CN207816210U - Infrared visible light dual wavelength transmission-type interference testing device in semiconductor - Google Patents
Infrared visible light dual wavelength transmission-type interference testing device in semiconductor Download PDFInfo
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- CN207816210U CN207816210U CN201820120210.8U CN201820120210U CN207816210U CN 207816210 U CN207816210 U CN 207816210U CN 201820120210 U CN201820120210 U CN 201820120210U CN 207816210 U CN207816210 U CN 207816210U
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Abstract
Infrared visible light dual wavelength transmission-type interference testing device in a kind of semiconductor for detecting mid-infrared light element, material and optical system, it is total to beam path alignment output module, 10.5 μm of semiconductor infrared interference of light image-forming modules and 635nm semiconductor visible light interference imagings including two waveband and tests alignment modules, infrared test precision PV values are better than 0.05 λ during utility model device can be realized, RMS is better than 0.01 λ, and system repeatability is better than the high-resolution interference testing of 0.001 λ.
Description
Technical field
The infrared striking rope transmission interference test device of visible light dual wavelength, infrared in mainly using the utility model is related in
Interference testing is carried out with visible light double-wavelength semiconductor light source, can be used for testing surface figure accuracy, the material of mid-infrared light element
Physical characteristic and optical system overall characteristic parameter.
Background technology
Currently, before mid-infrared light system has a wide range of applications in fields such as military affairs, space flight, the energy, communication, remote sensing
Scape, the detection demand so as to cause the optical element and material that are used in centering infrared optical system constantly increase, cause therewith
The close attention of domestic and international researcher centering infrared application wave band optical articles and optical system test, and expand a system
Row correlative study.The research to infrared interferometer and application have been begun to from end of the sixties in last century researcher, it is international big
Brand company Zygo, Vecco, POE, Graham etc. are all made of infrared interference test device in Tai Man-Green's type digital phase-shifting technique formula
It is detected, with CO2Laser is as light source；The research and application of domestic centering infrared interferometer are more later than external, and the country will
Mainly there are Chengdu photoelectricity institute and Institutes Of Technology Of Nanjing, the infrared light supply of use in the scientific research institutions that middle infrared band is included in research category
It is also 10.6 μm of CO2Laser.Middle infrared interference measuring technology constantly develops rapidly in recent years, implies that it will become future
The development trend of middle infrared band optical component surface shape detection, physical characteristics of materials parameter testing application.Therefore, the infrared survey of centering
Trying the research of imaging technique becomes one of the key subjects of field of optical detection with industrialization production.
It was found that the wavelength band of the parameter testings such as common mid-infrared light element surface figure accuracy, physical characteristics of materials is 2
~14 μm.In middle infrared interference test system, instrument safety in utilization and operation convenience are primary in entire test process
The part of consideration generally uses power for CO more than watt grade in the world2Infrared interference testing light source during laser is used as, not only
Certain power damage is caused to test sample and infrared detector, while also there are certain security threats to tester.
In addition, using the CO of 10.6 μm of wavelength2Laser, since the invisible characteristic of the wave band will be brought greatly not to operating personnel
Just.Now only furtherd investigate in terms of testing alignment based on the middle infrared interference of Tai Man-Green's formula and Fei Suo types test system,
And certain effect is obtained, but all cannot achieve the common test from visible light to mid-infrared light wavelength band and total light path pair
Standard, and have not been reported.Therefore, seek infrared interferometer in low power sources, altogether light path alignment, digital phase shift formula easy to operate
It is the emphasis of current researcher research.
Utility model content
The purpose of this utility model is to provide in a kind of semiconductor for mid-infrared light element, material and optical system
Infrared visible light dual wavelength is total to light path transmission-type interference testing device.The dual wavelength interference testing device is mid-infrared light element
Surface figure accuracy, physical characteristics of materials and optical system overall characteristic parameter provide necessary device for testing and analyzing.The dress
It sets and optical test path is total to by two waveband, the high-precision for realizing visible light wave range to middle infrared band optical element is directed at test,
Solve the problems, such as middle infrared interferometer test light path alignment and test scope limitation altogether.
To achieve the above object, the utility model adopts the following technical solution：
Infrared visible light dual wavelength transmission-type interference testing device in a kind of semiconductor, feature are to include that two waveband is total
Beam path alignment output module, 10.5 μm of semiconductor infrared interference of light image-forming modules and 635nm semiconductor visible light interference imagings are surveyed
Try alignment modules：
It includes 635nm semiconductor visible lights light source and 10.5 μm of semiconductors that the two waveband, which is total to beam path alignment output module,
Infrared light supply is first to expand focus lamp, first successively along the output beam direction of 10.5 μm of semiconductor red outer light sources
Amici prism, 45 ° of spectroscopes, spherical surface collimator objective, biconvex spherical surface compensating glass, standard reflection spherical mirror or standard flat wedge mirror and
Standard reflection mirror is second to expand focus lamp, second successively along the 635nm semiconductor visible light light source output beam directions
Amici prism, 45 ° of spectroscopes, spherical surface collimator objective, biconvex spherical surface compensating glass, standard spherical mirror or standard flat wedge mirror and standard
Speculum；Spherical surface collimator objective, biconvex spherical surface compensating glass, standard spherical mirror or the standard flat wedge mirror and standard reflection mirror
Common optical axis；The numerical aperture that the spherical surface collimator objective and described first expands focus lamp is equal, and spherical surface collimator objective
Focus expand focus lamp to 10.5 μm of semiconductor infrared light source output parallel light focusing focus phases with described first
It overlaps；The spherical surface collimator objective expands that the numerical aperture of focus lamp is equal with second, and the focus of spherical surface collimator objective with
Second focus for expanding focus lamp coincides；45 ° of spectroscopes in light beam direction of advance the first face be angle of wedge face, second
Face is reflecting surface, the optical axis angle at 45 ° of 45 ° of spectroscopes and spherical surface collimator objective, described 10.5 μm of semiconductor infrared light
The output beam in source is directed through 45 ° of spectroscopes, and the output beam of the 635nm semiconductor visible light light sources is through institute
The 45 ° of spectroscopes reflection output stated, the standard reflection spherical mirror or standard flat wedge mirror in light beam direction of advance the
It is angle of wedge face on one side, the second face is the standard spherical surface plane of reference or the standard flat plane of reference, and described and standard spherical mirror or standard are flat
The standard spherical surface plane of reference or the standard flat plane of reference of face wedge mirror form interference testing chamber with the standard reflection mirror, are tested
Optical element is placed in the standard spherical surface plane of reference or the standard flat plane of reference and described of standard spherical mirror or standard flat wedge mirror
Between standard reflection mirror；
10.5 μm of semiconductor infrared interference of light image-forming modules, by the interference testing light direction that is returned along original optical path according to
Secondary the first Amici prism, the first interference imaging microscope group and infrared detector composition, during interference imaging, by the mark
The reflected light of quasi-reflection mirror and tested optical element penetrates the mark of the standard spherical mirror (1) or standard flat wedge mirror (18)
The test light of the director sphere plane of reference or the standard flat plane of reference and by standard spherical mirror (1) or the angle of wedge of standard flat wedge mirror (18)
The interference testing light returned along original optical path that the reflected light in face is collectively formed, through 45 ° of spectroscopes, the first Amici prism, first dry
It relates to imaging microscope group and infrared detector and images on infrared detector target surface；
The 635nm semiconductor visible lights interference imaging and test alignment modules, is surveyed by the interference returned along original optical path
The second Amici prism, the second convex lens, the second interference imaging microscope group and the Visible-light CCD composition of light direction successively are tried, is being interfered
In imaging process, the standard spherical mirror or mark are penetrated by the reflected light of the standard reflection mirror and tested optical element
The standard spherical surface plane of reference of directrix plane wedge mirror or the test light of the standard flat plane of reference and by standard spherical mirror or standard flat wedge
The interference testing light returned along original optical path that the reflected light in the angle of wedge face of mirror is collectively formed, through 45 ° of spectroscopes, the second light splitting rib
Mirror, the second convex lens, the second interference imaging microscope group and Visible-light CCD simultaneously image on Visible-light CCD target surface；
The test alignment light source is 635nm semiconductor visible light light sources, utilizes 635nm semiconductor visible light light sources pair
Light path and 10.5 μm of semiconductor infrared optical tests are total to light path alignment to the test of 635nm semiconductor visible lights altogether.
The standard reflection mirror is standard spherical reflector or standard flat speculum.
10.5 μm of semiconductor red outer light sources are 10.5 μm of semiconductor infrared laser devices.
The 635nm semiconductor visible light light sources are 635nm semiconductor lasers.
The angle of wedge that 45 ° of spectroscopical angle of wedge faces are 30 points
The angle of wedge that the angle of wedge face of the standard spherical mirror or standard flat wedge mirror is 30 points.
The technique effect of the utility model：
It is therefrom infrared double to visible light that utility model device uses striking rope transmission-type test system to realize detected element
Reflection, the transmission wavefront test in wide waveband frequency domain, provide total beam path alignment output and interference testing module, two waveband test
Up to equal accuracy, while the displacement aberration generated by parallel-plate during interference testing is relative under long wavelengths/10, can
It ignores.
The device is introduced in view of the invisible characteristic of mid-infrared light to carry out 635nm visible light sources as secondary light source
Mid-infrared light test position is aligned.It is only the semiconductor red outer light source of 100mW by using 10.5 μm of wavelength and output power, drop
The danger that low instrument itself uses, while solving the problems, such as infrared detector power damage and supersaturation.
Description of the drawings
Fig. 1 is the index path of infrared visible light dual wavelength transmission-type interference testing device in the utility model semiconductor
Specific implementation mode
It elaborates to the utility model below in conjunction with attached drawing, but the protection model of the utility model should not be limited with this
It encloses.
Fig. 1 is infrared visible light dual wavelength transmission-type interference testing device index path in the utility model semiconductor, by scheming
It is found that infrared visible light dual wavelength transmission-type interference testing device in the utility model semiconductor, including two waveband are total to light path standard
Straight output module, 10.5 μm of semiconductor infrared interference of light image-forming modules and the test alignment of 635nm semiconductor visible light interference imagings
Module：
It includes that 635nm semiconductor visible lights light source 17 and 10.5 μm half are led that the two waveband, which is total to beam path alignment output module,
Body infrared light supply 10 is first to expand focus lamp successively along the output beam direction of 10.5 μm of semiconductor red outer light sources 10
9,5,45 ° of spectroscopes 4 of the first Amici prism, spherical surface collimator objective 3, biconvex spherical surface compensating glass 2, standard reflection spherical mirror 1 or mark
Directrix plane wedge mirror 18 and standard reflection mirror are successively along the 17 output beam direction of 635nm semiconductor visible lights light source
Two expand focus lamp 16,11,45 ° of spectroscopes 4 of the second Amici prism, spherical surface collimator objective 3, biconvex spherical surface compensating glass 2, standard ball
Face mirror 1 or standard flat wedge mirror 18 and standard reflection mirror；The spherical surface collimator objective 3, biconvex spherical surface compensating glass 2, standard ball
Face mirror 1 or standard flat wedge mirror 18 and standard reflection mirror common optical axis；The spherical surface collimator objective 3 and described first expands poly-
The numerical aperture of burnt mirror 9 is equal, and the focus of spherical surface collimator objective 3 and described first expands focus lamp 9 to 10.5 μ
M semiconductor reds outer light source 10 exports parallel light focusing focus and coincides；The spherical surface collimator objective 3 and second expands focus lamp
16 numerical aperture is equal, and the focus of spherical surface collimator objective 3 expands the focus of focus lamp 16 with second and coincides；Described
45 ° of spectroscopes 4, first face in light beam direction of advance is angle of wedge face, and the second face is reflecting surface, and 45 ° of spectroscopes 4 are accurate with spherical surface
The optical axis angle at 45 ° of straight object lens 3, the output beams of described 10.5 μm of semiconductor red outer light sources 10 are directed through described
The output beam of 45 ° of spectroscopes 4, the 635nm semiconductor visible lights light source 17 reflects output through 45 ° of spectroscopes 4,
First face of the standard reflection spherical mirror 1 or standard flat wedge mirror 18 in light beam direction of advance is angle of wedge face, the second face
For the standard spherical surface plane of reference or the standard flat plane of reference, the standard spherical surface of the standard spherical mirror 1 or standard flat wedge mirror 18
The plane of reference or the standard flat plane of reference form interference testing chamber with the standard reflection mirror, and tested optical element is placed in described
Interference testing chamber in；
10.5 μm of semiconductor infrared interference of light image-forming modules, by the interference testing light direction that is returned along original optical path according to
Secondary the first Amici prism 5, the first interference imaging microscope group 6,7 and infrared detector 8 forms, during interference imaging, by institute
The reflected light of the standard reflection mirror and tested optical element stated is through the standard spherical mirror 1 or standard flat wedge mirror 18
The test light of the standard spherical surface plane of reference or the standard flat plane of reference and the angle of wedge face by standard spherical mirror 1 or standard flat wedge mirror 18
The interference testing light returned along original optical path that is collectively formed of reflected light, it is dry through 45 ° of spectroscopes 4, the first Amici prism 5, first
It relates to imaging microscope group 6,7 and infrared detector 8 and images on 8 target surface of infrared detector；
The 635nm semiconductor visible lights interference imaging and test alignment modules, is surveyed by the interference returned along original optical path
Try the second Amici prism 11, the second convex lens 12, the second interference imaging microscope group 13,14 and the Visible-light CCD 15 of light direction successively
Composition penetrates the mark during interference imaging by the reflected light of the standard reflection mirror and tested optical element
The test light of the standard spherical surface plane of reference or the standard flat plane of reference of director sphere mirror 1 or standard flat wedge mirror 18 and by standard spherical surface
The interference testing light returned along original optical path that the reflected light in the angle of wedge face of mirror 1 or standard flat wedge mirror 18 is collectively formed, through 45 ° points
Light microscopic 4, the second Amici prism 11, the second convex lens 12, the second interference imaging microscope group 13,14 and Visible-light CCD 15 simultaneously image in
On 15 target surface of Visible-light CCD；
The test alignment light source is 635nm semiconductor visible lights light source 17, utilizes 635nm semiconductor visible light light sources
Light path and 10.5 μm of semiconductor infrared optical tests are total to light path alignment altogether for 17 pairs of 635nm semiconductor visible lights tests.
The standard reflection mirror is standard spherical reflector or standard flat speculum.
10.5 μm of semiconductor red outer light sources 10 are 10.5 μm of semiconductor infrared laser devices.
The 635nm semiconductor visible lights light source 17 is 635nm semiconductor lasers.
The angle of wedge that 45 ° of spectroscopical angle of wedge faces are 30 points.
The angle of wedge that the angle of wedge face of the standard spherical mirror 1 or standard flat wedge mirror 18 is 30 points.
First face is angle of wedge face, and the second face is excellent for the surface figure accuracy PV values of the standard spherical surface plane of reference or the standard flat plane of reference
In 40nm.
It reads and analyzes the infrared detector 8 and export the data result that interference pattern obtains detected element；
The test alignment modules are with 635nm semiconductor visible lights light source 17 to 10.5 μm of semiconductor red outer light sources 10
Test light path alignment altogether need to be using 635nm visible lights test light as auxiliary in 10.5 μm of semiconductor red outer light sources 10 are tested
Light, to observe the test Exit positions of sightless mid-infrared light beam, finally ensure infrared integrated testability result feasibility,
Accuracy and validity.
45 ° of spectroscopes 4 in Fig. 1, spherical surface collimator objective 3, biconvex spherical surface compensating glass 2 and standard spherical mirror (or flat normal
Wedge mirror) 1 it is all made of wide spectrum ZnSe materials, element outer diameterClear aperture isEffective aperture
45 ° of spectroscopes, 4 two-sided plating, 45 ° of incidences, the 10.5 mum wavelength transmission film, transmissivity T>99.5%, front surface utilizes 10.5 μm
Wavelength transmission film short wavelength cutoff realizes 635nm wavelength reflections, and for reflectivity up to 90%, rear surface is angle of wedge face, angle of wedge 30'.
Two-sided the plating of the spherical surface collimator objective 3, biconvex spherical surface compensating glass 2 and standard spherical mirror 1 (or standard flat wedge mirror 18)
635nm and 10.5 mum wavelength transmission films, transmissivity T>99.5%, the first face wedge of standard spherical mirror 1 or standard flat wedge mirror 18
The angle of wedge of edged surface is 30'.Through standard spherical mirror 1 or 18 rear surface of standard flat wedge mirror reflection outputting standard light beam and light beam through surveying
The test beams that examination optical element, standard spherical surface or plane mirror reflect to form are returned along original optical path, to reach auto-collimation
Output test.
When 10.5 μm of semiconductor infrared ray lasers make test of light source mid-infrared light element, light source power 100mW is defeated
Go out line width and is less than 1MHz.The light beam of light source output expands focus lamp 9 through first and forms planar light beam, which passes through the first light splitting
Prism 5 reaches at 45 ° of spectroscopes 4, and spherical surface collimator objective 3, biconvex spherical surface standard compensation mirror 2 and standard spherical surface are reached after transmission
Mirror 1 (or standard flat wedge mirror 18) forms test.Herein first expand focus lamp 9 it is two-sided plate 10.5 μm of transmission films, transmission
Rate T>99.5%；The light splitting surface of first Amici prism 5 plates 10.5 mum wavelengths 1:1 spectro-film, and it is glued using no glue vacuum, four
Plate 10.5 mum wavelength transmission films, transmissivity T in face>99.5%.First numerical value for expanding focus lamp 9 and spherical surface collimator objective 3 is set
Aperture is equal, and the focus of spherical surface collimator objective 3 exports corresponding first with 10.5 μm of semiconductor red outer light sources 10 and expands focusing
The focus of mirror 9 coincides.With the above arrangement, forming standard spherical wave after light beam is by spherical surface collimator objective 3, wavefront misses
Poor PV values are better than 20nm, and spherical wave penetrates standard spherical mirror 1 forward or standard flat wedge mirror 18 reaches spherical surface or flat normal is anti-
Penetrate mirror.Wherein, transmission criteria spherical mirror 1 or standard flat wedge mirror 18 are perpendicular to 3 place optical axis of spherical surface collimator objective, before light beam
It is angle of wedge face into the first face of direction, the angle of wedge in setting angle of wedge face is 30 points, and the second face is standard spherical surface or Plane reference face, and face
The PV values of shape precision are better than 50nm.The canonical reference that can be obtained respectively in standard spherical surface or Plane reference face and element under test surface
Light beam and tested light beam realize that auto-collimation exports interference testing.The interference testing light is returned along original optical path, through 45 ° of spectroscopes 4, the
One Amici prism 5, the first interference imaging camera lens 6,7 reach infrared detector 8, through opto-electronic conversion on 8 target surface of infrared detector
Export the data informations such as interference fringe image.Wherein, the first interference imaging camera lens 6,7, first expands the light splitting of focus lamp 9 and first
Prism 5 is all made of ZnSe materials and is made, and the first interference imaging camera lens 6,7, first expands the two-sided plating of 9 aspherical elements of focus lamp
10.5 mum wavelength transmission films, transmissivity T>99.5%.
When 635nm semiconductor visible lights light source 17 is that laser light source tests mid-infrared light element, light source power is
7mW, line width 500KHz.The light beam of light source output expands focus lamp 16 through second and forms collimated light beam, which passes through
Second Amici prism 11 reaches at 45 ° of spectroscopes 4, reaches spherical surface collimator objective 3, biconvex spherical surface standard compensation mirror 2 after reflection
It is formed and is tested with standard spherical mirror 1 (or standard flat wedge mirror 18).Herein second expand focus lamp 16 it is two-sided plating 635nm it is saturating
Penetrate film, transmissivity T>99.8%；The light splitting surface plating 635nm wavelength 1 of second Amici prism 11:1 spectro-film, and using no glue vacuum
635nm wavelength transmission films, transmissivity T are plated in gluing, four sides>99.5%.Setting second expands focus lamp 16 and spherical surface collimation object
The numerical aperture of mirror 3 is equal, and the focus of spherical surface collimator objective 3 exports corresponding second with 635nm semiconductor visible lights source 17
The focus for expanding focus lamp 16 coincides.With the above arrangement, forming standard spherical surface after light beam is by spherical surface collimator objective 3
Wave, wavefront error PV values are better than 30nm, spherical wave penetrate forward standard spherical mirror 1 or standard flat wedge mirror 18 reach spherical surface or
Flat normal speculum.Standard spherical mirror 1 or standard flat wedge mirror are angle of wedge face in the first face of light beam direction of advance, and the angle of wedge is arranged
The angle of wedge in face is 30 points, and the second face is standard spherical surface or Plane reference face, and surface figure accuracy PV values are better than 40nm.It can mark respectively
The canonical reference light beam and tested light beam that director sphere or Plane reference face and element under test surface obtain realize that auto-collimation output is dry
Relate to test.The interference testing light is returned along original optical path through 45 ° of spectroscopes 4, the second Amici prism 11, the second convex lens 12, second
Interference imaging microscope group 13,14 reaches Visible-light CCD component 15, and interference fringe image is exported on CCD15 target surfaces through opto-electronic conversion
Equal data informations.Wherein, the second convex lens 12, the second interference imaging microscope group 13,14, Visible-light CCD component 15, second expand it is poly-
Burnt mirror 16 and the second Amici prism 11 are all made of fused quartz material, the second convex lens 12, the second interference imaging microscope group 13,14, can
The two-sided plating 635nm wavelength transmission films of light-exposed CCD components 15, transmissivity T>99.8%.In addition, to 10.5 μm of infrared light supplies 10
In interference testing imaging process, 635nm visible light sources 17 are subjected to mid-infrared light test position alignment as secondary light source, mainly
The test of visible light interference imaging and mid-infrared light alignment test are realized by mobile first convex lens 13.When the first convex lens 13 to
When first concavees lens 14 move, it is seen that interference of light imaging test result is presented on Visible-light CCD 15；When the first convex lens 13 to
When second convex lens, 12 direction is moved, it is seen that 10.5 μm of optical system for testing of light source pair of light outgoing provide alignment test, to realize
The accurate measurement of 10.5 μm of mid-infrared light sources 10.So far light beam Return-ing direction is pressed successively by the second Amici prism 11, the second convex lens
Mirror 12, the second interference imaging microscope group 13,14 and Visible-light CCD 15 form 635nm visible light sources interference imaging and alignment modules.
Interference testing light is returned along original optical path, the visible light interference testing light beam vertically reflected back through 45 ° of spectroscopes 4,
Direction is followed successively by the second Amici prism 11, the second convex lens 12, second imaging microscope group 13,14 and Visible-light CCD 15, it is seen that light
It is 4.65 μm of 4.65 μ m that CCD15, which uses the resolution ratio of 640 × 480 pixels, single pixel dimension,.It goes back through 45 ° of transmissions of spectroscope 4
Infrared interference test beams, direction is followed successively by the first Amici prism 5, Polaroid microscope group 6,7 and infrared detector 8, infrared
It is 17 μm of 17 μ m that detector, which uses the resolution ratio of 640 × 480 pixels, single pixel dimension,.Interference is exported by opto-electronic conversion to survey
Attempt picture, the interference pattern test data exported by Visible-light CCD and infrared detector through analysis is as a result, thus red in being tested
The face graphic data of external component.
Middle infrared band and visible light wave range test share two waveband and are total to beam path alignment output module and two waveband is total to light path
Interference testing module.By being controlled using switch 10.5 μm and 635nm two kinds of semiconductor laser light resources 10,17, to realize
It is tested from visible light wave range to the optical element of middle infrared band.
Experiment shows that utility model device realizes that detected element is therefrom infrared to be arrived using striking rope transmission-type test system
Reflection, the transmission wavefront test in visible light two waveband wideband region provide total beam path alignment output and interference testing module, double
Wave band test up to equal accuracy, while the displacement aberration generated by parallel-plate during interference testing relative to long wavelengths/
Under 10, it can be neglected.
The device is introduced in view of the invisible characteristic of mid-infrared light to carry out 635nm visible light sources as secondary light source
Mid-infrared light test position is aligned.It is only the semiconductor red outer light source of 100mW by using 10.5 μm of wavelength and output power, drop
The danger that low instrument itself uses, while solving the problems, such as infrared detector power damage and supersaturation.
Infrared test precision PV values are better than 0.05 λ during utility model device can be realized, RMS is better than 0.01 λ, and system repeats
Property be better than 0.001 λ high-resolution interference testing.
Claims (6)
1. infrared visible light dual wavelength transmission-type interference testing device in a kind of semiconductor, it is characterised in that be total to light including two waveband
Road collimates output module, 10.5 μm of semiconductor infrared interference of light image-forming modules and the test of 635nm semiconductor visible light interference imagings
Alignment modules：
It includes 635nm semiconductor visible lights light source (17) and 10.5 μm of semiconductors that the two waveband, which is total to beam path alignment output module,
Infrared light supply (10) is first to expand focusing successively along the output beam direction of 10.5 μm of semiconductor red outer light sources (10)
Mirror (9), the first Amici prism (5), 45 ° of spectroscopes (4), spherical surface collimator objective (3), biconvex spherical surface compensating glass (2), standard reflection
Spherical mirror (1) or standard flat wedge mirror (18) and standard reflection mirror are exported along the 635nm semiconductor visible lights light source (17)
Beam direction is second to expand focus lamp (16), the second Amici prism (11), 45 ° of spectroscopes (4), spherical surface collimator objectives successively
(3), biconvex spherical surface compensating glass (2), standard spherical mirror (1) or standard flat wedge mirror (18) and standard reflection mirror；The spherical surface
Collimator objective (3), biconvex spherical surface compensating glass (2), standard spherical mirror (1) or standard flat wedge mirror (18) and standard reflection mirror are total to light
Axis；The numerical aperture that the spherical surface collimator objective (3) and described first expands focus lamp (9) is equal, and spherical surface collimation object
It is parallel to 10.5 μm of semiconductor red outer light source (10) outputs that the focus of mirror (3) with described first expands focus lamp (9)
Light focused spot coincides；It is equal that the spherical surface collimator objective (3) expands the numerical aperture of focus lamp (16) with second, and ball
The focus that the focus of face collimator objective (3) expands focus lamp (16) with second coincides；45 ° of spectroscopes (4) are in light beam
The first face is angle of wedge face in direction of advance, and the second face is reflecting surface, the optical axis of 45 ° of spectroscopes (4) and spherical surface collimator objective (3)
The output beam of angle at 45 °, described 10.5 μm of semiconductor red outer light sources (10) is directed through 45 ° of spectroscopes (4),
The output beam of the 635nm semiconductor visible lights light source (17) reflects output through 45 ° of spectroscopes (4), described
The first face of standard reflection spherical mirror (1) or standard flat wedge mirror (18) in light beam direction of advance is angle of wedge face, and the second face is
The standard ball of the standard spherical surface plane of reference or the standard flat plane of reference, the standard spherical mirror (1) or standard flat wedge mirror (18)
The face plane of reference or the standard flat plane of reference form interference testing chamber with the standard reflection mirror, and tested optical element is placed in mark
The standard spherical surface plane of reference or the standard flat plane of reference of director sphere mirror (1) or standard flat wedge mirror (18) and the standard reflection
Between mirror；
10.5 μm of semiconductor infrared interference of light image-forming modules, successively by the interference testing light direction that is returned along original optical path
First Amici prism (5), the first interference imaging microscope group (6,7) and infrared detector (8) composition, during interference imaging, by
The reflected light of the standard reflection mirror and tested optical element penetrates the standard spherical mirror (1) or standard flat wedge mirror
(18) test light of the standard spherical surface plane of reference or the standard flat plane of reference and by standard spherical mirror (1) or standard flat wedge mirror
(18) the interference testing light returned along original optical path that the reflected light in angle of wedge face is collectively formed, through 45 ° of spectroscopes (4), first point
It is imaged on infrared detector (8) target surface after light prism (5), the first interference imaging microscope group (6,7) and infrared detector (8)；
The 635nm semiconductor visible lights interference imaging and test alignment modules, by the interference testing light returned along original optical path
The second Amici prism (11), the second convex lens (12), the second interference imaging microscope group (13,14) and the Visible-light CCD of direction successively
(15) it forms, during interference imaging, described in the reflected light transmission by the standard reflection mirror and tested optical element
Standard spherical mirror (1) or standard flat wedge mirror (18) the standard spherical surface plane of reference or the standard flat plane of reference test light and by
The interference that the reflected light in the angle of wedge face of standard spherical mirror (1) or standard flat wedge mirror (18) was collectively formed return along original optical path is surveyed
Try light, through 45 ° of spectroscopes (4), the second Amici prism (11), the second convex lens (12), the second interference imaging microscope group (13,14) and
It is imaged in after Visible-light CCD (15) on Visible-light CCD (15) target surface；
It is 635nm semiconductor visible lights light source (17) to test alignment light source, right using 635nm semiconductor visible lights light source (17)
Light path and 10.5 μm of semiconductor infrared optical tests are total to light path alignment to the test of 635nm semiconductor visible lights altogether.
2. infrared visible light dual wavelength transmission-type interference testing device according to claim 1, it is characterised in that described
Standard reflection mirror be standard spherical reflector or standard flat speculum.
3. infrared visible light dual wavelength transmission-type interference testing device according to claim 1, it is characterised in that described
10.5 μm of semiconductor red outer light sources (10) be 10.5 μm of semiconductor infrared laser devices.
4. infrared visible light dual wavelength transmission-type interference testing device according to claim 1, it is characterised in that described
635nm semiconductor visible lights light source (17) be 635nm semiconductor lasers.
5. infrared visible light dual wavelength transmission-type interference testing device according to claim 1, it is characterised in that described
45 ° of spectroscopical angle of wedge faces be 30 points of the angle of wedge.
6. infrared visible light dual wavelength transmission-type interference testing device, feature according to any one of claims 1 to 5
It is the angle of wedge that the angle of wedge face of the standard spherical mirror (1) or standard flat wedge mirror (18) is 30 points.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201820120210.8U CN207816210U (en) | 2018-01-24 | 2018-01-24 | Infrared visible light dual wavelength transmission-type interference testing device in semiconductor |
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| CN201820120210.8U CN207816210U (en) | 2018-01-24 | 2018-01-24 | Infrared visible light dual wavelength transmission-type interference testing device in semiconductor |
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| CN207816210U true CN207816210U (en) | 2018-09-04 |
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| CN108132026A (en) * | 2018-01-24 | 2018-06-08 | 赵智亮 | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108132026A (en) * | 2018-01-24 | 2018-06-08 | 赵智亮 | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor |
| CN108132026B (en) * | 2018-01-24 | 2024-02-27 | 赵智亮 | Infrared and visible light dual-wavelength transmission type interference testing device in semiconductor |
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