CN117075293A - Submicron-level multi-ring-belt multilevel alignment detection device and method for calculating hologram - Google Patents
Submicron-level multi-ring-belt multilevel alignment detection device and method for calculating hologram Download PDFInfo
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- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The device and the method for detecting the multi-level alignment of the submicron-level multi-ring belt of the calculation hologram belong to the technical field of optical detection adjustment, and solve the problems that the existing adjustment method is complex, the adjustment precision is low, and the adjustment of an optical system with a large caliber and a long light path cannot be realized. The interferometer, the calculation holographic element, the first lens, the second lens, the third lens and the fourth lens are sequentially arranged and coaxially arranged; the first adjusting mechanism is fixed at two ends of the first lens; the second adjusting mechanism is fixed at two ends of the second lens; the third adjusting mechanism is fixed at two ends of the third lens; the fourth adjusting mechanism is fixed at two ends of the fourth lens; the first adjusting mechanism, the second adjusting mechanism, the third adjusting mechanism and the fourth adjusting mechanism are all fixed in the lens barrel shell. The detection device realizes submicron-level high-precision adjustment and is not limited by the caliber of the lens group and the length of the optical system.
Description
Technical Field
The application relates to the technical field of optical detection adjustment, in particular to a submicron-level multi-ring-belt multilevel alignment detection device and method for calculating holograms.
Background
The microscope objective is used as one of the most important optical devices in the gene sequencing instrument, and regarding the imaging performance of the whole optical system, the microscope objective needs excellent image quality to meet the high-resolution requirement of gene sequencing. Therefore, in addition to ensuring elimination of optical aberrations of conventional lenses, high NA numerical aperture, flat field curvature, apochromatic are also required, but because of tight tolerances of the optical system, errors in processing of the optical elements and adjustment of the optical system limit imaging performance of the high-end lens. With the development of the whole process technology in the industry, the processing problem of the optical element is gradually solved, and the optical system is assisted by means of equipment such as a centering lathe.
In the prior art, patent document CN115598791a discloses an all-aluminum primary and secondary mirror laser receiving device and an assembling and adjusting method thereof, which all adopt a mechanical positioning processing mode of secondary finish turning, ensure that the eccentricity and gradient of an optical axis of each optical element meet the requirements, and can complete assembling and adjusting through a high-precision centering lathe. The laser receiving device can be assembled and disassembled repeatedly while ensuring the optical index requirement of the laser receiving device. However, the centering lathe cannot be assembled and adjusted for an optical system with a large diameter and a long optical path because the centering lathe is complicated to assemble and adjust and has low assembling and adjusting accuracy and cannot completely cover the diameter or the length.
In summary, the existing adjustment method is complex, the adjustment precision is low, and the adjustment of the optical system with large caliber and long light path cannot be realized.
Disclosure of Invention
The application solves the problems that the existing adjustment method is complex, the adjustment precision is low, and the adjustment of the optical system with large caliber and long light path can not be realized.
The application relates to a submicron-level multi-ring belt multilevel alignment detection device for calculating holograms, which comprises a first adjusting mechanism, a second adjusting mechanism, a third adjusting mechanism, a fourth adjusting mechanism, a lens barrel shell, a calculation hologram element, a first lens, a second lens, a third lens, a fourth lens and an interferometer;
the interferometer, the calculation holographic element, the first lens, the second lens, the third lens and the fourth lens are sequentially arranged and coaxially arranged;
the first adjusting mechanism is fixed at two ends of the first lens;
the second adjusting mechanism is fixed at two ends of the second lens;
the third adjusting mechanism is fixed at two ends of the third lens;
the fourth adjusting mechanism is fixed at two ends of the fourth lens;
the first adjusting mechanism, the second adjusting mechanism, the third adjusting mechanism and the fourth adjusting mechanism are all fixed in the lens barrel shell.
Further, in an embodiment of the present application, the first adjusting mechanism, the second adjusting mechanism, the third adjusting mechanism and the fourth adjusting mechanism all adopt flexible supporting structures.
Further, in one embodiment of the present application, the first adjusting mechanism, the second adjusting mechanism, the third adjusting mechanism, the fourth adjusting mechanism and the lens barrel housing are each provided with a reflective area.
Further, in one embodiment of the present application, a side surface of the calculation hologram is provided with a diffraction surface;
the diffraction surface is provided with a plurality of diffraction fringe areas;
the plurality of diffraction fringe areas comprise a first alignment diffraction area, a second alignment diffraction area, a first detection diffraction area, a second detection diffraction area, a third detection diffraction area and a fourth detection diffraction area;
the second detection diffraction region, the fourth detection diffraction region, the third detection diffraction region and the first alignment diffraction region are sequentially arranged by taking the first detection diffraction region as a concentric circle;
the second alignment diffraction area is distributed between the fourth detection diffraction area and the third detection diffraction area, and is symmetrically distributed by taking the center of the first detection diffraction area as a center point.
Further, in an embodiment of the present application, each of the plurality of diffraction fringe areas adopts a phase type.
Further, in one embodiment of the present application, the first alignment diffraction zone uses +3 diffraction order intensity;
the second alignment diffraction area, the first detection diffraction area, the second detection diffraction area, the third detection diffraction area and the fourth detection diffraction area all adopt +1-order diffraction light intensity.
The application relates to a method for detecting the multi-level alignment of a submicron-level multi-ring belt of a calculation hologram, which is realized by a device for detecting the multi-level alignment of the submicron-level multi-ring belt of the calculation hologram based on the method, and comprises the following steps:
step S1, placing the interferometer and the center of the calculation holographic element on the same optical axis;
s2, adjusting interference fringes generated by the calculation holographic element and the interferometer to be close to zero fringes by utilizing a first alignment diffraction region, so that the alignment of the interferometer and the calculation holographic element is realized;
s3, adjusting interference fringes generated by the lens barrel shell and the interferometer to be close to zero fringes by utilizing a second alignment diffraction region, so that inclination deviation of the interferometer and the lens barrel shell is eliminated;
s4, placing the fourth lens and the fourth adjusting mechanism near the theoretical position;
s5, adjusting interference fringes generated by the fourth adjusting mechanism and the interferometer by utilizing the second alignment diffraction region until fringe coma items disappear, so that inclination deviation of the fourth adjusting mechanism and the lens barrel shell is eliminated;
s6, adjusting interference fringes generated by the fourth lens and the interferometer to be close to zero fringes by utilizing a fourth detection diffraction region, and finishing the adjustment of the fourth lens;
step S7, placing the third lens and the third adjusting mechanism near the theoretical position;
step S8, the third adjusting mechanism executes the operation of step S5, so that the inclination deviation between the third adjusting mechanism and the lens barrel shell is eliminated;
step S9, adjusting interference fringes generated by the third lens and the interferometer to be close to zero fringes by utilizing a third detection diffraction region, and finishing the adjustment of the third lens;
step S10, placing the second lens and the second adjusting mechanism near the theoretical position;
step S11, the second adjusting mechanism executes the operation of step S5, so that the inclination deviation between the second adjusting mechanism and the lens barrel shell is eliminated;
step S12, adjusting interference fringes generated by the second lens and the interferometer to be close to zero fringes by utilizing a second detection diffraction region, and finishing the adjustment of the second lens;
step S13, placing the first lens and the first adjusting mechanism near the theoretical position;
step S14, the first adjusting mechanism executes the operation of step S5, so that the inclination deviation between the first adjusting mechanism and the lens barrel shell is eliminated;
step S15, the interference fringes generated by the first lens and the interferometer are adjusted to be close to zero fringes by utilizing the first detection diffraction region, and then the first lens is assembled and adjusted.
Further, in an embodiment of the present application, the vicinity of the theoretical position is a vicinity of the theoretical position in the optical design.
Further, in one embodiment of the present application, in the step S2, the alignment of the interferometer and the calculation hologram is achieved, specifically:
the light beam emitted by the interferometer is reflected by the first alignment diffraction area, interference fringes are formed in the interferometer, the position of the calculation holographic element is adjusted until the interference fringes are close to zero fringes, and then the interferometer is aligned with the calculation holographic element.
Further, in one embodiment of the present application, in the step S3, the inclination deviation between the interferometer and the lens barrel housing is eliminated, specifically:
the light beam emitted by the interferometer is diffracted through the second alignment diffraction area, then reflected through the reflection area of the lens barrel shell, interference fringes are formed in the interferometer, the position of the lens barrel shell is adjusted until the fringe coma aberration term disappears, and then the inclination deviation of the interferometer and the lens barrel shell is eliminated.
Further, in one embodiment of the present application, in the step S5, the inclination deviation between the fourth adjusting mechanism and the lens barrel housing is eliminated, specifically:
after the light beam emitted by the interferometer is diffracted through the second alignment diffraction area and reflected through the reflection area of the fourth adjusting mechanism, interference fringes are formed in the interferometer, the fourth adjusting mechanism is adjusted to incline until the fringe coma aberration term disappears, and then the inclination deviation between the fourth adjusting mechanism and the lens barrel shell is eliminated.
Further, in one embodiment of the present application, in the step S6, the fourth lens assembly is completed, specifically:
the light beam emitted by the interferometer is diffracted through the fourth detection diffraction area, then reflected through the fourth lens, interference fringes are formed in the interferometer, and the eccentric and axial distance of the fourth adjusting mechanism is adjusted until the interference fringes are close to zero fringes, so that the fourth lens is assembled and adjusted;
in the step S9, the third lens assembly is completed, specifically:
the light beam emitted by the interferometer is diffracted through the third detection diffraction area, then reflected through the third lens, interference fringes are formed in the interferometer, and the eccentric and axial distance of the third adjusting mechanism is adjusted until the interference fringes are close to zero fringes, so that the third lens is assembled and adjusted;
in the step S12, the second lens assembly is completed, specifically:
the light beam emitted by the interferometer is diffracted through the second detection diffraction area, then reflected through the second lens, interference fringes are formed in the interferometer, and the eccentric and axial distance of the second adjusting mechanism is adjusted until the interference fringes are close to zero fringes, so that the second lens is assembled and adjusted;
in the step S15, the first lens assembly is completed, specifically:
the light beam emitted by the interferometer is diffracted through the first detection diffraction area, then reflected through the first lens, interference fringes are formed in the interferometer, the eccentric and axial distance of the first adjusting mechanism is adjusted until the interference fringes are close to zero fringes, and then the first lens is assembled and adjusted.
The application solves the problems that the existing adjustment method is complex, the adjustment precision is low, and the adjustment of the optical system with large caliber and long light path can not be realized. The method has the specific beneficial effects that:
1. the application relates to a submicron-level multi-ring belt multistage alignment detection device for calculating holograms, which mainly adopts a centering lathe for the assembly and adjustment of an optical system in the prior art, but the assembly and adjustment method of the centering lathe is complex in assembly and adjustment and can not completely cover caliber or length. Therefore, the application can realize the adjustment of the optical system by adopting two optical devices, namely an interferometer and a calculation holographic element, namely the detection device is simple and easy to operate. The first adjusting mechanism, the second adjusting mechanism, the third adjusting mechanism and the fourth adjusting mechanism can completely cover the caliber or the length of the first lens, the second lens, the third lens and the fourth lens, so that the four adjusting mechanisms can realize the adjustment of an optical system with a large caliber and a long light path;
2. according to the submicron-level multi-ring band multistage alignment detection method of the calculation hologram, based on a diffraction surface arranged on a calculation hologram element, light beams emitted by an interferometer are diffracted through the calculation hologram element to form ideal wave fronts, the ideal wave fronts are reflected by a surface to be detected and become wave fronts containing position errors after passing through the calculation hologram element again, interference fringes are generated after the wave fronts return to the interferometer, a quantized decoupling function between the diffraction wave fronts and the position deviation of an optical element is constructed, and high-precision detection and adjustment of submicron-level position deviation values are realized;
3. according to the submicron-level multi-ring-belt multilevel alignment detection method for the calculation hologram, disclosed by the application, each optical element is assembled and adjusted by adopting the interferometer and the calculation hologram element, so that the problem of mutual crosstalk in positioning monitoring among the optical elements in the lens integration process can be effectively avoided, the detection precision is improved, and the integral assembling and adjusting speed is increased;
the submicron-level multi-ring belt multistage alignment detection device for calculating the hologram realizes submicron-level high-precision adjustment and is not limited by the caliber of a lens group and the length of an optical system.
Drawings
The foregoing and/or additional aspects and advantages of the application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a diagram of a computational holographic sub-micron multi-ring belt multi-level alignment detection device according to one embodiment;
fig. 2 is a diffraction plane view of a calculation hologram according to the third embodiment;
FIG. 3 is a diffraction area diagram of a beam of light emitted by the interferometer of embodiment five passing through a computational hologram;
FIG. 4 is an assembly diagram of an interferometer and a computational hologram according to the fifth embodiment;
FIG. 5 is an assembled view of an interferometer and a lens barrel housing according to the fifth embodiment;
fig. 6 is an assembled view of a lens barrel housing and a fourth lens according to the fifth embodiment;
fig. 7 is an assembled view of a fourth lens according to the fifth embodiment;
fig. 8 is an assembled view of a barrel housing and a third lens according to the fifth embodiment;
fig. 9 is an assembled view of a third lens according to the fifth embodiment;
fig. 10 is an assembled view of a barrel housing and a second lens according to the fifth embodiment;
fig. 11 is an assembled view of a second lens according to the fifth embodiment;
fig. 12 is an assembled view of a lens barrel housing and a first lens according to the fifth embodiment;
fig. 13 is an assembled view of a first lens according to the fifth embodiment;
in the figure, 0 is a first alignment diffraction region, 1 is a first detection diffraction region, 2 is a second detection diffraction region, 3 is a second alignment diffraction region, 4 is a third detection diffraction region, 5 is a fourth detection diffraction region, 6 is a first adjustment mechanism, 7 is a second adjustment mechanism, 8 is a third adjustment mechanism, 9 is a fourth adjustment mechanism, 10 is a lens barrel housing, 11 is a calculation hologram element, 12 is a first lens, 13 is a second lens, 14 is a third lens, 15 is a fourth lens, 16 is an interferometer, and a is a diffraction plane.
Detailed Description
Various embodiments of the present application will now be described more fully hereinafter with reference to the accompanying drawings. The embodiments described by referring to the drawings are exemplary and intended to be illustrative of the application and are not to be construed as limiting the application.
In the first embodiment, the detection device for detecting the multi-level alignment of the submicron-level multi-ring zone of the calculated hologram according to the present embodiment includes a first adjustment mechanism 6, a second adjustment mechanism 7, a third adjustment mechanism 8, a fourth adjustment mechanism 9, a lens barrel housing 10, a calculated hologram 11, a first lens 12, a second lens 13, a third lens 14, a fourth lens 15, and an interferometer 16;
the interferometer 16, the calculation holographic element 11, the first lens 12, the second lens 13, the third lens 14 and the fourth lens 15 are arranged in sequence and coaxially arranged;
the first adjusting mechanism 6 is fixed at two ends of the first lens 12;
the second adjusting mechanism 7 is fixed at two ends of the second lens 13;
the third adjusting mechanism 8 is fixed at two ends of the third lens 14;
the fourth adjusting mechanism 9 is fixed at two ends of the fourth lens 15;
the first adjusting mechanism 6, the second adjusting mechanism 7, the third adjusting mechanism 8 and the fourth adjusting mechanism 9 are all fixed inside the lens barrel housing 10.
In order to solve the technical problems in the prior art, as shown in fig. 1, in this embodiment, the detection device is configured to coaxially place the interferometer 16, the calculation hologram 11, the first lens 12, the second lens 13, the third lens 14 and the fourth lens 15 in sequence, that is, only the interferometer 16 and the calculation hologram 11 are needed to implement the adjustment of the first lens 12, the second lens 13, the third lens 14 and the fourth lens 15. The first lens 12, the second lens 13, the third lens 14 and the fourth lens 15 are all large-caliber and long-light-path optical systems. Therefore, the detection device of the embodiment is simple and easy to operate, and can greatly reduce the complex process of adjustment.
The first adjusting mechanism 6, the second adjusting mechanism 7, the third adjusting mechanism 8 and the fourth adjusting mechanism 9 according to the present embodiment include adjusting mechanisms such as a pressing ring, and the applicability of the first adjusting mechanism 6, the second adjusting mechanism 7, the third adjusting mechanism 8 and the fourth adjusting mechanism 9 is stronger, the adjustment accuracy is improved, and the adjustment accuracy is not limited by the aperture of the lens group and the length of the optical system.
In the second embodiment, the present embodiment is further limited to the device for detecting multi-level alignment of a submicron-level multi-ring belt according to the first embodiment, and the first adjustment mechanism 6, the second adjustment mechanism 7, the third adjustment mechanism 8, and the fourth adjustment mechanism 9 are all flexible support structures.
In this embodiment, four adjusting structures all adopt flexible supporting structure, are in order to reduce the influence of four adjusting structures to the face type to increase the precision and the accuracy of testing result.
In the third embodiment, the present embodiment is further defined by the submicron-order multi-ring belt multilevel alignment detecting device for calculating holograms according to the first embodiment, and the first adjusting mechanism 6, the second adjusting mechanism 7, the third adjusting mechanism 8, the fourth adjusting mechanism 9, and the lens barrel housing 10 are all provided with reflection areas.
In this embodiment, the first adjusting mechanism 6, the second adjusting mechanism 7, the third adjusting mechanism 8, the fourth adjusting mechanism 9 and the lens barrel housing 10 are each provided with a reflective area, and the reflective area is a smooth surface for alignment with the second alignment diffraction area 3, so that the reflective area plays a critical role in the process of adjusting the four lenses.
In the fourth embodiment, the submicron-order multi-ring belt multilevel alignment detection device for calculating the hologram according to the first embodiment is further limited, and a diffraction surface a is disposed on one side surface of the calculating hologram element 11;
the diffraction surface A is characterized by a plurality of diffraction fringe areas;
the plurality of diffraction fringe areas comprise a first alignment diffraction area 0, a second alignment diffraction area 3, a first detection diffraction area 1, a second detection diffraction area 2, a third detection diffraction area 4 and a fourth detection diffraction area 5;
the second detection diffraction region 2, the fourth detection diffraction region 5, the third detection diffraction region 4 and the first alignment diffraction region 0 are sequentially arranged by taking the first detection diffraction region 1 as a concentric circle;
the second alignment diffraction region 3 is distributed between the fourth detection diffraction region 5 and the third detection diffraction region 4, and is symmetrically distributed by taking the center of the first detection diffraction region 1 as a center point.
In this embodiment, each of the plurality of diffraction fringe areas is phase-type.
In this embodiment, the first alignment diffraction region 0 adopts +3 diffraction order intensity;
the second alignment diffraction area 3, the first detection diffraction area 1, the second detection diffraction area 2, the third detection diffraction area 4 and the fourth detection diffraction area 5 all adopt +1-order diffraction light intensity.
In the present embodiment, a diffraction plane a is provided on a surface of the calculation hologram 11 facing the interferometer 16, and four diffraction fringe areas, that is, four detection diffraction areas and two alignment diffraction areas are marked on the diffraction plane a, and as shown in fig. 2, the first alignment diffraction area 0, the second alignment diffraction area 3, the first detection diffraction area 1, the second detection diffraction area 2, the third detection diffraction area 4, and the fourth detection diffraction area 5 are respectively provided. The second detection diffraction region 2, the fourth detection diffraction region 5, the third detection diffraction region 4 and the first alignment diffraction region 0 are sequentially arranged by taking the first detection diffraction region 1 as a concentric circle, and the second alignment diffraction region 3 is distributed between the fourth detection diffraction region 5 and the third detection diffraction region 4 and symmetrically distributed by taking the center of the first detection diffraction region 1 as a center point.
Different diffraction orders are adopted in the diffraction surface A of the calculation holographic element 11, namely, the first alignment diffraction area 0 adopts +3 diffraction light intensity, and the second alignment diffraction area 3, the first detection diffraction area 1, the second detection diffraction area 2, the third detection diffraction area 4 and the fourth detection diffraction area 5 all adopt +1 diffraction light intensity.
In the present embodiment, the first alignment diffraction region 0 is for achieving alignment of the interferometer 16 and the calculation hologram 11;
the second alignment diffraction region 3 is for realizing the adjustment of the first adjustment mechanism 6, the second adjustment mechanism 7, the third adjustment mechanism 8, the fourth adjustment mechanism 9 and the lens barrel housing 10;
the first detection diffraction region 1 is for realizing the adjustment of the first lens 12;
the second detection diffraction region 2 is for realizing the adjustment of the second lens 13;
the third detection diffraction region 4 is for realizing the adjustment of the third lens 14;
the fourth detection diffraction region 5 is for realizing the adjustment of the fourth lens 15.
Therefore, the four detection diffraction areas and two alignment diffraction areas marked on the diffraction surface a of the calculation hologram 11 according to the present embodiment are designed according to the detection device of the present application, so as to implement the adjustment of the optical system of the multi-lens element.
The calculation holographic element 11 has the characteristics of high detection precision, suitability for aspheric surfaces and free curved surfaces, and the detection and alignment of the position offset of the submicron optical element are realized through calculating the multi-ring band multilevel positioning area of the holographic element 11.
The fifth embodiment relates to a method for detecting the multi-level alignment of a sub-micron multi-ring belt of a computed hologram according to the fourth embodiment, wherein the method is implemented based on the device for detecting the multi-level alignment of a sub-micron multi-ring belt of a computed hologram according to any one of the first to fourth embodiments, and the method comprises the following steps:
step S1, placing the interferometer 16 and the center of the calculation holographic element 11 on the same optical axis;
step S2, the interference fringes generated by the calculation holographic element 11 and the interferometer 16 are adjusted to be close to zero fringes by utilizing the first alignment diffraction area 0, so that the alignment of the interferometer 16 and the calculation holographic element 11 is realized;
step S3, the interference fringes generated by the lens barrel housing 10 and the interferometer 16 are adjusted to be close to zero fringes by utilizing the second alignment diffraction region 3, so that the inclination deviation of the interferometer 16 and the lens barrel housing 10 is eliminated;
step S4, placing the fourth lens 15 and the fourth adjusting mechanism 9 near the theoretical position;
step S5, the interference fringes generated by the fourth adjusting mechanism 9 and the interferometer 16 are adjusted by utilizing the second alignment diffraction region 3 until the fringe coma aberration term disappears, so that the inclination deviation of the fourth adjusting mechanism 9 and the lens barrel shell 10 is eliminated;
step S6, adjusting the interference fringes generated by the fourth lens 15 and the interferometer 16 to be close to zero fringes by utilizing the fourth detection diffraction region 5, and finishing the adjustment of the fourth lens 15;
step S7, placing the third lens 14 and the third adjusting mechanism 8 near the theoretical position;
step S8, the third adjusting mechanism 8 executes the operation of step S5, so that the inclination deviation of the third adjusting mechanism 8 and the lens barrel housing 10 is eliminated;
step S9, adjusting the interference fringes generated by the third lens 14 and the interferometer 16 to be close to zero fringes by utilizing the third detection diffraction region 4, and finishing the adjustment of the third lens 14;
step S10, placing the second lens 13 and the second adjusting mechanism 7 near the theoretical position;
step S11, the second adjusting mechanism 7 executes the operation of step S5, so that the inclination deviation of the second adjusting mechanism 7 and the lens barrel housing 10 is eliminated;
step S12, adjusting the interference fringes generated by the second lens 13 and the interferometer 16 to be close to zero fringes by utilizing the second detection diffraction region 2, and finishing the adjustment of the second lens 13;
step S13, placing the first lens 12 and the first adjusting mechanism 6 near the theoretical position;
step S14, the first adjusting mechanism 6 performs the operation of step S5, so that the inclination deviation between the first adjusting mechanism 6 and the lens barrel housing 10 is eliminated;
in step S15, the interference fringes generated by the first lens 12 and the interferometer 16 are adjusted to be close to zero fringes by using the first detection diffraction region 1, and the first lens 12 is assembled.
In this embodiment, the vicinity of the theoretical position is the theoretical position of the lens in the optical design.
In this embodiment, in the step S2, the alignment between the interferometer 16 and the calculation hologram 11 is achieved, specifically:
the light beam emitted from the interferometer 16 is reflected by the first alignment diffraction region 0, interference fringes are formed inside the interferometer 16, the position of the calculation hologram 11 is adjusted until the interference fringes approach zero fringes, and the interferometer 16 is aligned with the calculation hologram 11.
In this embodiment, in the step S3, the inclination deviation between the interferometer 16 and the lens barrel housing 10 is eliminated, specifically:
after the light beam emitted by the interferometer 16 is diffracted by the second alignment diffraction region 3 and reflected by the reflection region of the lens barrel housing 10, interference fringes are formed inside the interferometer 16, and the position of the lens barrel housing 10 is adjusted until the fringe coma aberration term disappears, so that the inclination deviation between the interferometer 16 and the lens barrel housing 10 is eliminated.
In the present embodiment, in the step S5, the inclination deviation between the fourth adjusting mechanism 9 and the lens barrel housing 10 is eliminated, specifically:
after the light beam emitted by the interferometer 16 is diffracted by the second alignment diffraction region 3 and reflected by the reflection region of the fourth adjustment mechanism 9, interference fringes are formed inside the interferometer 16, and the fourth adjustment mechanism 9 is adjusted to tilt until the fringe coma aberration term disappears, so that the tilt deviation between the fourth adjustment mechanism 9 and the lens barrel housing 10 is eliminated.
In this embodiment, in the step S6, the fourth lens 15 is assembled and adjusted, specifically:
the light beam emitted by the interferometer 16 is diffracted by the fourth detection diffraction area 5, reflected by the fourth lens 15, and forms interference fringes in the interferometer 16, and the eccentric and axial distance of the fourth adjusting mechanism 9 is adjusted until the interference fringes are close to zero fringes, so that the fourth lens 15 is assembled and adjusted;
in the step S9, the third lens 14 is assembled and adjusted, specifically:
the light beam emitted by the interferometer 16 is diffracted by the third detection diffraction area 4 and then reflected by the third lens 14, interference fringes are formed in the interferometer 16, and the eccentric and axial distance of the third adjusting mechanism 8 is adjusted until the interference fringes are close to zero fringes, so that the third lens 14 is assembled and adjusted;
in the step S12, the second lens 13 is assembled and adjusted, specifically:
the light beam emitted by the interferometer 16 is diffracted by the second detection diffraction area 2 and then reflected by the second lens 13, interference fringes are formed in the interferometer 16, and the eccentric and axial distance of the second adjusting mechanism 7 is adjusted until the interference fringes are close to zero fringes, so that the second lens 13 is assembled and adjusted;
in step S15, the first lens 12 is assembled and adjusted, specifically:
the light beam emitted by the interferometer 16 is diffracted by the first detection diffraction area 1, reflected by the first lens 12, and forms interference fringes in the interferometer 16, and the eccentric and axial distance of the first adjusting mechanism 6 is adjusted until the interference fringes are close to zero fringes, so that the first lens 12 is assembled and adjusted.
In the present embodiment, as shown in fig. 3, the light beam emitted from the interferometer 16 passes through the calculation hologram 11, and then, the wavefront patterns corresponding to the different diffraction regions one by one are generated, and the wavefront patterns intersect with the central optical axis at different positions.
The method for detecting the multi-level alignment of the submicron-level multi-ring belt of the calculation hologram according to the embodiment comprises the following specific steps:
step S1, placing the interferometer 16 and the center of the calculation holographic element 11 on the same optical axis;
step S2, as shown in FIG. 4, after the light beam emitted by the interferometer 16 passes through the surface of the calculation holographic element 11, the light beam reaches the diffraction surface A, and the light beam passing through the first alignment diffraction area 0 is diffracted, wherein a part of the light beam is reflected to the interferometer 16, so that interference fringes are formed inside the interferometer 16, the position of the calculation holographic element 11 is adjusted, and the interference fringes are observed at the same time until the interference fringes inside the interferometer 16 are close to zero fringes, and then the alignment of the interferometer 16 and the calculation holographic element 11 is realized;
step S3, as shown in FIG. 5, after the light beam emitted by the interferometer 16 is diffracted through the second alignment diffraction region 3 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the reflection region of the lens barrel housing 10 and is reflected, the wavefront containing the position error information returns to the interferometer 16 through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the position of the lens barrel housing 10 is adjusted, the interference fringes are observed at the same time, and until the fringe coma term disappears, and the inclination deviation between the interferometer 16 and the lens barrel housing 10 is eliminated;
step S4, placing the fourth lens 15 and the fourth adjusting mechanism 9 which are assembled and adjusted by the centering instrument near the theoretical position;
step S5, as shown in FIG. 6, after the light beam emitted by the interferometer 16 is diffracted through the second alignment diffraction region 3 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the reflection region of the fourth adjustment mechanism 9 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the interference fringes are observed while the fourth adjustment mechanism 9 is adjusted to tilt, until the fringe coma term disappears, and the tilt deviation of the lens barrel housing 10 and the fourth lens 15 is eliminated;
step S6, as shown in FIG. 7, after the light beam emitted by the interferometer 16 is diffracted through the fourth detection diffraction region 5 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the surface of the fourth lens 15 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 after passing through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the interference fringes are observed while the eccentric and axial distances of the fourth adjustment mechanism 9 are adjusted until the interference fringes are close to zero fringes, and then the fourth lens 15 is positioned at a theoretical position;
step S7, placing the third lens 14 assembled and adjusted by the centering instrument and the third adjusting mechanism 8 near the theoretical position;
step S8, as shown in FIG. 8, after the light beam emitted by the interferometer 16 is diffracted through the second alignment diffraction region 3 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the reflection region of the third adjustment mechanism 8 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the interference fringes are observed while the tilt of the third adjustment mechanism 8 is adjusted until the fringe coma term disappears, and the tilt deviation of the lens barrel housing 10 and the third lens 14 is eliminated;
step S9, as shown in FIG. 9, after the light beam emitted by the interferometer 16 is diffracted through the third detection diffraction region 4 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the surface of the third lens 14 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 after passing through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the fringes are observed while the eccentric and axial distances of the third adjusting mechanism 8 are adjusted until the interference fringes are close to zero fringes, and then the third lens 14 is positioned at a theoretical position;
step S10, placing the second lens 13 and the second adjusting mechanism 7 which are assembled and adjusted by the centering instrument near the theoretical position;
step S11, as shown in FIG. 10, after the light beam emitted by the interferometer 16 is diffracted through the second alignment diffraction region 3 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the reflection region of the second adjusting mechanism 7 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the second adjusting mechanism 7 is adjusted to tilt and the interference fringes are observed until the fringe coma term disappears, and the tilt deviation of the lens barrel housing 10 and the second lens 13 is eliminated;
step S12, as shown in FIG. 11, after the light beam emitted by the interferometer 16 is diffracted through the second detection diffraction region 2 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the surface of the second lens 13 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 after passing through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the interference fringes are observed while the eccentric and axial distances of the second adjusting mechanism 7 are adjusted until the interference fringes are close to zero fringes, and then the second lens 13 is positioned at a theoretical position;
step S13, placing the first lens 12 assembled and adjusted by the centering instrument and the first adjusting mechanism 6 near a theoretical position;
step S14, as shown in FIG. 12, after the light beam emitted by the interferometer 16 is diffracted through the second alignment diffraction region 3 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the reflection region of the first adjusting mechanism 6 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the interference fringes are observed while the first adjusting mechanism 6 is adjusted to tilt, until the fringe coma term disappears, and the tilt deviation of the lens barrel housing 10 and the first lens 12 is eliminated;
step S15, as shown in FIG. 13, after the light beam emitted by the interferometer 16 is diffracted through the first detection diffraction region 1 of the calculation holographic element 11, an ideal wavefront is formed, the ideal wavefront reaches the surface of the first lens 12 and is reflected, the wavefront containing the position deviation information returns to the interferometer 16 after passing through the calculation holographic element 11 again, so that interference fringes are formed inside the interferometer 16, the interference fringes are observed while the eccentric and axial distances of the first adjusting mechanism 6 are adjusted until the interference fringes are close to zero fringes, and then the first lens 12 is positioned at a theoretical position;
in summary, in this embodiment, the alignment of the second alignment diffraction region 3 of the hologram 11 and the lens barrel housing 10 is calculated, the tilt deviation between the two is eliminated, the four lenses are sequentially disposed at the four adjusting mechanisms, and the interference fringes are observed while the adjustment result is monitored in real time by calculating the ideal wavefront generated by the different detection diffraction regions of the hologram 11 and the light beam emitted by the interferometer 16, so that a fast and accurate adjustment scheme can be realized.
The device and the method for detecting the multi-level alignment of the submicron-level multi-ring belt of the computational hologram provided by the application are described in detail, and specific examples are applied to illustrate the principle and the implementation mode of the computational hologram, and the description of the examples is only used for helping to understand the method and the core idea of the computational hologram; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present application, the present description should not be construed as limiting the present application in view of the above.
Claims (12)
1. The submicron-level multi-ring belt multilevel alignment detection device for calculating the hologram is characterized by comprising a first adjustment mechanism (6), a second adjustment mechanism (7), a third adjustment mechanism (8), a fourth adjustment mechanism (9), a lens barrel shell (10), a calculation hologram element (11), a first lens (12), a second lens (13), a third lens (14), a fourth lens (15) and an interferometer (16);
the interferometer (16), the calculation holographic element (11), the first lens (12), the second lens (13), the third lens (14) and the fourth lens (15) are sequentially arranged and coaxially placed;
the first adjusting mechanism (6) is fixed at two ends of the first lens (12);
the second adjusting mechanism (7) is fixed at two ends of the second lens (13);
the third adjusting mechanism (8) is fixed at two ends of the third lens (14);
the fourth adjusting mechanism (9) is fixed at two ends of the fourth lens (15);
the first adjusting mechanism (6), the second adjusting mechanism (7), the third adjusting mechanism (8) and the fourth adjusting mechanism (9) are all fixed in the lens barrel shell (10).
2. The device for detecting the multi-level alignment of the submicron-order multi-ring belt according to claim 1, wherein the first adjusting mechanism (6), the second adjusting mechanism (7), the third adjusting mechanism (8) and the fourth adjusting mechanism (9) are all flexible supporting structures.
3. The device for detecting the multi-level alignment of the submicron-order multi-ring belt according to claim 1, wherein the first adjusting mechanism (6), the second adjusting mechanism (7), the third adjusting mechanism (8), the fourth adjusting mechanism (9) and the lens barrel housing (10) are all provided with reflection areas.
4. The device for detecting the multi-level alignment of the submicron-order multi-ring belt according to claim 1, characterized in that a diffraction surface (a) is arranged on one side surface of the calculation holographic element (11);
the diffraction surface (A) is used for describing a plurality of diffraction fringe areas;
the plurality of diffraction fringe areas comprise a first alignment diffraction area (0), a second alignment diffraction area (3), a first detection diffraction area (1), a second detection diffraction area (2), a third detection diffraction area (4) and a fourth detection diffraction area (5);
the second detection diffraction region (2), the fourth detection diffraction region (5), the third detection diffraction region (4) and the first alignment diffraction region (0) are sequentially arranged by taking the first detection diffraction region (1) as concentric circles;
the second alignment diffraction areas (3) are distributed between the fourth detection diffraction area (5) and the third detection diffraction area (4), and are symmetrically distributed by taking the circle center of the first detection diffraction area (1) as a center point.
5. The apparatus for detecting sub-micron multi-ring band multistage alignment of computed holograms of claim 4, wherein each of said plurality of diffraction fringe areas is phase-type.
6. The device for detecting the multi-level alignment of the sub-micron multi-ring belt according to claim 4, wherein the first alignment diffraction area (0) adopts +3 diffraction light intensity;
the second alignment diffraction area (3), the first detection diffraction area (1), the second detection diffraction area (2), the third detection diffraction area (4) and the fourth detection diffraction area (5) all adopt +1-order diffraction light intensity.
7. A method for detecting the multi-level alignment of a submicron-sized multi-ring belt for calculating a hologram, which is realized based on the device for detecting the multi-level alignment of the submicron-sized multi-ring belt for calculating the hologram according to any one of claims 1 to 6, and is characterized by comprising the following steps:
step S1, placing the interferometer (16) and the center of the calculation holographic element (11) on the same optical axis;
s2, adjusting interference fringes generated by the calculation holographic element (11) and the interferometer (16) to be close to zero fringes by utilizing a first alignment diffraction region (0), so that the alignment of the interferometer (16) and the calculation holographic element (11) is realized;
s3, adjusting interference fringes generated by the lens barrel housing (10) and the interferometer (16) to be close to zero fringes by utilizing the second alignment diffraction region (3), so that inclination deviation of the interferometer (16) and the lens barrel housing (10) is eliminated;
s4, placing the fourth lens (15) and the fourth adjusting mechanism (9) near the theoretical position;
s5, adjusting interference fringes generated by the fourth adjusting mechanism (9) and the interferometer (16) by utilizing the second alignment diffraction region (3) until fringe coma aberration term disappears, so that inclination deviation of the fourth adjusting mechanism (9) and the lens barrel shell (10) is eliminated;
s6, adjusting interference fringes generated by the fourth lens (15) and the interferometer (16) to be close to zero fringes by utilizing the fourth detection diffraction region (5), and finishing the adjustment of the fourth lens (15);
step S7, placing the third lens (14) and the third adjusting mechanism (8) near the theoretical position;
step S8, the third adjusting mechanism (8) executes the operation of step S5, so that the inclination deviation of the third adjusting mechanism (8) and the lens barrel shell (10) is eliminated;
step S9, adjusting interference fringes generated by the third lens (14) and the interferometer (16) to be close to zero fringes by utilizing the third detection diffraction region (4), and finishing the adjustment of the third lens (14);
step S10, placing the second lens (13) and the second adjusting mechanism (7) near the theoretical position;
step S11, the second adjusting mechanism (7) executes the operation of step S5, so that the inclination deviation of the second adjusting mechanism (7) and the lens barrel shell (10) is eliminated;
step S12, adjusting interference fringes generated by the second lens (13) and the interferometer (16) to be close to zero fringes by utilizing the second detection diffraction region (2), and finishing the adjustment of the second lens (13);
step S13, placing the first lens (12) and the first adjusting mechanism (6) near the theoretical position;
step S14, the first adjusting mechanism (6) executes the operation of step S5, so that the inclination deviation of the first adjusting mechanism (6) and the lens barrel shell (10) is eliminated;
step S15, the interference fringes generated by the first lens (12) and the interferometer (16) are adjusted to be close to zero fringes by utilizing the first detection diffraction region (1), and then the first lens (12) is assembled and adjusted.
8. The method for detecting the multi-level alignment of the submicron-order multi-ring belt according to claim 7, wherein the vicinity of the theoretical position is the vicinity of the theoretical position in the optical design.
9. The method for detecting the multi-level alignment of the sub-micron multi-ring belt of the computer-generated hologram according to claim 7, wherein in the step S2, the interferometer (16) is aligned with the computer-generated hologram (11), specifically:
the light beam emitted by the interferometer (16) is reflected by the first alignment diffraction region (0), interference fringes are formed inside the interferometer (16), the position of the calculation holographic element (11) is adjusted until the interference fringes are close to zero fringes, and then the interferometer (16) is aligned with the calculation holographic element (11).
10. The method for detecting the multi-level alignment of the sub-micron multi-ring belt for calculating the hologram according to claim 7, wherein in the step S3, the inclination deviation between the interferometer (16) and the lens barrel housing (10) is eliminated, specifically:
after the light beam emitted by the interferometer (16) is diffracted through the second alignment diffraction area (3) and reflected through the reflection area of the lens barrel shell (10), interference fringes are formed inside the interferometer (16), the position of the lens barrel shell (10) is adjusted until the fringe coma aberration term disappears, and then the inclination deviation of the interferometer (16) and the lens barrel shell (10) is eliminated.
11. The method for detecting the multi-level alignment of the sub-micron multi-ring belt for calculating the hologram according to claim 7, wherein in the step S5, the inclination deviation between the fourth adjusting mechanism (9) and the lens barrel housing (10) is eliminated, specifically:
after the light beam emitted by the interferometer (16) is diffracted by the second alignment diffraction area (3) and reflected by the reflection area of the fourth adjusting mechanism (9), interference fringes are formed in the interferometer (16), the fourth adjusting mechanism (9) is adjusted to incline until the fringe coma aberration term disappears, and then the inclination deviation between the fourth adjusting mechanism (9) and the lens barrel shell (10) is eliminated.
12. The method for detecting the multi-level alignment of the sub-micron multi-ring belt for calculating the hologram according to claim 7, wherein in the step S6, the fourth lens (15) is assembled and adjusted, specifically:
the light beam emitted by the interferometer (16) is diffracted through the fourth detection diffraction area (5), then reflected through the fourth lens (15), interference fringes are formed in the interferometer (16), and the eccentric and axial distance of the fourth adjusting mechanism (9) is adjusted until the interference fringes are close to zero fringes, so that the fourth lens (15) is assembled and adjusted;
in the step S9, the third lens (14) is adjusted, specifically:
the light beam emitted by the interferometer (16) is diffracted through the third detection diffraction area (4), then reflected through the third lens (14), interference fringes are formed in the interferometer (16), and the eccentric and axial distance of the third adjusting mechanism (8) is adjusted until the interference fringes are close to zero fringes, so that the third lens (14) is assembled and adjusted;
in the step S12, the second lens (13) is adjusted, specifically:
after the light beam emitted by the interferometer (16) is diffracted through the second detection diffraction area (2) and reflected through the second lens (13), interference fringes are formed in the interferometer (16), and the eccentric and axial distance of the second adjusting mechanism (7) is adjusted until the interference fringes are close to zero fringes, and then the second lens (13) is assembled and adjusted;
in the step S15, the first lens (12) is adjusted, specifically:
the light beam emitted by the interferometer (16) is diffracted through the first detection diffraction area (1), then reflected through the first lens (12), interference fringes are formed in the interferometer (16), the eccentric and axial distance of the first adjusting mechanism (6) is adjusted until the interference fringes are close to zero fringes, and then the first lens (12) is assembled and adjusted.
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