CN102494623B - Measuring method of non-contact measuring device of center to center distance of lens optical surfaces - Google Patents
Measuring method of non-contact measuring device of center to center distance of lens optical surfaces Download PDFInfo
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- CN102494623B CN102494623B CN201110357756.8A CN201110357756A CN102494623B CN 102494623 B CN102494623 B CN 102494623B CN 201110357756 A CN201110357756 A CN 201110357756A CN 102494623 B CN102494623 B CN 102494623B
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Abstract
The invention relates to a method for non-contact measuring the center to center distance of lens optical surfaces and a measuring device. In the invention, emergent light form a wideband light source generates an interfere signal through an interference structure; two-dimensional chromatography images of the optical surfaces in the lens can be obtained through the sampling and image reconstruction for the interference signal; a thin parallel light beam is used in a sample arm as a scanning light beam, the starting position of the related chromatography imaging can be changed through moving an optical fiber collimating device, and further the characteristic images of all the optical surfaces with different depth in the lens can be obtained; and finally, the center to center distance between the two optical surfaces can be obtained as per the positions of the optical surfaces in the characteristic images and the moving distance of the imaging starting position. The invention has the advantages of non-contact nondestructive measurement, high measuring accuracy and simplicity in data processing, and can be widely applied in the fields such as optical processing, optical alignment and optical detection.
Description
Technical field
The invention belongs to optical measurement field, be specifically related to the OC contactless measurement of optical surface and measurement mechanism in a kind of camera lens, it is applicable to the detection to the airspace of camera lens or lens group or lens center thickness in optical alignment process.
Background technology
The dress alignment in the dress school, particularly object lens of optical system connects and affects imaging optical instrument imaging quality and performance, is very crucial technique.The dress school process of object lens mainly contains the requirement of three aspects: the eccentric error of 1) proofreading and correct each face; 2) guarantee airspace; 3) installing firmly under prerequisite, guaranteeing that minute surface is indeformable.The measurement of airspace and control are one of critical processes of object lens production.If airspace can not strictly be controlled, spherical aberration, aberration be can bring and focal length, multiplying power etc. affected, even have a strong impact on object lens image quality.The measurement of airspace and control are one of critical processes of object lens production.
Optical surface spacing has many measuring methods at present, is mainly divided into two classes: contact type measurement and non-contact measurement.The domestic contact method of still generally continuing to use is measured.Contact measurement method has two kinds conventionally: the one, and the distance on the measurement upper summit of last lens and the upper summit of rear lens, then deducts lens thickness; The 2nd, measure sphere summit to the distance of microscope base section.Instrument with contacts mainly contains: dial gauge, clock gauge or grating dial gauge etc.The major defect of contact type measurement is easily to scratch lens surface.For avoiding scratching, conventionally between measuring head and measured surface, add one deck protection sheet, so measuring accuracy is low.And the length consuming time of contact type measurement, cannot in optics processing and dress process, realize guiding in real time.The surface that is coated with special rete for some, forbids contact type measurement, therefore must adopt non-contact measurement.
A kind of novel Non-contact-type optical system air spacing measuring method has been proposed in Chinese Patent Application No. " 01133730.3 ", by Fizeau interferometer, form main Systems for optical inspection, the focus of interferometer standard lens is gathered on the summit of measured lens, by a photoelectronic imaging converter, measured lens minute surface summit wavefront upset auto-interference is located, the standard lens interlock of indication grating and interferometer, is worth thereby the frame of reference consisting of grating sensor and digital display meter reads the airspace that the amount of movement of standard lens obtains optical system.
This measuring method is compared contact type measurement and is had the following advantages: realized contactless nondestructive measurement, greatly improved measuring accuracy; The dress school that can be used for the special lenses such as plated film is detected; Convenient reading is simple.This measuring method has realized non-contact measurement, but himself still exists a lot of defects: the focus location of standard lens is realized by the degree of crook of adjusting interference fringe, complex operation in adjustment process, and workload is larger, has introduced larger personal error.
Optical coherence tomography (OCT) is a kind of chromatographic technique of newly-developed, low coherence interferometer and confocal scanning microscopy are combined, utilize heterodyne detection technology to obtain the internal information of sample, its imaging depth reaches mm magnitude, spatial resolution remains on μ m magnitude, is a kind of harmless real time imagery instrument of high resolving power in a lot of fields with bright prospects.
Prior art " the optical surface measurement method for distance based on optical coherence tomography ", Shi Guohua etc., < < Chinese laser > >, Dec the 36th in 2009 volume, disclose a kind of optical surface measurement method for distance based on optical coherence tomography, the present invention further improves and obtains on its basis.
Summary of the invention
The object of the invention is to for the deficiencies in the prior art part, the OC contactless measurement of optical surface and measurement mechanism in a kind of camera lens are provided, can measure non-contactly optical surface center distance in camera lens, have that measuring accuracy is high, data processing is simple, can realize guiding in real time, use advantage flexibly simultaneously.
Technical scheme provided by the invention is: the OC contactless measurement of optical surface in a kind of camera lens, and step is as follows:
Wherein, before step 10, also comprise step 00, make sample arm scanning light beam by camera lens optical axis to be measured; The described sample arm scanning light beam that makes is to cover after reference arm reflected light the light intensity maximum that photodetector detects by the criterion of camera lens optical axis to be measured.
Wherein, step 20 comprises:
Step 21, makes coherence chromatographic imaging reference position move Δ z, obtains an optical coherence tomography image;
Step 22, observes the characteristic image that whether has next optical surface in the optical coherence tomography image obtaining in step 21, continues if not execution step 21, if execution step 23;
Step 23, remembers that this coherence chromatographic imaging reference position moving total is x
i, i ∈ 1,2 ..., and N-1}, N is the optical surface sum relevant to optical surface spacing to be measured, has N-1 adjacent optical surface spacing.
Step 30, if obtained the characteristic image of the whole optical surfaces relevant to the optical surface spacing to be measured of camera lens to be measured, execution step 40, otherwise execution step 20;
Step 40, carries out data processing to the characteristic image having obtained, and tries to achieve required optical surface distance values;
Wherein, step 40 comprises:
Step 41 is determined optical surface center in the characteristic image having obtained, and remembers that the pixel position of j optical surface in its characteristic image is z
j, j ∈ 1,2 ..., N};
Step 42, calculates adjacent two optical surface distance values, and remembers that i adjacent optical surface spacing value is l
i, computing formula is
i ∈ 1,2 ..., N-1}, x
ifor corresponding coherence chromatographic imaging reference position amount of movement, n
ifor the Refractive Index of Material at interval, d is the corresponding light path value of the single pixel of tomographic map;
Step 43, the adjacent two optical surface distance values that obtain according to step 42 obtain required two optical surface distance values.
Wherein, scanning light beam described in step 00 is thin parallel beam.
Wherein, the method that changes coherence chromatographic imaging reference position in step 20 is optical fiber collimator in optical fiber collimator or mobile optical lag line in mobile example arm, or optical fiber collimator in optical fiber collimator and optical delay line in mobile example arm simultaneously.
Wherein, characteristic image described in step 30 is the two-dimensional cross sectional tomographic map that optical coherent chromatographic imaging obtains.
Wherein, the z of Δ described in step 21 is less than the axial areas imaging of coherence tomography system.
Wherein, to move be to move to sample position along light incident direction to described coherence chromatographic imaging reference position.
The present invention also provides the OC non-contact measurement apparatus of optical surface in a kind of camera lens, this measurement mechanism comprises wideband light source, fiber coupler, two Polarization Controllers, phase modulator, optical delay line, Sample Scan device, photodetector, low-noise preamplifier, data collecting card, computing machine;
This measurement mechanism adopts the Michelson interference structure of fiberize, and the light sending from wideband light source, after fiber coupler light splitting, enters respectively reference arm and sample arm; Enter reference arm Yi road successively by Polarization Controller, phase modulator and optical delay line, optical delay line adopts spectral domain rapid scanning lag line, and optical delay line is by optical fiber collimator, diffraction grating, and fourier lense, scanning galvanometer, catoptron forms; What enter sample arm leads up to another Polarization Controller and Sample Scan device, Sample Scan device comprises optical fiber collimator, high precision guide rail, electronic micro-displacement platform and testing sample, two-way reflected light interferes when fiber coupler converges, after interference signal is surveyed by photodetector, at low-noise preamplifier, amplify, filtering, then access data capture card and computing machine.
The present invention is with respect to the advantage of prior art:
1, the OC contactless measurement of optical surface in camera lens of the present invention, to sample nondestructive, can flexible Application in dress school and detection field;
2, the present invention has utilized Optical Coherence Tomography Imaging Technology, so measuring accuracy is high, can reach micron dimension;
3, the present invention uses thin parallel beam scanning, and by high precision guide rail moving fiber collimating apparatus, and then changing tomography scope, measurement range reaches tens millimeters; Data processing is simple.
Accompanying drawing explanation
Fig. 1 is workflow diagram of the present invention;
Fig. 2 is structure of the detecting device schematic diagram of the present invention;
Fig. 3 is the optical delay line structural representation that embodiment of the present invention adopts;
Fig. 4 is the Sample Scan apparatus structure schematic diagram that embodiment of the present invention adopts;
Fig. 5 is data processing schematic diagram;
Fig. 6 object lens sample interval measurement result schematic diagram.
Embodiment
Below in conjunction with the drawings and the specific embodiments, the present invention is further illustrated.
As shown in Figure 2, apparatus of the present invention comprise wideband light source 1, fiber coupler 2, Polarization Controller 3,4, phase modulator 5, optical delay line 6, Sample Scan device 7, photodetector 8, low-noise preamplifier 9, data collecting card 10, computing machine 11.
Measurement mechanism adopts the Michelson interference structure of fiberize, and the light sending from wideband light source 1, after fiber coupler 2 light splitting, enters respectively reference arm and sample arm.Enter reference arm Yi road successively by Polarization Controller 3, phase modulator 5 and optical delay line 6, optical delay line 6 is selected spectral domain rapid scanning lag line (Rapid Scan Optical Delay Line, RSOD), optical delay line 6 is by optical fiber collimator 12, diffraction grating 13, fourier lense 14, scanning galvanometer 15, catoptron 16 forms, as shown in Figure 3; What enter sample arm leads up to Polarization Controller 4 and Sample Scan device 7, and Sample Scan device 7 comprises optical fiber collimator 18, high precision guide rail 17, and electronic micro-displacement platform 19 and testing sample 20, as shown in Figure 4.Two-way reflected light interferes when fiber coupler 2 converges, and after interference signal is surveyed by photodetector 8, at low-noise preamplifier 9, amplifies, filtering, then access data capture card 10 and computing machine 11.
Principle of the present invention is: due to the low coherence of wideband light source 1, when reference arm light path is fixedly time, only have reference arm reflected light and sample arm back reflected laser optical path difference to be less than the coherent length of wideband light source 1, just can interfere, only have the back reflected laser of sample certain depth just can interfere, interference light light intensity is maximum when two arm optical path differences are zero, along with the increase of optical path difference, reduces rapidly.When optical delay line 6 carries out light path scanning, interfere respectively refractive index information on interference signal envelope representative sample depth direction with the back reflected laser of sample different depth.Optical surface for refractive index sudden change, envelope center represents optical surface positional information, therefore the centre distance of adjacent envelope just represents the spacing on adjacent optical surface, and the change in optical path length of optical delay line 6 is strict controlled, so by obtaining optical path difference corresponding to adjacent envelope center, more just can obtain its spacing value divided by Refractive Index of Material between adjacent optical surface.
First the current signal that photodetector 8 produces delivers to low-noise preamplifier 9, amplify, voltage transitions, filtering, DC component is filtered, by data collecting card 10, carry out data acquisition again and send into computing machine 11, carry out Hilbert transform and extract the envelope information of interference signal, it is amplitude information, then amplitude signal is converted to gradation of image value, computing machine obtains the characteristic image of sample respective depth scope according to respective algorithms, this algorithm is ripe application in prior art, does not describe in detail herein.
Described in above, the axial gray scale envelope of characteristic image is interference signal envelope.Optical surface for refractive index sudden change, gray scale extreme point represents optical surface positional information, therefore the distance between gray scale extreme point just represents the spacing on respective optical surface, and the change in optical path length of optical delay line 6 is strict controlled, imaging depth direction scope can Accurate Calibration, so can obtain actual range between respective optical surface and imaging reference position by obtaining gray scale extreme point position in characteristic image.
In the present embodiment, centered by wideband light source 1, wavelength is 1310nm, and the near infrared wideband light source that full width at half maximum is 95nm, according to formula
its coherent length is about 7.97 μ m; Fiber coupler 2 is selected 2 * 2 wide-band couplers, and centre wavelength is at 1310nm, bandwidth 100nm, splitting ratio 50:50; High precision guide rail 17 reading accuracy 1 μ m, for accurately moving up and down of optical fiber collimator 18, the thin parallel beam diameter of optical fiber collimator 18 shapings is 500 μ m.
In the present embodiment, Polarization Controller 3 mates for the polarization state of reference arm reflected light and sample back reflected laser, thereby improves system signal noise ratio.Adopted interference signal carrier frequency technology, with reference to the modulating frequency of phase modulator in arm 5, be located at 500kHz, made signal and the low-frequency noise can be effectively separated on frequency domain.Adopt the digital filtering of low-noise preamplifier implementing circuit filtering and subsequent software.This device is realized by RSOD in depth direction (z direction) scanning sample, and Sample Scan mode is selected in transversal scanning, utilizes electronic micro-displacement platform 17 to realize.
Using signal generator generated frequency is 500Hz, peak-to-peak value is the triangular signal driven sweep galvanometer 15 of 2V, signal generator generates with triangular signal simultaneously fixed delay, dutycycle is adjustable, and door triggers matrix signal, for trigger data acquisition card 10, carry out data acquisition, sample frequency 5M/s.In the present embodiment, set door and trigger the relative triangular signal delay 20% of matrix signal, single axial scan 2048 points of sampling, system axial areas imaging 1.074mm (in air), image resolution ratio is 800*406, the corresponding air middle distance of single pixel d is 2.645 μ m.
Measuring process is described further to (referring to Fig. 1) below.
Step 00, first make sample arm scanning light beam by camera lens optical axis to be measured, concrete grammar, for opening light source, is covered after reference arm reflected light, micro-ly move lens location to be measured, when the light intensity that detects when photodetector 8 is maximum, think that scanning light beam is by camera lens optical axis to be measured.
Executive software control signal generator produces triangular signal, drive optical delay line 6 to start to carry out light path scanning, trigger pip trigger data acquisition card 10 starts data acquisition simultaneously, electronic micro-displacement platform 19 is done traverse motion, computing machine 11 carries out image reconstruction and shows, obtains the two-dimensional cross sectional tomographic map of first optical surface.
Step 30, if obtained the characteristic image of the whole optical surfaces relevant to optical surface spacing to be measured, execution step 40, otherwise execution step 20.
Step 40, carries out data processing to the characteristic image having obtained, and tries to achieve required optical surface distance values.
Step 40 comprises:
Step 41 is determined optical surface center in characteristic image, remembers that the pixel position of j optical surface in its characteristic image is z
j, j ∈ 1,2 ..., N}.
Along picture depth direction, do gray-scale value projection statistics, in the present embodiment, image size is 800*406, at each depth location (totally 406 places), the summation of adding up all pixels (800) gray-scale value, extreme point position represents optical surface position.
Step 42, calculates adjacent two optical surface distance values, and remembers that i adjacent optical surface spacing value is l
i, computing formula is
i ∈ 1,2 ..., N-1}, x
ifor corresponding coherence chromatographic imaging reference position amount of movement, n
ifor the Refractive Index of Material at interval, d is the corresponding light path value of the single pixel of tomographic map.
Fig. 5 is the schematic diagram of data processing.
Fig. 6 is the measurement result schematic diagram to object lens, and object lens are totally 5 optical surfaces, and the characteristic image of each optical surface as shown in FIG., calculates 4 adjacent optical surface spacing values according to above-mentioned data processing method and is respectively: l
1=6.021mm, l
2=4.066mm, l
3=10.750mm, l
4=5.929mm.
Step 43, the adjacent two optical surface distance values that obtain according to step 42 obtain required two optical surface distance values.
To the required optical surface spacing of object lens in Fig. 6 be airspace the 3rd optical surface be the spacing L of the 1st optical surface and the 5th optical surface with spacing d, the object lens gross thickness of the 4th optical surface.By 4 adjacent optical surface spacing values that obtained in step 42, can be obtained: d=l
3=10.750mm, L=l
1+ l
2+ l
3+ l
4=26.766mm.
Those skilled in the art is not departing under the condition of the definite the spirit and scope of the present invention of claims, can also carry out various modifications to above content.Therefore scope of the present invention is not limited in above explanation, but determined by the scope of claims.
Claims (1)
1. the measuring method of the OC non-contact measurement apparatus of optical surface in a camera lens, it is characterized in that, this measurement mechanism comprises wideband light source (1), fiber coupler (2), two Polarization Controllers (3,4), phase modulator (5), optical delay line (6), Sample Scan device (7), photodetector (8), low-noise preamplifier (9), data collecting card (10), computing machine (11);
This measurement mechanism adopts the Michelson interference structure of fiberize, and the light sending from wideband light source (1), after fiber coupler (2) light splitting, enters respectively reference arm and sample arm; Enter reference arm Yi road successively by Polarization Controller (3), phase modulator (5) and optical delay line (6), optical delay line (6) adopts spectral domain rapid scanning lag line, optical delay line (6) is by optical fiber collimator (12), diffraction grating (13), fourier lense (14), scanning galvanometer (15), catoptron (16) forms; What enter sample arm leads up to another Polarization Controller (4) and Sample Scan device (7), and Sample Scan device (7) comprises optical fiber collimator (18), high precision guide rail (17), electronic micro-displacement platform (19) and testing sample (20); Two-way reflected light interferes when fiber coupler (2) converges, and after interference signal is surveyed by photodetector (8), at low-noise preamplifier (9), amplifies, filtering, then access data capture card (10) and computing machine (11);
This measuring method comprises:
Step 00, makes sample arm scanning light beam by camera lens optical axis to be measured; The described sample arm scanning light beam that makes by the criterion of camera lens optical axis to be measured is, covers after reference arm reflected light, and the light intensity that photodetector detects is maximum, and described scanning light beam is thin parallel beam;
Step 10, carries out optical coherent chromatographic imaging to first optical surface of camera lens to be measured;
Step 20, changes coherence chromatographic imaging reference position, and the next optical surface of camera lens to be measured is carried out to optical coherent chromatographic imaging; Wherein: the method that changes coherence chromatographic imaging reference position is optical fiber collimator in mobile example arm; It is to move to sample position along light incident direction that coherence chromatographic imaging reference position moves;
Step 20 specifically comprises:
Step 21, makes coherence chromatographic imaging reference position move Δ z, obtains an optical coherence tomography image; Described Δ z is less than the axial areas imaging of coherence tomography system;
Step 22, observes the characteristic image that whether has next optical surface in the optical coherence tomography image obtaining in step 21, continues if not execution step 21, if execution step 23;
Step 23, remembers that this coherence chromatographic imaging reference position moving total is x
i, i ∈ 1,2 ..., and N-1}, N is the optical surface sum relevant to optical surface spacing to be measured, has N-1 adjacent optical surface spacing;
Step 30, if obtained the characteristic image of the whole optical surfaces relevant to the optical surface spacing to be measured of camera lens to be measured, execution step 40, otherwise execution step 20; Wherein said characteristic image is the two-dimensional cross sectional tomographic map that optical coherent chromatographic imaging obtains;
Step 40, carries out data processing to the characteristic image having obtained, and tries to achieve required optical surface distance values; Wherein:
Step 40 also comprises:
Step 41 is determined optical surface center in the characteristic image having obtained, and remembers that the pixel position of j optical surface in its characteristic image is z
j, j ∈ 1,2 ..., N};
Step 42, calculates adjacent two optical surface distance values, and remembers that i adjacent optical surface spacing value is l
i, computing formula is
x
ifor corresponding coherence chromatographic imaging reference position amount of movement, n
ifor the Refractive Index of Material at interval, d is the corresponding light path value of the single pixel of tomographic map;
Step 43, the adjacent two optical surface distance values that obtain according to step 42 obtain required two optical surface distance values.
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