CN100401041C - Light waveguide absorption type gas sensor and measuring system - Google Patents
Light waveguide absorption type gas sensor and measuring system Download PDFInfo
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- CN100401041C CN100401041C CNB2005100265982A CN200510026598A CN100401041C CN 100401041 C CN100401041 C CN 100401041C CN B2005100265982 A CNB2005100265982 A CN B2005100265982A CN 200510026598 A CN200510026598 A CN 200510026598A CN 100401041 C CN100401041 C CN 100401041C
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Abstract
The present invention relates to an optical waveguide absorption type gas sensors coupled with the free space and a measurement system in the field of precise analysis and measurement instruments. The sensor comprises a metal film on the upper layer, an optical glass sheet on the upper layer, an air chamber, a metal film on the lower layer, an optical glass sheet on the lower layer, a spacer block, a platform and a spiral micrometer. The measurement system comprises an optical waveguide absorption type gas sensor, an excitation light source part, and an optical signal detection and processing part, wherein the excitation light source part and the optical signal detection and processing part are fixed on the same side of the optical waveguide absorption type gas sensor; the central heights of the three parts are equal; the metal films are deposited on the glass sheets which are orderly put on the platform to be closely pushed by the spiral micrometer via the spacer block; a laser source is radiated into the sensor to form guided waves at a certain convergence angle after passing through an optical aperture and a lens, and the variation of gas components in the air chamber is sensed by detecting the variation condition of the intensity of the emitted light by a photoelectric diode array. The present invention has the advantages of simple structure, low cost, high sensitivity and easy integration.
Description
Technical field
What the present invention relates to is a kind of sensor of surveying instrument technical field and by its system that forms, particularly a kind of light waveguide absorption type gas sensor structure and measuring system based on free space coupling of not having prism.
Background technology
Gas sensor has a wide range of applications in fields such as environmental monitoring, production process monitoring, gas ingredients analysis and gas leakage alarms.Gas sensor commonly used at present mainly is divided into several big classes such as electricity, optics, galvanochemistry class by principle.Wherein, a kind of novel optical sensor that fiber gas sensor occurred after the eighties, it is to utilize gas to differentiate gas and analyze its concentration at the characteristic spectral line of infrared band.Its measuring principle is: the characteristic infrared absorption spectrum difference of gas with various, in certain concentration range, the infrared absorbency value of every kind of gas and the concentration of gas are linear.This sensor generally by distributed feed-back formula (DFB) laser instrument as excitaton source, light is by Optical Fiber Transmission and by an air chamber because the absorption of gas, light intensity can decay, and just can measure the concentration value of gas according to the ratio of decay.Because optical fiber itself, this class sensor has highly sensitive, advantages such as response speed is fast, anti-electromagnetic interference (EMI).Shortcoming is: 1. use distributed feed-back formula (DFB) laser instrument, and the physique costliness, system cost is higher.2. use optical fiber transmission signal, the frequency of light signal must be in the low loss window of optical fiber, therefore requires the characteristic frequency of gas also must be in this scope, and this gaseous species that makes this sensor to survey is limited.
Find by prior art documents, the Chinese patent publication number is: 1396445A, name is called: dual-surface metal waveguide measuring method and device thereof, proposed in this patent of invention to coat waveguide as sensing element with double-sided metal, and realize measurement to the ducting layer medium composition.This dual-surface metal waveguide device utilizes coupled apparatus such as prism that laser is coupled into the sensor detection cavity from the outside, utilizes the advantageous property of metal carbonyl coat to realize surveying.But owing to adopt prism structure, make device miniaturization and utilize guided wave high-order mode aspect that certain difficulty is arranged.Because its spy is measured as the variation of ducting layer medium refraction index, this makes to measure that sample is not had selectivity, can not use as gas analysis instrument in addition.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of optical waveguide gas absorption formula sensor and measuring system are provided.Make it need not coupled apparatus, incident light is in the incident of low-angle place, thereby utilizes the highly sensitive good characteristic of waveguide high-order mode and realize the selectivity of sample is surveyed the sensitivity that further reduces cost, improves instrument simultaneously.
The present invention is achieved by the following technical solutions, technical solution of the present invention one is: light waveguide absorption type gas sensor comprises: upper strata metal film, upper strata optical glass sheet, air chamber, lower metal film, lower floor's optical glass sheet, platform, cushion block, screw-thread micrometer.The upper strata metal film deposition is in the outside of upper strata optical glass sheet, and lower metal film is deposited on the inboard of lower floor's optical glass sheet.Place annular gasket in the middle of two optical glass sheets and form air chamber, the pad side has two apertures symmetrically, respectively as air intake opening and gas outlet.Each several part is placed on the platform successively according to the order of upper strata metal film, upper strata optical glass sheet, pad, lower metal film, lower floor's optical glass sheet, cushion block, and pushes against by cushion block with screw-thread micrometer.Optical glass sheet and air chamber constitute the ducting layer that double-sided metal coats waveguide jointly at the middle and upper levels for they.Gaseous sample to be measured enters air chamber by air intake opening, discharges by the gas outlet.
Technical solution of the present invention two is: the measuring system by light waveguide absorption type gas sensor is formed comprises: light waveguide absorption type gas sensor, excitation source part and optical signal detection and processing section.The homonymy of light waveguide absorption type gas sensor is fixed in excitation source part and optical signal detection and processing section, the position of excitation source should guarantee that laser injects the center of gas sensor from front low-angle (about 4 °), and optical signal detection and processing section are positioned at the outgoing position of laser from gas sensor.Excitation source is injected light waveguide absorption type gas sensor in the fixed position with certain convergent angle, is received by detector after the light signal guided wave layer gas modulation and is handled by computing machine.
Described excitation source part comprises: semiconductor laser, optics aperture, first lens, second lens.The reference frequency output of semiconductor laser should comprise the characteristic frequency of gas to be measured.Each device place successively and axle such as assurance with high.The light that semiconductor laser sends expands bundle by inject first lens after the filtering of optics aperture, forms convergent beam again and enter sensor behind second lens.
Described acquisition of signal and processing section, comprise: photodiode array and computing machine, convergent beam forms the diffusion light beam behind the laser emitting and enters photodiode array, electric signal is surveyed and be converted into to the intensity level of different angles by photodiode array, the digital to analog converter of computing machine (A/D) links to each other by lead with the photodiode array, is to carry out analyzing and processing by computing machine after the digital signal with electrical signal conversion.
Because the monochromaticity of general semiconductor laser instrument is bad, obtains the exciting light that is complementary with gaseous absorption line in order to utilize semiconductor laser, at first utilizes spectroanalysis instrument to determine the optimized incidence of laser.Utilize double-sided metal to coat the filter function of waveguide, the incident angle of fine setting laser is complementary spectral absorption line and gaseous absorption line to be measured, and fixed laser and sensor can obtain the highest sensitivity during then with this angle incident.Add optics aperture, first lens, second lens adjustment light path this moment, form a convergent beam of assembling angle (about 1 °) and inject light waveguide absorption type gas sensor, photodiode array will detect the guided wave peak in this convergence angle scope, and computing machine then can write down the minimum point light intensity value at guided wave peak.When sample gas enters air chamber by air intake opening, because the absorption of gas, obvious variation will take place in the light intensity value of guided wave peak minimum point, just can be finally inversed by the concentration value of gas by the light intensity value of monitoring minimum point.Owing to utilized the good characteristic of superelevation rank guided modes and the filter function that two-sided coating waveguide self has, the precision of this detector can improve one more than the order of magnitude than conventional detector.
Optical waveguide gas sensor of the present invention has the following advantages: based on free space coupling, need not prism as coupling unit, because of can realize small angle measurement and detecting element miniaturization; Ducting layer thickness can reach a millimeter magnitude, has not only enlarged the volume of air chamber, also makes and utilizes the superelevation rank guided mode of guided wave to become possibility; Ducting layer comprises one deck thin glass plate, and thermonoise is had certain inhibiting effect; Made full use of double-sided metal and coated the filter function that waveguide had, adopted the general semiconductor laser instrument to go out the excitaton source that is complementary with gaseous absorption line, thereby avoid using the expensive distribution send out feedback formula laser instrument with regard to tunable; Total is fixed, need not adjust in the use, and the interference that can avoid mechanical vibration to cause, and be beneficial to integrated; Utilize the characteristic absorption level of gas to measure, what make detector has accurate selectivity to gas; Sample gas is in the very big oscillating field of luminous energy density, and the sensitivity of detection is high.The present invention realizes the analysis and the measurement of gas with new method, and is simple in structure, good to the selectivity of gas, measures highly sensitively, practical, and certain market application foreground is arranged.
Fig. 1 light waveguide absorption type gas sensor structural representation of the present invention
Fig. 2 light waveguide absorption type gas sensor vertical view of the present invention
Fig. 3 light waveguide absorption type gas sensor front view of the present invention
Fig. 4 measuring system synoptic diagram of the present invention
Embodiment
As Fig. 1-shown in Figure 4, light waveguide absorption type gas sensor 1 of the present invention comprises: upper strata metallic film 4, upper strata optical glass sheet 5, air chamber 6, lower metal film 7, lower floor's optical glass sheet 8, air intake opening 9, gas outlet 10, cushion block 11, platform 12, screw-thread micrometer 13.Upper strata metal film 4 is deposited on the upper strata optical glass sheet 5, and toward the outer side; Lower metal film 7 is deposited on lower floor's glass sheet 8, and towards the inboard.Place the pad that has two apertures of hollow between two glass sheet, two apertures are used separately as air intake opening 9 and gas outlet 10, and hollow space forms air chamber 6.Each several part is successively placed on the platform 12 according to the order of upper strata metallic film 4, upper strata optical glass sheet 5, air chamber 6, lower metal film 7, lower floor's optical glass sheet 8, cushion block 11, and uses the screw-thread micrometer 13 that links together with platform 12 to push against.Upper strata metallic film 4, upper strata optical glass sheet 5, air chamber 6, lower metal film 7 constitutes double-sided metals and coats waveguiding structures, its at the middle and upper levels optical glass sheet 5 be ducting layer with air chamber 6.
The measuring system that light waveguide absorption type gas sensor is formed comprises: light waveguide absorption type gas sensor 1, excitation source part 2 and optical signal detection and processing section 3.The homonymy of light waveguide absorption type gas sensor 1 is fixed in excitation source part 2 and optical signal detection and processing section 3, the position of excitation source part 2 should guarantee that laser injects the center of gas sensor 1 from front low-angle (about 4 °), and optical signal detection and processing section 3 are positioned at the outgoing position of laser from gas sensor.The each several part centre-height keeps equating.
Optical signal detection and processing section 3 comprise photodiode array 18 and computing machine 19, convergent beam is got on the photodiode array 18 with the identical angle of divergence after light waveguide absorption type gas sensor 1 outgoing, and photodiode array 18 writes down each point light intensity value (guided wave peak) and is transported to computing machine 19 and handles.When gas concentration value to be measured changed in the air chamber, then the each point light intensity value of photodiode array 18 records changed, and analyzes by the size to light intensity, just can be finally inversed by the situation of change of gas concentration.
1 one-tenth fixing angle of laser that semiconductor laser 14 sends and light waveguide absorption type gas sensor, the big I of angle is determined by spectroanalysis instrument.The principle of determining is to make with the guided wave resonant frequency of the laser of this angle incident and the absorption frequency of gas to be measured to be complementary.
What photodiode array 18 write down is the light intensity value of each angle correspondence, when gas concentration value to be measured changes in the air chamber, then the each point light intensity value of photodiode array 18 records changes, and analyzes by the size to light intensity, just can be finally inversed by the situation of change of gas concentration.
Claims (4)
1. optical waveguide gas measurement system based on free space coupling, comprise: light waveguide absorption type gas sensor (1), excitation source part (2), optical signal detection and processing section (3), it is characterized in that, the homonymy of light waveguide absorption type gas sensor (1) is fixed in excitation source part (2) and optical signal detection and processing section (3), and guarantee that the each several part centre-height equates, excitation source part (2) comprises semiconductor laser (14), optics aperture (15), first lens (16), second lens (17), each device place successively and axle such as maintenance with high, the laser that semiconductor laser (14) sends enters first lens (16) after optics aperture (15) filtering, optics aperture (15) is in first lens (16) focus inboard, so have the angle of divergence from the light of first lens (16) outgoing, focus on through second lens (17) again and form the ducting layer that convergent beam is injected light waveguide absorption type gas sensor (1), the position of adjusting aperture and lens makes convergent angle at 1 degree, optical signal detection and processing section (3) comprise photodiode array (18) and computing machine (19), convergent beam is got on the photodiode array (18) with the identical angle of divergence after light waveguide absorption type gas sensor (1) outgoing, and photodiode array (18) writes down the each point light intensity value and is transported to computing machine (19) and handles.
2. the optical waveguide gas measurement system based on the free space coupling according to claim 1, it is characterized in that, described light waveguide absorption type gas sensor (1), comprise: upper strata metallic film (4), upper strata optical glass sheet (5), air chamber (6), lower metal film (7), lower floor's optical glass sheet (8), air intake opening (9), gas outlet (10), cushion block (11), platform (12), screw-thread micrometer (13), upper strata metallic film (4) is deposited on the upper strata optical glass sheet (5), and toward the outer side; Lower metal film (7) is deposited on lower floor's glass sheet (8), and towards the inboard, place the pad that has two apertures of hollow between two glass sheet, two apertures are used separately as air intake opening (9) and gas outlet (10), hollow space forms air chamber (6), each several part is according to upper strata metallic film (4), upper strata optical glass sheet (5), air chamber (6), lower metal film (7), lower floor's optical glass sheet (8), the order of cushion block (11) is successively placed on the platform (12), and use the screw-thread micrometer (13) that links together with platform (12) to push against, upper strata metallic film (4), upper strata optical glass sheet (5), air chamber (6), lower metal film (7) constitutes double-sided metal and coats waveguiding structure, its at the middle and upper levels optical glass sheet (5) be ducting layer with air chamber (6).
3. the optical waveguide gas measurement system based on the free space coupling according to claim 1, it is characterized in that, the angle that the laser that semiconductor laser (14) sends and light waveguide absorption type gas sensor (1) become to fix, the size of angle determines by spectroanalysis instrument, and the principle of determining is to make with the guided wave resonant frequency of the laser of this angle incident and the absorption frequency of gas to be measured to be complementary.
4. the optical waveguide gas measurement system based on the free space coupling according to claim 1, it is characterized in that, what photodiode array (18) write down is the light intensity value of each angle correspondence, when gas concentration value to be measured changes in the air chamber, then the each point light intensity value of photodiode array (18) record changes, analyze by size, be finally inversed by the situation of change of gas concentration light intensity.
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