CN1696662A - Light waveguide absorption type gas sensor and measuring system - Google Patents
Light waveguide absorption type gas sensor and measuring system Download PDFInfo
- Publication number
- CN1696662A CN1696662A CN 200510026598 CN200510026598A CN1696662A CN 1696662 A CN1696662 A CN 1696662A CN 200510026598 CN200510026598 CN 200510026598 CN 200510026598 A CN200510026598 A CN 200510026598A CN 1696662 A CN1696662 A CN 1696662A
- Authority
- CN
- China
- Prior art keywords
- gas sensor
- glass sheet
- upper strata
- absorption type
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
An air transducer of light waveguide absorption type consists of metal film and optical glass plate at top layer and bottom layer, seat pad, platform and spiral micrometer. The measuring system consists of said transducer, laser source, light signal detecting and processing unit. In the system, the metal film is deposited on glass plate which is placed on platform one by one, the laser source is used to form guidewave and photoelectric diode array is used to detect out light strength variation of outgoing light so as to know variation of air composition in air chamber.
Description
Technical field
What the present invention relates to is a kind of sensor of surveying instrument technical field and by its system that forms, particularly a kind of light waveguide absorption type gas sensor structure and measuring system based on free space coupling of not having prism.
Background technology
Gas sensor has a wide range of applications in fields such as environmental monitoring, production process monitoring, gas ingredients analysis and gas leakage alarms.Gas sensor commonly used at present mainly is divided into several big classes such as electricity, optics, galvanochemistry class by principle.Wherein, a kind of novel optical sensor that fiber gas sensor occurred after the eighties, it is to utilize gas to differentiate gas and analyze its concentration at the characteristic spectral line of infrared band.Its measuring principle is: the characteristic infrared absorption spectrum difference of gas with various, in certain concentration range, the infrared absorbency value of every kind of gas and the concentration of gas are linear.This sensor generally by distributed feed-back formula (DFB) laser instrument as excitaton source, light is by Optical Fiber Transmission and by an air chamber because the absorption of gas, light intensity can decay, and just can measure the concentration value of gas according to the ratio of decay.Because optical fiber itself, this class sensor has highly sensitive, advantages such as response speed is fast, anti-electromagnetic interference (EMI).Shortcoming is: 1. use distributed feed-back formula (DFB) laser instrument, and the physique costliness, system cost is higher.2. use optical fiber transmission signal, the frequency of light signal must be in the low loss window of optical fiber, therefore requires the characteristic frequency of gas also must be in this scope, and this gaseous species that makes this sensor to survey is limited.
Find by prior art documents, the Chinese patent publication number is: 1396445A, name is called: dual-surface metal waveguide measuring method and device thereof, proposed in this patent of invention to coat waveguide as sensing element with double-sided metal, and realize measurement to the ducting layer medium composition.This dual-surface metal waveguide device utilizes coupled apparatus such as prism that laser is coupled into the sensor detection cavity from the outside, utilizes the advantageous property of metal carbonyl coat to realize surveying.But owing to adopt prism structure, make device miniaturization and utilize guided wave high-order mode aspect that certain difficulty is arranged.Because its spy is measured as the variation of ducting layer medium refraction index, this makes to measure that sample is not had selectivity, can not use as gas analysis instrument in addition.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of optical waveguide gas absorption formula sensor and measuring system are provided.Make it need not coupled apparatus, incident light is in the incident of low-angle place, thereby utilizes the highly sensitive good characteristic of waveguide high-order mode and realize the selectivity of sample is surveyed the sensitivity that further reduces cost, improves instrument simultaneously.
The present invention is achieved by the following technical solutions, technical solution of the present invention one is: light waveguide absorption type gas sensor comprises: upper strata metal film, upper strata optical glass sheet, air chamber, lower metal film, lower floor's optical glass sheet, platform, cushion block, screw-thread micrometer.The upper strata metal film deposition is in the outside of upper strata optical glass sheet, and lower metal film is deposited on the inboard of lower floor's optical glass sheet.Place annular gasket in the middle of two optical glass sheets and form air chamber, the pad side has two apertures symmetrically, respectively as air intake opening and gas outlet.Each several part is placed on the platform successively according to the order of upper strata metal film, upper strata optical glass sheet, pad, lower metal film, lower floor's optical glass sheet, cushion block, and pushes against by cushion block with screw-thread micrometer.Optical glass sheet and air chamber constitute the ducting layer that double-sided metal coats waveguide jointly at the middle and upper levels for they.Gaseous sample to be measured enters air chamber by air intake opening, discharges by the gas outlet.
Technical solution of the present invention two is: the measuring system by light waveguide absorption type gas sensor is formed comprises: light waveguide absorption type gas sensor, excitation source part and optical signal detection and processing section.The homonymy of light waveguide absorption type gas sensor is fixed in excitation source part and optical signal detection and processing section, the position of excitation source should guarantee that laser injects the center of gas sensor from front low-angle (about 4 °), and optical signal detection and processing section are positioned at the outgoing position of laser from gas sensor.Excitation source is injected light waveguide absorption type gas sensor in the fixed position with certain convergent angle, is received by detector after the light signal guided wave layer gas modulation and is handled by computing machine.
Described excitation source part comprises: semiconductor laser, optics aperture, first lens, second lens.The reference frequency output of semiconductor laser should comprise the characteristic frequency of gas to be measured.Each device place successively and axle such as assurance with high.The light that semiconductor laser sends expands bundle by inject first lens after the filtering of optics aperture, forms convergent beam again and enter sensor behind second lens.
Described acquisition of signal and processing section, comprise: photodiode array and computing machine, convergent beam forms the diffusion light beam behind the laser emitting and enters photodiode array, electric signal is surveyed and be converted into to the intensity level of different angles by photodiode array, the digital to analog converter of computing machine (A/D) links to each other by lead with the photodiode array, is to carry out analyzing and processing by computing machine after the digital signal with electrical signal conversion.
Because the monochromaticity of general semiconductor laser instrument is bad, obtains the exciting light that is complementary with gaseous absorption line in order to utilize semiconductor laser, at first utilizes spectroanalysis instrument to determine the optimized incidence of laser.Utilize double-sided metal to coat the filter function of waveguide, the incident angle of fine setting laser is complementary spectral absorption line and gaseous absorption line to be measured, and fixed laser and sensor can obtain the highest sensitivity during then with this angle incident.Add optics aperture, first lens, second lens adjustment light path this moment, form a convergent beam of assembling angle (about 1 °) and inject light waveguide absorption type gas sensor, photodiode array will detect the guided wave peak in this convergence angle scope, and computing machine then can write down the minimum point light intensity value at guided wave peak.When sample gas enters air chamber by air intake opening, because the absorption of gas, obvious variation will take place in the light intensity value of guided wave peak minimum point, just can be finally inversed by the concentration value of gas by the light intensity value of monitoring minimum point.Owing to utilized the good characteristic of superelevation rank guided modes and the filter function that two-sided coating waveguide self has, the precision of this detector can improve one more than the order of magnitude than conventional detector.
Optical waveguide gas sensor of the present invention has the following advantages: based on free space coupling, need not prism as coupling unit, because of can realize small angle measurement and detecting element miniaturization; Ducting layer thickness can reach a millimeter magnitude, has not only enlarged the volume of air chamber, also makes and utilizes the superelevation rank guided mode of guided wave to become possibility; Ducting layer comprises one deck thin glass plate, and thermonoise is had certain inhibiting effect; Made full use of double-sided metal and coated the filter function that waveguide had, adopted the general semiconductor laser instrument to go out the excitaton source that is complementary with gaseous absorption line, thereby avoid using the expensive distribution send out feedback formula laser instrument with regard to tunable; Total is fixed, need not adjust in the use, and the interference that can avoid mechanical vibration to cause, and be beneficial to integrated; Utilize the characteristic absorption level of gas to measure, what make detector has accurate selectivity to gas; Sample gas is in the very big oscillating field of luminous energy density, and the sensitivity of detection is high.The present invention realizes the analysis and the measurement of gas with new method, and is simple in structure, good to the selectivity of gas, measures highly sensitively, practical, and certain market application foreground is arranged.
Fig. 1 light waveguide absorption type gas sensor structural representation of the present invention
Fig. 2 light waveguide absorption type gas sensor vertical view of the present invention
Fig. 3 light waveguide absorption type gas sensor front view of the present invention
Fig. 4 measuring system synoptic diagram of the present invention
Embodiment
As Fig. 1-shown in Figure 4, light waveguide absorption type gas sensor 1 of the present invention comprises: upper strata metallic film 4, upper strata optical glass sheet 5, air chamber 6, lower metal film 7, lower floor's optical glass sheet 8, air intake opening 9, gas outlet 10, cushion block 11, platform 12, screw-thread micrometer 13.Upper strata metal film 4 is deposited on the upper strata optical glass sheet 5, and toward the outer side; Lower metal film 7 is deposited on lower floor's glass sheet 8, and towards the inboard.Place the pad that has two apertures of hollow between two glass sheet, two apertures are used separately as air intake opening 9 and gas outlet 10, and hollow space forms air chamber 6.Each several part is successively placed on the platform 12 according to the order of upper strata metallic film 4, upper strata optical glass sheet 5, air chamber 6, lower metal film 7, lower floor's optical glass sheet 8, cushion block 11, and uses the screw-thread micrometer 13 that links together with platform 12 to push against.Upper strata metallic film 4, upper strata optical glass sheet 5, air chamber 6, lower metal film 7 constitutes double-sided metals and coats waveguiding structures, its at the middle and upper levels optical glass sheet 5 be ducting layer with air chamber 6.
The measuring system that light waveguide absorption type gas sensor is formed comprises: light waveguide absorption type gas sensor 1, excitation source part 2 and optical signal detection and processing section 3.The homonymy of light waveguide absorption type gas sensor 1 is fixed in excitation source part 2 and optical signal detection and processing section 3, the position of excitation source part 2 should guarantee that laser injects the center of gas sensor 1 from front low-angle (about 4 °), and optical signal detection and processing section 3 are positioned at the outgoing position of laser from gas sensor.The each several part centre-height keeps equating.
Excitation source part 2 comprises semiconductor laser 14, optics aperture 15, first lens 16, second lens 17, each device place successively and axle such as maintenance with high.At first utilize spectroanalysis instrument about 4 °, to determine the optimized incidence of semiconductor laser 14, the fixing position of semiconductor laser 14 and gas sensor 1 then, convergent angle about the position that adds optics aperture 15, first lens 16, second lens 17 between semiconductor laser 14 and the gas sensor 1 and adjust them makes emergent light with 1 ° is injected the center of gas sensor, fixed optics aperture 15, first lens 16, second lens 17 then.
Optical signal detection and processing section 3 comprise photodiode array 18 and computing machine 19, convergent beam is got on the photodiode array 18 with the identical angle of divergence after light waveguide absorption type gas sensor 1 outgoing, and photodiode array 18 writes down each point light intensity value (guided wave peak) and is transported to computing machine 19 and handles.When gas concentration value to be measured changed in the air chamber, then the each point light intensity value of photodiode array 18 records changed, and analyzes by the size to light intensity, just can be finally inversed by the situation of change of gas concentration.
1 one-tenth fixing angle of laser that semiconductor laser 14 sends and light waveguide absorption type gas sensor, the big I of angle is determined by spectroanalysis instrument.The principle of determining is to make with the guided wave resonant frequency of the laser of this angle incident and the absorption frequency of gas to be measured to be complementary.
What photodiode array 18 write down is the light intensity value of each angle correspondence, when gas concentration value to be measured changes in the air chamber, then the each point light intensity value of photodiode array 18 records changes, and analyzes by the size to light intensity, just can be finally inversed by the situation of change of gas concentration.
Claims (4)
1, a kind of optical waveguide gas sensor based on the free space coupling, comprise: upper strata metallic film (4), upper strata optical glass sheet (5), air chamber (6), lower metal film (7), lower floor's optical glass sheet (8), air intake opening (9), gas outlet (10), cushion block (11), platform (12), screw-thread micrometer (13), it is characterized in that, upper strata metallic film (4) is deposited on the upper strata optical glass sheet (5), and toward the outer side; Lower metal film (7) is deposited on lower floor's glass sheet (8), and towards the inboard, place the pad that has two apertures of hollow between two glass sheet, two apertures are used separately as air intake opening (9) and gas outlet (10), hollow space forms air chamber (6), each several part is according to upper strata metallic film (4), upper strata optical glass sheet (5), air chamber (6), lower metal film (7), lower floor's optical glass sheet (8), the order of cushion block (11) is successively placed on the platform (12), and use the screw-thread micrometer (13) that links together with platform (12) to push against, upper strata metallic film (4), upper strata optical glass sheet (5), air chamber (6), lower metal film (7) constitutes double-sided metal and coats waveguiding structure, its at the middle and upper levels optical glass sheet (5) be ducting layer with air chamber (6).
2, a kind of by the measuring system of forming based on the optical waveguide gas sensor of free space coupling, comprise: light waveguide absorption type gas sensor (1), excitation source part (2) and optical signal detection and processing section (3), it is characterized in that, the homonymy of light waveguide absorption type gas sensor (1) is fixed in excitation source part (2) and optical signal detection and processing section (3), and guarantee that the each several part centre-height equates, excitation source part (2) comprises semiconductor laser (14), optics aperture (15), first lens (16), second lens (17), each device place successively and axle such as maintenance with high, the laser that semiconductor laser (14) sends enters first lens (16) after optics aperture (15) filtering, optics aperture (15) is in first lens (16) focus inboard, so have the angle of divergence from the light of first lens (16) outgoing, focus on through convergent lens (17) again and form the ducting layer that convergent beam is injected light waveguide absorption type gas sensor (1), the position of adjusting aperture and lens makes convergent angle at 1 degree, optical signal detection and processing section (3) comprise photodiode array (18) and computing machine (19), convergent beam is got on the photodiode array (18) with the identical angle of divergence after light waveguide absorption type gas sensor 1 outgoing, and photodiode array (18) writes down the each point light intensity value and is transported to computing machine (19) and handles.
3, the measuring system of forming based on the optical waveguide gas sensor of free space coupling according to claim 2, it is characterized in that, the angle that the laser that semiconductor laser (14) sends and light waveguide absorption type gas sensor (1) become to fix, the big I of angle determines by spectroanalysis instrument, and the principle of determining is to make with the guided wave resonant frequency of the laser of this angle incident and the absorption frequency of gas to be measured to be complementary.
4, the measuring system of forming based on the optical waveguide gas sensor of free space coupling according to claim 2, it is characterized in that, what photodiode array (18) write down is the light intensity value of each angle correspondence, when gas concentration value to be measured changes in the air chamber, then the each point light intensity value of photodiode array (18) record changes, analyze by size, just can be finally inversed by the situation of change of gas concentration light intensity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100265982A CN100401041C (en) | 2005-06-09 | 2005-06-09 | Light waveguide absorption type gas sensor and measuring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100265982A CN100401041C (en) | 2005-06-09 | 2005-06-09 | Light waveguide absorption type gas sensor and measuring system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1696662A true CN1696662A (en) | 2005-11-16 |
| CN100401041C CN100401041C (en) | 2008-07-09 |
Family
ID=35349484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100265982A Expired - Fee Related CN100401041C (en) | 2005-06-09 | 2005-06-09 | Light waveguide absorption type gas sensor and measuring system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100401041C (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102323227A (en) * | 2011-06-13 | 2012-01-18 | 上海理工大学 | Spectrum sensing test method for concentration of biological solution |
| CN102478389A (en) * | 2010-11-26 | 2012-05-30 | 上海光刻电子科技有限公司 | Method for measuring thickness of metal film of lithographic mask |
| CN102692392A (en) * | 2011-03-25 | 2012-09-26 | 上海光刻电子科技有限公司 | Device for measuring gas and liquid refractive indexes |
| CN103822911A (en) * | 2013-12-11 | 2014-05-28 | 华东交通大学 | Raman spectrum enhancing device based on optical waveguide oscillating field sensor |
| CN104251843A (en) * | 2013-06-28 | 2014-12-31 | 中国科学院化学研究所 | Optical waveguide gas-sensitive device, preparation method thereof, measure system and chemical gas detection method |
| CN104880415A (en) * | 2015-06-01 | 2015-09-02 | 南京先进激光技术研究院 | Thin film gas sensor |
| CN105043930A (en) * | 2015-07-24 | 2015-11-11 | 中国电子科技集团公司第四十九研究所 | Detection device and method for metal steam atomic density of microstructure alkali metal gas chambers |
| CN106066315A (en) * | 2015-04-23 | 2016-11-02 | 光子科学研究所基金会 | For characterizing and quantify the picking images of microgranule sample |
| CN107179311A (en) * | 2017-06-27 | 2017-09-19 | 复拓科学仪器（苏州）有限公司 | Waveguide Raman scattering chamber based on couple prism twice |
| CN107764795A (en) * | 2017-12-06 | 2018-03-06 | 安徽昱远智能科技有限公司 | A kind of explosive fluorescence spectrum survey meter |
| CN107764778A (en) * | 2017-08-25 | 2018-03-06 | 复拓科学仪器（苏州）有限公司 | Zero group velocity resonance biological interaction of molecules detection method and detection means |
| CN110452809A (en) * | 2013-11-17 | 2019-11-15 | 宽腾矽公司 | The instrument being connect with measurement chip by interface |
| CN110501781A (en) * | 2019-08-30 | 2019-11-26 | 北京智芯微电子科技有限公司 | The forming method of waveguide and SF6 gas passive sensor comprising the waveguide |
| CN114659989A (en) * | 2022-02-15 | 2022-06-24 | 江西师范大学 | SF applied to circuit breaker6Device and method for high-sensitivity detection of gas |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967593B (en) * | 2012-11-28 | 2016-06-01 | 南通大学 | The method of optical waveguide enhancement mechanism and Raman spectrometer |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8813307D0 (en) * | 1988-06-06 | 1988-07-13 | Amersham Int Plc | Biological sensors |
| GB2248497B (en) * | 1990-09-26 | 1994-05-25 | Marconi Gec Ltd | An optical sensor |
| WO1995020151A2 (en) * | 1994-01-21 | 1995-07-27 | Fci-Fiberchem, Inc. | Reducing the effects of water vapor and liquid water on optical waveguide sensors (ows) and optical waveguide chemical sensors (owcs) |
| FR2752055B1 (en) * | 1996-08-02 | 1998-09-11 | Commissariat Energie Atomique | EVANESCENT WAVE TUBULAR SENSOR FOR MOLECULAR ABSORPTION SPECTROSCOPY |
| JP4026325B2 (en) * | 2001-04-26 | 2007-12-26 | 日立電線株式会社 | Hydrogen gas sensor |
| CN1173166C (en) * | 2002-08-22 | 2004-10-27 | 上海交通大学 | Dual-surface metal waveguide measuring method and its device |
| CN1256576C (en) * | 2003-12-25 | 2006-05-17 | 上海交通大学 | Optical wave guide measuring device and method for micro angular displacement |
| CN1292245C (en) * | 2004-06-24 | 2006-12-27 | 上海交通大学 | Optical waveguide biochemical sensor and measurement system based on free space coupling |
-
2005
- 2005-06-09 CN CNB2005100265982A patent/CN100401041C/en not_active Expired - Fee Related
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478389A (en) * | 2010-11-26 | 2012-05-30 | 上海光刻电子科技有限公司 | Method for measuring thickness of metal film of lithographic mask |
| CN102692392A (en) * | 2011-03-25 | 2012-09-26 | 上海光刻电子科技有限公司 | Device for measuring gas and liquid refractive indexes |
| CN102323227A (en) * | 2011-06-13 | 2012-01-18 | 上海理工大学 | Spectrum sensing test method for concentration of biological solution |
| CN102323227B (en) * | 2011-06-13 | 2013-12-25 | 上海理工大学 | Spectrum sensing test method for concentration of biological solution |
| CN104251843A (en) * | 2013-06-28 | 2014-12-31 | 中国科学院化学研究所 | Optical waveguide gas-sensitive device, preparation method thereof, measure system and chemical gas detection method |
| CN110452809B (en) * | 2013-11-17 | 2022-07-01 | 宽腾矽公司 | Instrument connected with measuring chip through interface |
| CN110452809A (en) * | 2013-11-17 | 2019-11-15 | 宽腾矽公司 | The instrument being connect with measurement chip by interface |
| CN103822911A (en) * | 2013-12-11 | 2014-05-28 | 华东交通大学 | Raman spectrum enhancing device based on optical waveguide oscillating field sensor |
| CN106066315A (en) * | 2015-04-23 | 2016-11-02 | 光子科学研究所基金会 | For characterizing and quantify the picking images of microgranule sample |
| CN106066315B (en) * | 2015-04-23 | 2019-11-26 | 光子科学研究所基金会 | For characterizing and quantifying the picking images of particle sample |
| CN104880415B (en) * | 2015-06-01 | 2018-01-09 | 南京先进激光技术研究院 | A kind of thin film gas sensor |
| CN104880415A (en) * | 2015-06-01 | 2015-09-02 | 南京先进激光技术研究院 | Thin film gas sensor |
| CN105043930A (en) * | 2015-07-24 | 2015-11-11 | 中国电子科技集团公司第四十九研究所 | Detection device and method for metal steam atomic density of microstructure alkali metal gas chambers |
| CN107179311A (en) * | 2017-06-27 | 2017-09-19 | 复拓科学仪器（苏州）有限公司 | Waveguide Raman scattering chamber based on couple prism twice |
| CN107764778A (en) * | 2017-08-25 | 2018-03-06 | 复拓科学仪器（苏州）有限公司 | Zero group velocity resonance biological interaction of molecules detection method and detection means |
| CN107764795A (en) * | 2017-12-06 | 2018-03-06 | 安徽昱远智能科技有限公司 | A kind of explosive fluorescence spectrum survey meter |
| CN110501781A (en) * | 2019-08-30 | 2019-11-26 | 北京智芯微电子科技有限公司 | The forming method of waveguide and SF6 gas passive sensor comprising the waveguide |
| CN114659989A (en) * | 2022-02-15 | 2022-06-24 | 江西师范大学 | SF applied to circuit breaker6Device and method for high-sensitivity detection of gas |
| CN114659989B (en) * | 2022-02-15 | 2024-05-14 | 江西师范大学 | Be applied to circuit breaker SF6Device and method for detecting gas with high sensitivity |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100401041C (en) | 2008-07-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100401041C (en) | Light waveguide absorption type gas sensor and measuring system | |
| CN109839364A (en) | A kind of gas sensor probe and detection device based on multiple spot reflecting helix optical path | |
| CN108931504A (en) | A kind of annular multiple spot reflection type photoelectricity gas sensor probe | |
| US20230324281A1 (en) | Two-dimensional multi-point-reflection long-optical-path gas sensor probe and gas sensor | |
| CN101865840A (en) | Surface plasmon resonance imaging sensing system | |
| CN113433067B (en) | Refractive index sensor based on metal nanometer gap surface plasmon intrinsic radiation | |
| CN103837520A (en) | Optic travelling wave cavity enhanced laser raman gas concentration detection device | |
| CN108169428B (en) | Formaldehyde gas, humidity and temperature integrated monitoring equipment | |
| CN110687064A (en) | Infrared detector and infrared gas sensor | |
| CN111060470A (en) | Gas sensor probe with multipoint reflection rectangular absorption cell and detection device | |
| CN110632008B (en) | Multipoint reflection type photoelectric body sensor probe and photoelectric gas detection device | |
| CN201247048Y (en) | Thickness meter for optical film | |
| CN101294900B (en) | High-fineness cavity surface plasma resonance sensing equipment | |
| CN114706022A (en) | Probe device and magnetometer | |
| CN101059436A (en) | Non-scanning type intelligent digitalized integrated SPR detector | |
| CN108872100A (en) | A kind of multiple enhanced spectrum high-precision ammonia detection device and detection method | |
| CN100412528C (en) | Gas and liquid concentration testing sensor and testing system | |
| CN209446465U (en) | Length scanning index sensor based on unsymmetrical metal cladding Medium Wave Guide | |
| CN1180282C (en) | Temperature compensation sensing apparatus for sputtering palladium on optical fibre grating | |
| CN207717616U (en) | A kind of sensor probe and gas-detecting device | |
| CN113758877B (en) | Frequency domain quantum weak measurement biomolecular sensor and measurement method thereof | |
| CN106198459B (en) | Bioanalysis sensing device based on Nanosurface plasma resonance sensor | |
| CN101281126A (en) | Optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis apparatus | |
| CN106226268A (en) | A kind of porous silicon silicon porous silicon gas sensor based on evanescent wave resonance | |
| CN114152583A (en) | Multi-optical-fiber two-dimensional spectrum analysis device based on CCD detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080709 Termination date: 20110609 |