CN111060470A - Gas sensor probe with multipoint reflection rectangular absorption cell and detection device - Google Patents
Gas sensor probe with multipoint reflection rectangular absorption cell and detection device Download PDFInfo
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- CN111060470A CN111060470A CN201911404745.3A CN201911404745A CN111060470A CN 111060470 A CN111060470 A CN 111060470A CN 201911404745 A CN201911404745 A CN 201911404745A CN 111060470 A CN111060470 A CN 111060470A
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- 238000010521 absorption reaction Methods 0.000 title claims abstract description 54
- 239000000523 sample Substances 0.000 title claims abstract description 35
- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 238000009792 diffusion process Methods 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 31
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000005536 corrosion prevention Methods 0.000 claims description 2
- 230000031700 light absorption Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000009467 reduction Effects 0.000 abstract description 4
- 238000009826 distribution Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 63
- 238000001228 spectrum Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000010426 asphalt Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
Abstract
The application discloses a gas sensor probe with a multipoint reflection rectangular absorption cell and a detection device, wherein the probe comprises an upper cover plate, the surface of the upper cover plate is provided with a gas diffusion hole, and a metal filter screen is arranged above the gas diffusion hole; the lower cover plate is positioned right below the upper cover plate and is detachably connected with the upper cover plate; the bottom of the lower cover plate is provided with a circuit through hole; the light path module is positioned in an inner space defined by the upper cover plate and the lower cover plate and used for collecting detection signals; and the electronic processing circuit board is positioned in the inner space enclosed by the upper cover plate and the lower cover plate, is positioned below the light path module and is electrically connected with the light path module, and is used for adjusting the light path module. The probe has the advantages of simple structure, convenience in installation and manufacture, low cost, reduction in the volume of the absorption pool, improvement in the structural stability of the light path and high detection precision by designing the measuring light path into a two-dimensional distribution structure.
Description
Technical Field
The invention relates to the technical field of laser spectrum gas sensors, in particular to a gas sensor probe with a multipoint reflection rectangular absorption cell and a gas detection device using the probe.
Background
With the continuous emergence of various novel multi-wavelength lasers, the photoelectric detection technology for measuring gas components and concentration by using the infrared laser spectrum absorption principle is also rapidly developed. The gas sensor manufactured based on the technology has the advantages of large gas concentration measuring range, high measuring precision, no need of frequent correction and the like, and can play a positive promoting role in the wide application of the laser spectrum gas sensor to different production processes and the field of safety precaution.
An infrared laser spectrum absorption gas sensor developed based on a tunable semiconductor laser absorption spectrum Technology (TDLAS) gets increasingly wide attention, and the working principle of the infrared laser spectrum absorption gas sensor is that according to the fact that different gases have different characteristic spectrum absorption peaks, the wavelength value of the characteristic spectrum absorption peak of a measured gas is properly selected and matched with a laser light source with the same wavelength, and accurate measurement of specific gas concentration can be achieved. When infrared laser passes through the gas to be detected, the light intensity of the infrared laser is reduced due to the absorption of the absorption peak of the characteristic spectrum, and the reduction amplitude of the light intensity is in direct proportion to the concentration of the gas to be detected and the optical path length value of the light beam under the action of the gas. Therefore, on the premise that the optical path length value is a known fixed value, the concentration of the gas to be detected can be detected by detecting and analyzing the light intensity change value at the infrared absorption peak.
The process of detecting the intensity of light at the infrared absorption peak is mainly performed in a gas absorption cell (or gas cell) in the gas sensor, which generally refers to the space formed between the light source and the detector. The optical path length of the measuring beam in the gas absorption cell is generally limited by the size of the absorption cell, and in order to increase the optical path length of the measuring beam, a plurality of mirrors or reflectors are arranged in the gas absorption cell, and the measuring beam is reflected for multiple times and then reaches the detector. Common gas absorption cells in the prior art include conventional White cells, Herriott cell, and modified versions thereof.
However, in practical applications, the absorption cell is composed of an optical path with a three-dimensional structure, the optical structure of the sensor is very complex, and the volume of the absorption cell is too large to be suitable for application scenarios with smaller requirements on the volume of the sensor; moreover, if any change occurs in the relative position of one optical element, the measurement accuracy of the whole sensor may be greatly affected, so that the sensor in the prior art does not have high environmental stability; in addition, the more optical elements used, the more complex the production process and the rejection rate increase, and the cost reduction and mass production are not facilitated.
Disclosure of Invention
The invention aims to provide a gas sensor probe with a multipoint reflection rectangular absorption cell and a detection device, and aims to solve the problems that in the prior art, a sensor is complex in structure, not easy to install, high in manufacturing cost, not suitable for manufacturing smaller sizes and the like.
In a first aspect, the present application provides a gas sensor probe with a multi-point reflective rectangular absorption cell, comprising:
the gas diffusion device comprises an upper cover plate, a gas diffusion hole and a metal filter screen, wherein the surface of the upper cover plate is provided with the gas diffusion hole;
the lower cover plate is positioned right below the upper cover plate and is detachably connected with the upper cover plate; the bottom of the lower cover plate is provided with a circuit through hole;
the light path module is positioned in an inner space defined by the upper cover plate and the lower cover plate and used for collecting detection signals;
and the electronic processing circuit board is positioned in the internal space enclosed by the upper cover plate and the lower cover plate, is positioned below the light path module and is electrically connected with the light path module, and is used for adjusting the light path module.
Optionally, the optical path module includes:
the upper surface of the die holder is provided with a rectangular semi-hollow groove; two adjacent edges of the semi-hollow groove are respectively provided with a first equipment groove and a second equipment groove;
the reflecting mirror surfaces are positioned on the four side walls of the semi-hollow groove;
the laser emitter is positioned in the first equipment groove and used for emitting laser to one of the reflecting mirror surfaces;
and the photoelectric detector is positioned in the second equipment groove and used for receiving the laser reflected by the reflecting mirror surface.
Optionally, a measuring hole is formed in the bottom of the die holder; and a temperature sensor and a pressure sensor are arranged in the measuring hole.
Optionally, the laser emitter is a vertical cavity surface emitting laser or a distributed negative feedback laser.
Optionally, a focusing lens is disposed at a receiving end of the photodetector.
Optionally, the cross sections of the upper cover plate and the lower cover plate are circular, oval or rectangular.
Optionally, the inner walls of the upper cover plate, the semi-hollow groove, the first equipment groove and the second equipment groove are coated with light-absorbing anticorrosive coatings.
Optionally, an included angle between the laser emitted by the laser emitter and the reflector surface is 45 degrees; the included angle between the direction of the photoelectric detector for receiving the laser and the reflector surface is 45 degrees; the length-width ratio of the semi-hollow groove is 1.1: 1.
Optionally, the die holder is made of a rigid material.
In a second aspect, the present application provides a gas sensing device employing the above-described gas sensor probe with a multi-point reflective rectangular absorption cell.
The application provides a gas sensor probe and detection device with multiple spot reflection rectangle absorption cell has following beneficial effect:
a square gas absorption cell of a photoelectric gas sensor probe adopts a four-mirror-surface multipoint light beam reflection structure, so that the possibility of relative position change of optical elements is greatly reduced, the mechanical structure is stable, and the processing and the production are easy.
Second, parallel light beams are reflected for many times by four mutually vertical mirror surfaces, so that the measuring optical path of the absorbed gas is effectively increased in a smaller gas absorption cell space, and the signal-to-noise ratio and the measuring precision of detection signals can be improved in multiples;
thirdly, the two-dimensional light path structure is combined with four reflectors to realize the turning of the absorption light path, so that the volume of the sensor probe is reduced, and the volume of the gas absorption cell is also reduced, thereby effectively reducing the response time of measuring the gas concentration;
and fourthly, because the four reflectors only need to be directly adhered and fixed on the four rectangular frames to form a complete solid structure, the manufacturing process of the absorption cell is simplified, the production complexity of the gas absorption cell is effectively reduced, and the production yield is correspondingly improved, so that the large-scale production is facilitated.
Drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without any creative effort.
FIG. 1 is a schematic diagram of the overall structure of a gas sensor probe with a multi-point reflecting rectangular absorption cell according to the present application;
FIG. 2 is a cross-sectional view of the lower cover plate of the probe of FIG. 1;
FIG. 3 is a partial schematic view of an exemplary embodiment of an optical path module of the probe shown in FIG. 1;
FIG. 4 is a sectional view taken along line A-A of FIG. 3;
fig. 5 is a sectional view taken along line B-B in fig. 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, it is a schematic diagram of an overall structure of a gas sensor probe with a multi-point reflective rectangular absorption cell according to the present application;
as can be seen from fig. 1, the embodiment of the present application provides a gas sensor probe with a multipoint reflection rectangular absorption cell, which includes an upper cover plate 1 and a lower cover plate 2 detachably connected to each other, wherein the upper cover plate 1 and the lower cover plate 2 are covered with each other, and a space structure with a set size can be formed inside the probe for placing a sensor assembly;
the surface of the upper cover plate 1 is provided with gas diffusion holes 11, and the gas diffusion holes 11 provide a function of introducing gas around the sensor into the sensor so as to be detected; in this embodiment, the shape, size and number of the gas diffusion holes are not particularly limited, and for example, the gas diffusion holes may be set to be small circular holes with a preset diameter, and the small circular holes are uniformly distributed in a specified area range at the center of the upper cover plate 1, so as to ensure that the gas to be detected entering the sensor reaches a specified amount required by detection; and a metal filter screen 12 is arranged above the gas diffusion hole 11, and the metal filter screen 12 is mainly used for isolating dust and impurities, preventing impurities from entering the interior of the sensor and polluting each optical element in a light path, and prolonging the service life of the device.
Referring to fig. 2, a cross-sectional view of the lower cover plate of fig. 1 is shown;
the lower cover plate 2 is mainly used for bearing optical elements, circuit devices and the like in an inner space, a circuit through hole 21 is formed in the bottom of the lower cover plate, the circuit through hole 21 is used for leading out a connecting wire of the circuit device to a server or an analysis instrument and the like at a far end, in the embodiment, the specific structural form of the circuit through hole is not limited, the lower cover plate can be correspondingly designed according to the size of the connecting wire, and structures such as reinforcing end heads and the like which enable the circuit to be stably fixed and increase the strength of the circuit can be added.
In the embodiment of the present application, the external shapes of the upper cover plate 1 and the lower cover plate 2 may be various, such as a cylinder, an elliptic cylinder, a rectangular parallelepiped, and the like, and accordingly, the cross section thereof may be a circle, an ellipse, a rectangle, or other possible shapes, and in practical applications, the upper cover plate 1 and the lower cover plate 2 may be formed by selecting different shapes according to needs.
The light path module 3 is positioned in an internal space defined by the upper cover plate 1 and the lower cover plate 2 and used for collecting detection signals; in this embodiment, the optical path module 3 is a key device providing a detection function, and may be designed as a solid rigid cylinder structure, a rectangular semi-hollow structure is processed on the cylinder structure, and serves as a gas absorption cell, and the purpose of collecting a detection signal is achieved by emitting laser light into the gas absorption cell and collecting the reflected laser light, specifically, the optical path module 3 may have a plurality of structural forms, as can be seen from fig. 3 to 5, in a feasible embodiment, the optical path module 3 includes:
the die holder 301 is characterized in that a rectangular semi-hollow groove 302 is formed in the upper surface of the die holder 301; it should be noted that the overall dimensions of the die holder 301 can be made according to the shapes of the upper cover plate 1 and the lower cover plate 2, for example, the upper and lower cover plates are cylinders, and the die holder 301 is preferably also set to be a cylinder, and if the upper and lower cover plates are cubes, the die holder 301 should also be set to be a cube, which is more beneficial to installation; the rectangular semi-hollow groove 302 provides the occupied space of the gas absorption cell, and is set to be rectangular, because the adjacent sides of the rectangle are mutually perpendicular, the reflection mirror surface is arranged along the sides of the rectangle, so that the laser can be reflected according to a specific angle, and the directions of the reflection times and the optical path can be conveniently controlled.
Further, in this embodiment, the die holder 301 is made of a rigid material, for example, a metal, a rigid plastic, or a composite material, so that the manufactured die holder has a higher structural strength, on one hand, the die holder can be stably fixed in the inner space formed by the upper and lower cover plates, and on the other hand, the stability of the optical device fixed on the die holder can be ensured, thereby avoiding changing the optical path direction of the laser and affecting the reception of the laser due to the position deviation of the optical element.
The reflecting mirror surfaces 305 are arranged on the four side walls of the semi-hollow groove 302, that is, the width of the reflecting mirror surface 305 does not exceed the side walls of the semi-hollow groove 302, in this embodiment, a laser light path for measurement in a gas absorption cell (in this application, the gas absorption cell refers to a structure surrounded by the semi-hollow groove with the reflecting mirror surfaces on the side walls) is designed into a two-dimensional distribution structure, that is, reflected laser light is located on the same horizontal plane, therefore, the width of the reflecting mirror surface 305 does not need to be designed to be very large so as to meet the measurement requirement, the depth of the corresponding semi-hollow groove 302 does not need to be very large, thus, the mold base 301 with very small thickness can complete the measurement task, and the design thickness of the sensor probe is reduced to the greatest extent. In addition, the light path is designed to be distributed in two dimensions, so that the volume of the absorption pool is reduced, the unstable factor of the multi-dimensional distributed light path of the light path is not required to be considered, and the stability of the light path structure is improved.
In addition, the connection form between the mirror surface 305 and the side wall of the semi-hollow groove 302 can be various, and in order to reduce the complexity of the design, the back surface of the mirror surface 305 can be directly adhered to the side wall.
In this embodiment, by disposing the mirror 305 along the rectangular semi-hollow groove 302, the incident laser can be collected in a specific direction after being reflected for multiple times, and at the same time, optical paths with different shapes are formed in the inner region of the semi-hollow groove 302, the difference of the optical path lines is determined by the incident angle of the laser and the side length ratio of the rectangle, and under the same side length ratio of the rectangle, the incident angle may be changed, and the number of reflections and the total length of the optical path may be changed, so that the rectangular aspect ratio of the semi-hollow groove 302 may be correspondingly set according to different practical requirements. In the present application, the incident angle of the laser is not limited to the same value, but can be selected from a selectable range according to the length-width ratio of the semi-hollow groove 302, for example, the incident angle can be selected within a range of 30 ° -60 °, the length-width ratio of the semi-hollow groove 302 is selected between 1-2: 1, and the like, but in practical applications, in order to obtain a higher detection effect, it is generally required to have a longer total optical path length and a denser optical path arrangement in a minimum space, and therefore, in a preferred embodiment shown in fig. 3, the included angle between the laser emitted by the laser emitter 306 and the reflective mirror 305 is 45 °; the included angle between the direction of the laser received by the photoelectric detector 307 and the reflecting mirror surface 305 is 45 degrees; the length-width ratio of the semi-hollow groove 302 is 1.1:1, at this time, due to the setting of the length-width ratio of the semi-hollow groove 302, the reflecting mirror surfaces 305 located on the four sides are correspondingly set to be 8:10:10:10, after the laser emitter 306 emits laser light, the laser light is reflected for 19 times and then received by the photoelectric detector 307, so that a complete detection light path is formed.
Two adjacent edges and corners of the semi-hollow groove 302 are respectively provided with a first equipment groove 303 and a second equipment groove 304, namely, the notches of the first equipment groove 303 and the second equipment groove 304 are respectively communicated to two adjacent angular positions of the semi-hollow groove 302; a laser emitter 306 is arranged in the first equipment groove 303, the laser emitter 306 can emit laser into the semi-hollow groove 302, and specifically, a specific angle can be set, so that the laser is emitted to one of the reflecting mirror surfaces 305 at a set angle;
a photoelectric detector 307 is arranged in the second equipment groove 304 and used for receiving the laser reflected by the reflecting mirror surface 305; specifically, the receiving end of the photodetector 307 faces the direction in the semi-hollow groove 302, and the receiving angle thereof can be set according to the angle after the laser is reflected.
In the present embodiment, the laser emitter 306 and the photodetector 307 may be fixed in the respective slots by a fixed connection, such as an integrated type, an integral type, or a detachable connection, such as a screw connection, a hinge connection, etc., without limitation.
The laser transmitter 306 in this embodiment may select a corresponding model according to different usage requirements, for example, a vertical cavity surface emitting laser or a distributed negative feedback laser may be selected; a Vertical-Cavity Surface-Emitting Laser (VCSEL) is a semiconductor, and its Laser beam is emitted perpendicular to the top Surface, unlike the edge-Emitting Laser beam emitted from the edge in a general process of cutting an independent chip. The distributed feedback laser is realized by utilizing the periodic variation of the refractive index of the optical waveguide and is characterized in that the grating is directly arranged on the active layer and the limiting interface. These lasers not only have excellent performance and are convenient to integrate, but are also improved to facilitate stable single mode operation.
Further, the laser transmitter 306 in this embodiment may be configured as a tunable parallel laser source, that is, a light intensity detector and a control circuit connected to the light intensity detector are added on the basis of a conventional laser, so as to perform modulation coordination processing on the light intensity of the emitted laser in real time through monitoring the light intensity.
Therefore, an electronic processing circuit board 4 is further disposed in the internal space surrounded by the upper cover plate 1 and the lower cover plate 2, and the electronic processing circuit board 4 is located below the optical path module 3 and electrically connected to the optical path module 3 for adjusting the optical path module 3, and the adjustment function mainly includes adjusting the light intensity of the laser emitted by the laser source, and also includes amplifying the measurement signal received by the photoelectric detector 307, sending the amplified signal, and the like.
Further, in a possible embodiment, the bottom of the die holder 301 is provided with a measuring hole 308; a temperature sensor 309 and a pressure sensor 310 are installed in the measuring hole 308, wherein the temperature sensor 309 is used for measuring a temperature value in the gas absorption cell, and the pressure sensor 310 is used for measuring a pressure value in the gas absorption cell; the temperature value and pressure value information is used for compensating parameter changes caused by environmental temperature fluctuation so as to further improve the measurement precision of the gas to be measured. After the temperature sensor 309 and the pressure sensor 310 acquire real-time temperature and pressure value data, the data is transmitted to the far end through a data line connected between the probe and the far end, and is analyzed and used by a server or a processor.
Further, in a feasible embodiment, a focusing lens (not shown in the figure) is disposed at a receiving end of the photodetector 307, and the focusing lens can focus parallel light on the detection sensitive surface, so that the parallel light is converged before the photodetector 307 receives the laser light, thereby improving the detection accuracy.
Further, in a preferred embodiment, the inner walls of the upper cover plate 1, the semi-hollow groove 302, the first equipment groove 303 and the second equipment groove 304 are coated with light-absorbing anticorrosive coatings, so as to reduce the influence of stray light, improve the detection precision, play a role in corrosion prevention and prolong the service life of the device; the light absorbing anti-corrosion coating is typically black and may be formed, for example, from a matte asphalt alkyd paint or an asphalt phenolic paint, or from other materials that perform similar functions, without limitation.
According to the technical scheme, the gas sensor probe with the multipoint reflection rectangular absorption cell comprises an upper cover plate, wherein gas diffusion holes are formed in the surface of the upper cover plate, and a metal filter screen is arranged above the gas diffusion holes; the lower cover plate is positioned right below the upper cover plate and is detachably connected with the upper cover plate; the bottom of the lower cover plate is provided with a circuit through hole; the light path module is positioned in an inner space defined by the upper cover plate and the lower cover plate and used for collecting detection signals; and the electronic processing circuit board is positioned in the inner space enclosed by the upper cover plate and the lower cover plate, is positioned below the light path module and is electrically connected with the light path module, and is used for adjusting the light path module. The probe has the advantages of simple structure, convenience in installation and manufacture, low cost, reduction in the volume of the absorption pool, improvement in the structural stability of the light path and high detection precision by designing the measuring light path into a two-dimensional distribution structure.
The application also provides a gas detection device, in particular to a detection device for methane gas, which can also be used for detecting other gases, wherein the device comprises the gas sensor probe in any embodiment.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.
Claims (10)
1. A gas sensor probe with a multi-point reflective rectangular absorption cell, the probe comprising:
the gas diffusion device comprises an upper cover plate (1), wherein gas diffusion holes (11) are formed in the surface of the upper cover plate (1), and a metal filter screen (12) is arranged above the gas diffusion holes (11);
the lower cover plate (2) is positioned right below the upper cover plate (1) and is detachably connected with the upper cover plate (1); the bottom of the lower cover plate (2) is provided with a circuit through hole (21);
the light path module (3) is positioned in an internal space defined by the upper cover plate (1) and the lower cover plate (2) and is used for collecting detection signals;
and the electronic processing circuit board (4) is positioned in the internal space surrounded by the upper cover plate (1) and the lower cover plate (2), is positioned below the light path module (3) and is electrically connected with the light path module (3) and is used for adjusting the light path module (3).
2. The gas sensor probe with the multipoint reflection rectangular absorption cell according to claim 1, wherein the optical path module (3) comprises:
the die comprises a die holder (301), wherein a rectangular semi-hollow groove (302) is formed in the upper surface of the die holder (301); two adjacent edges and corners of the semi-hollow groove (302) are respectively provided with a first equipment groove (303) and a second equipment groove (304);
reflecting mirror surfaces (305) located on four side walls of the semi-hollow groove (302);
a laser emitter (306) located within the first equipment slot (303) for emitting laser light to one of the mirror surfaces (305);
a photodetector (307) located in the second equipment tank (304) for receiving the laser light reflected by the mirror surface (305).
3. The gas sensor probe with the multipoint reflection rectangular absorption cell as claimed in claim 2, wherein a measuring hole (308) is formed at the bottom of the die holder (301); and a temperature sensor (309) and a pressure sensor (310) are arranged in the measuring hole (308).
4. The gas sensor probe with the multi-point reflecting rectangular absorption cell of claim 2, wherein the laser emitter (306) is a vertical cavity surface emitting laser or a distributed negative feedback laser.
5. The gas sensor probe with the multipoint reflection rectangular absorption cell according to claim 2, wherein a receiving end of the photoelectric detector (307) is provided with a focusing lens.
6. The gas sensor probe with the multipoint reflection rectangular absorption cell according to claim 1, wherein the cross section of the upper cover plate (1) and the lower cover plate (2) is circular, oval or rectangular.
7. The gas sensor probe with the multipoint reflection rectangular absorption cell as claimed in claim 2, wherein the inner walls of the upper cover plate (1), the semi-hollow groove (302), the first equipment groove (303) and the second equipment groove (304) are coated with light absorption and corrosion prevention coatings.
8. The gas sensor probe with the multipoint reflection rectangular absorption cell according to claim 2, wherein the angle between the laser emitted by the laser emitter (306) and the reflection mirror surface (305) is 45 degrees; the included angle between the laser receiving direction of the photoelectric detector (307) and the reflecting mirror surface (305) is 45 degrees; the length-width ratio of the semi-hollow groove (302) is 1.1: 1.
9. The gas sensor probe with the multipoint reflective rectangular absorption cell of claim 2, wherein said die holder (301) is made of a rigid material.
10. A gas detection apparatus, characterized in that the apparatus comprises a gas sensor probe with a multi-point reflecting rectangular absorption cell according to any one of claims 1 to 9.
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| CN201911404745.3A CN111060470A (en) | 2019-12-31 | 2019-12-31 | Gas sensor probe with multipoint reflection rectangular absorption cell and detection device |
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| CN201911404745.3A CN111060470A (en) | 2019-12-31 | 2019-12-31 | Gas sensor probe with multipoint reflection rectangular absorption cell and detection device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113406001A (en) * | 2021-06-30 | 2021-09-17 | 广东感芯激光科技有限公司 | Photoelectric gas sensor probe and photoelectric gas detection device |
| WO2021237796A1 (en) * | 2020-05-26 | 2021-12-02 | 中国科学院上海微系统与信息技术研究所 | Transverse miniature infrared gas sensor |
| CN114047132A (en) * | 2022-01-11 | 2022-02-15 | 山东省科学院激光研究所 | Long-optical-path gas absorption cell for multi-gas detection |
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| WO2021237796A1 (en) * | 2020-05-26 | 2021-12-02 | 中国科学院上海微系统与信息技术研究所 | Transverse miniature infrared gas sensor |
| CN113406001A (en) * | 2021-06-30 | 2021-09-17 | 广东感芯激光科技有限公司 | Photoelectric gas sensor probe and photoelectric gas detection device |
| WO2023272892A1 (en) * | 2021-06-30 | 2023-01-05 | 广东感芯激光科技有限公司 | Photoelectric gas sensor probe and photoelectric gas detection device |
| CN114047132A (en) * | 2022-01-11 | 2022-02-15 | 山东省科学院激光研究所 | Long-optical-path gas absorption cell for multi-gas detection |
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