CN215984415U

CN215984415U - Linear scanning spectrum copolymerization measurement system

Info

Publication number: CN215984415U
Application number: CN202121825058.1U
Authority: CN
Inventors: 周建康; 杨平; 凌晨; 陈志敏
Original assignee: Ruzhong Intelligent Technology Suzhou Co ltd
Current assignee: Ruzhong Intelligent Technology Suzhou Co ltd
Priority date: 2021-08-06
Filing date: 2021-08-06
Publication date: 2022-03-08
Anticipated expiration: 2031-08-06

Abstract

The utility model discloses a linear scanning spectrum copolymerization measurement system, which comprises an illumination module, a linear dispersion module, a linear spectrum receiving module and a re-imaging module, wherein the illumination module is used for illuminating a spectrum; the illumination module comprises a white light source and a condenser lens, provides illumination in a visible light range, and improves the utilization rate of light energy through the condenser lens. The linear scanning spectrum copolymerization measurement system is formed by cascading three independent linear dispersion imaging light paths to form a spectrum confocal measurement system with a linear view field, namely, the processes of linear view field spectral imaging, linear spectrum optical compounding and linear view field secondary spectral imaging are realized, the linear scanning spectrum copolymerization measurement system has high spatial resolution and high spectral resolution simultaneously, detection of two-dimensional spatial information is obtained by once photographing, namely, spatial distribution of the slit linear view field direction and height information of the object surface reflected by the wavelengths of different positions of a focal plane are obtained, and then, three-dimensional spatial distribution is formed to realize 3D morphology measurement through one-dimensional push scanning. The three dispersion imaging optical paths can be independently adjusted and tested, and the system structure is simplified.

Description

Linear scanning spectrum copolymerization measurement system

Technical Field

The utility model belongs to the technical field of 3D (three-dimensional) morphology detection, and relates to a line scanning spectrum confocal measurement system.

Background

Surface topography detection is an important component of precision machining techniques. With the development of the processing technology level, the requirements on the range, the precision and the speed of the morphology detection are higher and higher. In the existing contact and non-contact surface topography detection methods, white light interference topography measurement, laser confocal measurement and other methods can realize three-dimensional restoration of the surface topography through axial chromatography, and have the advantages of high precision, wide range and the like. However, these axial scans are extremely time consuming and difficult to meet with the need for rapid topography recovery.

The spectrum confocal technology can solve the problem of time consumption in the existing surface morphology detection method, the most common point spectrum confocal displacement sensor is currently on the market, and the light emitted by a white light source forms a point light source after passing through a pinhole. The point light source forms a series of continuously distributed focusing light spots with different wavelengths on an optical axis after passing through the dispersive objective lens, and the light spots with different wavelengths correspond to different depths. If the measured surface is positioned at the focus of a certain wavelength, the reflected energy has small spot size at the confocal pinhole, the energy distribution is concentrated, and therefore, the luminous flux passing through the pinhole is large. And other wavelengths are in a defocusing state, the size of a light spot is large, the energy distribution is relatively dispersed, so that the light flux passing through the pinhole is small, when the light is dispersed by a spectrometer and data is collected for analysis, the wavelength value at the position with the maximum light flux is obtained, and the position of the measured object is further obtained.

The point spectrum confocal method has the advantages that the axial movement of a system mechanical structure is replaced, then if the system needs to complete two-dimensional movement in a plane to acquire the 3D shape of an object, the scanning time is long, and the process of acquiring information is complicated. The utility model provides a line scanning spectrum confocal measurement system, which utilizes spectrum information to replace axial movement of a mechanical structure, one-dimensional scanning can obtain 3D (three-dimensional) morphology information, the process is faster, the structure of the system is optimized, and the installation, adjustment and testing are convenient.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Aiming at the defects of the prior art, the utility model provides a linear scanning spectrum copolymerization measurement system which can realize the advantages of good linearity and small distortion of a spectrum, three-dimensional shape information of an object by one-dimensional scanning and the like, and solves the problems in the background art.

(II) technical scheme

In order to achieve the purpose, the utility model provides the following technical scheme: a linear scanning spectrum copolymerization measurement system comprises an illumination module, a line dispersion module, a line spectrum receiving module and a re-imaging module, wherein the line dispersion module, the line spectrum receiving module and the re-imaging module are all light splitting imaging light paths.

Preferably, three independent linear dispersion modules form an imaging optical path cascade to form a spectral confocal measuring system with a linear field of view.

Preferably, the line dispersion module comprises a first slit, a first collimating mirror, a first light splitting element and a first imaging mirror, the first slit, the first collimating mirror, the first light splitting element and the first imaging mirror are sequentially distributed from high to low downwards, the line field beam formed by the first slit is collimated and split, and is imaged at a position at a certain distance from the last lens, so that linear beam dispersion with axial components is formed, and dispersion images of different wavelengths of the first slit can be distributed at different high and low positions.

Preferably, the line spectrum receiving module comprises a second imaging mirror, a second light splitting element, a second collimating mirror and a second slit, the second imaging mirror, the second light splitting element, the second collimating mirror and the second slit are sequentially distributed from low to high upwards, the line spectrum receiving module is bilaterally symmetrical relative to the line dispersion module, the elements are in reverse order, and is responsible for receiving reflected or scattered light beams with different wavelengths at different high and low positions, sequentially completing light receiving, light combining and light condensing of the light beams, finally converging the light beams at the second slit, and entering the next module.

Preferably, the re-imaging module comprises a third collimating lens, a third light splitting element, a third imaging lens and an area array detector, and the same optical path structure of a common imaging spectrometer can be adopted.

(III) advantageous effects

Compared with the prior art, the utility model has the following beneficial effects:

(1) the three independent linear dispersion imaging optical paths are cascaded to form a spectrum confocal measuring system with a linear view field, namely the processes of linear view field spectral imaging, linear spectrum optical compounding and linear view field secondary spectral imaging are achieved, high spatial resolution and high spectral resolution are achieved simultaneously, detection of two-dimensional spatial information is obtained by photographing once, namely spatial distribution of slit linear view field directions and height information of the object surface reflected by wavelengths of different positions of a focal plane are obtained, and then three-dimensional spatial distribution is formed through one-dimensional push scanning to achieve 3D shape measurement. The three dispersion imaging optical paths can be independently adjusted and tested, and the system structure is simplified.

(2) Utility model's two chromatic dispersion imaging module among the confocal measurement system of line scanning spectrum, line spectrum chromatic dispersion module and line spectrum receiving module are symmetrical structure promptly, and the component is unanimous, easily the dress transfers, saves the cost.

(3) The light splitting devices of the line dispersion module and the line spectrum receiving module adopt prism-grating combination to realize small spectral line bending and linear uniform dispersion, and realize light splitting imaging with axial dispersion through the off-axis design of a light path, so that a spectral imaging plane is perpendicular to the surface of an object to be measured by inclining the light path at a small angle, and slit images with different wavelengths are positioned at different high and low positions.

Drawings

FIG. 1 is a schematic diagram of a line spectrum confocal measurement system according to the present invention.

Fig. 2 is a schematic structural diagram of the prism-grating light splitting element.

Fig. 3 is a dispersive imaging optical path structure.

Fig. 4 is a symmetrical structure of the line dispersion module and the line spectrum reception module.

Fig. 5 is a schematic view of a dispersive imaging surface.

In the figure: 1. a condenser lens; 2. a first slit; 3. a first collimating mirror; 4. a first light splitting element; 5. a first imaging mirror; 6. a spectral imaging plane; 7. a second imaging mirror; 8. a second light splitting element; 9. a second collimating mirror; 10. a second slit; 11. a third collimating mirror; 12. a third light splitting element; 13. a third imaging mirror; 14. an area array detector.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Examples

Referring to fig. 1-5, a line-scan spectral copolymerization measurement system includes an illumination module, a line dispersion module, a line spectrum reception module, and a re-imaging module.

The illumination module comprises a white light source and a condenser lens 1, wherein the light source adopts the white light source, the light radiation flux is higher at 450-700 nm, the illumination in a visible light range is provided, and the utilization rate of light energy is improved through the condenser lens 1.

The linear dispersion module comprises a slit I2, a collimating mirror I3, a light splitting element I4 and an imaging mirror I5, wherein the slit I2, the collimating mirror I3, the light splitting element I4 and the imaging mirror I5 are sequentially distributed from high to low downwards, a linear field of view beam formed by the slit I2 is collimated and split, the linear field of view beam is imaged at a position away from the last lens by a certain distance, linear beam dispersion with axial components is formed at the position, dispersion images of different wavelengths of the slit I2 can be distributed at different high and low positions,

the line spectrum receiving module comprises an imaging mirror II 7, a beam splitting element II 8, a collimating mirror II 9 and a slit II 10, the imaging mirror II 7, the beam splitting element II 8, the collimating mirror II 9 and the slit II 10 are sequentially distributed from low to high upwards, the line spectrum receiving module is bilaterally symmetrical relative to the line dispersion module, the elements are in opposite sequence and are responsible for receiving reflected or scattered light beams with different wavelengths at different high and low positions, light receiving, light combining and light gathering of the light beams are sequentially completed, and the light beams are finally gathered at the slit II 10 and enter the next module.

The first slit 2 and the second slit 10 are made of photo-etching chromium plates, are uniform and have no burrs or gaps. The first collimating mirror 3 and the second collimating mirror 9 adopt a lens group structure to provide collimated beams of the first slit 2 and the second slit 10, and aberration is small. The first light splitting element 4 and the second light splitting element 8 are of PGP structures formed by gluing prisms, gratings and prisms, and uniform dispersion, deflection of light paths and small spectral distortion are achieved. The first imaging mirror 5 and the second imaging mirror 7 are realized by double cemented mirrors and are used in an off-axis mode, and the structure of the optical imaging mirror can be further complicated for realizing high-quality imaging.

The re-imaging module comprises a collimating mirror III 11, a light splitting element III 12, an imaging mirror III 13 and an area array detector 14, and can adopt the same optical path structure of a common imaging spectrometer.

The first light splitting element 4, the second light splitting element 8 and the third light splitting element 12 are all realized by combining a prism and a grating, and can specifically adopt a form of prism + grating or prism + grating + prism. The parallel light beams are deflected after passing through the prism and then are subjected to dispersion and light splitting through the grating. The transmission grating adopts a plane etching or plane holographic grating, and the problem of spectral line bending is corrected by selecting a proper grating incidence angle and a prism vertex angle through calculation according to a spectral range, grating etching density and a prism material, so that the difficulty of instrument calibration and image processing is reduced. Fig. 2 shows the structure of prism + grating.

The line dispersion module, the line spectrum receiving module and the re-imaging module are all light splitting imaging optical paths, the line dispersion module and the line spectrum receiving module are shown in fig. 3, the wavelength range is 450nm-700nm, and the optical path parameters are shown in table 1. The prism is a right-angled triangle, and the grating lines are 400 lines per millimeter; the collimated light is dispersed by the light splitting element, the dispersed light beams pass through the imaging lens to generate slit images of various wavelengths to form a spectrum imaging surface 6, the relationship between the distance between the light beams of various wavelengths and the wavelength has a linear trend, and R2 is 0.9979. A measurement range of 14.26mm, a field of view of 8.4mm long is achieved in the spectral dimension, the optical distance of the center wavelength is 50mm, and the angle of the center ray of the center wavelength to the spectral plane is 44.6 degrees.

The spectroscopic imaging optical path of the re-imaging module can adopt the optical path form of a common imaging spectrometer, such as a C-T structure or an Offner concentric optical structure.

Description of the attached tables:

table 1 shows the spectroscopic imaging optical path parameters of the present invention.

Figure DEST_PATH_RE-GDA0003421098050000051

Figure DEST_PATH_RE-GDA0003421098050000061

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A linear scanning spectrum copolymerization measurement system is characterized in that: the line dispersion module, the line spectrum receiving module and the re-imaging module are all light splitting imaging light paths.

2. The system for linear scanning spectrum copolymerization measurement according to claim 1, wherein: the spectral confocal measuring system with the linear view field is formed by cascading three independent linear dispersion imaging optical paths.

3. The system for linear scanning spectrum copolymerization measurement according to claim 1, wherein: the line dispersion module comprises a first slit (2), a first collimating mirror (3), a first light splitting element (4) and a first imaging mirror (5), wherein the first slit (2), the first collimating mirror (3), the first light splitting element (4) and the first imaging mirror (5) are sequentially distributed downwards from high to low, a line field light beam formed by the first slit (2) is collimated and then split, the light beam is imaged at a position away from the last lens by a certain distance, linear light beam dispersion with axial components is formed at the position, and the dispersion images of the first slit (2) with different wavelengths can be distributed at different high and low positions.

4. The system for linear scanning spectrum copolymerization measurement according to claim 1, wherein: the line spectrum receiving module comprises an imaging mirror II (7), a beam splitting element II (8), a collimating mirror II (9) and a slit II (10), the imaging mirror II (7), the beam splitting element II (8), the collimating mirror II (9) and the slit II (10) are distributed from low to high upwards in sequence, the line spectrum receiving module is symmetrical left and right relative to the line dispersion module, the elements are opposite in sequence, and the line spectrum receiving module is responsible for receiving reflection or scattering light beams with different wavelengths at different high and low positions, sequentially finishing light receiving, light combining and light condensation of the light beams, finally converging at the slit II (10) and entering the next module.

5. The system for linear scanning spectrum copolymerization measurement according to claim 1, wherein: the re-imaging module comprises a third collimating mirror (11), a third light splitting element (12), a third imaging mirror (13) and an array detector (14).