CN109253707A - Hundred microns of range transmission-type interference testing devices - Google Patents
Hundred microns of range transmission-type interference testing devices Download PDFInfo
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- CN109253707A CN109253707A CN201811220980.0A CN201811220980A CN109253707A CN 109253707 A CN109253707 A CN 109253707A CN 201811220980 A CN201811220980 A CN 201811220980A CN 109253707 A CN109253707 A CN 109253707A
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- 238000012360 testing method Methods 0.000 title claims abstract description 92
- 238000003384 imaging method Methods 0.000 claims abstract description 56
- 230000003287 optical effect Effects 0.000 claims abstract description 45
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 230000010287 polarization Effects 0.000 claims description 17
- 239000005338 frosted glass Substances 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000013019 agitation Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
A kind of hundred microns of range transmission-type interference testing devices, it is made of 632.8nm laser light source module, collimation testing module, alignment test module, small-range interference imaging module and five part of wide range interference imaging module, can test plane optical element reflection and transmission wavefront surface figure accuracy, can test plane optical element maximum caliber be Φ 200mm, it can also be used to test physical characteristic and integrated system optical parameter of optical system etc..The PV value of measuring accuracy of the present invention is better than λ/10, and RMS value is better than λ/50, and system repeatability is better than λ/500；Detection faces shape accuracy rating of the present invention is at 0~100 μm.Detection accuracy range of the present invention is wide, at low cost, space hold is small in size, and the large area high-precision suitable for optical element is directed at test.
Description
Technical field
The present invention relates to planar optical elements, especially a kind of hundred microns of range transmission-type interference testing devices.
Background technique
Optic test is constantly extended with the expansion of optical element application range, common non-contact detection face shape essence
The mode of degree has Knife-edge Shadow method, interferometry and Hartmann test.Wherein, interference testing imaging analysis techniques have become light
Learn element grinding molding later period surface figure accuracy test main method, by initial Twyman Green Interferometer develop to increasingly at
The Feisuo type interferometer of ripe utilization meets shape before corresponding optical elements of large caliber reflection and transmitted wave to a certain extent
Accuracy detection.
Interference testing is higher to extraneous environmental requirement at present, and in optical elements of large caliber test, light beam shrink beam ratio is very big,
And the interference cavity both ends distance being made of standard wedge mirror and standard reflection mirror is longer, faint air agitation, the height change of temperature
Change and opposite shape detection accuracy is all generated influence very serious by extraneous vibration interference.In view of the foregoing, in conjunction with Shack-
Hartmann test technology effectively eliminates the characteristic of test device self vibration, it can be achieved that maximum caliber Φ 200mm optics member
Shape test before the reflection of part high-precision and transmitted wave, final design are simultaneously constructed based on 0~100 μm of machine with wide range accuracy test
Hundred microns of range transmission-type interference testing devices of Feisuo type.
Summary of the invention
The purpose of the present invention is to propose to a kind of hundred microns of range transmission-type interference testing devices, the device to test planar waves
The reflection of element and transmission wavefront surface figure accuracy, can test plane optical element maximum caliber be Φ 200mm, it can also be used to survey
Try physical characteristic and the integrated system optical parameter etc. of optical system.Measuring accuracy PV value be better than λ/10, RMS value better than λ/
50, system repeatability is better than λ/500；Detection faces shape accuracy rating of the present invention at 0~100 μm, the present invention have accuracy rating it is wide,
Feature at low cost, space hold is small in size, the large area high-precision suitable for optical element are directed at test.
Technical solution of the invention is as follows:
A kind of hundred microns of range transmission-type interference testing devices of Feisuo type, it is characterized in that by 632.8nm laser light source mould
Block, collimation testing module, alignment test module, small-range interference imaging module and wide range interference imaging module composition, including
632.8nm laser, the laser outbound course along 632.8nm laser are successively focusing objective len, polarization splitting prism, the one or four
/ mono- wave plate, the one 45 ° of dichroic reflector, collimator objective, standard flat wedge mirror and standard reflection mirror, it is anti-along the standard
The direction for penetrating mirror return light is successively the standard flat wedge mirror, collimator objective, the one 45 ° of dichroic reflector, the one 45 °
The return light is divided into the return light of reflection and the return light of transmission by dichroic reflector；
It is successively frosted glass plate, alignment imaging microscope group and cmos imaging target surface in the return light direction of the transmission；
It is successively first quarter-wave plate, polarization splitting prism in the return light direction of the reflection,
The reflection light direction of the polarization splitting prism is successively diaphragm, the second quarter-wave plate, unpolarized Amici prism, this is unpolarized
Incident light is divided into reflected light and transmitted light by Amici prism, the transmission light direction be successively the first convex lens, it is second convex
Lens and the first imaging CCD target surface；
It is successively the 2nd 45 ° of reflecting mirror, the first concave mirror, third convex lens, lenticule battle array in the reflection light direction
Column and the second imaging CCD target surface；
The one 45 ° of dichroic reflector and optical path angle are 45 °, the numerical aperture of the collimator objective with it is described
Focusing objective len numerical aperture it is equal, and the two coincides to the parallel light focusing focus that laser light source exports, the mark
Quasi- wedge mirror is angle of wedge face in the first face of light beam direction of advance, and the second face is canonical reference plane, and canonical reference plane is vertical
In the optical axis of the collimator objective, the standard reflection mirror is the standard reflection plane of reference along the first face of light beam direction of advance,
And standard interference test is formed perpendicular to the optical axis of the collimator objective, the canonical reference plane and the standard reflection plane of reference
Chamber, optical element to be measured are placed in the standard interference test chamber, realize interference testing；
First concave mirror and third convex lens group the telecentricity microscope group in pairs；
First convex lens and the second convex lens shape the telecentricity microscope group in pairs；
The frosted glass plate is located on the focal plane of the collimator objective, and the alignment is imaged microscope group and is aligned to
As CMOS to the hair slide at whole-view field imaging.
The clear aperture of the collimator objective, standard wedge mirror and standard reflection mirror is Φ 200mm.
The angle of wedge of the standard wedge mirror is 6 points.
The pixel that the second imaging CCD is used is 1024pixel × 1024pixel；
The pixel that the first imaging CCD is used is 1024pixel × 1024pixel；
Technical effect of the invention:
Hundred microns of range transmission-type interference testing devices of the present invention provide total beam path alignment output test, altogether optical path alignment survey
Examination and wide range and small-range test imaging system, the device can test plane optical element reflection and transmitted wave before shape
Precision, the maximum caliber of test plane optical element are Φ 200mm, it can also be used to test the physical characteristic of optical system and comprehensive
Collaboration system optical parameter etc..Measuring accuracy PV value is better than λ/10, and RMS value is better than λ/50, and system repeatability is better than λ/500；This hair
Bright detection faces shape accuracy rating is at 0~100 μm.The spy that the present invention has accuracy rating wide, at low cost, space hold is small in size
Point, the large area high-precision suitable for optical element are directed at test.
Detailed description of the invention
Fig. 1 is the light path schematic diagram of hundred microns of range transmission-type interference testing devices of the invention
Specific embodiment
It elaborates, but should not be limited the scope of the invention with this to the present invention below in conjunction with attached drawing.
Fig. 1 is the index path of hundred microns of range transmission-type interference testing devices of the invention, as seen from the figure, hundred microns of the present invention
Range transmission-type interference testing device, by 632.8nm laser light source module, collimation testing module, alignment test module, small-range
Interference imaging module and wide range interference imaging module composition, including 632.8nm laser 1, along swashing for 632.8nm laser 1
Light output direction be successively focusing objective len 2, polarization splitting prism 3,4, the 1st ° of dichroic reflectors 5 of the first quarter-wave plate,
Collimator objective 6, standard flat wedge mirror 7 and standard reflection mirror 8, the direction along 8 return light of standard reflection mirror are successively described
6, the 1st ° of standard flat wedge mirror 7, collimator objective dichroic reflectors 5, the one 45 ° of dichroic reflector 5 is by the return light
It is divided into the return light of reflection and the return light of transmission；
It is successively frosted glass plate 9, alignment imaging microscope group 10 and cmos imaging target surface in the return light direction of the transmission
11；
It is successively first quarter-wave plate 4, polarization splitting prism 3 in the return light direction of the reflection,
It is successively diaphragm 12, the second quarter-wave plate 13, unpolarized Amici prism in the reflection light direction of the polarization splitting prism 3
14, which is divided into reflected light and transmitted light for incident light, is successively first in the transmission light direction
Convex lens 15, the second convex lens 16 and the first imaging CCD target surface 17；
The reflection light direction be successively the 2nd 45 ° of reflecting mirror 18, it is the first concave mirror 19, third convex lens 20, micro-
Lens array 21 and the second imaging CCD target surface 22；
The one 45 ° of dichroic reflector 5 and optical path angle is 45 °, the numerical aperture of the collimator objective 6 and institute
The numerical aperture for the focusing objective len 2 stated is equal, and the two coincides to the parallel light focusing focus that laser light source exports, described
Standard wedge mirror 7 is angle of wedge face in the first face of light beam direction of advance, and the second face is canonical reference plane, and canonical reference plane is hung down
Directly in the optical axis of the collimator objective 6, the standard reflection mirror 8 is standard reflection reference along the first face of light beam direction of advance
Face, and standard interference is formed perpendicular to the optical axis of the collimator objective 6, the canonical reference plane and the standard reflection plane of reference
Test chamber, optical element to be measured are placed in the standard interference test chamber, realize interference testing；
First concave mirror 19 and third convex lens 20 form doubly telecentric microscope group；
First convex lens 15 and the second convex lens 16 form doubly telecentric microscope group；
The frosted glass plate 9 is located on the focal plane of the collimator objective 6, the described alignment imaging microscope group 10 and right
Quasi- imaging CMOS11 is to the hair slide 9 at whole-view field imaging.
The clear aperture of the collimator objective 6, standard wedge mirror 7 and standard reflection mirror 8 is Φ 200mm.
The angle of wedge of the standard wedge mirror 7 is 6 points.
Including 632.8nm laser light source module, collimation testing module, alignment test module, small-range interference imaging module
With five part of wide range interference imaging module:
The 632.8nm laser 1 and focusing objective len 2 constitute laser light source module；
The collimation testing module by along light beam direction of advance be followed successively by the one 45 ° of dichroic reflector 5, collimator objective 6,
Standard wedge mirror 7 and standard reflection mirror 8, the one 45 ° of dichroic reflector 5 and optical path angle are 45 °, the collimator objective
6 numerical aperture is equal with the numerical aperture of focusing objective len 2, and the parallel light focusing that the two exports laser light source is burnt
Point coincides, and the Φ 200mm bore standard wedge mirror 7 is angle of wedge face in the first face of light beam direction of advance, and the second face is standard
Reference planes, and canonical reference plane, perpendicular to 6 place optical axis of Φ 200mm collimator objective, the standard reflection mirror 8 is before light beam
It is the standard reflection plane of reference into the first face of direction, and perpendicular to the optical axis of Φ 200mm collimator objective 6；
The wide range test image-forming module includes the first quarter-wave plate 4, the second quarter-wave plate 13, diaphragm
12, polarization splitting prism 3,14, the 2nd 45 ° of reflecting mirrors 18 of unpolarized Amici prism, the first concave mirror 19, third convex lens 20,
Microlens array 21 and the second imaging CCD target surface 22, the pixel that the described second imaging CCD22 is used be 1024pixel ×
1024pixel, first concave mirror 19 and third convex lens 20 form doubly telecentric camera lens；
The small-range test image-forming module includes the one 45 ° of dichroic reflector 5, the first quarter-wave plate 4, second
Quarter-wave plate 13, polarization splitting prism 3, diaphragm 12, unpolarized Amici prism 14, the first convex lens 15, the second convex lens
16 and first are imaged CCD target surface 17, and the pixel that the first imaging CCD17 is used is 1024pixel × 1024pixel, institute
It states the first convex lens 15 and the second convex lens 16 forms doubly telecentric microscope group；
The test alignment modules include frosted glass plate 9, alignment imaging microscope group 10 and cmos imaging target surface 11, test light
Beam is successively the frosted glass plate 9, alignment imaging microscope group 10 and alignment imaging after the one 45 ° of dichroic reflector 5 transmits
CMOS11, the frosted glass plate 9 are located on the focal plane of the Φ 200mm bore collimator objective 6, the alignment imaging lens
Group 10 and alignment imaging CMOS11 are to 9 whole-view field imaging of hair slide；
The wide range measuring accuracy is 0~100 μm.
The one 45 ° of dichroic reflector 5, collimator objective 6, standard wedge mirror 7 and standard reflection mirror 8 are all made of K9 material in Fig. 1,
Element outer diameter is Φ 210mm, effective clear aperature Φ 200mm.It is plated along the first face of light beam direction of advance standard wedge mirror 7
632.8nm anti-reflection film, transmissivity > 99.88%, and the first face of standard wedge mirror 7 are angle of wedge face, and the angle of wedge is 6 points, and the second face is mark
Quasi- reference planes, canonical reference plane are 30nm perpendicular to 6 place optical axis surface figure accuracy PV value of collimator objective.Collimator objective is set
6 numerical aperture and the numerical aperture of focusing objective len 2 are equal, and the focus of collimator objective 6 and focusing objective len 2 are to laser light source 1
Output light source focusing focus is overlapped.By above-mentioned setting, the canonical reference plane of standard wedge mirror 7 and the reflection of standard reflection mirror 8
The plane of reference forms standard interference and tests cavity, canonical reference light beam and light through the reflection output of 7 second face angle of wedge face of standard wedge mirror
The test beams that beam is reflected to form through standard flat reflecting mirror 8 are returned along original optical path, to reach auto-collimation output test.Its
In, the surface figure accuracy PV value in 8 non-reflective reference face of standard flat reflecting mirror is 50nm.
Laser light source 1 exports the light beam of 632.8nm wavelength, angle of divergence 0.5mrad, and the focusing of line focus object lens 2 forms number
It is worth the certain standard spherical wave in aperture, the standard spherical wave of output is arrived by polarization splitting prism 3, the first quarter-wave plate 4
Collimation testing components of system as directed, the P:S=1:1 of polarization splitting prism 3, and P light transmission T are 100%, and reflectivity R is 0%；S light
Transmissivity T is 0%, and reflectivity R is 100%.Light beam is through the one 45 ° of dichroic reflector 5, collimator objective 6, flat normal wedge mirror 7
With canonical reference reflecting mirror 8, with 8 front surface of the rear surface canonical reference plane of flat normal wedge mirror 7 and canonical reference reflecting mirror
Standard reflection face forms standard interference test chamber, distinguishes shape by canonical reference plane and standard reflection face or sample to be tested front surface
At canonical reference the reflected beams and test beams.Above-mentioned interference test beams are returned along original optical path, 6, the 1st ° of collimated object lens
It is dichroic reflector 5, the first quarter-wave plate 4, polarization splitting prism 3, diaphragm 12, the second quarter-wave plate 13, unpolarized
Amici prism 14 is transmitted through small-range test port.Unpolarized Amici prism 14 does not have any polarization characteristic, P light and S light
Splitting ratio is 1:1, and the first doubly telecentric lens group 15,16 is made of the different lens of two chip sizes, when interference image enters in a small amount
After journey test module, the first imaging CCD target surface is imaged on along light direction of advance the first doubly telecentric of first passage lens group 15,16
On 17, the imaging pixel of the first imaging CCD17 is 1024pixel × 1024pixel, realizes small-range high precision measurement.First
45 ° of dichroic reflectors 5 plate 632.8nm high-reflecting film, reflectivity 99.99%, rear surface plating in light beam direction of advance reflecting surface
The anti-reflection film of 632.8nm, transmissivity 99.5%.
Wide range test module is by polarization splitting prism 3, the first quarter-wave plate 4, the second quarter-wave plate 13, light
Late 12,14, the 2nd 45 ° of reflecting mirrors 18 of unpolarized Amici prism, the second doubly telecentric microscope group (third convex lens 19 and the first concave mirror
20), microlens array 21 and the second imaging CCD 22, before canonical reference plane and the standard reflection plane of reference or sample to be tested
Surface reflection is respectively formed the reference beam of standard and test beams are overlapped mutually to form interference testing light beam.Above-mentioned interference test
Light beam is returned along original optical path, collimated object lens 6, the 1st ° of dichroic reflectors 5, first quarter-wave plates 4, polarization spectro rib
Mirror 3, diaphragm 12, the second quarter-wave plate 13, unpolarized Amici prism 14 reflex to wide range test port, test beams edge
Direction of advance passes sequentially through the 2nd 45 ° of reflecting mirror 18, the second doubly telecentric microscope group (third convex lens 19 and the first concave mirror 20), micro-
Lens array 21 and the second imaging CCD component 22, are finally presented array hot spot interference image on the second imaging CCD 22, real
Existing large range high precision test, the points of microlens array 21 are 50 × 50, the pixel of the second imaging CCD22 be 1024pixel ×
1024pixel.Wherein, third convex lens 19 and the first concave mirror 20 constitute the second doubly telecentric microscope group.
When canonical reference light beam is back to the one 45 ° of dichroic reflector 5 along original optical path, 50% light is anti-through the light splitting
It penetrates mirror and enters test alignment modules, light beam reaches after through the one 45 ° of dichroic reflector 5 and is placed on 6 focal plane of collimator objective
On frosted glass plate 9, focus the corresponding focus in aforementioned each face respectively on frosted glass plate 9.It is successively in light beam direction of advance
To 9 whole-view field imaging of frosted glass plate then CMOS 11 can be imaged from alignment in alignment imaging microscope group 10 and alignment imaging CMOS 11
The focus point that all test transverse planes within the scope of alignment angle return is observed on output image.Pass through adjustment criteria wedge
The angle of mirror 7, so that plane of reference the reflected beams focal spot among 9 visual field of frosted glass plate, reflects test lead canonical reference
Mirror 8 or element under test angular adjustment, so that test surfaces reflect focus point and are overlapped with plane of reference reflection focus point, it is final to realize test
Alignment is adjusted.Test alignment modules are constituted by frosted glass plate 9, alignment imaging microscope group 10 and alignment imaging CMOS11 herein, are aligned
The pixel that CMOS11 is imaged is 1024pixel × 1024pixel.
When using wide range or small-range test imaging, the interference testing for realizing test port is adjusted using above-mentioned alignment
Image output and test alignment are adjusted.On large range high precision transmission-type interference device of the present invention, it can be achieved that photometry member
Part surface figure accuracy in the reflection in 0~100 μ m, the data tests such as shape and luminescent material index of refraction homogeneity before transmitted wave,
The parameters interference testing analysis such as maximum caliber Φ 200mm planar optical elements and corresponding optical system can also be realized simultaneously.
Experiment shows that apparatus of the present invention can test reflection and the transmission wavefront of maximum caliber Φ 200mm planar optical elements
Surface figure accuracy, it can also be used to test physical characteristic and integrated system optical parameter of optical system etc..Small-range measuring accuracy
PV value is better than λ/10, and RMS value is better than λ/50, and system repeatability is better than λ/500；Wide range measuring accuracy PV value is better than λ/10, RMS
Value is better than λ/50, and system repeatability is better than λ/500.For detection faces shape accuracy rating of the present invention at 0~100 μm, the present invention has essence
Wide, at low cost, space hold the is small in size feature of range is spent, the large area high-precision suitable for optical element is directed at test.
Claims (3)
1. a kind of hundred microns of range transmission-type interference testing devices, it is characterised in that surveyed by 632.8nm laser light source module, collimation
Die trial block, alignment test module, small-range interference imaging module and wide range interference imaging module composition, including 632.8nm swash
Light device (1), the laser outbound course along 632.8nm laser (1) are successively focusing objective len (2), polarization splitting prism (3),
One quarter-wave plate (4), the one 45 ° of dichroic reflector (5), collimator objective (6), standard flat wedge mirror (7) and standard reflection
Mirror (8), the direction along described standard reflection mirror (8) return light are successively the standard flat wedge mirror (7), collimator objective
(6), the return light is divided into the return light of reflection by the one 45 ° of dichroic reflector (5), the one 45 ° of dichroic reflector (5)
With the return light of transmission；
It is successively frosted glass plate (9), alignment imaging microscope group (10) and cmos imaging target surface in the return light direction of the transmission
(11),
It is successively first quarter-wave plate (4), polarization splitting prism (3) in the return light direction of the reflection,
It is successively diaphragm (12), the second quarter-wave plate (13), unpolarized light splitting in the reflection light direction of the polarization splitting prism (3)
Incident light is divided into reflected light and transmitted light by prism (14), the unpolarized Amici prism (14), the transmission light direction according to
Secondary is the first convex lens (15), the second convex lens (16) and the first imaging CCD target surface (17)；
The reflection light direction be successively the 2nd 45 ° of reflecting mirror (18), the first concave mirror (19), third convex lens (20),
Microlens array (21) and the second imaging CCD target surface (22)；
The one 45 ° of dichroic reflector (5) and optical path angle is 45 °, the numerical aperture of the collimator objective (6) and institute
The numerical aperture for the focusing objective len (2) stated is equal, and the two coincides to the parallel light focusing focus that laser light source exports, described
Standard wedge mirror (7) in the first face of light beam direction of advance be angle of wedge face, the second face is canonical reference plane, and canonical reference is flat
Perpendicular to the optical axis of the collimator objective (6), the standard reflection mirror (8) is standard along the first face of light beam direction of advance in face
Non-reflective reference face, and perpendicular to the optical axis of the collimator objective (6), the canonical reference plane and standard reflection plane of reference shape
At standard interference test chamber, optical element to be measured is placed in the standard interference test chamber, realizes interference testing；
First concave mirror (19) and third convex lens (20) form doubly telecentric microscope group；
First convex lens (15) and the second convex lens (16) form doubly telecentric microscope group；
The frosted glass plate (9) is located on the focal plane of the collimator objective (6), described alignment imaging microscope group (10) and
Alignment imaging CMOS (11) is to the hair slide (9) at whole-view field imaging.
2. according to claim 1 hundred microns of range transmission-type interference testing devices, it is characterised in that the collimation object
The clear aperture of mirror (6), standard wedge mirror (7) and standard reflection mirror (8) is Φ 200mm.
3. according to claim 1 or 2 hundred microns of range transmission-type interference testing devices, it is characterised in that the standard
The angle of wedge of wedge mirror (7) is 6 points.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455420A (en) * | 2019-07-11 | 2019-11-15 | 长春理工大学 | Wavefront measuring apparatus |
| CN110686618A (en) * | 2019-11-22 | 2020-01-14 | 北京理工大学 | Aspheric parameter error interferometry method and system combining total reflection angle positioning |
| CN114295327A (en) * | 2021-12-02 | 2022-04-08 | 天津大学 | Optical system transmission wavefront measurement method and device based on telecentric imaging system |
| CN116045835A (en) * | 2023-03-31 | 2023-05-02 | 成都太科光电技术有限责任公司 | Ultra-large caliber plane or spherical surface optical interference testing device |
| CN116718356A (en) * | 2023-08-09 | 2023-09-08 | 浙江荷湖科技有限公司 | Testing method and device of finite far conjugate imaging system |
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