second imaging CCD target surface 22;
the included angle between the first 45-degree light splitting reflector 5 and the light path is 45 degrees, the numerical aperture of the collimating objective lens 6 is equal to the numerical aperture of the focusing objective lens 2, the numerical aperture of the collimating objective lens and the focusing objective lens coincide with each other on a parallel light focusing focus output by a laser light source, a first surface of the standard wedge lens 7 in the light beam advancing direction is a wedge angle surface, a second surface is a standard reference plane, the standard reference plane is perpendicular to the optical axis of the collimating objective lens 6, a first surface of the standard reflector 8 in the light beam advancing direction is a standard reflection reference surface and is perpendicular to the optical axis of the collimating objective lens 6, the standard reference plane and the standard reflection reference surface form a standard interference test cavity, and an optical element to be tested is arranged in the standard interference test cavity to realize interference test;
the first concave mirror 19 and the third convex lens 20 form a double telecentric lens group;
the first convex lens 15 and the second convex lens 16 form a double telecentric lens group;
the ground glass sheet 9 is positioned on the focal plane of the collimating objective lens 6, and the alignment imaging lens group 10 and the alignment imaging CMOS11 form full-field imaging for the ground glass sheet 9.
The aperture of the collimation objective 6, the standard wedge lens 7 and the standard reflector 8 is phi 200mm.
The wedge angle of the standard wedge mirror 7 is 6 minutes.
The device comprises five parts of a 632.8nm laser light source module, a collimation test module, an alignment test module, a small-range interference imaging module and a large-range interference imaging module:
the 632.8nm laser 1 and the focusing objective lens 2 form a laser light source module;
the collimation test module sequentially comprises a first 45-degree light splitting reflector 5, a collimation objective lens 6, a standard wedge lens 7 and a standard reflector 8 along the beam advancing direction, wherein the included angle between the first 45-degree light splitting reflector 5 and a light path is 45 degrees, the numerical aperture of the collimation objective lens 6 is equal to the numerical aperture of the focusing objective lens 2, the numerical aperture of the first 45-degree light splitting reflector and the numerical aperture of the second 45-degree light splitting reflector are coincident with the focusing focus of parallel light output by a laser light source, the first surface of the phi 200-mm caliber standard wedge lens 7 along the beam advancing direction is a wedge angle surface, the second surface is a standard reference plane, the standard reference plane is perpendicular to the optical axis of the phi 200-mm collimation objective lens 6, and the first surface of the standard reflector 8 along the beam advancing direction is a standard reflection reference surface and is perpendicular to the optical axis of the phi 200-mm collimation objective lens 6;
the wide-range test imaging module comprises a first quarter wave plate 4, a second quarter wave plate 13, a diaphragm 12, a polarization beam splitter prism 3, a non-polarization beam splitter prism 14, a second 45-degree reflecting mirror 18, a first concave mirror 19, a third convex lens 20, a micro lens array 21 and a second imaging CCD target surface 22, wherein the pixels used by the second imaging CCD22 are 1024 pixels multiplied by 1024 pixels, and the first concave mirror 19 and the third convex lens 20 form a double telecentric lens;
the small-range test imaging module comprises a first 45-degree light splitting reflector 5, a first quarter wave plate 4, a second quarter wave plate 13, a polarization light splitting prism 3, a diaphragm 12, a non-polarization light splitting prism 14, a first convex lens 15, a second convex lens 16 and a first imaging CCD target surface 17, wherein the pixels used by the first imaging CCD17 are 1024 pixels x 1024 pixels, and the first convex lens 15 and the second convex lens 16 form a double telecentric lens group;
the test alignment module comprises a ground glass sheet 9, an alignment imaging lens group 10 and a CMOS imaging target surface 11, wherein test light beams are sequentially the ground glass sheet 9, the alignment imaging lens group 10 and the alignment imaging CMOS11 after being transmitted by a first 45-degree light splitting reflector 5, the ground glass sheet 9 is positioned on the focal plane of the phi 200mm aperture collimating objective lens 6, and the alignment imaging lens group 10 and the alignment imaging CMOS11 image the ground glass sheet 9 in a full view field;
the wide-range test precision is 0-100 mu m.
In fig. 1, the first 45-degree beam splitting reflector 5, the collimating objective lens 6, the standard wedge lens 7 and the standard reflector 8 are made of K9 materials, the outer diameter of the element is phi 210mm, and the effective clear aperture phi 200mm. The first surface of the standard wedge mirror 7 is plated with an antireflection film of 632.8nm along the beam advancing direction, the transmittance is more than 99.88%, the first surface of the standard wedge mirror 7 is a wedge angle surface, the wedge angle is 6 minutes, the second surface is a standard reference plane, and the surface shape precision PV value of the standard reference plane vertical to the optical axis surface where the collimating objective lens 6 is positioned is 30nm. The numerical aperture of the collimating objective lens 6 is set to be equal to the numerical aperture of the focusing objective lens 2, and the focus of the collimating objective lens 6 is coincident with the focusing focus of the focusing objective lens 2 for the output light source of the laser light source 1. Through the arrangement, the standard reference plane of the standard wedge mirror 7 and the reflecting reference plane of the standard reflector 8 form a standard interference test cavity, and the standard reference beam and the test beam formed by reflecting the standard reference beam and the test beam by reflecting the standard plane reflector 8 are reflected by the second surface wedge angle surface of the standard wedge mirror 7 and return along the original light path, so that an auto-collimation output test is achieved. Wherein, the surface shape accuracy PV value of the reflection reference surface of the standard plane mirror 8 is 50nm.
The laser source 1 outputs light beams with the wavelength of 632.8nm, the divergence angle is 0.5mrad, standard spherical waves with a certain numerical aperture are formed by focusing through the focusing objective lens 2, the output standard spherical waves pass through the polarization beam splitter prism 3 and the first quarter wave plate 4 to the collimation test system part, the P of the polarization beam splitter prism 3 is S=1:1, the P light transmittance T is 100%, and the reflectivity R is 0%; the S-ray transmittance T was 0% and the reflectance R was 100%. The light beam passes through a first 45-degree beam splitting reflector 5, a collimating objective lens 6, a plane standard wedge mirror 7 and a standard reference reflector 8, a standard interference test cavity is formed by a standard reference plane of the rear surface of the plane standard wedge mirror 7 and a standard reflecting surface of the front surface of the standard reference reflector 8, and a standard reference reflected light beam and a test light beam are respectively formed by the standard reference plane and the standard reflecting surface or the front surface of a sample to be tested. The interference test light beam returns along the original light path, and is transmitted to a small-range test port through the collimating objective lens 6, the first 45-degree light splitting reflector 5, the first quarter wave plate 4, the polarization light splitting prism 3, the diaphragm 12, the second quarter wave plate 13 and the non-polarization light splitting prism 14. The unpolarized beam splitting prism 14 does not have any polarization characteristic, the splitting ratio of P light and S light is 1:1, the first double telecentric lens groups 15 and 16 are composed of two lenses with different sizes, after an interference image enters the small-range test module, the interference image is imaged on the first imaging CCD target surface 17 through the first double telecentric lens groups 15 and 16 for the first time along the light advancing direction, and imaging pixels of the first imaging CCD17 are 1024 pixels x 1024 pixels, so that the small-range high-precision test is realized. The first 45-degree light splitting reflector 5 is coated with a 632.8nm high-reflection film on the reflecting surface in the light beam advancing direction, the reflectivity is 99.99%, the rear surface is coated with a 632.8nm anti-reflection film, and the transmissivity is 99.5%.
The wide-range testing module comprises a polarization beam splitter prism 3, a first quarter wave plate 4, a second quarter wave plate 13, a diaphragm 12, a non-polarization beam splitter prism 14, a second 45 DEG reflecting mirror 18, a second double telecentric lens group (a third convex lens 19 and a first concave lens 20), a micro lens array 21 and a second imaging CCD22, and standard reference beams and test beams are respectively formed by reflection of a standard reference plane and a standard reflection reference plane or the front surface of a sample to be tested, and are mutually overlapped to form an interference testing beam. The interference test light beam returns along the original light path, is reflected to a wide-range test port through the collimating objective lens 6, the first 45-degree light splitting reflector 5, the first quarter wave plate 4, the polarization light splitting prism 3, the diaphragm 12, the second quarter wave plate 13 and the non-polarization light splitting prism 14, and sequentially passes through the second 45-degree reflector 18, the second double telecentric lens group (the third convex lens 19 and the first concave lens 20), the micro lens array 21 and the second imaging CCD assembly 22 along the advancing direction, and finally presents an array facula interference image on the second imaging CCD22, so that wide-range high-precision test is realized, the micro lens array 21 has the number of 50×50, and the pixels of the second imaging CCD22 are 1024 pixels×1024 pixels. Wherein the third convex lens 19 and the first concave lens 20 constitute a second double telecentric lens group.
When the standard reference beam returns to the first 45 DEG light splitting reflector 5 along the original light path, 50% of the light enters the test alignment module through the light splitting reflector, the light beam reaches the ground glass sheet 9 placed on the focal plane of the collimating lens 6 after passing through the first 45 DEG light splitting reflector 5, and focuses the corresponding focal points of the surfaces on the ground glass sheet 9. In the beam advancing direction, which is the alignment imaging lens group 10 and the alignment imaging CMOS11 in order, the ground glass 9 is imaged in full field, so that the focus point of all test end planes within the alignment angle range can be observed from the alignment imaging CMOS11 output image. The angle of the standard wedge mirror 7 is adjusted to enable the focusing point of the reflecting light beam of the reference surface to be positioned in the middle of the view field of the ground glass sheet 9, and the angle of the standard reference mirror 8 or the element to be tested at the test end is adjusted to enable the reflecting focusing point of the test surface to coincide with the reflecting focusing point of the reference surface, so that the test alignment adjustment is finally realized. The test alignment module is here constituted by a frosted glass plate 9, an alignment imaging lens group 10 and an alignment imaging CMOS11, the pixels of the alignment imaging CMOS11 being 1024 pixels by 1024 pixels.
When using wide-range or small-range test imaging, the above-described alignment adjustment is used to achieve interferometric test image output and test alignment adjustment of the test port. The invention can realize the data test of reflection and transmission wave front surface shape and light material refractive index uniformity, etc. of the optical element surface shape precision to be measured in the range of 0-100 μm, and can also realize the parameter interference test analysis of the maximum caliber phi 200mm plane optical element and the corresponding optical system, etc.
Experiments show that the device can test the surface shape precision of the reflected wave front and the transmitted wave front of the plane optical element with the maximum caliber phi of 200mm, and can also be used for testing the physical characteristics of an optical system, the optical parameters of a comprehensive system and the like. The PV value of the small-range test precision is better than lambda/10, the RMS value is better than lambda/50, and the system repeatability is better than lambda/500; the PV value of the wide-range test precision is better than lambda/10, the RMS value is better than lambda/50, and the system repeatability is better than lambda/500. The invention has the advantages of wide precision range, low cost and small space occupation volume, and is suitable for large-area high-precision alignment test of optical elements.
Claims (3)
1. The hundred-micrometer range transmission type interference testing device is characterized by comprising a 632.8nm laser light source module, a collimation testing module, an alignment testing module, a small-range interference imaging module and a large-range interference imaging module, wherein the device comprises a 632.8nm laser (1), a focusing objective lens (2), a polarization beam splitter prism (3), a first quarter wave plate (4), a first 45-degree beam splitter mirror (5), a collimation objective lens (6), a standard plane wedge mirror (7) and a standard mirror (8) in sequence along the laser output direction of the 632.8nm laser (1), and the standard plane wedge mirror (7), the collimation objective lens (6) and the first 45-degree beam splitter mirror (5) in sequence along the return light direction of the standard mirror (8), wherein the first 45-degree beam splitter mirror (5) divides the return light into reflected return light and transmitted return light;
the transmitted return light direction is sequentially a ground glass sheet (9), an alignment imaging lens group (10) and a CMOS imaging target surface (11),
the reflected return light direction is sequentially the first quarter wave plate (4) and the polarization beam splitter prism (3), the reflected light direction of the polarization beam splitter prism (3) is sequentially the diaphragm (12), the second quarter wave plate (13) and the non-polarization beam splitter prism (14), the non-polarization beam splitter prism (14) divides incident light into reflected light and transmitted light, and the transmitted light direction is sequentially the first convex lens (15), the second convex lens (16) and the first imaging CCD target surface (17);
the reflected light direction is sequentially provided with a second 45-degree reflecting mirror (18), a first concave mirror (19), a third convex lens (20), a micro lens array (21) and a second imaging CCD target surface (22);
the first 45-degree light splitting reflector (5) and the light path form an included angle of 45 degrees, the numerical aperture of the collimating objective (6) is equal to the numerical aperture of the focusing objective (2), the numerical aperture of the collimating objective and the numerical aperture of the focusing objective are coincident with each other on a parallel light focusing focus output by a laser light source, the first surface of the standard plane wedge mirror (7) in the light beam advancing direction is a wedge angle surface, the second surface of the standard plane wedge mirror is a standard reference plane, the standard reference plane is perpendicular to the optical axis of the collimating objective (6), the first surface of the standard reflector (8) in the light beam advancing direction is a standard reflection reference surface, the standard reference plane is perpendicular to the optical axis of the collimating objective (6), the standard reference plane and the standard reflection reference surface form a standard interference test cavity, and an optical element to be tested is arranged in the standard interference test cavity to realize interference test;
the first concave mirror (19) and the third convex lens (20) form a double telecentric lens group;
the first convex lens (15) and the second convex lens (16) form a double telecentric lens group;
the ground glass sheet (9) is positioned on the focal plane of the collimating objective lens (6), and the alignment imaging lens group (10) and the alignment imaging CMOS (11) image the ground glass sheet (9) in a full view field;
the pixels used by the second imaging CCD are 1024 pixels×1024 pixels.
2. The hundred-micrometer range transmission type interference testing device according to claim 1, wherein the light transmission apertures of the collimating objective lens (6), the standard plane wedge mirror (7) and the standard reflecting mirror (8) are phi 200mm.
3. The one hundred micrometer range transmission type interference testing device according to claim 1 or 2, wherein the wedge angle of the standard plane wedge mirror (7) is 6 minutes.
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| CN110455420B (en) * | 2019-07-11 | 2021-12-07 | 长春理工大学 | Wavefront measuring device |
| CN110686618B (en) * | 2019-11-22 | 2020-09-15 | 北京理工大学 | Aspheric parameter error interferometry method and system combining total reflection angle positioning |
| CN114295327A (en) * | 2021-12-02 | 2022-04-08 | 天津大学 | Optical system transmission wavefront measurement method and device based on telecentric imaging system |
| CN116045835B (en) * | 2023-03-31 | 2023-06-02 | 成都太科光电技术有限责任公司 | Ultra-large caliber plane or spherical surface optical interference testing device |
| CN116718356B (en) * | 2023-08-09 | 2023-11-14 | 浙江荷湖科技有限公司 | Testing method and device of finite far conjugate imaging system |
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