JP2002323441A - Hydrogen gas sensor - Google Patents
Hydrogen gas sensorInfo
- Publication number
- JP2002323441A JP2002323441A JP2001129666A JP2001129666A JP2002323441A JP 2002323441 A JP2002323441 A JP 2002323441A JP 2001129666 A JP2001129666 A JP 2001129666A JP 2001129666 A JP2001129666 A JP 2001129666A JP 2002323441 A JP2002323441 A JP 2002323441A
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- Japan
- Prior art keywords
- hydrogen gas
- gas sensor
- optical waveguide
- optical
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、水素ガスセンサに
関する。[0001] The present invention relates to a hydrogen gas sensor.
【０００２】[0002]
【従来の技術】高温環境あるいは放射線環境等の悪環境
下における計測手段と並び、特殊なファイバ計測手段と
して、化学的な現象を利用するファイバセンサがある。
この種のファイバセンサの用途としては、ガス濃度、ｐ
Ｈ、湿度等の測定が主である。構造上で大別すると、コ
アあるいはクラッドに化学反応を敏感に起こす物質をド
ープしたｉｎｔｒｉｎｓｉｃ型のファイバセンサと、フ
ァイバ先端に適切なセンサ要素を設けたｅｘｔｒｉｎｓ
ｉｃ型のファイバセンサとが挙げられる。ｉｎｔｒｉｎ
ｓｉｃ型のファイバセンサは、クラッドにドープされた
物質の光学的な吸収特性が化学反応によって変化するこ
とを利用したものであり、ｅｘｔｒｉｎｓｉｃ型のファ
イバセンサは、化学反応による反射光の強度変化あるい
は、蛍光の変化等を利用したものである。2. Description of the Related Art As a special fiber measuring means, there is a fiber sensor utilizing a chemical phenomenon as well as a measuring means in a bad environment such as a high temperature environment or a radiation environment.
Applications of this type of fiber sensor include gas concentration, p
The main measurements are H and humidity. The structure can be roughly classified into an intrinsic fiber sensor doped with a substance that causes a chemical reaction in the core or clad, and an extrins provided with an appropriate sensor element at the fiber tip.
and an ic type fiber sensor. intrin
The sic type fiber sensor utilizes the fact that the optical absorption characteristics of a substance doped in the clad change due to a chemical reaction, and the extrinsic type fiber sensor changes the intensity of reflected light due to a chemical reaction or This is based on a change in fluorescence or the like.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、光ファ
イバを利用した前述の水素ガスセンサは、測定子部が非
常に細く、折れやすく、こわれやすいので取り扱いが面
倒であった。また、湿度が増加することにより水素検出
感度が鈍るという問題があった。However, the above-mentioned hydrogen gas sensor using an optical fiber has a troublesome handling because the probe is very thin, easily broken, and easily broken. In addition, there is a problem that the sensitivity of hydrogen detection is reduced due to an increase in humidity.
【０００４】そこで、本発明の目的は、上記課題を解決
し、取り扱いが容易な水素ガスセンサを提供することに
ある。Therefore, an object of the present invention is to solve the above problems and to provide a hydrogen gas sensor which is easy to handle.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に本発明の水素ガスセンサは、光導波路からなり、分岐
側を固定端とし、合流側を自由端とする片持ち梁状の光
分岐器と、光分岐器の上部クラッド側に貼り合わされ、
水素を吸収すると膨張する膨張薄膜と、光分岐器の合流
側の端面に設けられ合流側の光導波路から出射した光を
合流側の光導波路に戻す反射鏡と、光分岐器の分岐側の
端面の一方の光導波路に接続された発光素子と、光分岐
器の分岐側の端面の他方の光導波路に接続された受光素
子とを備えたものである。In order to achieve the above object, a hydrogen gas sensor according to the present invention comprises a light waveguide, and has a cantilevered optical splitter having a fixed end on a branch side and a free end on a merging side. And is bonded to the upper cladding side of the optical splitter,
An expanding thin film that expands when hydrogen is absorbed, a reflecting mirror provided on an end face on the merging side of the optical splitter and returning light emitted from the optical waveguide on the merging side to the optical waveguide on the merging side, and an end face on the branch side of the optical splitter And a light-receiving element connected to the other optical waveguide on the branch-side end face of the optical splitter.
【０００６】上記構成に加え本発明の水素ガスセンサの
膨張薄膜はパラジウムと、銀又は金とからなるのが好ま
しい。[0006] In addition to the above configuration, the expanded thin film of the hydrogen gas sensor of the present invention is preferably made of palladium, silver or gold.
【０００７】上記構成に加え本発明の水素ガスセンサ
は、光分岐器の下部クラッド側に応力付与母材を設ける
のが好ましい。[0007] In addition to the above configuration, in the hydrogen gas sensor of the present invention, it is preferable to provide a stress applying base material on the lower clad side of the optical branching device.
【０００８】本発明の水素ガスセンサの測定子は、パラ
ジウム（Ｐｄ）＋（銀（Ａｇ）（又は金（Ａｕ））／ク
ロム（Ｃｒ）／直線偏波型導波路という構造を有してい
る。この測定子に用いられるＣｒは、Ｐｄ＋（Ａｇ又は
Ａｕ）と直線偏波型導波路との密着性を高めるために数
十Å程度の薄さに蒸着される。Ｐｄ＋（Ａｇ又はＡｕ）
は、ＰｄにＡｇ又はＡｕを添加し、合金としたものであ
り、Ａｇ（又はＡｕ）によりＰｄの触媒効果を抑制す
る。導波路部分には直線偏波保存性を持たせるため、Ｐ
ｄ＋Ａｇ（又はＡｕ）蒸着面の反対側のクラッド部にＢ
2Ｏ3をドープしたＳｉＯ2 を用い、クラッド部にＳｉＯ
2 を用い、コア部にＧｅＯ2 又はＴｉＯ2をドープした
ＳｉＯ2 を用いる。The measuring element of the hydrogen gas sensor of the present invention has a structure of palladium (Pd) + (silver (Ag) (or gold (Au)) / chromium (Cr) / linearly polarized waveguide. Cr used for this probe is deposited to a thickness of about several tens of mm to enhance the adhesion between Pd + (Ag or Au) and the linearly polarized waveguide.
Is obtained by adding Ag or Au to Pd to form an alloy, and Ag (or Au) suppresses the catalytic effect of Pd. In order to have linear polarization preserving property in the waveguide portion, P
B on the cladding opposite to the d + Ag (or Au) deposition surface
Using SiO 2 doped with 2 O 3 ,
With 2, using the SiO 2 doped with GeO 2 or TiO 2 in the core unit.
【０００９】また、導波路基板の厚さは、基板の曲げが
発生する程度に薄くしなければならないため、〜５００
μｍ 程度とする必要がある。Further, since the thickness of the waveguide substrate must be small enough to cause bending of the substrate,
It is necessary to be about μm.
【００１０】本発明によれば、測定子としての光導波路
と膨張薄膜とが貼り合わされた構造を有しているので、
裸光ファイバが露出した従来構造に比べて強度が高い。
しかも、光導波路と膨張薄膜とが片持ち梁状構造を有し
ているので、測定子の膨張薄膜にかかるストレスが小さ
い。また、光導波路の固定端側に発光素子や受光素子を
並列に配置することができるので、小型化することがで
きる。[0010] According to the present invention, since the optical waveguide as the measuring element and the expansion thin film are bonded together,
The strength is higher than the conventional structure in which the bare optical fiber is exposed.
Moreover, since the optical waveguide and the inflatable thin film have a cantilever structure, the stress applied to the inflatable thin film of the tracing stylus is small. Further, since the light emitting element and the light receiving element can be arranged in parallel on the fixed end side of the optical waveguide, the size can be reduced.
【００１１】[0011]
【発明の実施の形態】以下、本発明の実施の形態を添付
図面に基づいて詳述する。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
【００１２】図１（ａ）は本発明の水素ガスセンサの測
定子の一実施の形態を示す断面図であり、図１（ｂ）は
図１（ａ）のＡ−Ａ線断面図である。FIG. 1A is a sectional view showing an embodiment of a probe of the hydrogen gas sensor according to the present invention, and FIG. 1B is a sectional view taken along line AA of FIG. 1A.
【００１３】測定子１は、光導波路２からなり、分岐導
波路２ａ、２ｂ側（図１（ａ）では左側）を固定端と
し、合流導波路２ｃ側（図１（ｂ）では右側）を自由端
とする片持ち梁状の光分岐器３と、光分岐器３の上部ク
ラッド４に貼り合わされ、水素を吸収すると膨張する膨
張薄膜５と、光分岐器３の合流導波路２ｃ側の端面に設
けられ合流導波路２ｃから出射した光を合流導波路２ｃ
に戻す反射鏡６とで構成されている。The tracing stylus 1 is composed of an optical waveguide 2, and the branch waveguides 2a and 2b sides (the left side in FIG. 1A) are fixed ends, and the merging waveguide 2c side (the right side in FIG. 1B). A cantilever-shaped optical splitter 3 having a free end, an expanding thin film 5 bonded to the upper clad 4 of the optical splitter 3 and expanding when absorbing hydrogen, and an end face of the optical splitter 3 on the side of the merging waveguide 2c The light emitted from the merging waveguide 2c is provided to the merging waveguide 2c.
And a reflecting mirror 6 for returning to.
【００１４】膨張薄膜５は、主成分としてのＰｄと、Ｐ
ｄの水素に対する触媒効果を押さえるためのＡｇ（又は
Ａｕ）とからなっている。The expanded thin film 5 is composed of Pd as a main component and Pd
Ag (or Au) for suppressing the catalytic effect of d on hydrogen.
【００１５】光導波路２は、ＳｉＯ2からなる下部クラ
ッド７ａ、７ｂと、下部クラッド７ａ、７ｂ上に形成さ
れＧｅＯ2（又はＴｉＯ2）をドープしたＳｉＯ2からな
る矩形断面形状のコア８と、ＳｉＯ2からなり下部クラ
ッド７ｂ及びコア８を覆う上部クラッド４とで構成され
ている。The optical waveguide 2, a lower clad 7a formed of SiO 2, and 7b, the lower clad 7a, formed on 7b GeO 2 (or TiO 2) core 8 of a rectangular cross-sectional shape composed of SiO 2 doped with, The lower clad 7b is made of SiO 2 and the upper clad 4 covers the core 8.
【００１６】下部クラッド７ａ、７ｂ内には、Ｂ2Ｏ3と
ＳｉＯ2とからなる応力付与母材（ＳｉＯ2に比べて熱膨
張率が大きい材質）９が設けられている。In the lower claddings 7a and 7b, a stress applying base material (a material having a higher thermal expansion coefficient than SiO 2 ) 9 made of B 2 O 3 and SiO 2 is provided.
【００１７】上部クラッド４の上には、膨張薄膜５と光
導波路２との接着性を高めるためのＣｒ膜１０が形成さ
れている。尚、膨張薄膜５及びＣｒ膜１０は真空蒸着に
より形成される。On the upper cladding 4, a Cr film 10 for improving the adhesion between the expansion thin film 5 and the optical waveguide 2 is formed. The expanded thin film 5 and the Cr film 10 are formed by vacuum evaporation.
【００１８】図２は図１に示した測定子に発光素子及び
受光素子を接続した水素ガスセンサの平面図である。FIG. 2 is a plan view of a hydrogen gas sensor in which a light emitting element and a light receiving element are connected to the probe shown in FIG.
【００１９】図１に示す測定子の分岐側の光導波路２
ａ、２ｂのうちの一方（図では上側）の光導波路２ａに
は発光素子（例えばレーザダイオード、以下「ＬＤ」と
いう。）１１が接続され、測定子の分岐側の光導波路２
ａ、２ｂのうちの他方（図では下側）の光導波路２ｂに
は受光素子（例えばフォトダイオード、以下「ＰＤ」と
いう。）１２が接続されている。The optical waveguide 2 on the branch side of the tracing stylus shown in FIG.
A light emitting element (for example, a laser diode, hereinafter referred to as “LD”) 11 is connected to one (upper side in the figure) of the optical waveguides 2 a and 2 b, and the optical waveguide 2 on the branch side of the tracing stylus.
A light receiving element (for example, a photodiode, hereinafter, referred to as “PD”) 12 is connected to the other (lower side in the figure) optical waveguide 2b of a and 2b.
【００２０】図３は水素導入による測定子の変化を示す
説明図であり、図４は図１に示した測定子が水素を吸収
した状態を示す断面図である。FIG. 3 is an explanatory view showing a change in the measuring element due to the introduction of hydrogen, and FIG. 4 is a sectional view showing a state in which the measuring element shown in FIG. 1 has absorbed hydrogen.
【００２１】図１に示した測定子１に水素を導入する
（測定子１を水素雰囲気中に晒す）と、Ｐｄが水素を吸
収して膨張薄膜５が膨張するが、光導波路は膨張しない
ので、測定子はいわばバイメタルのように変形する。そ
の結果、測定子１の自由端が図４に示したように変位す
る（図３、ステップＳ１）。When hydrogen is introduced into the tracing stylus 1 shown in FIG. 1 (exposing the tracing stylus 1 to a hydrogen atmosphere), Pd absorbs hydrogen and the expanding thin film 5 expands, but the optical waveguide does not expand. The probe deforms like a bimetal. As a result, the free end of the tracing stylus 1 is displaced as shown in FIG. 4 (FIG. 3, step S1).
【００２２】このため、応力付与母材９が応力により収
縮し、導波路の損失が増加する（図３、ステップＳ
２）。For this reason, the stress applying base material 9 contracts due to the stress, and the loss of the waveguide increases (FIG. 3, step S).
2).
【００２３】従って、ＰＤ１２の出力電圧が減少するの
で、この減少を以て水素ガスを検知することができる
（図３、ステップＳ２）。Accordingly, since the output voltage of the PD 12 decreases, hydrogen gas can be detected based on this decrease (FIG. 3, step S2).
【００２４】ここで、本発明の水素ガスセンサは、測定
子１の微小変位を検出することから、測定子１に微小変
位（物理的変位）を及ぼす要因に対する検知であれば、
応用範囲は広がる。例えば、Ｐｄ／Ｃｒ／導波路基板構
造の測定子１にＰｄ／Ｃｒ等を蒸着しなくても、振動検
出等に応用することができる。また測定子１に温度又は
湿度により形状変化する物質を用いれば、温度センサあ
るいは湿度センサに応用できる。Here, since the hydrogen gas sensor of the present invention detects a minute displacement of the probe 1, if it is a detection of a factor that exerts a small displacement (physical displacement) on the probe 1,
The range of applications expands. For example, the present invention can be applied to vibration detection and the like without depositing Pd / Cr or the like on the probe 1 having a Pd / Cr / waveguide substrate structure. If a material that changes its shape according to temperature or humidity is used for the probe 1, it can be applied to a temperature sensor or a humidity sensor.
【００２５】ここで、従来の光ファイバ応用水素ガスセ
ンサは、測定子が裸光ファイバのため、非常に折れやす
く、また、湿度による感度低下が懸念されるが、本発明
の直線偏波保存型導波路を用いた水素ガスセンサ１は、
表面積が大きく、ある程度の厚さを有しているので、従
来の水素ガスセンサに比べて丈夫である。また、片持ち
梁状構造を有しているため、測定子１にかかるストレス
も小さい。さらに、固定端側にＬＤ１１やＰＤ１２を並
列配置することができ、コンパクト化することができ
る。Here, the conventional optical fiber hydrogen gas sensor is very easy to break because the probe is a bare optical fiber, and there is a concern that the sensitivity may decrease due to humidity. Hydrogen gas sensor 1 using a wave path
Since it has a large surface area and a certain thickness, it is more robust than a conventional hydrogen gas sensor. In addition, since it has a cantilever structure, the stress applied to the tracing stylus 1 is small. Further, the LD 11 and the PD 12 can be arranged in parallel on the fixed end side, and the size can be reduced.
【００２６】[0026]
【発明の効果】以上要するに本発明によれば、次のよう
な優れた効果を発揮する。In summary, according to the present invention, the following excellent effects are exhibited.
【００２７】取り扱いが容易な水素ガスセンサを提供す
ることができる。A hydrogen gas sensor that can be easily handled can be provided.
【図１】（ａ）は本発明の水素ガスセンサの測定子の一
実施の形態を示す断面図であり、（ｂ）は（ａ）のＡ−
Ａ線断面図である。FIG. 1A is a cross-sectional view showing one embodiment of a probe of the hydrogen gas sensor of the present invention, and FIG.
FIG. 3 is a sectional view taken along line A.
【図２】図１に示した測定子に発光素子及び受光素子を
接続した水素ガスセンサの平面図である。FIG. 2 is a plan view of a hydrogen gas sensor in which a light emitting element and a light receiving element are connected to the probe shown in FIG.
【図３】水素導入による測定子の変化を示す説明図であ
る。FIG. 3 is an explanatory diagram showing a change in a probe due to hydrogen introduction.
【図４】図１に示した測定子が水素を吸収した状態を示
す断面図である。FIG. 4 is a cross-sectional view showing a state in which the probe shown in FIG. 1 has absorbed hydrogen.
１ 測定子 ２ 光導波路 ２ａ、２ｂ 分岐導波路 ２ｃ 合流導波路 ３ 光分岐器 ４ 上部クラッド ５ 膨張薄膜 ６ 反射鏡 ７ａ、７ｂ 下部クラッド ８ コア ９ 応力付与母材 １０ Ｃｒ膜 DESCRIPTION OF SYMBOLS 1 Measuring element 2 Optical waveguide 2a, 2b Branch waveguide 2c Merging waveguide 3 Optical splitter 4 Upper clad 5 Expansion thin film 6 Reflector 7a, 7b Lower clad 8 Core 9 Stress applying base material 10 Cr film
Claims (3)
し、合流側を自由端とする片持ち梁状の光分岐器と、該
光分岐器の上部クラッド側に貼り合わされ、水素を吸収
すると膨張する膨張薄膜と、上記光分岐器の合流側の端
面に設けられ合流側の光導波路から出射した光を該合流
側の光導波路に戻す反射鏡と、上記光分岐器の分岐側の
端面の一方の光導波路に接続された発光素子と、上記光
分岐器の分岐側の端面の他方の光導波路に接続された受
光素子とを備えたことを特徴とする水素ガスセンサ。1. A cantilever-shaped optical splitter comprising an optical waveguide, having a fixed end on a branch side and a free end on a merging side, and bonded to an upper clad side of the optical splitter to absorb hydrogen. An expanding thin film that expands, a reflecting mirror that is provided on the end surface on the merging side of the optical splitter and returns the light emitted from the optical waveguide on the merging side to the optical waveguide on the merging side, and an end surface on the branch side of the optical splitter. A hydrogen gas sensor comprising: a light-emitting element connected to one optical waveguide; and a light-receiving element connected to the other optical waveguide on an end surface on the branch side of the optical splitter.
とからなる請求項１に記載の水素ガスセンサ。2. The hydrogen gas sensor according to claim 1, wherein the expanded thin film is made of palladium and silver or gold.
与母材を設けた請求項１又は２に記載の水素ガスセン
サ。3. The hydrogen gas sensor according to claim 1, wherein a stress-imparting base material is provided on a lower clad side of the optical branching device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001129666A JP4026325B2 (en) | 2001-04-26 | 2001-04-26 | Hydrogen gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001129666A JP4026325B2 (en) | 2001-04-26 | 2001-04-26 | Hydrogen gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002323441A true JP2002323441A (en) | 2002-11-08 |
| JP4026325B2 JP4026325B2 (en) | 2007-12-26 |
Family
ID=18978156
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001129666A Expired - Fee Related JP4026325B2 (en) | 2001-04-26 | 2001-04-26 | Hydrogen gas sensor |
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| Country | Link |
|---|---|
| JP (1) | JP4026325B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2008039658A (en) * | 2006-08-09 | 2008-02-21 | Canon Inc | Combustible gas detector, method of manufacturing combustible gas detector, and fuel cell system loaded with combustible gas detector |
| CN100401041C (en) * | 2005-06-09 | 2008-07-09 | 上海交通大学 | Light waveguide absorption type gas sensor and measuring system |
| CN105758800A (en) * | 2016-03-07 | 2016-07-13 | 复旦大学 | Flexible film based optical hydrogen detector and preparation method thereof |
| JP7304606B2 (en) | 2017-08-10 | 2023-07-07 | 国立研究開発法人物質・材料研究機構 | Hydrogen sensor and hydrogen detection method using membrane-type surface stress sensor |
-
2001
- 2001-04-26 JP JP2001129666A patent/JP4026325B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100401041C (en) * | 2005-06-09 | 2008-07-09 | 上海交通大学 | Light waveguide absorption type gas sensor and measuring system |
| JP2008039658A (en) * | 2006-08-09 | 2008-02-21 | Canon Inc | Combustible gas detector, method of manufacturing combustible gas detector, and fuel cell system loaded with combustible gas detector |
| CN105758800A (en) * | 2016-03-07 | 2016-07-13 | 复旦大学 | Flexible film based optical hydrogen detector and preparation method thereof |
| JP7304606B2 (en) | 2017-08-10 | 2023-07-07 | 国立研究開発法人物質・材料研究機構 | Hydrogen sensor and hydrogen detection method using membrane-type surface stress sensor |
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| JP4026325B2 (en) | 2007-12-26 |
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