CN112923871A - Free-form surface reflector curvature radius detection device and method - Google Patents
Free-form surface reflector curvature radius detection device and method Download PDFInfo
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- CN112923871A CN112923871A CN202110354887.4A CN202110354887A CN112923871A CN 112923871 A CN112923871 A CN 112923871A CN 202110354887 A CN202110354887 A CN 202110354887A CN 112923871 A CN112923871 A CN 112923871A
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention belongs to the technical field of mirror surface detection, and provides a CGH compensator and a free-form surface reflector curvature radius detection device based on the CGH compensator, which can detect a lens losing rotation symmetry. The curvature radius error of the lens to be detected is obtained by obtaining the data of the mirror surface to be detected and the defocusing amount and calculating according to the defocusing amount, and the measured values of all the areas are synthesized by utilizing a curvature error formula to obtain the curvature radius error and the curvature radius of the lens to be detected.
Description
Technical Field
The invention belongs to the technical field of mirror surface detection, and particularly relates to a CGH compensator, and a device and a method for realizing the detection of the curvature radius of a free-form surface reflector by using the CGH compensator.
Background
The radius of curvature is one of the important parameters of an optical element, and its accuracy affects the performance of the optical system. The measurement accuracy of the curvature radius directly affects other optical parameters, and further affects the imaging quality of the optical system. Therefore, high-precision measurement of the radius of curvature of an optical element is an extremely important link. However, factors influencing the measurement accuracy of the curvature radius are numerous, so that high-accuracy curvature radius measurement is always a difficult problem in optical detection.
There are many methods for measuring the radius of curvature, and the measurement methods are mainly classified into contact measurement and non-contact measurement. The contact measurement method includes a template method, a Newton ring method, a sphere diameter method, a three-coordinate measurement method, a laser tracker method and the like. Contact measurement methods have a wide measurement range, but these methods need to contact the measured optical element during the measurement process, and are prone to scratching the measured surface, so that the application is limited to a certain extent. The non-contact measurement mainly comprises a knife edge shadow method, an auto-collimation microscope method, a laser interferometry method, a laser differential confocal method and the like. The knife edge shadow method is simple in measurement method, but has high requirements on the environment in the detection process, and requires that the detection environment has small vibration and is slightly dark. The auto-collimation microscopy measures the radius of curvature according to the auto-collimation technique, but the measurement accuracy of the method is limited by the focusing error and length measurement system of human eyes. The laser interferometry is the most widely used curvature radius measurement method at present, but the optical path of the laser interferometry is easily influenced by the detection environment and has weak interference resistance. The laser differential confocal method applies the differential confocal principle to the curvature radius measurement, and compared with other methods, the method has high focusing precision, but the measurement system is complex in device, can only be used for measuring the spherical curvature radius, and is not applicable to the measurement of the curvature radius of the central point of the aspheric surface which is widely used.
Disclosure of Invention
The invention provides a free-form surface reflector curvature radius detection device and method for solving the problem that the detection of a free-form surface mirror to be detected cannot be carried out in the prior art, the detection of the curvature radius of a spherical surface, an aspherical surface and a free-form surface vertex can be measured, the surface shape measurement of an optical element can be accurately realized, the detection of the curvature radius is also considered, the detection precision is higher, the device is simple, and the operation is simple and easy. In order to achieve the purpose, the invention adopts the following specific technical scheme:
a CGH compensator design method comprises the following steps:
s1, designing a main area, inputting parameters of the mirror to be inspected in optical design software, setting the surface shape of the main area as a Zernike phase, and optimizing by changing a Zernike coefficient and a distance parameter to enable the wave front to be zero;
s2, designing an alignment area, so that light rays are incident on the alignment area and reflected back by the CGH compensator, thereby judging the position relationship between the interferometer and the CGH compensator, changing the Zernike coefficient of the alignment area, and optimizing to make the wave front zero;
s3, designing a cat eye region, performing double-light-path light ray tracing according to parameters of the to-be-inspected mirror, the main region and the alignment region, enabling light passing through the cat eye region to be transmitted to the to-be-inspected mirror to symmetrically return, changing the Zernike coefficient, and optimizing to enable the wavefront to be zero.
Preferably, the alignment region is located in the outer annulus for aligning the CGH compensator and the interferometer;
the main area is positioned in the middle zone and is used for detecting the surface shape error and the defocusing amount of the lens to be detected;
the cat eye region is located in the inner annular band and used for detecting the distance deviation between the CGH compensator and the to-be-detected mirror.
Preferably, the main region is 180 ° rotationally symmetric.
A free-form surface reflector curvature radius detection device detects a free-form surface mirror to be detected by adopting an interferometer and comprises a standard mirror and a CGH compensator.
Preferably, the standard mirror is placed between the interferometer and the CGH compensator, and the mirror to be detected is placed on the other side of the CGH compensator;
the light emitted by the interferometer is emergent after passing through the standard mirror, the filter is placed at the focal point position of the emergent light beam, the light passing through the filter is incident on the CGH compensator, according to different areas of the CGH compensator, the light beam is reflected back to the interferometer or is incident on the mirror to be inspected after being transmitted by the CGH compensator, the surface shape and curvature radius error of the mirror to be inspected are detected through the main area, and the surface shape error and defocusing amount of the mirror to be inspected are obtained through analysis.
Preferably, the interferometer adjusting mechanism, the CGH adjusting mechanism and the to-be-detected mirror adjusting mechanism are used for respectively adjusting and enabling the interferometer, the CGH compensator and the to-be-detected mirror to be coaxial.
A method for detecting the curvature radius of a free-form surface reflector is characterized by comprising the following steps:
s1, aligning the CGH compensator and the interferometer: installing a standard mirror of the interferometer, adjusting the standard mirror and a light source of the interferometer to a common light path, and placing an aperture filter at the position of a light beam focus of the interferometer; the CGH compensator is designed according to the method, and the position of the CGH compensator relative to the interferometer is adjusted to enable an interference pattern in an alignment area to be zero stripe;
s2, aligning the CGH compensator and the mirror to be detected: keeping the relative position of the interferometer and the CGH compensator unchanged, and adjusting the position of the mirror to be detected to ensure that the light beam passing through the cat eye region reaches the mirror to be detected and symmetrically returns through the cat eye region;
and S3, calculating and acquiring the curvature radius of the to-be-examined mirror.
Preferably, the free-form surface inspection scope of the convex aspheric surface or the concave aspheric surface can be detected.
The invention can obtain the following technical effects:
1. the method effectively integrates the optical interference technology, the CGH compensator compensation optical path and the curvature radius detection principle, and effectively realizes the detection of the free-form surface shape and the curvature radius at the same time.
2. The method is not only suitable for measuring the curvature radius of the large-caliber free-form surface telescope, but also can control the position error of the to-be-detected mirror, and realizes the measurement of the curvature consistency of the sub-mirror of the spliced telescope.
Drawings
FIG. 1 is a schematic structural diagram of a free-form surface mirror curvature radius detection apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a CGH compensator in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of a conventional cat-eye region optical path;
FIG. 4 is a flow chart of a detection method according to an embodiment of the invention.
Reference numerals:
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention aims to provide a CGH compensator, and a device and a method for detecting the curvature radius of a free-form surface reflector by using the CGH compensator, which can detect the curvature radius of a spherical surface, an aspherical surface and a free-form surface vertex. The following describes a device and a method for detecting a curvature radius of a free-form surface mirror according to the present invention in detail by using specific embodiments.
The device for measuring the curvature radius of the optical element mainly comprises an interferometer 1, a CGH compensator 3, a corresponding adjusting mechanism and the like. Firstly, a CGH compensator 3 is designed and manufactured according to parameters of a lens 4 to be inspected, then a detection light path is built through the CGH compensator 3, the interferometer 1 and the CGH compensator 3 are adjusted to be aligned through interference fringes, then the relative position relation between the CGH compensator 3 and the lens 4 to be inspected is adjusted, after the adjustment is completed, the surface shape and curvature radius error of the lens 4 to be inspected can be detected through a main area 9 of the CGH compensator 3, and the surface shape error and the defocusing amount of the lens 4 to be inspected can be obtained through analysis.
The CGH compensator 3 as shown in fig. 2, comprising an alignment region 8, a main region 9 and a cat eye region 10, wherein the alignment region 8 is located in the outermost zone for aligning the CGH compensator 3 and the interferometer 1;
the main area 9 is positioned in the middle zone and is used for detecting the surface shape error and the defocusing amount of the lens 4 to be detected;
the cat eye region 10 is positioned in the inner annular zone, and the distance deviation between the CGH compensator 3 and the mirror 4 to be detected is detected;
the centre of the cat-eye region 10 coincides with the centre of the main region 9, or is not.
In a preferred embodiment of the invention, the CGH compensator 3 is designed by:
firstly, designing a main area 9, inputting parameters of a mirror 4 to be inspected in optical design software, setting the surface shape of the main area 9 as a Zernike phase, and optimizing by changing a Zernike coefficient and a distance parameter to enable the wave front to be zero;
secondly, designing an alignment area 8, so that light rays are incident on the alignment area 8 and are reflected back, thereby judging the position relationship between the interferometer 1 and the CGH compensator 3, changing the Zernike coefficient of the alignment area 8, and optimizing to enable the wave front to be zero;
and finally, designing a cat eye region 10, and performing double-light-path light ray tracing according to parameters of the to-be-inspected mirror 4, the main region 9 and the alignment region 8, so that light rays passing through the cat eye region 10 are transmitted to the to-be-inspected mirror 4 to symmetrically return, the Zernike coefficient is changed, and the wave front is optimized to be zero.
In another embodiment of the invention, the required CGH compensator 3 is inscribed on a substrate with a diameter of 150mm according to the optical design software design. When optical design software is optimized, the scribing accuracy of the CGH compensator 3 needs to be controlled within 1% accuracy.
In the optical path diagram of the cat eye region 10 of the conventional cat eye design, as shown in fig. 3, the cat eye point a is located at the center of the mirror surface of the objective lens 4 to be examined. Because the surface shape of the center of the lens 4 to be detected of the free-form surface is not necessarily vertical to the optical axis, so that the cat eye point A is not necessarily in the center of the lens surface of the lens 4 to be detected, the CGH compensator 3 shown in figure 2 is designed in the invention:
the cat eye point a (the intersection point of the light transmitted through the cat eye region 10 on the mirror 4 to be detected) is designed in an offset manner, and the light beam returns symmetrically through the cat eye region 10, so that the center of the cat eye region 10 can not coincide with the center of the main region 9, see fig. 1.
In a preferred embodiment of the invention, the main region 9 can be designed as an arbitrarily shaped region with 180 ° rotational symmetry.
Therefore, the invention is not only suitable for measuring the curvature radius of the large-caliber free-form surface telescope, but also can control the position error of the lens to be detected, and realizes the measurement of the curvature consistency of the sub-lens of the spliced telescope.
Fig. 1 shows a free-form surface reflector curvature radius detection device of the invention, which adopts an interferometer 1 to detect a free-form surface mirror 4 to be detected, and comprises a standard mirror 2, a CGH compensator 3, and an interferometer adjusting mechanism 5, a CGH adjusting mechanism 6 and a mirror to be detected adjusting mechanism 7 which are used for respectively adjusting and enabling the interferometer 1, the CGH compensator 3 and the mirror to be detected 4 to be coaxial.
Light emitted by the interferometer 1 is emitted after passing through the standard mirror 2, a filter is placed at the focus of the emitted light beam, the light passing through the filter is incident on the CGH compensator 3, the light beam is reflected back to the interferometer 1 or is transmitted to the mirror 4 to be inspected after passing through the CGH compensator 3 according to different areas of the CGH compensator 3, the surface shape and curvature radius error of the mirror 4 to be inspected are detected through the main area 9, and the surface shape error and the defocusing amount of the mirror 4 to be inspected can be obtained through analysis.
In a preferred embodiment of the present invention, as shown in the flow chart of the detection method shown in fig. 4, a suitable standard mirror 2 is selected, and a compensation optical path is constructed by using a CGH compensator 3:
s1, alignment CGH compensator 3 and interferometer 1:
adjusting the standard mirror 2 and the light source of the interferometer 1 to a common light path, and placing an aperture filter at the focus position of the light beam of the interferometer 1; adjusting the position of the CGH compensator 3 relative to the interferometer 1 to make the interferogram of the quasi-region 8 be zero fringe, namely realizing the accurate alignment of the CGH, wherein the RMS of the interferometer 1 is minimum;
s2, aligning the CGH compensator 3 and the mirror to be detected 4:
keeping the relative position of the interferometer 1 and the CGH compensator 3 unchanged, and adjusting the position of the to-be-detected mirror 4 to ensure that the light beam passing through the cat eye region 10 reaches the to-be-detected mirror 4 and symmetrically returns through the cat eye region 10, wherein the POWER value of the interferometer 1 is the minimum at the moment;
s3, calculating and acquiring the curvature radius of the to-be-examined mirror 4:
in another embodiment of the invention, taking the mirror 4 to be detected as a concave mirror as an example, the standard mirror 2 with F/number less than or equal to R/number is selected.
In another embodiment of the present invention, after removing errors such as translation, tilt, etc. from the surface data of the to-be-inspected mirror 4 obtained in step S3, the defocused data of the main region 9 is read out on interferometer acquisition software such as Metropro, the curvature radius error of the to-be-inspected mirror 4 is calculated according to the defocused amount, the full aperture position error is decoupled by using part of the errors of the cat eye region 10, and then the curvature radius synthesis formula and the ideal curvature radius value are used for synthesis to obtain the curvature radius of the to-be-inspected mirror 4.
In another embodiment of the present invention, the method for detecting the curvature radius of the free-form surface is affected by manufacturing errors of the CGH compensator 3, environment, adjustment errors during the detection process, and the like. The manufacturing error of the CGH compensator 3 is eliminated, and the precision analysis is carried out on the detection result of the invention under the condition of accurately controlling the detection environment, so that the precision of the detected curvature radius is better than 30 mu m, the error measurement range is more than 2mm, and the detection of the curvature radius of the aspheric surface reflector is met.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (8)
1. A design method of CGH compensator is characterized in that,
s1, designing a main area, inputting parameters of a mirror to be inspected in optical design software, setting the surface shape of the main area as a Zernike phase, and optimizing by changing a Zernike coefficient and a distance parameter to enable the wave front to be zero;
s2, designing an alignment area, so that light rays are incident on the alignment area and reflected back by the CGH compensator, thereby judging the position relationship between the interferometer and the CGH compensator, changing the Zernike coefficient of the alignment area, and optimizing to make the wave front zero;
s3, designing a cat eye region, performing double-light-path light ray tracing according to the parameters of the to-be-detected mirror, the main region and the alignment region, enabling light passing through the cat eye region to be transmitted to the to-be-detected mirror to symmetrically return, changing the Zernike coefficient, and optimizing to enable the wavefront to be zero.
2. The CGH compensator design method of claim 1, wherein the alignment region is located in an outer annulus for aligning the CGH compensator and the interferometer;
the main area is positioned in the middle zone and is used for detecting the surface shape error and the defocusing amount of the lens to be detected;
the cat eye region is located in the inner annular zone and used for detecting the distance deviation between the CGH compensator and the to-be-detected mirror.
3. The CGH compensator design method of claim 1, wherein the primary region is 180 ° rotationally symmetric.
4. A free-form surface reflector curvature radius detection device, which adopts an interferometer to detect a free-form surface mirror to be detected, and is characterized by comprising a standard mirror and a CGH compensator designed according to any one of claims 1 to 3.
5. The aspheric mirror curvature radius detection device according to claim 4, wherein the standard mirror is placed between the interferometer and the CGH compensator, and the mirror to be examined is placed on the other side of the CGH compensator;
the light that the interferometer sent is through emergent behind the standard mirror, and the focus position of emergent light beam places the wave filter, and the light that passes through the wave filter incides on the CGH compensator, according to the different region of CGH compensator, the light beam reflects back the interferometer or passes through incidenting after the CGH compensator transmission on waiting to examine the mirror, through main regional detection wait to examine mirror shape of face and curvature radius error, obtain through the analysis wait to examine the shape of face error and the defocus of mirror.
6. The apparatus for detecting radius of curvature of a free-form surface mirror according to claim 5, further comprising an interferometer adjusting mechanism, a CGH adjusting mechanism and a mirror to be inspected adjusting the interferometers, the CGH compensator and the mirror to be inspected to be coaxial, respectively.
7. A method for detecting the curvature radius of a free-form surface reflector is characterized by comprising the following steps:
s1, aligning the CGH compensator and the interferometer: installing a standard mirror of an interferometer, adjusting the standard mirror and a light source of the interferometer to a common light path, and placing an aperture filter at the position of a light beam focus of the interferometer; the CGH compensator is designed according to any one of claims 1-2, and the position of the CGH compensator relative to the interferometer is adjusted to make the interferogram of the alignment area be zero fringe;
s2, aligning the CGH compensator and the mirror to be detected: keeping the relative position of the interferometer and the CGH compensator unchanged, and adjusting the position of the mirror to be detected to enable the light beam passing through the cat eye region to reach the mirror to be detected and symmetrically return through the cat eye region;
and S3, calculating and acquiring the curvature radius of the to-be-examined mirror.
8. The method for detecting the radius of curvature of a free-form surface reflecting mirror according to claim 7, wherein a free-form surface inspection target having a convex aspherical surface or a concave aspherical surface can be detected.
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| 张学军: "高精度相位型计算全息图的设计", 《光学学报》 * |
| 田志辉: "曲率半径的高精度测量及其不确定度", 《光学精密工程》 * |
| 谢念: "基于计算全息光学元件的非球面检测技术应用研究", 《中国优秀博硕士学位论文全文数据库(硕士)工程科技Ⅱ辑》 * |
| 高松涛: "超高精度非球面面形检测技术研究", 《中国优秀博硕士学位论文全文数据库(博士)基础科学辑》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820104A (en) * | 2021-09-18 | 2021-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting interference inspection light path of meniscus lens |
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