CN206832199U - The non-contact triggering probe of three-dimensional micro-nano and MEMS measurement apparatus - Google Patents
The non-contact triggering probe of three-dimensional micro-nano and MEMS measurement apparatus Download PDFInfo
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- CN206832199U CN206832199U CN201720359317.3U CN201720359317U CN206832199U CN 206832199 U CN206832199 U CN 206832199U CN 201720359317 U CN201720359317 U CN 201720359317U CN 206832199 U CN206832199 U CN 206832199U
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Abstract
It the utility model is related to MEMS field of measuring technique, it is specifically related to a kind of non-contact triggering probe of three-dimensional micro-nano and MEMS measurement apparatus, probe is made up of visualization model and measurement module, and visualization model is made up of white light LEDs, the first collimation lens, unpolarized Amici prism, polarization splitting prism, the second collimation lens, condenser lens, polarizer, field lens and CCD camera；Measurement module is made up of laser, grating, polarization splitting prism and quarter-wave plate, cylindrical lens, integrated optoelectronic circuit and quadrant sensors.Probe is based on deep ultraviolet light source and astigmatism principle and laser reflection energy method, the probe reaches 1nm in the resolution ratio of three direction of principal axis, triggering repeatability is respectively less than 30nm, and to meet the needs of MEMS measurement, be particularly good at device of the measurement near edge feature.Have the advantages that small volume, precision are high, debug simple, easy to assembly, low cost simultaneously.
Description
Technical field
MEMS field of measuring technique is the utility model is related to, is specifically related to a kind of non-contact triggering of three-dimensional micro-nano
Probe and MEMS measurement apparatus.
Background technology
In recent years, MEMS technology is fast-developing, and various microdevices are come out one after another, such as microsensor, microactrator, miniature
Component, micro-optical device, micro- power electronic devices etc., these devices are in Aeronautics and Astronautics, automobile, biomedicine, environment prison
Survey, military affairs etc. obtain application.MEMS just towards complication, integrated direction development, has extensively in various fields
Wealthy application prospect, developing into a huge industry, there is an urgent need to have accurate (precision is high), efficiently (speed is fast),
The detection technique and means of safety (non-contact).
The property such as high-precision important component of the probe as nanometer three coordinate machine, its precision, resolution ratio, repeatability
Can ensure that whole nanometer system of 3 axes has the key factor of nano-precision.Probe can be divided into contact probe and non-connect
Touch is popped one's head in, and optical non-contact measuring method is relatively adapted to the soft thin workpiece of measurement, miniature workpiece, and non-contact measurement will not be made
Into the abrasion and destruction on measured workpiece surface；The problem of abrasion is also not present in probe in itself, therefore pops one's head in use not
Measurement accuracy can be reduced because of its work hours；The measuring speed of non-contact measurement is faster than contact type measurement simultaneously is permitted
It is more；And the radius compensation that non-contact measurement need not be popped one's head in, this causes non-contact measurement probes to become people
Focus of attention.
The high-acruracy survey right and wrong of miniature workpiece are often with challenging work, especially when there is edge feature in workpiece,
Such as micro-line is wide, groove, boss, micropore.Because contact measurement method is limited to (probe) diameter of probe ball, contactless optical
Measurement is learned to be limited by optical diffraction limit.Non-contact measurement has many modes, also there is a variety of different optical modes, than
Such as：Laser triangulation, is mainly characterized by that measuring speed is fast, and resolution ratio is up to 1 μm；Phase shift technique method, advantage are longitudinal directions
Precision is high, and shortcoming lateral resolution intelligently reaches micron order；Laser auto focusing method, it is divided into image principle and astigmatism principle,
Resolution ratio can reach nanoscale in the range of 10 μm, but be only limitted to one-dimensional measurement；White light interferometric technology, the technology can weigh
Object three-dimensional contour outline is built, but does not reach nanometer resolution；Confocal micro-measurement technology can equally carry out object three-dimensional contour outline weight
Build, longitudinal frame is 0.5 μm, lateral resolution is 1 μm；Full figure e measurement technology can quickly rebuild object image, and in real time
Measurement, but can only achieve micron accuracies.
Also there are some prominent universities or research institution all in research high-precision micro nano non-contact optical probe both at home and abroad.Such as：
The laser auto focusing probe (AF16) that the OPM companies of Germany develop, is to obtain object appearance using the principle of astigmatism, then
Object analysis image realizes measurement, optical maser wavelength 780nm, and vertical direction resolution ratio is 10nm, and horizontal direction resolution ratio relies on
In the positioning precision of two-dimensional localization platform.French ESYCOM laboratories have developed a kind of based on the contactless of principle of optical interference
Micro-nano probe.The probe can measure the width and thickness of the part to be measured of hundreds of microns of sizes simultaneously, and its lateral resolution can only
Reach micron order.The 3 D laser scanning microscope (VK-9700) that Japanese KEYENCE companies develop, it is real using confocal laser method
The scanning of existing X/Y plane, while obtain the image of object under test, optical maser wavelength used in it is 408nm, longitudinal resolution
Rate can reach 1nm, and lateral resolution only reaches micron order.Cheng-Hsiang Lin in 2010 have developed one kind and be used for micropore
The contactless measuring system of depth survey, it is possible to achieve measured the depth of the micropore of Laser Processing, differentiated in real time
Rate is 0.5nm.When bore rate be 1000 revs/min when, measurable depth capacity is 347.1nm, but can not measured hole it is straight
Footpath.Manske in 2009 et al., which have developed, a kind of not only can be used for contact type measurement but also can be used for the spy of non-contact measurement
Head.It is method of astigmatism that the probe, which measures principle,.The optical maser wavelength used is 632nm, and vertical resolution ratio is smaller than 1nm.Germany in 2009
PTB Ehert et al. carry out wire width measuring using confocal laser method, and the lateral resolution of the system is up to 100nm.Therefore, it is existing
The precision and resolution ratio of probe are all higher, but mainly carry out one-dimensional measurement, and complicated, and cost is high.
Utility model content
Resolution ratio and precision for existing measuring method can not meet the technology of the needs of MEMS high-acruracy survey
Problem, the purpose of this utility model be to provide a kind of non-contact triggering probe of three-dimensional micro-nano with nano-precision and
MEMS measurement apparatus.
To achieve these goals, technical scheme is used by the utility model：
A kind of non-contact triggering probe of three-dimensional micro-nano, is made up of visualization model and measurement module,
The visualization model is by white light LEDs, the first collimation lens, unpolarized Amici prism, polarization splitting prism, second
Collimation lens, condenser lens, polarizer, field lens and CCD camera composition；
The light that white light LEDs are sent is after the first collimation lens collimation, then by unpolarized Amici prism, polarization spectro rib
Enter the microcobjective being made up of the second collimation lens and condenser lens after mirror, workpiece surface is focused on by microcobjective；Work
The light that part surface is reflected back is entered after also passing through microcobjective, polarization splitting prism, unpolarized Amici prism with parallel rays
Polarizer, field lens, then field lens by carry image information parallel rays be imaged in CCD camera；
Measurement module is by laser, grating, polarization splitting prism and quarter-wave plate, cylindrical lens, the integrated electricity of photoelectricity
Road and quadrant sensors composition；
It is divided into P light and S light after grating injects polarization splitting prism and quarter-wave plate from the light that laser is sent,
P light is mapped to a distant place, and S light then enters visualization model through quarter-wave plate and after 45 degree of light direction integral-rotation of outgoing
Polarization splitting prism, workpiece surface is then focused on after microcobjective；The light being reflected back by workpiece surface then leads to successively
The integrated electricity of photoelectricity is returned to after crossing microcobjective, polarization splitting prism, polarization splitting prism and quarter-wave plate and cylindrical lens
In quadrant sensors in road, the signal of quadrant sensors is used for three-dimensional measurement after integrated optoelectronic circuit is handled.
A kind of MEMS measurement apparatus based on the non-contact triggering probe of three-dimensional micro-nano, it is micro- by probe system, nanometer
Dynamic platform, laser interferometer and tested micro element composition, laser interferometer is as length standard, and nanometer micropositioner is as three-dimensional
Moving parts, by the device to probe demarcated and tested.
The non-contact triggering of three-dimensional micro-nano of the present utility model is popped one's head in and MEMS measurement apparatus, its advantage table
Now：
1), the non-contact triggering probe of three-dimensional micro-nano of the present utility model, it is that one kind is based on deep ultraviolet light source and astigmatism
The probe of principle and laser reflection energy method, the probe reach 1nm in the resolution ratio of three direction of principal axis, and triggering repeatability is respectively less than
30nm, to meet the needs of MEMS measurement, be particularly good at device of the measurement near edge feature.There is volume simultaneously
Small, the advantages that precision is high, debugging is simple, easy to assembly, low cost, real-time measurement can be realized with reference to corresponding software.
2), using below 280nm DUV wavelength it is short the characteristics of, by designing the focus lens system of big NA values, most
The diameter of the reduction focal beam spot of limits, and then improve measurement accuracy.Based on astigmatism principle and laser reflection energy method, according to
The actual conditions that laser measures in three-dimensional triggering, three-dimensional triggering measurement model is established, devise the mechanical structure of system
And optical system, devise software and hardware of process signal etc..
3), the utility model is studied three-dimensional micro- to solve the problem of the MEMS high-acruracy survey with edge feature
The trigger model and key technology of the non-contact triggering measuring probe of nanometer so that probe reaches in the resolution ratio of three direction of principal axis
1nm, 30nm is respectively less than in the triggering repeatability of three direction of principal axis.
Brief description of the drawings
Fig. 1 is the light path schematic diagram of the non-contact triggering probe of three-dimensional micro-nano.
Fig. 2 is the light path schematic diagram of measurement module.
Fig. 3 is the structural representation of MEMS measurement apparatus.
Fig. 4 laterally triggers facula position change schematic diagram for probe.
Embodiment
To further describe the non-contact triggering probe of three-dimensional micro-nano of the present utility model and MEMS measurement apparatus,
It is described further below in conjunction with the accompanying drawings.
A kind of non-contact triggering probe of three-dimensional micro-nano, is made up of visualization model 2 and measurement module 1, as shown in figure 1,
Visualization model 2 is by white light LEDs 21, the first collimation lens 22 (Collimator Lens), (Non- of unpolarized Amici prism 23
Polarized Beam Splitter, NPBS), polarization splitting prism 27 (PBS), the second collimation lens 28, condenser lens 29,
Polarizer 24, field lens 25 (Tube Lens) and CCD camera 26 form.
Visualization model 2 is designed based on confocal optical path, and its light path principle is：The light that white light LEDs 21 are sent is by the
After collimating lens 22 collimate, then enter microcobjective (by second after unpolarized Amici prism 23, polarization splitting prism 27
Collimation lens 28 and condenser lens 29 form), focus on the surface of workpiece 3 by microcobjective.The light that the surface of workpiece 3 is reflected back is same
Sample enters polarizer 24, field lens after microcobjective, polarization splitting prism 27, unpolarized Amici prism 23 with parallel rays
25, then field lens 25 by carry image information parallel rays be imaged in CCD camera 26.Because polarization splitting prism 27
In the presence of the white light that white light LEDs 21 are sent will not interfere to measurement signal.
The principle of measurement module 1 as shown in Fig. 2 measurement module 1 by laser 11, grating 12, polarization splitting prism and four
/ mono- wave plate 13, cylindrical lens 14, integrated optoelectronic circuit 16 and quadrant sensors 15 form, and the light path of measurement module 1 is former
Reason is：It is divided into P light and S after grating 12 injects polarization splitting prism and quarter-wave plate 13 from the light that laser 11 is sent
Light.P light is mapped to a distant place, and S light then enters visualization mould through quarter-wave plate and after 45 degree of light direction integral-rotation of outgoing
The polarization splitting prism 27 of block 2, the surface of workpiece 3 is then focused on after microcobjective.The light being reflected back by the surface of workpiece 3
After then passing sequentially through microcobjective, polarization splitting prism 27, polarization splitting prism and quarter-wave plate 13 and cylindrical lens 14
Return in the quadrant sensors 15 in integrated optoelectronic circuit 16, the signal of quadrant sensors 15 passes through integrated optoelectronic circuit 16
It can be used for three-dimensional measurement after processing.
A kind of MEMS measurement apparatus based on the non-contact triggering probe of three-dimensional micro-nano, referring to Fig. 3, being by probe
System 4, nanometer micropositioner 6, laser interferometer 7 and tested micro element 5 form, and laser interferometer 7 is used as length standard, nanometer fine motion
Moving parts of the platform 6 as three-dimensional, probe 4 is demarcated and tested by the device.
Probe laterally triggering facula position change schematic diagram as shown in figure 4, being partnered step by a and b, when luminous point is not
With position when, the light energy for being reflected back quadrant sensors is different.Quadrant sensors under different situations are calculated respectively
The light energy received, its changing rule is found out, establish corresponding mathematical modeling, and determine rational threshold value touching as probe
Hair point.The longitudinal direction triggering of probe is according to astigmatism principle, it is determined that suitable output voltage values are as activation threshold value.
Above content is only to design example of the present utility model and explanation, the technology of affiliated the art
Personnel are made various modifications or supplement to described specific embodiment or substituted using similar mode, without departing from
The design of utility model surmounts scope defined in the claims, all should belong to the scope of protection of the utility model.
Claims (2)
1. a kind of non-contact triggering probe of three-dimensional micro-nano, is made up of visualization model (2) and measurement module (1),
The visualization model (2) is by white light LEDs (21), the first collimation lens (22), unpolarized Amici prism (23), polarization point
Light prism (27), the second collimation lens (28), condenser lens (29), polarizer (24), field lens (25) and CCD camera (26) group
Into；
The light that white light LEDs (21) are sent by the first collimation lens (22) collimation after, then by unpolarized Amici prism (23), partially
The Amici prism (27) that shakes enters the microcobjective being made up of the second collimation lens (28) and condenser lens (29) afterwards, by micro- thing
Mirror focuses on workpiece (3) surface；The light that workpiece (3) surface is reflected back also passes through microcobjective, polarization splitting prism (27), non-
Polarizer (24), field lens (25) are entered with parallel rays after polarization splitting prism (23), then field lens (25) will carry shadow
As the parallel rays of information is imaged in CCD camera (26)；
Measurement module (1) is by laser (11), grating (12), polarization splitting prism and quarter-wave plate (13), cylindrical lens
(14), integrated optoelectronic circuit (16) and quadrant sensors (15) composition；
It is divided into P after grating (12) injects polarization splitting prism and quarter-wave plate (13) from the light that laser (11) is sent
Light and S light, P light are mapped to a distant place, and S light then enters visually through quarter-wave plate and after 45 degree of light direction integral-rotation of outgoing
Change the polarization splitting prism (27) of module (2), workpiece (3) surface is then focused on after microcobjective；By workpiece (3) surface
The light being reflected back then passes sequentially through microcobjective, polarization splitting prism (27), polarization splitting prism and quarter-wave plate
(13) and after cylindrical lens (14) return in the quadrant sensors (15) in integrated optoelectronic circuit (16), quadrant sensors
(15) signal is used for three-dimensional measurement after integrated optoelectronic circuit (16) processing.
2. a kind of MEMS measurement apparatus based on the non-contact triggering probe of three-dimensional micro-nano as claimed in claim 1, it is special
Sign is：It is made up of probe system (4), nanometer micropositioner (6), laser interferometer (7) and tested micro element (5), laser interference
Instrument (7) is used as length standard, moving parts of the nanometer micropositioner (6) as three-dimensional, probe (4) is carried out by the device
Demarcation and test.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106840032A (en) * | 2017-04-07 | 2017-06-13 | 安徽电气工程职业技术学院 | Three-dimensional micro-nano noncontact triggering probe and MEMS measurement apparatus |
| CN108387907A (en) * | 2018-01-15 | 2018-08-10 | 上海机电工程研究所 | Flash-mode laser radar echo signal physical image simulation system and method |
| CN109974583A (en) * | 2019-04-11 | 2019-07-05 | 南京信息工程大学 | A kind of non-contact optical element surface surface shape measurement device and method |
| CN110686617A (en) * | 2019-11-22 | 2020-01-14 | 北京理工大学 | Aspheric parameter error interferometry method and system based on astigmatism positioning |
-
2017
- 2017-04-07 CN CN201720359317.3U patent/CN206832199U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106840032A (en) * | 2017-04-07 | 2017-06-13 | 安徽电气工程职业技术学院 | Three-dimensional micro-nano noncontact triggering probe and MEMS measurement apparatus |
| CN108387907A (en) * | 2018-01-15 | 2018-08-10 | 上海机电工程研究所 | Flash-mode laser radar echo signal physical image simulation system and method |
| CN109974583A (en) * | 2019-04-11 | 2019-07-05 | 南京信息工程大学 | A kind of non-contact optical element surface surface shape measurement device and method |
| CN109974583B (en) * | 2019-04-11 | 2024-03-26 | 南京信息工程大学 | Non-contact optical element surface shape measuring device and method |
| CN110686617A (en) * | 2019-11-22 | 2020-01-14 | 北京理工大学 | Aspheric parameter error interferometry method and system based on astigmatism positioning |
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