WO2023272892A1

WO2023272892A1 - Photoelectric gas sensor probe and photoelectric gas detection device

Info

Publication number: WO2023272892A1
Application number: PCT/CN2021/112481
Authority: WO
Inventors: 宁雅农; 刘统玉; 贾军; 李德虎; 马春飞; 顾成武
Original assignee: 广东感芯激光科技有限公司; 山东微感光电子有限公司
Priority date: 2021-06-30
Filing date: 2021-08-13
Publication date: 2023-01-05
Also published as: CN113406001A; CN113406001B

Abstract

A photoelectric gas sensor probe and a photoelectric gas detection device. The photoelectric gas sensor probe comprises a multi-point reflection two-dimensional optical path module body (1), and a first plane reflector (2), a second plane reflector (3), a parallel light source (4) and a photoelectric detector (5) that are embedded in the optical path module body (1). The reflecting surfaces of the first plane reflector (2) and the second plane reflector (3) are opposite and parallel to each other, and the centers of the first plane reflector (2) and the second plane reflector (3) are not on the same straight line. The photoelectric gas sensor probe further comprises a triangular reflector fixture block (6) for fixing the first plane reflector (2) and the second plane reflector (3). The angle of opposite sharp corners of two reflector fixture blocks (6) is consistent with the reflection angle of a parallel light beam emitted by the parallel light source (4). The triangular blocks are provided to fix the parallel reflectors, and heating pieces (7) are additionally arranged, and therefore, the problems of degumming due to damp, water condensation and the like are effectively avoided, meanwhile, the volume of an absorption cell is reduced, the measurement optical distance is increased, the stability and reliability of an optical path are greatly improved, and the debugging difficulty in production is reduced.

Description

Photoelectric gas sensor probe and photoelectric gas detection device

technical field

The invention relates to the technical field of photoelectric gas sensors, in particular to a photoelectric gas sensor probe and a photoelectric gas detection device.

Background technique

At present, in order to meet the growing requirements of environmental safety detection and production safety monitoring, various photoelectric gas sensors based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) technology have been continuously developed and used in actual production to achieve real-time, online detection and measurement. Tunable Diode Laser Absorption Spectroscopy (TDLAS) technology utilizes the characteristics of tunable and narrow spectral linewidth of semiconductor lasers. By tuning the laser wavelength at the spectral absorption peak of the detected gas, the laser wavelength can be precisely aligned with the measured gas. The absorption peak of the gas realizes the rapid detection of the gas concentration. At the same time, the interference caused by other gases to the measurement is also avoided. In this type of sensor, the advanced digital signal processing technology can not only realize the continuous measurement of the measured gas concentration, but also the real-time measurement of the temperature, pressure and humidity of the measured location. These environmental data can make the new type Gas sensors also have the functions of automatic diagnosis and self-calibration, so that these laser spectrum gas sensors can be more widely used in different production processes and safety precautions.

In the design of these gas sensor probes, in order to improve the measurement accuracy, it is usually necessary to increase the total length of the optical path in the limited size of the gas absorption cell. After multiple reflections, the measurement optical path length is increased, and the volume of the gas chamber and the size of the sensing probe are reduced. These mirrors are usually pasted in a fixed position in the gas absorption cell to form a fixed light beam. Procedure. When this type of gas sensor is used in an environment with large temperature changes and high humidity, the environmental conditions of the sensor will have at least two adverse effects on these mirrors: the temperature difference changes cause condensation on the mirror surface, and Mirror debonding due to moisture.

Therefore, when this type of sensor is used in an actual application site, the key technical problems that must be solved are how to prevent condensation of the reflector and solve the problem of degumming of the adhesive due to moisture.

Contents of the invention

Therefore, in order to solve the problems existing in the above-mentioned prior art, one of the objects of the present invention is to provide a photoelectric gas sensor probe with anti-condensation and no degumming, by setting a triangular reflector block to fix the parallel reflector without using glue The reflector can effectively avoid the problem of viscose degumming due to moisture, and at the same time reduce the volume of the absorption cell, increase the measurement optical path, and greatly improve the stability and reliability of the optical path. It also reduces the difficulty of debugging in production. , reducing production and processing costs.

At the same time, the heating plate attached to the back of the two plane mirrors is connected to a heating drive circuit, and is controlled by the temperature sensor of the sensor, and the light intensity difference detected by the laser light intensity detector and the photodetector. When the light intensity difference When the value increases to the preset start threshold, the control circuit sends a start heating signal, and the heating drive current will pass through the heating plate to keep the mirror surface temperature higher than the ambient temperature, so that the mirror surface remains in a non-condensing state.

The purpose of the present invention adopts following technical scheme to realize:

A photoelectric gas sensor probe, comprising a multi-point reflection two-dimensional optical path module body, a first plane reflector embedded in the optical path module body, a second plane reflector, a parallel light source, and a photoelectric detector; the optical path module The inside of the body forms a gas absorption pool for containing the gas to be measured, and the gas to be measured enters the gas absorption pool from above the optical path module body; it is characterized in that the reflection surfaces of the first plane mirror and the second plane mirror Relatively arranged and parallel to each other, the centers of the first plane reflector and the second plane reflector are not on the same straight line; Fixing the triangular reflector block of the first plane reflector and the second plane reflector; the sharp angles of the two reflector blocks are consistent with the reflection angle of the parallel light beam emitted by the parallel light source; The parallel light beam is received by the photodetector after multiple reflections by the first plane reflector and the second plane reflector.

As a further illustration of the above solution, the cross-sectional shape of the triangular reflector block is an isosceles triangle.

As a further description of the above solution, the optical path module body is provided with a card slot for installing the first plane reflector and the second plane reflector, and the inner walls on both sides of the card slot are in contact with the mirror block. The bottom is on the same level.

As a further description of the above solution, heating chips for heating the first plane reflector and the second plane reflector are respectively arranged in the card slot, and the heating plates are respectively arranged closely on the first plane reflector. mirror, the back of the second plane mirror.

As a further illustration of the above solution, the first plane reflector, the second plane reflector, the heating plate, and the reflector block are all fixed on the inner walls on both sides of the clamping slot by screws.

As a further description of the above solution, the card slot is filled with a heat insulator for covering the first plane reflector, the second plane reflector and the heating sheet.

As a further illustration of the above solution, the bottom of the optical path module body is provided with a sensor for detecting the temperature and air pressure in the absorption cell, and the output signal of the sensor is used for compensation when calculating the gas concentration.

As a further description of the above scheme, the parallel light source includes a laser with a light intensity detector and a parallel light lens, and the laser emits a parallel light beam through the parallel light lens; the front end of the photodetector is provided with a focusing lens, so The focusing lens is used to focus the parallel light beam onto the photosensitive surface of the photodetector.

As a further description of the above solution, the photoelectric gas sensor probe also includes a probe housing, the probe housing includes an upper housing and a lower housing, and the photoelectric gas sensor probe is arranged on a surface formed by the upper housing and the lower housing. In the cavity; the lower casing is also provided with a drive circuit module and a signal processing circuit module, the parallel light source and the heating plate are respectively electrically connected to the drive circuit module; the detector that comes with the laser , the photodetector and the temperature and pressure sensor are electrically connected to the signal processing circuit module.

As a further description of the above solution, the drive circuit module also includes an embedded detector for collecting the output signals of the laser’s own detector and photodetector, and after analysis and calculation, controls the heating drive current to control the heating plate A control module for starting/shutting down the drive circuit.

As a further illustration of the above solution, a plurality of gas inlet holes are arranged on the top of the upper casing; a filter screen is installed above the gas inlet holes.

As a further illustration of the above solution, the inner wall and top of the optical path module are coated with a black anti-reflection coating.

The second object of the present invention is to provide a photoelectric gas detection device, which includes the above-mentioned photoelectric gas sensor probe.

Compared with the prior art, the beneficial effects of the present invention are:

1. The present invention fixes the parallel reflector by setting the triangular reflector block and the inner walls on both sides of the reflector slot, without using glue to paste the reflector, effectively avoiding the problem of viscose being damp and degumming, and reducing the volume of the absorption pool at the same time , which increases the measurement optical path, greatly improves the stability and reliability of the optical path, reduces the difficulty of debugging in production, and reduces the cost of production and processing;

2. In addition, the present invention adopts the transceiver design of the parallel light source and the photodetector with the focusing lens, and utilizes the high precision and dimensional consistency added by precision machinery to ensure the precision that the mirror surfaces of the two plane reflectors are parallel to each other, thereby In the actual production, the difficulty of adjusting the optical path is reduced; the overall inventive design not only reduces the complexity of the production process, but also improves the yield of the product, which is convenient for mass production;

3. Simultaneously, the present invention arranges the heating sheet behind the plane reflector, utilizes the temperature information of the air chamber, and the difference between the two average light intensities of the parallel laser beams monitored by the light intensity detector and the photodetector of the laser to start/ Turn off the heater drive circuit, so that the sensor keeps the temperature of the plane mirror higher than the ambient temperature at low temperature, avoiding the problem of water condensation on the plane mirror surface, and improving the stability of use;

4. In the present invention, the two-dimensional optical path formed by the multi-point reflection generated by the double parallel mirrors increases the total detection optical path in the absorption pool, which is beneficial to improve the detection signal-to-noise ratio and measurement accuracy; due to this multi-point reflection two-dimensional The optical path reduces the volume of the sensor head, thereby reducing the response time of the measurement.

Description of drawings

Fig. 1 is the multi-point reflection two-dimensional optical path schematic diagram of the optical path module body in the photoelectric gas sensor probe of embodiment 1 of the present invention;

2 is a schematic cross-sectional view of the optical path module body in the photoelectric gas sensor probe of Embodiment 1 of the present invention;

Fig. 3 is a schematic structural diagram of the optical path module body in the photoelectric gas sensor probe according to Embodiment 1 of the present invention arranged in the probe housing.

In the figure: 1. Optical path module body; 11. Card slot; 2. First plane reflector; 3. Second plane reflector; 4. Parallel light source; 5. Photoelectric detector; 6. Reflector block; 7 , heating plate; 8, sensor; 9, screw; 100, probe shell; 101, upper shell; 102, lower shell; 103, air intake hole; 104, filter screen; 105, drive circuit module; 106, signal Process circuit modules.

detailed description

In order to facilitate the understanding of the present invention, the technical solution and advantages of the photoelectric gas sensor probe of the invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The specific structure and characteristics of the photoelectric gas sensor probe are described below by way of example, which shall not constitute any limitation to the present invention. At the same time, for any one of the technical features mentioned below (including implicit or public), as well as any one of the technical features directly shown or implied in the figure, any combination or deletion can be continued between these technical features. minus, thereby forming many other embodiments that may not be directly or indirectly mentioned in the present invention. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

In the description of the present invention, unless otherwise specified, the orientation or positional relationship indicated by the terms "top", "bottom", "left", "right", "relative" and the like are based on the orientation or positional relationship shown in the drawings , is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

Embodiment 1 photoelectric gas sensor probe

As shown in Figures 1-3, a photoelectric gas sensor probe includes a multi-point reflection two-dimensional optical path module body 1, a first plane reflector 2 and a second plane reflector 3 embedded in the optical path module body 1 , a parallel light source 4, a photodetector 5; the inside of the optical path module body 1 forms a gas absorption pool that accommodates the gas to be measured, and its internal volume is used to accommodate the gas to be measured; the gas to be measured is provided by the optical path module body 1 The above enters into the gas absorption pool; the reflection surfaces of the first plane reflector 2 and the second plane reflector 3 are oppositely arranged and parallel to each other, and the centers of the first plane reflector 2 and the second plane reflector 3 are not in the On the same straight line; also include the triangular reflectors that are respectively arranged in the middle of the reflection surfaces of the first plane reflector 2 and the second plane reflector 3 for fixing the first plane reflector 2 and the second plane reflector 3 Clamping block 6; the relative sharp angles of the two reflecting mirror clamping blocks 6 are consistent with the reflection angle of the parallel light beam emitted by the parallel light source 4; the parallel light beam passes through the first plane reflector 2, The multiple reflections of the second plane mirror 3 are received by the photodetector 5 .

In this embodiment, by setting the triangular reflector block 6 to fix the parallel reflector, there is no need to use glue to paste the reflector, effectively avoiding the problem of glue getting wet and degumming, reducing the volume of the absorption pool, and increasing the measurement optical path. It also greatly improves the stability and reliability of the optical path, and reduces the production and processing costs while reducing the difficulty of debugging in production;

In addition, the present invention adopts the transceiving design of the parallel light source and the photodetector with focusing lens, and utilizes the high precision and dimensional consistency of precision machinery to ensure the precision that the mirror surfaces of the two plane mirrors are parallel to each other, so that in practice The difficulty of adjusting the optical path is reduced during production; the overall inventive design not only reduces the complexity of the production process, but also improves the yield of the product and facilitates mass production.

As shown in Figure 1, in this embodiment, the reflection surfaces of the first plane mirror 2 and the second plane mirror 3 are oppositely arranged and parallel to each other, while the first plane mirror 2 and the second plane reflector The centers of the mirror 3 are not on the same straight line, and there is an offset distance between the centers of the two. When a beam of parallel light is irradiated from the parallel light source to the first plane reflector 2 at an incident angle, the reflected light beam will be at the same incident angle. Shot to the second plane reflector 3, the second reflected light beam is reflected to the first plane reflector 2 with the same incident angle, and the reflected light beam will continue to pass between the first plane reflector 2 and the second plane reflector 3 There are two consecutive reflections until the final reflected beam is received by a photodetector 5, and the photodetector 5 converts the optical signal into an electronic signal.

The multi-point reflection two-dimensional optical path photoelectric gas sensor probe produced by double parallel mirrors of the present invention reduces the relative position changes of each component because the entire two-dimensional optical path is embedded in a complete metal or synthetic material module body The possibility of improving the stability of the optical path system.

In this embodiment, the material for making the optical path module body 1 can be solid materials such as metal, plastic, and synthetic materials. The multi-point light reflection two-dimensional optical path can be formed by machining or precision injection molding. The multi-point light reflection The two-dimensional optical path consists of five straight optical paths between two plane mirrors, and is embedded in the optical path module body 1 .

In the present invention, when the incident laser light received by the photodetector is modulated by a certain concentration of the gas to be measured, its output signal carries the information of the absorption strength of the gas to be measured at its absorption spectrum.

As a further preferred embodiment, the cross-sectional shape of the triangular reflector block 6 is an isosceles triangle.

As a further preferred embodiment, the optical path module body 1 is provided with a slot 11 for installing the first plane mirror 2 and the second plane mirror 3, and the inner walls on both sides of the slot 11 are in contact with the The bottoms of the reflector block 6 are on the same horizontal plane. The advantage of this design is that when the first plane reflector and the second plane reflector are installed, the reflective surfaces of the first plane reflector and the second plane reflector can be in contact with the inner walls on both sides of the corresponding slot at the same time. In close contact with the bottom wall of the mirror block, and then use plastic head screws to press the first plane mirror and the second plane mirror on the inner walls on both sides of the corresponding slot and the bottom of the mirror block, and you can The purpose of fixing the first plane reflector and the second plane reflector on both sides of the absorption pool is achieved;

Because the first plane reflector 2 and the second plane reflector 3 are mechanically fixed on both sides of the gas absorption pool by screws 10, there is no need to use the process of gluing, so this design effectively avoids the problem of viscose being damp and degummed; reflection Another function of the mirror block is to reduce the effective space of the detection gas chamber, thereby reducing the measurement response time of the sensor.

As a further preferred embodiment, heating chips 7 for heating the first flat mirror 2 and the second flat mirror 3 are respectively arranged in the card slot 11, and the heating chips 7 are arranged close to each other respectively. Describe the backs of the first plane mirror 2 and the second plane mirror 3.

In this embodiment, the size of the heating sheet 7 is smaller than the first plane reflector 2 and the second plane reflector 3; the heating sheet 7 is a superminiature cermet heating element, Metal Ceramics Heater (MCH ), the element is a high-efficiency, energy-saving and environmentally friendly ceramic heating element. Compared with alloy wire and PTC ceramic heating element, MCH has corrosion resistance, the surface of the heating element is not charged, resistant to cold and heat shock, long life, uniform heating, and high thermal conductivity , Comply with EU RoHS environmental protection requirements and other advantages. Micro MCTs have high thermal responsiveness, and by sticking to the back of the insulating reflector, it is possible to directly and effectively heat the reflective part of the reflector.

As a further preferred embodiment, the first plane reflector 2 , the second plane reflector 3 , the heating plate 7 , and the reflector block 6 are all fixed on the inner walls on both sides of the slot 11 by screws.

As a further preferred embodiment, the card slot 11 is filled with a heat insulating material for covering the first plane mirror 2 , the second plane mirror 3 and the heating sheet 7 . In this embodiment, after the installation and commissioning of the first plane reflector 2, the second plane reflector 3, and the heating plate 7 are completed, heat-insulating materials are respectively filled in the slots to ensure that all the heat generated by the heating plate is used for heating. Mirror, which can effectively reduce the power consumption required for heating. Because MCT can generate heat under low voltage, it can control the voltage value applied to the heating plate in real time, and realize the dynamic adjustment and switching between the working state and the resting state of the heating plate, thereby further reducing the power consumption of the entire measurement system.

As a further preferred embodiment, the bottom of the optical path module body 1 is provided with a sensor 9 for detecting the temperature and air pressure in the absorption cell, and the output signal of the sensor is used for compensation when calculating the gas concentration. In this embodiment, the sensor 9 is set for real-time detection of the temperature and air pressure in the gas absorption cell, and the measured temperature and air pressure information will be used to compensate for parameter changes caused by ambient temperature and local air pressure fluctuations, so as to further Improve the accuracy of measuring gas.

As a further preferred embodiment, the parallel light source 4 includes a laser (not shown in the drawings) and a parallel light lens (not shown in the drawings) with its own light intensity detector, and the laser emits a parallel light beam through the parallel light lens ; The front end of the photodetector is provided with a focusing lens, and the focusing lens is used to focus the parallel light beam onto the photosensitive surface of the photodetector. The parallel light source of the present invention is a parallel laser source with adjustable light intensity of a light intensity detector; the laser source can be a low power consumption vertical cavity surface emitting laser (VCSEL) or a DFB laser The light intensity detector is installed in the packaging cap of the laser, and the light detector can detect the change of the light intensity of the laser light source in real time.

As a further preferred embodiment, the photoelectric gas sensor probe also includes a probe housing 100, the probe housing 100 includes an upper housing 101 and a lower housing 102, and the photoelectric gas sensor probe is arranged on the upper housing 101 and the cavity formed by the lower casing 102; the lower casing 102 is also provided with a driving circuit module 105 and a signal processing circuit module 106, and the parallel light source 4 and the heating plate 7 are connected with the driving circuit module 105 respectively. Electrical connection is formed; the detector, photodetector and temperature pressure sensor of the laser are electrically connected to the signal processing circuit module.

In this embodiment, the temperature sensor and laser light intensity detector attached to the sensor detect the real-time temperature of the absorption pool, compare the corresponding dew point temperature, and measure the intensity of the laser light received by the laser light intensity detector and photodetector. Detect and compare, send signals to the drive circuit module, control the heating drive current, heat the heating plate, and keep the mirror surface temperature 2° to 4°C higher than the ambient temperature, so that the mirror surface remains in a non-condensing state.

As a further preferred embodiment, the drive circuit module also includes embedded detectors and photodetectors for collecting the output signals of the laser and analyzing and calculating them to control the heating drive current to control the heating plate A control module for starting/shutting down the drive circuit (not shown in the drawings).

In this embodiment, the principle and process of the heating control of the heating plate after the sensor transmits the signal are as follows: the sensor works in a low-temperature and high-humidity environment, when the temperature of the gas chamber is lower than the preset dew point temperature, and if the laser The light intensity measured by the light intensity detector does not change, but the light intensity of the parallel light beam detected by the photodetector after multiple reflections is weakened, that is, the difference between the light intensity detected by the two detectors increases, indicating that it may be in the A small amount of water condensation is generated at the mirror reflection point; if the laser light intensity value obtained by the photodetector drops to the preset value, or the light intensity difference detected by the two detectors increases to the startup preset value, the circuit that controls the heating plate starts to start , gradually increase the driving current of the heating plate, so that the heating plate can locally heat the reflection point of the reflecting mirror until the light intensity value of the parallel beam obtained by the photodetector returns to the original normal value, or the two detectors detect The light intensity difference is reduced to the shutdown preset value, and the heating sheet control circuit gradually reduces the current applied to the heating sheet to reduce local heating or even stop heating. By detecting the temperature of the gas chamber and the detection and comparison of the laser light intensity values obtained by the laser detector and the photoelectric detector, the working state of the heating plate can be effectively and dynamically adjusted to ensure that the laser value obtained by the detector is always greater than The normal value, that is, the local heating of the heating plate is used to ensure that the specular reflection point will not produce water condensation that affects the laser light intensity, so as to achieve the purpose of anti-condensation water.

In summary, the start-up and shutdown of the drive circuit of the heating plate is controlled by the embedded control module, and is monitored by the measured gas chamber temperature value, the light intensity value measured by the laser's built-in detector and the photodetector. The difference between the average light intensity values of the parallel laser beams is used to determine the startup or shutdown (when the average light intensity is less than/greater than the preset value, the drive circuit of the heating sheet is turned on/off). When the temperature of the gas chamber is lower than the preset temperature value, when the average light intensity difference detected by the laser detector and the photodetector is greater than the preset threshold value, the heating plate is started; when the average light intensity difference value is less than the light intensity threshold value , the heater is turned off. The arrangement of the present invention can effectively and dynamically adjust and control the working state of the heating plate; the intelligent control is more precise, and at the same time, the working energy consumption of the sensor probe is reduced.

As a further preferred embodiment, a plurality of gas inlet holes 103 are arranged on the top of the upper casing 101 ; a filter screen 104 is installed above the gas inlet holes 103 .

In this embodiment, the filter screen 104 is a metal sintered filter screen, and the gas to be measured diffuses into the gas absorption cell through the sintered filter screen 104; it is used to prevent dust, impurities, etc. from entering the absorption cell and contaminating the optical path. The optical element, the filter screen 104 can be replaced during maintenance, and the operation is convenient.

As a further preferred embodiment, the inner wall and top of the optical path module body 1 are coated with a black anti-reflection coating; in order to reduce the interference of stray light and play a role in corrosion protection.

The working principle of the photoelectric gas sensor probe in Embodiment 1 is as follows: when a beam of parallel light is irradiated from the parallel light source to the first plane reflector at an incident angle, the reflected light beam will be directed to the second plane at the same incident angle reflector, the second reflected light beam is reflected to the first plane reflector at the same incident angle, and the reflected light beam will continue to reflect twice continuously between the first plane reflector and the second plane reflector until the final The reflected beam is received by a photodetector, which converts the optical signal into an electrical signal.

Embodiment 2 Photoelectric gas detection device

The present invention also provides a photoelectric gas detection device, which includes the photoelectric gas sensor probe of the first embodiment above.

The above-mentioned embodiments are only preferred embodiments of the present invention, and cannot be used to limit the protection scope of the present invention. For those of ordinary skill in the art, it can be understood that these can be modified without departing from the principle and spirit of the present invention. The embodiments are subject to various changes, modifications, substitutions and variations, the scope of the present invention being defined by the appended claims and their equivalents.

Claims

A photoelectric gas sensor probe, comprising a multi-point reflection two-dimensional optical path module body, a first plane reflector embedded in the optical path module body, a second plane reflector, a parallel light source, and a photoelectric detector; the optical path module The inside of the body forms a gas absorption pool for containing the gas to be measured, and the gas to be measured enters the gas absorption pool from above the optical path module body; it is characterized in that the reflection surfaces of the first plane mirror and the second plane mirror Relatively arranged and parallel to each other, the centers of the first plane reflector and the second plane reflector are not on the same straight line; Fixing the triangular reflector block of the first plane reflector and the second plane reflector; the sharp angles of the two reflector blocks are consistent with the reflection angle of the parallel light beam emitted by the parallel light source; The parallel light beam is received by the photodetector after multiple reflections by the first plane reflector and the second plane reflector.
The photoelectric gas sensor probe according to claim 1, wherein the cross-sectional shape of the triangular reflector block is an isosceles triangle.
The photoelectric gas sensor probe according to claim 1, wherein the optical path module body is provided with a draw-in slot for installing the first plane reflector and the second plane reflector, and the bottom of the draw-in slot is in contact with the The bottoms of the reflector blocks are on the same horizontal plane.
The photoelectric gas sensor probe according to claim 3, characterized in that, the back surfaces of the first plane reflector and the second plane reflector are respectively provided with heating sheets for heating, and the heating sheets are arranged in close contact with each other respectively. The back surfaces of the first plane reflector and the second plane reflector.
The photoelectric gas sensor probe according to claim 3, wherein the card slot is filled with a heat insulating material for covering the first plane reflector, the second plane reflector and the heating sheet.
The photoelectric gas sensor probe according to claim 1, wherein the bottom of the optical path module body is provided with a sensor for detecting the temperature and air pressure in the absorption cell, and the output signal of the sensor is used for compensation when calculating the gas concentration.
The photoelectric gas sensor probe according to claim 5, wherein the parallel light source includes a laser and a parallel light lens with a light intensity detector, and the laser emits a parallel light beam through the parallel light lens; A focusing lens is provided at the front end of the photodetector, and the focusing lens is used to focus the parallel light beam onto the photosensitive surface of the photodetector.
The photoelectric gas sensor probe according to claim 7, wherein the photoelectric gas sensor probe also includes a probe housing, the probe housing includes an upper housing and a lower housing, and the photoelectric gas sensor probe is arranged on In the cavity formed by the upper casing and the lower casing; the lower casing is also embedded with a drive circuit module and a signal processing circuit module, and the parallel light source and the heating sheet form an electrical connection with the drive circuit module respectively. connection; the detector, photodetector and temperature pressure sensor of the laser are electrically connected to the signal processing circuit module.
The photoelectric gas sensor probe according to claim 8, wherein the drive circuit module also includes embedded detectors and photodetectors for collecting the output signals of the laser and analyzing and calculating them through the control A control module that heats the drive current to control the startup/shutdown of the heater chip drive circuit.
A photoelectric gas detection device, characterized in that the photoelectric gas detection device comprises the photoelectric gas sensor probe according to any one of claims 1-9.