CN101526341A - Differential confocal curvature radius measurement method and device - Google Patents
Differential confocal curvature radius measurement method and device Download PDFInfo
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Abstract
The invention belongs to the technical field of optical precision measurement and relates to a differential confocal lens curvature radius measurement method and a device. The method firstly utilizes the differential confocal focusing principle to respectively determine the positions of a top point and a spherical center of a measured lens and then measures the distance between the two focuses; meanwhile, the curvature radius measurement sensitivity can be improved by the pupil filtering technology during the measurement process. The invention firstly proposes to utilize the characteristic that a differential confocal response curve is corresponding to the top point and the spherical center of the measured lens when passing a zero point to realize the precise focusing, expands the application of differential confocal microscopy principle to the field of curvature radius measurement and forms the differential confocal focusing principle. The invention applies the differential confocal focusing principle and has the advantages of high measurement precision and strong anti-environmental interference ability, thereby being capable of being used in the detection of the lens curvature radius and the high-precision curvature radius measurement during the optical system assembly process.
Description
Technical field
The invention belongs to technical field of optical precision measurement, can be used for lens radius of curvature detect with the optical system assembling process in high precision radius of curvature measurement etc.
Technical background
In optical field, the measurement of lens radius of curvature has important effect.The precision measurement of high-quality sphere model being carried out the optical spherical surface radius-of-curvature has very high difficulty.The accurate measurement of optical spherical surface radius-of-curvature is the important step in optical measurement and the optics cold working process.Important parameter as optical lens, the high-acruracy survey of its radius-of-curvature is a difficult point in optical measurement field always, principal element is: contact measuring method requires measured surface to carry out polishing, the measuring error that can bring optical spherical surface wearing and tearing or extruding to cause; Noncontact measuring method, though avoided treating the wearing and tearing of photometry sphere, it is very accurate that light path focusing aligning all needs, thereby make adjustment light path difficulty, the easy extraction system error of light path adjustment process; Most of visual reading method that adopts in the traditional measuring method such as sphere template method, spherometer method, auto-collimating microscope method, automaticity is not high, has strengthened random deviation of measurement yet, all is difficult to realize the high-acruracy survey of radius-of-curvature.
At radius of curvature measurement, domestic scholars has proposed new measuring method, comprise " based on the optical spherical surface radius measurement research of white light interference " in applied optics, delivered in 2007, this type of technology has mainly adopted moire grating displacement measurement system, Michelson white light interference system, realize accurately measuring, this system has adopted the optics non-destructive measuring method, has avoided the infringement of contact measurement to optical surface; Utilize digital image processing techniques directly to handle and obtain measurement result according to the image measurement data computation to image, reduced visual optical measuring system focusing alignment error, with classic method mutually specific sensitivity increase, can reach up to a hundred microns measuring accuracy, but this optical spherical surface automatic system is low to the measuring accuracy of small curvature radius optical spherical surface, needs the parameter of measurement many.
The radius of curvature measurement technology of comparing external, in 2005 deliver in SPIE " Radius case study:Optical bench measurement and uncertaintyincluding stage error motions ", adopted and set up new coordinate model technology and carry out radius of curvature measurement, and reached near micron-sized measuring accuracy.But owing to adopt interferometer, be subject to the interference of ambient condition factors such as temperature, air-flow, vibration in the measuring process, measurement environment has been proposed harsh requirement.
More than the general character of several non-contact measurement methods also be: its opinion scale all is based on the axial image information of hanging down.Since the object distance of optical system change the logitudinal magnification that causes change be hang down the axle magnification change square, if can choose a kind of axial information, then can further improve the sensitivity of radius of curvature measurement as opinion scale.
In recent years, differential confocal (confocal) the technology fast development in micro-imaging field both at home and abroad, this technology with axial light intensity response curve as opinion scale, highly sensitive in vertical axial evaluation method, and, compare image processing method and have higher anti-environmental interference ability owing to adopt light intensity as data message.Chinese patent " differential confocal the scanning detection method " (patent No.: 200410006359.6) for example with high spatial resolution, it has proposed the ultra-discrimination differential confocal detection method, make the system axial resolving power reach nanoscale, and significantly improved environment disturbance rejection ability, but differential confocal technology mainly is applicable to microcosmic micrometering field, focus and this technology directly applied to, realize the report of radius of curvature measurement then, do not see as yet up to now.
Summary of the invention
The objective of the invention is in order to solve the high-acruracy survey problem of lens radius of curvature, propose a kind of differential confocal curvature radius measurement method and device, the characteristic of the corresponding measured lens summit of focus and the centre of sphere realizes accurately focusing when utilizing differential confocal response curve zero crossing.
The objective of the invention is to be achieved through the following technical solutions.
Differential confocal curvature radius measurement method of the present invention comprises
(a) measure the preceding optical system of adjusting, directional light is seen through beam splitting system (2), be focused at focus (4), tested concavees lens (7) are placed near the focus (4) through lens (3), light by after tested concavees lens (7) reflection, enters differential confocal system (8) by beam splitting system (2) reflection again;
When (b) measuring, tested concavees lens (7) are moved in optical axis direction scanning, differential confocal system (8) determines that by the absolute zero point value of surveying differential response signal the summit of tested concavees lens (7) and focus (4) coincide, and the position of tested concavees lens this moment (7) is first focal position (5);
(c) tested concavees lens (7) are moved along optical axis direction scanning, utilize differential confocal system (8) once more, when the centre of sphere of focus (4) and tested concavees lens (7) coincides, the differential response signal that detects is the absolute zero point value, and the position of tested concavees lens this moment (7) is second focal position (6);
(d) distance between measurement first focal position (5) and second focal position (6) promptly is the radius-of-curvature r of measured lens;
According to differential confocal curvature radius measurement method, concavees lens can be replaced with convex lens, constitute differential confocal convex lens curvature radius measurement method.
According to differential confocal curvature radius measurement method, differential confocal system (8) can be replaced with confocal system (9), constitute confocal lens radius of curvature measuring method.
Confocal lens radius of curvature measuring method is:
(a) measure the preceding optical system of adjusting, directional light is seen through beam splitting system (2), be focused at focus (4), measured lens is placed near the focus (4) through lens (3), light by after measured lens (7) reflection, enters confocal system (9) by beam splitting system (2) reflection again;
When (b) measuring, measured lens (7) is moved in optical axis direction scanning, confocal system (9) determines that by the maximum point of probe response signal measured lens summit and focus (4) coincide, and the position of measured lens this moment (7) is first focal position (5);
(c) measured lens (7) is moved along optical axis direction scanning, utilize confocal system (9) once more, when the centre of sphere of focus (4) and measured lens coincided, the response signal that detects was a maximum point, and the position of measured lens this moment (7) is second focal position (6);
(d) distance between measurement first focal position (5) and second focal position (6) promptly is the radius-of-curvature r of measured lens;
Differential confocal (confocal) lens radius of curvature measuring method, can also compress optical system (1) and differential confocal system (8) (confocal system (9)) cooperating by depth of focus, use the depth of focus of pupil filtering technique compresses measured lens (7), raising focuses sensitivity.
Differential confocal lens radius of curvature measurement mechanism comprises light source (11), also comprises beam splitting system (2), convergent lens (3), differential confocal system (8); Wherein beam splitting system (2), convergent lens (3) and measured lens (7) are successively placed on light source (11) emergent ray direction, differential confocal system (8) is placed on beam splitting system (2) reflection direction, measured lens (7), convergent lens (3) with beam splitting system (2) with beam reflection to differential confocal system (8), and cooperate differential confocal system (8) to realize focusing of first focal position (5) and second focal position (6).
According to the differential confocal curvature radius measurement mechanism, differential confocal system (8) can be replaced with confocal system (9).
Differential confocal (confocal) radius of curvature measurement device can also comprise depth of focus compression optical system (1), is used to reduce the depth of focus of measured lens (7).
Differential confocal (confocal) radius of curvature measurement device can also comprise modulating control system (10), is used to control light source (11) and modulates and filtering with differential confocal system (8) (confocal system (9)), suppresses the influence of environmental interference to measuring accuracy.
The present invention contrasts prior art and has following remarkable advantage:
1. propose first to utilize the zero crossing of differential confocal response curve to determine the target location, realize accurately focusing for twice, propose the micro-principle of differential confocal is expanded to the radius of curvature measurement field.
2. propose first to utilize the maximum point of confocal response curve to determine the target location, realize accurately focusing for twice, propose the confocal microscopy principle is expanded to the radius of curvature measurement field.
3. in this measuring method, differential confocal (confocal) principle with the light intensity response curve as focusing criterion, and cooperate differential confocal (confocal) system to carry out intensity modulation and filtering, cut down of the influence of environmental interference such as air turbulence, compare with image, interference fringe and have higher stability as the curvature radius measurement method that focuses criterion to measuring accuracy.
4. adopt the pupil filtering technology to match, in radius of curvature measurement, reduce the lens depth of focus, strengthen focusing sensitivity with differential confocal (confocal) technology.
Description of drawings
Fig. 1 is the synoptic diagram of differential confocal concavees lens curvature radius measurement method of the present invention;
Fig. 2 is the synoptic diagram of differential confocal convex lens curvature radius measurement method of the present invention;
Fig. 3 is the synoptic diagram of confocal curvature radius measurement method of the present invention;
Fig. 4 is the synoptic diagram of differential confocal curvature radius measurement mechanism of the present invention;
Fig. 5 is the synoptic diagram of confocal curvature radius measurement mechanism of the present invention;
Fig. 6 measures the synoptic diagram of embodiment for differential confocal curvature radius of the present invention;
Fig. 7 measures the synoptic diagram of embodiment for confocal curvature radius of the present invention;
Fig. 8 measures the differential response curve of embodiment for differential confocal curvature radius of the present invention;
Fig. 9 measures the explorer response curve map of embodiment for confocal curvature radius of the present invention;
Wherein: 1-depth of focus compression optical system, 2-beam splitting system, 3-convergent lens, 4-focal position, 5-first focal position, 6-second focal position, 7-measured lens, 8-differential confocal system, 9-confocal system, 10-modulating control system, 11-light source, 12-polarization spectroscope, 13-1/4 wave plate, 14-translation stage, 15-microscope base, 16-photoelectric sensor, 17-pin hole, 18-lens, 19-photoelectric sensor, 20-pin hole, 21-lens, 22-spectroscope.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Basic thought of the present invention is to utilize differential confocal (confocal) principle to carry out twice accurately to focus, and realizes the high precision radius of curvature measurement, and reduces the influence of environment to measuring accuracy by intensity modulation and filtering technique.
Embodiment one
Present embodiment is to carry out differential confocal curvature radius at concavees lens to measure.Be illustrated in figure 6 as a kind of differential confocal curvature radius measurement method, its measuring process is:
At first, adjust optical system before measuring, open light source 11, the directional light that penetrates sees through the beam splitting system that is made of polarization spectroscope 12 and quarter wave plate 13, be focused at focal position 4 through convergent lens 3, measured lens is placed near the focal position 4, and light enters the spectroscope 22 of differential confocal system again by after measured lens 7 reflections by quarter wave plate 13 and polarization spectroscope 12 reflections; Spectroscope 22 is divided into two-way with light, and wherein light is penetrated through lens 21, pin hole 20 back lighting photoelectric sensors 19 by a Reuter, and another road reflection ray is through lens 18, pin hole 17 back lighting photoelectric sensors 16;
In the measuring process, measured lens 7 is moved in the scanning of convergent lens 3 optical axis directions along translation stage 14, differential confocal system 8 determines that with the absolute zero point value of the differential response signal of photoelectric sensor 19 measured lens summit and focus 4 coincide by surveying photoelectric sensor 16, and promptly this position is first focal position 5.Response signal as shown in Figure 8, I wherein
1(z), I
2(z) be the response signal of two photoelectric sensors, FES (z) is differential response signal;
Then, utilize differential confocal system 8 once more, measured lens 7 is moved in the scanning of convergent lens 3 optical axis directions along translation stage 14, determine second focal position 6 by the absolute zero point value of surveying differential response signal, this moment, the centre of sphere of focus 4 and measured lens coincided, response signal as shown in Figure 8, I wherein
1(z), I
2(z) be the response signal of two photoelectric sensors, FES (z) is differential response signal;
Then, the distance between first focal position 5 and second focal position 6 is measured by translation stage 14 use grating measuring length mechanisms, promptly is the radius-of-curvature value r of measured lens;
Also by depth of focus compression optical system 1 and differential confocal system 8 cooperatings, use the depth of focus of pupil filtering technique compresses measured lens 7 among this embodiment, raising focuses sensitivity.
As shown in Figure 6, a kind of differential confocal curvature radius measurement mechanism, comprise light source 11, be successively placed on polarization spectroscope 12, quarter wave plate 13, convergent lens 3 and the measured lens 7 of light source 11 outgoing parallel rays directions, also comprise the differential confocal system that is placed on polarization spectroscope 12 reflection directions, wherein measured lens 7, polarization spectroscope 12, quarter wave plate 13 are with the spectroscope 22 of beam reflection to the differential confocal system; Spectroscope 22 is divided into two-way with light, and transmitted ray is through lens 21, pin hole 20 illumination light electric transducers 19, and reflection ray is through lens 18, pin hole 17 illumination light electric transducers 16; Measured lens 7 places on the translation stage 14, and cooperates differential confocal system to realize the location of first focal position 5 and second focal position 6.
This device comprises depth of focus compression optical system 1, is used to reduce the depth of focus of measured lens 7.
This device comprises modulating control system 10, is used to control light source 11 and modulates and filtering with differential confocal system 8, suppresses the influence of environmental interference to measuring accuracy.
Embodiment two
Present embodiment is the measurement at the concavees lens confocal curvature radius.Embodiment according to differential confocal curvature radius measurement method, adjust in the light path process, differential confocal system 8 among the embodiment one can be changed to confocal system 9, the condenser 18 in the confocal system is with convergence of rays, and converging ray passes pin hole 17 illumination light electric transducers 16;
As shown in Figure 7, in the measuring process, measured lens 7 is moved in convergent lens 3 optical axis directions scanning along translation stage 14, and confocal system is determined first focal position 5 of measured lens by the maximum point of surveying photoelectric sensor 16 corresponding signals, and response signal as shown in Figure 9.
Then, grating measuring length mechanism in the translation stage drives measured lens and moves at convergent lens 3 optical axis directions, in the process that measured lens moves, confocal system is determined second focal position 6 of measured lens by the maximum point of surveying photoelectric sensor 16 corresponding signals, the distance between first focal position 5 and second focal position 6 is measured by translation stage use grating measuring length mechanism, promptly is the radius-of-curvature r of measured lens;
This embodiment has realized the high-acruracy survey of radius-of-curvature having realized differential confocal (confocal) curvature radius measurement method and device by a series of measure, compares with the routine measurement method, has higher measuring accuracy.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on claim of the present invention basis all is protection scope of the present invention.
Claims (9)
1. differential confocal curvature radius measurement method is characterized in that:
(a) measure the preceding optical system of adjusting, directional light is seen through beam splitting system (2), be focused at focus (4), tested concavees lens (7) are placed near the focus (4) through lens (3), light by after tested concavees lens (7) reflection, enters differential confocal system (8) by beam splitting system (2) reflection again;
When (b) measuring, tested concavees lens (7) are moved in optical axis direction scanning, differential confocal system (8) determines that by the absolute zero point value of surveying differential response signal measured lens summit and focus (4) coincide, and the position of tested concavees lens this moment (7) is first focal position (5);
(c) tested concavees lens (7) are moved along optical axis direction scanning, utilize differential confocal system (8) once more, when the centre of sphere of focus (4) and tested concavees lens (7) coincides, the differential response signal that detects is the absolute zero point value, and the position of tested concavees lens this moment (7) is second focal position (6);
(d) distance between measurement first focal position (5) and second focal position (6) promptly is the radius-of-curvature r of tested concavees lens.
2. differential confocal curvature radius measurement method according to claim 1 is characterized in that: concavees lens are replaced with convex lens, constitute differential confocal convex lens curvature radius measurement method.
3. differential confocal curvature radius measurement method according to claim 1 is characterized in that: differential confocal system (8) can be replaced with confocal system (9), constitute confocal lens radius of curvature measuring method.
4. according to claim 1 and 3 described confocal lens radius of curvature measuring methods, it is characterized in that:
(a) measure the preceding optical system of adjusting, directional light is seen through beam splitting system (2), be focused at focus (4), measured lens is placed near the focus (4) through lens (3), light by after measured lens (7) reflection, enters confocal system (9) by beam splitting system (2) reflection again;
When (b) measuring, measured lens (7) is moved in optical axis direction scanning, confocal system (9) determines that by the maximum point of probe response signal measured lens summit and focus (4) coincide, and the position of measured lens this moment (7) is first focal position (5);
(c) measured lens (7) is moved along optical axis direction scanning, utilize confocal system (9) once more, when the centre of sphere of focus (4) and measured lens coincided, the response signal that detects was a maximum point, and the position of measured lens this moment (7) is second focal position (6);
(d) distance between measurement first focal position (5) and second focal position (6) promptly is the radius-of-curvature r of measured lens.
5. differential confocal according to claim 1 (confocal) lens radius of curvature measuring method, it is characterized in that: can also compress optical system (1) and differential confocal system (8) (or confocal system (9)) cooperating by depth of focus, use the depth of focus of pupil filtering technique compresses measured lens (7), raising focuses sensitivity.
6. differential confocal lens radius of curvature measurement mechanism comprises light source (11), it is characterized in that: also comprise beam splitting system (2), convergent lens (3), differential confocal system (8); Wherein beam splitting system (2), convergent lens (3) and measured lens (7) are successively placed on light source (11) emergent ray direction, differential confocal system (8) is placed on beam splitting system (2) reflection direction, measured lens (7), convergent lens (3) with beam splitting system (2) with beam reflection to differential confocal system (8), and cooperate differential confocal system (8) to realize focusing of first focal position (5) and second focal position (6).
7. differential confocal curvature radius measurement mechanism according to claim 6 is characterized in that: differential confocal system (8) can also be changed to confocal system (9).
8. differential confocal according to claim 6 (confocal) radius of curvature measurement device is characterized in that: can also comprise depth of focus compression optical system (1), be used to reduce the depth of focus of measured lens (7).
9. differential confocal according to claim 6 (confocal) radius of curvature measurement device, it is characterized in that: can also comprise modulating control system (10), be used to control light source (11) and modulate and filtering, suppress the influence of environmental interference measuring accuracy with differential confocal system (8) or confocal system (9).
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Inventor after: Zhao Weiqian Inventor after: Sun Ruoduan Inventor after: Qiu Lirong Inventor after: Jia Xin Inventor before: Zhao Weiqian Inventor before: Jia Xin Inventor before: Qiu Lirong Inventor before: Sun Ruoduan |
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