CN113820104A - Method for adjusting interference inspection light path of meniscus lens - Google Patents
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Abstract
The invention provides an adjusting method of a meniscus lens interference inspection light path, which is characterized in that a CGH is adjusted to align a laser interferometer and the CGH, the alignment state of the laser interferometer and the CGH is kept unchanged, and the auxiliary spherical surface is adjusted according to the position of an auxiliary spherical surface cross line projected on the auxiliary spherical surface by the CGH, so that the stripes of an alignment area of the auxiliary spherical surface detected on the CGH are adjusted to be zero stripes and have no obvious defocusing; and adjusting the meniscus lens according to the meniscus lens cross line projected by the CGH, so that the stripes of an alignment area near the center of the concave surface of the meniscus lens detected on the CGH are adjusted to be zero stripes without obvious defocusing. The method adopts the same CGH to realize the reference unification of all elements in the interference inspection light path, avoids errors caused in the reference transmission process, uniformly divides the adjustment and alignment process of each element into coarse alignment and fine alignment, is convenient and quick in adjustment process, and has low cost, high precision and good universality in the whole adjustment process.
Description
Technical Field
The invention belongs to the technical field of meniscus lens interference inspection, and particularly relates to a method for adjusting a meniscus lens interference inspection light path.
Background
The meniscus lens is often used in a telescope to achieve the purposes of shortening the length of a lens cone and increasing the field of view, is an important optical element for a modern large-caliber telescope, and the manufacturing precision of the meniscus lens directly determines the comprehensive imaging performance of the telescope.
The detection precision directly determines the manufacturing precision of the optical element, and in the process of developing the meniscus lens, interference inspection is often used as a high-precision detection means in the high-precision manufacturing of the meniscus lens. However, the meniscus lens has a steep gradient, a high sensitivity in the optical path, a high difficulty in adjusting the interference inspection optical path, and a relatively low efficiency and precision in adjusting the interference optical path, and thus has become a technical bottleneck to be solved in the high-precision manufacturing of the meniscus lens.
Because the adjustment precision requirement of the interference inspection light path of the meniscus lens is high, at present, the interference inspection light path adjustment method of the meniscus lens mainly comprises three modes of measurement by using a high-precision steel ruler or a standard length rod, auxiliary measurement by using a commercial laser tracker and high-precision measurement by using a grating ruler or a centering instrument. When a high-precision steel ruler is used for measurement, the steel ruler cannot accurately measure the distance from the compensation element to the meniscus lens, and a manual operation estimation reading mode is adopted, so that the risk of scratching the surface of the meniscus lens is high, and the detection precision is low; the standard length rod can only measure the value of the standard length, and the high-precision measurement cannot be carried out on the interference detection light paths of different meniscus lenses, so that the method has low universality; when a commercial laser tracker is used for directly measuring the distance from a compensation element to a meniscus lens, the highest measurement precision is about 0.02mm, and the measurement precision is not high enough in the high-precision adjustment field of certain interference light paths; the grating ruler or the centering instrument can be used for realizing high-precision measurement of the distance between interference detection light paths, but the grating ruler or the centering instrument is complex in equipment, expensive in price and poor in universality.
Disclosure of Invention
The invention provides a method for adjusting an interference inspection light path of a meniscus lens, aiming at solving the defects of low efficiency and low precision of adjustment of the interference inspection light path of the meniscus lens. In order to achieve the purpose, the invention adopts the following specific technical scheme:
a method for adjusting a meniscus lens interference test light path comprises the following steps:
s1, adjusting the positions of the laser interferometer, the calculation hologram and the auxiliary spherical surface, and enabling the auxiliary spherical surface cross line projected on the auxiliary spherical surface by the calculation hologram to be positioned at the edge of the auxiliary spherical surface;
s2, adjusting the auxiliary spherical surface, adjusting the stripes in the first alignment area on the computed hologram to zero stripes, and determining the position of the auxiliary spherical surface when the defocusing amount of the auxiliary spherical surface is within a first preset value;
s3, placing the concave spherical surface of the meniscus lens on the optical axis between the computation hologram and the auxiliary spherical surface along the incident direction of the incident light, and adjusting the meniscus lens to make the meniscus of the meniscus lens projected on the meniscus lens by the computation hologram be located at the edge of the meniscus lens;
and S4, adjusting the meniscus lens, adjusting the stripes in the second alignment area on the computer generated hologram to be zero stripes, and enabling the defocusing amount of the meniscus lens to be within a second preset value.
Preferably, step S1 is preceded by the steps of:
s0, designing the interference inspection light path of the meniscus lens by using optical design software:
the convex surface of the meniscus lens is aligned with the auxiliary spherical surface, so that the convergent spherical wave generated by the reflection of the auxiliary spherical surface passes through the meniscus lens and then is converged at the focus of the laser interferometer;
inserting the calculation hologram between the meniscus lens and the focal point of the laser interferometer according to the size of the calculation hologram and the surface shape of the calculation hologram, and respectively adjusting the distance between the focal point of the laser interferometer and the calculation hologram, the distance between the calculation hologram and the meniscus lens and the distance between the meniscus lens and the auxiliary spherical surface;
and establishing an evaluation function which enables the wave front root mean square of the interference inspection light path of the meniscus lens to be minimum, and optimizing the surface shape of the computed hologram, the interval between the focal point of the laser interferometer and the computed hologram, the interval between the computed hologram and the meniscus lens, and the interval between the meniscus lens and the auxiliary spherical surface to obtain the interference inspection light path of the meniscus lens.
Preferably, the profile of the computer generated hologram is a Zernike Fringe Phase profile, which is optimized for terms 4, 9, 16, 25, 36, and 37.
Preferably, the aperture and the radius of curvature of the auxiliary spherical surface are such that the light beam reflected by the auxiliary spherical surface covers the range of apertures of the convex and concave surfaces of the meniscus lens.
Preferably, step S1 includes the steps of:
s101, sequentially placing a calculation hologram and an auxiliary spherical surface along the light outgoing direction of a laser interferometer, so that the optical axes of the laser interferometer, the calculation hologram and the auxiliary spherical surface are coaxial;
s102, adjusting the calculation hologram to enable the light beam emitted by the laser interferometer to form interference fringes in the laser interferometer after being reflected by a third alignment area on the calculation hologram so as to complete alignment of the laser interferometer and the calculation hologram;
s103, adjusting the auxiliary spherical surface according to the position of the auxiliary spherical surface cross line projected on the auxiliary spherical surface by the computer-generated hologram, so that the auxiliary spherical surface cross line is positioned at the edge of the auxiliary spherical surface.
Preferably, the center of the auxiliary spherical cross is located at the edge of the auxiliary spherical surface; the center of the meniscus is at the edge of the meniscus.
Preferably, the computer hologram comprises a first outer ring and a second outer ring located within the first outer ring:
the first outer ring comprises a third alignment region for aligning the laser interferometer with the computed hologram;
the second outer ring includes a first alignment area and at least two auxiliary spherical reticle areas:
the auxiliary spherical reticle area comprises a first auxiliary spherical reticle area and a second auxiliary spherical reticle area; the position of the first auxiliary spherical cross line region and the position of the second auxiliary spherical cross line region are rotationally symmetric relative to the center of the computer-generated hologram, and the rotational symmetric angle is 45 degrees or 135 degrees;
the first alignment area is used for aligning the computed hologram with the auxiliary spherical surface;
the auxiliary spherical reticle area is used to generate an auxiliary spherical reticle.
Preferably, the second alignment area is located at the center of the computational hologram, and the second alignment area is a circular area for alignment of the computational hologram with the concave surface of the meniscus lens.
Preferably, at least two meniscus lens cross regions are designed within a preset range of the outer periphery of the second alignment region;
the meniscus lens reticle region includes a first meniscus lens reticle region and a second meniscus lens reticle region; the positions of the first meniscus lens reticle region and the second meniscus lens reticle region are rotationally symmetric with respect to the center of the computer generated hologram, and the rotational symmetry angle is 45 degrees or 135 degrees;
the meniscus lens reticle field is used to generate a meniscus lens reticle.
Preferably, a main area is arranged between the second alignment area and the second outer ring;
the main area is used for detecting the transmission wavefront of the meniscus lens;
the area of the meniscus lens reticle is located within the primary region.
The invention can obtain the following technical effects:
1. different cross lines and auxiliary alignment areas are designed through the same CGH, in the process of adjusting the interference inspection light path, coarse alignment and fine alignment with an auxiliary spherical surface and coarse alignment and fine alignment near the center of the concave surface of the meniscus lens are sequentially achieved, and finally quick high-precision adjustment of the interference inspection light path of the meniscus lens is achieved.
2. The same CGH is adopted to realize the unification of the reference of all the elements in the interference detection light path, the error caused in the reference transmission process is avoided, the adjustment and alignment process of each element is divided into coarse alignment and fine alignment, the adjustment process is convenient and quick, and the whole adjustment process has low cost, high precision and good universality.
Drawings
Fig. 1 is a flowchart of a method for adjusting an interferometric inspection beam path of a meniscus lens according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an apparatus for adjusting an interferometer, a computational hologram, and an auxiliary sphere according to one embodiment of the invention;
FIG. 3 is a schematic diagram of an apparatus for adjusting an interferometric inspection beam path of a meniscus lens, in accordance with an embodiment of the present invention;
FIG. 4 is a distribution diagram of regions on a computed hologram according to one embodiment of the invention.
Reference numerals:
a laser interferometer 1, a computer hologram 2, an auxiliary spherical surface 3, a meniscus lens 4,
A first alignment region 5, a second alignment region 6, a third alignment region 7, a main region 8,
A first auxiliary spherical reticle region 9, a second auxiliary spherical reticle region 10, a third auxiliary spherical reticle region 11, a fourth auxiliary spherical reticle region 12,
A first meniscus lens reticle field 13, a second meniscus lens reticle field 14, a third meniscus lens reticle field 15, a fourth meniscus lens reticle field 16.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention aims to provide an adjusting method of a meniscus lens interference inspection light path, which utilizes different cross lines and auxiliary alignment areas designed on a computer hologram to sequentially realize coarse alignment and fine alignment with an auxiliary spherical surface and coarse alignment and fine alignment near the center of a concave surface of a meniscus lens in the process of adjusting the interference inspection light path, and finally realizes quick high-precision adjustment of the meniscus lens interference inspection light path. The following will describe in detail an adjustment method of an interference check optical path provided by the present invention by using specific embodiments.
Before the interference inspection light path of the meniscus lens is adjusted by using the adjustment method of the interference inspection light path of the meniscus lens, the surface shape parameters of the auxiliary spherical surface need to be designed according to the surface shape parameters of the meniscus lens to be inspected, and a calculation hologram needs to be designed. The specific design is as follows:
s0, designing a meniscus lens interference inspection light path:
the convex surface of the meniscus lens is aligned with the auxiliary spherical surface, and the convergent spherical wave generated by the auxiliary spherical surface passes through the meniscus lens and then is converged at the focus of the laser interferometer;
therefore, the aperture and the curvature radius of the auxiliary spherical surface are designed to enable the light beam reflected by the auxiliary spherical surface to cover the aperture range of the convex surface and the concave surface of the meniscus lens.
Setting the surface shape of the computer hologram as Zernike Fringe Phase and setting the terms 4, 9, 16, 25, 36 and 37 of Zernike polynomials as variables in the optical design software;
inserting a calculation hologram between a focus of a laser interferometer and a meniscus lens according to the size of the calculation hologram, establishing an evaluation function which minimizes the Root Mean Square (RMS) value of the wavefront of a meniscus lens interference inspection optical path in optical design software, and optimizing items 4, 9, 16, 25, 36 and 37 of a Zernike polynomial by adjusting three variables of the interval from the focus of the laser interferometer to the calculation hologram, the interval from the calculation hologram to the meniscus lens and the interval from the meniscus lens to an auxiliary spherical surface.
In a preferred embodiment of the invention, a computer hologram is designed as shown in fig. 4, which, with reference to fig. 4, comprises a first outer ring and a second outer ring:
the first outer ring is a third alignment area 7 used for aligning the laser interferometer 1 with the computer generated hologram 2;
the second outer ring is positioned in the first inner ring and comprises a first alignment area 5 and an auxiliary spherical cross line area, the first alignment area 5 is used for calculating alignment of the hologram 2 and the auxiliary spherical surface 3, and the auxiliary spherical cross line area is used for enabling laser emitted by the laser interferometer 1 to pass through the area and project on the auxiliary spherical surface 3 to generate an auxiliary spherical cross line.
The number of auxiliary spherical cross sections is at least two, the position of the first auxiliary spherical cross section 9 and the position of the second auxiliary spherical cross section 10 being rotationally symmetrical with respect to the center of the computer hologram 2, the rotational symmetry angle being 45 ° or 135 °.
Preferably, four auxiliary spherical cross line regions are provided, the centers of the first, second, third and fourth auxiliary spherical cross line regions 9, 10, 11 and 12 being respectively located at the end points of any two diameters perpendicular to each other of the calculation hologram 2.
In a preferred embodiment of the invention, the computed hologram 2 further comprises a second alignment area 6 located at the center of the computed hologram 2, the second alignment area 6 being a circular area for computing the alignment of the hologram 2 with the concave surface of the meniscus lens 4.
A meniscus lens cross line area is designed on the periphery of the second alignment area 6, and is used for projecting and generating a meniscus lens cross line on the concave surface of the meniscus lens 4 when laser emitted by the laser interferometer 1 passes through the area;
the number of meniscus lens cross fields is at least two, the first meniscus lens cross field 13 and the second meniscus lens cross field 14 are positioned rotationally symmetrical with respect to the centre of the computer hologram 2, the rotational symmetry angle being 45 ° or 135 °.
Preferably, four 4mm x 8mm sized regions of meniscus lens reticle are provided, the centers of the first 13, second 14, third 15 and fourth 16 meniscus lens reticle regions being located at any two mutually perpendicular end points from the second alignment region 9, respectively.
In a preferred embodiment of the present invention, the second alignment area 6 and the second outer ring intermediate area are the primary area 8, and the meniscus area is located in the primary area 8, so that the primary area 8 can be used to detect the transmitted wavefront of the meniscus lens 4.
Fig. 1 is a flow chart of the detection of the interferometric test beam path of the meniscus lens using the computed hologram and the auxiliary sphere in the preferred embodiment described above, and is schematically illustrated in conjunction with the adjustment apparatus shown in fig. 2, including the following steps:
s1, adjusting the positions of the laser interferometer, the calculation hologram and the auxiliary spherical surface, and enabling the auxiliary spherical surface cross line projected on the auxiliary spherical surface by the calculation hologram to be positioned at the edge of the auxiliary spherical surface;
the step S1 can be understood as the coarse adjustment of the auxiliary sphere 3 by using the computer generated hologram 2, specifically:
s101, sequentially placing a laser interferometer 1, a calculation hologram 2 and an auxiliary spherical surface 3, and enabling the optical axes of the laser interferometer 1, the calculation hologram 2 and the auxiliary spherical surface 3 to be coaxial by adjusting respective fixed adjusting devices (not shown in the figure);
s102, adjusting the computed hologram 2 to enable light beams emitted by the laser interferometer 1 to be reflected by a third alignment area 7 on the computed hologram 2 and then form interference fringes in the laser interferometer 1 to complete alignment of the laser interferometer 1 and the computed hologram 2;
s103, keeping the positions of the laser interferometer 1 and the computation hologram 2 unchanged, and adjusting the auxiliary spherical surface 3 according to the positions of the four auxiliary spherical surface crosses projected on the auxiliary spherical surface 3 by the computation hologram 2 so that the four auxiliary spherical surface crosses are positioned at the four edges of the auxiliary spherical surface 3.
In a preferred embodiment of the present invention, the corresponding first auxiliary spherical reticle, second auxiliary spherical reticle, third auxiliary spherical reticle and fourth auxiliary spherical reticle projected onto the auxiliary spherical surface 3 through the first auxiliary spherical reticle area 9, the second auxiliary spherical reticle area 10, the third auxiliary spherical reticle area 11 and the fourth auxiliary spherical reticle area 12 are located at the four edges of the auxiliary spherical surface 3;
preferably, the center of the cross on the first auxiliary spherical cross coincides with the circumferential line of the auxiliary spherical surface 3; the center of the cross on the second auxiliary spherical cross line is overlapped with the circumferential line of the auxiliary spherical surface 3, so that the adjustment precision is improved. In an ideal state, the centers of the crosses on the four auxiliary spherical cross lines are simultaneously superposed with the circumferential lines of the auxiliary spherical surfaces 3, and the adjustment precision is highest at this time.
S2, adjusting the auxiliary spherical surface, and adjusting the fringes in the first alignment area on the computed hologram to zero fringes and the defocusing amount to be within a first preset value;
step S2 can be understood as performing fine adjustment on the auxiliary spherical surface 3 by using the computer generated hologram 2, and detecting the defocus amount of the auxiliary spherical surface 3 on the first alignment area 5 by using the laser interferometer 1, where the smaller the defocus amount of the auxiliary spherical surface 3 is, the higher the adjustment accuracy is, so that the stripes in the first alignment area 5 are adjusted to zero stripes and no obvious defocus exists according to the actual situation, and the determination of the position of the auxiliary spherical surface 3 is completed at this time.
Referring to fig. 3, a schematic diagram of the adjustment device after adding the meniscus lens is shown:
s3, the concave spherical surface of the meniscus lens to be detected is placed on the optical axis between the computation hologram and the auxiliary spherical surface along the direction of the incident light, and the meniscus lens is adjusted so that the meniscus lens cross line projected on the meniscus lens by the computation hologram is positioned at the edge of the meniscus lens.
Step S3 may be understood as performing coarse adjustment on the meniscus lens 4 by using the computer hologram 2, specifically, keeping the positions of the laser interferometer 1, the computer hologram 2, and the auxiliary spherical surface 3 unchanged, placing the concave surface of the meniscus lens 4 to be detected on the optical axis between the computer hologram 2 and the auxiliary spherical surface 3 along the incident direction of the laser light emitted from the laser interferometer 1, and adjusting the meniscus lens 4 according to the positions of the four meniscus lens crosses projected on the meniscus lens 4 by the laser light through the meniscus lens cross region, so that the four meniscus lens crosses are located at the four edges of the meniscus lens 4.
In a preferred embodiment of the present invention, the first meniscus lens reticle, the second meniscus lens reticle, the third meniscus lens reticle and the fourth meniscus lens reticle projected onto the meniscus lens 4 through the first meniscus lens reticle region 13, the second meniscus lens reticle region 14, the third meniscus lens reticle region 15 and the fourth meniscus lens reticle region 16 are positioned at four edges of the meniscus lens;
preferably, the center of the cross of the first meniscus lens cross coincides with the circumference of the meniscus lens 4; the center of the cross of the second meniscus lens cross coincides with the circumference of the meniscus lens 4, and in an ideal state, the centers of the cross of the four meniscus lens crosses coincide with the circumference of the meniscus lens 4 at the same time, so that the adjustment accuracy is highest.
S4, adjusting the meniscus lens, adjusting the fringes in the second alignment area on the computed hologram to be zero fringes and the defocusing amount to be within a second preset value;
step S4 can be understood as performing fine adjustment on the meniscus lens 4 by using the computer generated hologram 2, and detecting the defocus amount of the concave spherical surface of the meniscus lens 4 on the second alignment area 6 by using the laser interferometer 1, where the defocus amount of the concave spherical surface on the meniscus lens 4 is smaller, the adjustment precision is higher, and thus according to the actual situation, the fringes in the second alignment area 6 are adjusted to be zero fringes and have no obvious defocus, and thus the adjustment of the interference inspection optical path of the meniscus lens is completed.
In another embodiment of the present invention, a corresponding detection pattern is scribed in the main region 8, and after the adjustment of the interference inspection optical path of the meniscus lens is completed, interference detection may be performed on the transmitted wavefront of the meniscus lens 4 (detecting the lens by using a computer generated hologram is a prior art and is not described in detail).
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are illustrative and not restrictive, and that various changes, modifications, substitutions and alterations can be made herein by those having ordinary skill in the art without departing from the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A method for adjusting a meniscus lens interference test light path is characterized by comprising the following steps:
s1, adjusting the positions of the laser interferometer, the calculation hologram and the auxiliary spherical surface to enable the auxiliary spherical surface cross line projected on the auxiliary spherical surface by the calculation hologram to be positioned at the edge of the auxiliary spherical surface;
s2, adjusting the auxiliary spherical surface, adjusting the stripes in the first alignment area on the calculation hologram to be zero stripes, and determining the position of the auxiliary spherical surface when the defocusing amount of the auxiliary spherical surface is within a first preset value;
s3, placing the concave spherical surface of the meniscus lens on the optical axis between the computation hologram and the auxiliary spherical surface along the incident direction of the incident light, and adjusting the meniscus lens to enable the meniscus of the meniscus lens projected on the meniscus lens by the computation hologram to be positioned at the edge of the meniscus lens;
s4, adjusting the meniscus lens, adjusting the stripes in the second alignment area on the computer generated hologram to be zero stripes, and enabling the defocusing amount of the meniscus lens to be within a second preset value.
2. The method for adjusting an interferometric inspection beam path of a meniscus lens according to claim 1, characterized in that the step S1 is preceded by the following steps:
s0, designing the interference inspection light path of the meniscus lens by using optical design software:
aligning the convex surface of the meniscus lens with the auxiliary spherical surface, so that a convergent spherical wave generated by reflection of the auxiliary spherical surface passes through the meniscus lens and then converges at the focal point of the laser interferometer;
inserting the calculation hologram between the meniscus lens and the focal point of the laser interferometer according to the size of the calculation hologram and the surface shape of the calculation hologram, and respectively adjusting the interval between the focal point of the laser interferometer and the calculation hologram, the interval between the calculation hologram and the meniscus lens, and the interval between the meniscus lens and the auxiliary spherical surface;
and establishing an evaluation function which enables the root mean square of the wavefront of the interference inspection light path of the meniscus lens to be minimum, and optimizing the surface shape of the calculation hologram, the interval between the focal point of the laser interferometer and the calculation hologram, the interval between the calculation hologram and the meniscus lens and the interval between the meniscus lens and the auxiliary spherical surface to obtain the interference inspection light path of the meniscus lens.
3. A method of adjusting an optical path for interference inspection by a meniscus lens according to claim 2, wherein the surface shape of the computation hologram is a Zernike Fringe Phase surface shape, and items 4, 9, 16, 25, 36 and 37 of the Zernike Fringe Phase surface shape are optimized.
4. A method as claimed in claim 1 or 2, wherein the aperture and the radius of curvature of the auxiliary spherical surface are such that the light beam reflected by the auxiliary spherical surface covers the aperture range of the convex surface and the concave surface of the meniscus lens.
5. The method for adjusting an interferometric inspection optical path of a meniscus lens according to claim 1, characterized in that the step S1 includes the steps of:
s101, sequentially placing the calculation hologram and the auxiliary spherical surface along the light outgoing direction of the laser interferometer to enable the optical axes of the laser interferometer, the calculation hologram and the auxiliary spherical surface to be coaxial;
s102, adjusting the calculation hologram to enable a light beam emitted by the laser interferometer to form interference fringes in the laser interferometer after being reflected by a third alignment area on the calculation hologram so as to complete alignment of the laser interferometer and the calculation hologram;
s103, adjusting the auxiliary spherical surface according to the position of the auxiliary spherical surface cross line projected on the auxiliary spherical surface by the computer-generated hologram, so that the auxiliary spherical surface cross line is positioned at the edge of the auxiliary spherical surface.
6. The method for adjusting an interferometric inspection beam path of a meniscus lens according to claim 1, characterized in that the center of the cross of the auxiliary sphere is located at the edge of the auxiliary sphere; the center of the meniscus lens reticle is located at the edge of the meniscus lens.
7. A method of adjusting a meniscus lens interferometric inspection beam path, according to claim 1, wherein the computed hologram comprises a first outer ring and a second outer ring within the first outer ring:
the first outer ring comprises the third alignment region for aligning the laser interferometer with the computational hologram;
the second outer ring includes the first alignment area and at least two auxiliary spherical reticle areas:
the auxiliary spherical reticle area comprises a first auxiliary spherical reticle area and a second auxiliary spherical reticle area; the position of the first auxiliary spherical reticle region and the position of the second auxiliary spherical reticle region are rotationally symmetric with respect to the center of the computational hologram, the rotational symmetry angle being 45 ° or 135 °;
the first alignment area is for aligning the computational hologram with the auxiliary sphere;
the auxiliary spherical reticle region is used to generate the auxiliary spherical reticle.
8. A method of adjusting an interferometric examination beam path using a meniscus lens according to claim 1, characterized in that the second alignment area is located in the center of the computer generated hologram and the second alignment area is a circular area for alignment of the computer generated hologram with the concave surface of the meniscus lens.
9. A method of adjusting an optical path for interferometric inspection using a meniscus lens according to claim 1, wherein at least two meniscus regions are designed within a predetermined range of the outer circumference of the second alignment region;
the meniscus lens reticle area comprises a first meniscus lens reticle area and a second meniscus lens reticle area; the positions of the first meniscus lens reticle region and the second meniscus lens reticle region are rotationally symmetric with respect to the center of the computed hologram, the rotational symmetry angle being 45 ° or 135 °;
the meniscus lens reticle field is used to generate the meniscus lens reticle.
10. The method of adjusting an interferometric inspection beam path of a meniscus lens of claim 9, wherein a primary region is between the second alignment region and the second outer ring;
the main area is used for detecting the transmission wave front of the meniscus lens;
the meniscus lens reticle area is located within the primary area.
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| CN116839505A (en) * | 2023-08-31 | 2023-10-03 | 中国科学院长春光学精密机械与物理研究所 | On-orbit real-time detection method and system for primary mirror of spliced space optical telescope |
| CN117075293A (en) * | 2023-10-17 | 2023-11-17 | 长春长光智欧科技有限公司 | Submicron-level multi-ring-belt multilevel alignment detection device and method for calculating hologram |
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